JP3487771B2 - Gas-cooled dielectric barrier discharge lamp - Google Patents
Gas-cooled dielectric barrier discharge lampInfo
- Publication number
- JP3487771B2 JP3487771B2 JP29012098A JP29012098A JP3487771B2 JP 3487771 B2 JP3487771 B2 JP 3487771B2 JP 29012098 A JP29012098 A JP 29012098A JP 29012098 A JP29012098 A JP 29012098A JP 3487771 B2 JP3487771 B2 JP 3487771B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- cooling
- inner tube
- tube
- discharge lamp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Discharge Lamps And Accessories Thereof (AREA)
Description
【発明の詳細な説明】
【０００１】
【発明の属する技術分野】本発明は、気体冷却式誘電体
バリア放電ランプに関し、特に、加圧気体により効率良
く冷却する気体冷却式誘電体バリア放電ランプに関す
る。
【０００２】
【従来の技術】誘電体バリア放電ランプは、紫外線を透
過する２本の太さの違う円筒状の誘電体（例えば石英ガ
ラス等）を、外側管と内側管として同軸に配置した放電
ランプである。外側管と内側管の両端を気密に封じ、外
側管と内側管の間を放電室として、放電ガス（例えば、
稀ガス又は稀ガスとハロゲンの混合ガス等）を充填す
る。外側管の外側に紫外光を透過する金属の網目状の電
極を配置し、内側管の内側に電極を配置して、この両電
極に高周波高電圧を印加する。両電極に印加した電圧に
より、放電室に充填した放電ガスがエキシマ分子を形成
することで紫外線を放射する。
【０００３】このランプは、入力電力を多くすると放電
ガスの温度が上昇して、エキシマ分子を形成する効率が
減少し、発光効率が落ちる。さらに、紫外線に透明な誘
電体の温度が上がり、紫外線の透過率が落ちて光出力が
低下する。
【０００４】誘電体バリア放電ランプの紫外線発光効率
の低下の原因である放電ガスの温度上昇を防ぐため、内
側管の内側（高圧電極側）に液体を流す冷却方法か、冷
却用空気又は窒素等を流す冷却方法が用いられている。
液体で冷却する誘電体バリア放電ランプの従来例として
は、特開平5-266863号公報に開示されたものがある。
【０００５】
【発明が解決しようとする課題】しかし、液体による冷
却方法は、冷却液のメンテナンスが必要であるという問
題と、ランプの交換時の冷却液の漏れという問題があ
る。また、気体による冷却方法では、冷却用気体をラン
プの軸方向に流して冷却しているため、冷却効率が非常
に低く、放電ガスを効率良く冷却できない。そのため、
冷却効果に見合った小電力で使用せざるを得ないという
問題がある。従来の冷却方法では、入力電力はせいぜい
0.5（Ｗ／ｃｍ2）程度が限度であった。
【０００６】本発明は、上記従来の問題を解決して、気
体による冷却方式の誘電体バリア放電ランプの効率の良
い冷却構造を提供することを目的とする。
【０００７】
【課題を解決するための手段】上記課題を解決するため
に、本発明の気体冷却式誘電体バリア放電ランプは、紫
外線を透過する円筒状の誘電体からなる外側管と、外側
管と同軸に配置した紫外線を透過する円筒状の誘電体か
らなる内側管と、外側管と内側管の間に希ガスまたは希
ガスとハロゲンの混合ガス等を充填して両端を気密に封
じた放電室と、外側管の外側に配置した紫外線を透過す
る金属の網目状の外側電極と、内側管の内側に配置した
内側電極と、内側管の中心軸に配置した多数の小さな孔
をあけた円筒状の冷却管と、冷却管に設けた多数の小さ
な孔から冷却用加圧気体を内側管の外壁に向けてほぼ直
角に噴射するとともに、噴射時の断熱膨張により気体の
温度を下げる手段とを具備するものである。
【０００８】このように構成したことにより、誘電体バ
リア放電ランプの内側管の外壁に冷却気体をほぼ直角に
噴射して、冷却気体を壁に平行に流す場合より効率的に
冷却することができ、さらに、断熱膨張効果を利用して
冷却気体の温度を下げて冷却効果を高めることができ
る。
【０００９】【発明の実施の形態】
以下、本発明の実施の形態につい
て、図１と図２を参照しながら詳細に説明する。
【００１０】 本発明の実施の形態は、気体冷却式誘電
体バリア放電ランプの内側管の外壁に加圧冷却気体を直
角に噴射して冷却するランプである。
【００１１】図１は、本発明の実施の形態の誘電体バリ
ア放電ランプの軸方向断面図である。図１において、放
電ランプ１は、紫外線を透過する２本の太さの違う円筒
状の誘電体の外管と内管を同軸に配置したエキシマ放電
ランプである。内側管２は、紫外線を透過する円筒状の
誘電体管である。外側管３は、内側管２と同軸に配置さ
れた紫外線を透過する円筒状の誘電体管である。内側管
２と外側管３の両端を気密に封じて内側管２と外側管３
の間に放電室を形成して放電ガスを充填する。金属パイ
プ４は、内側管２の中心軸に同軸に配置された管であ
る。外側電極５は、外側管３の外側に設けた紫外光を透
過する金属の網目状の電極である。内側電極６は、アル
ミ箔を円筒状にして内側管２の外壁に密着するように貼
りつけた電極である。孔７は、金属パイプ４に設けた冷
却用加圧気体を噴出させる孔である。図２は、誘電体バ
リア放電ランプの半径方向断面図である。
【００１２】本実施の形態では、波長172ｎｍの紫外線
を透過する石英ガラスを誘電体とする内側管２と外側管
３を用いる。内側管２は、内径が13.5ｍｍで、肉厚が1.
2ｍｍである。外側管３は、外径が28.6ｍｍで、肉厚が
1.8ｍｍである。ランプの全長は、ほぼ200ｍｍである。
【００１３】図１と図２の断面図に示すように、放電ラ
ンプ１の内側管２の中心軸側に、内側管２の内側の径よ
り少し細い金属パイプ４を内側管２と同軸に配置する。
金属パイプ４の外径は10.0ｍｍで、肉厚は1.0ｍｍであ
る。金属パイプ４の長さは230ｍｍである。金属パイプ
４の閉じた側の端と放電ランプ１の一方の端とが同一面
になるようにする。金属パイプ４の一端は閉じて、閉じ
られた端より反対方向の200ｍｍの間に、円周上を４等
分した線上に、軸と直角の方向の0.75ｍｍ径の小さな孔
７を80個開ける。放電ランプ１の両端で冷却気体が外に
流れ出るように、金属パイプ４を円周上の一部で固定す
る。金属パイプ４は金属に限らず絶縁性のパイプでも良
い。
【００１４】放電ランプ１には、放電ガスとしてキセノ
ンガスを約20ＫＰaで充填する。外側管３の外壁には、
光を通す金属製の網を外側電極５として巻き付ける。内
側管２の外壁には、内側電極６として、アルミ箔を円筒
状にして外壁に密着するように貼りつける。
【００１５】上記のように構成された本発明の実施の形
態の気体冷却式誘電体バリア放電ラプの動作を説明す
る。外側電極５をアース側に、内側電極６を高電圧側と
して、高周波高電圧を印加して点灯させる。
【００１６】金属パイプ４の開放側を入り口として、入
口より供給する1.5気圧の加圧窒素を、小さな孔７より
放射状に噴射する。噴射した気体を、内側管２の中心軸
側の壁に直角に当てて冷却する。冷却気体を管壁に直角
に吹き付けることで、壁に平行に冷却気体を流す方法に
比較して、より強力に冷却することができる。また、加
圧気体を多数の小さな孔７より噴出することにより、断
熱膨張効果で気体の温度が低下して、さらに冷却効率が
上がり、放電ガスを効率良く冷却することができる。こ
の２つの冷却作用により、放電ランプ１の入力電力を1.
0〜2.0（Ｗ／ｃｍ2）にすることができる。
【００１７】以下、断熱膨張効果による気体の温度の降
下の具体的数値を示す。計算式は次の（１）、（２）式
の通りである。
【００１８】
Ｔ2＝Ｔ1×（Ｖ1／Ｖ2）K-1 （１）
Ｐ2／Ｐ1＝（Ｖ1／Ｖ2）K （２）
ただし、Ｔ1＝入力側の絶対温度、Ｔ2＝出口側の絶対温
度、Ｖ1＝入力側の容積、Ｖ2＝出口側の容積、Ｐ1＝加
圧気体の圧力、Ｐ2＝冷却部の気体の圧力、Ｋ＝1.4（窒
素の場合）である。
【００１９】〔ケース１〕 Ｐ1＝1.5気圧、Ｐ2＝1.0気
圧とし、加圧気体の温度を25℃とすると、（２）式よ
り、
Ｐ2／Ｐ1＝0.667，Ｖ1／Ｖ2＝0.75
となるので、（１）式より、
Ｔ2＝（273＋25）×0.7500.4Ｋ＝265.6Ｋ＝−7.4℃
となる。したがって、25℃の気体温度が32.4度下がるこ
とになる。
【００２０】〔ケース２〕Ｐ1＝2.0気圧とし、他は〔ケ
ース１〕と同じとすると、（２）式より、
Ｐ2／Ｐ1＝0.5Ｖ1／Ｖ2＝0.61
となる。したがって、（１）式より、
Ｔ2＝（273＋25）×0.610.4Ｋ＝244.5Ｋ＝−28.5℃
となり、25℃の気体の温度が53.5度下がる。
【００２１】上記のように、本発明の実施の形態では、
気体冷却式誘電体バリア放電ランプを、誘電体バリア放
電ランプの内側管の外壁に加圧した冷却気体を直角に噴
射する構成としたので、平行流による冷却より冷却効率
を上げることができると同時に、断熱膨張効果を利用し
て冷却気体の温度を下げて更に冷却効果を高めることが
できる。
【００２２】
【発明の効果】以上の説明から明らかなように、本発明
の気体冷却式誘電体バリア放電ランプによると、誘電体
バリア放電ランプの内側管の外壁に加圧した冷却気体を
直角に噴射することで、平行流による冷却より冷却効率
を上げることができると同時に、断熱膨張効果を利用し
て冷却気体の温度を下げて更に冷却効果を高めることが
できるという効果が得られる。BACKGROUND OF THE INVENTION [0001] [Technical Field of the Invention The present invention relates to a gas-cooled dielectric barrier discharge lamp, in particular, it relates to a gas-cooled dielectric barrier discharge lamp to efficiently cool the pressurized gas . 2. Description of the Related Art A dielectric barrier discharge lamp is a discharge lamp in which two cylindrical dielectrics (for example, quartz glass or the like) having different thicknesses that transmit ultraviolet rays are coaxially arranged as an outer tube and an inner tube. It is a lamp. Both ends of the outer tube and the inner tube are hermetically sealed, and a discharge chamber is formed between the outer tube and the inner tube.
Rare gas or a mixed gas of rare gas and halogen). A metal mesh electrode that transmits ultraviolet light is disposed outside the outer tube, the electrodes are disposed inside the inner tube, and a high-frequency high voltage is applied to both electrodes. By the voltage applied to both electrodes, the discharge gas filled in the discharge chamber forms excimer molecules and emits ultraviolet rays. In this lamp, when the input power is increased, the temperature of the discharge gas increases, the efficiency of forming excimer molecules decreases, and the luminous efficiency decreases. Further, the temperature of the dielectric material which is transparent to ultraviolet rays rises, the transmittance of ultraviolet rays falls, and the light output decreases. In order to prevent a rise in the temperature of the discharge gas, which is a cause of a decrease in the ultraviolet light emission efficiency of the dielectric barrier discharge lamp, a cooling method of flowing a liquid inside the inner tube (high-pressure electrode side), cooling air or nitrogen, etc. Is used.
As a conventional example of a dielectric barrier discharge lamp cooled by liquid, there is one disclosed in Japanese Patent Application Laid-Open No. 5-266863. [0005] However, the cooling method using a liquid has a problem that maintenance of the cooling liquid is required and a problem of leakage of the cooling liquid when replacing the lamp. Further, in the cooling method using a gas, since the cooling gas is cooled by flowing in the axial direction of the lamp, the cooling efficiency is extremely low, and the discharge gas cannot be efficiently cooled. for that reason,
There is a problem that it has to be used with a small electric power corresponding to the cooling effect. With conventional cooling methods, the input power is at most
The limit was about 0.5 (W / cm 2 ). SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned conventional problems and to provide an efficient cooling structure of a dielectric barrier discharge lamp of a gas cooling type. In order to solve the above-mentioned problems, a gas-cooled dielectric barrier discharge lamp of the present invention comprises an outer tube made of a cylindrical dielectric material that transmits ultraviolet light, and an outer tube. A discharge in which both ends are hermetically sealed by filling a rare gas or a mixed gas of a rare gas and halogen, etc. between the outer tube and the inner tube, and an inner tube made of a cylindrical dielectric material that transmits ultraviolet light and is coaxially arranged. Chamber, a metal mesh outer electrode that transmits ultraviolet light placed outside the outer tube, an inner electrode placed inside the inner tube, and a number of small holes placed on the central axis of the inner tube.
A cylindrical cooling tubes spaced, with a number of cooling for pressurized gas from a small hole provided in the cooling pipe substantially perpendicularly injected toward the outer wall of the inner tube, the gas by adiabatic expansion at the time of injection
In which and means for lowering the temperature. [0008] With this configuration, the cooling gas can be injected at substantially right angles to the outer wall of the inner tube of the dielectric barrier discharge lamp, and the cooling gas can be cooled more efficiently than when the cooling gas flows in parallel to the wall. Further, the cooling effect can be enhanced by lowering the temperature of the cooling gas by utilizing the adiabatic expansion effect. An embodiment of the present invention will be described below in detail with reference to FIG. 1 and FIG. [0010] Embodiments of the present invention is Lula pump to cool the pressurized cooling gas to the outer wall of the inner tube of the gas-cooled dielectric barrier discharge lamp with a right angle injection. FIG. 1 is an axial sectional view of a dielectric barrier discharge lamp according to an embodiment of the present invention. In FIG. 1, a discharge lamp 1 is an excimer discharge lamp in which an outer tube and an inner tube of two cylindrical dielectric materials having different thicknesses that transmit ultraviolet rays are coaxially arranged. The inner tube 2 is a cylindrical dielectric tube that transmits ultraviolet light. The outer tube 3 is a cylindrical dielectric tube which is arranged coaxially with the inner tube 2 and transmits ultraviolet light. Both ends of the inner tube 2 and the outer tube 3 are hermetically sealed so that the inner tube 2 and the outer tube 3
During this time, a discharge chamber is formed and filled with a discharge gas. The metal pipe 4 is a pipe arranged coaxially with the center axis of the inner pipe 2. The outer electrode 5 is a metal mesh electrode provided outside the outer tube 3 and transmitting ultraviolet light. The inner electrode 6 is an electrode formed by making an aluminum foil into a cylindrical shape and sticking to the outer wall of the inner tube 2. Hole 7 is a hole for ejecting cooling for pressurized gas provided in the metal pipe 4. FIG. 2 is a radial sectional view of the dielectric barrier discharge lamp. In the present embodiment, an inner tube 2 and an outer tube 3 using quartz glass as a dielectric material that transmits ultraviolet light having a wavelength of 172 nm are used. The inner tube 2 has an inner diameter of 13.5 mm and a thickness of 1.
2 mm. The outer tube 3 has an outer diameter of 28.6 mm and a wall thickness of
1.8 mm. The overall length of the lamp is approximately 200 mm. As shown in the sectional views of FIGS. 1 and 2, a metal pipe 4 slightly smaller than the inside diameter of the inner tube 2 is disposed coaxially with the inner tube 2 on the center axis side of the inner tube 2 of the discharge lamp 1. I do.
The outer diameter of the metal pipe 4 is 10.0 mm and the wall thickness is 1.0 mm. The length of the metal pipe 4 is 230 mm. The closed end of the metal pipe 4 and one end of the discharge lamp 1 are flush with each other. One end of the metal pipe 4 is closed, and 80 small holes 7 having a diameter of 0.75 mm in a direction perpendicular to the axis are formed on a line obtained by dividing the circumference into four equal parts at 200 mm in the opposite direction from the closed end. . The metal pipe 4 is fixed at a part of the circumference so that the cooling gas flows out at both ends of the discharge lamp 1. The metal pipe 4 is not limited to metal and may be an insulating pipe. The discharge lamp 1 is filled with a xenon gas as a discharge gas at about 20 KPa. On the outer wall of the outer tube 3,
A metal net through which light passes is wound as the outer electrode 5. On the outer wall of the inner tube 2, as an inner electrode 6, an aluminum foil is formed in a cylindrical shape and stuck so as to be in close contact with the outer wall. The operation of the gas-cooled dielectric barrier discharge lap according to the embodiment of the present invention configured as described above will be described. With the outer electrode 5 on the ground side and the inner electrode 6 on the high voltage side, high frequency high voltage is applied to light up. [0016] as an entrance open side of the metal pipe 4, the pressure of nitrogen 1.5 atm supplied from the inlet to inject smaller hole 7 radially. The injected gas is cooled by hitting the wall of the inner pipe 2 at a right angle to the center axis side wall. By blowing the cooling gas at right angles to the tube wall, it is possible to perform more powerful cooling as compared with a method of flowing the cooling gas parallel to the wall. In addition, the pressurized
By leaving injection from a large number of small holes 7 a pressure gas, the temperature of the gas in the adiabatic expansion effect is reduced, it is possible to further increases the cooling efficiency, the discharge gas efficiently cooled. By these two cooling actions, the input power of the discharge lamp 1 is increased by 1.
It can be set to 0 to 2.0 (W / cm 2 ). Hereinafter, specific numerical values of the gas temperature drop due to the adiabatic expansion effect will be described. The calculation formula is as in the following formulas (1) and (2). T 2 = T 1 × (V 1 / V 2 ) K -1 (1) P 2 / P 1 = (V 1 / V 2 ) K (2) where T 1 = absolute temperature on the input side, T 2 = absolute temperature on the outlet side, V 1 = volume on the input side, V 2 = volume on the outlet side, P 1 = pressure of pressurized gas, P 2 = pressure of gas in the cooling section, K = 1.4 (nitrogen Case). [0019] [Case 1] P 1 = 1.5 atm, and P 2 = 1.0 atm when the temperature of the pressure gas and 25 ° C., (2) from equation, P 2 / P 1 = 0.667 , V 1 / V 2 From equation (1), T 2 = (273 + 25) × 0.750 0.4 K = 265.6 K = −7.4 ° C. Therefore, the gas temperature at 25 ° C. is reduced by 32.4 degrees. [Case 2] Assuming that P 1 = 2.0 atm and the other conditions are the same as in [Case 1], from the equation (2), P 2 / P 1 = 0.5 V 1 / V 2 = 0.61. Therefore, from equation (1), T 2 = (273 + 25) × 0.61 0.4 K = 244.5 K = −28.5 ° C., and the temperature of the gas at 25 ° C. drops by 53.5 degrees. As described above, in the embodiment of the present invention,
The gas-cooled dielectric barrier discharge lamp, since a configuration for injecting the cooling gas was pressure on the outer wall of the inner tube of a dielectric barrier discharge lamp at a right angle, it is possible on the gel cooling efficiency than cooling by parallel flow At the same time, the temperature of the cooling gas can be lowered by utilizing the adiabatic expansion effect to further enhance the cooling effect. As is apparent from the above description, the present invention
According to the gas-cooled dielectric barrier discharge lamp, by a right angle inject outer wall pressurized with cooling gas inside tubes dielectrics barrier discharge lamp, it on the gel cooling efficiency than cooling by parallel flow At the same time, the effect of lowering the temperature of the cooling gas by utilizing the adiabatic expansion effect to further enhance the cooling effect is obtained.
【図面の簡単な説明】
【図１】本発明の実施の形態の誘電体バリア放電ランプ
の軸方向断面図、
【図２】本発明の実施の形態の誘電体バリア放電ランプ
の半径方向断面図である。
【符号の説明】
１ 放電ランプ
２ 内側管
３ 外側管
４ 金属パイプ
５ 外側電極
６ 内側電極
７ 孔BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an axial sectional view of a dielectric barrier discharge lamp according to an embodiment of the present invention. FIG. 2 is a radial sectional view of a dielectric barrier discharge lamp according to an embodiment of the present invention. It is. [Description of Signs] 1 discharge lamp 2 inner tube 3 outer tube 4 metal pipe 5 outer electrode 6 inner electrode 7 hole
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) H01J 65/00 H01J 61/52 ──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. 7 , DB name) H01J 65/00 H01J 61/52
Claims (1)
る外側管と、外側管と同軸に配置した紫外線を透過する
円筒状の誘電体からなる内側管と、外側管と内側管の間
に希ガスまたは希ガスとハロゲンの混合ガス等を充填し
て両端を気密に封じた放電室と、外側管の外側に配置し
た紫外線を透過する金属の網目状の外側電極と、内側管
の内側に配置した内側電極と、内側管の中心軸に配置し
た多数の小さな孔をあけた円筒状の冷却管と、冷却管に
設けた多数の小さな孔から冷却用加圧気体を内側管の外
壁に向けてほぼ直角に噴射するとともに、噴射時の断熱
膨張により気体の温度を下げる手段とを具備することを
特徴とする気体冷却式誘電体バリア放電ランプ。(57) [Claim 1] An outer tube made of a cylindrical dielectric material that transmits ultraviolet light, and an inner tube made of a cylindrical dielectric material that transmits ultraviolet light arranged coaxially with the outer tube. A discharge chamber filled between the outer tube and the inner tube with a rare gas or a mixed gas of a rare gas and halogen, etc., and hermetically sealed at both ends; and a metal mesh formed of an ultraviolet-permeable metal disposed outside the outer tube. an outer electrode, an inner electrode disposed inside the inner tube, a cooling tube cylindrical drilled many small holes arranged in the center axis of the inner tube, pressurized cooling from a large number of small holes provided in the cooling pipe while substantially perpendicular injected toward the pressure gas outer wall of the inner tube, heat insulation during the injection
Means for lowering the temperature of the gas by expansion .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29012098A JP3487771B2 (en) | 1998-09-29 | 1998-09-29 | Gas-cooled dielectric barrier discharge lamp |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29012098A JP3487771B2 (en) | 1998-09-29 | 1998-09-29 | Gas-cooled dielectric barrier discharge lamp |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2000106147A JP2000106147A (en) | 2000-04-11 |
| JP3487771B2 true JP3487771B2 (en) | 2004-01-19 |
Family
ID=17752071
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29012098A Expired - Fee Related JP3487771B2 (en) | 1998-09-29 | 1998-09-29 | Gas-cooled dielectric barrier discharge lamp |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3487771B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3576100B2 (en) * | 2000-12-28 | 2004-10-13 | 株式会社オーク製作所 | High-brightness light irradiation device |
| JP6880632B2 (en) * | 2016-10-04 | 2021-06-02 | ウシオ電機株式会社 | Excimer lamp unit |
| US11338052B2 (en) * | 2020-06-23 | 2022-05-24 | The Boeing Company | Single-dielectric excimer lamp systems and methods |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60124347A (en) * | 1983-12-05 | 1985-07-03 | フユージヨン・システムズ・コーポレーシヨン | Method and device for cooling electrodeless lamp |
| JP3178184B2 (en) * | 1993-09-08 | 2001-06-18 | ウシオ電機株式会社 | Dielectric barrier discharge lamp |
| JP3152132B2 (en) * | 1995-11-21 | 2001-04-03 | ウシオ電機株式会社 | Cooling method of rod-shaped lamp and light irradiator |
-
1998
- 1998-09-29 JP JP29012098A patent/JP3487771B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JP2000106147A (en) | 2000-04-11 |
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