JP3472451B2 - Flat polishing machine - Google Patents
Flat polishing machineInfo
- Publication number
- JP3472451B2 JP3472451B2 JP24554297A JP24554297A JP3472451B2 JP 3472451 B2 JP3472451 B2 JP 3472451B2 JP 24554297 A JP24554297 A JP 24554297A JP 24554297 A JP24554297 A JP 24554297A JP 3472451 B2 JP3472451 B2 JP 3472451B2
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- polishing cloth
- turntable
- flat
- cloth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000005498 polishing Methods 0.000 title claims description 76
- 239000004744 fabric Substances 0.000 claims description 39
- 239000003795 chemical substances by application Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、平板状の被加工物
の研磨に使用される平面研磨装置に係り、特に、シリコ
ンウエハなどの高い平面精度が要求される被加工物の研
磨に使用される平面研磨装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat surface polishing apparatus used for polishing a flat plate-like work piece, and more particularly, it is used for polishing a work piece such as a silicon wafer that requires high flatness accuracy. Flat polishing apparatus.
【０００２】[0002]
【従来の技術】図３に、従来の平面研磨装置の概要を示
す。この平面研磨装置は、ターンテーブル１、研磨ヘッ
ド４、研磨剤供給ノズル９、ドレッシングヘッド１１な
どから構成される。ターンテーブル１は、その上面に研
磨布３が装着され、その下側に配置された回転駆動機構
２によって駆動される。研磨ヘッド４は、回転兼加圧機
構５、回転兼加圧機構５から下方に伸びる主軸６、及び
主軸６の下端に接続された保持プレート７などから構成
される。保持プレート７の下面には、バッキングパッド
８が装着され、被加工物であるウエハ１０は、このバッ
キングパッド８を介して研磨ヘッド４に保持される。ド
レッシングヘッド１１は、研磨布３の平坦度の調整及び
目詰まりの除去のために使用される。2. Description of the Related Art FIG. 3 shows an outline of a conventional surface polishing apparatus. This flat surface polishing apparatus includes a turntable 1, a polishing head 4, a polishing agent supply nozzle 9, a dressing head 11 and the like. The turntable 1 has a polishing cloth 3 mounted on the upper surface thereof, and is driven by a rotary drive mechanism 2 arranged below the polishing cloth 3. The polishing head 4 includes a rotating / pressurizing mechanism 5, a main shaft 6 extending downward from the rotating / pressurizing mechanism 5, a holding plate 7 connected to a lower end of the main shaft 6, and the like. A backing pad 8 is mounted on the lower surface of the holding plate 7, and the wafer 10, which is a workpiece, is held by the polishing head 4 via the backing pad 8. The dressing head 11 is used for adjusting the flatness of the polishing cloth 3 and removing clogging.
【０００３】ウエハ１０の研磨は、以下の様に行われ
る。先ず、ターンテーブル１上に研磨布３を装着し、保
持プレート７の下面にバッキングパッド８を介してウエ
ハ１０を吸着する。次に、ターンテーブル１を回転する
とともに、研磨布３の表面に研磨剤供給ノズル９から研
磨剤を供給する。最後に、回転兼加圧機構５を起動し
て、ウエハ１０を回転させながら研磨布３の表面に押し
付ける。The polishing of the wafer 10 is performed as follows. First, the polishing cloth 3 is mounted on the turntable 1, and the wafer 10 is sucked onto the lower surface of the holding plate 7 via the backing pad 8. Next, the turntable 1 is rotated, and the abrasive is supplied from the abrasive supply nozzle 9 to the surface of the polishing cloth 3. Finally, the rotation / pressurization mechanism 5 is activated, and the wafer 10 is rotated and pressed against the surface of the polishing pad 3.
【０００４】（従来技術の問題点）従来の平面研磨装置
において、ウエハ１０の表面全体を高い平面精度で研磨
するためには、研磨布３の表面形状が平坦であることが
必要である。しかし、従来、研磨布３の表面形状は、ド
レッシングヘッド１１の組み付け精度に依存するところ
が大きく、簡単に研磨布３の表面形状を調整する方法は
なかった。(Problems of the Prior Art) In the conventional flat surface polishing apparatus, in order to polish the entire surface of the wafer 10 with high flatness accuracy, it is necessary that the surface shape of the polishing cloth 3 is flat. However, conventionally, the surface shape of the polishing cloth 3 largely depends on the assembling accuracy of the dressing head 11, and there has been no method for easily adjusting the surface shape of the polishing cloth 3.
【０００５】また、仮に、ドレッシングヘッド１１の組
み付け精度が正確に行われていたとしても、研磨布３の
初期の表面形状が中凸あるいは中凹状であると、研磨布
３の表面を平坦に仕上げることは容易ではなかった。Even if the dressing head 11 is assembled accurately, if the initial surface shape of the polishing cloth 3 is convex or concave, the surface of the polishing cloth 3 is finished flat. Things have never been easier.
【０００６】[0006]
【発明が解決しようとする課題】本発明は、以上の様な
従来の平面研磨装置の問題点に鑑み成されたもので、本
発明の目的は、研磨布の表面形状の平坦度を調整する機
能を備え、研磨後の被加工物表面の平面精度に優れた平
面研磨装置を提供することにある。SUMMARY OF THE INVENTION The present invention has been made in view of the above problems of the conventional flat surface polishing apparatus, and an object of the present invention is to adjust the flatness of the surface shape of the polishing cloth. An object of the present invention is to provide a flat polishing apparatus having a function and excellent in flatness of a surface of a workpiece after polishing.
【０００７】[0007]
【課題を解決するための手段】本発明の平面研磨装置
は、上面に研磨布を真空吸着するための複数の吸着孔が
形成されたターンテーブルと、ターンテーブルに対向し
てその上方に配置され、下面に平板状の被加工物を保持
し、被加工物を回転させるとともに研磨布の表面に押し
付ける研磨ヘッドと、研磨布の表面に研磨剤を供給する
研磨剤供給ノズルと、各吸着孔から研磨布の裏面に作用
する吸引力の平面分布を調整する手段と、を備えたこと
を特徴とする平面研磨装置。A surface polishing apparatus of the present invention is provided with a turntable having a plurality of suction holes for vacuum-sucking a polishing cloth formed on an upper surface thereof, and a turntable facing the turntable and arranged above the turntable. , Holding a flat plate-shaped workpiece on the lower surface, rotating the workpiece and pressing it against the surface of the polishing cloth, a polishing agent supply nozzle for supplying the polishing agent to the surface of the polishing cloth, and from each suction hole A planar polishing apparatus comprising: a means for adjusting a planar distribution of a suction force acting on the back surface of the polishing cloth.
【０００８】好ましくは、前記各吸着孔を、途中に流量
調整バルブを備えた配管を介して真空ポンプに接続し、
これら各流量調整バルブを用いて前記研磨布の裏面に作
用する吸引力の平面分布を調整する。Preferably, each of the suction holes is connected to a vacuum pump via a pipe having a flow rate adjusting valve in the middle,
The planar distribution of the suction force acting on the back surface of the polishing cloth is adjusted using each of these flow rate adjusting valves.
【０００９】本発明の平面研磨装置によれば、研磨布の
裏面に作用する吸引力の平面分布を調整することによ
り、研磨布の表面形状を平坦に調整することができる。
これによって、平板状の被加工物の表面を均一に研磨す
ることができる。According to the surface polishing apparatus of the present invention, the surface shape of the polishing cloth can be adjusted to be flat by adjusting the plane distribution of the suction force acting on the back surface of the polishing cloth.
As a result, the surface of the flat work piece can be uniformly polished.
【００１０】[0010]
【発明の実施の形態】図１に、本発明に基づく平面研磨
装置の概要を示す。図中、１はターンテーブル、３は研
磨布、４は研磨ヘッド、９は研磨剤供給ノズル、１０は
ウエハ（被加工物）を表す。DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows an outline of a flat polishing apparatus according to the present invention. In the figure, 1 is a turntable, 3 is a polishing cloth, 4 is a polishing head, 9 is a polishing agent supply nozzle, and 10 is a wafer (workpiece).
【００１１】ターンテーブル１は、その上面に研磨布３
が装着され、回転駆動機構（図示せず）に接続された軸
２ａによって駆動される。研磨ヘッド４は、回転兼加圧
機構（図示せず）、回転兼加圧機構から下方に伸びる主
軸６、及び主軸６の下端に傾動自在に接続された保持プ
レート７などから構成される。保持プレート７は、研磨
布３に対向するように配置され、主軸６によって回転さ
れるとともに、上下方向に駆動されるようになってい
る。保持プレート７の下面にはバッキングパッド８が装
着され、被加工物であるウエハ１０は、このバッキング
パッド８を介して研磨ヘッド４に保持される。The turntable 1 has a polishing cloth 3 on its upper surface.
Is mounted and driven by a shaft 2a connected to a rotary drive mechanism (not shown). The polishing head 4 includes a rotating / pressurizing mechanism (not shown), a main shaft 6 extending downward from the rotating / pressurizing mechanism, a holding plate 7 tiltably connected to a lower end of the main shaft 6, and the like. The holding plate 7 is arranged so as to face the polishing cloth 3, is rotated by the main shaft 6, and is driven in the vertical direction. A backing pad 8 is mounted on the lower surface of the holding plate 7, and the wafer 10, which is a workpiece, is held by the polishing head 4 via the backing pad 8.
【００１２】ターンテーブル１は、その上面に多数の吸
着孔１５が形成されており、これらの吸着孔１５は、タ
ーンテーブル１の内部を通る複数の真空経路１６を介し
て真空ポンプ１９に接続されている。各真空経路１６の
途中にはバルブ１７が設けられ、真空ポンプ１９の手前
にはバルブ１８が設けられている。各真空経路１６を介
して各吸着孔１５内を真空引きすることにより、研磨布
３がターンテーブル１の上に吸着される。また、バルブ
１８を閉鎖して、各真空経路１６内を大気開放すること
により、研磨布３の吸着状態が解除される。The turntable 1 has a large number of suction holes 15 formed on the upper surface thereof, and these suction holes 15 are connected to a vacuum pump 19 via a plurality of vacuum paths 16 passing through the inside of the turntable 1. ing. A valve 17 is provided in the middle of each vacuum path 16, and a valve 18 is provided in front of the vacuum pump 19. By vacuuming the inside of each suction hole 15 through each vacuum path 16, the polishing cloth 3 is sucked onto the turntable 1. In addition, the suction state of the polishing pad 3 is released by closing the valve 18 and opening the inside of each vacuum path 16 to the atmosphere.
【００１３】研磨布３をターンテーブル１の上に吸着す
る際、真空引きする真空経路１６をバルブ１７を用いて
選択することにより、研磨布３の表面形状を調整するこ
とができる。あるいは、各吸着孔１５内の減圧度をバル
ブ１７を用いて調整して、研磨布３に対する真空引きの
強さの平面分布を調整することにより、研磨布３の表面
形状を調整することができる。従って、この平面研磨装
置によれば、例えば図２（ａ）に示すように、リング状
のドレッサを使用したときに見られる中凸状の研磨布３
の表面形状を、研磨布３に対する真空引きの強さの平面
分布を適切に調整することにより、図２（ｂ）に示すよ
うに、平坦な形状に調整することが可能になる。When the polishing cloth 3 is sucked onto the turntable 1, the surface shape of the polishing cloth 3 can be adjusted by selecting the vacuum path 16 for vacuuming by using the valve 17. Alternatively, the surface shape of the polishing cloth 3 can be adjusted by adjusting the degree of pressure reduction in each suction hole 15 using the valve 17 and adjusting the planar distribution of the vacuuming strength with respect to the polishing cloth 3. . Therefore, according to this flat surface polishing apparatus, as shown in FIG. 2A, for example, the center-convex polishing cloth 3 seen when a ring-shaped dresser is used.
By appropriately adjusting the planar distribution of the vacuuming strength with respect to the polishing cloth 3, it becomes possible to adjust the surface shape of No. 2 to a flat shape as shown in FIG.
【００１４】[0014]
【発明の効果】本発明の平面研磨装置によれば、研磨布
をターンテーブル上に吸着する力の平面分布を調整する
ことによって、研磨布の表面形状の調整を行うことがで
きる。これによって、比較的容易に研磨布の表面形状の
平坦化を行うことが可能になり、その結果、研磨後の被
加工物の平面精度の向上に効果がある。According to the flat polishing apparatus of the present invention, the surface shape of the polishing cloth can be adjusted by adjusting the plane distribution of the force for attracting the polishing cloth onto the turntable. This makes it possible to flatten the surface shape of the polishing cloth relatively easily, and as a result, it is effective in improving the planar accuracy of the workpiece after polishing.
【図１】本発明に基づく平面研磨装置の概要を示す図。FIG. 1 is a diagram showing an outline of a flat surface polishing apparatus according to the present invention.
【図２】本発明の効果を説明する図、（ａ）は当初の研
磨布の表面形状、（ｂ）は調整後の研磨布の表面形状を
表す。FIG. 2 is a diagram for explaining the effect of the present invention, (a) shows the initial surface shape of the polishing cloth, and (b) shows the surface shape of the adjusted polishing cloth.
【図３】従来の平面研磨装置の一例を示す図。FIG. 3 is a diagram showing an example of a conventional surface polishing apparatus.
１・・・ターンテーブル、２・・・回転駆動機構、３・
・・研磨布、４・・・研磨ヘッド、５・・・回転兼加圧
機構、６・・・主軸、７・・・保持プレート、８・・・
バッキングパッド、９・・・研磨剤供給ノズル、１０・
・・ウエハ（被加工物）、１１・・・ドレッシングヘッ
ド、１５・・・吸着孔、１６・・・真空経路、１７・・
・バルブ、１８・・・バルブ、１９・・・真空ポンプ。1 ... Turntable, 2 ... Rotation drive mechanism, 3 ...
.... Polishing cloth, 4 ... Polishing head, 5 ... Rotating and pressing mechanism, 6 ... Spindle, 7 ... Holding plate, 8 ...
Backing pad, 9 ... Abrasive supply nozzle, 10.
..Wafer (workpiece), 11 ... Dressing head, 15 ... Suction hole, 16 ... Vacuum path, 17 ...
・ Valve, 18 ... Valve, 19 ... Vacuum pump.
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平９−63995（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) B24B 37/00 B24B 37/04 H01L 21/304 ─────────────────────────────────────────────────── ─── Continuation of front page (56) References JP-A-9-63995 (JP, A) (58) Fields investigated (Int.Cl. 7 , DB name) B24B 37/00 B24B 37/04 H01L 21 / 304
Claims (2)
の吸着孔が形成されたターンテーブルと、 ターンテーブルに対向してその上方に配置され、下面に
平板状の被加工物を保持し、被加工物を回転させるとと
もに研磨布の表面に押し付ける研磨ヘッドと、研磨布の
表面に研磨剤を供給する研磨剤供給ノズルと、 各吸着孔から研磨布の裏面に作用する吸引力の平面分布
を調整する手段と、 を備えたことを特徴とする平面研磨装置。1. A turntable having a plurality of suction holes for vacuum-absorbing a polishing cloth formed on an upper surface thereof, and a turntable arranged above the turntable so as to hold a flat plate-shaped workpiece on the lower surface. , A polishing head that rotates the workpiece and presses it against the surface of the polishing cloth, an abrasive supply nozzle that supplies the abrasive to the surface of the polishing cloth, and a planar distribution of the suction force that acts on the back surface of the polishing cloth from each suction hole. And a means for adjusting the flat surface polishing apparatus.
を備えた配管を介して真空ポンプに接続され、これら各
流量調整バルブを用いて前記研磨布の裏面に作用する吸
引力の平面分布を調整することを特徴とする請求項１に
記載の平面研磨装置。2. The suction holes are connected to a vacuum pump via a pipe provided with a flow rate adjusting valve in the middle, and a planar distribution of suction force acting on the back surface of the polishing cloth using the flow rate adjusting valves. The flat polishing apparatus according to claim 1, wherein
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24554297A JP3472451B2 (en) | 1997-09-10 | 1997-09-10 | Flat polishing machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24554297A JP3472451B2 (en) | 1997-09-10 | 1997-09-10 | Flat polishing machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH1177516A JPH1177516A (en) | 1999-03-23 |
| JP3472451B2 true JP3472451B2 (en) | 2003-12-02 |
Family
ID=17135257
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24554297A Expired - Fee Related JP3472451B2 (en) | 1997-09-10 | 1997-09-10 | Flat polishing machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3472451B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3965969B2 (en) * | 2001-11-02 | 2007-08-29 | 株式会社ニコン | Polishing apparatus, polishing method, semiconductor device, and semiconductor device manufacturing method |
| KR100886698B1 (en) * | 2002-06-28 | 2009-03-04 | 매그나칩 반도체 유한회사 | Platen device for chemical mechanical polishing |
| US6951597B2 (en) * | 2003-10-31 | 2005-10-04 | Novellus Systems, Inc. | Dynamic polishing fluid delivery system for a rotational polishing apparatus |
| JP2009184074A (en) * | 2008-02-06 | 2009-08-20 | Sd Future Technology Co Ltd | Polishing device |
| CN109732472A (en) * | 2017-10-31 | 2019-05-10 | 上海新昇半导体科技有限公司 | Polissoir and method |
-
1997
- 1997-09-10 JP JP24554297A patent/JP3472451B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH1177516A (en) | 1999-03-23 |
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