JP3516346B2 - Jig for sputtering - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sputtering jig used for manufacturing a color filter for a liquid crystal display device or the like and for forming a transparent electrode film having a predetermined shape on the color filter.

[0002]

2. Description of the Related Art First, an example of a method of manufacturing a color filter will be described with reference to FIG. Transparent substrate 21 such as glass
A black light-shielding layer 22 having a predetermined shape is formed thereon by using a vacuum film forming method, a photolithography method, or the like (A) (this black light-shielding layer may not be provided). Next, a first color, for example, a red water-soluble colored layer forming photosensitive material is applied from above the black light shielding layer 22, a photomask is arranged and exposed, and then development is performed to form a red pattern layer 23 ( B) For the second and subsequent colors, for example, after applying a light-sensitive material for forming green and blue colored layers, a photomask is arranged and exposed, and then development is performed to form green and blue pattern layers 2
4 and 25 are formed (C, D). Next, a transparent protective film layer 26 is formed on the color pattern layer for the purpose of physicochemical protection, surface smoothing, and flattening (E). Further, a transparent electrode layer 27 is formed on the protective film layer 26 to manufacture a color filter (F).

There are various methods of forming the transparent electrode layer 27 in the above steps, such as vapor deposition, ion plating, and sputtering. The protective film layer 26 serving as the base of the transparent electrode of the color filter is made of synthetic resin. Is formed of
From the viewpoint of the heat resistance of the protective film layer 26, a sputtering method which can form a film at a relatively low temperature is widely used. In an automated line, fix the substrate and mask in place in the jig,
About several tens of jigs are housed in the sputtering apparatus to perform sputtering. In a conventional sputtering jig, a metal mask that covers the glass substrate on which a film is to be formed except for the color pattern area is arranged on a main plate having an opening. Position the glass substrate so that it follows a certain guide pin, and then place another plate, that is, in the state where the metal mask and the glass substrate are sandwiched between this plate and the main plate, both plates are placed. Are mechanically fixed by means of fastening with springs, screws, or the like.

[0004]

However, in the above-mentioned conventional jig for sputtering, since the substrate and the mask are mechanically fixed by means of springs or the like, the substrate is scratched when it is pressed too much, so that the substrate is not pressed. If the force is too weak, there is a problem that a gap is generated between the substrate and the mask, and the transparent electrode layer wraps around the edge of the color pattern of the substrate. In particular, when a method of forming a plurality of color patterns on one substrate for mass production is adopted, a dedicated jig for pressing between the color patterns and the mask is required. Further, the inside of the sputtering apparatus is heated to a high temperature of about 200 ° C., and the glass substrate and the metal mask have different coefficients of thermal expansion, so that thermal distortion occurs between them during sputtering, and the color pattern is damaged. I have a problem.

In order to solve the above-mentioned problems, the applicant of the present application has disclosed in Japanese Patent Application No. 3-281066 a main plate having an opening, a sub-plate having a large number of magnets therein, and a color pattern facing each other. A mask having an opening is formed so that the mask material is 42 alloy (42% nickel, 58% iron) so that the color pattern is not scratched and the transparent electrode layer We have proposed a sputtering jig that can improve pattern accuracy.

However, in the above-mentioned sputtering jig, the mask made of a ferromagnetic material is attracted by the magnet of the sub-plate and the mask and the glass substrate are firmly adhered to each other, so that the mask and the glass substrate are thermally expanded. Due to the difference in the ratio, there is a problem that a gap occurs between the two and the peripheral portion of the color pattern on the transparent substrate is scratched. In addition, if dust enters between the mask and the glass substrate, the peripheral portion of the color pattern on the transparent substrate is similarly scratched. The scratches cause the following problems.

FIG. 5 shows an example of a liquid crystal display device, which comprises a color filter 31 and a counter substrate 32 facing the color filter 31,
A counter substrate 32 are bonded by the outer periphery sealing portion 33 of the transparent substrate 21 of the color filter 31, a predetermined gap is maintained by a spacer 36 which is inherent in the sealing portion 33. Liquid crystal 34 is sealed between the counter substrate 32 and the color filter 31, and a spacer 35 is provided between the color filter 31 and the counter substrate 32 with an alignment layer 28 interposed therebetween. In such a liquid crystal display device, when the peripheral portion A of the color pattern on the transparent substrate 21 is scratched, the spacer 36 cannot accurately provide the gap (4 to 5 μm) between the color filter 31 and the counter substrate 32, and thus the defective product. Will be.

An object of the present invention is to solve the above problems and to provide a sputtering jig capable of preventing the peripheral portion of the color filter from being scratched.

[0009]

To this end, the sputtering jig of the present invention is provided with an opening 2a and around the opening.
, A main plate 2 provided with a plurality of guide pins 7 in directions orthogonal to each other , and a hinge 3 for rotating the main plate.
The color plate 1 and the sub-plate 5 provided in the interior of the sub-plate 5 in which a large number of samarium-cobalt-based magnets 6 are provided.
0 on the glass substrate 9 and the color pattern
And a mask 8 with an opening 8a is formed so as to face, Oyo said mask so as to abut on the guide pin
Set the glass substrate between the main plate and the sub plate
Then, the mask 8 is a sputtering jig for rotating the sub-plate to fix it to the main plate, and the mask 8 has an outer peripheral portion A of the color pattern 10 near the opening 8a on the surface facing the glass substrate 9. And a non-contact portion 8b formed by half-etching facing each other, and the position of the non-contact portion is provided corresponding to the seal portion 33 of the liquid crystal display device. Further, instead of the non-contact portion 8b, a coating layer 11 made of polyimide resin may be formed on the surface of the mask 8 facing the glass substrate. It should be noted that the numbers added to the above configurations are for comparison with the drawings for easy understanding, and the configurations of the present invention are not limited thereby.

[0010]

In the present invention, when the glass substrate and the mask are set in the sputtering jig, the mask is attracted by a large number of magnets in the sub plate, and the glass substrate is fixed between the sub plate and the mask with a uniform force. It At this time,
A non-contact portion is formed in the vicinity of the opening of the mask, or a coating layer made of a polyimide resin is formed on the surface of the mask facing the glass substrate, so that the outer periphery of the color pattern of the glass substrate is prevented from being scratched. It

[0011]

Embodiments of the present invention will be described below with reference to the drawings. 1 to 3 show a sputtering jig 1 according to the present invention.
1 shows a perspective view, FIG. 2 is a sectional view showing a state in which a glass substrate and a mask are set in the jig shown in FIG. 1, and FIG.
FIG. 3 is a partially enlarged sectional view of FIG. 2.

1 and 2, the sputtering jig 1 of the present invention comprises a main plate 2 having an opening 2a formed therein.
And a sub plate 5 rotatably provided on the main plate 2 by a hinge 3, and a large number of magnets 6 are embedded in the sub plate 5. The magnet 6 is Sm with excellent heat resistance.
A -Co (samarium cobalt) based one is adopted.

Around the opening 2a of the main plate 2, there are mutual
A plurality of guide pins 7 are provided in a direction orthogonal to each other, and the mask 8 and the glass substrate 9 are set between the main plate 2 and the sub plate 5 so as to abut against the guide pins 7, and the sub plate 5 is rotated. The structure is such that it is fixed to the main plate 2. A color pattern 10 is formed on the glass substrate 9, and the color pattern 1 is formed on the mask 8.
The opening 8 is formed so as to face 0. In addition,
The number of color patterns is arbitrary. The material of the mask 8 is
A 42 alloy (42% nickel, 58% iron), which is a ferromagnetic material excellent in heat resistance that can withstand a high temperature of about 200 ° C., is adopted.

As shown in FIG. 3, a non-contact portion 8b is formed in the opening 8a by half etching so as to face the outer peripheral portion of the color pattern 10 on the glass substrate 9 side. The depth of the non-contact portion 8b is about half the thickness of the mask 8, and the position of the non-contact portion 8b is provided corresponding to the position where the sealant is formed when assembling the cells of the liquid crystal display device. Is preferred.

The operation of the present invention having the above structure will be described. When the glass substrate 9 and the mask 8 are set in the sputtering jig 1 as shown in FIG. Fixed with a uniform force in between. At this time, since the non-contact portion 8b is formed in the opening 8a of the mask 8 as shown in FIG. 3, it is possible to prevent the outer periphery of the color pattern 10 of the glass substrate 9 from being scratched. Then, sputtering is performed from the opening 8 a side of the mask 8 to form a transparent electrode layer on the surface of the color pattern 10.

FIG. 4 is an enlarged sectional view showing another embodiment of the present invention. In this embodiment, a coating layer 11 made of polyimide resin is formed on the surface of the mask 8 facing the glass substrate 9, and the mask 8 is brought into contact with the glass substrate 9 via the coating layer 11. Polyimide is used because it is a heat-resistant material that can withstand a high temperature of about 200 ° C., and does not generate gas, so it does not adversely affect the color pattern. According to this embodiment, since the glass substrate 9 does not come into direct contact with the mask 8, the glass substrate 9 is not scratched.

[0017]

As is apparent from the above description, according to the present invention, the openings are provided in the directions orthogonal to each other.
Mask and glass so that it abuts the guide pin
Place the board between the main plate and the sub plate and
The mask is rotated to fix it to the main plate.
And the glass substrate are easy to position and the main
When opening and closing the plate and sub-plate,
May be slightly deviated and scratch the periphery of the color pattern.
There is no. In addition, the mask should face the glass substrate.
The outer periphery of the color pattern near the opening of the surface
Has a non-contact portion by half etching facing the
The position of the non-contact part is set corresponding to the seal part of the liquid crystal display device.
The glass base is worn instead of the non-contact part.
Coating made of polyimide resin on the surface facing the plate
Since the layer is formed, it is possible to prevent scratches on the periphery of the color filter , and it is possible to prevent color damage in liquid crystal display devices.
The gap between the filter and the counter substrate can be made precise.
Can Ru.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of a sputtering jig of the present invention.

FIG. 2 is a cross-sectional view showing a state where a glass substrate and a mask are set in the jig shown in FIG.

FIG. 3 is a partially enlarged sectional view of FIG.

FIG. 4 is a partially enlarged sectional view showing another embodiment of the sputtering jig of the present invention.

FIG. 5 is a cross-sectional view showing an example of a liquid crystal display device.

FIG. 6 is an enlarged cross-sectional view for explaining the manufacturing process of the color filter.

[Explanation of symbols]

1 ... Sputtering jig, 2 ... Main plate, 2a ... Opening part,
5 ... Sub plate 6 ... Magnet, 8 ... Mask, 8a ... Opening part, 8b ... Non-contact part, 9 ... Glass substrate 10 ... Color pattern, 11 ... Coating layer

Continuation of the front page (56) Reference JP-A-51-61782 (JP, A) JP-A-2-250954 (JP, A) JP-A-62-164865 (JP, A) Actual development-Sho 63-42155 (JP , U) Patent 3465797 (JP, B2) (58) Fields investigated (Int.Cl. ⁷ , DB name) C23C 14/00-14/58

Claims (2)

(57) [Claims] 1. An opening is formed and is surrounded by each other around the opening.
A main plate having a plurality of guide pins are provided in the direction orthogonal to the, et rotatably mounted by a hinge to the main plate
And a sub-plate on which a large number of samarium-cobalt magnets are provided and a glass on which a color pattern is formed.
Substrate and an opening so as to face the color pattern.
And a mask but which are formed, abutting on the guide pin
As described above, the mask and the glass substrate are used as a main plate.
Set between the sub plates and rotate the sub plate to
A jig for sputtering fixed to a plate , wherein the mask has a non-contact portion by half etching facing the outer peripheral portion of the color pattern, in the vicinity of the opening of the surface facing the glass substrate. The sputtering jig, wherein the non-contact portion is provided at a position corresponding to the seal portion of the liquid crystal display device. 2. An opening is formed and is surrounded by each other around the opening.
A main plate having a plurality of guide pins are provided in the direction orthogonal to the, et rotatably mounted by a hinge to the main plate
And a sub-plate on which a large number of samarium-cobalt magnets are provided and a glass on which a color pattern is formed.
Substrate and an opening so as to face the color pattern.
And a mask but which are formed, abutting on the guide pin
As described above, the mask and the glass substrate are used as a main plate.
Set between the sub plates and rotate the sub plate to
A jig for sputtering fixed to a plate , wherein the mask has a coating layer made of a polyimide resin on a surface facing the glass substrate, and the coating layer is provided corresponding to a seal portion of a liquid crystal display device. A jig for sputtering characterized in that