Deprecated: The each() function is deprecated. This message will be suppressed on further calls in /home/zhenxiangba/zhenxiangba.com/public_html/phproxy-improved-master/index.php on line 456
JP3526738B2 - Mounting device and mounting method for spherical solder - Google Patents
[go: Go Back, main page]

JP3526738B2 - Mounting device and mounting method for spherical solder - Google Patents

Mounting device and mounting method for spherical solder

Info

Publication number
JP3526738B2
JP3526738B2 JP03791198A JP3791198A JP3526738B2 JP 3526738 B2 JP3526738 B2 JP 3526738B2 JP 03791198 A JP03791198 A JP 03791198A JP 3791198 A JP3791198 A JP 3791198A JP 3526738 B2 JP3526738 B2 JP 3526738B2
Authority
JP
Japan
Prior art keywords
suction
spherical solder
head
suction head
spherical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP03791198A
Other languages
Japanese (ja)
Other versions
JPH11224917A (en
Inventor
信一 埜本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Senju Metal Industry Co Ltd
Original Assignee
Senju Metal Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Senju Metal Industry Co Ltd filed Critical Senju Metal Industry Co Ltd
Priority to JP03791198A priority Critical patent/JP3526738B2/en
Publication of JPH11224917A publication Critical patent/JPH11224917A/en
Application granted granted Critical
Publication of JP3526738B2 publication Critical patent/JP3526738B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistors
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3465Application of solder
    • H05K3/3478Application of solder preforms; Transferring prefabricated solder patterns

Landscapes

  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Wire Bonding (AREA)

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、球状はんだ、特に
微細な球状はんだを電子部品に搭載する方法および装置
に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and apparatus for mounting spherical solder, particularly fine spherical solder, on electronic parts.

【0002】[0002]

【従来の技術】近時、電子機器が軽薄短小となってきて
いることから、電子機器に使用される電子部品も小型で
多機能化されてきている。電子部品を多機能化するため
には、部品内部に多数のICを組み込み、このICから
多数のリードを引き出さなければならないことから、外
部にはできるだけ多数のリードの設置が必要となる。こ
の多機能化された電子部品としては、QFP、SOIC
のようなものがあり、これらの電子部品は部品本体の両
側面、或いは四側面に多数のリードを設置してある。し
かしながら、QFPやSOIC等は本体の側面にリード
を設置するものであるため、設置数に限りがあり、如何
にリード間隔を狭くしてもリードの設置数は精々200
本程度であった。
2. Description of the Related Art In recent years, electronic devices have become lighter, thinner, shorter and smaller, so that electronic components used in electronic devices have become smaller and more multifunctional. In order to make an electronic component multi-functional, it is necessary to incorporate a large number of ICs inside the component and pull out a large number of leads from the ICs. Therefore, it is necessary to install a large number of leads outside. QFP, SOIC
These electronic components have a large number of leads on both sides or four sides of the component body. However, since QFP, SOIC, etc., have leads installed on the side surface of the main body, the number of leads is limited, and no matter how narrow the lead interval is, the number of leads installed is at most 200.
It was about a book.

【0003】そこで今日では、QFPやSOICよりも
リードを多くしてさらに多機能化したBGA(Ball
Grid Array)、CSP(Chip Siz
ePackage)、フリップチップ等という高機能電
子部品が出現している。BGAやCSPは基板の上面に
チップ素子が搭載され、基板の裏面に該チップ素子と接
続した点状のリードが格子状位置に設置されたものであ
る。またフリップチップはICの裏面に直接点状のリー
ドが設置されたものである。BGA、CSP、フリップ
チップ等の高機能電子部品は広面積の部分に点状のリー
ドを設置するようにしたため、リードを多数設置するこ
とができ、それだけ機能的に優れたものとなっている。
Therefore, today, the BGA (Ball), which has more leads than QFP and SOIC and is more multifunctional, is used.
Grid Array), CSP (Chip Siz)
High-performance electronic components such as ePackage) and flip chips have appeared. In BGA and CSP, a chip element is mounted on the upper surface of a substrate, and dot-shaped leads connected to the chip element are provided on the back surface of the substrate at lattice positions. In the flip chip, dot-shaped leads are directly provided on the back surface of the IC. Since high-performance electronic components such as BGA, CSP, and flip-chip are provided with dot-shaped leads on a wide area, a large number of leads can be installed, and the function is excellent accordingly.

【0004】この高機能電子部品をプリント基板に実装
するには、高機能電子部品のリードに予めはんだバンプ
を形成しておき、該バンプをプリント基板のマウントに
合わせて載置した後、はんだバンプを溶融させてはんだ
付けする。そのはんだバンプの形成方法は、高機能電子
部品の点状リードにフラックスを塗布し、その上に球状
はんだを載置してからリフロー炉のような加熱装置で加
熱して球状はんだを溶融させる。
In order to mount this high-performance electronic component on a printed circuit board, solder bumps are formed in advance on the leads of the high-performance electronic component, the bumps are placed in accordance with the mount of the printed circuit board, and then the solder bumps are mounted. Melt and solder. To form the solder bumps, flux is applied to the dot-shaped leads of the high-performance electronic component, the spherical solder is placed on the spot-shaped leads, and then heated by a heating device such as a reflow furnace to melt the spherical solder.

【0005】高機能電子部品への球状はんだの搭載は、
多数の吸着孔が穿設された吸着ヘッドを吸着孔が下向き
となるようにしておき、多数の球状はんだを入れた収納
容器に該吸着ヘッドを近付ける。そして吸着ヘッドをバ
キューム状態、即ち吸着孔から吸い込む状態にしておい
て収納容器内の球状はんだを吸着ヘッドの吸着孔に吸着
させる。
The mounting of spherical solder on high-performance electronic parts is
The suction head having a large number of suction holes is set so that the suction holes face downward, and the suction head is brought close to a storage container containing a large number of spherical solder. Then, the suction head is in a vacuum state, that is, in a state where it is sucked from the suction hole, and the spherical solder in the storage container is sucked into the suction hole of the suction head.

【0006】このとき吸着ヘッドをバキューム状態にし
ておいただけでは全ての吸着孔に球状はんだが接触する
とは限らないため、単に吸着ヘッドを収納容器内の球状
はんだに近付けても全ての吸着孔に球状はんだを吸着さ
せることはできない。そこで吸着ヘッドを収納容器に近
付けてから、収納容器の底面から気体を吹き出させて球
状はんだを浮き上がらせ、浮き上がった球状はんだを吸
着ヘッドの吸着孔に吸着させたり(浮遊法:特開平7−
307340号)、収納容器を振動させてランダムに移
動する球状はんだを吸着孔に吸着させたり(振動法:特
開平7−302796号)、吸着ヘッドを収納容器に嵌
合させた後に吸着ヘッドと収納容器を一定角度回転させ
て球状はんだを吸着ヘッドの吸着孔の面で転がすことに
より球状はんだを吸着孔に吸着させたり(回転法:特開
平8−255997号)するものであった。
At this time, if the suction head is kept in a vacuum state, the spherical solder does not necessarily come into contact with all the suction holes. Therefore, even if the suction head is brought close to the spherical solder in the storage container, all the suction holes will be spherical. It cannot absorb solder. Therefore, after the suction head is brought close to the storage container, gas is blown out from the bottom surface of the storage container to lift up the spherical solder, and the lifted spherical solder is adsorbed in the suction hole of the suction head (floating method: JP-A-7-
No. 307340), the storage container is vibrated and the randomly moving spherical solder is adsorbed to the adsorption holes (vibration method: JP-A-7-307296), or the adsorption head is accommodated with the adsorption head after fitting the adsorption head into the accommodation container. The container is rotated by a certain angle to roll the spherical solder on the surface of the suction hole of the suction head so that the spherical solder is sucked into the suction hole (rotating method: JP-A-8-255997).

【0007】一般にBGAに使用される球状はんだの多
くは0.76mm径が主流であり、またBGAでも少し小
型のものでは0.5mm径の球状はんだを用いていること
もある。しかしながら、CSPとなると、球状はんだは
0.3mm径以下、特に最近の超小型のCSPやフリップ
チップでは0.15mm径という非常に微小となった球状
はんだが使用されるようになってきている。
Generally, most of the spherical solders used for BGA have a diameter of 0.76 mm, and for BGAs of a slightly small size, 0.5 mm diameter spherical solder may be used. However, when it comes to CSPs, spherical solders having a diameter of 0.3 mm or less, particularly very small CSPs and flip chips of recent years, which have a very small diameter of 0.15 mm, have come to be used.

【0008】[0008]

【発明が解決しようとする課題】BGAで使用される
0.76mm径の球状はんだは、浮遊法、振動法、回転法
等で吸着ヘッドに吸着させた後、収納容器と吸着ヘッド
を離したときに、吸着孔以外の箇所に付着していた球状
はんだは自重で収納容器内に落下し、ほとんどが吸着孔
以外の吸着ヘッドには付着しない。しかしながらCSP
やフリップチップに使用するような0.3mm径以下の球
状はんだは、吸着ヘッドに吸着させた後、収納容器と離
すと、吸着孔以外の箇所に付着したままとなることがあ
った。
When the spherical solder having a diameter of 0.76 mm used in the BGA is adsorbed to the adsorption head by the floating method, the vibration method, the rotation method, etc., and then the storage container and the adsorption head are separated from each other. In addition, the spherical solder adhered to places other than the suction holes falls into the storage container by its own weight, and most of them do not adhere to the suction heads other than the suction holes. However CSP
Spherical solder having a diameter of 0.3 mm or less, which is used for flip chips or the like, may remain attached to a portion other than the adsorption hole when it is adsorbed by the adsorption head and then separated from the storage container.

【0009】この原因は、微小な球状はんだが気体で浮
遊させられたり、振動や回転で移動させられたりしたと
きに、球状はんだ同士や球状はんだと収納容器の壁面と
で擦られて静電気を帯びるからであり、この静電気で球
状はんだが吸着ヘッドの吸着孔以外の不要な箇所(以
下、単に不要箇所という)に付着することになる。
The cause of this is that when minute spherical solder is suspended in a gas or moved by vibration or rotation, the spherical solder is rubbed with each other or between the spherical solder and the wall surface of the storage container to be charged with static electricity. Because of this static electricity, the spherical solder adheres to unnecessary portions (hereinafter simply referred to as unnecessary portions) other than the suction holes of the suction head.

【0010】このように不要箇所に付着したままでCS
Pやフリップチップに球状はんだを搭載すると、球状は
んだが過剰搭載となってしまい、搭載後リフロー炉で加
熱して球状はんだを溶融させたときに、一つのバンプ形
成箇所に二つの球状はんだが融合して過大なバンプとな
ってしまったり、或は隣接したバンプ同士が一体となっ
てブリッジを形成したりするという不良を発生させてし
まう。
As described above, the CS is attached to the unnecessary portion.
When spherical solder is mounted on P or flip chip, the spherical solder becomes excessively mounted, and when the spherical solder is melted by heating in a reflow furnace after mounting, two spherical solders are fused at one bump formation location. As a result, defects such as excessive bumps or adjacent bumps forming a bridge with each other may occur.

【0011】本発明は、静電気で不要箇所に付着した球
状はんだだけを完全に除去して過剰搭載を決して起こさ
ないという球状はんだの搭載方法および装置を提供する
ことにある。
It is an object of the present invention to provide a method and apparatus for mounting spherical solder in which only the spherical solder adhered to an unnecessary portion due to static electricity is completely removed and over-mounting never occurs.

【0012】[0012]

【課題を解決するための手段】静電気で吸着ヘッドの不
要箇所に付着した微小な球状はんだを除去する手段とし
ては、ブラシで吸着ヘッドを掃引したり、吸着ヘッドに
衝撃を与えたり、或は吸着ヘッドに気体を吹き付けたり
することが考えられる。
[Means for Solving the Problems] As means for removing the minute spherical solder adhering to unnecessary portions of the suction head by static electricity, sweeping the suction head with a brush, giving a shock to the suction head, or sucking the suction head It is conceivable to blow gas to the head.

【0013】ブラシでの掃引手段は、ブラシの毛が強か
ったり、毛先が吸着ヘッドに深く当たったりすると吸着
孔に吸着された必要な球状はんだまで除去してしまうこ
とになる。従って、掃引手段はブラシの毛の選択や吸着
ヘッドへの当たり具合の調整が非常に難しいという問題
がある。
The sweeping means with a brush also removes the necessary spherical solder adsorbed in the adsorption holes when the bristles of the brush are strong or the tips of the brush hit the adsorption head deeply. Therefore, there is a problem that it is very difficult for the sweeping means to select the bristles of the brush and adjust the degree of contact with the suction head.

【0014】吸着ヘッドへの衝撃手段は、或る程度不要
箇所に付着した球状はんだの除去には効果があるもの
の、衝撃の強さや衝撃を与える箇所により除去状態が変
わるため、吸着孔の吸引力、球状はんだの大きさ、球状
はんだの搭載個数等によってそれらを随時変更しなけれ
ばならないという手間がかかるものである。
Although the impacting means to the suction head is effective in removing the spherical solder adhered to the unnecessary portion to some extent, the removal state changes depending on the strength of the impact and the location to which the impact is applied. However, it takes time and effort to change them depending on the size of the spherical solder, the number of mounted spherical solders, and the like.

【0015】気体の吹き付け手段は、球状はんだの大き
さによって吹き出し強さを調節するだけで不要箇所の球
状はんだを除去できるものであり、他の手段に比べて調
整ファクターが少ないため、調整が容易である。しかし
ながら、気体の吹き付け手段は、気体を吹き付けたとき
に不要箇所に付着した球状はんだが飛び散ってしまい、
その回収に手間がかかるものである。
The gas blowing means is capable of removing the spherical solder at an unnecessary portion only by adjusting the blowing strength according to the size of the spherical solder, and the adjustment factor is smaller than that of other means, so that the adjustment is easy. Is. However, the gas spraying means, when the gas is sprayed, the spherical solder adhered to unnecessary portions scatters,
It takes time to collect them.

【0016】そこで本発明者は、気体を吹き付けると球
状はんだは飛び散るが、逆に気体とともに球状はんだを
吸引すれば球状はんだの回収の心配がなく、しかも不要
箇所に付着した球状はんだを完全に除去できることに着
目して本発明を完成させた。
Therefore, the inventor of the present invention scatters the spherical solder when it blows a gas, but on the contrary, if the spherical solder is sucked together with the gas, there is no fear of collecting the spherical solder, and the spherical solder adhered to the unnecessary portion is completely removed. The present invention has been completed by focusing on the fact that it can be done.

【0017】本発明は、吸着ヘッドの吸着孔に吸着させ
た球状はんだを電子部品の所定の位置に搭載する球状は
んだの搭載方法において、吸着ヘッドの吸着孔に球状は
んだを吸着させた後、吸引ノズルで気体を吸引すること
により、吸着孔以外の箇所に付着している不必要な球状
はんだを吸引ノズル内に吸引することを特徴とする球状
はんだの搭載方法であり、また多数の吸着孔が穿設され
た吸着ヘッドが設置されており、該吸着ヘッドと対向す
る位置には吸着孔の端部から端部までの長さよりも長い
吸引口を有する吸引ノズルが設置されているとともに、
吸引ノズルまたは吸着ヘッドが対向位置において平行に
移動可能となっていることを特徴とする球状はんだの搭
載装置である。
According to the present invention, in a method of mounting a spherical solder in which a spherical solder sucked in a suction hole of a suction head is mounted at a predetermined position of an electronic component, after sucking the spherical solder in the suction hole of the suction head, suction is performed. By sucking gas with the nozzle, it is a mounting method of spherical solder, which is characterized by sucking unnecessary spherical solder adhering to places other than the suction holes into the suction nozzle, and also a large number of suction holes. A perforated suction head is provided, and a suction nozzle having a suction port longer than the length from one end to the other end of the suction hole is provided at a position facing the suction head.
The spherical solder mounting apparatus is characterized in that a suction nozzle or a suction head is movable in parallel at opposed positions.

【0018】[0018]

【発明の実施の形態】本発明では、不要箇所に付着した
球状はんだの除去を気体とともに吸引するだけでも行え
るものであるが、吸着ヘッドへの衝撃手段を併用する
と、さらに除去が確実に行えるようになる。これは一箇
所に大量に球状はんだが付着した場合、球状はんだの重
量が重くなるため吸引力が充分でないと全ての球状はん
だを一度に吸い込めなくなることが懸念されるからであ
る。そのため、吸着ヘッドに衝撃を与えて、この大量に
付着した球状はんだを吸着ヘッドへの衝撃で予め除去し
ておき、その後に吸引ノズルを近付けて不要箇所に付着
した球状はんだを除去するようにすると必要な球状はん
だを残して不要箇所に付着した球状はんだだけを除去で
きる。
BEST MODE FOR CARRYING OUT THE INVENTION According to the present invention, the spherical solder adhered to an unnecessary portion can be removed only by sucking it together with the gas. However, if the impacting means for the suction head is also used, the removal can be performed more reliably. become. This is because when a large amount of spherical solder adheres to one place, the weight of the spherical solder becomes heavy, and if the suction force is not sufficient, it is feared that all the spherical solder cannot be sucked at once. Therefore, if you give a shock to the suction head and remove the large amount of spherical solder that has adhered in advance by the shock to the suction head, then move the suction nozzle closer to remove the spherical solder that has adhered to unnecessary points. It is possible to remove the necessary spherical solder and remove only the spherical solder attached to unnecessary portions.

【0019】前述のように、0.76mm径のBGA用球
状はんだは、不要箇所に付着した場合、ほとんどが自重
で落下するが、0.76mm径の球状はんだでも静電気の
帯電量が多くて自重で落下しないようなものに対しても
本発明は対応できる。しかしながら、静電気の帯電で不
要箇所に付着しやすいのは0.3mm以下の球状はんだが
多く、本発明は、この0.3mm径以下の球状はんだに対
して最も優れた効果を発揮するものである。
As described above, most of the 0.76 mm diameter spherical solder for BGA drops by its own weight when it adheres to an unnecessary portion, but even the 0.76 mm diameter spherical solder has a large amount of static electricity and its own weight. The present invention can also be applied to a device that does not fall. However, spherical solder having a diameter of 0.3 mm or less is likely to be attached to an unnecessary portion due to electrostatic charging, and the present invention exhibits the most excellent effect on the spherical solder having a diameter of 0.3 mm or less. .

【0020】本発明では、吸着ヘッドが下向きでも上向
きでもよく、また吸着ヘッドを固定して吸引ノズルを移
動させたり、或いは吸引ノズルを固定して吸着ヘッドを
移動させたりしてもよい。吸着ヘッドと吸引ノズルの間
隔は、なるべく近い方がよいが、少なくとも球状はんだ
の直径以上は離れていなければならない。なぜならば、
この間隔が球状はんだの直径よりも小さいと、吸引ノズ
ルまたは吸着ヘッドを移動させたときに、吸引ノズルが
吸着孔に付着した球状はんだを掻き落としてしまうから
である。しかしながら、吸着ヘッドと吸引ノズルの間隔
があまりにも離れ過ぎていると、吸着ヘッドに対する吸
引ノズルの吸引力が弱くなり、不要箇所に付着した球状
はんだを吸い込むことができなくなる。吸着ヘッドと吸
引ノズルの好適な間隔は、球状はんだの直径の略二倍で
ある。
In the present invention, the suction head may face downward or upward, and the suction head may be fixed to move the suction nozzle, or the suction nozzle may be fixed to move the suction head. The distance between the suction head and the suction nozzle should be as close as possible, but they must be separated by at least the diameter of the spherical solder. because,
This is because if the distance is smaller than the diameter of the spherical solder, the suction nozzle scrapes off the spherical solder attached to the suction holes when the suction nozzle or the suction head is moved. However, if the distance between the suction head and the suction nozzle is too large, the suction force of the suction nozzle with respect to the suction head becomes weak, and it becomes impossible to suck the spherical solder attached to the unnecessary portion. A suitable distance between the suction head and the suction nozzle is approximately twice the diameter of the spherical solder.

【0021】[0021]

【実施例】以下、図面に基づいて本発明を説明する。図
1は本発明の球状はんだの搭載装置の斜視図、図2は同
正面断面図である。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below with reference to the drawings. FIG. 1 is a perspective view of a spherical solder mounting apparatus of the present invention, and FIG. 2 is a front sectional view of the same.

【0022】吸着ヘッド1は、内部が空洞となった箱状
である。吸着ヘッド1の側面には内部と通じた吸引プラ
グ2が設置されており、該吸引プラグは図示しない吸引
装置と接続されている。また吸着ヘッド1の下部は電子
部品のバンプ形成箇所と一致した箇所に複数の吸着孔3
・・・が穿設された吸着面4となっている。吸着ヘッド
1の上部には透明な強化ガラス5が内部を密封した状態
で嵌め込まれている、上部を透明な強化ガラスにしたの
は、吸着孔での球状はんだの吸着状態を検知するためで
ある。即ち、球状はんだを吸着孔で吸着した後、吸着ヘ
ッドの上方からレーザー光やハロゲン光を照射し、吸着
ヘッドの下方に設置された受光装置でその光を受光す
る。このとき吸着孔の一つにでも球状はんだが吸着され
ていない場合は、その吸着孔を光が通過して下方の受光
装置が受光する。そして、その未吸着を警報で知らせた
り、或は再度吸着工程を行わせたりする。
The suction head 1 has a box shape with a hollow inside. A suction plug 2 communicating with the inside is installed on the side surface of the suction head 1, and the suction plug is connected to a suction device (not shown). Further, the lower part of the suction head 1 is provided with a plurality of suction holes 3 at a position corresponding to a bump forming position of the electronic component.
.. are the adsorbing surfaces 4 on which holes are formed. A transparent tempered glass 5 is fitted in the upper portion of the suction head 1 in a hermetically sealed state. The reason why the upper portion is made of transparent tempered glass is to detect the suction state of the spherical solder in the suction holes. . That is, after the spherical solder is adsorbed by the adsorption holes, laser light or halogen light is emitted from above the adsorption head, and the light is received by the light receiving device installed below the adsorption head. At this time, if the spherical solder is not adsorbed even in one of the adsorption holes, light passes through the adsorption hole and is received by the light receiving device below. Then, the non-adsorption is notified by an alarm, or the adsorption step is performed again.

【0023】吸引ノズル6は、内部が空洞で、略中央に
網7が張設されていて内部が上段部8と下段部9に二分
割されている。網7の目の大きさは、搭載に使用する球
状はんだよりも小さく、球状はんだを通過させないよう
になっている。吸引ノズル6の上部には横長の吸引口1
0が形成されており、その長手方向の長さは前述吸着ヘ
ッドに穿設された吸着孔の端部から端部までの長さより
も長くなっている。
The suction nozzle 6 has a hollow inside, and a net 7 is stretched at substantially the center thereof, and the inside is divided into an upper step portion 8 and a lower step portion 9. The mesh size of the mesh 7 is smaller than that of the spherical solder used for mounting, so that the spherical solder does not pass through. A horizontally long suction port 1 is provided above the suction nozzle 6.
0 is formed, and its length in the longitudinal direction is longer than the length from the end to the end of the suction hole formed in the suction head.

【0024】吸着ノズル6の下段部9には外部に通じた
吸引プラグ11が設置されており、該吸引プラグは図示
しない吸引装置に接続されている。吸引ノズル6は吸引
口10を上向きにして吸着ヘッド1の下部に離間して設
置されており、矢印A方向に平行移動するようになって
いる。
A suction plug 11 communicating with the outside is installed in the lower portion 9 of the suction nozzle 6, and the suction plug is connected to a suction device (not shown). The suction nozzle 6 is installed at a lower portion of the suction head 1 with the suction port 10 facing upward, and is spaced apart from the suction head 1 so as to move in parallel in the direction of arrow A.

【0025】なお実施例では吸着孔が下側となった固定
の吸着ヘッドの下方で吸引ノズルを移動させるようにし
たもので示したが、吸引ノズルを固定し、吸着ヘッドを
移動させてもよいし、また吸着孔を上側にして吸引口を
下向きにした吸引ノズルを吸着ヘッドの上に設置しても
よい。
In the embodiment, the suction nozzle is moved below the fixed suction head with the suction hole on the lower side, but the suction nozzle may be fixed and the suction head may be moved. Alternatively, a suction nozzle with the suction hole facing upward and the suction port facing downward may be installed on the suction head.

【0026】また吸着ヘッド1には衝撃装置12が設置
されている。衝撃装置12は矢印X方向に上下動して吸
着ヘッドに衝撃を与えるものである。
An impact device 12 is installed on the suction head 1. The impact device 12 moves up and down in the arrow X direction to impact the suction head.

【0027】次に上記球状はんだの搭載装置を用いた球
状はんだの搭載方法について説明する。
Next, a method of mounting spherical solder using the above-described spherical solder mounting apparatus will be described.

【0028】図示しない浮遊法、振動法、回転法等を採
用した装置を用いて吸着ヘッド1の吸着面4に球状はん
だQを吸着させる。このとき静電気を帯びた球状はんだ
Hは吸着面4の不要箇所に付着している。吸着面4に球
状はんだを吸着させた後、先ず衝撃装置12で吸着ヘッ
ドに衝撃を与え、不要箇所に大量に付着した球状はんだ
を除去しておく。このとき吸着ヘッドへの衝撃だけでは
不要箇所に付着した全ての球状はんだが除去されない。
The spherical solder Q is sucked onto the suction surface 4 of the suction head 1 by using a device (not shown) that employs a floating method, a vibration method, a rotation method, or the like. At this time, the spherical solder H charged with static electricity is attached to an unnecessary portion of the adsorption surface 4. After the spherical solder is sucked onto the suction surface 4, first, the shock head is shocked by the shock device 12 to remove a large amount of the spherical solder adhered to unnecessary portions. At this time, only the impact on the suction head does not remove all the spherical solder adhered to the unnecessary portions.

【0029】その後、吸引ノズル6を矢印Aのように吸
着ヘッド1の下方で移動させる。この吸引ノズル6では
吸入プラグ11から図示しない吸引装置で吸引されてお
り、内部が負圧となっていて、吸引口10から外部の気
体を吸引している。
Thereafter, the suction nozzle 6 is moved below the suction head 1 as shown by arrow A. The suction nozzle 6 is sucked from a suction plug 11 by a suction device (not shown), has a negative pressure inside, and sucks external gas from the suction port 10.

【0030】吸着面4の不要箇所に付着した球状はんだ
は、静電気で付着しているため、付着力は弱く、吸着面
から少し離れて設置されている吸引ノズルからの吸引力
で吸い込まれるが、吸着孔3に吸着された球状はんだは
吸引ノズルの吸引力ぐらいでは吸い込まれない。それ
故、吸着面の不要箇所に付着した球状はんだが完全に吸
引ノズルに吸い込まれ、吸着孔に吸着された球状はんだ
だけが残るようになる。
Since the spherical solder adhered to the unnecessary portion of the adsorption surface 4 is electrostatically adhered, the adhesion force is weak, and it is sucked by the suction force from the suction nozzle installed a little away from the suction surface. The spherical solder sucked by the suction holes 3 is not sucked by the suction force of the suction nozzle. Therefore, the spherical solder adhered to the unnecessary portion of the suction surface is completely sucked into the suction nozzle, and only the spherical solder sucked in the suction holes remains.

【0031】吸引ノズルに吸い込まれた球状はんだは、
網7で止められ、上段部8に残る。吸着ヘッドの不要箇
所に付着した球状はんだの除去が終了したならば、吸引
ノズルでの吸引を止め、吸引ノズルを反転して上段部8
に残っていた球状はんだを回収して再度搭載に使用す
る。
The spherical solder sucked into the suction nozzle is
It is stopped by the net 7 and remains on the upper stage 8. When the removal of the spherical solder adhered to the unnecessary portion of the suction head is completed, the suction nozzle stops the suction, and the suction nozzle is reversed to turn the upper part 8
Collect the remaining spherical solder and use it again for mounting.

【0032】このようにして不要箇所に付着した球状は
んだが除去された吸着ヘッドは上方から図示しない発光
装置で光を照射する。吸着ヘッドの上方から照射された
光は、吸着ヘッド1の透明な強化ガラス5を通過し、上
方から各吸着孔3に侵入する。このとき吸着孔に球状は
んだが吸着されていないところでは、光が吸着孔を通過
し、下方に設置された図示しない受光装置に到達する。
光を受けた受光装置では、吸着ヘッドに未吸着のあるこ
とを検知し、警報を出したり、或は再度吸着工程をやり
直したりする指令を出す。
In this way, the suction head from which the spherical solder attached to the unnecessary portions is removed is irradiated with light from above by a light emitting device (not shown). The light emitted from above the suction head passes through the transparent tempered glass 5 of the suction head 1 and enters each suction hole 3 from above. At this time, where the spherical solder is not adsorbed in the adsorption holes, light passes through the adsorption holes and reaches a light receiving device (not shown) installed below.
Upon receiving the light, the light receiving device detects that the suction head has not been sucked, and issues an alarm or issues a command to restart the suction process again.

【0033】不要箇所に球状はんだの付着がなく、全て
の吸着孔に球状はんだが吸着された吸着ヘッドは、図示
しない電子部品に移動し、フラックスが塗布された電子
部品のバンプ形成箇所に球状はんだを搭載する。そして
球状はんだが搭載された電子部品はリフロー炉のような
加熱装置で加熱され、球状はんだが溶融してバンプを形
成する。
The suction head in which the spherical solder is not attached to unnecessary portions and the spherical solder is adsorbed in all the adsorption holes moves to an electronic component (not shown), and the spherical solder is applied to the bump forming portion of the electronic component to which the flux is applied. Equipped with. The electronic component on which the spherical solder is mounted is heated by a heating device such as a reflow furnace, and the spherical solder is melted to form bumps.

【0034】本発明では、0.15mm径の球状はんだを
225個のバンプ形成箇所を有するCSPに対して搭載
を行ったところ、球状はんだの過剰搭載や未搭載が皆無
であった。
In the present invention, when the spherical solder having a diameter of 0.15 mm was mounted on the CSP having 225 bump formation points, there was no excessive mounting or non-mounting of the spherical solder.

【0035】[0035]

【発明の効果】以上説明したように、本発明によれば、
静電気で容易に吸着面に付着する微小な球状はんだを不
要箇所から完全に除去することができるため、過剰搭載
による過大なバンプやブリッジ等の不良がなくなり、信
頼ある接合ができるという従来の搭載方法や装置では得
られない優れた効果を奏するものである。
As described above, according to the present invention,
Since the minute spherical solder that easily adheres to the adsorption surface due to static electricity can be completely removed from unnecessary locations, excessive bumps, bridges, and other defects do not occur, and reliable mounting is possible. And an excellent effect that cannot be obtained with the device.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の球状はんだの搭載装置の斜視図FIG. 1 is a perspective view of an apparatus for mounting spherical solder according to the present invention.

【図2】本発明の球状はんだの搭載装置の正面図FIG. 2 is a front view of an apparatus for mounting spherical solder according to the present invention.

【符号の説明】[Explanation of symbols]

1 吸着ヘッド 2 吸引プラグ 3 吸着孔 4 吸着面 5 強化ガラス 6 吸引ノズル 7 網 8 上段部 9 下段部 10 吸引口 11 吸引プラグ 12 衝撃装置 1 Suction head 2 suction plug 3 adsorption holes 4 Adsorption surface 5 tempered glass 6 suction nozzle 7 net 8 Upper part 9 Lower part 10 Suction port 11 Suction plug 12 Impact device

───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7,DB名) H01L 23/12 501 B23K 3/06 H01L 21/60 H05K 3/34 505 ─────────────────────────────────────────────────── ─── Continuation of front page (58) Fields surveyed (Int.Cl. 7 , DB name) H01L 23/12 501 B23K 3/06 H01L 21/60 H05K 3/34 505

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】吸着ヘッドの吸着孔に吸着させた球状はん
だを電子部品の所定の位置に搭載する球状はんだの搭載
装置において、多数の吸着孔が穿設され、かつ衝撃装置
を備えた吸着ヘッドが設置されており、該吸着ヘッドと
対向する位置には吸着孔の端部から端部までの長さより
も長い吸引口を有する吸引ノズルが設置されているとと
もに、吸引ノズルまたは吸着ヘッドが対向位置において
平行に移動可能となっていることを特徴とする球状はん
だの搭載装置。
1. A spherical solder mounting apparatus for mounting spherical solder sucked in a suction hole of a suction head at a predetermined position of an electronic component, the suction head having a large number of suction holes and an impact device. Is installed, and a suction nozzle having a suction port longer than the length from end to end of the suction hole is installed at a position facing the suction head, and the suction nozzle or the suction head is at a facing position. The spherical solder mounting device is characterized in that it can move in parallel.
【請求項2】 請求項1に記載の吸着ヘッドの吸着孔に
吸着させた球状はんだを電子部品の所定の位置に搭載す
る球状はんだの搭載装置を用いた球状はんだの搭載方法
において、吸着ヘッドの吸着孔に球状はんだを吸着させ
た後、吸着ヘッドに衝撃を与えてから吸引ノズルで気体
を吸引することにより、吸着孔以外の箇所に付着してい
る不必要な球状はんだを吸引ノズル内に吸引することを
特徴とする球状はんだの搭載方法。
2. The suction hole of the suction head according to claim 1.
Mount the attracted spherical solder at a predetermined position on the electronic component.
Spherical solder mounting method using a spherical solder mounting device, wherein after sucking the spherical solder in the suction hole of the suction head, the suction head is impacted and then the gas is sucked by the suction nozzle. The method for mounting spherical solder according to claim 1, wherein unnecessary spherical solder adhered to a portion other than the suction holes is sucked into the suction nozzle.
JP03791198A 1998-02-05 1998-02-05 Mounting device and mounting method for spherical solder Expired - Lifetime JP3526738B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP03791198A JP3526738B2 (en) 1998-02-05 1998-02-05 Mounting device and mounting method for spherical solder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP03791198A JP3526738B2 (en) 1998-02-05 1998-02-05 Mounting device and mounting method for spherical solder

Publications (2)

Publication Number Publication Date
JPH11224917A JPH11224917A (en) 1999-08-17
JP3526738B2 true JP3526738B2 (en) 2004-05-17

Family

ID=12510742

Family Applications (1)

Application Number Title Priority Date Filing Date
JP03791198A Expired - Lifetime JP3526738B2 (en) 1998-02-05 1998-02-05 Mounting device and mounting method for spherical solder

Country Status (1)

Country Link
JP (1) JP3526738B2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3981498B2 (en) * 1998-04-24 2007-09-26 新日本製鐵株式会社 Ball transfer method and apparatus
US7285486B2 (en) 2001-01-12 2007-10-23 Nippon Steel Materials Co., Ltd. Ball transferring method and apparatus
KR20010070629A (en) * 2001-05-28 2001-07-27 김건규 Device For Supplying The Solder Having Solder Needle Pin
KR100720409B1 (en) * 2001-07-04 2007-05-22 앰코 테크놀로지 코리아 주식회사 Solder ball bumping device
JP2003045907A (en) * 2001-07-27 2003-02-14 Tdk Corp Manufacturing method and manufacturing device for electronic components
JP2010021445A (en) * 2008-07-11 2010-01-28 Nippon Steel Materials Co Ltd Micro-ball removal method and removal device, and micro-ball batch mounting method and batch mounting device
JP5297268B2 (en) * 2009-05-29 2013-09-25 アスリートFa株式会社 How to arrange fine particles
CN111958082A (en) * 2020-08-20 2020-11-20 山东航天电子技术研究所 Small component fixing operation device

Also Published As

Publication number Publication date
JPH11224917A (en) 1999-08-17

Similar Documents

Publication Publication Date Title
US6595408B1 (en) Method of attaching solder balls to BGA package utilizing a tool to pick and dip the solder ball in flux prior to placement
US4871110A (en) Method and apparatus for aligning solder balls
JP3526738B2 (en) Mounting device and mounting method for spherical solder
JP3125138B2 (en) Spherical solder mounting equipment
JP3981498B2 (en) Ball transfer method and apparatus
JP2926308B2 (en) Solder ball supply method
JP3376875B2 (en) Apparatus and method for transferring conductive balls
JP3937264B2 (en) Method and apparatus for mounting spherical solder
JP3251893B2 (en) Ball transfer device
US7829451B2 (en) Conductive ball mounting method and apparatus having a movable solder ball container
US7285486B2 (en) Ball transferring method and apparatus
JP3475744B2 (en) Apparatus and method for transferring conductive balls
JP2560904B2 (en) Foreign matter removal method for semiconductor device
JP2013506311A (en) Place station for pick and place machines
KR101202999B1 (en) Method for Reballing
JP3132301B2 (en) Solder ball mounting device and mounting method
JP4974818B2 (en) Substrate manufacturing method and substrate manufacturing apparatus
JP2973889B2 (en) Apparatus and method for mounting conductive ball
JP4357580B2 (en) Conductive ball mounting method and apparatus
JP2002151536A (en) Method and apparatus for mounting fine metal spheres
JPH10242630A (en) Method of loading solder ball, and its device
JP3164109B2 (en) Solder ball mounting device and mounting method
JP3397123B2 (en) Apparatus and method for transferring conductive balls
JP3211803B2 (en) Extra ball detection method
JP3185779B2 (en) Mounting method of conductive ball

Legal Events

Date Code Title Description
A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20031126

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20040122

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20040217

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20040217

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090227

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090227

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100227

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100227

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100227

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110227

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110227

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120227

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120227

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120227

Year of fee payment: 8

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130227

Year of fee payment: 9

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130227

Year of fee payment: 9

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140227

Year of fee payment: 10

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term