JP3504420B2 - Ozone generator - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ozone generator. [0002] Conventionally, an ozone generator (ozonizer)
The anode and the cathode are disposed so as to face each other such that at least one discharge space is formed therebetween, and ozone is generated by flowing oxygen, air, and the like into the discharge space. It has been known. In the case of an ozonizer having a metal or metal oxide as an anode, a ceramic dielectric layer is disposed opposite to the anode surface at a predetermined distance in order to generate a uniform discharge. A voltage of kV is applied. In the rectangular discharge space, a supply port for the raw material gas is formed on one side and an ozone discharge port is formed on the other side, and the supply port and the discharge port are linearly connected in the discharge space. The raw material gas flows well near the region,
In other parts, the gas does not flow smoothly and stays. On the other hand, the discharge is generated uniformly in the entire area of the discharge space. [0003] In the above configuration, the discharge power density per unit gas amount in a region where the gas flow rate is high is smaller than the discharge power density per unit gas amount in a region where the gas flow rate is low. . Since the power efficiency tends to decrease as the discharge power density increases, an efficient space and a bad space occur in the discharge space, and when such unevenness occurs, the overall power efficiency decreases. Will do. The present invention has been made to solve such a conventional problem, in which a gas is uniformly circulated in a discharge space so that a discharge power density becomes uniform, and generation of ozone is reduced. An object of the present invention is to provide an ozone generator which can be efficiently performed. [0005] The invention according to claim 1 is a comparative example.
And a pair of frames facing each other
A ceramic dielectric layer attached to the surface
An anode disposed between two dielectric layers, and each dielectric layer and
And a cathode formed between the frame, the length between the electrodes
In an ozonizer in which a rectangular flat discharge space is formed, the anode has irregularities on both surfaces, and the
Part is configured to contact each dielectric layer and
In one side of the discharge space, the protrusion and the dielectric layer
The width direction of the discharge space, which is the direction orthogonal to the direction of overlap
A plurality of source gas supply units arranged at equal intervals in the
Equally spaced in the width direction of the discharge space on the other side of the discharge space
A plurality of ozone discharge units arranged at intervals.
The source gas supply section and the ozone discharge section are configured so that the source gas flows almost uniformly in the entire region of the discharge space. According to the first aspect of the present invention, the raw material gas can be evenly circulated in the discharge space with a compact configuration, so that the power density does not become uneven and the ozone is efficiently generated. Can be done. 1, an ozonizer 1 includes a pair of flat frames 11 and 12, and ceramic dielectric layers 31 and 32 respectively attached thereto.
And an anode 4 disposed between the dielectric layers 31 and 32. The frames 11 and 12 are arranged to face each other, and a sealing material 13 is interposed on the opposing surfaces of the frames so that the dielectric layers 31 and 3 are interposed therebetween.
The cooling water passages 14 and 15 are formed between the dielectric layer 31 and the frame 11 and between the dielectric layer 32 and the frame 12, respectively. In the example of the ozonizer of FIG. 1, the cooling water passing through the cooling water passages 14 and 15 is used as a cathode. Of course, the cathode may be formed of a metal plate as is well known. Frames 11 and 1
A spacer 16 is interposed between the peripheral portions of the two so as to surround the dielectric layers 31 and 32 so that the dielectric layers 31 and 32 are held at a predetermined distance from each other. A source gas supply pipe 51 is attached, and an ozone gas extraction pipe 52 is attached to the other side. The anode 4 has uneven portions on both surfaces, and the projecting portions are in contact with the dielectric layers 31 and 32. In the case of the ozonizer shown in FIG. 1, the discharge space 5 formed between the anode 4 and the cathode (cooling water) is formed by the dielectric layers 31 and 32 disposed in the discharge space 5 and the projections of the anode 4 and the cathode. , It exists substantially only in the concave portion of the anode 4. It should be noted that this concave portion is formed continuously so that the source gas and the ozone gas can flow between both ends of the anode 4. A power supply 40 is connected to the anode 4 and the cooling water passages 14 and 15. Further, as shown in FIG. 2, the discharge space 5 is formed in a rectangular flat plate shape having a shape corresponding to the planar shape of the anode 4, and the source gas supply pipe 52 is provided on one side of the discharge space in this embodiment. Three are installed at intervals,
Opposite to this, three ozone discharge pipes 51 are provided at equal intervals on the other side, so that the raw material gas flows in the discharge space 5 substantially uniformly over substantially the entire width. FIG. 3 shows another example of the flow means for uniformly flowing the source gas. The discharge space 5 is formed in a rectangular flat plate shape, and one side of the discharge space 5 has a source gas supply space 53.
Is formed over the entire width of a rectangle, and the ozone discharge space 54 is formed over the entire width of the rectangle on the other side. Only one source gas supply pipe 52 is provided so as to communicate with the source gas supply space 53, and only one ozone discharge pipe 51 is provided on the other side so as to communicate with the ozone discharge space 54. . The source gas supply space 53 and the ozone discharge space 54 are spaces that are continuous with the discharge space 5 and are formed as gaps wider than the gap between the anode 4 and the dielectric layers 31 and 32. The source gas supplied from the supply pipe 52 is stored in the source gas supply space 53, and the anode 4 and the dielectric layers 31 and 3 are uniformly distributed in the width direction of the discharge space 5.
2 and is discharged uniformly therefrom in the width direction to the ozone discharge space 54, so that the raw material gas flows between the anode 4 and the dielectrics 31 and 32 (discharge space 5). It is distributed evenly in the width direction. FIG. 4 shows still another example of the distribution means for uniformly flowing the source gas. The discharge space 5 is formed in a rectangular flat plate shape, and a source gas supply space 531 is provided at one side of the discharge space 5. It is formed so as to have a widening triangle, and its tip is formed so as to be continuous with the discharge space 5 over the entire width.
On the other side, an ozone discharge space 541 is formed in a tapered triangular shape, and its base end is formed so as to be continuous with the discharge space 5 over the entire width. Only one ozone discharge pipe 51 is provided so as to communicate with the ozone discharge space 541. In this structure, the rectangular discharge space 5, the triangular source gas supply space 531 and the ozone discharge portion 5
By applying the corner of the anode 4 to the connection corner 50 with the connection 41, there is an advantage that the mounting and positioning of the anode 4 can be easily performed. FIG. 5 shows still another example of the flow means for uniformly flowing the source gas. The discharge space 5, the source gas supply pipe 52 and the ozone discharge pipe 51 are constructed in the same manner as in FIG. The space 532 is formed in a semi-circular shape with a widening end, and the leading end portion is formed so as to be continuous with the discharge space 5 over the entire width. Over the discharge space 5. These source gas supply spaces 531 and 532 and the ozone discharge space 54
1,542 also allows the source gas to pass through the gap between the anode 4 and the dielectric layers 31, 32 evenly in the width direction of the discharge space 5. In the above configuration, when a voltage is applied between the anode 4 and the cathode (the passages for cooling water 14 and 15), a discharge phenomenon occurs in the discharge space 5, whereby the discharge space 5
The raw material gas flowing through is ozonized. In this operation, since the raw material gas flows uniformly in the entire discharge space 5, there is no space in the discharge space 5 between an efficient space and an inefficient space. Is generated efficiently. FIG. 6 shows an experimental apparatus for forming various flow paths in the discharge space 5, and shows source gas supply paths (1) to (4) .
(4) is formed evenly in the width direction of the discharge space 5 and a valve is provided in each flow path, and the ozone discharge paths (5) to (8) are formed evenly in the width direction of the discharge space 5 and the flow path (5) (6)
Valves are provided in (7) so that various flow paths can be selectively formed in the discharge space 5 by opening and closing the respective valves. As shown in FIG. 7, in this apparatus, the results of comparing the ozone concentration when changing the flow path by performing various combinations of opening and closing of valves of experiment numbers 01 to 07 are shown. Experiment number 07 is the source gas supply path.
(1) to (4) are closed, the ozone discharge path (5) is opened, and oxygen supply means ( not shown ) is connected from the ozone discharge path (5) to supply oxygen and discharge from the ozone discharge path (8). It was made. The numerical values in the right column of this table indicate the ratio of the ozone concentration when the ozone concentration in Experiment No. 01 is 1. As a result of the comparison of the respective flow path configurations, the results of the experiment No. 0
In Experiment No. 5, when the valves of all the flow paths were opened and the flow paths in the discharge space 5 were uniform, the ozone concentration was the highest, and conversely, the experiment numbers 01, 04, and 07
Shows that the ozone concentration is low, and this result also shows that ozone can be satisfactorily generated when the source gas is evenly distributed. In the above embodiment, only the ozonizer having a plate-like configuration has been described. However, the present invention is not limited to this, and it is provided with a cylindrical dielectric and a cylindrical anode inserted into the dielectric. Even when the discharge space is formed by this gap, a source gas supply section is formed on one side and an ozone discharge section is formed on the other side to form an annular discharge. The same operation and effect as described above can be achieved even if the material gas is configured to flow almost uniformly in the entire area of the space. According to the first aspect of the present invention, a compact configuration is provided.
The raw material gas can be evenly circulated in the discharge space with
Therefore, the power density does not become uneven, and ozone can be generated efficiently.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an explanatory cross-sectional view of an ozonizer showing an embodiment of the present invention. FIG. 2 is an explanatory plan view of a flow path of a source gas in FIG. 1; FIG. 3 is an explanatory plan view showing another example of the flow path of the source gas. FIG. 4 is an explanatory plan view showing still another example of the flow path of the raw material gas. FIG. 5 is an explanatory plan view showing still another example of the flow path of the raw material gas. FIG. 6 is an explanatory plan view of an experimental apparatus for forming various flow paths in a discharge space. FIG. 7 is a comparison table of ozone generation states by various flow paths. [Description of Signs] 1 Ozonizer 4 Anode 5 Discharge space 31, 32 Dielectric layer 51 Ozone discharge pipe 52 Source gas supply pipe 53, 531, 532 Source gas supply space 54, 541, 542 Ozone discharge space

──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Takashi Tanioka 2-3-1 Shinhama, Arai-machi, Takasago-shi, Hyogo Kobe Steel, Ltd. Inside Takasago Works (56) References JP-A-7-232905 (JP, A) JP-A-4-265204 (JP, A) JP-A-54-119389 (JP, A) JP-A-55-144405 (JP, A) JP-A-54-64093 (JP, A) (JP, U) WO 94/008891 (WO, A1) (58) Fields investigated (Int. Cl. ⁷ , DB name) C01B 13/11

Claims (1)

(57) [Claims] [Claim 1] A pair of frames facing each other and these frames
From ceramic mounted on opposite sides of the frame
A dielectric layer, and an anode disposed between the dielectric layers,
The cathode formed between each dielectric layer and the frame
In the ozonizer in which a rectangular flat discharge space is formed between both electrodes, the anode has uneven portions on both surfaces.
It is configured so that the convex part contacts each dielectric layer.
And at one side of the discharge space
It is a direction orthogonal to the overlapping direction of the protrusion and the dielectric layer
A plurality of source gases arranged at equal intervals in the width direction of the discharge space
And a discharge space at the other side of the discharge space.
A plurality of ozone discharge units arranged at equal intervals in the width direction between
The source gas supply unit and the ozone discharge unit
Ozone generator, characterized in that substantially uniformly material gas is arranged to flow in the entire region of the discharge space Ri.