JP3484151B2 - Product progress control method and product progress control device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a product progress control method and product progress control for controlling the progress status of the process for each product in a production line in which a plurality of products are sequentially processed by a plurality of process devices. Regarding the device. In particular, it is necessary to change the processing priority of each lot, control the processing progress of each lot, or start, stop, or maintain the process equipment according to the processing progress of each lot. When the present invention is applied to a line for producing or prototyping an LSI, a particular effect can be obtained.

[0002]

2. Description of the Related Art A conventional product progress control device changes the processing priority of a specific product or changes the processing priority of a specific product in accordance with the difference between the progress status of the processing of a specific product and the processing plan of the specific product. It controlled the progress of processing for products.

A conventional product progress control device will be described below with reference to FIG.

FIG. 38 is a block diagram of a conventional product progress control device, which manages the process status management means for managing the process status of a plurality of products in each process device constituting the production line. 1, a progress status collecting means 2 for collecting the progress status of processing for a specific product, a processing plan extracting means 3 for obtaining a processing plan for a specific product, a processing status for a specific product and a processing for a specific product. And a processing priority changing means 4 for changing the processing priority of a specific product based on the result of comparison with the plan.

Specifically, the processing status management means 1 collects the processing start time and the processing end time of each product in each process device constituting the production line, and the processing start time and processing end of each collected product. The time is registered as product processing status information in, for example, a table on a computer storage device. Further, the progress status collecting unit 2 collects the progress status of the processing for a specific product based on the product processing status information. Further, the processing plan extracting means 3 extracts a processing plan of a specific product from the processing plans of a plurality of products stored in advance in a table or the like on a computer storage device. Further, the processing priority changing unit 4 compares the progress status of the processing for the specific product with the processing plan of the specific product, and when the progress status of the processing for the specific product is behind the plan, A specific product is given a higher processing priority in order to give priority to the processing of a specific product over other products, while the processing progress of a specific product is ahead of plan. Lower the processing priority of.

[0006]

However, as described above, the conventional product progress control apparatus appropriately changes the processing priority of the specific product in accordance with the progress status of the processing for the specific product. Since the process for a specific product is to be performed as planned, the problem described below occurs.

(1) Even if there is a related product, which is a product that must be processed in association with the progress of the processing for a specific product, depending on the progress status of the processing for the related product. You cannot control the progress of the process for a particular product. For example, if the progress of processing related products is ahead of plan,
The processing for a specific product cannot proceed faster than planned. In particular, in the production or trial production of LSI products, it is often the case that the processing conditions or progress of other lots (related lots) are determined after confirming the characteristics of a particular lot during manufacturing. Although it is a very important issue to control the progress of the process for a specific lot according to the progress of the process for, the problem cannot be solved by the conventional product progress control device. As the miniaturization of LSI progresses,
This issue becomes even more important as more and more processing conditions need to be considered and confirmed in production and prototype production lines.

(2) Even if it is necessary to start up, shut down, or maintain the process equipment in accordance with the progress of the treatment of the product, the process equipment should be installed so as not to hinder the product processing. It is not possible to give instructions for startup, shutdown, or maintenance.

(3) At least one that must be processed in association with the progress of processing for a particular product
Even if there is a related product group that is one product, determine the processing priority of a specific product so as to correspond to the number of products that make up the related product group or the processing priority of the related product group. I can't. In particular, when manufacturing or prototyping an LSI product, it is often the case that the processing conditions for a related lot group are determined after confirming the characteristics of a particular lot during manufacturing. Although it is very important to determine the processing priority of a specific lot so as to correspond to the number of lots that make up the related lot group or the processing priority of the related lot group, It cannot be solved by the conventional product progress control device.

In view of the above, it is a first object of the present invention to make it possible to control the progress of processing for a specific product in accordance with the progress of processing for related products.
The second purpose is to be able to control the operation of the process equipment according to the progress of the processing for the product, and the specific product so as to correspond to the number of products constituting the related product group or the processing priority of the related product group. A third object is to be able to determine the processing priority of.

[0011]

In order to achieve the above first object, a first product progress control method according to the present invention comprises:
Assuming a product progress control method for controlling the progress of processes for multiple products in a production line that sequentially processes multiple products by multiple devices, manages the status of processes for multiple products in multiple devices. Accordingly, after collecting the progress status of the processing for the first product among the plurality of products, the progress status of the processing for the first product is collected and related to the first product among the plurality of products. The processing priority of the second product to be changed is changed.

According to the first product progress control method, the progress status of the process for the first product of the plurality of products is managed by managing the progress status of the processing for the plurality of products in the plurality of devices constituting the production line. After collecting, the processing priority of the second product related to the first product is changed according to the collection result. Therefore, the progress status of the processing for the second product, that is, the progress status of the second product can be controlled in accordance with the progress status of the collected first product, that is, the progress status of the first product. In other words, processing for a plurality of products can be performed while being associated with each other.

In the first product progress control method, when the processing priority of the second product is changed, the progress status of the collected first product is delayed with respect to the first product processing plan. If the processing progress of the collected first product is ahead of the processing plan of the first product, the processing priority of the second product is lowered when the second product is processed. It is preferable to increase the processing priority.

In this way, when the progress of the first product is behind the plan, the processing for the second product can be made slower than the plan, while the progress of the first product is delayed. Second, if you are ahead of plan
The processing of the product can proceed faster than planned. Therefore, it is necessary to examine or confirm the processing conditions of other products based on the processing results (process results or LSI characteristics, etc.) of a specific product. Adjust the processing conditions during mass production so that the same performance as the prototype is obtained), etc., and adjust the processing for other products according to the progress status (delay or advance against the plan) of the specific product. The progress can be controlled, and as a result, the processes for a plurality of products can be associated with each other and proceed.

In the first product progress control method, when the process priority of the second product is changed, the progress status of the collected process for the first product is delayed from the process plan of the first product. If so, it is preferable to increase the processing priority of the second product.

In this way, when the progress status of the processing for the first product is behind the plan, in other words, when the completion or delivery of the first product is behind the plan, it is the same as the first product. By increasing the processing priority of the second product of the product type, the progress status of the processing for the second product can be accelerated. Therefore, since the second product can be completed early, the delay in delivery of the first product can be covered by the second product.

In order to achieve the above-mentioned first object, a second product progress control method according to the present invention is a process for a plurality of products in a production line in which a plurality of devices sequentially process a plurality of products. Based on the product progress control method for controlling the progress status of the product, by managing the status of the processing for the plurality of products in the plurality of devices, one process performed for the first product of the plurality of products can be performed. After calculating the processing end time or the processing start time, the second product related to the first product is identified in the progress status of the processing for the plurality of products, and then another process performed for the second product. Controls the progress of the process for the second product so that the process ends or starts by the time described above.

According to the second product progress control method, it is performed for the first product of the plurality of products by managing the processing status of the plurality of products in the plurality of devices constituting the production line. After calculating the time when one process finishes or starts the process, by the calculated time, another process performed on the second product related to the first product may finish or start the process. To control the progress of the process for the second product. Therefore, the first
Another process performed on the second product can be performed at the time when one process performed on the second product finishes or starts the process, whereby the first process performed on the second product can be performed.
The progress of the second product can be controlled according to the progress of the second product. In other words, the processing for a plurality of products can proceed in synchronization with each other. Further, it is necessary to examine or confirm the processing conditions when performing the same kind of process as the one process on other products by identifying the processing result of the one process performed on the specific product. In development trial production and mass production launch,
You can control the progress of processing for other products according to the progress of processing for specific products, and as a result,
The processes for a plurality of products can be associated with each other and proceed.

In order to achieve the above-mentioned first object, a third product progress control method according to the present invention is a method for processing a plurality of products in a production line in which a plurality of devices are sequentially processed. Based on the product progress control method for controlling the progress status of the product, by managing the status of the processing for the plurality of products in the plurality of devices, one process performed for the first product of the plurality of products can be performed. After calculating the processing end time or the processing start time, in the progress status of the processing for the plurality of products, specify the other processing related to the one process and performed for the second product of the plurality of products, After that, the progress status of the processing for the second product is controlled so that the other steps do not start the processing by the above time.

According to the third product progress control method, it is performed for the first product of the plurality of products by managing the processing status of the plurality of products in the plurality of devices constituting the production line. After calculating the time when one process finishes or starts the process, the second process is performed so that another process related to the one process and performed on the second product does not start the process by the calculated time. Controls the progress of processing for your product. Therefore, the execution of the other steps performed on the second product can be stopped until the time when the one step performed on the first product ends or starts the processing, whereby the first step performed on the second product can be stopped. The progress of the second product can be controlled according to the progress of the first product. Further, it is necessary to examine or confirm the processing conditions when performing the same kind of process as the one process on other products by identifying the processing result of the one process performed on the specific product. In the development trial production, the mass production start-up, etc., the processing for other products can be automatically suspended until the processing for one process performed for a specific product is completed. As a result, it is possible to save the trouble of giving an instruction to interrupt the product processing and prevent troubles caused by forgetting the instruction.

In order to achieve the above-mentioned second object, a fourth product progress control method according to the present invention is a process for a plurality of products in a production line in which a plurality of devices are sequentially processed for the plurality of products. Assuming a product progress control method for controlling the progress status of a product, by managing the status of processing of a plurality of products in a plurality of devices, one process performed on one product of the plurality of products is processed. After calculating the time to start, start up by the time described above for one device that performs one step among a plurality of devices,
Instruct to complete shutdown or maintenance.

According to the fourth product progress control method, by controlling the processing status of a plurality of products in a plurality of devices constituting a production line, one of the plurality of products can be processed. After calculating the time at which the process starts, by the calculated time, instruct one device that executes one process among the plurality of devices to start up, shut down, or perform maintenance. . For this reason, it is possible to give an operation instruction to a device that performs the one process, that is, a process device, in accordance with the time when the one process performed on the specific product starts processing. The operation of the process equipment can be controlled according to the progress. That is, when a process to be performed on a specific product starts processing, the process device that executes the process can always be kept in an operating state. The delay of can be reduced. Also, L
Since the process device used less frequently in SI development or trial production can be operated only when the product is processed, resources (electricity, gas, water, chemical liquid, etc.) can be saved.

In order to achieve the above-mentioned third object, a fifth product progress control method according to the present invention is a process for a plurality of products in a production line in which a plurality of devices are sequentially processed. Based on the status of processing for a plurality of products by managing the status of processing for a plurality of products in a plurality of devices on the premise of a product progress control method for controlling the progress status of a plurality of products,
After identifying a first related product group that is at least one product related to the product and a second related product group that is at least one product related to the second product of the plurality of products , The processing priority of the first product or the processing priority of the second product is changed based on the number of products forming each of the first related product group and the second related product group.

According to the fifth product progress control method, the first related product group related to the first product is specified and the first related product group is specified based on the processing status of the plurality of products in the plurality of devices constituting the production line. After identifying the second related product group related to the second product, the processing priority of the first product or the first related product group is determined based on the number of products constituting each of the first related product group and the second related product group. Change the processing priority of the second product. Therefore, the processing priority of each product can be determined so as to correspond to the number of products forming the related product group.

In the fifth product progress control method, when the processing priority of the first product or the processing priority of the second product is changed, the number of products constituting the first related product group becomes the second. When the number of products forming the related product group is larger than the number of products forming the related product group, the processing priority of the first product is increased or the processing priority of the second product is decreased, while the products forming the second related product group. When the number is larger than the number of products forming the first related product group, it is preferable to increase the processing priority of the second product or decrease the processing priority of the first product.

In this manner, the processing result of one process performed on a specific product is determined, and the process of the same kind of process as the one process is performed on the related product group of the specific product. LSIs whose conditions need to be examined or confirmed
In the development trial production and the mass production start-up, the processing priority can be set higher as the number of products forming the related product group increases. As a result, it is possible to reduce the number of related products that are in the processing waiting state or the number of related products whose processing is interrupted, and reduce the processing waiting time of each related product. Can be completed with.

In order to achieve the above-mentioned third object, a sixth product progress control method according to the present invention is a process for a plurality of products in a production line in which a plurality of devices sequentially process a plurality of products. Based on the status of processing for a plurality of products by managing the status of processing for a plurality of products in a plurality of devices on the premise of a product progress control method for controlling the progress status of a plurality of products,
After identifying a first related product group that is at least one product related to the product and a second related product group that is at least one product related to the second product of the plurality of products , The processing priority of the first product or the processing priority of the second product is changed based on the processing priority of each of the first related product group and the second related product group.

According to the sixth product progress control method, the first related product group related to the first product is specified and the first related product group is specified based on the processing status of the plurality of products in the plurality of devices constituting the production line. After identifying the second related product group related to the second product, the processing priority of the first product or the second related product group is determined based on the processing priority of each of the first related product group and the second related product group. Change the processing priority of the product.
Therefore, the processing priority of each product can be determined so as to correspond to the processing priority of the related product group.

In the sixth product progress control method, when the processing priority of the first product or the processing priority of the second product is changed, the processing priority of the first related product group is changed to the second relationship. If it is higher than the processing priority of the product group, the processing priority of the first product is increased or the processing priority of the second product is decreased, while the processing priority of the second related product group is set to the first. When it is higher than the processing priority of one related product group, it is preferable to increase the processing priority of the second product or decrease the processing priority of the first product.

In this way, the process result of one process performed on a specific product is determined, and the process of performing the same type of process as the one process on the related product group of the specific product. LSIs whose conditions need to be examined or confirmed
In the development trial production, the mass production start-up, etc., the higher the processing priority of the related product group, the higher the processing priority. As a result, it is possible to reduce the number of related products that are in the processing waiting state or the number of related products whose processing is interrupted, and reduce the processing waiting time of each related product. Can be completed with.

In order to achieve the above-mentioned third object, a seventh product progress control method according to the present invention is a method for processing a plurality of products in a production line in which a plurality of devices are sequentially processed. Based on the status of processing for a plurality of products by managing the status of processing for a plurality of products in a plurality of devices on the premise of a product progress control method for controlling the progress status of a plurality of products, the first of the plurality of products is controlled.
After identifying a first related product group that is at least one product related to the product and a second related product group that is at least one product related to the second product of the plurality of products , Processing of the first product based on the number of products constituting each of the first related product group and the second related product group and the processing priority of each of the first related product group and the second related product group Change the priority or the processing priority of the second product.

According to the seventh product progress control method, the first related product group related to the first product is specified and the first related product group is specified based on the processing status of the plurality of products in the plurality of devices constituting the production line. After specifying the second related product group related to the second product, the number of products constituting each of the first related product group and the second related product group, and the first related product group and the second related product The processing priority of the first product or the processing priority of the second product is changed based on the processing priority of each group. Therefore, the processing priority of each product can be determined so as to correspond to the number of products forming the related product group and the processing priority of the related product group.

In the seventh product progress control method, when the processing priority of the first product or the processing priority of the second product is changed, the number of products constituting the first related product group and the first product
The importance of the first related product group based on the processing priority of the related product group, and the second relationship based on the number of products forming the second related product group and the processing priority of the second related product group. After determining the importance of the product group, if the importance of the first related product group is higher than the importance of the second related product group, the first
If the priority of the second related product group is higher than the importance of the first related product group while the processing priority of the product is increased or the processing priority of the second product is decreased, It is preferable to increase the processing priority of the second product or decrease the processing priority of the first product.

In this manner, the processing result of one process performed on a specific product is determined, and the process of performing the same type of process as the one process on the related product group of the specific product. LSIs whose conditions need to be examined or confirmed
In the development trial production and mass production start-up, the processing priority can be set higher for the products having a higher importance in the related product group. As a result, it is possible to reduce the number of related products that are in the processing waiting state or the number of related products whose processing is interrupted, and reduce the processing waiting time of each related product. Can be completed with.

In order to achieve the above first object, the first product progress control device according to the present invention is the first product progress control device according to the present invention.
In order to realize the above-mentioned product progress control method, specifically, a product progress control device for controlling the progress status of processing for a plurality of products in a production line that sequentially processes a plurality of products by a plurality of devices is provided. As a premise, a processing status management unit that manages processing statuses of a plurality of products in a plurality of devices, and a processing progress status of a first product of the plurality of products are collected based on a processing status of the plurality of products. A progress status collecting means, a processing plan extracting means for extracting a processing plan of a first product from preset processing plans of a plurality of products, and a progress status of processing for the collected first product. If it is later than the processing plan of the first product, the processing priority of the second product related to the first product of the plurality of products is lowered, and the second product related to the collected first product is processed. That if the progress of the process is ahead processing schedule of the first product, and a processing priority changing means for increasing the processing priority for the second product.

According to the first product progress control device, the progress collecting means processes the first product among the plurality of products based on the process status of the plurality of products in the plurality of devices constituting the production line. After collecting the progress status of the first product, the processing priority changing unit associates with the first product if the progress status of the processing for the collected first product, that is, the progress of the first product is behind the plan. While the processing priority of the second product is lowered, the processing priority of the second product is raised when the progress of the first product is ahead of the plan. Therefore, when the progress of the first product is behind the plan, the process for the second product can be performed later than the plan, while the progress of the first product is faster than the plan. If so, the process for the second product can proceed faster than planned. Therefore,
It is necessary to examine or confirm the processing conditions of other products after determining the processing results of the specific products. It is possible to control the progress status of the processing for the products, and as a result, the processing for the plurality of products can be associated with each other and proceed.

In order to achieve the above-mentioned first object, the second product progress control device according to the present invention is the first product progress control device according to the present invention.
In order to realize the above-mentioned product progress control method, specifically, a product progress control device for controlling the progress status of processing for a plurality of products in a production line that sequentially processes a plurality of products by a plurality of devices is provided. As a premise, a processing status management unit that manages processing statuses of a plurality of products in a plurality of devices, and a processing progress status of a first product of the plurality of products are collected based on a processing status of the plurality of products. A progress status collecting means, a processing plan extracting means for extracting a processing plan of a first product from preset processing plans of a plurality of products, and a progress status of processing for the collected first product. And a processing priority changing unit for increasing the processing priority of the second product related to the first product among the plurality of products when the processing plan of the first product is behind. .

According to the second product progress control device, the progress status collecting means processes the first product of the plurality of products based on the process status of the plurality of products in the plurality of devices constituting the production line. After collecting the progress status of the first product, the processing priority changing unit associates with the first product if the progress status of the processing for the collected first product, that is, the progress of the first product is behind the plan. Increase the processing priority of the second product. Therefore, when the progress status of the processing for the first product is behind the plan, in other words, when the completion or delivery of the first product is behind the plan, the second product of the same product type as the first product is delayed. By increasing the processing priority of the product, the progress status of the processing for the second product can be accelerated. Therefore, since the second product can be completed early, the delay in delivery of the first product can be covered by the second product.

In order to achieve the above first object, the third product progress control apparatus according to the present invention is the second product progress control apparatus according to the present invention.
In order to realize the above-mentioned product progress control method, specifically, a product progress control device for controlling the progress status of processing for a plurality of products in a production line that sequentially processes a plurality of products by a plurality of devices is provided. As a premise, a processing status management unit that manages processing statuses of a plurality of products in a plurality of devices, and one of a plurality of products based on the processing status of a plurality of products are performed. A process end start time calculating means for calculating a time at which the process ends or starts processing, a related product searching means for specifying a second product related to the first product in the progress status of the process for the plurality of products, A product progress indicator that controls the progress of the process for the second product so that the other process performed on the second product ends or starts by the time described above. It is equipped with a door.

According to the third product progress control device, the process end start time calculating means calculates the first product of the plurality of products based on the processing status of the plurality of products in the plurality of devices constituting the production line. After calculating the time when one process to be performed for the process ends or starts, the product progress instruction means performs the second product related to the first product by the calculated time. The progress of the process for the second product is controlled so that the other processes end or start the process. Therefore, another process performed on the second product can be performed at the time when one process performed on the first product finishes or starts the process, whereby the first process performed on the second product can be performed. The progress of the second product can be controlled according to the progress of the first product. In other words, the processing for a plurality of products can proceed in synchronization with each other.

In order to achieve the above first object, the fourth product progress control device according to the present invention is the third product progress control device according to the present invention.
In order to realize the above-mentioned product progress control method, specifically, a product progress control device for controlling the progress status of processing for a plurality of products in a production line that sequentially processes a plurality of products by a plurality of devices is provided. As a premise, a processing status management unit that manages processing statuses of a plurality of products in a plurality of devices, and one of a plurality of products based on the processing status of a plurality of products are performed. Process end start time calculating means for calculating the time at which the process ends or starts the process, and is performed for the second product of the plurality of products that is related to one process in the progress status of the process for the plurality of products. Related process search means for specifying another process to be performed, and product progress for controlling the progress of the process for the second product so that the process does not start by the other process. And a stop means.

According to the fourth product progress control device, the process end start time calculating means determines the first product of the plurality of products based on the processing status of the plurality of products in the plurality of devices constituting the production line. After calculating the time at which the one process to be performed for the process ends or starts, the product progress stop means is associated with the one process and performed on the second product by the calculated time. The progress of the process for the second product is controlled so that the other processes do not start the process. Therefore, the execution of the other steps performed on the second product can be stopped until the time when the one step performed on the first product ends or starts the processing, whereby the first step performed on the second product can be stopped. The progress of the second product can be controlled according to the progress of the first product.

In order to achieve the above second object, the fifth product progress control apparatus according to the present invention is the fourth product progression control apparatus according to the present invention.
In order to realize the above-mentioned product progress control method, specifically, a product progress control device for controlling the progress status of processing for a plurality of products in a production line that sequentially processes a plurality of products by a plurality of devices is provided. As a premise, a processing status management unit that manages processing statuses of a plurality of products in a plurality of devices, and one step performed for one of the plurality of products based on the processing status of the plurality of products. Process start time calculating means for calculating the time when the process starts, device searching means for identifying one device that executes one process among a plurality of devices, and whether one device is in the operating state at the time If the device state inspection means for inspecting whether or not the one device is not in the operating state at the above time, the one device is started up by the above time. Includes a device start-up instruction means for instructing to complete the maintenance.

According to the fifth product progress control device, the process start time calculating means determines one of the plurality of products based on the processing status of the plurality of products in the plurality of devices constituting the production line. After calculating the time at which the process to be performed by one process to be performed is performed, at the calculated time, when one device that performs one process among the plurality of devices is not in the operating state, the device start-up instruction means, Instruct one device to complete startup or maintenance by the calculated time. For this reason, when one process performed on a specific product starts processing, the device that executes the one process, that is, the process device, can always be kept in the operating state. It is possible to reduce the delay in processing the product.

In order to achieve the above-mentioned third object, the sixth product progress control device according to the present invention is the fifth product progress control device according to the present invention.
In order to realize the above-mentioned product progress control method, specifically, a product progress control device for controlling the progress status of processing for a plurality of products in a production line that sequentially processes a plurality of products by a plurality of devices is provided. As a premise, a processing status management unit that manages processing statuses of a plurality of products in a plurality of devices, and at least one product related to a first product of the plurality of products based on a processing status of the plurality of products. To identify a first related product group that is
Second related product group that is at least one product related to the second product of the plurality of products, based on the related product group search means and the processing status of the plurality of products. The product group search means, the product number comparison means for comparing the number of products forming each of the first related product group and the second related product group, and the number of products forming the first related product group are second. When the number of products forming the related product group is larger than that of the first product, the processing priority of the first product is set higher than that of the second product, while the number of products forming the second related product group is first. And a processing priority changing unit that sets the processing priority of the second product higher than the processing priority of the first product when the number of products is larger than the number of products constituting the related product group.

According to the sixth product progress control device, the first related product group searching means determines whether the first related product group searching means is based on the processing statuses of the plurality of products in the plurality of devices constituting the production line.
The first related product group related to the product of
After the second related product group searching means specifies the second related product group related to the second product based on the processing status of the plurality of products, the processing priority changing means determines the first related product group. When the number of products forming the second related product is larger than the number of products forming the second related product group, the processing priority of the first product is set higher than the processing priority of the second product, while the second related product When the number of products forming the group is larger than the number of products forming the first related product group, the processing priority of the second product is set higher than the processing priority of the first product. Therefore, the processing priority of each product can be determined so as to correspond to the number of products forming the related product group. In addition, since the processing priority is set higher as the number of products forming the related product group increases, the number of related products in the processing waiting state or the number of related products whose processing is interrupted can be reduced and It is possible to reduce the processing waiting time of related products.

In order to achieve the above-mentioned third object, the seventh product progress control device according to the present invention is the sixth product progress control device according to the present invention.
In order to realize the above-mentioned product progress control method, specifically, a product progress control device for controlling the progress status of processing for a plurality of products in a production line that sequentially processes a plurality of products by a plurality of devices is provided. As a premise, a processing status management unit that manages processing statuses of a plurality of products in a plurality of devices, and at least one product related to a first product of the plurality of products based on a processing status of the plurality of products. To identify a first related product group that is
Second related product group that is at least one product related to the second product of the plurality of products, based on the related product group search means and the processing status of the plurality of products. Product group search means, processing priority comparison means for comparing the respective processing priorities of the first related product group and the second related product group, and the processing priority of the first related product group is the second related product group. If the processing priority of the first product is higher than the processing priority of the product group, the processing priority of the first product is higher than the processing priority of the second product, and the processing priority of the second related product group is the first related product. When the processing priority of the second product is higher than the processing priority of the group, the processing priority changing unit that makes the processing priority of the second product higher than the processing priority of the first product is provided.

According to the seventh product progress control apparatus, the first related product group search means determines whether the first related product group search means is based on the processing status of the plurality of products in the plurality of devices constituting the production line.
The first related product group related to the product of
After the second related product group searching means specifies the second related product group related to the second product based on the processing status of the plurality of products, the processing priority changing means determines the first related product group. If the processing priority of is higher than the processing priority of the second related product group, the processing priority of the first product is set higher than the processing priority of the second product, while the processing priority of the second related product group is increased. When the processing priority is higher than the processing priority of the first related product group,
The processing priority of the second product is set higher than that of the first product. Therefore, the processing priority of each product can be determined so as to correspond to the processing priority of the related product group. Further, since the higher the processing priority of the related product group is, the higher the processing priority is, the number of related products in the processing waiting state or the number of related products in which the processing is interrupted can be reduced and each related product can be reduced. The processing waiting time of the product can be reduced.

In order to achieve the above-mentioned third object, an eighth product progress control device according to the present invention is the seventh product progressing device according to the present invention.
In order to realize the above-mentioned product progress control method, specifically, a product progress control device for controlling the progress status of processing for a plurality of products in a production line that sequentially processes a plurality of products by a plurality of devices is provided. As a premise, a processing status management unit that manages processing statuses of a plurality of products in a plurality of devices, and at least one product related to a first product of the plurality of products based on a processing status of the plurality of products. To identify a first related product group that is
Second related product group that is at least one product related to the second product of the plurality of products, based on the related product group search means and the processing status of the plurality of products. Product group search means, first importance degree calculation means for obtaining the importance degree of the first related product group based on the number of products forming the first related product group and the processing priority of the first related product group, Second importance degree calculating means for obtaining the importance degree of the second related product group based on the number of products constituting the second related product group and the processing priority of the second related product group, and the first related product group. And an importance comparing means for comparing the respective importances of the second related product group, and if the importance of the first related product group is higher than that of the second related product group, While making the processing priority higher than the processing priority of the second product,
When the importance of the second related product group is higher than that of the first related product group, the processing priority changing means for setting the processing priority of the second product higher than the processing priority of the first product. It has and.

According to the eighth product progress control device, the first related product group search means determines whether the first related product group search means is based on the processing status of the plurality of products in the plurality of devices constituting the production line.
The first related product group related to the product of
After the second related product group searching means specifies the second related product group related to the second product based on the processing status of the plurality of products, the first importance degree calculating means determines the first related product. The importance of the first related product group is obtained based on the number of products in the product group and the processing priority, and the second importance degree calculating means determines the second importance based on the number of products and the processing priority of the second related product group. Of the related product group of the first related product is calculated, and then the processing priority changing unit determines the processing priority of the first product when the importance of the first related product group is higher than the importance of the second related product group. Second degree
If the importance of the second related product group is higher than that of the first related product group while the processing priority of the second product is higher than that of the first product, the processing priority of the second product is set to that of the first product. Set higher than the processing priority. Therefore, the processing priority of each product can be determined so as to correspond to the importance of the related product group, that is, the number of products and the processing priority of the related product group. In addition, the higher the priority of the related product group, the higher the processing priority. Therefore, it is possible to reduce the number of related products that are in the processing waiting state or the number of related products whose processing is interrupted and to reduce the number of related products. The processing waiting time can be reduced.

[0051]

BEST MODE FOR CARRYING OUT THE INVENTION A product progress control method and a product progress control device according to each embodiment of the present invention described below use a plurality of devices (process devices) to produce or develop an electronic device such as an LSI. This is to control the progress of the processing for the product in the production line that performs the process.

(First Embodiment) With respect to the product progress control method and the product progress control apparatus according to the first embodiment of the present invention, the progress of the process for the product in the LSI development and trial production line will be described in lot units by a computer. A case of controlling will be described with reference to the drawings.

FIG. 1 is a block diagram of a product progress control device according to the first embodiment. The product progress control device is a processing status for each lot in a plurality of process devices constituting an LSI development trial line. Processing status management means 11 for managing the processing status information as product processing status information, and a processing status collecting means 12 for collecting the processing status of a specific lot (hereinafter, referred to as a first lot) based on the product processing status information. A process plan extraction means 13 for extracting the process plan of the first lot from the preset process plans of the respective lots, and a comparison between the progress status of the process for the first lot and the process plan of the first lot. Based on the results
Processing priority changing means 1 for changing the processing priority of a lot related to the first lot (hereinafter referred to as the second lot)
4 and.

[Processing Status Management Unit 11] FIG. 2 shows the processing status management process performed by the processing status management unit 11.
Will be described with reference to.

First, in step S11a, as shown in FIG. 3, the LSI development prototype line is recorded in the record of the process flow management table having at least the lot name, process number, process equipment name, process condition name, and process required time as items. The process flow (lot name, process number, process equipment name, processing condition name, and process required time) is registered for each lot to be flowed in. The location where the process flow management table is created is not particularly limited, and may be created on a storage device of a computer, for example.

Next, in step S11b, as shown in FIG. 4, processing progress management having at least a lot name, a current process number, a current status, a processing priority, a completion target date, a planned completion date, and a related lot name as items. Lot name for each lot flowed on the LSI development trial line on the table,
Register the processing priority (initial value), target completion date, and related lot name. The location for creating the process progress management table is not particularly limited, and may be created on a storage device of a computer, for example.

Here, the processing priority is a scale indicating how much priority is given to processing a target lot compared to other lots, and in the present embodiment, a numerical value representing the processing priority. It is assumed that the smaller the value, the higher the priority of the processing compared to other lots, that is, the higher the processing priority. However, the initial value of the processing priority registered in the processing progress management table is not particularly limited, and for example, a numerical value (for example, 50 or the like) indicating a medium (average) processing priority may be registered.

The completion target date is the date when the processing for the target lot is desired to be completed.

The related lot name is a processing result (process result or LSI) of a specific lot corresponding to the lot name.
It is the name of a lot or the like that needs to be processed after identifying the characteristics, in other words, the name of the lot associated with the progress status of the process for the particular lot (hereinafter referred to as the progress of the particular lot). In the case of the processing progress management table shown in FIG. 4, the lot associated with lot A is lot B, and the lot associated with lot X is lot Y.

Next, in step S11c, every time a signal indicating the start or end of the process of each process performed for each lot is received from each process device, the lot name corresponding to the received signal is used as a search key. As a record, a record is extracted from the process progress management table shown in FIG. 4, and the contents registered in the items of the current process number and the current status of the extracted record are updated. In the case of the process progress management table shown in FIG. 4, lot A is in the state of waiting for the process of the process corresponding to process number 3 (the process in the process corresponding to process number 2 is completed), and lot B Is in the process corresponding to the process number 27,
The lot C is waiting for the process corresponding to the process number 103 (the process in the process corresponding to the process number 102 is completed), and the lot X is processed in the process corresponding to the process number 12. Is in a state of

[Progress Status Collecting Unit 12] FIG. 5 shows a progress status collecting step performed by the progress status collecting unit 12.
Will be described with reference to.

First, in step S12a, using the lot name of the first lot as a search key, the current process number, current status and process priority are extracted from the process progress management table shown in FIG.

Next, in step S12b, using the current process number extracted in step S12a and the lot name of the first lot as search keys, the current process of the first lot is read from the process flow management table shown in FIG. The process flow after the number (process device name, process condition name, and process required time) is extracted.

Next, in step S12c, various conditions of the LSI development / trial production line (the number of process devices, the processing capacity of the process devices, the number of lots flown on the line, etc.) are extracted from a database prepared in advance. .

Next, in step S12d, the current process number, the current status, and the processing priority extracted in step S12a, the process flow extracted in step S12b, and the LSI development trial lines extracted in step S12c. Based on the conditions and the like, a scheduled processing completion date for the first lot is calculated using a lot scheduler and the calculated scheduled processing completion date corresponds to the first lot in the processing progress management table shown in FIG. Register in the scheduled completion date item in the record to

The lot scheduler used to calculate the scheduled completion date of the first lot is not particularly limited, and an existing lot scheduler may be used, for example.

The timing for calculating the scheduled processing completion date of the first lot is not particularly limited, and it may be performed, for example, at regular time intervals, or each process performed on the first lot is processed. It may be performed at the start or the end of the process.

[Process Plan Extracting Means 13] Regarding the process plan extracting step performed by the process plan extracting means 13 shown in FIG.
Will be described with reference to.

That is, in step S13a, the target completion date is extracted from the processing progress management table shown in FIG. 4 using the lot name of the first lot as a search key.

The timing for extracting the target completion date of the first lot is not particularly limited, and it may be performed, for example, at regular time intervals, or each process performed on the first lot is started or processed. It may be performed when the processing is completed, or may be performed when the progress collecting step is performed by the progress collecting means 12.

[Processing priority changing means 14] The processing priority changing step performed by the processing priority changing means 14 will be described with reference to FIG.

First, in step S14a, the planned completion date of the first lot calculated by the progress collecting means 12 is compared with the target completion date of the first lot extracted by the processing plan extracting means 13. . At this time, if “scheduled processing completion date”> “completion target date” (scheduled processing completion date is after the completion target date), it is determined that the progress of the first lot is behind the plan. Further, if “scheduled processing completion date” <“completion target date” (scheduled processing completion date is before the completion target date), it is determined that the progress of the first lot is ahead of plan. If "scheduled completion date of processing" = "target completion date" (scheduled completion date of processing coincides with completion target date), the processing priority changing step may be ended as it is (without doing anything).

If "scheduled completion date">"completion target date", the related lot name is extracted from the process progress management table shown in FIG. 4 using the lot name of the first lot as a search key in step S14b. The lot corresponding to the extracted related lot name, that is, the lot related to the first lot is set as the second lot. Then, step S14c
In, the lot name of the second lot as the search key,
A record is extracted from the process progress management table shown in FIG. 4, and the numerical value registered in the item of process priority of the extracted record is increased. That is, the processing priority of the second lot is lowered. At this time, the method of lowering the processing priority of the second lot is not particularly limited, and for example, the number of days in which the progress of the first lot is behind the plan (“planned completion date of processing” − “targeted completion date”). The processing priority may be lowered accordingly. Specifically, when the progress of the first lot is behind the plan by five days, it is registered in the process priority item of the record corresponding to the second lot in the process progress management table shown in FIG. You may add 5 to a numerical value.

If "scheduled completion date"<"completion target date", the related lot name is extracted from the process progress management table shown in FIG. 4 by using the lot name of the first lot as a search key in step S14d. The lot corresponding to the extracted related lot name, that is, the lot related to the first lot is set as the second lot. Then, step S14e
In, the lot name of the second lot as the search key,
A record is extracted from the process progress management table shown in FIG. 4, and the numerical value registered in the item of the process priority of the extracted record is reduced. That is, the processing priority of the second lot is increased. At this time, the method of increasing the processing priority of the second lot is not particularly limited, and for example, the number of days in which the progress of the first lot is ahead of the plan ("completion target date"-"processing completion date"). The processing priority may be increased according to the above. Specifically, when the progress of the first lot is ahead of the plan by three days, it is registered in the process priority item of the record corresponding to the second lot in the process progress management table shown in FIG. You may subtract 3 from a numerical value.

Next, in step S14f, the processing priority of the second lot changed in step S14c or S14e is set to the processing priority of the record corresponding to the second lot in the processing progress management table shown in FIG. Register to an item.

In step S14b or S14d, when the lot name of the first lot is used as a search key and the related lot name is not extracted from the process progress management table shown in FIG. 4, that is, the lot related to the first lot. When there is no lot to be processed, the process priority changing step may be ended as it is (without doing anything).

Further, the timing of changing the processing priority of the second lot is not particularly limited, and it may be performed, for example, at regular time intervals, or each process performed on the first lot is started or started. It may be performed when the processing is completed, or when the progress collecting step is performed by the progress collecting means 12, or when the process plan extracting step is performed by the process plan extracting means 13. You may go to

As described above, according to the first embodiment, the progress status collecting means 12 includes the processing status managing means 1
Based on the processing status of each lot managed by 1., after collecting the processing progress status of the first lot, specifically, the scheduled processing completion date, the processing priority changing means 14
However, if the scheduled processing completion date of the first lot is later than the completion target date, the processing priority of the second lot related to the first lot is lowered, while the scheduled processing completion date of the first lot is When it is earlier than the completion target date, the processing priority of the second lot is increased. Therefore, when the scheduled processing completion date for the first lot is later than the target completion date, the processing for the second lot can be performed later than planned, while the scheduled processing completion date for the first lot is completed. If it is earlier than the target date, the processing for the second lot can proceed earlier than planned. That is, since the processing priority of the second lot is changed according to the progress status of the processing for the first lot, the progress status of the processing for the second lot is controlled according to the progress status of the processing for the first lot. can do. In addition, in the development and trial production of LSI and the start-up of mass production, where it is necessary to examine or confirm the processing conditions of other lots after determining the processing results of a specific lot,
It is possible to control the progress of the process for other lots according to the progress of the process for a specific lot, and as a result, it is possible to progress the processes for a plurality of lots in association with each other.

Specifically, for example, the final processing result of the first lot or the processing result in the process in the middle of the manufacturing process is used as the second processing result.
In the case of feeding back to the processing conditions in the process of manufacturing the lot, if the progress of the process for the first lot is earlier than expected, the progress of the process for the second lot is also made earlier than expected. Can be implemented early. On the other hand, if the progress status of the processing for the first lot is later than planned, the second
Even if the progress status of the processing for the lot is delayed than expected, the above feedback will not be hindered.

Further, when the final processing result of the second lot or the processing result in the process in the middle of manufacturing is fed back to the processing condition in the process in the middle of manufacturing the first lot, If the progress status of the process is earlier than planned, the progress status of the process for the second lot is also accelerated ahead of schedule, so that the above-described feedback can be implemented early. On the other hand, if the progress status of the process for the first lot is slower than planned, the aforementioned feedback will not be hindered even if the progress status of the process for the second lot is slower than planned.

In the first embodiment, the method of registering, retrieving or extracting data in the processing flow management table or the processing progress management table is not particularly limited, but a DBMS (database management system) is used.
You may perform it using SQL etc. which are equipped with.

Further, in the first embodiment, the processing flow management table or the processing progress management table exists in the storage device of the computer, but instead, it exists in the storage medium on the computer network accessible by the computer. You may. Further, instead of using the processing flow management table or the processing progress management table, a list structure corresponding to each table may be used.

Further, in the first embodiment, in the processing status management process performed by the processing status management means 11, the lots related to the progress of each lot are taken into consideration without considering the delay or advance in the plan of the progress of each lot. The name of the related lot, that is, the related lot name was registered, but instead of this, the related lot name when the progress of each lot is behind the plan and the related lot name when the progress of each lot is ahead of the plan And may be registered separately. In this case, in the processing priority changing step performed by the processing priority changing means 14, the first
It is preferable to extract an appropriate related lot according to the progress or delay with respect to the plan in the lot progress.

Further, in the first embodiment, the related lot name is fixedly registered in the processing status management process performed by the processing status management means 11, but instead of this, in the middle of work in progress, that is, during manufacturing. The related lot name may be registered while being dynamically changed according to the processing result and characteristics of each lot in step 1.

(Modification of First Embodiment) A product progress control method and a product progress control apparatus according to a modification of the first embodiment of the present invention will be described below with reference to the drawings.

The modification of the first embodiment differs from that of the first embodiment in the processing contents of the processing priority changing step performed by the processing priority changing means 14 (see FIG. 1). The process priority changing step performed by the process priority changing means 14 in the modification of the first embodiment will be described with reference to FIG.

First, step S14a of the first embodiment.
Similarly, in step S14a ', the planned processing completion date of the first lot calculated by the progress collecting means 12 is compared with the completion target date of the first lot extracted by the processing plan extracting means 13. At this time, if “scheduled processing completion date”> “completion target date” (scheduled processing completion date is after the completion target date), it is determined that the progress of the first lot is behind the plan. Also, "Scheduled completion date"<
If it is the "completion target date" (the scheduled processing completion date is before the completion target date), it is determined that the progress of the first lot is ahead of the plan. If "scheduled completion date of processing" = "target completion date" (scheduled completion date of processing coincides with completion target date), the processing priority changing step may be ended as it is (without doing anything).

When “scheduled completion date of processing”> “completion target date”, in step S14b ′ similar to step S14b of the first embodiment, the lot name of the first lot is used as a search key and shown in FIG. A related lot name is extracted from the processing progress management table, and a lot corresponding to the extracted related lot name, that is, a lot related to the first lot is set as a second lot. After that, in step S14c ', the lot name of the second lot is used as a search key, and the lot number of
Extract records from the process progress management table shown in
Decrease the value registered in the processing priority item of the extracted record. That is, the processing priority of the second lot is increased. At this time, the method of increasing the processing priority of the second lot is not particularly limited, and for example, the number of days that the progress of the first lot is behind the plan ( “Processing completion schedule”).
The processing priority may be increased in accordance with "day"-"completion target date" . Specifically, when the progress of the first lot is behind the plan by three days, it is registered in the process priority item of the record corresponding to the second lot in the process progress management table shown in FIG. You may subtract 3 from a numerical value.

When “scheduled completion date of processing” <“completion target date”, in step S14d ′ similar to step S14d of the first embodiment, the lot name of the first lot is used as the search key, and the result is shown in FIG. A related lot name is extracted from the processing progress management table, and a lot corresponding to the extracted related lot name, that is, a lot related to the first lot is set as a second lot. After that, in step S14e ', the lot name of the second lot is used as a search key, and the lot number of
Extract records from the process progress management table shown in
Increase the value registered in the processing priority item of the extracted record. That is, the processing priority of the second lot is lowered. At this time, the method of lowering the processing priority of the second lot is not particularly limited. For example, the number of days in which the progress of the first lot is ahead of the plan ( “completion target date”-
The processing priority may be lowered according to the "scheduled completion date" . Specifically, the progress of the first lot is 5 more than planned.
When progressing for a day, 5 may be added to the numerical value registered in the processing priority item of the record corresponding to the second lot in the processing progress management table shown in FIG.

Next, in step S14f ', the processing priority of the second lot changed in step S14c' or S14e 'is set to the processing of the record corresponding to the second lot in the processing progress management table shown in FIG. Register in the priority item.

In step S14b 'or S14d', if the lot name of the first lot is used as a search key and the related lot name is not extracted from the process progress management table shown in FIG. 4, that is, the first lot. If there is no lot related to the process priority changing step, the process priority changing step may be ended as it is (without doing anything).

Further, the timing of changing the processing priority of the second lot is not particularly limited, and it may be performed, for example, at regular time intervals, or each process performed on the first lot may be started or processed. It may be performed when the processing is completed, or when the progress collecting step is performed by the progress collecting means 12, or when the process plan extracting step is performed by the process plan extracting means 13. You may go to

As described above, according to the modified example of the first embodiment, the processing priority changing means 14 determines whether the processing completion date for the first lot is later than the completion completion date. Since the processing priority of the second lot related to the lot is set high, the processing of the second lot can be advanced earlier than planned. That is, when the progress status of the processing for the first lot is behind the plan, in other words, when the completion or delivery of the first lot is behind the plan, the second lot of the same type as the first lot is delayed. By increasing the processing priority of, the progress status of the processing for the second lot can be accelerated. Therefore, since the second lot can be completed early, the delivery delay of the first lot can be covered by the second lot.

In the modification of the first embodiment, in the processing status management process performed by the processing status management means 11, the related lot name and the related lot name when the progress of each lot is behind the plan. In the case of separately registering the related lot name when the progress is ahead of the plan, the process priority changing step performed by the process priority changing means 14 is a process for changing the progress of the first lot to the plan or It is preferable to extract an appropriate related lot according to the delay.

Further, in the modification of the first embodiment,
In the processing priority changing step performed by the processing priority changing means 14, when the scheduled processing completion date of the first lot is earlier than the target completion date, the processing priority of the second lot related to the first lot is set. However, if the planned completion date of the first lot is earlier than the target completion date, the second
It is not necessary to change the processing priority of the lot.

(Second Embodiment) With respect to a product progress control method and a product progress control apparatus according to a second embodiment of the present invention, the progress status of processing for a product in an LSI development trial line will be described in lot units by a computer. A case of controlling will be described with reference to the drawings.

FIG. 9 is a block diagram of a product progress control apparatus according to the second embodiment. The product progress control apparatus is a processing status for each lot in a plurality of process devices constituting an LSI development trial line. Processing status management means 21 for managing as a product processing status information, and one of the steps (hereinafter, referred to as a specific step) performed for a specific lot (hereinafter, referred to as a first lot) is completed or processed. A process end start time calculating means 22 for calculating a start time and a lot related to the first lot (hereinafter, referred to as a second lot).
Related product searching means 23 for specifying the
Then, one of the processes performed for the second lot (hereinafter, referred to as a related process) is the process end start time calculating means 2
Product progress instructing means 24 for controlling the progress status of the process for the second lot so that the process is completed or started by the time calculated by 2.

[Process Status Management Unit 21] The process status management process performed by the process status management unit 21 is shown in FIG.
A description will be given with reference to 0.

First, in step S21a, as in step S11a of the first embodiment, as shown in FIG. 3, at least a lot name, a process number, a process equipment name,
In the record of the processing flow management table having the processing condition name and the process required time as items, the process flow (lot name, process number,
Register the process equipment name, processing condition name, and process required time). The location where the process flow management table is created is not particularly limited, and may be created on a storage device of a computer, for example.

Next, in step S21b, as shown in FIG.
As shown in, process progress management that has at least lot name, current process number, current status, specific process number, scheduled process end time of specific process, scheduled process start time of specific process, related lot name and related process number as items. Lot name for each lot flowed on the LSI development trial line on the table,
Register the specific process number, related lot name, and related process number. The location for creating the process progress management table is not particularly limited, and may be created on a storage device of a computer, for example.

Here, the related process number refers to a lot that needs to be processed based on the processing result of the specific process for the specific lot corresponding to the lot name, that is, a related lot related to the progress of the specific lot. It is a process number of a related process. In the case of the processing progress management table shown in FIG. 11, the related lot name and related process number of the lot A are lots B and 58, and the related lot name and related process number of the lot X are lots Y and 124, respectively.

Next, in step S21c, every time a signal indicating the start or end of the process of each process performed for each lot is received from each process device, the lot name corresponding to the received signal is retrieved as a search key. As a result, a record is extracted from the process progress management table shown in FIG. 11, and the contents registered in the items of the current process number and the current status of the extracted record are updated. In the case of the process progress management table shown in FIG. 11, lot A is in the state of waiting for the process of the process corresponding to process number 3 (the process of the process corresponding to process number 2 is completed), and lot B Is in a state of being processed in the process corresponding to the process number 27, and the lot C is waiting for the process of the process corresponding to the process number 103 (the process in the process corresponding to the process number 102 is completed). ), The lot X is being processed in the process corresponding to the process number 12.

[Process End Start Time Calculating Unit 22] The process end start time calculating process performed by the process end start time calculating unit 22 will be described with reference to FIG.

First, in step S22a, the current process number, current status, and specific process number are extracted from the process progress management table shown in FIG. 11 using the lot name of the first lot as a search key.

Next, in step S22b, using the current process number extracted in step S22a and the lot name of the first lot as search keys, the current process of the first lot is read from the process flow management table shown in FIG. The process flow after the number (process device name, process condition name, and process required time) is extracted.

Next, in step S22c, various conditions of the LSI development / trial production line are extracted from a database prepared in advance.

Next, in step S22d, the current process number, the current status and the specific process number extracted in step S22a, the process flow extracted in step S22b, and the LSI development prototype lines extracted in step S22c. Based on the conditions and the like, a scheduled processing end time or a scheduled processing start time of the specific process for the first lot is calculated using a lot scheduler or the like.

Next, in step S22e, the scheduled processing end time or scheduled processing start time calculated in step S22d is set to the first in the processing progress management table shown in FIG.
Is registered in the item of the scheduled processing end time of the specific process or the scheduled processing start time of the specific process in the record corresponding to the lot. In the case of the process progress management table shown in FIG. 11, the scheduled process end time of the specific process (process number 19) for the lot A is 1999/09/30 14:13, and the specific process (process number 38) for the lot X is processed. Scheduled start time is 19
It is 99/08/20 02:19.

The lot scheduler used to calculate the scheduled processing end time or the scheduled processing start time of the specific process for the first lot is not particularly limited, and an existing lot scheduler may be used, for example.

Further, the timing for calculating the scheduled processing end time or the scheduled processing start time of the specific process for the first lot is not particularly limited, and it may be performed, for example, at regular time intervals, or for the first lot. It may be performed when each process performed for the process starts or ends.

[Related Product Searching Means 23] Regarding the related product searching process performed by the related product searching means 23, FIG.
This will be described with reference to FIG.

That is, in step S23a, the related lot name and the related process number are extracted from the process progress management table shown in FIG. 11 using the lot name of the first lot as a search key. At this time, the lot corresponding to the extracted related lot name, that is, the lot related to the first lot is defined as the second lot.

The timing of specifying the related lot and the related process of the first lot is not particularly limited, and may be performed, for example, at regular time intervals, or each process performed on the first lot is processed. It may be performed at the start or at the end of the process, or the process end start time calculating means 2
It may be performed when the process end start time calculating process in 2 is performed.

[Product Progress Instructing Unit 24] The product progress instructing process performed by the product progress instructing unit 24 is shown in FIG.
This will be described with reference to FIG.

First, in step S24a, by the scheduled processing end time or scheduled processing start time of the specific process for the first lot calculated by the processing finish start time calculating means 22, the second product specified by the related product searching means 23 is selected. A processing schedule for the second lot is created using the lot scheduler so that the related process for the second lot is completed or started. At this time, if necessary, a processing schedule is created so that the second lot is processed with priority over the other lots. In the case of the process progress management table shown in FIG. 11, the scheduled process end time of the specific process (process number 19) for lot A 1999/09/30 1
By 4:13, related process for lot B (process number 5
A process schedule of the lot B is created using the lot scheduler so that the process 8) ends or starts the process. Also, the specific process for the lot X (process number 38)
Scheduled to start processing by 1999/08/20 By 02:19, lot Y
A process schedule of the lot Y is created by using the lot scheduler so that the process (process number 124) related to (1) is completed or started.

Next, in step S24b, the processing schedule of the second lot created in step S24a is transmitted to each process device of the LSI development trial production line.

Note that the processing schedule for the second lot cannot be created so that the related process for the second lot finishes or starts processing by the scheduled processing end time or scheduled processing start time of the specific process for the first lot. In this case, the scheduled time at which the related process for the second lot ends or starts the process is calculated by using the lot scheduler, and the specific process for the first lot ends or starts the process by the calculated time. After creating the processing schedule for the first lot,
Send to each process equipment of SI development trial line.

The lot scheduler used for creating the processing schedule of the second lot is not particularly limited,
For example, an existing lot scheduler may be used.

The timing for creating the processing schedule for the second lot is not particularly limited, and it may be carried out, for example, at regular time intervals, or each step carried out for the first lot may be started or processed. The process may be performed when the process ends, or may be performed when the process end start time calculating unit 22 performs the process end start time calculating process, or the related product searching unit 23 may perform the related product searching process. You may do it when you get it.

As described above, according to the second embodiment, the process end start time calculating means 22 determines the first lot based on the processing status of each lot managed by the processing status managing means 21. After calculating the scheduled processing end time or the scheduled processing start time of the specific process, the product progress instruction means 24 causes the second lot associated with the first lot by the calculated scheduled processing end time or scheduled processing start time. The progress status of the process for the second lot is controlled so that the process related to the process ends or starts the process. Therefore, the related process for the second lot can be carried out in accordance with the scheduled process end time or the scheduled process start time of the specific process for the first lot.
The progress of the second lot can be controlled according to the progress of the first lot. In other words, the processing for a plurality of lots can proceed in synchronization with each other. Further, it is necessary to examine or confirm the processing conditions when performing the process of the same type as the one process for other lots by identifying the process result of the one process performed for a specific lot. In development trial production and mass production start-up, it is possible to control the progress status of processing for other lots according to the progress status of processing for a specific lot, and as a result, it is possible to progress processing for multiple lots in association with each other. it can.

Specifically, for example, in order to feed back the processing result of the related process for the second lot to the processing condition of the specific process for the first lot, before the processing of the specific process for the first lot is started. , The related process for the second lot can be terminated.

Further, in order to feed back the processing result of the related process for the second lot to the processing condition of the process performed after the specific process for the first lot, the first process is performed.
By the end of the specific process for each lot of
It is possible to finish the process related to the lot. This is particularly effective when the next process starts immediately after the end of the specific process in the process for the first lot.

In the second embodiment, the method of registering, searching or extracting data for the processing flow management table or the processing progress management table is not particularly limited, but a DBMS (database management system) is used.
You may perform it using SQL etc. which are equipped with.

Further, in the second embodiment, the processing flow management table or the processing progress management table exists in the storage device of the computer, but instead, it exists in the storage medium on the computer network accessible by the computer. You may. Further, instead of using the processing flow management table or the processing progress management table, a list structure corresponding to each table may be used.

Further, in the second embodiment, the specific process number, the related lot name or the related process number is fixedly registered in the processing status management process performed by the processing status management means 21, but instead of this, The specific process number, the related lot name, or the related process number may be dynamically changed and registered according to the processing result and characteristics of each lot in the process of work.

(Third Embodiment) Hereinafter, regarding a product progress control method and a product progress control apparatus according to a third embodiment of the present invention, the progress status of processing for a product in an LSI development trial line is analyzed by a computer in lot units. A case of controlling will be described with reference to the drawings.

FIG. 15 is a block diagram of a product progress control device according to the third embodiment. The product progress control device is a processing status for each lot in a plurality of process devices that constitute an LSI development trial line. Processing status management means 31 for managing as a product processing status information, and one of the processes (hereinafter, referred to as a specific process) performed for a specific lot (hereinafter, referred to as a first lot) is completed or processed. Process end start time calculating means 32 for calculating the start time, related process searching means 33 for specifying a related process which is one of the processes related to the specific process and performed for the second lot, and the related process. The product progress stopping means 34 for controlling the progress of the processing for the second lot so that the processing does not start by the time calculated by the process end start time calculating means 32. It is equipped with a.

[Processing Status Management Unit 31] The processing status management process performed by the processing status management unit 31 is similar to the processing status management process (see FIG. 10) performed by the processing status management unit 21 of the second embodiment. Therefore, the description is omitted.

[Process End Start Time Calculation Means 32] The process end start time calculation means 32 performs the process end start time calculation step. The process end start time calculation means 22 of the second embodiment performs the process end start time. Since it is the same as the calculation step (see FIG. 12), description thereof will be omitted.

[Related Process Searching Unit 33] FIG. 1 shows the related process searching process performed by the related process searching unit 33.
This will be described with reference to FIG.

That is, in step S33a, the related lot name and related process number are extracted from the process progress management table shown in FIG. 11 using the lot name of the first lot as a search key. At this time, the lot (related lot) corresponding to the extracted related lot name is set as the second lot. In the case of the process progress management table shown in FIG. 11, the related process of the specific process (process number 19) for lot A is lot B.
The process of the process number 58 performed for the lot X, and the process related to the specific process (process number 38) for the lot X is the process of the process number 124 performed for the lot Y.

The timing for specifying the related lot and the related process of the first lot is not particularly limited, and may be carried out, for example, at regular time intervals, or each process carried out for the first lot is processed. It may be performed at the start or at the end of the process, or the process end start time calculating means 3
It may be performed when the process end start time calculating process in 2 is performed.

[Product Progress Stopping Means 34] The product progress stopping process performed by the product progress stopping means 34 is shown in FIG.
This will be described with reference to FIG.

First, in step S34a, by the scheduled process end time or scheduled process start time of the specific process for the first lot calculated by the process finish start time calculating means 32, the first process specified by the related process searching means 33 is selected. To prevent the related process for 2 lots from starting processing,
A processing schedule for the second lot is created using the lot scheduler. In the case of the process progress management table shown in FIG. 11, the related process (process number 58) for the lot B starts processing by the scheduled process end time 1999/09/30 14:13 for the specific process (process number 19) for the lot A. In order not to do so, the processing schedule for the lot B is created using the lot scheduler. Also, the scheduled processing start time of the specific process (process number 38) for lot X 1999/08/20 02:19
Up to the related process for lot Y (process number 124)
The process schedule for the lot Y is created using the lot scheduler so that the process does not start.

Next, in step S34b, the processing schedule of the second lot created in step S34a is transmitted to each process device of the LSI development trial production line.

At the time of creating the processing schedule for the second lot, if the process immediately before the related process has been performed for the second lot, the process for the second lot is interrupted. You can create a second lot processing schedule using the lot scheduler like this,
Alternatively, a predetermined process device may be instructed to immediately stop the process for the second lot without using the lot scheduler.

The lot scheduler used to create the processing schedule for the second lot is not particularly limited.
For example, an existing lot scheduler may be used.

The timing for creating the processing schedule for the second lot is not particularly limited, and it may be carried out, for example, at regular time intervals, or each step carried out on the first lot may be started or processed. The process may be performed when the process ends, or may be performed when the process end start time calculating unit 32 performs the process end start time calculating process, or the related process searching unit 33 may perform the related product searching process. You may do it when you get it.

As described above, according to the third embodiment, the process end start time calculating means 32 for the first lot is based on the processing status for each lot managed by the processing status managing means 31. After calculating the scheduled processing end time or the scheduled processing start time of the specific process, the product progress stopping unit 34 is associated with the specific process for the first lot by the calculated scheduled processing end time or scheduled processing start time, and The progress status of the process for the second lot is controlled so that the related process performed for the second lot does not start. Therefore, it is possible to stop the execution of the related process for the second lot until the scheduled processing end time or the scheduled processing start time of the specific process for the first lot, and thereby, according to the progress of the first lot. The progress of the second lot can be controlled. In addition, it is necessary to examine or confirm the processing conditions when performing a process of the same type as the one process for other lots by identifying the process result of the one process performed for a specific lot. In the development trial production, the mass production start-up, etc., the processing for other lots can be automatically interrupted until the processing of one process performed for a specific lot is completed. As a result, it is possible to save the trouble of giving an instruction to interrupt the product processing and prevent troubles caused by forgetting the instruction.

Specifically, for example, when it is necessary to feed back the processing result of the specific process for the first lot to the processing condition of the related process for the second lot,
It is possible to prevent the related process for the second lot from being processed until the specific process for the second lot is completed.

Further, when it is necessary to set or change the processing conditions of the related process for the second lot while observing the processing state in the specific process for the first lot, the specification for the first lot can be performed. The related process for the second lot may not be started until the process is started.

In the third embodiment, the method of registering, retrieving or extracting data in the processing flow management table or the processing progress management table is not particularly limited.
You may perform it using SQL etc. with which DBMS (database management system) etc. are equipped.

Further, in the third embodiment, the processing flow management table or the processing progress management table exists in the storage device of the computer, but instead, it exists in the storage medium on the computer network accessible by the computer. You may. Further, instead of using the processing flow management table or the processing progress management table, a list structure corresponding to each table may be used.

(Fourth Embodiment) With respect to a product progress control method and a product progress control apparatus according to a fourth embodiment of the present invention, the progress of processing of a product in an LSI development trial line will be described in lot units by a computer. A case of controlling will be described with reference to the drawings.

FIG. 18 is a block diagram of a product progress control apparatus according to the fourth embodiment. The product progress control apparatus is a processing status for each lot in a plurality of process devices constituting an LSI development trial line. And the processing start time of one of the lots (hereinafter, referred to as the target lot) (hereinafter, referred to as a specific step) to start the processing. A process start time calculating means 42 for calculating and a device searching means 43 for specifying a process device for executing a specific process.
And a device state inspecting unit 44 that inspects whether the process device is in the operating state at the calculated time, and if it is determined that the process device is not in the operating state at the calculated time, calculates the process device. Device start-up instruction means 45 for instructing start-up or maintenance to be completed by the designated time.

[Process Status Management Unit 41] Regarding the process status management process performed by the process status management unit 41, FIG.
This will be described with reference to FIG.

First, in step S41a, as in step S11a of the first embodiment, as shown in FIG. 3, at least a lot name, a process number, a process equipment name,
In the record of the processing flow management table having the processing condition name and the process required time as items, the process flow (lot name, process number,
Register the process equipment name, processing condition name, and process required time). The location where the process flow management table is created is not particularly limited, and may be created on a storage device of a computer, for example.

Next, in step S41b, as shown in FIG.
As shown in, the LS is added to the process progress management table having at least the lot name, the current process number, the current status, the specific process number and the scheduled process start time of the specific process as items.
I Register the lot name and specific process number for each lot to be sent on the development and trial production line. The location for creating the process progress management table is not particularly limited, and may be created on a storage device of a computer, for example.

Next, in step S41c, every time a signal indicating the start or end of the process of each process performed on each lot is received from each process device, the lot name corresponding to the received signal is used as a search key. As a record, a record is extracted from the process progress management table shown in FIG. 20, and the contents registered in the items of the current process number and the current status of the extracted record are updated. In the case of the process progress management table shown in FIG. 20, lot A is in the state of waiting for the process of the process corresponding to process number 3 (the process of the process corresponding to process number 2 is completed), and lot B Is in a state of being processed in the process corresponding to the process number 27, and the lot C is waiting for the process of the process corresponding to the process number 103 (the process in the process corresponding to the process number 102 is completed). ), The lot X is being processed in the process corresponding to the process number 12.

Next, in step S41d, as shown in FIG.
As shown in, the LS is added to the device operation management table having at least the process device name and the scheduled operation time zone as items.
I Register the scheduled operation time period for each process device that constitutes the development trial line. The scheduled operating time zone is registered each time the scheduled operating time zone of each process device is determined, and the scheduled operating time zone is updated every time the scheduled operating time zone is changed or canceled. The location of the device operation management table is not particularly limited, and may be created on a storage device of a computer, for example.

[Process Start Time Calculating Means 42] The process start time calculating step performed by the process start time calculating means 42 will be described with reference to FIG.

First, in step S42a, the current process number, current status, and specific process number are extracted from the process progress management table shown in FIG. 20 using the lot name of the target lot as a search key.

Next, in step S42b, using the current process number and the lot name of the target lot extracted in step S42a as search keys, the process from the process flow management table shown in FIG. Flow (process equipment name, processing condition name and process time)
To extract.

Next, in step S42c, various conditions of the LSI development / trial production line are extracted from a database prepared in advance.

Next, in step S42d, the current process number, current status, and specific process number extracted in step S42a, the process flow extracted in step S42b, and the LSI development prototype lines extracted in step S42c. Based on the conditions and the like, a scheduled processing start time of the specific process for the target lot is calculated using a lot scheduler or the like.

Next, in step S42e, the scheduled processing start time calculated in step S42d is registered in the scheduled processing start time item of the specific process in the record corresponding to the target lot in the processing progress management table shown in FIG. . In the case of the process progress management table shown in FIG. 20, the scheduled process start time of the specific process (process number 38) for lot X is 1999/08/20 02:19.

The lot scheduler used to calculate the scheduled process start time of the specific process for the target lot is not particularly limited, and an existing lot scheduler may be used, for example.

Further, the timing for calculating the scheduled processing start time of the specific process for the target lot is not particularly limited, and it may be performed at regular time intervals, or, for example .
It may be performed when each process performed on the elephant lot starts or ends.

[Device Searching Unit 43] The device searching process performed by the device searching unit 43 will be described with reference to FIG.

First, in step S43a, the specific process number is extracted from the process progress management table shown in FIG. 20 using the lot name of the target lot as a search key. When the target lot is the lot X in the processing progress management table shown in FIG. 20, the specific process number 38 is extracted.

Next, in step S43b, the process device name is extracted from the process flow management table shown in FIG. 3 using the specific process number extracted in step S43a and the lot name of the target lot as search keys. At this time, the process device corresponding to the extracted process device name becomes the process device that executes the specific process for the target lot. In the process flow management table shown in FIG. 3, when the target lot is the lot X and the specific process is the process of process number 38, the device K is extracted as the name of the process device that executes the specific process for the target lot.

The timing for extracting the process equipment name is not particularly limited, and it may be performed, for example, at regular time intervals, or when each process performed on the target lot starts or ends processing. Alternatively, it may be performed when the process start time calculating unit 42 performs the process start time calculating process.

[Device State Inspecting Means 44] The device state inspecting step performed by the device state inspecting means 44 will be described with reference to FIG.
This will be described with reference to FIG.

First, in step S44a, the scheduled operation time zone is extracted from the device operation management table shown in FIG. 21 using the process device name extracted by the device searching means 43 as a search key.

Next, in step S44b, the scheduled process start time calculated by the process start time calculating means 42, that is, the scheduled process start time of the specific process in the record corresponding to the target lot in the process progress management table shown in FIG. It is checked whether or not the time registered in the item is included in the scheduled operation time zone extracted in step S44a. That is, it is inspected whether or not the process device that executes the specific process for the target lot is in an operating state (a state in which the lot can be processed) at the scheduled processing start time of the specific process. When the target lot is the lot X in the process progress management table shown in FIG. 20, the scheduled process start time of the specific process (process number 38) for the lot X is 1999/08/20 02:19, and the device operation of FIG. As shown in the management table, it is not included in the scheduled operation time zone of the device K (see the processing flow management table in FIG. 3) that executes the specific process. That is, the device K is not in the operating state at the scheduled processing start time of the specific process.

The timing of inspecting whether or not the process equipment is in the operating state is not particularly limited, and it may be performed, for example, at regular time intervals, or each process performed on the target lot is started or processed. The process may be performed when the process is completed, when the process start time calculating unit 42 performs the process start time calculating process, or when the device searching unit 43 performs the device searching process. May be.

[Device Start-up Instruction Means 45] The device start-up instruction process performed by the device start-up instruction means 45 will be described with reference to FIG.

First, in step S45a, based on the inspection result performed by the device state inspection means 44,
When the process device that executes the specific process for the target lot is not in the operating state at the scheduled processing start time of the specific process, the process proceeds to step S45b, while the process device is in the operating state at the scheduled processing start time. in case of,
The device start-up instruction process is ended as it is (without doing anything).

Next, in step S45b, the process operation scheduler for executing the specific process for the target lot is used to complete the start-up or maintenance by the scheduled processing start time of the specific process by using the device operation scheduler or the like. Create a device operation schedule for process devices. When the target lot is the lot X in the process progress management table shown in FIG. 20, the process start scheduled time of the specific process (process number 38) for the lot X is 1999/08/20.
By 02:19, a device operation schedule is created so that the device K (see the processing flow management table in FIG. 3) that executes the specific process is started up or completed maintenance.

Next, in step S45c, the apparatus operation schedule created in step S45b is transmitted to the process apparatus which executes the specific process for the target lot. As a result, it is possible to bring the process apparatus that executes the specified process into operation by the scheduled start time of the specified process for the target lot.

The device operation scheduler used to create the device operation schedule is not particularly limited, and an existing device operation scheduler may be used, for example.

Further, the timing for creating the apparatus operation schedule is not particularly limited, and may be performed, for example, at regular time intervals, or when each process performed on the target lot starts or ends processing. It may be performed when the process start time calculating unit 42 performs the process start time calculating process, or may be performed when the device searching unit 43 performs the device searching process, or the device. It may be performed when the device state inspection step is performed by the state inspection means 44.

As described above, according to the fourth embodiment, the process start time calculating means 42 determines, based on the processing status of each lot managed by the processing status managing means 41, the specific process for the target lot. After calculating the scheduled processing start time, the apparatus start-up instructing unit 45 indicates to the above-mentioned process apparatus if the process apparatus that executes the specific step for the target lot is not in the operating state at the scheduled processing start time of the specific step. It is instructed to complete the startup or maintenance by the scheduled processing start time. Therefore, it is possible to issue an operation instruction to the process device that executes the one process performed on the specific lot according to the time when the process is started on the specific lot. The operation of the process equipment can be controlled accordingly. That is, when a process to be performed on a specific lot starts to be processed, the process device that executes the process can be always kept in an operating state. The delay of can be reduced. In addition, since a process device used less frequently in LSI development and trial manufacture can be operated only during lot processing, resources (electricity, gas, water, chemical liquid, etc.) can be saved.

In the fourth embodiment, the method of registering, retrieving or extracting data in the processing flow management table, the processing progress management table or the apparatus operation management table is not particularly limited, but a DBMS (database management system) or the like. You may perform it using SQL etc. which are equipped with.

Further, in the fourth embodiment, the processing flow management table, the processing progress management table, or the apparatus operation management table exists in the storage device of the computer.
Alternatively, it may reside in a storage medium on a computer network accessible to the computer. Further, instead of using the processing flow management table, the processing progress management table, or the device operation management table, a list structure corresponding to each table may be used.

Further, in the fourth embodiment, the specific process number is fixedly registered in the process status management process performed by the process status management means 41. However, instead of this, the specific process number of each lot in the process is in process. The specific process number may be dynamically changed and registered according to the processing result and characteristics.

Further, in the fourth embodiment, the operation control of the process equipment is performed by creating the equipment operation schedule using the equipment operation scheduler in the equipment activation instruction process performed by the equipment activation instruction means 45. Alternatively, the operation of the process device may be controlled by directly instructing the process device without using the device operation scheduler.

Further, in the fourth embodiment, in the apparatus start-up instructing step performed by the apparatus start-up instructing means 45, the process apparatus which executes the specific step for the target lot is in the operating state at the scheduled processing start time of the specific step. In the case of, the device start-up instruction process is ended as it is, but instead of this, the process device for executing the specific process for the target lot is temporarily stopped by the scheduled processing start time of the specific process. You may instruct to do so. In this case, after completion of the shutdown of the process device, it is preferable to instruct the process device again to complete startup or maintenance by the scheduled processing start time.

(Fifth Embodiment) With respect to a product progress control method and a product progress control apparatus according to a fifth embodiment of the present invention, the progress of processing of a product in a LSI development trial line will be described in lot units by a computer. A case of controlling will be described with reference to the drawings.

FIG. 26 is a block diagram of a product progress control apparatus according to the fifth embodiment. The product progress control apparatus is a processing status for each lot in a plurality of process devices constituting an LSI development trial line. Is managed as product processing status information, and first related product group searching means 52 for specifying a first related lot group that is at least one lot related to the first lot.
And a second related product group searching means 53 for identifying a second related lot group which is at least one lot related to the second lot, and the first related lot group and the second related lot group, respectively. The processing priority of the first lot is based on the product number comparing means 54 for comparing the number of lots constituting the first lot and the comparison result of the number of lots constituting each of the first related lot group and the second related lot group. Alternatively, the processing priority changing means 55 for changing the processing priority of the second lot is provided.

[Process Status Management Unit 51] The process status management process performed by the process status management unit 51 is shown in FIG.
This will be described with reference to FIG.

That is, in step S51a, as shown in FIG. 28, at least the lot name, the processing priority,
Further, the lot name, the processing priority (initial value), and the related lot name are repeatedly registered in the process progress management table having the related lot name as an item and the number of lots flown on the LSI development trial line. The location for creating the process progress management table is not particularly limited, and may be created on a storage device of a computer, for example.

Here, the processing priority is a scale indicating how much priority is given to processing of a target lot compared to other lots, and in the present embodiment, a numerical value representing the processing priority. It is assumed that the smaller the value, the higher the priority of the processing compared to other lots, that is, the higher the processing priority. However, the initial value of the processing priority registered in the processing progress management table is not particularly limited, and for example, a numerical value representing the processing priority of the lot at the time of input to the LSI development trial line may be registered.

The related lot name is the name of a lot that needs to be processed based on the processing result of the specific lot corresponding to the lot name, that is, the related lot associated with the progress of the specific lot. In the case of the processing progress management table shown in FIG. 28, the related lots of “lot A” are “lot B” and “lot C”, and the related lots of “lot C” are “lot F”, “lot H” and “lot H”. Lot X ”, the related lot of“ lot X ”is“ lot Y ”, and there is no lot related to“ lot B ”,“ lot F ”,“ lot G ”, or“ lot Y ”.

[First Related Product Group Searching Means 52] The first related product group searching process performed by the first related product group searching means 52 will be described with reference to FIG.

That is, in step S52a, the related lot name is extracted from the process progress management table shown in FIG. 28 using the lot name of the first lot as a search key. At this time, a lot corresponding to each of the extracted related lot names, that is, at least one lot related to the first lot is defined as a first related lot group. In the case of the processing progress management table shown in FIG. 28, if the first lot is “lot A”, the first related lot group is “lot B”.
And "lot C".

As the first lot, the lot whose processing priority is to be changed, or the lot whose validity of the processing priority is to be confirmed are designated.

The timing for identifying the first related lot group is not particularly limited, and may be, for example, at a predetermined time, at regular time intervals, or for the first lot. It may be performed when it is necessary to check or change the processing priority.

[Second Related Product Group Searching Means 53] The second related product group searching process performed by the second related product group searching means 53 will be described with reference to FIG.

That is, in step S53a, the lot name of the second lot is used as a search key to extract the related lot name from the process progress management table shown in FIG. At this time, a lot corresponding to each of the extracted related lot names, that is, at least one lot related to the second lot is defined as a second related lot group. In the case of the process progress management table shown in FIG. 28, if the second lot is “lot X”, the second related lot group is “lot Y”.
Composed of only.

As the second lot, a lot or the like which is a target for changing the processing priority or a target for confirming the validity of the processing priority and is different from the first lot is designated.

Further, the timing for specifying the second related lot group is not particularly limited, and may be performed at a predetermined time, at regular time intervals, or with respect to the second lot. It may be performed when it is necessary to check or change the processing priority.

[Product Number Comparison Means 54] Product Number Comparison Means 5
The number-of-products comparison process performed according to No. 4 will be described with reference to FIG.

First, in step S54a, the number of lots forming the first related lot group specified by the first related product group searching means 52 and the second number specified by the second related product group searching means 53. The number of lots constituting the related lot group of is compared.

At this time, if "the number of lots forming the first related lot group">"the number of lots forming the second related lot group", the lots related to the first lot are determined in step S54b. It is determined that the number is greater than the number of lots associated with the second lot.

[0196] "Number of lots forming the first related lot group"<"Number of lots forming the second related lot group"
If so, in step S54c, it is determined that the number of lots related to the second lot is larger than the number of lots related to the first lot.

If "the number of lots forming the first related lot group" = "the number of lots forming the second related lot group", the processing priority of the processing priority changing means 55 to be described later. The process may be terminated without performing the changing step.

Specifically, in the case of the processing progress management table shown in FIG. 28, for example, if the first lot is "lot A" and the second lot is "lot X", the first related lot. The number of lots forming the group (two "lot B" and "lot C") is larger than the number of lots forming the second related lot group (one of "lot Y").

[Process Priority Changing Unit 55] The process priority changing process performed by the process priority changing unit 55 will be described with reference to FIG.

[0200] Step S54b of the product number comparison step described above.
28, when it is determined that the number of lots related to the first lot is larger than the number of lots related to the second lot, in step S55a, the lot name of the first lot is used as a search key, and FIG. A record is extracted from the process progress management table shown in, and the numerical value registered in the item of process priority of the extracted record is reduced. That is, the processing priority of the first lot is increased. At this time, the method of increasing the processing priority of the first lot is not particularly limited, and for example, the numerical value registered in the processing priority item of the extracted record may be multiplied by 1/2.

On the other hand, step S of the product number comparison step described above.
When it is determined in 54c that the number of lots related to the second lot is larger than the number of lots related to the first lot, in step S55b, the lot name of the second lot is used as a search key and the figure A record is extracted from the process progress management table shown by 28, and the numerical value registered in the item of the process priority of the extracted record is reduced. That is, the processing priority of the second lot is increased.
At this time, the method of increasing the processing priority of the second lot is not particularly limited, and for example, the numerical value registered in the processing priority item of the extracted record may be multiplied by 1/2.

Next, in step S55c, the processing priority of the first lot or the second lot changed in step S55a or S55b is set to the first lot or the second lot in the processing progress management table shown in FIG. Register in the item of processing priority of the record corresponding to the lot.

Specifically, in the case of the processing progress management table shown in FIG. 28, if the first lot is "lot A" and the second lot is "lot X", as described above, Since the number of lots associated with the first lot is greater than the number of lots associated with the second lot,
1 / into "30", which represents the current processing priority of "lot A"
The result of multiplying by 2, that is, “15” is newly registered in the corresponding item of the process progress management table, thereby increasing the process priority of “lot A”.

As described above, according to the fifth embodiment, the first related product group searching means 52 makes the first related product group based on the processing status for each lot managed by the processing status management means 51. The first related lot group related to the lot is specified, and the second related product group searching means 53 is also specified.
After specifying the second related lot group related to the second lot based on the processing situation for each lot, the processing priority changing unit 55 causes the first related lot group and the second related lot group. The processing priority of the first lot or the processing priority of the second lot is changed based on the size relation of the number of lots forming each of the above. Therefore, the processing priority of each lot can be determined so as to correspond to the number of lots forming the related lot group. In addition, by examining the processing result of one process performed on a specific lot, the processing conditions for performing the same type of process as the one process on a related lot group of a specific lot are examined or confirmed. In the development and trial production of the required LSI, the start of mass production, and the like, the processing priority can be set higher for a lot having a larger number of lots in the related lot group. As a result, the number of related lots waiting to be processed or the number of related lots in which processing is interrupted can be reduced, and the processing waiting time of each related lot can be reduced. Can be completed with.

That is, according to the fifth embodiment, since the size of the number of lots forming the related lot group is a criterion for determining the processing priority of each lot, a lot with a large number of lots in the related lot group (for example, By increasing the processing priority of the preceding lot), the processing of the preceding lot is performed earlier, and thus the processing of the related lot group of the preceding lot is also performed earlier. As a result, it is possible to avoid a situation in which a related lot group having a large number of constituent lots is placed in a processing waiting state, the processing for the related lot group is interrupted, or the processing waiting time of the related lot group becomes long. You can

Specifically, for example, the final processing result of the first lot or the processing result in the process in the middle of manufacturing is fed back to the processing condition of the first related lot group, and the final processing result of the second lot is determined. In case of feeding back the processing result in the second related lot group to the processing condition of the second related lot group by increasing the processing priority of the lot having a large number of lots constituting the related lot group to be fed back, It is possible to eliminate or reduce the above-mentioned feedback waiting time in the related lot group having a large number of constituent lots.

In the fifth embodiment, the method of registering, retrieving or extracting data in the process progress management table is not particularly limited, but SQL or the like provided in a DBMS (database management system) or the like may be used. Good.

Further, in the fifth embodiment, the processing progress management table exists in the storage device of the computer, but instead of this, it may exist in the storage medium on the computer network accessible by the computer.
Further, instead of using the processing progress management table, a list structure corresponding to the table may be used.

Further, in the fifth embodiment, the related lot name is fixedly registered in the processing status management process performed by the processing status management means 51. However, instead of this, the related lot name of each lot in the process of work is registered. The related lot name may be registered while being dynamically changed according to the processing result and characteristics.

Further, in the fifth embodiment, when changing the processing priority of the first lot or the processing priority of the second lot in the processing priority changing step performed by the processing priority changing means 55, Although the processing priority of the lot having a large number of lots in the related lot group is set high, the processing priority of the lot having a small number of lots in the related lot group may be set low instead. At this time, the method of lowering the processing priority is not particularly limited, and for example, the numerical value registered in the processing priority item of the processing progress management table may be multiplied by 2. In addition, when changing the processing priority of the first lot or the processing priority of the second lot, the processing priority of a lot with a large number of lots in the related lot group and the processing priority of a lot with a small number of lots in the related lot group are changed. The processing priority and the processing priority may be exchanged with each other.

In the fifth embodiment, when changing the processing priority of the first lot or the processing priority of the second lot in the processing priority changing step performed by the processing priority changing means 55, It is preferable to change the processing priority of each lot so that the processing priority of a lot with a large number of lots in the related lot group is always higher than the processing priority of a lot with a small number of lots in the related lot group. By doing this, lots with a large number of related lots are processed with priority over lots with a small number of related lots, so related lots with a large number of lots are placed in a waiting state. The probability can be made even lower.

Further, in the fifth embodiment, the processing priority is changed for two lots based on the size relation of the number of lots of each related lot group.
Alternatively, the processing priority may be changed for three or more lots based on the size relation of the lot numbers of the related lot groups.

In addition, in the fifth embodiment, one L
Although the progress status of processing for a plurality of lots is controlled on the SI development trial production line, instead of this, the progress status of processing for a plurality of lots may be controlled on a plurality of LSI development trial production lines or LSI production lines. .

(Sixth Embodiment) With respect to a product progress control method and a product progress control apparatus according to a sixth embodiment of the present invention, the progress of processing of a product in a LSI development trial line will be described in lot units by a computer. A case of controlling will be described with reference to the drawings.

FIG. 32 shows a block diagram of a product progress control apparatus according to the sixth embodiment. The product progress control apparatus is a processing status for each lot in a plurality of process devices constituting an LSI development trial line. Is managed as product processing status information, and first related product group searching means 62 for specifying a first related lot group that is at least one lot related to the first lot.
And a second related product group search means 63 for identifying a second related lot group that is at least one lot related to the second lot, and the first related lot group and the second related lot group, respectively. Processing priority comparing means 64 for comparing the processing priorities of the first related lot group and the second related lot group, and
Processing priority changing means 65 for changing the processing priority of the lot or the processing priority of the second lot.

[Processing Status Management Unit 61] The processing status management process performed by the processing status management unit 61 is the same as the processing status management process (see FIG. 27) performed by the processing status management unit 51 of the fifth embodiment. Therefore, the description is omitted.

[First Related Product Group Searching Means 62] The first related product group searching step performed by the first related product group searching means 62 is the first related product group searching means of the fifth embodiment. Since it is the same as the first related product group searching step (see FIG. 29) performed by 52, the description thereof will be omitted.

[Second Related Product Group Searching Means 63] The second related product group searching means performed by the second related product group searching means 63 is the second related product group searching means of the fifth embodiment. Since it is the same as the second related product group searching step (see FIG. 30) performed by 53, description thereof will be omitted.

[Process Priority Comparison Unit 64] The process priority comparison process performed by the process priority comparison unit 64 will be described with reference to FIG.

First, in step S64a, the process progress management shown in FIG. 28 is performed by using each lot name (related lot name) of the first related lot group specified by the first related product group searching means 62 as a search key. Extract the processing priority from the table. At this time, when there are a plurality of extracted processing priorities, the average value of the plurality of processing priorities,
Alternatively, the highest value of the plurality of processing priorities (the minimum value as the numerical value indicating the processing priority) is set as the processing priority of the first related lot group.

Specifically, in the case of the processing progress management table shown in FIG. 28, if the first lot is "lot A", the first related lot group is "lot B" and "lot C". As configured, "60" and "4", which are numerical values indicating the processing priority of "lot B" and "lot C"
5 ”is extracted. Therefore, when the average value of the processing priorities of “lot B” and “lot C” is set as the processing priority of the first related lot group, the numerical value representing the processing priority of the first related lot group is “(60 + 45 ) / 2 ”.

Next, in step S64b, the process progress shown in FIG. 28 is performed by using each lot name (related lot name) of the second related lot group specified by the second related product group searching means 63 as a search key. The processing priority is extracted from the management table. At this time, when there are a plurality of extracted processing priorities, the average value of the plurality of processing priorities,
Alternatively, the highest value of the plurality of processing priorities (the minimum value as the numerical value indicating the processing priority) is set as the processing priority of the second related lot group.

Specifically, in the case of the processing progress management table shown in FIG. 28, if the second lot is “lot X”, the second related lot group is composed of only “lot Y”. , "30" which is a numerical value indicating the processing priority of "lot Y" is extracted. Therefore, the numerical value representing the processing priority of the second related lot group is “30”.

Next, in step S64c, the processing priority of the first related lot group extracted or calculated in step S64a and the processing priority of the second related lot group extracted or calculated in step S64b are set. Compare.

At this time, if the processing priority of the first related lot group is higher than the processing priority of the second related lot group (the numerical value representing the processing priority of the first related lot group is the second related lot group). If it is smaller than the numerical value indicating the processing priority of the lot group), it is determined in step S64d that the processing priority of the lot related to the first lot is higher than the processing priority of the lot related to the second lot. .

If the processing priority of the first related lot group is lower than the processing priority of the second related lot group (first
If the numerical value indicating the processing priority of the related lot group is larger than the numerical value indicating the processing priority of the second related lot group), in step S64e, the processing priority of the lot related to the second lot is first. It is judged that the processing priority is higher than the processing priority of the lot related to the lot.

If the processing priority of the first related lot group and the processing priority of the second related lot group are equal, the processing priority changing step performed by the processing priority changing means 65 described later is not performed. Alternatively, the process may be terminated as it is.

Specifically, in the case of the processing progress management table shown in FIG. 28, if the first lot is "lot A" and the second lot is "lot X", as described above, The numerical value representing the processing priority of the first related lot group (“lot B” and “lot C”) is “(60 + 45) /
2 ”and the second related lot group (“ lot Y ”)
Since the numerical value indicating the processing priority of “30” is “30”, the processing priority of the second related lot group is higher than the processing priority of the first related lot group.

[Process Priority Changing Unit 65] The process priority changing process performed by the process priority changing unit 65 will be described with reference to FIG.

[0230] Step S6 of the processing priority comparing step described above.
If it is determined in 4d that the processing priority of the lot related to the first lot is higher than the processing priority of the lot related to the second lot, in step S65a,
Using the lot name of the first lot as a search key, a record is extracted from the process progress management table shown in FIG. 28, and the numerical value registered in the item of process priority of the extracted record is reduced. That is, the processing priority of the first lot is increased. At this time, the method of increasing the processing priority of the first lot is not particularly limited. For example, the value registered in the item of processing priority of the extracted record is 1/2
You may multiply by.

On the other hand, when it is determined in step S64e of the above-mentioned processing priority comparison step that the processing priority of the lot related to the second lot is higher than the processing priority of the lot related to the first lot. , In step S65b, using the lot name of the second lot as a search key,
A record is extracted from the process progress management table shown in FIG. 8 and the numerical value registered in the item of process priority of the extracted record is reduced. That is, the processing priority of the second lot is increased. At this time, the method of increasing the processing priority of the second lot is not particularly limited, and for example, the numerical value registered in the processing priority item of the extracted record may be multiplied by 1/2.

Next, in step S65c, the processing priority of the first lot or the second lot changed in step S65a or S65b is set to the first lot or the second lot in the processing progress management table shown in FIG. Register in the item of processing priority of the record corresponding to the lot.

Specifically, in the case of the processing progress management table shown in FIG. 28, for example, if the first lot is “lot A” and the second lot is “lot X”, as described above, Since the processing priority of the lot related to the second lot is higher than the processing priority of the lot related to the first lot, 1/2 is added to “35” representing the current processing priority of “lot X”. The result of multiplication, that is, "17.5"
Is newly registered in the corresponding item of the processing progress management table to increase the processing priority of “lot X”.

As described above, according to the sixth embodiment, the first related product group searching means 62 causes the first related product group searching means 62 to execute the first processing based on the processing status for each lot managed by the processing status managing means 61. The first related lot group related to the lot is specified, and the second related product group searching means 63 is also specified.
After specifying the second related lot group related to the second lot based on the processing situation for each lot, the processing priority changing means 65 causes the first related lot group and the second related lot group. Based on the high and low of each processing priority of
The processing priority of the first lot or the processing priority of the second lot is changed. Therefore, the processing priority of each lot can be determined so as to correspond to the processing priority of the related lot group. In addition, by examining the processing result of one process performed on a specific lot, the processing conditions for performing the same type of process as the one process on a related lot group of a specific lot are examined or confirmed. In the development and trial production of the required LSI, the start of mass production, and the like, the processing priority can be set higher for a lot having a higher processing priority for the related lot group.
As a result, the number of related lots waiting to be processed or the number of related lots in which processing is interrupted can be reduced, and the processing waiting time of each related lot can be reduced. Can be completed with.

That is, according to the sixth embodiment, since the processing priority of the related lot group is the criterion for determining the processing priority of each lot, the lot having the high processing priority of the related lot group (for example, By increasing the processing priority of the preceding lot), the processing of the preceding lot is performed earlier, and thus the processing of the related lot group of the preceding lot is also performed earlier. As a result, it is possible to avoid a situation in which a related lot group having a high processing priority is placed in a processing waiting state, the processing for the related lot group is interrupted, or the processing waiting time of the related lot group becomes long. You can

Specifically, for example, the final processing result of the first lot or the processing result in the process in the middle of manufacturing is fed back to the processing condition of the first related lot group, and the final processing result of the second lot is determined. In case of feeding back the processing result in the second related lot group to the processing condition of the second related lot group, by increasing the processing priority of the lot having the high processing priority of the related lot group of the feedback target, It is possible to eliminate or reduce the aforementioned waiting time for feedback in the related lot group having a high processing priority.

In the sixth embodiment, the method of registering, retrieving or extracting data in the processing progress management table is not particularly limited, but it may be performed using SQL or the like provided in a DBMS (database management system) or the like. Good.

Further, in the sixth embodiment, the processing progress management table exists in the storage device of the computer, but instead of this, it may exist in the storage medium on the computer network accessible by the computer.
Further, instead of using the processing progress management table, a list structure corresponding to the table may be used.

Further, in the sixth embodiment, when changing the processing priority of the first lot or the processing priority of the second lot in the processing priority changing step performed by the processing priority changing means 65, Although the processing priority of the lot with the high processing priority of the related lot group is increased, the processing priority of the lot with the low processing priority of the related lot group may be lowered instead. At this time, the method of lowering the processing priority is not particularly limited, and for example, the numerical value registered in the processing priority item of the processing progress management table may be multiplied by 2.
Further, when the processing priority of the first lot or the processing priority of the second lot is changed, the processing priority of the lot having a high processing priority of the related lot group and the processing priority of the related lot group are low. The processing priority of the lot may be exchanged with each other.

Further, in the sixth embodiment, when changing the processing priority of the first lot or the processing priority of the second lot in the processing priority changing step performed by the processing priority changing means 65, It is preferable to change the processing priority of each lot so that the processing priority of a lot with a high processing priority of the related lot group is always higher than the processing priority of a lot with a low processing priority of the related lot group. . By doing this, lots with high processing priority of the related lot group
Since the lots with a low processing priority of the related lot group are always processed with priority, it is possible to further reduce the probability that the related lot group with a high processing priority is placed in the processing waiting state.

In the sixth embodiment, the processing priority is changed for two lots based on the level of processing priority of each related lot group. Instead of this, three processing priority levels are changed. For the above lots, the processing priority may be changed based on the level of processing priority of each related lot group.

Also, in the sixth embodiment, one L
Although the progress status of processing for a plurality of lots is controlled on the SI development trial production line, instead of this, the progress status of processing for a plurality of lots may be controlled on a plurality of LSI development trial production lines or LSI production lines. .

(Seventh Embodiment) In the following, regarding a product progress control method and a product progress control apparatus according to a seventh embodiment of the present invention, the progress status of processing for a product in an LSI development trial line is analyzed by a computer in lot units. A case of controlling will be described with reference to the drawings.

FIG. 34 is a block diagram of the product progress control apparatus according to the seventh embodiment. The product progress control apparatus is a processing status for each lot in a plurality of process devices which constitute an LSI development trial line. Is managed as product processing status information, and first related product group searching means 72 for specifying a first related lot group that is at least one lot related to the first lot.
And a second related product group search means 73 for identifying a second related lot group, which is at least one lot related to the second lot, and the number of lots and the processing priority of the first related lot group. A first importance degree calculating means 74 for obtaining the importance degree of the first related lot group, and a second importance degree means for obtaining the importance degree of the second related lot group based on the number of lots and the processing priority of the second related lot group. Importance calculating means 75, importance comparing means 76 for comparing the importance of each of the first related lot group and the second related lot group, and each of the first related lot group and the second related lot group Processing priority changing means 77 for changing the processing priority of the first lot or the processing priority of the second lot based on the result of comparison of the importance.

[Process Status Management Unit 71] The process status management process performed by the process status management unit 71 is similar to the process status management process (see FIG. 27) performed by the process status management unit 51 of the fifth embodiment. Therefore, the description is omitted.

[First Related Product Group Searching Means 72] The first related product group searching means carried out by the first related product group searching means 72 is the first related product group searching means of the fifth embodiment. Since it is the same as the first related product group searching step (see FIG. 29) performed by 52, the description thereof will be omitted.

[Second Related Product Group Searching Means 73] The second related product group searching step performed by the second related product group searching means 73 is the second related product group searching means of the fifth embodiment. Since it is the same as the second related product group searching step (see FIG. 30) performed by 53, description thereof will be omitted.

[First Importance Calculation Unit 74] The first importance calculation step performed by the first importance calculation unit 74 will be described with reference to FIG.

First, in step S74a, the number of lots forming the first related lot group identified by the first related product group searching means 72 is extracted.

Next, in step S74b, the processing progress shown in FIG. 28 is performed by using each lot name (related lot name) of the first related lot group specified by the first related product group searching means 72 as a search key. The processing priority is extracted from the management table.

Next, in step S74c, based on the number of lots forming the first related lot group extracted in step S74a and the processing priority of the first related lot group extracted in step S74b, The importance of the first related lot group is calculated.

Although the method of calculating the importance of the first related lot group is not particularly limited, for example, the processing priority is divided into three levels (high priority, medium priority, low priority) and step S
By extracting the number of lots constituting the first related lot group by 74a for each processing priority level, the importance of the first related lot group = the number of lots of high priority × 5 + the number of lots of medium priority × The importance of the first related lot group may be calculated using a formula such as 3 + low priority lot number × 1. However, the processing priority is not limited to three steps, and may be divided into any number of steps, and the value of the coefficient (5, 3, 1, etc. in the above calculation formula) that multiplies the number of lots of the processing priority of each step,
There is no particular limitation as long as the coefficient has a larger value as the processing priority is higher.

Specifically, in the case of the processing progress management table shown in FIG. 28, for example, if the first lot is "lot A", the first related lot group is "lot B" and "lot C". As configured, "60" and "4", which are numerical values indicating the processing priority of "lot B" and "lot C"
5 ”is extracted. At this time, if the processing priority of “lot B” is set to low priority and the processing priority of “lot C” is set to medium priority, and the above-described calculation formula is used, the importance of the first related lot group = 1 (number of lots of medium priority (only "lot C")) x 3 + 1 (number of lots of low priority (only "lot B")) x 1 = 4.

[Second Importance Calculation Unit 75] The second importance calculation process performed by the second importance calculation unit 75 will be described with reference to FIG.

First, in step S75a, the number of lots constituting the second related lot group identified by the second related product group searching means 73 is extracted.

Next, in step S75b, the process progress shown in FIG. 28 is performed by using each lot name (related lot name) of the second related lot group specified by the second related product group search means 73 as a search key. The processing priority is extracted from the management table.

Next, in step S75c, based on the number of lots forming the second related lot group extracted in step S75a and the processing priority of the second related lot group extracted in step S75b, The importance of the second related lot group is calculated.

The method of calculating the importance of the second related lot group is the same as the method of calculating the importance of the first related lot group.

Specifically, in the case of the processing progress management table shown in FIG. 28, if the second lot is "lot X", the second related lot group is composed of only "lot Y". , "30" which is a numerical value indicating the processing priority of "lot Y" is extracted. At this time, the processing priority of “lot Y” is set to high priority, and the above-mentioned calculation formula is used, the importance of the second related lot group = 1 (the number of lots of high priority (“lot Y” only)). ) × 5 = 5.

[Importance level comparing means 76] Importance level comparing means 7
The importance level comparison process performed in 6 will be described with reference to FIG.

First, in step S76a, the importance of the first related lot group calculated by the first importance calculating means 74 and the second related lot group calculated by the second importance calculating means 75. Compare with the importance of.

At this time, if the importance of the first related lot group is higher than the importance of the second related lot group (the numerical value representing the importance of the first related lot group is the same as that of the second related lot group). If it is larger than the numerical value indicating the importance), step S76
In b, it is judged that the importance of the lot related to the first lot is higher than the importance of the lot related to the second lot.

Further, the importance of the first related lot group is the second
If the value is lower than the importance of the related lot group (if the numerical value indicating the importance of the first related lot group is smaller than the numerical value indicating the importance of the second related lot group), then in step S76c the second Lot importance related to lot is first
It is judged to be higher than the importance of the lot related to the lot.

If the importance of the first related lot group and the importance of the second related lot group are equal, the process priority changing step performed by the process priority changing means 77, which will be described later, is not performed. The processing may be terminated as it is.

Specifically, in the case of the processing progress management table shown in FIG. 28, if the first lot is set to "lot A" and the second lot is set to "lot X", the above-mentioned calculation formula is used. The numerical value representing the importance of the first related lot group (“lot B” and “lot C”) is “4” and the numerical value representing the importance of the second related lot group (“lot Y”) is “ 5 ”, the importance of the second related lot group is higher than that of the first related lot group.

[Process Priority Changing Unit 77] The process priority changing process performed by the process priority changing unit 77 will be described with reference to FIG.

[0267] Step S76b of the above-mentioned importance comparison process.
In, when it is determined that the importance of the lot related to the first lot is higher than the importance of the lot related to the second lot, in step S77a, the lot name of the first lot is used as a search key, A record is extracted from the process progress management table shown in FIG. 28, and the numerical value registered in the item of the process priority of the extracted record is reduced. That is, the processing priority of the first lot is increased.
At this time, the method of increasing the processing priority of the first lot is not particularly limited, and for example, the numerical value registered in the processing priority item of the extracted record may be multiplied by 1/2.

On the other hand, step S of the importance comparison process described above.
When it is determined in 76c that the importance of the lot related to the second lot is higher than the importance of the lot related to the first lot, in step S77b, the lot name of the second lot is used as a search key. A record is extracted from the process progress management table shown in FIG. 28, and the numerical value registered in the item of the process priority of the extracted record is reduced. That is, the processing priority of the second lot is increased. At this time, the method of increasing the processing priority of the second lot is not particularly limited, and for example, the numerical value registered in the processing priority item of the extracted record may be multiplied by 1/2.

Next, in step S77c, the processing priority of the first lot or the second lot changed in step S77a or S77b is set to the first lot or the second lot in the processing progress management table shown in FIG. Register in the item of processing priority of the record corresponding to the lot.

Specifically, in the case of the processing progress management table shown in FIG. 28, if the first lot is "lot A" and the second lot is "lot X", as described above, The lot associated with the second lot is higher in importance than the lot associated with the first lot, and therefore "3" represents the current processing priority of "lot X".
The result of multiplying “5” by ½, that is, “17.5” is newly registered in the corresponding item of the process progress management table, thereby increasing the process priority of “lot X”.

As described above, according to the seventh embodiment, the first related product group searching means 72 determines whether the first related product group searching means 72 is based on the processing status of each lot managed by the processing status managing means 71. The first related lot group related to the lot is specified, and the second related product group searching means 73 is also specified.
After specifying the second related lot group related to the second lot based on the processing situation for each lot, the first importance degree calculation means 74 causes the number of lots and processing of the first related lot group to be performed. The importance of the first related lot group is calculated based on the priority, and the second importance calculating means 75 causes the second related lot group to be important based on the number of lots of the second related lot group and the processing priority. The processing priority changing unit 77 then determines the processing priority of the first lot or the second priority based on the importance of each of the first related lot group and the second related lot group. Change the processing priority of lots.
Therefore, the processing priority of each lot can be determined so as to correspond to the importance of the related lot group, that is, the number of products and the processing priority of the related lot group. In addition, by examining the processing result of one process performed on a specific lot, the processing conditions for performing the same type of process as the one process on a related lot group of a specific lot are examined or confirmed. In the development and trial production of the required LSI, the start of mass production, and the like, the processing priority can be set higher for a lot having a higher importance in the related lot group. As a result, the number of related lots waiting to be processed or the number of related lots in which processing is interrupted can be reduced, and the processing waiting time of each related lot can be reduced. Can be completed with.

That is, according to the seventh embodiment, since the degree of importance of the related lot group is a criterion for determining the processing priority of each lot, a lot of the related lot group having high importance (for example, a preceding lot). By increasing the processing priority of 1), the processing for the preceding lot is performed earlier, and thus the processing for the related lot group of the preceding lot is also performed faster. As a result, it is possible to avoid a situation in which a related lot group having a high degree of importance is placed in a processing waiting state, processing for the related lot group is interrupted, or a processing waiting time of the related lot group becomes long. it can.

Specifically, for example, the final processing result of the first lot or the processing result in the process in the middle of manufacturing is fed back to the processing condition of the first related lot group, and the final processing result of the second lot is determined. Important processing result or processing result in the process in the middle of manufacturing is fed back to the processing condition of the second related lot group, by increasing the processing priority of the lot having a high importance in the related lot group of the feedback target, It is possible to eliminate or reduce the above-mentioned feedback waiting time in a group of frequently related lots.

In the seventh embodiment, the method of registering, retrieving or extracting data in the processing progress management table is not particularly limited, but SQL or the like provided in DBMS (database management system) or the like may be used. Good.

In the seventh embodiment, the processing progress management table exists in the storage device of the computer, but instead of this, it may exist in the storage medium on the computer network accessible by the computer.
Further, instead of using the processing progress management table, a list structure corresponding to the table may be used.

Further, in the seventh embodiment, when changing the processing priority of the first lot or the processing priority of the second lot in the processing priority changing step performed by the processing priority changing means 77, Although the processing priority of the lot with high importance of the related lot group is increased, the processing priority of the lot with low importance of the related lot group may be decreased instead. At this time, the method of lowering the processing priority is not particularly limited, and for example, the numerical value registered in the processing priority item of the processing progress management table may be multiplied by 2. In addition, when changing the processing priority of the first lot or the processing priority of the second lot, the processing priority of the lot having a high importance of the related lot group and the processing priority of the lot having a low importance of the related lot group are changed. The processing priority and the processing priority may be exchanged with each other.

In the seventh embodiment, when changing the processing priority of the first lot or the processing priority of the second lot in the processing priority changing step performed by the processing priority changing means 77, It is preferable to change the processing priority of each lot so that the processing priority of a lot of the related lot group having a high importance is always higher than the processing priority of a lot of a related lot group having a low importance. By doing this, lots with high importance in the related lot group are always processed with priority over lots with low importance in the related lot group. The probability can be made even lower.

In addition, in the seventh embodiment, the processing priority is changed for two lots based on the degree of importance of each related lot group. However, instead of this, the processing priority is changed. For three or more lots, the processing priority may be changed based on the level of importance of each related lot group.

Also, in the seventh embodiment, one L
Although the progress status of processing for a plurality of lots is controlled on the SI development trial production line, instead of this, the progress status of processing for a plurality of lots may be controlled on a plurality of LSI development trial production lines or LSI production lines. .

[0280]

According to the present invention, the processing priority of the second product related to the first product is changed in accordance with the progress status of the processing of the first product. It is possible to control the progress status of the processing for the second product in accordance with the progress status.

Further, according to the present invention, one process performed on the first product is performed on the second product related to the first product at the time when the process ends or starts. Since other steps can be performed, it is possible to control the progress of the process for the second product in accordance with the progress of the process for the first product.

Further, according to the present invention, until the time when one process performed on the first product finishes or starts the process, another process performed on the second product is associated with the one process. Since the execution of the process can be stopped, it is possible to control the progress status of the process for the second product in accordance with the progress status of the process for the first product.

Further, according to the present invention, it is possible to give an operation instruction to the process device which executes the one process at the time when the one process performed on the one product is started. The operation of the process equipment can be controlled according to the progress of the processing for each product.

Further, according to the present invention, after the first related product group related to the first product and the second related product group related to the second product are specified, the first related product is obtained. The number of products that make up each of the group and the second related product group,
Alternatively, the processing priority of the first product or the processing priority of the second product is changed based on the processing priority of each of the first related product group and the second related product group. Therefore, the processing priority of each product can be determined so as to correspond to the number of products forming the related product group or the processing priority of the related product group.

[Brief description of drawings]

FIG. 1 is a block diagram of a product progress control device according to a first embodiment of the present invention.

FIG. 2 is a flowchart illustrating each process of a process status management process in the product progress control method according to the first embodiment of the present invention.

FIG. 3 is a diagram showing an example of a process flow management table used in a product progress control device and a product progress control method according to the first, second, third or fourth embodiment of the present invention.

FIG. 4 is a diagram showing an example of a process progress management table used in the product progress control device and the product progress control method according to the first embodiment of the present invention.

FIG. 5 is a flowchart illustrating each process of a progress status collecting step in the product progress control method according to the first embodiment of the present invention.

FIG. 6 is a flowchart illustrating processing of a processing plan extraction step in the product progress control method according to the first embodiment of the present invention.

FIG. 7 is a flowchart illustrating each process of a process priority changing step in the product progress control method according to the first embodiment of the present invention.

FIG. 8 is a flowchart illustrating each process of a process priority changing step in the product progress control method according to the modified example of the first embodiment of the present invention.

FIG. 9 is a block diagram of a product progress control device according to a second embodiment of the present invention.

FIG. 10 is a flowchart illustrating each process of a process status management process in the product progress control method according to the second or third embodiment of the present invention.

FIG. 11 is a diagram showing an example of a process progress management table used in the product progress control device and the product progress control method according to the second or third embodiment of the present invention.

FIG. 12 is a flowchart illustrating each process of a process end start time calculation process in the product progress control method according to the second or third embodiment of the present invention.

FIG. 13 is a flowchart illustrating processing of a related product search step in the product progress control method according to the second embodiment of the present invention.

FIG. 14 is a flowchart illustrating each process of a product progress instruction step in the product progress control method according to the second embodiment of the present invention.

FIG. 15 is a block diagram of a product progress control device according to a third embodiment of the present invention.

FIG. 16 is a flowchart illustrating processing of a related step search step in the product progress control method according to the third embodiment of the present invention.

FIG. 17 is a flowchart illustrating each process of a product progress stop step in the product progress control method according to the third embodiment of the present invention.

FIG. 18 is a block diagram of a product progress control device according to a fourth embodiment of the present invention.

FIG. 19 is a flowchart illustrating each process of a process status management process in the product progress control method according to the fourth embodiment of the present invention.

FIG. 20 is a diagram showing an example of a process progress management table used in a product progress control device and a product progress control method according to a fourth embodiment of the present invention.

FIG. 21 is a diagram showing an example of an apparatus operation management table used in a product progress control apparatus and a product progress control method according to a fourth embodiment of the present invention.

FIG. 22 is a flowchart illustrating each process of a process start time calculating process in the product progress control method according to the fourth embodiment of the present invention.

FIG. 23 is a flowchart illustrating each process of a device search step in the product progress control method according to the fourth embodiment of the present invention.

FIG. 24 is a flowchart illustrating each process of an apparatus state inspection process in the product progress control method according to the fourth embodiment of the present invention.

FIG. 25 is a flowchart illustrating each process of an apparatus start-up instruction process in the product progress control method according to the fourth embodiment of the present invention.

FIG. 26 is a block diagram of a product progress control device according to a fifth embodiment of the present invention.

FIG. 27 is a flowchart illustrating processing of a processing status management step in the product progress control method according to the fifth, sixth or seventh embodiment of the present invention.

FIG. 28 is a diagram showing an example of a process progress management table used in the product progress control device and the product progress control method according to the fifth, sixth or seventh embodiment of the present invention.

FIG. 29 is a flow chart illustrating a process of a first related product group searching step in the product progress control method according to the fifth, sixth or seventh embodiment of the present invention.

FIG. 30 is a flowchart illustrating processing of a second related product group search step in the product progress control method according to the fifth, sixth or seventh embodiment of the present invention.

FIG. 31 is a flowchart illustrating each process of the product number comparison process and each process of the process priority changing process in the product progress control method according to the fifth embodiment of the present invention.

FIG. 32 is a block diagram of a product progress control device according to a sixth embodiment of the present invention.

FIG. 33 is a flowchart illustrating each processing of the processing priority comparison step and each processing of the processing priority changing step in the product progress control method according to the sixth embodiment of the present invention.

FIG. 34 is a block diagram of a product progress control device according to a seventh embodiment of the present invention.

FIG. 35 is a flowchart illustrating each process of a first importance calculation step in the product progress control method according to the seventh embodiment of the present invention.

FIG. 36 is a flowchart illustrating each process of a second importance degree calculation step in the product progress control method according to the seventh embodiment of the present invention.

FIG. 37 is a flowchart illustrating each process of the importance comparison process and each process of the process priority changing process in the product progress control method according to the seventh embodiment of the present invention.

FIG. 38 is a block diagram of a conventional product progress control device.

[Explanation of symbols]

11 Processing status management means 12 Progress collection means 13 Processing plan extraction means 14 Processing priority changing means 21 Processing status management means 22 Process end start time calculation means 23 Related product search means 24 Product progress instruction means 31 Processing status management means 32 process end start time calculating means 33 Related process search means 34 Product Progress Stopping Means 41 Processing status management means 42 Process start time calculation means 43 Device searching means 44 Device status inspection means 45 Device startup instruction means 51 Processing status management means 52 First Related Product Group Search Means 53 Second Related Product Group Searching Means 54 Product Number Comparison Means 55 Processing priority changing means 61 Processing status management means 62 First Related Product Group Searching Means 63 Second Related Product Group Searching Means 64 processing priority comparison means 65 Processing priority changing means 71 Processing status management means 72 First Related Product Group Search Means 73 Second Related Product Group Search Means 74 First Importance Calculation Unit 75 Second Importance Calculation Unit 76 Importance comparison means 77 Processing priority changing means

Continuation of the front page (56) Reference JP-A-5-19807 (JP, A) JP-A-2-186404 (JP, A) JP-A-6-266413 (JP, A) JP-A-3-236213 (JP , A) (58) Fields investigated (Int.Cl. ⁷ , DB name) G05B 19/418 G06F 17/60 H01L 21/02 B23Q 41/08

Claims (3)

(57) [Claims] 1. A product progress control method for controlling a progress status of a process for a plurality of products in a production line for sequentially processing a plurality of products by a plurality of devices, wherein: By collecting the progress status of the processing for the first product of the plurality of products by managing the status of the processing for the product, according to the progress status of the processing for the collected first product,
Determine the processing result of the first product of the plurality of products
A product progress control method, characterized in that the processing priority of a second product to be processed after that is changed. 2. When changing the processing priority of the second product, when the progress status of the collected processing for the first product is later than the processing plan of the first product, While lowering the processing priority of the second product, if the progress status of the processing of the collected first product is ahead of the processing plan of the first product, the second product is processed.
The product progress control method according to claim 1, wherein the processing priority of the product is increased. 3. When changing the processing priority of the second product, when the progress status of the collected processing for the first product is behind the processing plan of the first product, The product progress control method according to claim 1, wherein the processing priority of the second product is increased. 4. A product progress control method for controlling the progress of processing for the plurality of products in a plurality of production lines for performing sequential processing by the plurality of devices to the product, the plurality of the plurality of devices A first product of the plurality of products is managed based on the processing status of the plurality of products by managing the processing status of the products.
After ascertaining a processing result of the second product of the plurality of products with identifying a first relevant products is at least one product performs processing of the processing results from ascertaining
After the second related product group, which is at least one product to be processed, is specified, the first related product group is determined based on the number of products forming each of the first related product group and the second related product group. A product progress control method comprising changing a processing priority or a processing priority of the second product. When wherein changing the processing priority of the processing priority or said second product of said first product, the first related Products number the second related products that constitute the group If the number of products forming the second related product group is larger than the number of products forming the second related product group, the processing priority of the first product is increased or the processing priority of the second product is decreased. When the number of products is greater than the number of products forming the first related product group, the processing priority of the second product is increased or the processing priority of the first product is decreased. Do
The product progress control method according to claim 4 . 6. A product progress control method for controlling the progress of processing for the plurality of products in a plurality of products is performed sequentially processed by a plurality of devices with respect to the production line, the plurality of the plurality of devices A first product of the plurality of products is managed based on the processing status of the plurality of products by managing the processing status of the products.
After ascertaining a processing result of the second product of the plurality of products with identifying a first relevant products is at least one product performs processing of the processing results from ascertaining
After the second related product group, which is at least one product to be processed, is specified, the processing of the first product is performed based on the processing priority of each of the first related product group and the second related product group. A product progress control method comprising changing a priority or a processing priority of the second product. 7. When the processing priority of the first product or the processing priority of the second product is changed, the processing priority of the first related product group is that of the second related product group. When the processing priority is higher than the processing priority, the processing priority of the first product is increased or the processing priority of the second product is decreased, while the processing priority of the second related product group is decreased. claim, characterized in that in the first case related products higher than the processing priority of the group to lower the processing priority of or the first product a higher processing priority of the second product 6 The product progress control method described in. 8. A product progress control method for controlling the progress of processing for the plurality of products in a plurality of products is performed sequentially processed by a plurality of devices with respect to the production line, the plurality of the plurality of devices A first product of the plurality of products is managed based on the processing status of the plurality of products by managing the processing status of the products.
After ascertaining a processing result of the second product of the plurality of products with identifying a first relevant products is at least one product performs processing of the processing results from ascertaining
After identifying the second related product group which is at least one product to be processed, the number of products constituting each of the first related product group and the second related product group and the first related product group and Based on the processing priority of each of the second related product group, the processing priority of the first product or the second
A method for controlling product progress, characterized in that the processing priority of the product is changed. When 9. To change the processing priority of the processing priority or said second product of said first product, the product number and the first related products constituting the first related products The importance of the first related product group based on the processing priority of the second related product group, and the second related product group based on the number of products forming the second related product group and the processing priority of the second related product group. After determining the importance of the product group, if the importance of the first related product group is higher than the importance of the second related product group, the processing priority of the first product is increased. Alternatively, while lowering the processing priority of the second product, if the importance of the second related product group is higher than that of the first related product group, processing priority of the second product is given. claims, characterized in that to lower the processing priority of or the first product to increase the degree Product progress control method according to. 10. A product progress control device for controlling the progress of the process for a plurality of products in a production line for sequentially processing a plurality of products by a plurality of devices, wherein: A processing status management unit that manages a processing status of a product, and a processing status collection unit that collects a processing status of a first product of the plurality of products based on a processing status of the plurality of products, Processing plan extraction means for extracting a processing plan of the first product from processing plans of the plurality of products set in advance; and a progress status of the processing for the collected first product If it is behind the product processing plan , determine the processing result of the first product among the plurality of products .
If the processing priority of the collected second product is lower than the processing plan of the first product while lowering the processing priority of the second product to be processed from the second product, A product progress control device comprising: a process priority changing means for increasing the process priority of a product. 11. A product progress control unit for controlling the progress of processing for the plurality of products in a production line which performs sequential processing of a plurality of devices to a plurality of products, the plurality of the plurality of devices A processing status management unit that manages a processing status of a product, and a processing status collection unit that collects a processing status of a first product of the plurality of products based on a processing status of the plurality of products, Processing plan extraction means for extracting a processing plan of the first product from processing plans of the plurality of products set in advance; and a progress status of the processing for the collected first product If it is behind the product processing plan , determine the processing result of the first product among the plurality of products .
And a processing priority changing means for increasing the processing priority of the second product for performing the processing . 12. A product progress control unit for controlling the progress of processing for the plurality of products in a plurality of products is performed sequentially processed by a plurality of devices with respect to the production line, the plurality of the plurality of devices A processing status management unit that manages a processing status of a product, and a processing result of a first product of the plurality of products is determined based on a processing status of the plurality of products.
A first related product group search means for specifying a first related product group that is at least one product for performing processing, and a second product among the plurality of products based on a processing status of the plurality of products. treatment from ascertaining the processing result
A second related product group search means for specifying a second related product group which is at least one product for performing the processing, and the number of products forming each of the first related product group and the second related product group. When comparing the number of products to be compared, and the number of products forming the first related product group is larger than the number of products forming the second related product group, the processing priority of the first product is set to the first If the number of products forming the second related product group is larger than the number of products forming the first related product group while the processing priority of the second product is higher, the processing of the second product is performed. A product progress control device, comprising: a processing priority changing means for setting a priority higher than the processing priority of the first product. 13. A product progress control unit for controlling the progress of processing for the plurality of products in a production line which performs sequential processing of a plurality of devices to a plurality of products, the plurality of the plurality of devices A processing status management unit that manages a processing status of a product, and a processing result of a first product of the plurality of products is determined based on a processing status of the plurality of products.
A first related product group search means for specifying a first related product group that is at least one product for performing processing, and a second product among the plurality of products based on a processing status of the plurality of products. The processing result of
A second related product group search means for specifying a second related product group, which is at least one product for performing processing, and the respective processing priorities of the first related product group and the second related product group. Processing priority comparison means for performing the processing, and if the processing priority of the first related product group is higher than the processing priority of the second related product group, the processing priority of the first product is set to the second priority. If the processing priority of the second related product group is higher than the processing priority of the first related product group while the processing priority of the second related product is higher than the processing priority of the product, the processing priority of the second product is A product progress control device, comprising: a processing priority changing means for increasing the processing priority of the first product. 14. A product progress control device for controlling a progress status of a process for a plurality of products in a production line that sequentially processes a plurality of products by the plurality of devices, wherein: A processing status management unit that manages the processing status of the product, and a processing status management unit that determines the processing result of the first product of the plurality of products based on the processing status of the plurality of products.
A first related product group search means for specifying a first related product group that is at least one product for performing processing, and a second product among the plurality of products based on a processing status of the plurality of products. The processing result of
Second related product group searching means for specifying a second related product group which is at least one product for performing processing, the number of products forming the first related product group, and processing of the first related product group. First importance calculating means for obtaining the importance of the first related product group based on the priority, the number of products constituting the second related product group, and the processing priority of the second related product group. Second importance degree calculating means for obtaining the importance degree of the second related product group based on the above, and importance degree comparing means for comparing the respective importance degrees of the first related product group and the second related product group, When the importance of the first related product group is higher than the importance of the second related product group, the processing priority of the first product is set higher than the processing priority of the second product. , The importance of the second related product group is higher than that of the first related product group. If it is higher than the above, the product progress control device is provided with a processing priority changing means for making the processing priority of the second product higher than the processing priority of the first product.