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JP3480175B2 - Method for forming partition of display panel - Google Patents
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JP3480175B2 - Method for forming partition of display panel - Google Patents

Method for forming partition of display panel

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Publication number
JP3480175B2
JP3480175B2 JP08379696A JP8379696A JP3480175B2 JP 3480175 B2 JP3480175 B2 JP 3480175B2 JP 08379696 A JP08379696 A JP 08379696A JP 8379696 A JP8379696 A JP 8379696A JP 3480175 B2 JP3480175 B2 JP 3480175B2
Authority
JP
Japan
Prior art keywords
partition
forming
insulating layer
display panel
thermosetting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP08379696A
Other languages
Japanese (ja)
Other versions
JPH09274852A (en
Inventor
義一 松原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP08379696A priority Critical patent/JP3480175B2/en
Publication of JPH09274852A publication Critical patent/JPH09274852A/en
Application granted granted Critical
Publication of JP3480175B2 publication Critical patent/JP3480175B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】 【0001】 【発明の属する技術分野】本発明は、表示パネルの隔壁
形成方法に関する。図4の斜視図に示すように、表示パ
ネルの1つである例えば、面放電型カラープラズマディ
スプレイパネルは、互いに直交して対向する電極、即ち
一方に一対のX,Yサスティン電極1a−1,1a−2
と絶縁層1b、他方にアドレス電極2aを備えた2枚の
ガラス基板、即ち前面、背面の基板1,2の間に帯状の
隔壁(リブ)2bを介在して離隔対向させ、図示しない
基板周辺部を封止して構成される。 【0002】この隔壁2bは、背面の基板2においてア
ドレス電極と平行するような帯状に形成されており、基
板1,2の間で形成された放電空間の間隙を規定すると
ともに、この放電空間を仕切りそれぞれの放電セル(単
位放電空間)に分離する。この帯状の隔壁2b間の溝に
は前記アドレス電極2aがそれぞれ設けられ、かつ該ア
ドレス電極2aの表面を含めた隔壁面に赤R、緑G、青
Bの蛍光体層3が1色ずつ順に形成されている。 【0003】最近、より精細な画像を得るために、幅と
ピッチをより小さくした隔壁を基板上に簡単に形成する
方法が要望されている。 【0004】 【従来の技術】図2(a),(b),(c),(d) の側断面図に示す
ように、従来の表示パネルの隔壁形成方法は、同図
(a)において、基板2上に隔壁となるガラスペースト
をスクリーン印刷した後、乾燥してできた厚さ200μ
mの絶縁層21を形成し、この絶縁層21上に光硬化性
フィルム状レジスト22をラミネートする。 【0005】そして、同図(b)において、この光硬化
性フィルム状レジスト22を公知のホトリソグラフィ技
術により約100μm程度の幅と約400μmのピッチ
でパターニングして、形成する隔壁のマスクとする。 【0006】つぎに、同図(c)において、マスクされ
ずに露出した絶縁層21をサンドブラスト20処理によ
って削り取って溝2b−1を形成し、さらに同図(d)
において、マスクとした光硬化性フィルム状レジスト2
2を図示しない炭酸ナトリウムなどで溶解して取り除い
た後、洗浄、乾燥を行って隔壁2bを形成している。 【0007】 【発明が解決しようとする課題】しかしながら、このよ
うな隔壁の形成方法によれば、図2(d)のように隔壁
2bの底辺が裾引きして台形状になり、またそれを抑え
るため、図2(c)においてサンドブラスト処理を十分
に行うと、図3(a),(b) の側断面図のようにマスクされ
た下の部分がえぐられ且つ底辺も裾引きして同様に台形
状になって、幅が狭くピッチの小さい隔壁が形成できな
いし、最悪の場合には隔壁の中央部分が削り取られ薄く
なって切損するといった問題があった。 【0008】上記問題点に鑑み、本発明は、より精細な
画像を得るために、幅とピッチのより小さな隔壁を簡単
に形成できる表示パネルの隔壁形成方法を提供すること
を目的とする。 【0009】 【課題を解決するための手段】上記目的を達成するため
に、本発明の表示パネルを構成する基板上に隔壁を形成
する方法において、前記基板上に隔壁形成用の熱硬化性
絶縁材でなる絶縁層を形成する工程と、該絶縁層の表面
にレーザ光を照射し、隔壁となる部分のみを熱硬化して
隔壁のパターニングを行う工程と、該パターニングされ
た絶縁層にサンドブラスト処理を施し未硬化部分を除去
して残る熱硬化部分で隔壁を形成する工程とで構成す
る。 【0010】熱硬化性絶縁材で形成した絶縁層は、隔壁
となる熱硬化部分と隔壁間の溝となる未硬化部分との境
界が基板面に対し垂直に形成でき、また熱硬化部分がレ
ーザ光により高精細にパターニングされるため、これに
サンドブラスト処理を施すと、残された熱硬化部分(隔
壁)の側壁面は基板面に対し垂直に形成されることにな
り、幅とピッチのより小さな隔壁を形成することができ
る。 【0011】 【発明の実施の形態】以下、本発明の好ましい実施例に
つき、図1(a),(b),(c),(d) の側断面図を参照して工程
順に詳細に説明する。 【0012】先ず、同図(a)において、基板2上に熱
硬化性絶縁材を厚さ200μm(隔壁の高さに対応す
る)で印刷し、隔壁形成用の絶縁層11を形成する。つ
ぎに、同図(b)において、この絶縁層11にレーザ光
12を走査照射して、隔壁となる部分(斜線部)のみを
熱硬化することにより、帯状の隔壁のパターニングを行
う。照射するレーザ光12のビームスポットの直径は、
形成する隔壁の幅に対応させ、絶縁層11が熱硬化温度
に加熱される速度で走査する。なお、レーザ光12の照
射は、1本の隔壁となる部分を走査して加熱したが、あ
るいはレーザビーム径を大きくし一定領域を遮光マスク
で覆って複数の隔壁となる部分のみを露出して一括加熱
してもよい。 【0013】つぎに、同図(c)において、隔壁となる
熱硬化部分11−1と隔壁間の溝となる未硬化部分11
−2とに区画された絶縁層11表面にサンドブラスト1
0処理を施す。サンドブラスト粒子は、熱硬化部分11
−1の硬度より低くて未硬化部分11−2の硬度より高
い、例えば炭酸カルシウム材などでなる平均粒径22〜
28μmの粒子を採用しており、ブラスト圧力2kg/
cm2 程度、基板2の移送速度90mm/min程度の
条件でサンドブラスト処理を行う。それにより、未硬化
部分11−2は削り取られて溝2b−1を形成し、熱硬
化部分11−1だけが残されて隔壁2bが形成される。
なお、サンドブラストは未硬化部分11−2の上から行
うように図示しているが、一定の広い領域の複数の隔壁
を一括して行ってもよい。 【0014】このように、熱硬化性絶縁材で形成した絶
縁層は厚さが200μmと非常に薄いため、レーザ光を
走査して照射加熱すると、絶縁層は隔壁となる硬化部分
と隔壁間の溝となる未硬化部分との境界が基板面に対し
垂直に分割された状態にパターニングされることとな
る。 【0015】これにサンドブラスト処理を施すと、残さ
れた熱硬化部分(隔壁)の側壁面は基板面に垂直に形成
されることになるため、幅とピッチのより小さな隔壁を
形成することができ、しかも従来のような工程数の多い
ホトリソグラフィ技術による処理工程よりも少ない処理
工程数で簡単に形成することができる。 【0016】なお、隔壁の形状は帯状に限定されず、放
電セルを1個ずつ区画するメッシュ形状でもよい。 【0017】 【発明の効果】以上、詳述したように本発明によれば、
幅とピッチのより小さな隔壁を簡単に形成できるため、
安価でより精細な画像を実現できる表示パネルを提供で
きるといった産業上極めて有用な効果を発揮する。
Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for forming a partition of a display panel. As shown in the perspective view of FIG. 4, for example, a surface discharge type color plasma display panel, which is one of the display panels, has electrodes facing each other at right angles to each other, that is, a pair of X, Y sustain electrodes 1a-1, 1 on one side. 1a-2
And an insulating layer 1b, and two glass substrates provided with address electrodes 2a on the other side, ie, front and rear substrates 1 and 2, with a strip-shaped partition (rib) 2b interposed therebetween so as to face and separate from each other. The part is sealed. The partition wall 2b is formed in a strip shape on the rear substrate 2 so as to be parallel to the address electrodes. The partition wall 2b defines a gap of the discharge space formed between the substrates 1 and 2, and defines the discharge space. The partitions are separated into respective discharge cells (unit discharge spaces). The address electrodes 2a are provided in the grooves between the strip-shaped partitions 2b, respectively, and the red R, green G, and blue B phosphor layers 3 are sequentially arranged one by one on the partition surfaces including the surface of the address electrodes 2a. Is formed. Recently, there has been a demand for a method of easily forming a partition having a smaller width and pitch on a substrate in order to obtain a finer image. 2. Description of the Related Art As shown in the side sectional views of FIGS. 2A, 2B, 2C and 2D, a conventional method for forming a partition of a display panel is shown in FIG. After screen-printing a glass paste to be a partition on the substrate 2, a thickness of 200 μm is obtained by drying.
Then, a photo-curable film-like resist 22 is laminated on the insulating layer 21. In FIG. 1B, the photocurable film-like resist 22 is patterned by a known photolithography technique with a width of about 100 μm and a pitch of about 400 μm to form a mask for a partition to be formed. Next, in FIG. 1C, the insulating layer 21 exposed without being masked is removed by sandblasting 20 to form a groove 2b-1.
The photo-curable film-like resist 2 used as a mask
2 is dissolved and removed with sodium carbonate (not shown) and then washed and dried to form the partition 2b. [0007] However, according to such a method of forming a partition, the bottom of the partition 2b is skirted and becomes trapezoidal as shown in FIG. In order to suppress this, if sand blasting is sufficiently performed in FIG. 2 (c), the lower part masked as shown in the side sectional views of FIGS. 3 (a) and 3 (b) is hollowed out, and the bottom is skirted. In other words, there is a problem that a trapezoidal shape cannot be formed to form a partition wall having a small width and a small pitch, and in the worst case, a central portion of the partition wall is cut off to be thin and cut. In view of the above problems, an object of the present invention is to provide a method of forming partition walls of a display panel which can easily form partition walls having a smaller width and a smaller pitch in order to obtain a finer image. In order to achieve the above object, the present invention provides a method of forming a partition on a substrate constituting a display panel according to the present invention, wherein a thermosetting insulating material for forming a partition is formed on the substrate. Forming an insulating layer made of a material, irradiating a laser beam to the surface of the insulating layer, and thermally curing only a portion serving as a partition to pattern the partition, and sandblasting the patterned insulating layer. And removing the uncured portion to form a partition with the thermosetting portion remaining. In the insulating layer formed of a thermosetting insulating material, a boundary between a thermosetting portion serving as a partition and an uncured portion serving as a groove between the partitions can be formed perpendicular to the substrate surface, and the thermosetting portion can be formed by a laser. Since patterning is performed with high definition by light, if this is subjected to sandblasting, the side wall surface of the remaining thermosetting portion (partition) is formed perpendicular to the substrate surface, and the width and pitch are smaller. Partition walls can be formed. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below in detail in the order of steps with reference to the side sectional views of FIGS. 1 (a), 1 (b), 1 (c) and 1 (d). I do. First, in FIG. 1A, a thermosetting insulating material is printed on the substrate 2 at a thickness of 200 μm (corresponding to the height of the partition) to form an insulating layer 11 for forming the partition. Next, in FIG. 2B, the insulating layer 11 is scanned and irradiated with a laser beam 12, and only the portions (shaded portions) which become the partition walls are thermally cured, thereby patterning the strip-shaped partition walls. The diameter of the beam spot of the laser beam 12 for irradiation is
Scanning is performed at a speed at which the insulating layer 11 is heated to the thermosetting temperature in accordance with the width of the partition to be formed. The irradiation with the laser beam 12 was performed by scanning and heating a portion serving as one partition, or exposing only a portion serving as a plurality of partitions by enlarging the laser beam diameter and covering a certain region with a light-shielding mask. It may be heated all at once. Next, in FIG. 1C, a thermosetting portion 11-1 serving as a partition and an uncured portion 11 serving as a groove between the partitions are shown.
Sandblast 1 on the surface of the insulating layer 11 partitioned into -2
0 processing is performed. The sandblasted particles are heat-cured portions 11
-1 and higher than the hardness of the uncured portion 11-2.
Particles of 28 μm are adopted and the blast pressure is 2 kg /
Sandblasting is performed under the conditions of about 2 cm 2 and a transfer speed of the substrate 2 of about 90 mm / min. Thereby, the uncured portion 11-2 is scraped off to form the groove 2b-1, and the partition wall 2b is formed while leaving only the thermoset portion 11-1.
Although sandblasting is illustrated as being performed from above the uncured portion 11-2, a plurality of partitions in a certain wide area may be performed collectively. As described above, since the insulating layer formed of the thermosetting insulating material has a very small thickness of 200 μm, when the laser beam is scanned and irradiated and heated, the insulating layer is formed between the hardened portion serving as the partition and the partition. Patterning is performed so that the boundary between the groove and the uncured portion is divided perpendicular to the substrate surface. If sand blasting is applied to this, since the side wall surface of the remaining thermosetting portion (partition) is formed perpendicular to the substrate surface, a partition having a smaller width and pitch can be formed. In addition, it can be easily formed with a smaller number of processing steps than a conventional processing step using a photolithography technique having many steps. The shape of the partition walls is not limited to a band shape, but may be a mesh shape for dividing discharge cells one by one. As described above, according to the present invention,
Because partition walls with smaller width and pitch can be easily formed,
This provides an extremely useful effect in industry, such as providing a display panel that can realize a finer image at a lower cost.

【図面の簡単な説明】 【図1】 本発明による一実施例の隔壁の形成工程を工
程順に示す側断面図 【図2】 従来技術による隔壁の形成工程を工程順に示
す側断面図 【図3】 図2(c)でサンドブラスト処理を十分に行
った場合の側断面図 【図4】 表示パネルの隔壁を説明する要部斜視図 【符号の説明】 1,2:基板 2b:隔壁(リブ) 11:絶縁層 11−1:熱硬化部分 11−2:未硬化部分 12:レーザ光
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a side sectional view showing a step of forming a partition according to an embodiment of the present invention in the order of steps. FIG. 2 is a side sectional view showing a step of forming a partition according to a conventional technique in the order of steps. 2 (c) is a side cross-sectional view of the case where the sandblasting process has been sufficiently performed. [FIG. 4] A perspective view of a main part for explaining a partition of a display panel. [Description of symbols] 1, 2: substrate 2b: partition (rib) 11: insulating layer 11-1: thermosetting portion 11-2: uncured portion 12: laser beam

Claims (1)

(57)【特許請求の範囲】 【請求項1】 表示パネルを構成する基板上に隔壁を形
成する方法において、 前記基板上に隔壁形成用の熱硬化性絶縁材でなる絶縁層
を形成する工程と、 該絶縁層の表面にレーザ光を照射し、隔壁となる部分の
みを熱硬化して隔壁のパターニングを行う工程と、 該パターニングされた絶縁層にサンドブラスト処理を施
し未硬化部分を除去して残る熱硬化部分で隔壁を形成す
る工程とを含むことを特徴とする表示パネルの隔壁形成
方法。
(57) In a method for forming a partition on a substrate constituting a display panel, a step of forming an insulating layer made of a thermosetting insulating material for forming a partition on the substrate. Irradiating the surface of the insulating layer with a laser beam, and thermally curing only the portions to be the partition walls to pattern the partition walls; and performing a sandblast treatment on the patterned insulating layer to remove uncured portions. Forming a partition in the remaining thermosetting portion.
JP08379696A 1996-04-05 1996-04-05 Method for forming partition of display panel Expired - Fee Related JP3480175B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP08379696A JP3480175B2 (en) 1996-04-05 1996-04-05 Method for forming partition of display panel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08379696A JP3480175B2 (en) 1996-04-05 1996-04-05 Method for forming partition of display panel

Publications (2)

Publication Number Publication Date
JPH09274852A JPH09274852A (en) 1997-10-21
JP3480175B2 true JP3480175B2 (en) 2003-12-15

Family

ID=13812623

Family Applications (1)

Application Number Title Priority Date Filing Date
JP08379696A Expired - Fee Related JP3480175B2 (en) 1996-04-05 1996-04-05 Method for forming partition of display panel

Country Status (1)

Country Link
JP (1) JP3480175B2 (en)

Also Published As

Publication number Publication date
JPH09274852A (en) 1997-10-21

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