JP3476949B2 - Ultrasonic actuator - Google Patents

Description

Detailed Description of the Invention

[0001]

The present invention relates to electrical such as a piezoelectric element or electrostrictive element - Ru <br/> relates to a ultrasonic actuator for driving the driven body to generate ultrasonic vibration when mechanical energy conversion element.

[0002]

2. Description of the Related Art FIG. 9 shows an example of a conventional ultrasonic actuator disclosed in Japanese Unexamined Patent Publication No. 6-254494.

In the conventional ultrasonic actuator,
Two electromechanical conversion elements 5 are provided on one surface of the rectangular parallelepiped resonator 51.
2 is fixed to form an ultrasonic transducer. The foot 5 is placed on the opposite side of the surface to which the electromechanical conversion element 52 of the rectangular parallelepiped is fixed.
5 is fixed, and a driven body (not shown) is pressed against this portion to drive the driven body.

The principle of driving such an ultrasonic actuator is based on the primary longitudinal vibration (A) of the resonator 51 shown in FIG.
(Direction vibration) and the secondary bending vibration (B-direction vibration) shown in FIG. 11 are sized so that the resonance frequency is matched, and the two electromechanical conversion elements 52 are phased by 90 degrees at that frequency. By supplying electric power deviated from the above to generate ultrasonic elliptical vibration and pressing the driven body against the resonator 51,
This driven body is driven.

[0005]

In the ultrasonic actuator, the thrust due to the ultrasonic elliptical vibration is centrally determined by the characteristic value of the ultrasonic actuator, and it is impossible to obtain more thrust. Further, since the vibration amplitude of the ultrasonic actuator is attenuated from the steady state at the initial stage of operation of the ultrasonic actuator or at the end of the period of operation, the thrust in this time region is unstable. Therefore, when the conventional ultrasonic actuator is used to drive the driven body by a small amount in a transient state of its vibration, there is a drawback that the minute amount feeding operation is not stable.

The present invention solves the above-mentioned drawbacks of the prior art,
An object of the present invention is to provide an ultrasonic actuator capable of increasing thrust and having stable operation and a method of driving the ultrasonic actuator.

[0007]

The invention according to claim 1 is
A driven body, a first resonator having a substantially rectangular parallelepiped shape, and two electromechanical conversion elements fixed to the resonator are provided, and high frequency voltages having different phases are applied to the two electromechanical conversion elements. A first ultrasonic actuator for generating a standing wave vibration in the first resonator to drive the driven body pressed against the first resonator; and a second resonator having a substantially rectangular parallelepiped shape. , standing on the second co <br/> oscillator by the resonator and a fixed two electromechanical transducer, for applying a phase different RF voltage to the two electromechanical transducer A second ultrasonic actuator for driving the driven body pressed against the second resonator by generating wave vibration, and the first ultrasonic actuator
And two of each of the second ultrasonic actuator
The electromechanical conversion element is impressed with high frequency voltage with 90 degrees different phase.
And generate elliptical vibrations,
Note When the first ultrasonic actuator is in a steady vibration state
To start driving the second ultrasonic actuator
Thus, the driven body is configured to be activated .

The invention according to claim 2 is the object of claim 1
Driving body, first ultrasonic actuator and second ultrasonic wave
An actuator, the first ultrasonic actuator
And two of each of the second ultrasonic actuator
The electromechanical conversion element is impressed with high frequency voltage with 90 degrees different phase.
And generate elliptical vibrations,
The two ultrasonic actuators are both in a steady vibration state.
At one time, one of the two ultrasonic actuators
By stopping the drive of one ultrasonic actuator,
It is characterized in that it is configured to stop the driven body .

The invention according to claim 3 is the object of claim 1
Driving body, first ultrasonic actuator and second ultrasonic wave
An actuator is provided, and the first ultrasonic actuator has two electromechanical conversion elements with a high phase difference of 90 degrees.
A frequency voltage is applied to generate elliptical vibration, and the second ultrasonic actuator has two electromechanical conversion elements.
A high-frequency voltage having a phase difference of 0 degrees is applied to generate bending vibration, and when the first ultrasonic actuator is in a steady vibration state, the driving of the second ultrasonic actuator is started or stopped. Thus, the driven body is configured to be operated and stopped.

[0010]

According to the invention described in claim 1, one ultrasonic wave
At the same time as the drive of the actuator begins,
Driven by the other ultrasonic actuator
Since the movement of the body will be started, start the driven body
It is possible to provide an ultrasonic actuator whose operation is stable .

According to the second aspect of the invention, one ultrasonic sound
Driven by the action of the brake by the wave actuator
Until the body is stopped, the other super
The operation of the driven body is maintained by the sonic actuator.
Therefore, the operation of the driven body when it stops moving is stable.
It was able to provide an ultrasonic actuator.

According to the third aspect of the invention, one ultrasonic sound
Of the other ultrasonic wave when the wave actuator is in a steady vibration state
To start or stop the drive of the wave actuator.
And whether to operate and stop the driven body
As a result, it is possible to provide an ultrasonic actuator in which the operation of the driven body at the time of starting and stopping is stable .

[0013]

EXAMPLES Examples of the present invention will be described in detail below.

(First Embodiment) A first embodiment of the present invention will be described with reference to FIGS. 1, 2 and 3.

(Structure) In the ultrasonic actuator of the present embodiment, the substantially rectangular parallelepiped resonator 2 made of brass in which the electromechanical conversion elements 1 are arranged one-on-one is such that resonance vibration and resonance bending vibration are excited at the same time. It is composed of shapes. A quenched stainless steel pin 4 is press-fitted into the vibration node of the resonator 2. A convex portion 20 for fixing the electromechanical conversion element 1 is integrally formed on the center of the upper surface of the resonator 2 and has a surface perpendicular to the main body of the resonator 2.

The electromechanical conversion element 1 is so pressed that the end face of the electromechanical conversion element 1 is pressed and stopped by the convex portion 20.
The other end surface of is firmly fixed to the resonator 2 by the fixing member 21 and the screw 22. In addition, the electromechanical conversion element 1
At the time of fixing, the adhesive is applied to the entire surface of the electromechanical conversion element 1 which is in contact with the resonator 2 to firmly fix the electromechanical conversion element 1 and the resonator 2. A pair of sliding protrusions 5 are provided at the bending vibration antinode position on the side opposite to the surface on which the electromechanical conversion element 1 is arranged.

2 and 3 show an example in which two ultrasonic actuators are arranged in the same direction to form an ultrasonic linear actuator. The pin 4 of the resonator 2 is sandwiched in the V groove 8 of the hardened stainless holder 7, and the pressing spring 1 is provided on the vertical axis 9 of the V groove 8 of the holder 7.
0 is provided on the upper surface of the holder 7, and the opposite side of the pressing spring 10 is a pressing screw 1 screwed into the housing 11.
2, the appropriate pressing force is applied to the resonator 2 via the holder 7.

The side surface of the holder 7 has a bearing means 13 so that the holder 7 can move in the vertical axis 9 direction without resistance.
It is supported by. A sliding member 15 is adhered and fixed to a driven body 14 on the surface which the sliding projection 5 contacts, and the driven body 14 can be moved in the X direction by a bearing means 16 on a base 18. One ultrasonic actuator is held by the same, and the ultrasonic actuator is driven by the same driven body 14 as shown in FIG.
A pair is arranged symmetrically when viewed from the moving direction of 4.

(Operation) The driving principle of the ultrasonic actuator of the first embodiment is as follows:
The dimensions of the resonator 2 are determined so that the resonance frequencies of the next longitudinal vibration (A-direction vibration) and the secondary bending vibration (B-direction vibration) are matched, and the two electromechanical conversion elements 1 are phased 90 degrees at that frequency. The elliptical vibration is generated by supplying the electric power deviated from the above, and the driven body 14 is driven by pressing the driven body 14 against the elliptical vibration.

The two electromechanical conversion elements 1 of the one ultrasonic actuator are 90 degrees out of phase from a high frequency power source (not shown) and a voltage at the resonance frequency of the resonator 2 is applied to the two abdominal portions of the resonator 2. The sliding protrusions 5 that are adhesively fixed to each other perform elliptical vibration, and the driven body 14 on the bearing means 16 is driven in the X direction. Similarly, the other ultrasonic actuator is similarly driven at the same drive frequency.

(Effect) In the present embodiment, the ultrasonic actuators having the same structure are arranged symmetrically with respect to the moving direction of the driven body 14, so that the thrust force on the driven body 14 is doubled and symmetrical. The placement balances thrust and eliminates the generation of moments about axes perpendicular to the direction of travel.

(Second Embodiment) A method of driving the ultrasonic actuator of the second embodiment using the configuration of the first embodiment will be described.

As shown in FIG. 4, a mirror block 17 is attached to the lower part of the side surface of the resonator 2 by adhesion so that the vibration of the resonator 2 is not affected. The result of observing the bending vibration of the resonator 2 is shown in FIG.

At time T1 shown in FIG. 5, a drive signal is supplied from the drive circuit (not shown) to the electromechanical conversion element 1 to start driving. The drive is stopped at time T3. T2 to T3 are vibration steady states, T1 to T2 are vibration rising times, and similarly T3 to T4 are damping vibration times due to free vibration. During these two vibration times T1 to T2, T3 to T
During 4 times, the operation of the driven body 14 becomes unstable. this is,
In a state where the driven body 14 is always pulled in a constant direction (when it is placed at an inclination), thrust is not generated in the steady vibration state in these two time regions, so that the load direction This is because the driven body 14 is pulled.

In the present embodiment, the driving method as shown in FIG. 6 is carried out by taking advantage of the characteristic that the holding force of the ultrasonic actuator at rest is higher than the thrust at startup. That is, first, one ultrasonic actuator is activated first. At this time, since the other ultrasonic actuator is stopped, the driven body 14 does not operate for the above reason. After TD1 hour when one ultrasonic actuator reaches steady vibration, the other ultrasonic actuator is driven. At such a driving time timing, the driven body 14 is driven by the thrust force of one ultrasonic actuator in a steady state. This is because the friction between the sliding projection 5 of the other ultrasonic actuator and the sliding member 15 is switched from static friction to dynamic friction, so that the friction force is reduced. Similarly, by stopping the two ultrasonic actuators with a time lag of TD2 at the time of stopping, the friction between the sliding projection 15 of one ultrasonic actuator and the sliding member 15 changes from dynamic friction to static friction. The driven body 14 at the switching timing
Stops.

(Effect) According to this embodiment, the driven body 14
Since one or more ultrasonic actuators always maintain a steady vibration state during the operation of, the stable thrust is secured and the start and stop can be stabilized.

(Third Embodiment) A method of driving the ultrasonic actuator of the third embodiment using the configuration of the first embodiment will be described.

In the third embodiment, elliptical vibration is excited in the resonator 2 of one ultrasonic actuator having the structure of the first embodiment at the timing as shown in FIG. 7, and the two ultrasonic actuators of the other ultrasonic actuator are excited. 180 to electromechanical conversion element 1
By applying drive voltages whose phases are shifted by degrees, bending vibration as shown in FIG. 8 is excited. At this time, the sliding projection 5 vibrates only in the vertical direction as shown in FIG. In this vibrating state, the sliding projections 5 are apparently floating between the sliding member 15 and the sliding projections 5, and the friction load becomes a value close to zero.

As shown in FIG. 7, one ultrasonic actuator is driven in advance, and after the vibration has risen to a steady state, the other ultrasonic actuator is driven.
At this time, since the friction of the sliding projection 5 of the other ultrasonic actuator apparently becomes zero from the static friction, the thrust of one ultrasonic actuator causes the driven body 14 to move.
Starts to work. Next, when one of the ultrasonic actuators is in a steady vibration state and the driving of the other ultrasonic actuator is stopped, the friction load of the other ultrasonic actuator changes from almost zero to the static friction at the moment when the other ultrasonic actuator stops. Since the state shifts, the driven body 14 stops.

(Effect) Also in this embodiment, the driven body 1
While 4 is operating, one or more ultrasonic actuators are always kept in a steady vibration state, so that stable thrust is secured and the start and stop are stabilized.

[0031]

According to the invention of claim 1, one of the
At the same time that the sonic actuator starts to drive,
By the other ultrasonic actuator that has reached the vibration state
Since the operation of the driven body will start,
Provides an ultrasonic actuator with stable operation at startup
You can do it .

According to the second aspect of the invention, one ultrasonic sound
Driven by the action of the brake by the wave actuator
Until the body is stopped, the other super
The operation of the driven body is maintained by the sonic actuator.
Therefore, the operation of the driven body when it stops moving is stable.
It was able to provide an ultrasonic actuator.

According to the third aspect of the invention, one ultrasonic sound
Of the other ultrasonic wave when the wave actuator is in a steady vibration state
To start or stop the drive of the wave actuator.
And whether to operate and stop the driven body
As a result, it is possible to provide an ultrasonic actuator in which the operation of the driven body at the time of starting and stopping is stable .

[Brief description of drawings]

FIG. 1 is a perspective view showing the external appearance of one ultrasonic actuator according to a first embodiment of the present invention.

FIG. 2 is a front view of the ultrasonic actuator according to the first embodiment.

FIG. 3 is a side view of the ultrasonic actuator according to the first embodiment.

FIG. 4 is an explanatory diagram showing an ultrasonic actuator according to a second embodiment.

FIG. 5 is a diagram showing a relationship between vibration amplitude and time in the driving method according to the second embodiment.

FIG. 6 is a timing chart showing a driving method according to a second embodiment.

FIG. 7 is a timing chart showing a driving method according to a third embodiment.

FIG. 8 is an explanatory diagram showing a vibrating state of a sliding protrusion in the third embodiment.

FIG. 9 is a perspective view of a conventional ultrasonic actuator.

FIG. 10 is a diagram showing longitudinal vibration of a conventional ultrasonic actuator.

FIG. 11 is a diagram showing bending vibration of a conventional ultrasonic actuator.

[Explanation of symbols]

1 Electromechanical conversion element 2 resonator 4 pin 5 Sliding projection 7 holder 8 V groove 9 Vertical axis 10 Pressing spring 12 Press screw 13 Bearing means 14 Driven body 15 Sliding material 16 Bearing means

─────────────────────────────────────────────────── ─── Continuation of the front page (56) Reference JP-A-6-105571 (JP, A) JP-A-62-285834 (JP, A) JP-A-1-268465 (JP, A) JP-A-5- 56684 (JP, A) JP-A-2-29724 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) H02N 2/00 B06B 1/06

Claims (3)

(57) [Claims] 1. A driven body, a first resonator having a substantially rectangular parallelepiped shape, and two electromechanical conversion elements fixed to the resonator, and the two electromechanical conversion elements have high-frequency voltages having different phases. A standing wave vibration is applied to the first resonator to drive the driven body pressed against the first resonator, and a substantially rectangular parallelepiped first ultrasonic actuator. 2 resonators and 2 fixed to this resonator
Two electromechanical conversion elements, and high-frequency voltages having different phases are applied to the two electromechanical conversion elements to generate standing wave vibrations in the second resonator,
For driving the driven body pressed against the resonator of the second
It has the ultrasonic Atachiyueta, wherein the first ultrasonic Akucheeta and second ultrasonic Accession
90 for each of the two electromechanical conversion elements of the chaeta
Elliptical vibration by applying high-frequency voltage with different phase
And the first ultrasonic actuator is in a steady vibration state.
Sometimes start driving the second ultrasonic actuator
Is configured to activate the driven body by
An ultrasonic actuator characterized by the following. 2. The driven body and the first ultrasonic wave according to claim 1.
With actuator and second ultrasonic actuator
And, wherein the first ultrasonic actuator and second ultrasonic Accession
90 on each of the two electromechanical conversion elements of the cheater
Elliptical vibration by applying high-frequency voltage with different phase
And the two ultrasonic actuators are both in a steady vibration state.
One of the two ultrasonic actuators when
By stopping the drive of one ultrasonic actuator
Is configured to stop the driven body.
Characteristic ultrasonic actuator. 3. The driven body according to claim 1, a first ultrasonic wave.
With actuator and second ultrasonic actuator
Then, the first ultrasonic actuator is applied with high-frequency voltages having different phases by 90 degrees to the two electromechanical conversion elements to generate elliptical vibration, and the second ultrasonic actuator is provided with two electromechanical conversion elements. A high-frequency voltage having a phase difference of 180 degrees between them to generate bending vibration, and driving the second ultrasonic actuator when the first ultrasonic actuator is in a steady vibration state. 2. The ultrasonic actuator according to claim 1, wherein the driven body is operated and stopped by starting and stopping.