JP3517537B2 - Vibration wave drive - Google Patents
Vibration wave driveInfo
- Publication number
- JP3517537B2 JP3517537B2 JP33819696A JP33819696A JP3517537B2 JP 3517537 B2 JP3517537 B2 JP 3517537B2 JP 33819696 A JP33819696 A JP 33819696A JP 33819696 A JP33819696 A JP 33819696A JP 3517537 B2 JP3517537 B2 JP 3517537B2
- Authority
- JP
- Japan
- Prior art keywords
- sliding
- contact
- vibration wave
- ceramic
- moving body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
【0001】[0001]
【発明の属する技術分野】本発明は振動波モータ等の振
動波駆動装置に係り、特に弾性体と接触する接触体の摺
動材をセラミック製とした振動波駆動装置に関するもの
である。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibration wave drive device such as a vibration wave motor, and more particularly to a vibration wave drive device in which a sliding member of a contact body that contacts an elastic body is made of ceramic.
【0002】[0002]
【従来の技術】図8、図9は本発明の従来例として示す
る振動波モータの断面図で、図8は加圧バネ設置前を示
し、図9は加圧バネセッティング後の加圧接触部分の詳
細図を示す。図8において、1は振動が励起される弾性
体、2は弾性体1の底面に接着剤により固定された圧電
素子で、全体として振動子21を構成している。3は接
触体としての移動体であり、弾性体1との接触部分のみ
に摺動材としてのリング状セラミックス部材4が接着さ
れている。8 and 9 are cross-sectional views of a vibration wave motor shown as a conventional example of the present invention. FIG. 8 shows a pressure spring before installation and FIG. 9 shows a pressure contact after setting the pressure spring. The detailed drawing of a part is shown. In FIG. 8, reference numeral 1 is an elastic body in which vibration is excited, and 2 is a piezoelectric element fixed to the bottom surface of the elastic body 1 with an adhesive, which constitutes a vibrator 21 as a whole. Reference numeral 3 is a moving body as a contact body, and a ring-shaped ceramic member 4 as a sliding member is adhered only to a contact portion with the elastic body 1.
【0003】5は中心軸、6は加圧用円板バネで、板バ
ネ6は中心軸5に圧入後接着固定されている。7はハウ
ジング、8及び9はベアリング、10は振動子を固定す
るための押工環であり、ハウジング7に加工されたネジ
によって固定されている。11は固定部材であり、ハウ
ジング7はネジ12によって固定部材11に固定されて
いる。Reference numeral 5 is a central shaft, and 6 is a pressing disc spring. The leaf spring 6 is press-fitted into the central shaft 5 and then fixed by adhesion. Reference numeral 7 is a housing, 8 and 9 are bearings, and 10 is a pushing ring for fixing the vibrator, which is fixed by a screw formed on the housing 7. Reference numeral 11 denotes a fixing member, and the housing 7 is fixed to the fixing member 11 with a screw 12.
【0004】ところで、セラミックス部材には、金属部
材に比べて一般的に次に示す様な特徴がある。By the way, the ceramic member generally has the following features as compared with the metal member.
【0005】1)硬く耐摩耗性が大きい。1) Hard and has high wear resistance.
【0006】2)さびない(化学的に安定している)
3)熱膨張が小さい
4)圧縮強度が高い
このために、振動波モータの摺動材としてセラミックス
材をが用いることが提案され、移動体3は、A5056
などのアルミ母材にリング上の薄板セラミックス部材4
を接着することにより製作される。2) No rust (chemically stable) 3) Small thermal expansion 4) High compression strength For this reason, it has been proposed to use a ceramic material as a sliding material of the vibration wave motor, Mobile unit 3 is A5056
Thin ceramics member 4 on the ring to aluminum base material such as
It is manufactured by bonding.
【0007】[0007]
【発明が解決しようとする課題】しかしながら、一方で
セラミックス部材には、次に示す様な欠点をも合わせも
っている。On the other hand, however, ceramic members also have the following drawbacks.
【0008】1)局部的な応力に弱い2)引っ張り応力
が低いこのことから、図9に示す、加圧用板バネ6をセ
ッティング後(つまりモータ状態)における弾性体1と
移動体3の加圧部及び接触状態を観察すると、中心近傍
を加圧用板バネ6で押すことにより、接触部分を支点と
して移動体に中心から外径に向かって曲げ応力が働くこ
とになる。そのために、母材である移動体2に接着され
たセラミックリング4には、矢印の方向に引っ張り応力
が働くことになり、亀裂、割れ、局部破損、接着剥れ等
が高い確率で発生する虞があった。1) Weakness to local stress 2) Low tensile stress Therefore, as shown in FIG. 9, the pressing of the elastic body 1 and the moving body 3 after setting the pressing leaf spring 6 (that is, in the motor state). When observing the parts and the contact state, by pushing the vicinity of the center with the pressing leaf spring 6, a bending stress acts on the moving body from the center toward the outer diameter with the contact portion as a fulcrum. Therefore, tensile stress acts on the ceramic ring 4 bonded to the moving body 2 as the base material in the direction of the arrow, and cracks, cracks, local damage, adhesive peeling, and the like are likely to occur. was there.
【0009】本出願に係る発明の目的は、接触体を構成
するセラミック製の摺動材に亀裂、割れ、局部破損、接
着剥れ等が発生するのを防止できる振動波駆動装置を提
供することにある。[0009] The engagement Ru inventions of interest application, provides crack ceramic sliding material constituting the contact body, cracks, local damage, the vibration wave driving device capable of preventing the adhesion peeling off or the like occurs To do.
【0010】[0010]
【課題を解決するための手段】本出願に係る第1の発明
は、弾性体に駆動振動を形成する振動子と、接触体本体
に前記弾性体との接触部分にセラミック製の摺動体を接
合し、加圧手段を介して前記弾性体に加圧接触する接触
体とを有し、前記弾性体と前記接触体とを前記駆動振動
により相対移動させる振動波駆動装置において、前記摺
動材はあらかじめ径方向に圧縮した状態で接触体本体に
接合したことを特徴とするものである。A first invention according to the present application is a vibrator for forming driving vibration in an elastic body, and a contact body.
Attach a ceramic sliding body to the contacting part with the elastic body.
Contact with the elastic body under pressure through the pressure means.
A vibration body, and the elastic body and the contact body.
In the vibration wave drive device that moves relative to each other, the sliding member is joined to the contact body in a state of being previously compressed in the radial direction.
【0011】この構成では、摺動体に引っ張り応力が加
わえられた場合でも摺動体自身には、圧縮応力を元に戻
す様な力のみがかかることになる。With this structure, even when a tensile stress is applied to the sliding body, only the force for restoring the compressive stress is applied to the sliding body itself.
【0012】本出願に係る第2の発明は、前記接触体本
体には、前記摺動体の外周部を圧嵌合するためのインロ
ー部が形成されていることを特徴とする。A second aspect of the present invention is characterized in that a spigot portion for press-fitting the outer peripheral portion of the sliding body is formed in the contact body.
【0013】この構成では、より簡単に圧縮応力を加え
た状態で固定させることを可能にした。With this structure, it is possible to more easily fix the device under the condition that the compressive stress is applied.
【0014】[0014]
【発明の実施の形態】(本発明の前提例) 図1は本発明の前提となる技術を示す前提例である。BEST MODE FOR CARRYING OUT THE INVENTION ( Premise Example of the Present Invention ) FIG. 1 is a premise example showing a technique which is a premise of the present invention.
【0015】本前提例の振動波モータは図8に示す従来
例と同じ形式のもので、異なる点のみを以下に説明す
る。The vibration wave motor of this premise example has the same type as that of the conventional example shown in FIG. 8, and only different points will be described below.
【0016】まず、本前提例の基本的な考え方を図2及
び図3を参照して説明する。図2および図3は、一般的
な均質な板材(又は、はり)に曲げ応力が加えられた場
合の形状と力の方向を説明するための図で、一般に均質
な板材に曲げ応力が加わると、図2の様な形状となりP
面側には圧縮応力が、Q面側には引っ張り応力が働く。
その厚み方向における力の向きと大きさは図3の様にな
り、板の中央部に応力がかからない面が存在し、それを
中立面と呼ぶ。First, the basic idea of this premise example will be described with reference to FIGS. 2 and 3 are views for explaining the shape and the direction of force when a bending stress is applied to a general homogeneous plate material (or beam). When bending stress is applied to a generally homogeneous plate material, , The shape is as shown in Fig. 2 and P
Compressive stress acts on the surface side, and tensile stress acts on the Q surface side.
The direction and magnitude of the force in the thickness direction are as shown in FIG. 3, and there is a stress-free surface at the center of the plate, which is called the neutral surface.
【0017】本前提例はこのような考え方を利用して、
図中移動体本体3aの外周部に、移動体3の中立面位置
まで切り欠いた段部3bを形成し、円環形状のセラミッ
クス製の摺動体4を接着剤により接合した。This premise example uses such a concept,
In the figure , a stepped portion 3b cut out to the neutral plane position of the moving body 3 is formed on the outer peripheral portion of the moving body 3a, and an annular ceramic sliding body 4 is joined by an adhesive.
【0018】これにより、たとえ移動体3に曲げ応力が
加わった場合においても、接合面での横方向の応力は、
最小限におさえることが可能となり、セラミックス製の
摺動体のき裂、割れ、局部破損、接着剥れを防止するこ
とができた。As a result, even when a bending stress is applied to the moving body 3, the lateral stress on the joint surface is
It was possible to minimize the amount, and it was possible to prevent cracks, cracks, local damages, and adhesive peeling of the ceramic sliding body.
【0019】(第1の実施の形態) 図4は本発明の第1の実施の形態を示す。[0019] (First Embodiment) FIG. 4 shows a first embodiment of the present invention.
【0020】本実施の形態は、リング状の移動体におい
て、移動体本体3に対してセラミックス製の摺動体4を
あらかじめ圧縮応力を加えた状態で接着固定したもの
で、図4に示す接合治具36において形成される。この
接合治具36は、移動体本体と摺動体4とを接合する際
に、摺動体4に外径側から圧縮応力を加えた状態で接着
するようにしたもので、接合ベース31内に昇降可能に
配置された受け皿35に載置された移動体本体3aに
は、摺動体4との接合面にあらかじめ接着材34が塗布
されている。In this embodiment, in a ring-shaped moving body, a ceramic sliding body 4 is adhered and fixed to a moving body 3 in advance under compressive stress. Formed in the tool 36. The joining jig 36 is adapted to be attached to the sliding body 4 in a state where compressive stress is applied from the outer diameter side when joining the moving body main body and the sliding body 4. An adhesive 34 is applied in advance to the joint surface with the sliding body 4 of the movable body 3a placed on the pan 35 that is arranged so as to be possible.
【0021】また、セラミックス製の円環形状の摺動体
4は、接合ベース31の外径側数ヶ所に設けられた例え
ばボールプランジャー33等により圧縮力が加えられた
状態で固定されている。この状態を保持しつつ接合ネジ
32を回転させて、受け皿35を上昇させ、移動体本体
3aと摺動体4を接合させる。Further, the ceramic annular slide body 4 is fixed in a state in which a compressive force is applied by, for example, a ball plunger 33 or the like provided at several positions on the outer diameter side of the joining base 31. While maintaining this state, the joining screw 32 is rotated to raise the tray 35 to join the moving body 3a and the sliding body 4.
【0022】この様にして作られた移動体を、図8に示
す従来の振動波モータの移動体に代えてセッティングす
ると、セラミックス製の摺動体4には引っ張り応力がか
かるが、もともと圧縮された状態で接着されているた
め、元に戻る方向に力が働くのみで摺動体4の破損を防
止することが出来た。When the moving body thus produced is set in place of the moving body of the conventional vibration wave motor shown in FIG. 8, tensile stress is applied to the ceramic sliding body 4, but the sliding body 4 is originally compressed. Since they are bonded in this state, the sliding body 4 can be prevented from being damaged only by the force acting in the returning direction.
【0023】なお、本実施の形態の摺動体は上記した前
提例あるいは以下の第3、第4、第5の実施の形態に示
す摺動材にも用いることができる。[0023] Incidentally, the sliding member of the present embodiment before the above-mentioned
It can also be used for the sliding members shown in the examples or the following third, fourth, and fifth embodiments.
【0024】(第2の実施の形態) 図5は本発明の第2の実施の形態を示す。[0024] (Second Embodiment) FIG. 5 shows a second embodiment of the present invention.
【0025】本第2の実施の形態の意図するところは、
第1の実施の形態と同じように摺動体2にあらかじめ圧
縮応力を付与することにあり、円板状の移動体30は移
動体本体30aの外周部にセラミックス部材4の外周部
をガイドする様なインロー部30bを形成し、リング状
の摺動体4をこのインロー部30bに圧入固定すること
により、摺動体4に圧縮応力を与えた状態で移動体本体
30aに摺動体4を固定するようにしている。The intent of this second embodiment is that
As in the first embodiment, compressive stress is applied to the sliding body 2 in advance, so that the disk-shaped moving body 30 guides the outer peripheral portion of the ceramic member 4 to the outer peripheral portion of the moving body main body 30a. By forming the inner spigot portion 30b and press-fitting and fixing the ring-shaped sliding body 4 into the spigot portion 30b, the sliding body 4 is fixed to the moving body main body 30a in a state where compressive stress is applied to the sliding body 4. ing.
【0026】本第2の実施の形態によれば、第1の実施
の形態の様な接合治具を用意する必要がなく、よりシン
プルである。According to the second embodiment, there is no need to prepare such joining jig of the first embodiment, which is simpler.
【0027】(第1参考例) 図6は本発明の参考技術を示す第1参考例である。(First Reference Example ) FIG. 6 is a first reference example showing a reference technique of the present invention.
【0028】本第1参考例は、加圧用板バネ6の作用部
6aが移動体3に接触する接触径を摺動体4の外径より
も大きくすることにより、板バネ6による加圧時に移動
体3へは、これまでの説明図と逆側の曲げ力が加わるこ
とになるので、セラミックス部材には、圧縮応力が加わ
ることはあっても引っ張り応力が加わることはなく、破
損を防止することで出来る。In the first reference example , the action diameter 6a of the pressing leaf spring 6 makes contact with the moving body 3 larger than the outer diameter of the sliding body 4 so that the leaf spring 6 moves when pressure is applied. Since bending force is applied to the body 3 on the opposite side of the above-mentioned explanatory views, the ceramic member is not subjected to tensile stress but may be subjected to tensile stress, so that damage is prevented. You can
【0029】(第2参考例) 図7は本発明の第2参考例を示す。( Second Reference Example ) FIG. 7 shows a second reference example of the present invention.
【0030】本第2参考例の意図するところは、第1参
考例と同様に、加圧用板バネ6の作用部6aを移動体3
に接触する接触径を摺動体4の外径よりも大きくし、さ
らに第2の実施の形態と同様に、移動体本体30aの外
周部にセラミックス部材4の外周部をガイドする様なイ
ンロー部30bを形成し、リング状の摺動体4をこのイ
ンロー部30bに圧入固定することにより、摺動体4に
圧縮応力を与えた状態で移動体本体30aに摺動体4を
固定するようにしている。The intent of this second reference example is to refer to the first reference.
In the same manner as the example, the action portion 6a of the pressing leaf spring 6 is attached to the moving body 3
The contact diameter for contacting with the sliding member 4 is made larger than the outer diameter of the sliding member 4, and, like the second embodiment, the spigot portion 30b for guiding the outer peripheral portion of the ceramic member 4 to the outer peripheral portion of the moving body 30a. Is formed and the ring-shaped sliding body 4 is press-fitted and fixed to the spigot portion 30b, whereby the sliding body 4 is fixed to the moving body main body 30a in a state where compressive stress is applied to the sliding body 4.
【0031】これにより、セラミックス製の摺動体4の
外径をしまりばめによりガイドすることにより破損防止
を確実なものにすることができる。Thus, the outer diameter of the ceramic sliding body 4 is guided by the interference fit, so that the damage can be surely prevented.
【0032】第1、第2参考例によれば、弾性体に移動
体を加圧接触させるためのバネの接触径を摺動体の外径
よりも大きくすることにより、加圧時に移動体へは、バ
ネの接触径が摺動体の外径よりも小さい場合に比べて、
逆側の曲げ力が加わることになり、摺動体には、圧縮応
力が加わることはあっても引っ張り応力が加わることは
なく破損を防止することができた。According to the first and second reference examples , the contact diameter of the spring for bringing the moving body into pressure contact with the elastic body is made larger than the outer diameter of the sliding body, so that the moving body is not affected by the pressure. , Compared to the case where the contact diameter of the spring is smaller than the outer diameter of the sliding body,
Since the bending force on the opposite side was applied, the sliding member was not subjected to tensile stress even though it was subjected to compressive stress, and could be prevented from being damaged.
【0033】また、第2の実施の形態における摺動体を
移動体本体に圧入嵌合することを前提例に適用してもよ
い。Further, the sliding body in the second embodiment may be press-fitted into the moving body to be applied as a premise example .
【0034】[0034]
【発明の効果】請求項1、2に係る発明によれば、あら
かじめセラミックス製の摺動体に、圧縮応力を加えた状
態で接合することにより、たとえ移動体との接合面に引
っ張り応力が加わった場合でも、セラミックス製の摺動
体は圧縮力が解消されるだけで少なくとも破損の原因と
なる引っ張り力が多大に加わることを防止した。According to the first and second aspects of the present invention, tensile stress is applied to the joint surface with the moving body by joining the ceramic slide body in advance with compressive stress applied. Even in such a case, the ceramic sliding body only prevents the compressive force from being removed, and at least prevents a large amount of tensile force that causes damage.
【図1】本発明の前提となる技術を示す前提例の振動波
モーターの主要部断面図FIG. 1 is a cross-sectional view of a main part of a vibration wave motor according to a premise example showing a technique that is a premise of the present invention.
【図2】前提例の基本原理を説明する図FIG. 2 is a diagram illustrating the basic principle of a premise example .
【図3】前提例の基本原理を説明する図FIG. 3 is a diagram illustrating the basic principle of a premise example .
【図4】第1の実施の形態の移動体を形成する接合治具
の断面図FIG. 4 is a cross-sectional view of a joining jig that forms the moving body according to the first embodiment.
【図5】第2の実施の形態の振動波モータの主要部断面
図FIG. 5 is a cross-sectional view of main parts of a vibration wave motor according to a second embodiment.
【図6】第1参考例の振動波モータの主要部断面図FIG. 6 is a sectional view of a main part of a vibration wave motor according to a first reference example .
【図7】第2参考例の振動波モータの主要部断面図FIG. 7 is a sectional view of a main part of a vibration wave motor according to a second reference example .
【図8】従来の振動波モーターの主要部断面図FIG. 8 is a sectional view of a main part of a conventional vibration wave motor.
【図9】従来の振動波モーターの問題点説明のための図FIG. 9 is a diagram for explaining problems of a conventional vibration wave motor.
1…弾性体 2…圧電素子 3…移動体 3a…移動体本体 4…セラミックス部材 5…中心軸 6…加圧用板バネ6 7…ハウジング 8,9…ベアリング 10…押工環 11…固定部材 12…ネジ 21…振動子 31…接合ベース 32…接合ネジ 33…ボールプランジャー 34…接着剤 35…移動体受皿 36…セラミック接合治具 1 ... Elastic body 2 ... Piezoelectric element 3 ... Mobile 3a ... Mobile body 4 ... Ceramics member 5 ... central axis 6 ... leaf spring 6 for pressing 7 ... Housing 8, 9 ... Bearing 10 ... Push ring 11 ... Fixing member 12 ... screw 21 ... Transducer 31 ... Bonding base 32 ... Joint screw 33 ... Ball Plunger 34 ... Adhesive 35 ... Moving body saucer 36 ... Ceramic joining jig
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平2−261075(JP,A) 特開 平1−144368(JP,A) 特開 平1−110068(JP,A) 実開 昭63−202193(JP,U) (58)調査した分野(Int.Cl.7,DB名) H02N 2/00 ─────────────────────────────────────────────────── ─── Continuation of the front page (56) Reference JP-A-2-261075 (JP, A) JP-A-1-144368 (JP, A) JP-A-1-110068 (JP, A) Actual development Sho-63- 202193 (JP, U) (58) Fields investigated (Int.Cl. 7 , DB name) H02N 2/00
Claims (2)
接触体本体に前記弾性体との接触部分にセラミック製の
摺動体を接合し、加圧手段を介して前記弾性体に加圧接
触する接触体とを有し、前記弾性体と前記接触体とを前
記駆動振動により相対移動させる振動波駆動装置におい
て、前記摺動材はあらかじめ径方向に圧縮した状態で接
触体本体に接合したことを特徴とする振動波駆動装置。1. A vibrator for forming drive vibration in an elastic body,
And a contact body which is formed by joining a ceramic sliding body to a contact portion of the contact body with the elastic body and which makes pressure contact with the elastic body via a pressure means. The elastic body and the contact body In the vibration wave driving device which relatively moves the sliding member by the driving vibration, the sliding member is bonded to the contact body in a state of being compressed in the radial direction in advance.
部を圧嵌合するためのインロー部が形成されていること
を特徴とする請求項1に記載の振動波駆動装置。Wherein the contact body is a vibration wave driving device according to claim 1, characterized in that the spigot part for press fit engagement with the outer peripheral portion of the sliding body is formed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33819696A JP3517537B2 (en) | 1996-12-18 | 1996-12-18 | Vibration wave drive |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP33819696A JP3517537B2 (en) | 1996-12-18 | 1996-12-18 | Vibration wave drive |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10178791A JPH10178791A (en) | 1998-06-30 |
| JP3517537B2 true JP3517537B2 (en) | 2004-04-12 |
Family
ID=18315840
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP33819696A Expired - Fee Related JP3517537B2 (en) | 1996-12-18 | 1996-12-18 | Vibration wave drive |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3517537B2 (en) |
-
1996
- 1996-12-18 JP JP33819696A patent/JP3517537B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH10178791A (en) | 1998-06-30 |
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