JP3466293B2 - Optical element array and optical device using the same - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical element array that operates by utilizing an acousto-optic effect and an optical device using the same, and is suitable for use in, for example, configuring an optical filter or an optical switch. .

[0002]

2. Description of the Related Art Hitherto, various optical devices utilizing the acousto-optic effect have been proposed, for example, a document: Applied Phys.
There is an optical filter disclosed in ics Letters Vol.61 pp1025-1027.

[0003]

However, the main research problem in the prior art is to improve the operating characteristics of the device alone, and therefore, in the prior art, there has been a problem in the case where optical devices utilizing the acousto-optic effect are arranged in an array. Little research has been done. Especially, in order to avoid interference between adjacent optical elements while arranging the optical elements in an array at high density, what kind of configuration should be adopted, and its specific configuration has been clarified. Not.

The invention described in claim 1 is made in view of the above-mentioned point, and an object thereof is to provide an optical element array in which optical elements utilizing an acousto-optic effect are arranged in an array.
An object of the present invention is to provide a structure in which optical elements can be arranged at high density while avoiding interference between adjacent optical elements.

The invention according to claim 5 is made in view of the above-mentioned point, and an object thereof is an optical element array utilizing an acousto-optic effect, while avoiding interference between adjacent optical elements. An object of the present invention is to provide an optical device including an optical element array in which optical elements can be arranged at high density.

[0006]

In order to achieve this object, an optical element array according to claim 1 comprises a plurality of acousto-optical elements arranged in an array in a direction intersecting with a light propagation direction, Each acousto-optic element, in an optical element array comprising an optical waveguide provided to extend in the light propagation direction, and one and the other comb-shaped electrodes provided on the optical waveguide by pointing each other, A plurality of surface acoustic wave confining portions arranged in an array in a direction intersecting the light propagating direction and extending in the light propagating direction are provided. The bases of the comb-shaped electrodes on one side and the other side of the comb-shaped electrodes are arranged on both sides of the corresponding optical waveguide, and the fingers of the comb-shaped electrodes on the other side are arranged. Combining the one part and the other comb Provided by extending between the base electrode, the comb-shaped electrodes of the acousto-optic element adjacent phases, so as not superimposed, characterized by comprising in staggered positions to each other in the optical waveguide direction.

According to the optical element array of the first aspect, the base portions of the one and the other comb-shaped electrodes a and b are provided with optical waveguides corresponding thereto (that is, optical waveguides provided with the comb-shaped electrodes a and b). ) Is sandwiched between the surface acoustic wave confinement portions A and B, and the comb-shaped electrodes a
Since the finger-joints of the comb-shaped electrodes a and b are provided so as to extend between the bases of the electrodes a and b, the finger-joints of the comb-shaped electrodes a and b are arranged to correspond to the surface acoustic wave confinement portions A and B. Will be installed between. Therefore, since the surface acoustic wave generated by the finger-joint portions of the comb-shaped electrodes a and b can be confined in the area C sandwiched by the corresponding surface acoustic wave confinement portions A and B, the area C can be The surface acoustic wave can be prevented from leaking from the outside. Alternatively, it is possible to prevent a surface acoustic wave generated outside the area C from entering the area C. Therefore, by arranging a plurality of surface acoustic wave confinement portions in an array and providing an optical waveguide between the adjacent surface acoustic wave confinement portions, the surface acoustic waves generated by the comb-shaped electrodes can be generated. It is possible to prevent the light from entering an optical waveguide other than the optical waveguide provided with the comb-shaped electrode.

Further, the finger-jointing portion of one comb-shaped electrode a is extended from one side A of the corresponding surface acoustic wave confining portion to the other B side, while the finger-jointing portion of the other comb-shaped electrode b is pointed. The part can extend from the other side B to the side A of the corresponding surface acoustic wave confinement part. As described above, by increasing the length of the finger-joint portions of the comb-shaped electrodes a and b extending between the surface acoustic wave confinement portions A and B adjacent to each other, the light guided through the optical waveguide can be prevented. It is possible to improve the effect of the surface acoustic wave, particularly the efficiency of the mode conversion effect.

Further, in one and the other acousto-optic elements adjacent to each other, the comb-shaped electrode of one acousto-optic element and the comb-shaped electrode of the other acousto-optic element are arranged so as not to overlap each other in the optical waveguide direction. They are staggered and the bases of the comb electrodes are provided on the corresponding surface acoustic wave confinement. Therefore, the arrangement density of the comb-shaped electrodes and the arrangement density of the surface acoustic wave confining portions can be increased in the direction intersecting the optical waveguide direction.

The optical device according to claim 5 further includes one or a plurality of input ports, a plurality of output ports, an optical branching means provided between the input port and the output port, and claim 1.
The optical element array described, a first polarizer that transmits first polarized light of first and second polarized lights whose polarization planes are orthogonal to each other, and a second polarized light that transmits second polarized light of the first and second polarized lights. And an input port connected to an input part of the optical branching means, an output part of the optical branching part connected to an input part of an optical waveguide provided in the optical element array, and an output part of the optical waveguide connected to an output port. , A first polarizer is provided between the input section and the output section of the optical waveguide on the side of the input section, and a second polarizer is provided between the input section and the output section of the optical waveguide and on the side of the output section It is characterized by consisting of.

Since the optical element array provided in the optical device according to claim 5 is the optical element array according to claim 1, the surface acoustic waves generated by the comb-shaped electrodes are other than the optical waveguide provided with the comb-shaped electrodes. It is possible to prevent the light from entering another optical waveguide. Further, the effect of the surface acoustic wave on the light guided through the optical waveguide, especially the mode conversion effect can be improved, and the density of the comb-shaped electrodes and the density of the surface acoustic wave confining portions can be increased. , In the direction intersecting the optical waveguide direction.

According to the optical device of the fifth aspect, the optical branching unit distributes the optical signal input through the input port to each optical waveguide of the optical element array. The optical signal distributed to the optical waveguide and thus incident on the optical waveguide has two polarization components, first polarization and second polarization, whose polarization planes are orthogonal to each other. Since the first polarizer substantially transmits the first polarized light and substantially does not transmit the second polarized light, the first polarized light propagates through the optical waveguide. While the first polarized light propagates through the optical waveguide, the first polarized light is converted into the second polarized light by the mode conversion action of the acoustooptic device.
Since the second polarizer substantially transmits the second polarized light and does not substantially transmit the first polarized light, if such mode conversion to the second polarized light is performed, the second polarized light and thus the optical signal is output from the output port. Can be made. If the mode conversion to the second polarized light is not performed, the optical signal is not output from the output port according to the second polarized light. For example, when the optical device according to claim 5 is made to function as an optical filter or an optical switch, the acousto-optic device is operated only in the acousto-optic device corresponding to the output port to be output, and the first polarization is changed to the second polarization. Or only the first polarized light of a specific wavelength may be converted into the second polarized light.

[0013]

Embodiments of the present invention will be described below with reference to the drawings. It should be noted that the drawings are merely schematic representations so that the invention can be understood, and therefore the invention is not limited to the illustrated examples.

FIG. 1 is a plan view schematically showing the overall construction of an embodiment of the invention described in claim 1. The optical element array 10 shown in the figure includes a plurality of acousto-optic elements 12 arranged in an array in a direction Y intersecting the light propagation direction X, and each acousto-optic element 12 extends in the light propagation direction X. The optical waveguide 14 provided on the optical waveguide 14 and the one and the other comb-shaped electrodes 16 and 18 provided on the optical waveguide 14 so as to be pointed to each other.

Further, the optical element array 10 has an optical propagation direction X.
A plurality of surface acoustic wave confinement portions 20 arranged in an array in a direction Y intersecting with and extending in the light propagation direction X are provided.

The surface acoustic wave confining portions 20 adjacent to each other are provided.
The optical waveguides 14 are sandwiched between the bases 16a and 18a of the one and the other comb-shaped electrodes 16 and 18, and the one and the other surface acoustic wave confinement portions 20 and 20 sandwiching the corresponding optical waveguides 14 are provided. And the finger engaging portions 16b and 18b of the one and the other comb-shaped electrodes 16 and 18
Are provided so as to extend between the base portions 16a and 18a of the one and the other comb-shaped electrodes 16 and 18, respectively.

In the adjacent one and the other acousto-optic elements 12, the comb-shaped electrodes 16 and 18 of the one acousto-optic element 12 and the comb-shaped electrodes 16 and 18 of the other acousto-optic element 12 are overlapped. Do not match
The positions are displaced from each other in the optical waveguide direction X.
As an example, if the comb-shaped electrodes 16 and 18 indicated by reference numeral P1 in the drawing are considered as the comb-shaped electrodes 16 and 18 included in one acoustooptic device 12, in this case, the reference numeral P2 is shown in the drawing. Comb-shaped electrodes 16 and 18 shown with reference numeral P
Comb-shaped electrodes 16 and 18 indicated by 3 are respectively
It becomes the comb-shaped electrodes 16 and 18 of the other acousto-optic device 12.

FIG. 2 is a cross-sectional view schematically showing the structure of a main part of the embodiment of the invention described in claim 1 and showing an enlarged cross-section taken along line II-II of FIG.

As shown in FIGS. 1 and 2, in this embodiment, the X-cut L is used as the substrate 22 exhibiting the acousto-optic effect.
An iNbO ₃ substrate is prepared, and a striped surface acoustic wave confining portion 20 is provided on this substrate 22. The surface acoustic wave confinement portion 20 is an impurity diffusion region formed by diffusing impurities such as Ti into the substrate 22. Surface acoustic wave confinement section 20
The sound velocity in the inside is faster than the sound velocity in the substrate portion 22a between the optical waveguide 14 and the surface acoustic wave confinement portion 20, or faster than the sound velocity in the substrate portion 22a and the sound velocity in the optical waveguide 14. By providing the surface acoustic wave confining portions 20 having a high sound velocity in this way, a surface acoustic wave propagation path for confining the surface acoustic waves can be formed between the adjacent surface acoustic wave confining portions 20. .

The surface acoustic wave confinement section 20 is constructed such that, in one and the other acousto-optic elements 12 adjacent to each other, the comb-shaped electrodes 16 and 18 of one acousto-optic element 12 such as P.
The surface acoustic wave generated in 1 causes the other acousto-optic device 12
The optical waveguide 14 may be of any suitable configuration capable of preventing the optical waveguide 14 from being incident on the optical waveguide 14 provided with the comb-shaped electrode P2 or P3.

Then, a plurality of surface acoustic wave confinement portions 20 are
The optical waveguides 14 are arranged in an array at predetermined intervals in the direction Y, and the striped optical waveguides 14 are arranged between the surface acoustic wave confining portions 20 adjacent to each other. The optical waveguide 14 is, for example, a Ti diffusion waveguide formed by diffusing Ti in the substrate 22. One end of the optical waveguide 14 in the light propagation direction X serves as an input section (also referred to as an input port) 14a, and the other end serves as an output section (also referred to as an output port) 14b.

One and the other comb-shaped electrodes 16 and 1
Reference numeral 8 is, for example, an Al electrode. One or a plurality of finger contact portions (also referred to as finger electrodes) 16b are provided on the base portion 16a of one of the comb-shaped electrodes 16 so as to extend from the base portion 16a in the direction Y intersecting the light propagation direction X. The comb-shaped electrode 16 is constituted by 16a and the finger-joint portion 16b. Similar to the one comb-shaped electrode 16, the other comb-shaped electrode 1
8 also constitutes the finger joint 1 of these comb-shaped electrodes 16 and 18.
6b and 18b are alternately arranged in the light propagation direction X and are brought into contact with each other. These one and the other comb-shaped electrodes 16 and 18
By IDT (Inter Digital
Transducer).

Further, the base portions 16a and 18a of the one and the other comb-shaped electrodes 16 and 18 are connected to the corresponding optical waveguide 14 respectively.
(Ie, the optical waveguide 14 provided with the comb-shaped electrodes 16 and 18) is provided on one and the other surface acoustic wave confinement portions 20 and 20, and the finger-jointing portion 16a of the one comb-shaped electrode 16 is provided on one side. From the one comb-shaped electrode base portion 16a provided on the surface acoustic wave confining portion 20 of FIG. Further, the finger-jointing portion 18a of the other comb-shaped electrode 18 is connected to the other surface acoustic wave confining portion 2
From the other comb-shaped electrode base portion 16b provided on the surface 0 toward the one surface acoustic wave confinement portion 20. Figure 2
As an example, as an example, the base portions 16a and 18 of the comb-shaped electrode P3
One and the other surface acoustic wave confinement portion 20 provided with a
Are denoted by reference numerals 201 and 202.

The comb-shaped electrodes P of the acousto-optic elements 12 arranged in an array are arranged in a staggered manner in the order of arrangement. Here, the comb-shaped electrode P represents a set of one and the other comb-shaped electrodes 16 and 18 included in one acousto-optic device 12.

Further, one and the other comb-shaped electrode base portions 16a
Wiring electrodes 24 and 26 are connected to the wiring electrodes 24 and 26, and the wiring electrodes 24 and 26 are connected to the comb-shaped electrode base portions 16a and 18a.
The light is extended from a in the light propagation direction X. Wiring electrodes 24 and 2
A surface acoustic wave is generated by supplying an electric signal of high frequency, for example, about 180 MHz to the one and the other comb-shaped electrodes 16 and 18 via 6.

The surface acoustic wave confinement portion 20 is provided so as to extend to one side of the one and the other comb-shaped electrodes 16 and 18 in the light propagation direction X, here, to the input portion 14a side of the optical waveguide 14, and The wiring electrodes 24 and 26 of the one and the other comb-shaped electrodes 16 and 18 are connected to the other side of the one and the other comb-shaped electrodes 16 and 18 in the light propagation direction X,
Here, it is provided on the output section 14b side of the optical waveguide 14. As a result, the wiring electrodes 24 and 2 are formed on the surface acoustic wave propagation path formed between the adjacent surface acoustic wave confinement portions 20.
Since the area occupied by 6 can be eliminated or reduced as much as possible, the propagation loss of the surface acoustic wave due to the provision of the wiring electrodes 24 and 26 can be reduced. Moreover, the locations where the wiring electrodes 24 and 26 of the acousto-optic elements 12 are arranged can be integrated so that the work of connecting the wiring electrodes 24 and 26 to an external electric circuit, for example, the wire bonding work can be performed efficiently.

Further, sound absorbing materials 28 are provided on one side and the other side of the surface acoustic wave confining portion 20, respectively, and the comb-shaped electrodes 16 and 18 are provided between the sound absorbing materials 28 provided on the one side and the other side. To provide. The sound absorbing material 28 is for preventing the surface acoustic wave from leaking out from the end of the propagation path to the outside of the propagation path, and the sound absorbing material 28 is provided at the terminal end of the surface acoustic wave. Preferably, one of the surface acoustic wave confinement portions 20 adjacent to the sound absorbing material 28 has the surface acoustic wave confinement portion 20.
The surface acoustic wave confinement portion 20 is provided so as to extend continuously from the top to the other surface acoustic wave confinement portion 20.

In this embodiment, the optical signal incident on the optical waveguide 14 has two polarization components of TM wave and TE wave whose polarization planes are orthogonal to each other. If one of the TM wave and the TE wave is the first polarized light and the other of the TM wave and the TE wave is the second polarized light, each acousto-optic element 12 functions as a mode converter that converts the first polarized light into the second polarized light. Can be made. This conversion is caused by the interaction between the surface acoustic wave and light, and the wavelength Λ of the surface acoustic wave and the wavelength λ of the first polarized light converted into the second polarized light are λ = Δn
・ Associated with Λ.

Further, in order to enhance the effect of the surface acoustic waves generated by the comb-shaped electrodes 16 and 18 on light, in particular, the mode conversion effect, the finger-jointing portions 16b and 18b of these electrodes 16 and 18 are adjacent to each other. It is preferable to extend in the direction Y between the matching surface acoustic wave confinement portions 20 and 20 to excite the fundamental mode surface acoustic wave between the confinement portions 20 and 20. Further, in order to prevent the deterioration of the electric signals supplied to the finger-together portions 16a and 18a of the comb-shaped electrodes 16 and 18, it is preferable to widen the widths of the base portions 16a and 18a of the comb-shaped electrodes 16 and 18. Therefore, as described above, in the adjacent one and the other acousto-optic elements 12, the comb-shaped electrode P of the one acousto-optic element 12 and the comb-shaped electrode P of the other acousto-optic element 12 are not overlapped. So that they are displaced from each other in the direction X, together with the bases 16a and 18a of the comb electrode P.
Are provided on the corresponding surface acoustic wave confining portions 20. As a result, the finger-joints 16b and 18 of the comb-shaped electrode P are formed.
Even when b is extended in the direction Y and / or the base portions 16a and 18a of the comb-shaped electrode P are widened, the arrangement density of the comb-shaped electrodes P and the arrangement density of the surface acoustic wave confinement portions 20 are set. , In the direction Y.

FIG. 3 is a plan view schematically showing the overall construction of another embodiment of the invention as set forth in claim 1. Hereinafter, differences from the embodiment of FIG. 1 will be mainly described, and detailed description of the same points as the embodiment of FIG. 1 will be omitted.

The optical element array 10 shown in FIG. 3 has a first polarizer 30 that transmits first polarized light of the first and second polarized lights whose polarization planes are orthogonal to each other, and a second polarizer 30 of the first and second polarized lights. And a second polarizer 32 that transmits polarized light.

The first polarizer 30 is provided between the input section 14a and the output section 14b of the optical waveguide 14 and on the input section 14 side, and the second polarizer 32 is provided in the input section 14 of the optical waveguide 14.
It is provided between a and the output unit 14b and on the output unit 14b side.

In this embodiment, the first and second polarizers 30 are provided in the optical waveguides 14 of the acousto-optic elements 12, respectively.
And 32 are provided, and the polarizers 30 and 32 are separated in the light propagation direction X. Then, between the first polarizer 30 and the input portion 14a of the optical waveguide 14, the comb-shaped electrode 16,
18 and the sound absorbing material 28 are provided, and the sound absorbing material 28 is provided between the second polarizer 32 and the output portion 14b of the optical waveguide 14.

In this embodiment, if the first polarized light is one of the TM wave and the TE wave and the second polarized light is the other of the TM wave and the TE wave, for example, the acousto-optic element 12 corresponding to the desired output section 14b. By converting the first polarized light into the second polarized light, or by converting only the first polarized light having a specific wavelength into the second polarized light in each acousto-optic element 12.
The optical element array 10 can function as an optical filter or an optical switch.

FIG. 4 is a perspective view schematically showing the overall construction of the optical device according to the fifth aspect. Hereinafter, differences from the embodiment of FIG. 3 will be described, and detailed description of the same points as the embodiment of FIG. 3 will be omitted.

The optical device 34 shown in the figure has one or a plurality of input ports 36, a plurality of output ports 38, and an optical branching means 4 provided between the input ports 36 and the output ports 38.
0 and the optical element array 10 and a first polarizer 3 which transmits first polarized light of first polarized light and second polarized light whose polarization planes are orthogonal to each other.
0 and a second polarizer 32 that transmits the second polarized light of the first and second polarized lights.

The input port 36 is connected to the input section 40a of the optical branching means 40, and the output section 40b of the optical branching means 40 is connected.
The input unit 14 of the optical waveguide 14 included in the optical element array 10
Then, the output part 14b of the optical waveguide 14 is connected to the output port 38.

The first polarizer 30 is provided between the input section 14a and the output section 14b of the optical waveguide 14 and on the side of the input section 14a, and the second polarizer 32 is provided in the input section 14 of the optical waveguide 14.
It is provided between a and the output unit 14b and on the output unit 14b side.

In this embodiment, the light branching means 40 and the optical element array 10 are provided on the same substrate 22. Light splitting means 4
Reference numeral 0 denotes a star coupler, which connects a plurality of input ports 36 to the input section 40a of the optical branching means 40. Here, the input unit 40a and the input port 36 are connected to the substrate 2
2 is connected via the optical waveguide. The optical element array 10 has the same configuration as the optical element array 10 of the embodiment shown in FIG. 3, and has a plurality of acousto-optic elements 12 arranged in an array. The input section 14a of the optical waveguide 14 included in each of the acousto-optic elements 12 is respectively connected to the optical branching means 40.
Connected to the output unit 40b. Here, these input units 1
4a and the output section 40b are connected via an optical waveguide provided on the substrate 22. The output section 14b of the optical waveguide 14 included in each acousto-optic element 14 is used as the output port 38 of the optical device 34.

The optical device 34 of this embodiment can function as, for example, an optical switch or an optical filter.
When functioning as an optical switch, for example, the signal lights λ1 to λ of different wavelengths are input to the four input ports 36, respectively.
Enter 4. Then, the optical signals λ1 to λ1 having different wavelengths
λ4 is mixed by the optical branching means 40 and the wavelength-division multiplexed optical signal λ
1 to λ4, and the optical signals λ1 to λ4 are input to the respective optical waveguides 14 of the optical element array 10 by wavelength multiplexing. Then, the acousto-optic element 14 converts the first polarized light of the wavelength to be output from the output port 38 corresponding to the element 14 into the second polarized light. By arbitrarily and appropriately selecting the wavelength of the first polarized light to be converted into the second polarized light, the input port 36
The optical connection relationship between the output port 38 and the output port 38 can be selectively changed.

The invention is not limited to the above-described embodiments, and therefore, the size, shape, arrangement position, arrangement number, forming material and the like of each component can be arbitrarily changed.

[0042]

As is apparent from the above description, according to the optical element array of the first aspect, the interdigitation of the one and the other comb-shaped electrodes between the adjacent surface acoustic wave confining portions. Since the section and the optical waveguide are provided, it is possible to prevent the surface acoustic wave generated by the comb-shaped electrode from entering the optical waveguide other than the optical waveguide provided with the comb-shaped electrode. Therefore, it is possible to prevent the surface acoustic waves from the comb-shaped electrodes other than the comb-shaped electrodes provided in the optical waveguide from acting on the light guided in the optical waveguide. Therefore, it is possible to prevent interference between the acousto-optic elements arranged in an array.

Moreover, since the finger-joint portion of the comb-shaped electrode can be extended between the adjacent surface acoustic wave confinement portions, the surface acoustic wave affects the light guided through the optical waveguide. It is possible to increase the efficiency of the action, particularly the mode conversion action. For this reason, an acousto-optic device having good operating characteristics can be constructed.

The base portion of the comb-shaped electrode is provided on the surface acoustic wave confining portion, and in one and the other acousto-optic elements adjacent to each other, the comb-shaped electrode and the other acousto-optic element of one acousto-optic element are adjacent to each other. Since the comb-shaped electrodes are arranged so as not to overlap with each other in the optical waveguide direction, the comb-shaped electrodes and the surface acoustic wave confining portions are arranged in the optical waveguide direction. Can be increased in the direction intersecting with. Therefore, the arrangement density of acousto-optic elements can be increased.

Therefore, according to the optical element array of the first aspect, it is possible to arrange the acousto-optic elements having good operation characteristics in a high density array while avoiding the mutual interference of the acousto-optic elements. This optical element array is suitable for use in, for example, an optical filter or an optical switch.

Further, since the optical element array provided in the optical device according to the fifth aspect is the optical element array according to the first aspect, it is possible to avoid interference between adjacent acousto-optical elements and to obtain good optical characteristics. It is possible to provide an optical device including an optical element array in which acousto-optical elements having operating characteristics can be arranged in a high density array. This optical device is suitable for use as, for example, an optical filter or an optical switch.

[Brief description of drawings]

FIG. 1 is a plan view schematically showing the configuration of an example of an optical element array.

FIG. 2 is a sectional view schematically showing a configuration of an example of an optical element array.

FIG. 3 is a perspective view schematically showing the configuration of another embodiment of the optical element array.

FIG. 4 is a sectional view schematically showing a configuration of an example of an optical device.

[Explanation of symbols]

10: Optical element array 12: Acousto-optical element 14: Optical waveguide 16, 18: Comb-shaped electrode 16a, 18a: base of comb-shaped electrode 16b, 18b: finger-joints of comb-shaped electrodes 20: Surface acoustic wave confinement section 30: First polarizer 32: Second polarizer 34: Optical device 36: Input port 38: Output port 40: Optical branching means

Claims (5)

(57) [Claims] 1. A plurality of acousto-optic elements arranged in an array in a direction intersecting with a light propagation direction, each acousto-optic element being provided with an optical waveguide extending in the light propagation direction and a finger. An optical element array having one and the other comb-shaped electrodes provided in the optical waveguide in combination with each other, arranged in an array in a direction intersecting with the light propagation direction, and extending in the light propagation direction. A plurality of surface acoustic wave confinement portions provided with the optical waveguide between the adjacent surface acoustic wave confinement portions. While disposed on one and the other surface acoustic wave confinement portion sandwiching, sandwiching the finger portion of the one and the other comb-shaped electrode, provided to extend between the base portion of the one and the other comb-shaped electrode, Comb-shaped electric field between adjacent acousto-optic devices And so as not superimposed, optical device array, characterized in that formed by staggered positions to each other in the optical waveguide direction. 2. The optical element array according to claim 1, wherein the comb-shaped electrodes of the acousto-optic elements arranged in an array are arranged in a staggered manner in order of arrangement. Element array. 3. The optical element array according to claim 1, wherein the surface acoustic wave confinement portion is provided so as to extend to one side of the comb-shaped electrode in the light propagation direction, and the wiring electrode of the comb-shaped electrode is An optical element array provided on the other side of the comb-shaped electrode in the propagation direction. 4. The optical element array according to claim 1, wherein a first polarizer that transmits first polarized light of first polarized light and a second polarized light whose polarization planes are orthogonal to each other, and the first polarized light A second polarizer that transmits a second polarized light, wherein the first polarizer is provided between the input part and the output part of the optical waveguide and on the input part side, and the second polarizer is the optical waveguide. An optical element array provided between the input section and the output section of the above and on the side of the output section. 5. An optical element array according to claim 1, wherein one or a plurality of input ports, a plurality of output ports, optical branching means provided between the input ports and the output ports, and polarization planes mutually A first polarizer that transmits a first polarized light of the first and second polarized lights orthogonal to each other, and a second polarizer that transmits a second polarized light of the first and second polarized lights, the input port The input part of the optical branching means, the output part of the optical branching means is connected to the input part of the optical waveguide included in the optical element array, and the output part of the optical waveguide is connected to the output port; A polarizer is provided between the input section and the output section of the optical waveguide and on the side of the input section, and the second polarizer is provided between the input section and the output section of the optical waveguide and on the side of the output section. An optical device comprising: