JP3525815B2 - Metal resistance trimming device - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a metal resistance trimming device for partially cutting a plate-shaped metal resistor to adjust the resistance value of the metal resistor.

[0002]

2. Description of the Related Art A metal resistor is a plate-shaped resistor made of metal and having a resistance value of about 5 mΩ to 1 Ω. It is used to detect the remaining battery level of portable personal computers, electronic devices, etc., and electric components of automobiles. It is used for current detection. In recent years, with the progress of higher precision and lower power consumption in the detection of the battery remaining amount and the current detection of automobile electrical components, there is an increasing demand for higher precision and lower resistance value of the metal resistor. Conventionally, metal resistors are manufactured by press working or etching, but these working methods have a limit in accuracy, and it is impossible to further improve the resistance value.

On the other hand, a thick film resistor which is a printed resistor formed on a printed circuit board or the like and a thin film resistor which is formed on a semiconductor substrate by sputtering or vapor deposition have conventionally been adjusted in resistance value by using a laser trimming device. Has been done. Therefore, it is conceivable to adjust the resistance value of the metal resistor with such a laser trimming device with high accuracy, but it is easy to cut the thick film resistor and the thin film resistor, and the average output is 5 W. The cutting process can be performed with a laser output of about 10 W. However, a metal resistor requires a stronger laser output, and it is impossible to adjust the resistance value using a conventional laser trimming device.

A laser cutting machine for cutting various metal plates has been conventionally used, but this kind of cutting machine is intended only for cutting a material, and therefore has a resistance measuring function. Cannot be used to adjust resistance.

In view of such circumstances, the present inventor, in the application of Japanese Patent Application No. 10-279242, cuts a metal resistor using a high output pulse pump laser device and a resistance value measuring means. Has proposed a metal resistance trimming device to do. The details of the metal resistor cutting portion in this device are shown in FIG.

As shown in FIG. 7, the metal resistor 14 which is the object to be machined is supported by a metal work receiving jig 70, and a laser beam for cutting is supplied from the upper nozzle 20 together with the compressed air to the laser beam for cutting. The resistor 14 is irradiated and cutting processing is performed. The generated cutting dust 71 of the metal resistor 14 is blown away by compressed air.

At such a cut portion, the metal resistor 1
When the processed cutting hole 72 in 4 is already clear, the shape of the work receiving jig 70 has not been devised and the interval between the metal resistor 14 and the work receiving jig 70 is narrow. The compressed air leaking air 73 leaking from the cut hole 72 which has already been cut flows right beside, and the metal resistor 1
There is a problem that the cutting dust 71 of No. 4 is blown off laterally, and as a result, the cutting dust 71 adheres to the back surface of the metal resistor 14. Furthermore, when the work receiving jig 70 is made of metal,
There is also a problem that the cutting waste 71 adheres to the work receiving jig 70, which easily causes clogging.

[0008]

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to adjust the resistance value of a metal resistor having a high accuracy and a low resistance value, and to cause adverse effects such as cutting dust adhesion and clogging of the metal resistor. Not to provide a metal resistance trimming device.

[0009]

In order to achieve the above object, the present invention provides a metal resistance trimming device for partially cutting a plate-shaped metal resistor to adjust the resistance value of the metal resistor. A pulsed excitation laser device, an emission optical unit that irradiates the metal resistor to focus the laser light generated by the pulsed excitation laser device to cut the metal resistor, and the laser light by the emission optical unit. Irradiation position setting means for setting an irradiation position, measuring means for measuring a resistance value of the metal resistor during cutting, and prevention of adhesion of cutting dust of the metal resistor due to cutting at a portion supporting the metal resistor. And a means for preventing adherence of cutting residue.

When the resistance value of the metal resistor is adjusted by the metal resistance trimming device of the present invention, the metal resistor is arranged close to the emitting optical section, and the laser beam on the metal resistor is irradiated by the irradiation position setting means. Set the irradiation position. Then, each time the laser light is irradiated, the irradiation position setting means moves the irradiation position at a constant pitch, and gradually cuts in a direction traversing the metal resistor, for example. Further, the resistance value of the metal resistor is measured by the measuring means every time the laser light is irradiated once. This is repeated, and the adjustment work is ended when the target resistance value is reached.

Further, the cutting dust adhesion preventing means provided in the portion for supporting the metal resistor can prevent the adhesion and clogging of the cutting dust of the metal resistor caused by the cutting.

[0012]

BEST MODE FOR CARRYING OUT THE INVENTION Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a block diagram showing an example of a metal resistance trimming device according to the present invention, FIG. 2 is a block diagram showing the essential parts of the metal resistance trimming device of FIG. 1 in detail, and FIG. 3 is a metal resistance trimming device of FIG. FIG. 4 is a plan view of the metal resistor showing a cut state of the metal resistor by the device, FIG. 4 shows a cut state of the metal resistor at the first processing position by the metal resistance trimming device of FIG. 1, and FIG. , (B) is a plan view of the metal resistor, FIG. 5 shows a cut state of the metal resistor at the second processing position by the metal resistance trimming device of FIG. 1, (a) is a sectional view of the cut portion, and (b) is FIG. 6 is a plan view of the metal resistor, and FIG. 6 is a cross-sectional view showing a state of cutting dust at the second processing position in FIG.

As shown in FIGS. 1 and 2, the metal resistance trimming device 1 of the present embodiment is a plate-shaped device that focuses a pulse pump laser device 2 and laser light generated by the pulse pump laser device 2. The emitting optical section 4 for irradiating the metal resistor 14 of the above, the irradiation position setting means 6 for setting the irradiation position of the laser beam by the emitting optical section 4, and the measuring means 8 for measuring the resistance value of the metal resistor 14 being cut. And a cutting dust adhesion preventing means 10 for preventing the cutting dust from adhering to the metal resistor 14 due to cutting at the portion supporting the metal resistor 14.

As the pulse pump laser device 2, a device having an average laser output of more than 10 W, preferably an average laser output of about 50 W is used.

As shown in FIG. 2, the emitting optical section 4 is constructed by disposing a reflecting mirror 12 inside the cylindrical body 11 and an objective lens 16 facing the cut portion of the metal resistor 14. . The laser light generated by the pulse-pumped laser device 2 is guided into the cylindrical body 11 by the optical fiber 18, reflected by the reflecting mirror 12, and emitted from the emitting optical unit 4 through the objective lens 16.

A nozzle 20 having an inverted conical outer shape is attached to the tip of the emission optical section 4, and the inside of the nozzle 20 is
Compressed air 23 is supplied by compressed air supply means including a tube 22 and a compressor (not shown). The tip of the nozzle 20 is arranged close to the cut portion of the metal resistor 14, and the laser beam 24 is emitted toward the metal resistor 14 through the opening at the tip of the nozzle 20.

As shown in FIG. 1, the irradiation position setting means 6 includes an X stage 26 and a Y stage 28 to which the emission optical section 4 is attached, and the X stage 26 is a motor 30.
And the driver 32 drives in the first direction (X-axis direction) in a substantially horizontal plane to move the emission optical unit 4 in the first direction, and the Y stage 28 causes the motor 30 and the driver 32 to move. Is driven in a second direction (Y-axis direction) substantially orthogonal to the first direction in a substantially horizontal plane to move the emission optical unit 4 in the second direction.

The metal resistor 14 is, as shown in FIG.
The nozzle is supported by a support table 38 arranged near the tip of the nozzle 20, and is placed on the work receiving jig 61 at the first processing position and on the work receiving jig 62 at the second processing position. , And is transported by the transport unit 36 from the first processing position to the second processing position. As shown in FIG. 1, a supply unit 37 and a storage unit 39 are arranged on both sides of the transport unit 36. The supply unit 37 moves the pre-adjustment metal resistor 14 from the vicinity of the side of the emission optical unit 4 to the laser irradiation position below the emission optical unit 4, while the storage unit 39 moves the adjusted metal resistor 14 after the adjustment process. The body 14 is moved from the laser irradiation position below the emission optical unit 4 to the vicinity of the side of the emission optical unit 4 and held.

As shown in FIGS. 5 and 6, in the work receiving jig 62 at the second processing position, the corner 63 of the surface in contact with the metal resistor 14 is obliquely cut. Further, both the work receiving jig 61 and the work receiving jig 62 are made of a synthetic resin material such as acrylic. The work receiving jig 61 and the work receiving jig 62 function as the cutting dust adhesion preventing means 10.

The metal resistance trimming device 1 also serves as a measuring means 8 for measuring the resistance value of the metal resistor 14 at the second processing position, and a pair of the metal resistor 14 and the metal resistor 14 are brought into contact with each other across the cut portion. Current probe 40 of
And a pair of voltage probes 42 which are in contact with the metal resistor 14 with the cut portion of the metal resistor 14 interposed therebetween.
A maximum of 1 A is applied to the metal resistor 14 via the current probe 40.
A constant current source 44 for flowing a constant current is provided, and a preamplifier 46 that is arranged close to the voltage probe 42 and amplifies the voltage from the voltage probe 42. The input part of the preamplifier 46 is composed of a differential amplifier in order to increase the SN ratio.

The current probe 40 and the voltage probe 42 are held by the probe up-and-down mechanism 48 in a substantially vertical state with the tip end up, and the probe up-and-down mechanism 48 moves up and down to move up and down. Then, by moving upward, the tip of each probe comes into contact with the back surface of the metal resistor 14 through the through hole 50 formed in the support base 38. Further, in the present embodiment, the voltage probe 42 is arranged inside, and the current probe 40 is arranged outside the voltage probe 42 and closer to both ends of the metal resistor 14.

The measuring section 52 in the measuring means 8 includes a main amplifier 54 for amplifying the output voltage of the preamplifier 46 and an A / D converter 56 (FIG. 2) for digitizing the output voltage of the preamplifier 46 amplified by the main amplifier 54. ) Is included.

The controller 58 is the A / D of the measuring section 52.
The resistance value of the metal resistor 14 is calculated based on the magnitude of the value represented by the digital signal output from the converter 56, and the driver 32 of the irradiation position setting means 6 is controlled by the calculated resistance value to control the metal resistor 14. The irradiation position of the upper laser beam 24 is moved.

The controller 58 also controls ON / OFF of the generation of the laser beam 24 by the pulsed pump laser device 2, further controls the operations of the transport section 36, the supply section 37 and the storage section 39, and the constant current source. The on / off of the current supply from 44 is controlled.

Next, the operation of the metal resistance trimming device 1 thus constructed will be described.

In the processed state of this embodiment, as shown in FIGS. 4 and 5, the metal resistor 14 is subjected to five serpentine cuts. First, the emitting optical unit 4 is moved from the outer side to the inner side of the metal resistor 14 in the order of A → B on the work receiving jig 61 at the first processing position to cut. Next, the metal resistor 14 is transported by the transport unit 36, and the emitting optical unit 4 is moved from the outer side to the inner side of the metal resistor 14 in the order of C → D → E on the work receiving jig 62 at the second processing position. Disconnect. A, B, C, D do not measure the resistance value,
Cut at a predetermined size, and the last E cuts to a target resistance value while measuring the resistance value. In this example, the cutting width is 90 μm and the cutting pitch is 250 μm.

First, the metal resistor 14 is supplied to the first processing position by the supply part 37 and the transfer part 36. The supplied metal resistor 14 is placed on the support base 38 and the work receiving jig 61, and is cut by the laser light 24 emitted from the emission optical unit 4 in the order of A → B as shown in FIG. . next,
The metal resistor 14 cut at the first processing position is transferred to the transport unit 36.
Are conveyed to the second processing position, placed on the support table 38 and the work receiving jig 62, and supplied onto the four probes. Similarly, at the second processing position, cutting is performed in the order of C → D → E as shown in FIG.

More specifically, the controller 58 issues an instruction to the transport section 36 and the supply section 37 to cause the metal resistor 1 to
4 is placed in the first processing position, and the metal resistor 14 is fixed by the pressing member 60 having an appropriate weight. Next, controller 5
The irradiation position setting means 6 is controlled by 8 to control the emission optical unit 4
Is moved to set the irradiation position of the laser light 24 on the metal resistor 14 to the cutting start position of the edge of the metal resistor 14. In this state, the controller 58 controls the pulsed laser device 4 to generate the laser light 24. Further, at the same time, the compressed air 23 is supplied into the nozzle 20 by the compressed air supply means, and the compressed air 23 is ejected from the tip of the nozzle 20 toward the cut portion of the metal resistor 14 as shown in FIG. At the first processing position, the work receiving jig 61 supports the compressed air 23 from the nozzle 20 so that the metal resistor 14 is not deformed.

The laser light generated by the pulse excitation laser device 2 enters the emitting optical section 4 through the optical fiber 18, is reflected by the reflecting mirror 12, is then focused by the objective lens 16, and passes through the opening at the tip of the nozzle 20 to cause metal resistance. The body 14 is irradiated. As a result, the laser light irradiation portion on the metal resistor 14 is melted to form a minute through hole, and at this time, the cutting waste 64 generated by the melting of the metal resistor 14 is generated.
Is blown away by the compressed air 23 ejected from the tip of the nozzle 20.

Thereafter, the irradiation position setting means 6 is controlled by the controller 58 to move the irradiation position of the laser light 24 by a predetermined pitch in the direction traversing the metal resistor 14, and the laser light 24 is moved in the same manner as described above. To form a through hole in the metal resistor 14. The controller 58 performs such operation when the irradiation position of the laser beam 24 is the metal resistor 1
Repeat until the specified distance from the edge of 4.

As described above, the cutting of A → B with respect to the metal resistor 14 shown in FIG. 4 is completed at the first processing position. Next, the metal resistor 14 conveyed to the second processing position
Then, the cutting of C → D → E shown in FIG. 5 is performed. Second
The laser light irradiation and the operation of the controller 58 at the processing position are the same as the operations at the first processing position described above. However, at the last cutting of the E portion, the cutting is performed while measuring the resistance value as described later.

At the time of cutting at the second processing position, the function of preventing the adhesion of cutting dust as shown in FIG. 6 is performed. That is, as shown in FIGS. 5 and 6, the point is that the corner portion 63 of the surface of the workpiece receiving jig 62 that is in contact with the metal resistor 14 is obliquely cut. Due to the cutting of A → B at the first processing position, the cutting hole 65 is already present in the metal resistor 14 as shown in FIG. When the cutting is performed at the second processing position, the leak air 66 from the existing cutting hole 65 should flow right beside, but the leak air 66 is not formed along the diagonally cut corner 63 of the workpiece receiving jig 62. As a result, the phenomenon that the cutting dust 64 adheres to the back surface of the metal resistor 14 due to the influence of the leaked air 66 can be prevented.

Further, the work receiving jig 62 and the work receiving jig 61 at the first processing position are made of a synthetic resin material such as acryl, which is hard to adhere metal, and are compared with the metal work receiving jig. It is difficult for cutting dust to adhere,
In addition, it is possible to reduce clogging caused by adhesion of cutting waste. In the work receiving jig 61 at the first processing position, since there is no existing cutting hole in the metal resistor 14, diagonal cutting of the corner is not necessary.

FIG. 3 shows a state in which the irradiation position of the laser beam 24 on the metal resistor 14 moves by the cutting operation as described above. The irradiation spot 67 gradually moves from the edge portion 68 of the metal resistor 14 in the direction crossing the metal resistor 14 (arrow F) each time the laser light 24 is irradiated. The pitch when moving the irradiation position for each irradiation is smaller than the diameter of the irradiation spot 67, so that the metal resistor 14 is cut into a slit shape.

The controller 58 performs such cutting by changing the position of the metal resistor 14 in the longitudinal direction and changing the edge portion. As a result, as shown in FIGS. 4B and 5B, the metal resistor 14 has the cut portions A, B, C, D, and E in this order at the first processing position and the second processing position. It is formed. In the second processing position, the controller 58
The probe up-and-down mechanism 48 is controlled to be raised together with each probe, and the tip ends of the current probe 40 and the voltage probe 42 are brought into contact with the back surface of the metal resistor 14.

Then, the controller 58 cuts at the final cutting portion E while measuring the resistance value. That is, when forming the cut portion E at the second processing position, the controller 58 measures the resistance value of the metal resistor 14 by the four-terminal method every time the laser beam is irradiated. Therefore, the controller 58 turns on the constant current source 44, and in the present embodiment, as an example, causes a current of 1 A to flow through the metal resistor 14 through the current probe 40. At this time, the voltage generated between the two voltage probes 42 is amplified by the preamplifier 46 and then supplied to the measuring unit 52. In the measuring unit 52, the main amplifier 54 further amplifies this voltage, and the A / D converter. 56 digitizes the amplified voltage.

The controller 58 divides the voltage between the voltage probes represented by the digital signal by 1 A to obtain the metal resistor 14.
Get the resistance value of. The resistance value of the metal resistor 14 is, for example, 5 m.
It has a low resistance value of about Ω to 1 Ω, and if the generated voltage between the probes is 10 mV, the resistance value is 10 mΩ.
Becomes

When the calculated resistance value is smaller than the target resistance value, the controller 58 sets the irradiation position of the laser beam 24 to 1 in the direction of cutting the metal resistor 14 further deeply (arrow F in FIG. 3). Move only the pitch. Then, a laser beam is generated from the pulse excitation laser device 2, the metal resistor 14 is irradiated with the laser beam, and then the resistance value is measured again.

The controller 58 follows the procedure of such laser light irradiation → resistance value measurement → irradiation position movement.
Repeat until the resistance value of 4 reaches the target value. Then, when the target resistance value is reached, the cutting of the metal resistor 14 due to the irradiation of the laser beam 24 is completed, and the storage unit 39 is controlled to move the metal resistor 14 below the emitting optical unit 4 to the side. One metal resistor 14 is stored in the storage portion 39.
The resistance value adjustment work is completed.

As described above, in the metal resistance trimming device 1 of the present embodiment, the resistance value of the metal resistor 14 can be adjusted, which is impossible with the conventional trimming device, and the metal resistor 14 can be adjusted. It is possible to prevent adhesion of cutting waste and clogging on the back surface.

In particular, in order to prevent cutting dust from adhering, the compressed air, which is supposed to flow right beside, is guided obliquely downward by a simple device of obliquely cutting the corners of the workpiece receiving jig which is in contact with the metal resistor 14. The phenomenon that the cutting dust adheres to the back surface of the metal resistor 14 is prevented, and further, the cutting dust is prevented from adhering by using a synthetic resin material such as acrylic for the work receiving jig.

Further, the voltage detected by the voltage probe 42 is as small as 5 mV if the resistance value of the metal resistor 14 is 5 mΩ. In this embodiment, this voltage is close to the probe. Immediately amplifies by the preamplifier 46 whose input section is a differential amplifier. Therefore, it is possible to suppress the mixing of noise and measure the voltage with high accuracy, and it is possible to measure the resistance value with high accuracy and adjust the resistance value of the metal resistor 14 with high accuracy.

Further, the size of the moving pitch of the irradiation position of the laser beam 24 can be arbitrarily set by the irradiation position setting means 6. Therefore, the pitch can be set smaller than usual when particularly high accuracy is required, and the pitch can be set relatively large when importance is attached to the working time, so that the working time can be shortened.

Incidentally, the above-mentioned cutting residue adhesion preventing means is
In this embodiment, the case where the present invention is applied to the metal resistance trimming device is illustrated, but the present invention is not limited to this.
It goes without saying that the similar cutting residue adhesion preventing means may be applied to another laser processing apparatus.

[0046]

As described above, in the metal resistance trimming device of the present invention, the resistance value of the metal resistor can be adjusted with high precision and fineness, which is impossible with the conventional trimming device. There is an effect that cutting of a kimono can be performed.

In particular, in order to prevent the adhesion of cutting dust, by compressing the corners of the work receiving jig obliquely and using a synthetic resin material such as acrylic for the work receiving jig, compression for blowing off the cutting dust is carried out. It is possible to prevent the adhesion of cutting debris due to the influence of the air flow, and also to prevent clogging due to the adhesion of cutting debris.

The voltage detected by the voltage probe is
For example, if the resistance value of the metal resistor is 5 mΩ, then 5
Although very small as mV, in the present invention, this voltage is immediately amplified by the preamplifier arranged close to the probe. Therefore, it is possible to suppress the mixing of noise and measure the voltage with high accuracy, and it is possible to measure the resistance value with high accuracy and adjust the resistance value of the metal resistor with high accuracy.

Furthermore, the size of the moving pitch of the irradiation position of the laser beam can be arbitrarily set by the irradiation position setting means. Therefore, the pitch can be set smaller than usual when particularly high accuracy is required, and the pitch can be set relatively large when importance is attached to the working time, so that the working time can be shortened.

[Brief description of drawings]

FIG. 1 is a configuration diagram showing an example of a metal resistance trimming device according to the present invention.

FIG. 2 is a main part configuration diagram showing in detail a main part of the metal resistance trimming device of FIG.

3 is a plan view of the metal resistor showing a cut state of the metal resistor by the metal resistance trimming device of FIG. 1. FIG.

4A and 4B are sectional views of the cut portion and FIG. 4B is a plan view of the metal resistor, showing a cut state of the metal resistor at the first processing position by the metal resistance trimming device of FIG.

5A and 5B are sectional views of the cut portion and FIG. 5B is a plan view of the metal resistor, showing a cut state of the metal resistor at the second processing position by the metal resistance trimming device of FIG.

FIG. 6 is a cross-sectional view showing a state of cutting dust at a second processing position in FIG.

FIG. 7 is a sectional view showing a state of a metal resistor cutting portion in a conventional metal resistance trimming device.

[Explanation of symbols]

1 Metal resistance trimming device 2 pulse excitation laser device 4 Output optics 6 Irradiation position setting means 8 Measuring means 10 Cutting residue adhesion prevention means 11 cylinder 12 Reflector 14 Metal resistor 16 Objective lens 18 optical fiber 20 nozzles 22 tubes 23 Compressed air 24 laser light 26 X stage 28 Y stage 30 motor 32 drivers 34, 35 drive means 36 Conveyor 37 Supply Department 38 Support 39 Storage 40 current probe 42 Voltage probe 44 constant current source 46 preamplifier 48 Probe up / down mechanism 50 through holes 52 Measuring unit 54 Main amplifier 56 A / D converter 58 controller 60 hold down 61,62 Work jig 63 corners 64,71 cutting residue 65,72 Cutting hole 66,73 leaked air 67 irradiation spots 68 Edge 70 Workpiece receiving jig

─────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-4-167991 (JP, A) JP-A 61-26201 (JP, A) JP-A 9-108880 (JP, A) JP-A 62- 203693 (JP, A) JP 61-210966 (JP, A) JP 4-190993 (JP, A) JP 59-203965 (JP, A) JP 63-172969 (JP, A) Unexamined Japanese Patent Publication No. 10-328878 (JP, A) Actually opened 64-20993 (JP, U) Actually opened 60-171683 (JP, U) Special table 10-513314 (JP, A) (58) Fields investigated (Int.Cl. ⁷ , DB name) H01C 17/242

Claims (2)

(57) [Claims] 1. A plate-shaped metal resistor is partially cut before
A metal resistance trimming device that adjusts the resistance value of the metal resistor.
And a pulsed excitation laser device, and the pulsed excitation
The metal light is focused by focusing the laser light generated by the laser device.
Emitting optical unit that irradiates the metal resistor to cut off the antibody
And setting the irradiation position of the laser beam by the emission optical unit.
The irradiation position setting means for setting, and the metal resistor being cut.
A measuring means for measuring the resistance value and a support for the metal resistor.
At the part where the metal resistor is cut by cutting.
It is equipped with cutting residue adhesion prevention means for preventing adhesion,
The cutting dust adhesion prevention means is provided directly below the emission optical section.
A workpiece receiving jig for supporting the metal resistor,
Inclining the corner of the surface of the workpiece receiving jig that contacts the metal resistor.
Metal resistance Trimine characterized by being cut for
Device. 2. The work receiving jig is resistant to metal adhesion.
Characterized by being made of synthetic resin material such as acrylic
The metal resistance trimming device according to claim 1.