JP3530555B2 - Work support device for optical element polishing machine - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a work supporting device of an optical element polishing machine for supporting a work such as a glass lens in the optical element polishing machine. 2. Description of the Related Art Conventionally, an optical element is polished by an apparatus as shown in FIG. In the figure, 1 is a polishing dish, 2 is a lens with the surface to be polished facing downward, 3 is a lens sticking dish, 4 is a kansashi supporting the sticking dish 3 via a kansushi ball 4a so as to be capable of swiveling. In the apparatus, the lens 2 is polished by swinging the screw 4 while rotating the polishing plate 1. However, with this device,
Polishing angle θ (when one point on the outer periphery of the lens 2 is P, the tangent at the point P is PN, and the spherical center of the kansashi sphere 4a is Q, θ
= ∠PQN is called the polishing angle. 7) can be polished stably when sufficiently small, but as shown in FIG. 7, when the curvature of the lens 2 becomes large, the polishing angle θ becomes large, so that the lens 2 is not driven to rotate and cannot be polished. there were. In order to solve such a problem, the present applicant has proposed in Japanese Patent Application Laid-Open No. 63-11486 a work supporting device for an optical element polishing machine capable of freely setting a polishing angle. As shown in FIG. 1, the apparatus includes a first swing member 10 that swings about a first axis X,
A second swing member 20 attached to the first swing member 10 so as to swing about a second axis Y orthogonal to the first axis X; A work support shaft 30 supported by the second swing member 20 so as to rotate about a third axis Z passing through an intersection with the second axis Y, Lens 3 at lower end of shaft 30
5 is fixed and swingably supported. here,
The first axis X and the second axis Y, and the second axis Y and the third axis Z are orthogonal to each other, and the three axes XYZ intersect at a point O (the first axis XYZ). The intersection angle between X and the third axis Z changes depending on the swing angle of the second swing member 20.) This point O is the above-described kansashi sphere 4a in FIG.
Is equivalent to the spherical center Q. According to this apparatus, the polishing angle can be freely set by changing the length of each swing member, and stable polishing with a small polishing angle can be performed. However, in the above-mentioned prior application, a rolling bearing such as a ball bearing is used to support the work supporting shaft with respect to the second swing member. There was such a problem. That is, in the above-described apparatus, the polishing is performed while the lens is driven to rotate by the frictional resistance generated between the lens and the polishing plate. There is a problem that only a large lens can be polished because it disappears. Also,
During polishing, there is also a problem that external vibration is transmitted to the lens via the rolling bearing, or the rolling bearing itself becomes a vibration source, thereby deteriorating the surface accuracy of the polished surface. Furthermore, since a grinding fluid is used for polishing the lens,
There is also a problem that frequent maintenance of the rolling bearing is required. SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and enables a small-diameter lens to be polished by a work supporting structure having a small rotation resistance, and also prevents the generation and transmission of vibrations at a bearing portion to thereby polish the surface. It is an object of the present invention to provide a work supporting device for an optical element polishing machine capable of improving the surface accuracy of a workpiece. [0006] In order to achieve the above object, a work supporting apparatus for an optical element polishing machine according to the present invention comprises:
A first swing member that swings around an axis of
A second swinging member attached to the first swinging member so as to swing about a second axis orthogonal to the axis, and an intersection between the first axis and the second axis in the three-axis workpiece support device of the optical element grinding machine comprising a said workpiece support shaft supported in the second oscillating member so as to rotate around the through, during polishing of a workpiece, the Second swing
So that the member and the work supporting shaft are not in contact with each other,
Discharge fluid between the second swing member and the work support shaft
Compressor, and after the polishing of the work is completed,
A suction port for causing the second swinging member to suck the work support shaft;
And a pump. [0007] That is, the work support of the optical element polishing machine of the present invention.
The holding device is configured to move the second swing member and the work support during polishing of the work.
Make sure that the shaft is in non-contact with the
The fluid is sent out between the second swing member and the work supporting shaft.
After the work is polished, the second work is performed by the suction pump.
The work supporting shaft is sucked by the swing member. First, before describing a specific embodiment of the present invention,
Next, an outline of the present invention will be described. The summary of the present invention is a second one.
An optical system comprising a work supporting shaft supported by a swing member
In the work supporting device of the element polishing machine, the second swing
Hydrostatic bearing for supporting the workpiece support shaft with respect to a member
Was used. In this application, "hydrostatic bearing"
The word floats the shaft in the bearing with the pressure of the fluid supplied from the other.
Not only the general meaning of sliding bearing, which supports
Especially, the space surrounding the work support shaft from the end face to the side face
Supply fluid to the inside of the
The concept includes a structure that integrally supports in the thrust and thrust directions.
Is used. Specifically, as shown in FIG.
Fluid (air or the like) is pumped from the compressor 33 to a small gap between the upper end portion of the work support shaft 30 and the bearing hole 20b of the second swing member 20. In the work supporting device of the optical element polishing machine according to the present invention having the above-described structure, the work supporting shaft 30 is rotatably supported by the second swing member 20 so as to be rotatable by a fluid. An embodiment of a work supporting apparatus for an optical element polishing machine according to the present invention will be described below with reference to the accompanying drawings. FIG. 3 is an exploded perspective view showing the entire work supporting device of the optical element polishing machine. As shown, the apparatus includes a first swing member 10 swinging about a first axis X, and a first swing member 10 swinging about a second axis Y orthogonal to the first axis X. The second swing member 20 attached to the first swing member 10
And a work supporting shaft 30 (supported by the second swing member 20 so as to rotate about a third axis Z passing through the intersection of the first axis X and the second axis Y). FIG. 4). The first oscillating member 10 has a U-shaped yoke as a whole, and has a mounting hole 10a formed in the center and a forked end formed by a cut 10b. Then, a bolt 12, a nut 17, and bearings 13, 15 are attached to a hole 11 a of a stay 11 fixedly mounted on an upper shaft (not shown), and are swingable about the first shaft X. ing. In addition, 14 is a collar and 16 is a seat. The second swinging member 20 is integrally formed in a gate shape as a whole, and has a bearing hole 20b described later in the center of the upper side. The pin hole 10 is inserted into the bifurcated cut 10b of the swinging member,
By inserting a pin 21 through c and 20a, it is mounted to swing about the second axis Y. A cover 22 prevents the pins 21 from falling off.
Is a bolt for screwing into the screw hole 10d of the first swinging member 10 to fix the cover 22. Next, the main parts of this device will be described with reference to FIG. A static pressure bearing for supporting the work support shaft 30 is formed at the center of the upper side of the second swing member 20. Specifically, the bearing hole 20b formed in the lower surface of the upper side of the second swinging member 20 has a work supporting shaft 3 having both an inner diameter and a depth.
The size of the bearing hole 20b is set to be slightly larger than the outer diameter and length of the shaft portion 30a of the first swinging member 20 via the rubber tube 31 through the hole 20c. Connected to the switching valve 32 and selectively connected to one of the compressor 33 and the suction pump 34. Further, the work supporting shaft 30 is formed integrally with the shaft portion 30a and has a brim portion 30b and a lens attaching portion 30c. Here, the first axis X, the second axis Y, and the third axis Z are orthogonal to each other and intersect at a point O.
5 is set so as to be located on a tangent line PN at one point P on the outer periphery of 5, whereby the polishing angle is 0 degree. Next, when using the work supporting device of the optical element polishing machine according to the present embodiment having the above-described configuration, first, a lens 35 serving as a work is attached to a lens attaching portion 30c at the lower end of the work supporting shaft 30, and a polishing plate ( (Not shown). Next, when the switching valve 32 is switched to the compressor 33 side to feed air into the bearing hole 20b, the work supporting shaft 30 is floatingly supported by the second swing member 20 by the pressure of the air, and the two are not in contact with each other. State. In this state, if the polishing plate is rotated to swing the first swinging member 10 and the second swinging member 20, the lens 35 is driven to rotate and polishing is performed. When the polishing is completed, the switching valve 32 is switched to the suction pump 34 side, and the work supporting shaft 3 is rotated.
The lens 35 is removed while the lens 0 is attracted to the second swing member. The present invention is not limited to the above embodiment, and may be implemented as follows, for example. (1) In the above embodiment, the introduction of air into the bearing hole 20b is reduced by one.
Although it was performed only from the individual holes 20c, as shown in FIG.
Air passage 2 reaching the side surface of shaft portion 30a and brim portion 30b
0d may be provided symmetrically (for example, at four places). As described above, if air pressure is directly applied to the side surface of the shaft portion 30a, the shaft portion 30a is less likely to contact the inner periphery of the bearing hole 20b, and the stability of work support can be improved. (2) In the above embodiment, air is used as the fluid to be supplied to the hydrostatic bearing, but a polishing liquid may be used instead. Specifically, instead of the compressor 33,
Connect the grinding fluid delivery pump. Since the grinding fluid has a higher viscosity than air, the possibility that the shaft portion 30a comes into contact with the inner periphery of the bearing hole 20b can be further reduced. As described above, according to the work supporting device of the optical element polishing machine of the present invention, a hydrostatic bearing is used when supporting the work supporting shaft with respect to the second swing member. Therefore, it is possible to support the work with extremely small rotational resistance, and it is possible to polish a small-diameter lens which cannot be polished by the conventional apparatus. Since generation and transmission of vibration at the bearing portion can be prevented, the surface accuracy of the polished surface can be improved. Further, there is an advantage that maintenance is less required than the conventional apparatus.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view schematically showing a work supporting device of an optical element polishing machine to which the present invention is applied. FIG. 2 is a cross-sectional view schematically showing a main part of a work supporting device of the optical element polishing machine of the present invention. FIG. 3 is an exploded perspective view showing the entire work supporting device of the optical element polishing machine according to the embodiment. FIG. 4 is a cross-sectional view illustrating a main part of a work support device of the optical element polishing machine according to the embodiment. FIG. 5 is a cross-sectional view of a main part showing another example of the work supporting device of the optical element polishing machine according to the present invention. FIG. 6 is a view showing a work supporting device of a conventional optical element polishing machine. FIG. 7 is a view for explaining a problem of a conventional work supporting device for an optical element polishing machine. [Description of Signs] 1 Polishing dish 2 Lens 3 Lens sticking dish 4 Kansashi 4a Kansashi ball 10 First swing member 10a Mounting hole 10b Cut 10c Pin hole 10d Screw hole 11 Stay 11a Hole 12 Bolt 13 Bearing 14 Collar 15 Bearing 16 Receiving seat 17 Nut 20 Second swing member 20a Pin hole 20b Bearing hole 20c Hole 21 Pin 22 Cover 23 Bolt 30 Work support shaft 30a Shaft portion 30b Collar portion 30c Lens sticking portion 31 Rubber tube 32 Switching valve 33 Compressor 34 Suction Pump 35 Lens X First axis Y Second axis Z Third axis

Continuation of front page (58) Field surveyed (Int.Cl. ⁷ , DB name) B24B 13/005

Claims (1)

(57) and the first oscillating member oscillates around the Patent Claims 1 first shaft, swings about a second axis perpendicular to said first axis And a second swing member attached to the first swing member, so as to rotate about a third axis passing through an intersection of the first axis and the second axis. In a work support device of an optical element polishing machine having a work support shaft supported by a second swing member, the second swing member and the work support are supported during polishing of the work.
The second swinging member and the front swinging member are moved forward so that the shaft is not in contact with the second swinging member.
Compressor for sending fluid between the work support shaft
And after the polishing of the work is completed, the second swing member
A work supporting device for an optical element polishing machine, comprising: a suction pump for sucking a work supporting shaft .