JP3529239B2 - High temperature valve - Google Patents
High temperature valveInfo
- Publication number
- JP3529239B2 JP3529239B2 JP09782497A JP9782497A JP3529239B2 JP 3529239 B2 JP3529239 B2 JP 3529239B2 JP 09782497 A JP09782497 A JP 09782497A JP 9782497 A JP9782497 A JP 9782497A JP 3529239 B2 JP3529239 B2 JP 3529239B2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- inner cylinder
- valve box
- bellows
- shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Details Of Valves (AREA)
Description
【発明の詳細な説明】
【０００１】
【発明の属する技術分野】本発明は、高温の流体に対し
て使用される高温用弁に関する。
【０００２】
【従来の技術】従来の高温用弁として、たとえば図２に
示すような、二重管構造を有するものがある。この弁で
は、弁箱１と内筒２とを、それぞれに突設した突起部１
ａ，２ａをボルトナット止めすることにより一体化し、
内筒２の内側に弁体３を配設しており、弁軸４を操作し
て弁体３を弁軸４の軸心回りに回転させることにより、
内部流路５を開閉するようにしている。
【０００３】
【発明が解決しようとする課題】しかしながら、上記し
たような内外二重構造の高温用弁では、図示したよう
に、弁軸４を挿通した内筒２の軸穴２ｂから内部ガスＧ
が微少量リークする恐れがあり、そのような場合、内部
ガスＧ中にダストが含まれていると弁軸４の周囲部分に
エロージョンを起こす危険性がある。
【０００４】内部ガスＧのリークを防止するために、図
３に示したように、軸穴２ｂを閉塞するパッキン６を設
ける構造が考えられるが、９００℃程度あるいはそれよ
り高温の酸化雰囲気中で使用可能なパッキンは現在のと
ころ見い出せない。
【０００５】本発明は上記問題を解決するもので、弁軸
周囲からの内部ガスのリークを防止することができ、ダ
ストによるエロージョンや弁の作動不良を防止できる高
温用弁を提供することを目的とするものである。
【０００６】
【課題を解決するための手段】上記問題を解決するため
に、本発明の高温用弁は、弁箱の内部に内筒を遊嵌し、
内筒の内側に形成される内部流路を開閉する弁体を固定
した弁軸を、弁箱と内筒のそれぞれに貫設した軸穴に挿
通し、弁箱ボス内の軸受で支承した高温用弁において、
前記弁軸周囲の弁箱と内筒との間隙を閉塞する筒状のベ
ローズの一端開口部が弁箱の軸穴に連通するとともに他
端開口部が内筒の軸穴に連通するように、前記ベローズ
の一端が弁箱に固定して設けられるとともに他端が内筒
に固定して設けられ、前記弁箱ボスにおけるグランドパ
ッキンより弁箱軸穴寄りの位置にガス供給口を貫設し、
このガス供給口に、ベローズの内部へ向けてパージガス
を供給し、ベローズを固定した内筒の軸穴を通じて内部
流路内へ噴出させるガス供給手段を接続し、前記ベロー
ズの内部に、弁箱の軸穴から供給されたパージガスを内
筒の軸穴へ噴出させる流路が形成されているものであ
る。
【０００７】上記構成によれば、ベローズを固定した内
筒の軸穴を通じて内部流路内へパージガスが噴出するの
で、弁体上流側の内部ガスがベローズ内へ流入すること
はほぼ阻止されるとともに、弁軸周囲の弁箱と内筒との
間隙はベローズによって閉塞されているので、少量の内
部ガスがベローズ内部へ流入した時も弁箱と内筒との間
隙へ流入することはなく、弁体上流側の内部ガスの下流
側へのリーク量は低減され、内部ガス中に含まれるダス
ト等による弁軸周囲部材のエロージョンや弁の作動不良
等も防止される。このとき、熱膨張差または収縮差によ
って弁箱と内筒との距離が変化してもそれに応じてベロ
ーズが伸縮するので、上記した作用は、内部ガスの温度
に係わらず維持される。
【０００８】
【発明の実施の形態】以下、本発明の一実施形態を図面
に基づいて説明する。図１に示した高温用弁は、図２を
用いて説明した従来のものとほぼ同様に構成されてお
り、弁箱１と内筒２とが、弁箱１の内周面と内筒２の外
周面にそれぞれ突設された突起部１ａ，２ａをボルトナ
ット止めすることにより一体化されており、内筒２の内
側に形成される内部流路５を開閉する弁体３が弁軸４に
固定して設けられている。内筒２の内周面には、弁体３
の外周縁部が圧接する環状の弁箱シート（図示せず）が
設けられている。
【０００９】弁箱１の軸心方向中央部には軸穴１ｂが貫
設されるとともに筒状の弁箱ボス７が設けられており、
軸穴１ｂに対向する内筒２の中央部には軸穴２ｂが貫設
されており、弁軸４は、軸穴２ｂ，軸穴１ｂ，弁箱ボス
７の内部に挿通され、弁箱ボス７内の軸受８において支
承されている。９はグランドパッキンである。
【００１０】弁箱１，内筒２間の弁軸４の周囲には筒状
のベローズ１０が配置されている。ベローズ１０の一端
は軸穴１ｂに嵌入した環状の取付具１１によって固定さ
れており、ベローズ１０の他端は軸穴２ｂの周囲に配設
された環状の取付具１２によって固定されている。
【００１１】弁箱ボス７には、グランドパッキン９より
軸穴１ｂ寄りの位置にガス供給口７ａが貫設されてお
り、このガス供給口７ａに、窒素ガスなどのパージガス
ＰＧを供給するガス供給管１３が接続されている。
【００１２】以下、上記構成における作用を説明する。
内部流路５を開閉する際は、駆動装置などにより弁軸４
を回動させて、弁軸４に固定した弁体３を弁軸４の軸心
回りに回転させ、弁体３の外周縁部を内筒内周面の弁箱
シートに接離させる。
【００１３】一方、ガス供給管１３よりパージガスＰＧ
をガス供給口７ａを通じて弁箱ボス７の内部へ供給し、
弁箱ボス７内よりベローズ１０の内部へ流入させ、内筒
２の軸穴２ｂを通じて内部流路５内へ噴出させる。
【００１４】これにより、噴出するパージガスＰＧによ
って、内部ガスＧがベローズ１０内へ流入することはほ
ぼ阻止されるとともに、弁軸周囲の弁箱１と内筒２との
間隙はベローズ１０によって閉塞されているので、少量
の内部ガスＧがベローズ１０内へ流入した時も弁箱１と
内筒２との間隙を流れることは防止される。これらの結
果、弁体３の上流側の内部ガスＧの下流側へのリーク量
は低減され、また内部ガスＧ中に含まれるダスト等に起
因する弁軸周囲部材のエロージョンや軸受８などにおけ
る作動不良等も防止される。
【００１５】このとき弁箱１と内筒２とに熱膨張差また
は収縮差が生じ、両者間の距離が変化しても、ベローズ
１０がそれに応じて伸縮するので、上記した作用に影響
はない。
【００１６】なお、上記した高温用弁はバタフライ弁で
あるが、同様の構造を有するボール弁なども本発明の範
囲に包含される。制御弁、仕切弁などの用途は問わな
い。弁箱１の取合部の形式や、弁箱１と内筒２との結合
形式などは単なる例示であって、種々の形式を使用でき
る。弁箱１と内筒２との間隙にグラスウール等の断熱材
を配設するなどの変更を加えてもよい。
【００１７】
【発明の効果】以上のように、本発明によれば、弁軸周
囲の弁箱と内筒との間隙を閉塞する筒状のベローズを設
けて、このベローズの内部へ向けてパージガスを供給
し、内部流路内へ噴出させるようにしたことにより、弁
箱と内筒とにおける熱膨張差または収縮差はベローズで
吸収しながら、内部ガスの弁軸周囲の間隙への流入を防
止することができ、下流側へのリーク量を低減できると
ともに、内部ガス中に含まれるダスト等による弁軸周囲
部材のエロージョンや作動不良等を防止できる。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high-temperature valve used for a high-temperature fluid. 2. Description of the Related Art As a conventional high temperature valve, for example, there is a valve having a double pipe structure as shown in FIG. In this valve, a valve box 1 and an inner cylinder 2 are respectively provided with projections 1 projecting therefrom.
a, 2a are integrated by fixing them with bolts and nuts,
The valve body 3 is disposed inside the inner cylinder 2, and by operating the valve shaft 4 to rotate the valve body 3 around the axis of the valve shaft 4,
The internal flow path 5 is opened and closed. [0003] However, in the high-temperature valve having the inner-outer dual structure as described above, as shown in the figure, the internal gas G flows from the shaft hole 2b of the inner cylinder 2 through which the valve shaft 4 is inserted.
May leak in a very small amount. In such a case, if the internal gas G contains dust, there is a danger that erosion will occur in the peripheral portion of the valve shaft 4. In order to prevent the leakage of the internal gas G, a structure in which a packing 6 for closing the shaft hole 2b is provided as shown in FIG. 3 can be considered, but in a oxidizing atmosphere at about 900 ° C. or higher. No usable packing can be found at present. SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object of the present invention is to provide a high-temperature valve capable of preventing leakage of internal gas from around a valve shaft and preventing erosion and malfunction of the valve due to dust. It is assumed that. In order to solve the above problems, a high temperature valve according to the present invention has an inner cylinder loosely fitted inside a valve box,
The valve shaft, which fixes the valve body that opens and closes the internal flow path formed inside the inner cylinder, is inserted into the shaft holes penetrating through the valve box and the inner cylinder, respectively, and the high temperature is supported by the bearing in the valve box boss. In the valve
A cylindrical sleeve that closes a gap between the valve case and the inner cylinder around the valve shaft.
One end opening of the rose communicates with the shaft hole of the valve box,
The bellows so that the end opening communicates with the shaft hole of the inner cylinder.
One end is fixed to the valve box and the other end is an inner cylinder
A gas supply port is provided at a position closer to the valve box shaft hole than the gland packing in the valve box boss,
To the gas supply port, the purge gas supply toward the interior of the bellows connects the gas supply means for ejecting to the internal flow path through the axial bore of the inner cylinder fixing the bellows, the bellows
Purge gas supplied from the shaft hole of the valve box.
A flow path to be ejected to the shaft hole of the cylinder is formed . According to the above construction, the purge gas is jetted into the internal flow passage through the shaft hole of the inner cylinder to which the bellows is fixed, so that the internal gas on the upstream side of the valve body is substantially prevented from flowing into the bellows. Since the gap between the valve box and the inner cylinder around the valve shaft is closed by the bellows, even when a small amount of internal gas flows into the bellows, it does not flow into the gap between the valve box and the inner cylinder. The amount of leakage of the internal gas on the upstream side of the body to the downstream side is reduced, and erosion of the surrounding member of the valve shaft due to dust and the like contained in the internal gas and malfunction of the valve are also prevented. At this time, even if the distance between the valve box and the inner cylinder changes due to the difference in thermal expansion or contraction, the bellows expands and contracts in accordance with the change, so that the above-described operation is maintained regardless of the temperature of the internal gas. An embodiment of the present invention will be described below with reference to the drawings. The high-temperature valve shown in FIG. 1 has substantially the same configuration as the conventional one described with reference to FIG. 2, and the valve box 1 and the inner cylinder 2 are connected to the inner peripheral surface of the valve box 1 and the inner cylinder 2. The projections 1a and 2a projecting from the outer peripheral surface of the inner cylinder 2 are integrated by fastening with bolts and nuts, and a valve body 3 that opens and closes an internal flow path 5 formed inside the inner cylinder 2 is a valve shaft 4. Is fixedly provided. A valve element 3 is provided on the inner peripheral surface of the inner cylinder 2.
Is provided with an annular valve box sheet (not shown) against which the outer peripheral edge of the valve box is pressed. In the center of the valve box 1 in the axial center direction, a shaft hole 1b is formed so as to penetrate therethrough, and a cylindrical valve box boss 7 is provided.
A shaft hole 2b is formed in the center of the inner cylinder 2 facing the shaft hole 1b, and the valve shaft 4 is inserted into the shaft hole 2b, the shaft hole 1b, and the inside of the valve box boss 7, and the valve box boss is formed. It is supported on a bearing 8 in 7. 9 is a gland packing. A cylindrical bellows 10 is disposed around the valve shaft 4 between the valve box 1 and the inner cylinder 2. One end of the bellows 10 is fixed by an annular attachment 11 fitted into the shaft hole 1b, and the other end of the bellows 10 is fixed by an annular attachment 12 arranged around the shaft hole 2b. A gas supply port 7a is formed in the valve box boss 7 at a position closer to the shaft hole 1b than the gland packing 9, and a gas supply port for supplying a purge gas PG such as nitrogen gas to the gas supply port 7a. Tube 13 is connected. The operation of the above configuration will be described below.
When opening and closing the internal flow path 5, the valve shaft 4
Is rotated to rotate the valve body 3 fixed to the valve shaft 4 around the axis of the valve shaft 4 so that the outer peripheral edge of the valve body 3 comes into contact with and separates from the valve box sheet on the inner peripheral surface of the inner cylinder. On the other hand, the purge gas PG
Is supplied to the inside of the valve box boss 7 through the gas supply port 7a,
The fluid flows from the inside of the valve box boss 7 into the bellows 10, and is ejected into the internal flow passage 5 through the shaft hole 2 b of the inner cylinder 2. Thus, the purge gas PG ejected substantially prevents the internal gas G from flowing into the bellows 10, and the gap between the valve box 1 and the inner cylinder 2 around the valve shaft is closed by the bellows 10. Therefore, even when a small amount of the internal gas G flows into the bellows 10, it is prevented from flowing through the gap between the valve box 1 and the inner cylinder 2. As a result, the amount of leakage of the internal gas G on the upstream side of the valve body 3 to the downstream side is reduced, and the erosion of the member around the valve shaft caused by dust and the like contained in the internal gas G and the operation of the bearing 8 and the like. Defects and the like are also prevented. At this time, even if a difference in thermal expansion or contraction occurs between the valve box 1 and the inner cylinder 2 and the distance between the two changes, the bellows 10 expands and contracts accordingly, so that the above-mentioned operation is not affected. . Although the above-mentioned high temperature valve is a butterfly valve, a ball valve having a similar structure is also included in the scope of the present invention. Applications such as control valves and gate valves are not limited. The type of the connection portion of the valve box 1 and the type of connection between the valve box 1 and the inner cylinder 2 are merely examples, and various types can be used. Modifications such as disposing a heat insulating material such as glass wool in the gap between the valve box 1 and the inner cylinder 2 may be added. As described above, according to the present invention, a cylindrical bellows for closing the gap between the valve case and the inner cylinder around the valve shaft is provided, and the purge gas is directed toward the inside of the bellows. To prevent the internal gas from flowing into the gap around the valve shaft, while absorbing the difference in thermal expansion or contraction between the valve box and the inner cylinder by the bellows. Thus, the amount of leakage to the downstream side can be reduced, and erosion and malfunction of the valve shaft peripheral member due to dust and the like contained in the internal gas can be prevented.
【図面の簡単な説明】
【図１】本発明の一実施形態における高温用弁の概略全
体構成を示した断面図である。
【図２】従来の高温用弁の概略全体構成を示した断面図
である。
【図３】図２の高温用弁の弁軸周囲にパッキンを設けた
状態を示した要部断面図である。
【符号の説明】
１ 弁箱
1b 軸穴
２ 内筒
2b 軸穴
３ 弁体
４ 弁軸
５ 内部流路
７ 弁箱ボス
7a ガス供給口
８ 軸受
10 ベローズ
7a ガス供給口
13 ガス供給管
Ｇ 内部ガス
PG パージガスBRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a cross-sectional view showing a schematic overall configuration of a high-temperature valve according to an embodiment of the present invention. FIG. 2 is a cross-sectional view showing a schematic overall configuration of a conventional high-temperature valve. FIG. 3 is a cross-sectional view of a principal part showing a state where packing is provided around a valve shaft of the high temperature valve of FIG. 2; [Description of Signs] 1 Valve box 1b Shaft hole 2 Inner cylinder 2b Shaft hole 3 Valve 4 Valve shaft 5 Internal flow path 7 Valve box boss 7a Gas supply port 8 Bearing 10 Bellows 7a Gas supply port 13 Gas supply pipe G Internal gas PG purge gas
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平９−4732（ＪＰ，Ａ) 特開 平９−60736（ＪＰ，Ａ) 特開 昭56−14676（ＪＰ，Ａ) 特開 平10−288276（ＪＰ，Ａ) 実開 平２−18984（ＪＰ，Ｕ) (58)調査した分野(Int.Cl.7，ＤＢ名) F16K 41/00 ──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-9-4732 (JP, A) JP-A-9-60736 (JP, A) JP-A-56-14676 (JP, A) JP-A-10-108 288276 (JP, A) Hikaru Hei 2-18984 (JP, U) (58) Fields investigated (Int. Cl. 7 , DB name) F16K 41/00
Claims (1)
に形成される内部流路を開閉する弁体を固定した弁軸
を、弁箱と内筒のそれぞれに貫設した軸穴に挿通し、弁
箱ボス内の軸受で支承した高温用弁において、前記弁軸
周囲の弁箱と内筒との間隙を閉塞する筒状のベローズの
一端開口部が弁箱の軸穴に連通するとともに他端開口部
が内筒の軸穴に連通するように、前記ベローズの一端が
弁箱に固定して設けられるとともに他端が内筒に固定し
て設けられ、前記弁箱ボスにおけるグランドパッキンよ
り弁箱軸穴寄りの位置にガス供給口を貫設し、このガス
供給口に、ベローズの内部へ向けてパージガスを供給
し、ベローズを固定した内筒の軸穴を通じて内部流路内
へ噴出させるガス供給手段を接続し、前記ベローズの内
部に、弁箱の軸穴から供給されたパージガスを内筒の軸
穴へ噴出させる流路が形成されていることを特徴とする
高温用弁。(57) [Claim 1] An inner cylinder is loosely fitted in a valve box, and a valve shaft to which a valve body that opens and closes an internal flow path formed inside the inner cylinder is fixed is mounted on a valve shaft. In a high temperature valve which is inserted through a shaft hole penetrating through each of a box and an inner cylinder and supported by a bearing in a valve box boss, the valve shaft
A cylindrical bellows that closes the gap between the surrounding valve box and the inner cylinder
One end opening communicates with the shaft hole of the valve box and the other end opening
So that one end of the bellows communicates with the shaft hole of the inner cylinder.
It is fixed to the valve box and the other end is fixed to the inner cylinder.
A gas supply port is provided at a position closer to the valve box shaft hole than the gland packing in the valve box boss, and a purge gas is supplied to the inside of the bellows through the gas supply port to fix the bellows. Gas supply means for jetting into the internal flow passage through the shaft hole of the cylinder is connected, and the inside of the bellows is connected .
The purge gas supplied from the shaft hole of the valve box is
A high-temperature valve characterized in that a flow path for jetting into a hole is formed .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09782497A JP3529239B2 (en) | 1997-04-16 | 1997-04-16 | High temperature valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP09782497A JP3529239B2 (en) | 1997-04-16 | 1997-04-16 | High temperature valve |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10288276A JPH10288276A (en) | 1998-10-27 |
| JP3529239B2 true JP3529239B2 (en) | 2004-05-24 |
Family
ID=14202484
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP09782497A Expired - Fee Related JP3529239B2 (en) | 1997-04-16 | 1997-04-16 | High temperature valve |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3529239B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6907892B2 (en) | 2001-02-07 | 2005-06-21 | Matsushita Electric Industrial Co., Ltd. | Exhaust apparatus, semiconductor device manufacturing system and method for manufacturing semiconductor device |
| WO2009119919A1 (en) * | 2008-03-28 | 2009-10-01 | Mitsubishi Heavy Industries, Ltd. | Double pipe apparatus |
| KR102096953B1 (en) * | 2013-12-27 | 2020-05-27 | 세메스 주식회사 | Apparatus and Method for treating substrate |
-
1997
- 1997-04-16 JP JP09782497A patent/JP3529239B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH10288276A (en) | 1998-10-27 |
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