JP3482773B2 - Thermocompression bonding equipment - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thermocompression bonding apparatus for thermocompression bonding a plurality of works.

[0002]

2. Description of the Related Art In a circuit module manufacturing process, an anisotropic conductor or TCP (Tape Carrier) is used for a substrate or the like.
A thermocompression bonding apparatus is used for thermocompression bonding of a work such as an er package).

In this thermocompression bonding apparatus, not only the work is simply sucked, but the work is heated simultaneously with the suction. Next, problems of the conventional thermocompression bonding apparatus will be described with reference to FIG.

In FIG. 7A, reference numeral 1 is a suction tool, and a suction hole 2 for sucking a work 3 is provided in the center thereof. Since the work 3 is heated at the same time as the suction, the suction tool 1 is heated to a high temperature by a heater or the like.

However, the work 3 is divided into a part that is in direct contact with the high-temperature suction tool 1 and a part that is in contact with the suction hole 2 through which low-temperature air flows, and the temperature distribution of the work 3 is , As shown in FIG. 7 (b), there are large variations. If there is such temperature variation,
The results of thermocompression bonding also vary.

[0006]

SUMMARY OF THE INVENTION It is therefore an object of the present invention to provide a thermocompression bonding apparatus capable of adsorbing a work and simultaneously heating it uniformly.

[0007]

The thermocompression bonding apparatus of the present invention comprises:
Suction tool, holding block that holds the suction tool detachably, and suction tool that can be detached from the holding block
The holding plate to be fixed, a joint connected to the suction device, a heater built in the holding block for heating the suction tool, and a porous material provided below the suction tool, the joint, A flow path communicating with each other is formed in the holding block and the suction tool, and the tip of the flow path of the suction tool is closed with the porous material.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A thermocompression bonding apparatus according to claim 1 is a suction tool, a holding block for holding the suction tool in a detachable manner, and a suction block for holding the suction tool in a detachable manner.
Holding plate to be fixed, a joint connected to the suction device,
A heater that is built in the holding block to heat the suction tool, and a porous material provided below the suction tool are provided, and a flow path that communicates with the joint is formed in the holding block and the suction tool. Moreover, the tip of the flow path of the suction tool is closed with the porous material. Therefore, the work can be brought into uniform contact with the entire surface of the porous material, and the work can be heated uniformly. Further, the work can be evenly adsorbed by the innumerable holes existing in the porous material. This point is that the work is like TCP,
The work can be held flat when it is made of an extremely flexible member, which is very advantageous.

Next, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view of a thermocompression bonding apparatus according to an embodiment of the present invention.

In FIG. 1, 4 is a base, and 5 is a substrate positioning table for moving the substrate holder 6 which is provided on the base 4 and holds the central portion of the lower surface of the substrate 7 in the XYθ directions.
At the edge of the substrate 7, an anisotropic conductor 8 is provided as an example of a work.
Are thermocompression bonded.

A base 9 is provided on the base 4 and receives the lower edge of the substrate 7 underneath. A support plate 10 is provided upright on the base 4. On the front surface of the support plate 10, a pressure bonding head portion 11
And a work supply means. The work supply means supplies the anisotropic conductor 8 directly below the suction tool 12 facing downward from the pressure bonding head portion 11.

Specifically, the work supply means includes a supply reel around which the leader tape 14 having the anisotropic conductor 8 adhered on one surface thereof is wound, and a pull-out roller 15 for supplying the leader tape 14 from the supply reel 13. A suction body 16 that applies an appropriate tension to the leader tape 14, a cutter 17 that cuts only the anisotropic conductors 8 attached to the leader tape 14 at regular pitches, and anisotropy after cutting. A tape peeling portion 18 for peeling the leader tape 14 from the conductor 8,
A feed roller 19 for feeding the peeled leader tape 14,
It comprises a take-up reel 20 for taking up the sent leader tape 14.

Next, the internal structure of the crimping head portion 11 will be described with reference to FIGS. In FIG. 2, reference numeral 21 is an elevating plate which is vertically moved (arrow N1) by elevating means (not shown) such as a cylinder. Further, 22 is shown in FIG.
As shown in FIG. 3, the holding block is provided with three steps, and the upper portion thereof is pivotally supported by the pivotal support portion 23 on the lower portion of the elevating plate 23 so as to be swingable (arrow N2).

Then, as shown in FIG. 6, the suction tool 12 whose side portions are positioned by the pins 24 is held at the front portion of the holding block 22. Then, the holding plate 26
When is fixed to the holding block 22 with the stop bolt 27, the inclined portion 26a located under the pressing plate 26 engages with the step portion 12a of the suction tool 12, and the suction tool 12 is detachably attached to the holding block 22. It is fixed. The upper surface of the porous material 25 made of ceramics or the like is bonded to the lower end surface of the suction tool 12. The holes of the upper surface and the lower surface 25a of the porous material 25 are open, the holes of the four side surfaces 25b are sealed with resin, and only the vertical airflow is allowed. The porous material 25
The holes of the porous material 25 are likely to be clogged, but since the suction tool 12 and the porous material 25 are removable, the porous material 25
If clogging occurs, the suction tool 12 can be easily removed together with the suction tool 12 for maintenance such as cleaning.

Further, as shown in FIG. 2, the holding block 22
At the upper position of, the central portion of the horizontal adjustment block 30 is fixed to the elevating plate 21 by the fixing bolt 29. Here, as shown in FIG. 3, the left and right ends of the adjustment block 30 are divided into two, and vertical adjustment bolts 31 and 32 are screwed into the divided gaps. Also,
As shown in FIG. 2, reference numerals 33 and 34 denote lock bolts that penetrate the left and right ends of the adjustment block 30 and are screwed into the elevating plate 21.

Here, the lower surface 25a of the porous material 25 for adsorbing the anisotropic conductor 8 is basically parallel to the holding block 22 by being attached as shown in FIG. 6, and has a substantially horizontal posture. Take However, when the lower surface 25a is not level enough, the leveling is performed as follows.

First, the lock bolts 33 and 34 are loosened, and then the adjustment bolts 31 and 3 with the tips of the adjustment bolts 31 and 32 in contact with the upper surface of the holding block 22.
Tighten one and loosen the other. As a result, the inclination of the holding block 22 and the lower surface 25a is changed (arrow N).
2). When a sufficient levelness is obtained, the lock bolts 33 and 34 are tightened to restrain the posture.

Now, as shown in FIG. 3 (cross section AA),
A heater 37 is built in the holding block 22,
When the heater 37 is operated, the temperature of the suction tool 12 and the porous material 25 that are in close contact with the holding block 22 becomes high.
Then, as shown in an enlarged manner in FIG. 5, since the anisotropic conductor 8 is entirely contacted with the lower surface of the porous material 25 together with the leader tape 14, the anisotropic conductor 8 is uniformly heated. The temperature distribution becomes uniform.

Then, as shown in FIGS. 1, 3 and 5,
In order to adsorb the anisotropic conductor 8 (leader tape 14), a joint 38 is attached to the tip of the pipe 35 connected to the suction device 36, and the joint 38 is attached to the lower portion of the holding block 22. And the holding block 2
The inside of 2 and the inside of the suction tool 12 are formed with flow paths 39a and 39b communicating with the mounted joint 38, and the tip end portion 39c of the flow path 39b is closed by the upper surface of the porous material 25. ing. Therefore, the suction device 36
Is operated, the inside of the porous material 25 can be made to have a suction pressure via the flow paths 39a, 39b and the like. As described above, since the holes on the four side surfaces 25b of the porous material 25 are closed, the lower surface 25a of the porous material 25 is inevitably inevitable.
Air is sucked in through a large number of open holes, and the anisotropic conductor 8 can be adsorbed to the lower surface 25a.

In addition, since there are a large number of holes on the lower surface 25a, even a work such as the anisotropic conductor 8 which is likely to be bent is attracted planarly and uniformly so that it has a horizontal posture. Can be held at.

Reference numeral 40 shown in FIG. 4 is a thermocouple, 41, 4
2 is a block 2 for holding a heater 37 and a thermocouple 40, respectively
It is a set screw for fixing to 2.

[0022]

According to the thermocompression bonding apparatus of the present invention , a workpiece can be
The work can be heated uniformly while adsorbing ,
The result of thermocompression bonding can be made more stable.

[Brief description of drawings]

FIG. 1 is a perspective view of a thermocompression bonding apparatus according to an embodiment of the present invention.

FIG. 2 is a front view of the inside of the crimping head portion according to the embodiment of the present invention.

FIG. 3 is a sectional view of FIG. 2A-A.

FIG. 4 is a sectional view of FIG. 2B-B.

FIG. 5 is a partially enlarged view of FIG.

FIG. 6 is an explanatory view of attaching the suction tool according to the embodiment of the present invention.

FIG. 7A is an enlarged view of a conventional suction tool. (B) Temperature distribution diagram of the work with the conventional suction tool

[Explanation of symbols]

8 Anisotropic conductor 12 Suction tool 25 Porous material 37 heater 39 channels

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Claims (3)

(57) [Claims] 1. A suction tool, a holding block for detachably holding the suction tool, and a holding block for the suction tool.
A pressing plate that is detachably fixed to the suction block , a joint that is connected to a suction device, a heater that is built in the holding block and that heats the suction tool, and a porous material that is provided below the suction tool. A thermocompression bonding apparatus, wherein a flow path communicating with the joint is formed in the holding block and the suction tool, and a tip end of the flow path of the suction tool is closed by the porous material. 2. The thermocompression bonding apparatus according to claim 1, further comprising a work supply means for supplying a work directly below the porous material. 3. The thermocompression bonding apparatus according to claim 2, further comprising a positioning table for positioning the substrate directly below the porous material.