JP3464296B2 - Pallet jig - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pallet jig for carrying and positioning a work (work) in an automatic assembly line of a semiconductor manufacturing apparatus.

[0002]

2. Description of the Related Art In order to convey a small work on an automatic assembly line, a boat capable of mounting a plurality of works (hereinafter,
"Pallet jig") is used. For example, as shown in FIG. 5, this pallet jig is provided with a pocket 3 larger than the work A in a plate-shaped base 1 and accommodates the work in the pocket 3 to carry the work. Further, when positioning each work together with the transportation, a pallet jig as shown in FIG. 6 is used. The pallet jig is provided with a positioning plate 5 having an integral structure that moves in the lateral direction and a positioning plate 7 having the same structure that moves in the front-rear direction so as to be slidable on a base 9 via guide pins 11. , 7 form a plurality of holding spaces for holding the work A, respectively. When using, positioning plate 5 and positioning plate 7
Is placed in an open state, the work A is mounted in this open space, and then both positioning plates 5 and 7 are closed to carry the workpiece while the positioning is maintained.

[0003]

However, in the pallet jig shown in FIG. 5, since there is a gap between the work A and the pocket 3, the pallet jig is not suitable for conveyance in an automatic assembly line that requires accurate positioning. It was not suitable, and there was a defect that the work A jumped out during conveyance. Further, in the pallet jig shown in FIG. 6, since the positioning plates 5 and 7 are integrally structured,
If one work A has a defective dimension or is tilted, there is a drawback that all the other works A cannot be positioned due to the influence of the work A. Then, the positioning plates 5 and 7 are moved by the frictional force between the positioning pins 5 and 7 and the guide pin 11.
In order to hold the work A, if abrasion occurs due to repeated use, the frictional force decreases, and the work A cannot be tightened at a predetermined gap, and there is a possibility that the work A cannot be held. Furthermore, when the pallet jig provided with the positioning plates 5 and 7 is used in a heating process such as a solder reflow furnace, the positioning plates 5 and 7 and the guide pins 11 are thermally deformed and the positioning plates 5 and 7 do not move. There was a problem. The present invention has been made in view of the above circumstances. The purpose is to improve the reliability of provision, transportation and positioning.

[0004]

Construction of the pallet jig according to the present invention for achieving the above object In order to achieve the above, a pallet jig for transferring and positioning the workpiece, double mounted
A number of reference surfaces corresponding to a certain number of workpieces are formed on the reference plate, this reference plate is fixed to the base, and a positioning plate that forms a work holding space with the reference surface by moving toward and away from the reference surface is formed. Provided movably on the base, and disposing a pressure spring for urging the positioning plate toward the reference surface side between the positioning plate and the base,
Simultaneously engage with the opening / closing pin for moving the positioning plate
Further, the positioning plate is formed with an opening / closing means for moving the plurality of positioning plates against the pressure spring to open the holding space. The pallet jig preferably uses a heat resistant material for the pressure spring.

[0005]

The positioning plate provided so as to be able to move toward and away from each reference surface is biased toward the reference surface side by the pressure spring, and each work is held individually by the reference surface and the positioning plate. Even if a workpiece has a dimension defect or inclination, the influence thereof does not affect the positioning operation of other workpieces. When the pressure spring is made of a heat resistant material and is used in a process where the pallet jig has a high temperature, the pressure spring will not be deformed or deteriorated even if it is subjected to repeated temperature changes, and the positioning plate's biasing action is reliable. Becomes

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT A preferred embodiment of a pallet jig according to the present invention will be described in detail below with reference to the drawings. 1 is a perspective view showing a first embodiment of the present invention, in which a pallet jig is used in a work mounting process, and FIG. 2 is an enlarged view of a main part of FIG. A reference plate 23 is fixed to the rectangular plate-shaped base 21, and the reference plate 23 has a reference surface 25 that contacts the work A. The reference plane 25 is composed of a set of vertical and horizontal reference planes,
The workpieces A to be mounted are arranged at equal intervals for several minutes. The base 21 is provided with a positioning plate 27a that moves in the lateral direction (direction of arrow a) and a positioning plate 27b that moves in the front-rear direction (direction of arrow b) so that they can move toward and away from the reference surface 25. , 27b are slidable by engaging the guide groove 29 with the guide pin 31.

A pressure spring 35 held by a spring retainer 33 is arranged between the reference plate 23 and the positioning plate 27a.
The pressure spring 35 biases the positioning plate 27a toward the reference surface 25 side. Further, a pressure spring 35 held by a spring retainer 33 is arranged between the base 21 and the positioning plate 27b,
The pressure spring 35 biases the positioning plate 27b toward the reference surface 25 side. Therefore, the holding space of the work A is normally closed. The positioning plates 27a and 27b are provided with opening / closing holes 41 serving as opening / closing means, and the opening / closing holes 41 engage with opening / closing pins described later. Further, the reference plate 23 has a reference hole 4
3 is provided, and the reference hole 43 is fitted with a positioning pin described later. Base 21, reference plate 23, positioning plate 27a,
The pallet jig 45 is configured by using 27b, the pressure spring 35, the opening / closing hole 41, and the reference hole 43 as main members or portions.

[0008] The pallet jig 45 constructed in this way
Are conveyed by the conveyor 47. The belt 51 of the conveyor 47 is driven by a motor 49. A stopper 53 is provided on the conveyance path constituted by the conveyor 47, and the stopper 5
3 stops the pallet jig 45 conveyed from the previous process at a predetermined position. Further, an open / close rod 55a that slides in the lateral direction and an open / close rod 55b that slides in the front-rear direction are provided in the transport path. The open / close rods 55a and 55b are the open / close cylinders 57a,
It is driven by 57b. A plurality of open / close pins 59 are provided on the open / close rods 55a, 55b, and the open / close pins 59 engage with open / close holes 41 formed in the positioning plates 27a, 27b.
That is, the opening / closing rod 5 in which the opening / closing pin 59 is engaged with the opening / closing hole 41.
5a and 55b are driven by the open / close cylinders 57a and 57b, so that the positioning plates 27a and 27b move to the pressure spring 3.
Opened against 5. The opening / closing means is the opening / closing pin 59.
In addition to the opening / closing hole 41, a protrusion-shaped member may be used as long as it engages with.

Further, a lifter 61 is provided in the transport path,
The lifter 61 raises the pallet jig 45 and fits the reference hole 43 of the pallet jig 45 into the positioning pin 63.
The work A is supplied to the vicinity of the conveyor 47 by the tray 65, and the pallet jig 45 is supplied by the robot 67.
To be installed on.

Next, the operation of the pallet jig 45 in the work mounting process will be described. First, the motor 49 is driven to convey the pallet jig 45 from the previous step by the belt 51. Then, the stopper 53 operates to stop the pallet jig 45 at a predetermined position, and then the lifter 61 operates to raise the pallet jig 45. At this time, the positioning pin 63 and the reference hole 43 are fitted to each other, and the pallet jig 45 is positioned at a regular position. At the same time, opening and closing pin 5
9 and the opening / closing hole 41 are also engaged. Then, the opening / closing cylinder 57
When a moves, all the positioning plates 27a open laterally via the opening / closing rod 55a, and the opening / closing cylinder 57
By operating b, all the positioning plates 27b are opened in the front-rear direction through the opening / closing rod 55b, the holding space for the work A is opened, and the work A can be mounted.

Next, the hand 69 of the robot 67 adsorbs the work A on the tray 65 and places it in the first holding space. Similarly, when the placement is completed up to the final holding space,
The opening / closing cylinders 57a and 57b are returned to their original positions, and the positioning plates 27a and 27b are moved to the work A by the urging force of the pressure spring 35.
Pressed against. As a result, the work A is the reference plate 23.
It is positioned and held by the positioning plates 27a and 27b. When the lifter 61 is returned and the pallet jig 45 is lowered, the opening / closing pin 59 and the positioning pin 63 are opened / closed in the opening / closing hole 4.
The pallet jig 45 is conveyed to the subsequent process by the belt 51 when the pallet jig 45 is removed from the reference hole 43 and the reference hole 43 and then the stopper 53 is lowered.

According to the pallet jig 45 described above, the positioning plates 27a and 27b are individually provided for the respective reference surfaces 25, and the positioning plates 27a and 27b are applied to the pressure spring 35.
Since each work A is individually held by being urged by, even if the work A has a dimensional defect or inclination, the other work A cannot be positioned due to the influence, and vibration during conveyance Therefore, the work A is not displaced or popped out. In the above-described embodiment, the process of mounting the work A on the pallet jig 45 has been described as an example, but the pallet jig 45 further mounts the work on the work A or places the completed work on the tray. Of course, it can be used in the storing process.

Next, a second embodiment of the present invention will be described.
FIG. 3 is a perspective view showing a second embodiment of the present invention, in which a pallet jig is used in the process of performing die bonding and wire bonding, and FIG. 4 is an enlarged view of a main part of FIG. In addition,
The same members or portions as those shown in FIGS. 1 and 2 are designated by the same reference numerals, and duplicated description will be omitted. In the pallet jig 71 of this embodiment, the pressure spring 73 is made of a heat resistant material.
The other parts are configured similarly to the pallet jig 45 described above. As the heat-resistant material, in addition to spring steel (SUP), nickel-white strip for spring (NSSR), titanium alloys particularly excellent in corrosion resistance and heat resistance, and stainless steel (SUS316, SUS631) which is also used as a wire for spring are suitable. . Further, the pressure spring 73 may be of a leaf spring type or a torsion bar type other than the coil spring type shown in the present embodiment.

The pallet jig 71 having the above structure
Are transported onto the table 75 in the bonding process. The table 75 can be moved laterally by a screw shaft 77 and a motor 79. Heater 8 on table 75
1 is embedded. Positioning pins 63 that fit into the reference holes 43 of the pallet jig 71 are provided above the table 75. A collet 83 is provided above the table 75, and the collet 83 sucks the die 85 and mounts it on the work A. Further, a bonding tool 87 is provided above the table 75, and the bonding tool 87 connects the die 85 after completion of the die bonding and the work A with a bonding wire 89.

Next, the operation of the pallet jig 71 in the bonding process will be described. When the pallet jig 71 is conveyed onto the table 75 from the previous process, the positioning pin 63
Goes down, fits into the reference hole 43, and the pallet jig 71 is positioned at a regular position. Work A by heater 81
When the temperature reaches a predetermined temperature, the collet 83
The upper die 85 is sucked and attached to the first work A. After the first installation, the motor 79 and screw shaft 77
As a result, the table 75 is moved and the pallet jig 71 is conveyed by one pitch.

In this way, the second and third dice bonds and the conveyance are sequentially carried out. When the first work A reaches the wire bond position, the bonding tool 87
Operates to connect a specified number of bonding wires 89. When the die bonding and wire bonding of all the works A are completed, the positioning pins 63 are raised and the pallet jig 71 is moved.
Is opened and transported to the next step. After the pallet jig 71 is conveyed, the motor 79 reversely rotates and the table 75 returns to the fixed position and stops, and the stand-by state is set.

According to the above-mentioned pallet jig 71, like the pallet jig 45, the respective works A are surely positioned, so that it is not necessary to reposition each work A in the bonding process. Further, since the work A is in close contact with the pallet jig 71 by the pressure spring 73, the heat conduction is small and the temperature rises quickly. Furthermore, since the pressure spring 73 is made of a heat-resistant material, it does not deform or deteriorate even when subjected to repeated temperature changes. As a result, reliable conveyance and highly accurate positioning can be performed, and assembling time can be shortened and quality can be improved.

In the above two embodiments, the two positioning plates 27a and 27b are used to hold and position the work A by sandwiching it from two directions. However, the pallet jigs 45 and 71 are used.
It is also possible to position and hold the work A with one positioning plate. For example, in the case of positioning and holding the rectangular work A, one corner on the diagonal of the work A is brought into contact with the reference surface 25, and the other corner is brought into contact with a positioning plate having a right-angled reference surface. It is as if A is sandwiched from the diagonal direction. With such a structure, the positioning in the lateral direction and the front-back direction can be simultaneously performed by the operation of one positioning plate, and the pallet jig can be configured with a small number of parts.

[0019]

As described in detail above, according to the pallet jig of the present invention, the positioning plates provided for the respective reference planes are biased by the pressure springs so that the respective works are individually separated. Since the workpieces are held in place, other workpieces will not be unable to be positioned due to the influence of dimensional defects or inclination of the workpieces, and the workpieces will not be displaced or popped out due to vibration during conveyance. As a result, transport,
The reliability of positioning can be significantly improved. In addition, if the pressure spring is made of a heat-resistant material, it will not be deformed or deteriorated even if it is subjected to repeated temperature changes, and it will not malfunction even when a pallet jig is used in a high-temperature process, ensuring reliable transport and Positioning can be performed with high accuracy, work assembly time can be shortened, and quality can be improved.

[Brief description of drawings]

FIG. 1 is a perspective view showing a first embodiment of the present invention.

FIG. 2 is an enlarged view of a main part of FIG.

FIG. 3 is a perspective view showing a second embodiment of the present invention.

FIG. 4 is an enlarged view of a main part of FIG.

FIG. 5 is a perspective view of a conventional pallet jig.

FIG. 6 is a perspective view of a conventional pallet jig.

[Explanation of symbols]

21 base 23 Reference plate 25 reference plane 27a, 27b Positioning plate 35, 73 Pressure spring 41 Opening / closing hole (opening / closing means) 45,71 Pallet jig 59 open / close pin A work

─────────────────────────────────────────────────── ─── Continuation of the front page (58) Fields surveyed (Int.Cl. ⁷ , DB name) H01L 21/68 B23P 19/00 302 B23Q 7/00

Claims (2)

(57) [Claims] 1. A pallet jig which positions and conveys a work , wherein a number of reference surfaces corresponding to a plurality of works to be mounted are formed on a reference plate, and the reference plate is fixed to the base. A positioning plate, which moves toward and away from the reference surface to form a work holding space with the reference surface, is movably provided on the base, and a pressure spring for urging the positioning plate toward the reference surface is positioned. Arranged between the plate and the base to move the positioning plate.
Opening / closing means for opening the holding space by simultaneously moving a plurality of positioning plates against the pressure springs by engaging with opening / closing pins for opening the pallet jig. . 2. A holding space for the work is defined by the two surfaces that abut on two adjacent sides of a rectangular work, and the reference surface is moved toward and away from the two surfaces. 2. The pallet jig according to claim 1, wherein the two positioning plates constituting the above are provided movably on the base for each of the reference planes.