JP3534065B2 - Three-dimensional shape measuring device, three-dimensional information measuring method and thin film evaluation measuring method - Google Patents
Three-dimensional shape measuring device, three-dimensional information measuring method and thin film evaluation measuring methodInfo
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- JP3534065B2 JP3534065B2 JP2000345436A JP2000345436A JP3534065B2 JP 3534065 B2 JP3534065 B2 JP 3534065B2 JP 2000345436 A JP2000345436 A JP 2000345436A JP 2000345436 A JP2000345436 A JP 2000345436A JP 3534065 B2 JP3534065 B2 JP 3534065B2
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- Prior art keywords
- measuring
- measured
- data
- dimensional
- dimensional shape
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Description
【０００１】[0001]
【発明の属する技術分野】本発明は、物体の３次元形状
を計測する技術に係り、特に３次元形状の簡単な測定を
実現するとともに、ドラム等の円筒体に形成された透明
樹脂膜の膜厚の高精度な測定を実現する３次元形状測定
装置、３次元情報計測方法及び薄膜評価測定方法に関す
る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a technique for measuring a three-dimensional shape of an object, and in particular, realizes a simple measurement of the three-dimensional shape and a transparent resin film formed on a cylindrical body such as a drum. The present invention relates to a three-dimensional shape measuring device, a three-dimensional information measuring method, and a thin film evaluation measuring method that realize highly accurate measurement of thickness.
【０００２】[0002]
【従来の技術】従来、塗工膜の膜厚を測定する方法とし
て、マイクロメータや渦電流方式を用いた接触方式の膜
厚計があった（第１の従来技術）。2. Description of the Related Art Conventionally, as a method of measuring the thickness of a coating film, there has been a contact type film thickness meter using a micrometer or an eddy current method (first prior art).
【０００３】一方、基体となる金属ドラムの歪も大きく
画像影響を及ぼすため、高精度での基体の歪測定も要求
されている。従来、３次元の形状を測定する装置とし
て、特開平８−１４５６３６号公報に記載の外径測定機
を用いた形状測定方法が開示されている（第２の従来技
術）。すなわち、第２の従来技術は、被測定物の断面が
真円、または真の楕円でない場合でも高精度に断面形状
を測定することを目的とするものであって、平行光を被
測定物に照射し、被測定物を通過した後の平行光を受光
し、被測定物の影により生じた平行光の明暗の境界の位
置を外径測定機の持つ原点からの距離として表したＤ１
およびＤ２から、被測定物の外径を測定する外径測定機
を用いる形状測定方法であって、外径測定機と被測定物
とを同一平面（Ｘ−Ｙ平面）上で相対的に回転し、回転
中の一定角度間隔毎に回転角θと明暗の境界の位置Ｄ
１，Ｄ２とを組み合わせ測定・記録し、外径測定機と被
測定物との回転中心を回転軸に沿って回転平面に垂直
（Ｚ軸）方向に移動し、回転角θおよび明暗の境界の位
置Ｄ１，Ｄ２を任意Ｚ軸断面上で測定・記録し、測定値
（θ，Ｄ１，Ｄ２，Ｚ）から、回転平面をＸ，Ｙ座標
面、軸移動方向をＺ軸として得られるＸ−Ｙ−Ｚ座標系
上における被測定物に対する接線の式を任意の断面毎に
演算し、任意の断面毎に求めた全ての接線の式が構成す
る包絡線の式、または包絡線上の点の座標を演算し、そ
の値から任意の断面の断面形状を求めるものである。On the other hand, since the distortion of the metal drum, which is the base, greatly affects the image, it is required to measure the distortion of the base with high accuracy. Conventionally, as a device for measuring a three-dimensional shape, a shape measuring method using an outer diameter measuring machine disclosed in Japanese Patent Laid-Open No. 8-145636 has been disclosed (second conventional technique). That is, the second conventional technique is intended to measure the cross-sectional shape with high accuracy even when the cross section of the object to be measured is not a true circle or a true ellipse. D1 in which the position of the boundary between the light and dark of the parallel light generated by the shadow of the measured object is expressed as the distance from the origin of the outer diameter measuring instrument
And D2 is a shape measuring method using an outer diameter measuring machine for measuring an outer diameter of an object to be measured, wherein the outer diameter measuring machine and the object to be measured are relatively rotated on the same plane (XY plane). Then, at a constant angular interval during rotation, the rotation angle θ and the position D of the boundary between light and dark
1, D2 are combined and measured and recorded, and the center of rotation between the outer diameter measuring machine and the object to be measured is moved along the rotation axis in the direction perpendicular to the rotation plane (Z axis), and the rotation angle θ and the boundary of light and dark are Positions D1 and D2 are measured and recorded on an arbitrary Z-axis cross section, and XY is obtained from the measured values (θ, D1, D2, Z) with the rotation plane as the X and Y coordinate planes and the axis movement direction as the Z axis. -Calculate the equation of the tangent to the object to be measured on the Z coordinate system for each arbitrary cross section, and calculate the equation of the envelope formed by the equations of all the tangents obtained for each arbitrary cross section, or the coordinates of points on the envelope. The calculation is performed, and the cross-sectional shape of an arbitrary cross section is obtained from the calculated value.
【０００４】[0004]
【発明が解決しようとする課題】しかしながら、上記第
１の従来技術の膜厚計は塗工膜の特定部分をピックアッ
プして測定するものであって、膜全体の作製状態を評価
するものではないという問題点があった。最近では、薄
膜によって電気物性を制御することなどがあり、塗膜し
た全範囲の膜厚を必要とすることが多くなりつつある。
特に、電子写真プリンタの分野においては、金属ドラム
表面に特定の有機分子を分散した樹脂膜（例えば、感光
体）上に電気的な画像を形成する必要がある。当該樹脂
膜においては、樹脂膜中の一部分の欠陥も印刷画像に影
響するため、精密な膜制御が必要となってくる。また、
ドキュメントのカラー化が進むに従い、より高画質画像
が要求され、電気的画像の制御もより厳しくなり、従っ
てより一層の樹脂膜厚制御が望まれている。However, the film thickness meter of the first prior art described above picks up and measures a specific portion of the coating film, and does not evaluate the production state of the entire film. There was a problem. In recent years, there have been increasing demands for the film thickness in the entire range of the coated film, because the electrical properties are controlled by the thin film.
Particularly in the field of electrophotographic printers, it is necessary to form an electric image on a resin film (for example, a photoconductor) in which specific organic molecules are dispersed on the surface of a metal drum. In the resin film, a partial defect in the resin film also affects the printed image, so that precise film control is required. Also,
As colorization of documents progresses, higher quality images are required, and electrical images are more strictly controlled. Therefore, further control of resin film thickness is desired.
【０００５】また、上記第２の従来技術は断面形状を評
価するものであって、作製した膜全体の作成状態や透明
樹脂薄膜を測定評価することが難しいという問題点があ
った。さらに膜厚評価で要求されるサブミクロンまでの
測定には適さないという問題点もあった。Further, the above-mentioned second conventional technique is for evaluating the cross-sectional shape, and there is a problem that it is difficult to measure and evaluate the production state of the entire produced film and the transparent resin thin film. Further, there is a problem that it is not suitable for measurement up to the submicron required for film thickness evaluation.
【０００６】本発明は斯かる問題点を鑑みてなされたも
のであり、その目的とするところは、３次元形状の簡単
な測定を実現するとともに、ドラム等の円筒体に形成さ
れた透明樹脂膜の膜厚の高精度な測定を実現する３次元
形状測定装置、３次元情報計測方法及び薄膜評価測定方
法を提供する点にある。The present invention has been made in view of such problems, and an object thereof is to realize a simple measurement of a three-dimensional shape and to form a transparent resin film formed on a cylindrical body such as a drum. Is to provide a three-dimensional shape measuring device, a three-dimensional information measuring method, and a thin film evaluation measuring method that realize highly accurate measurement of the film thickness.
【０００７】[0007]
【課題を解決するための手段】この発明の請求項１に記
載の発明の要旨は、物体の３次元形状を計測する３次元
形状測定装置であって、一対の投光部と受光部とから構
成されてレーザ光を帯状に所定の範囲に放射して被測定
部材に遮光される範囲を測定することによって非接触状
態で当該被測定部材の外径を測定する外径計測手段と、
前記被測定部材または前記外径計測手段を所定の回転軸
で回転させる回転手段と、前記被測定部材または前記外
径計測手段を所定の軸上で直線移動させる直線移動手段
と、前記外径計測手段からの信号を取り込んで測定条件
を制御するデータ取り込み制御手段と、前記回転手段と
前記直線移動手段を制御するための位置制御手段と、前
記データ取り込み制御手段に取り込まれたデータを保存
するための記憶手段と、前記記憶手段のデータを基に所
望の関数によってデータ処理を行う解析処理手段とを有
する３次元形状測定装置において、前記データ取り込み
制御手段は、前記被測定部材の変形前の３次元形状を前
記外径計測手段によって計測した測定データを変形前測
定データとして取り込むと共に、前記被測定部材と前記
外径計測手段の位置関係とを前記変形前測定データの取
り込み時と同一位置関係において、前記被測定部材の変
形後の３次元形状を前記外径計測手段によって計測した
測定データを変形後測定データとして取り込み、前記記
憶手段は、前記外径計測手段と前記被測定部材の位置関
係と前記変形前測定データとを関連付けて被測定部材の
変形前の３次元形状データとして記憶すると共に、前記
外径計測手段と前記被測定部材の位置関係と前記変形後
測定データとを関連付けて被測定部材の変形後の３次元
形状データとして記憶し、前記解析処理手段は、前記記
憶手段に記憶された前記被測定部材の変形前と変形後の
３次元形状データを基に３次元形状の変形量を算出し、
前記解析処理手段の解析結果を受けて画像イメージとし
て出力するイメージ出力手段を備えたことを特徴とする
３次元形状測定装置に存する。また、この発明の請求項
２に記載の発明の要旨は、３次元形状を計測する３次元
形状測定装置であって、外的影響因子を測定するための
外的因子測定手段と、前記データ取り込み制御手段に取
り込まれたデータを基に前記外的因子測定手段によって
測定された前記外的影響因子を削除補正するための環境
制御手段とを有することを特徴とする請求項１に記載の
３次元形状測定装置に存する。また、この発明の請求項
３に記載の発明の要旨は、前記レーザ光を所定の角度範
囲で測定基体に入射させ、屈折率の異なる界面に低角で
前記レーザ光を進入させることによって前記レーザ光を
反射させ、遮光された影として外径計測することで、円
柱上の透明体を測定する手段を有することを特徴とする
請求項１または２に記載の３次元形状測定装置に存す
る。また、この発明の請求項４に記載の発明の要旨は、
物体の３次元情報を計測する３次元情報計測方法であっ
て、被測定部材と計測装置の位置関係を変更しながら複
数の所定の位置の外径を測定する第１の計測工程と、前
記被測定部材の３次元形状データを前記計測装置と前記
被測定部材との位置関係と測定データとを関連づけて記
憶する第１の記憶工程と、前記第１の計測工程における
前記被測定部材と前記計測装置の位置関係と同一位置関
係において複数の所定の位置の外径を測定する第２の計
測工程と、前記第２の計測工程で計測された前記被測定
部材の３次元形状データを前記計測装置と前記被測定部
材との位置関係と測定データとを関連づけて記憶する第
２の記憶工程と、前記第１の記憶工程で記憶された前記
被測定部材の３次元形状と前記第２の記憶工程で記憶さ
れた前記被測定部材の３次元形状の外径の差を基に３次
元状態の変化を算出する変形算出工程と、前記変形算出
工程で得られた計算値と測定位置を基に３次元的な情報
を生成してイメージとして出力する３次元情報処理工程
とを含むことを特徴とする３次元情報計測方法に存す
る。また、この発明の請求項５に記載の発明の要旨は、
３次元物体上に作製された薄膜を測定する薄膜評価測定
方法であって、被測定部材と計測装置の位置関係を変更
しながら複数の所定の位置の外径を測定する第１の計測
工程と、前記被測定部材の３次元形状データを前記計測
装置と前記被測定部材との位置関係と測定データとを関
連づけて記憶する第１の記憶工程と、前記第１の計測工
程における前記被測定部材と前記計測装置の位置関係と
同一位置関係において複数の所定の位置の外径を測定す
る第２の計測工程と、前記第２の計測工程で計測された
前記被測定部材の３次元形状データを前記計測装置と前
記被測定部材との位置関係と測定データとを関連づけて
記憶する第２の記憶工程と、前記第１の記憶工程で記憶
された前記被測定部材の３次元形状と前記第２の記憶工
程で記憶された前記被測定部材の３次元形状の外径の差
を基に３次元状態の変化を算出する変形算出工程と、前
記変形算出工程で得られた計算値と測定位置を基に３次
元的な情報を生成してイメージとして出力する３次元情
報処理工程と、測定時に外的影響因子を測定する第１の
外的影響因子計測工程と、前記第１の記憶工程と前記第
２の記憶工程で記憶された測定データに対して外的影響
因子を削除する外的影響因子削除工程とを含むことを特
徴とする薄膜評価測定方法に存する。また、この発明の
請求項６に記載の発明の要旨は、３次元物体上に作製さ
れた薄膜を測定する薄膜評価測定方法であって、形成前
の３次元被測定部材と計測装置の位置関係を変更しなが
ら、所望の位置の外径を測定する第１の計測工程と、前
記形成前の３次元被測定部材の形状データを記憶する第
１の記憶工程と、薄膜を形成した後に外径計測を行う第
２の計測工程と、形成後の３次元被測定部材の形状デー
タを記憶手段に記憶させる第２の記憶工程と、前記形成
前の３次元被測定部材の外径形状と前記形成後の３次元
被測定部材の外径形状の差を基に、作製した薄膜の膜厚
を算出する膜厚算出工程とを含むことを特徴とする薄膜
評価測定方法に存する。The gist of the invention according to claim 1 of the present invention is a three-dimensional shape measuring device for measuring the three-dimensional shape of an object, which comprises a pair of a light projecting portion and a light receiving portion. Outer diameter measuring means configured to measure the outer diameter of the member to be measured in a non-contact state by measuring a range that is shielded by the member to be measured by radiating a laser beam in a predetermined range in a belt shape,
Rotating means for rotating the member to be measured or the outer diameter measuring means on a predetermined rotation axis, linear moving means for linearly moving the member to be measured or the outer diameter measuring means on a predetermined axis, and the outer diameter measuring Data capturing control means for capturing the signal from the means to control the measurement conditions, position control means for controlling the rotating means and the linear moving means, and storing the data captured by the data capturing control means In the three-dimensional shape measuring apparatus , the three-dimensional shape measuring apparatus includes:
The control means controls the three-dimensional shape of the measured member before deformation.
Pre-deformation measurement data measured by outside diameter measuring means
In addition to importing as constant data, the measured member and the
The positional relationship between the outer diameter measuring means and the pre-deformation measurement data are obtained.
In the same positional relationship as when the
The three-dimensional shape after shaping was measured by the outer diameter measuring means.
Import the measurement data as modified measurement data,
The storage means is a positional relationship between the outer diameter measuring means and the member to be measured.
Of the member to be measured by associating the member with the measurement data before deformation.
It is stored as three-dimensional shape data before deformation, and
After the deformation and the positional relationship between the outer diameter measuring means and the member to be measured
3D after deformation of the measured member in association with measurement data
It is stored as shape data, and the analysis processing means stores
Before and after the deformation of the measured member stored in the storage means
Calculate the deformation amount of the three-dimensional shape based on the three-dimensional shape data,
The result of the analysis by the analysis processing means is converted into an image
The present invention resides in a three-dimensional shape measuring apparatus characterized in that it is provided with an image output means for outputting the image . Further, the gist of the invention according to claim 2 of the present invention is a three-dimensional shape measuring apparatus for measuring a three-dimensional shape, and an external factor measuring means for measuring an external influencing factor, and the data acquisition. 3D according to claim 1, characterized in that it comprises a climate control means for deleting correcting the external influence factors measured by the external factors measuring means based on data that has been received by the control means It exists in the shape measuring device. Further, the gist of the invention according to claim 3 of the present invention is that the laser light is made incident on the measurement substrate within a predetermined angle range and a low angle is applied to an interface having a different refractive index.
By letting the laser light enter,
The three-dimensional shape measuring apparatus according to claim 1 or 2, further comprising a means for measuring a transparent body on a cylinder by measuring an outer diameter as a shadow that is reflected and shielded . Further, the gist of the invention according to claim 4 of the present invention is as follows.
A three-dimensional information measuring method for measuring three-dimensional information of an object, comprising: a first measuring step of measuring outer diameters at a plurality of predetermined positions while changing a positional relationship between a member to be measured and a measuring device; A first storage step of storing three-dimensional shape data of a measuring member in association with the measurement data and the positional relationship between the measuring device and the measured member; and the measured member and the measurement in the first measuring step. A second measuring step of measuring outer diameters at a plurality of predetermined positions in the same positional relationship as the apparatus, and the three-dimensional shape data of the measured member measured in the second measuring step as the measuring apparatus. And a second storage step of storing the measurement data in association with the positional relationship between the measurement target member and the three-dimensional shape of the measurement target member stored in the first storage step and the second storage step. The part to be measured stored in A deformation calculation step of calculating the change in the three-dimensional state based on the difference in the outer diameter of the three-dimensional shape, and three-dimensional information is generated based on the calculated value and the measurement position obtained in the deformation calculation step. And a three-dimensional information processing step of outputting as an image. The gist of the invention according to claim 5 of the present invention is as follows.
A thin film evaluation measuring method for measuring a thin film formed on a three-dimensional object, comprising a first measuring step of measuring outer diameters at a plurality of predetermined positions while changing a positional relationship between a member to be measured and a measuring device. A first storage step of storing the three-dimensional shape data of the member to be measured in association with the positional relationship between the measuring device and the member to be measured and the measurement data; and the member to be measured in the first measuring step. And a second measurement step of measuring outer diameters at a plurality of predetermined positions in the same positional relationship as that of the measurement device, and three-dimensional shape data of the measured member measured in the second measurement step. A second storage step of storing the positional relationship between the measuring device and the member to be measured and measurement data in association with each other, a three-dimensional shape of the member to be measured stored in the first storage step, and the second Before remembered in the memory process A deformation calculation step of calculating a change in the three-dimensional state based on the difference in the outer diameter of the three-dimensional shape of the member to be measured, and three-dimensional information based on the calculated value and the measurement position obtained in the deformation calculation step. A three-dimensional information processing step of generating and outputting as an image, a first external influence factor measuring step of measuring an external influence factor at the time of measurement, a first storing step and a second storing step are stored. And a step of deleting an external influence factor from the measured data, the thin film evaluation measuring method. Further, the gist of the invention according to claim 6 of the present invention is a thin film evaluation measuring method for measuring a thin film formed on a three-dimensional object, and the positional relationship between a three-dimensional measured member and a measuring device before formation. The first measurement step of measuring the outer diameter at a desired position while changing the value, the first storage step of storing the shape data of the three-dimensional measured member before formation, and the outer diameter after forming the thin film. A second measurement step of measuring, a second storage step of storing shape data of the three-dimensional measured member after formation in a storage means, an outer diameter shape of the three-dimensional measured member before formation, and the formation And a film thickness calculating step of calculating a film thickness of the produced thin film based on the difference in outer diameter shape of the three-dimensional member to be measured.
【０００８】[0008]
【発明の実施の形態】本発明は、物体の３次元形状を計
測する測定装置において、一対の投光部と受光部とから
構成されてレーザ光を帯状に所定の範囲に放射して被測
定部材に遮光される範囲を測定することによって非接触
状態で当該被測定部材の外径を測定する外径計測手段
と、当該被測定部材または外径計測手段を所定の回転軸
で回転させる回転手段と、当該被測定部材または外径計
測手段を所定の軸上で直線移動させる直線移動手段と、
当該外径計測手段からの信号を取り込み測定条件を制御
するデータ取り込み制御手段と、当該回転手段と当該直
線移動手段を制御するための位置制御手段と、データ取
り込み制御手段に取り込まれたデータを保存するための
記憶手段と、当該環境制御手段のデータを基に所望の関
数によってデータ処理を行う解析処理手段とを有するこ
とを特徴とする。BEST MODE FOR CARRYING OUT THE INVENTION The present invention is a measuring device for measuring a three-dimensional shape of an object, which comprises a pair of a light projecting section and a light receiving section and radiates a laser beam in a band in a predetermined range to be measured. Outer diameter measuring means for measuring the outer diameter of the member to be measured in a non-contact state by measuring the range shielded by the member, and rotating means for rotating the member to be measured or the outer diameter measuring means on a predetermined rotation axis. And linear moving means for linearly moving the member to be measured or the outer diameter measuring means on a predetermined axis,
Data capture control means for capturing signals from the outer diameter measurement means and controlling measurement conditions, position control means for controlling the rotation means and the linear movement means, and data captured by the data capture control means are stored. It is characterized by having a storage means for doing so and an analysis processing means for performing data processing by a desired function based on the data of the environment control means.
【０００９】上記構成を設けることによって、本発明
は、非接触で被測定部材を傷つけたりすることなく、３
次元形状を容易に計測して、簡単な３次元形状データと
して記憶手段に保存することができる。また、３次元デ
ータとして保存しているので、解析処理手段によって処
理することによって、様々な２次元画像情報、３次元画
像情報として計算解析処理が可能であり、応用範囲も広
いといった効果を奏する。By providing the above-mentioned structure, the present invention provides a non-contact type structure which does not damage the member to be measured.
The three-dimensional shape can be easily measured and stored in the storage means as simple three-dimensional shape data. Further, since it is stored as three-dimensional data, it is possible to perform calculation analysis processing as various two-dimensional image information and three-dimensional image information by processing by the analysis processing means, and there is an effect that the application range is wide.
【００１０】また、本発明では、３次元の形状を所定の
軸を基準として外径測定装置と被測定部材との位置関係
を変更し、その基準軸から距離データとして蓄積保存し
て、３次元の形状データを簡潔化している。これによっ
て、解析計算、３次元情報の画像化を容易にし、解析処
理を高速化及び簡素化でき、さらに、一般の表計算ソフ
トウェア（プログラム）でも解析することができ、新た
に複雑なソフトウェア（プログラム）を開発することな
く低価格で３次元計測が実現できるといった効果を奏す
る。以下、図面に基づき本発明の各種実施の形態を説明
する。Further, according to the present invention, the positional relationship between the outer diameter measuring device and the member to be measured is changed with reference to a predetermined axis of a three-dimensional shape, and the three-dimensional shape is stored and stored as distance data from the reference axis. The shape data of is simplified. This facilitates analysis calculation, visualization of three-dimensional information, speeds up and simplifies analysis processing, and allows general spreadsheet software (program) to be analyzed. The effect that three-dimensional measurement can be realized at low cost without developing (1). Hereinafter, various embodiments of the present invention will be described with reference to the drawings.
【００１１】（第１の実施の形態）図１は、本発明の第
１の実施の形態に係る３次元形状測定装置２０を説明す
るための機能ブロック図である。また、図２は、第１の
実施の外径計測手段２３における投光部２３Ａと受光部
２３Ｂ、及び被測定部材１０の位置関係を説明するため
の配置図である。(First Embodiment) FIG. 1 is a functional block diagram for explaining a three-dimensional shape measuring apparatus 20 according to a first embodiment of the present invention. Further, FIG. 2 is a layout diagram for explaining the positional relationship among the light projecting portion 23A and the light receiving portion 23B in the outer diameter measuring means 23 of the first embodiment, and the member to be measured 10.
【００１２】図１を参照すると、第１の実施の形態の３
次元形状測定装置２０は、レーザ光を用いて非接触状態
で被測定部材１０の外径を測定する外径計測手段２３
と、被測定部材１０を所定の回転軸で回転させる回転手
段２２と、外径計測手段２３を所定の軸上で直線移動さ
せる直線移動手段２１と、外径計測手段２３からの信号
を取り込み測定条件を制御するデータ取り込み制御手段
２５と、回転手段２２と直線移動手段２１を制御するた
めの位置制御手段２６と、データ取り込み制御手段２５
に取り込まれたデータを保存するための記憶手段２７
と、測定したデータを基に所望の関数によってデータ処
理を行う解析処理手段２８と、解析された結果を画像イ
メージとして出力するイメージ出力手段２９を中心にし
て構成されている。Referring to FIG. 1, the third embodiment of the present invention.
The three-dimensional shape measuring device 20 measures the outer diameter of the member to be measured 10 in a non-contact state by using a laser beam.
A rotation means 22 for rotating the member to be measured 10 on a predetermined rotation axis; a linear movement means 21 for linearly moving the outer diameter measurement means 23 on a predetermined axis; and a signal from the outer diameter measurement means 23 for measurement. Data acquisition control means 25 for controlling conditions, position control means 26 for controlling the rotation means 22 and the linear movement means 21, and data acquisition control means 25.
Storage means 27 for storing the data taken in by
An analysis processing unit 28 that performs data processing according to a desired function based on the measured data, and an image output unit 29 that outputs the analyzed result as an image image.
【００１３】さらに、３次元形状測定装置２０を構成す
る個々の部位について詳細に説明する。図２を参照する
と、外径計測手段２３は、投光部２３Ａからレーザ光の
照射面２３Ｃを帯状に放射して、受光部２３Ｂで受け、
被測定部材１０に遮られた範囲、すなわち外径を被接触
で測定することができる。Further, individual parts constituting the three-dimensional shape measuring apparatus 20 will be described in detail. Referring to FIG. 2, the outer diameter measuring means 23 radiates a laser light irradiation surface 23C in a band shape from the light projecting portion 23A and receives the laser light at the light receiving portion 23B.
The range blocked by the member to be measured 10, that is, the outer diameter can be measured by contact.
【００１４】外径計測手段２３は、リニアステージ（不
図示）などの直線移動手段２１と接続され、レーザ光の
照射面２３Ｃと垂直に移動させることができる。The outer diameter measuring means 23 is connected to a linear moving means 21 such as a linear stage (not shown) and can be moved vertically to the laser light irradiation surface 23C.
【００１５】被測定部材１０は、回転手段２２と接続さ
れ、直線移動方向と平行な回転軸で回転させることがで
きる。The member 10 to be measured is connected to the rotating means 22 and can be rotated by a rotating shaft parallel to the linear movement direction.
【００１６】回転手段２２と直線移動手段２１は、位置
制御手段２６によって制御され、被測定部材１０と外径
計測手段２３との位置関係を変更することができる。The rotating means 22 and the linear moving means 21 are controlled by the position control means 26, and the positional relationship between the member 10 to be measured and the outer diameter measuring means 23 can be changed.
【００１７】データ取り込み制御手段２５は、外径計測
手段２３と通信ケーブル（不図示）によって接続されて
いて、外径計測手段２３を駆動制御して測定したデータ
を受信している。また、データ取り込み制御手段２５と
位置制御手段２６とは記憶手段２７に接続され、外径計
測手段２３と被測定部材１０との特定の位置関係と計測
された外径データとを関連づけて記憶している。The data fetching control means 25 is connected to the outer diameter measuring means 23 by a communication cable (not shown) and receives the data measured by driving and controlling the outer diameter measuring means 23. Further, the data acquisition control means 25 and the position control means 26 are connected to the storage means 27, and store a specific positional relationship between the outer diameter measuring means 23 and the measured member 10 and the measured outer diameter data in association with each other. ing.
【００１８】記憶手段２７に保存されたデータは、解析
処理手段２８によって解析され、位置データとその位置
関係における外径測定データを基に所望の解析を行った
後に、イメージ出力手段２９によって３次元情報を出力
する。The data stored in the storage means 27 is analyzed by the analysis processing means 28, and after the desired analysis is performed based on the position data and the outer diameter measurement data in the positional relationship, the three-dimensional data is output by the image output means 29. Output information.
【００１９】次に３次元形状測定装置２０の動作（３次
元情報計測方法及び薄膜評価測定方法）について説明す
る。図３は、第１の実施形態を用いて３次元形状を計測
する３次元情報計測方法を説明するためのフローチャー
トである。Next, the operation of the three-dimensional shape measuring apparatus 20 (three-dimensional information measuring method and thin film evaluation measuring method) will be described. FIG. 3 is a flow chart for explaining a three-dimensional information measuring method for measuring a three-dimensional shape using the first embodiment.
【００２０】図３を参照すると、本測定方法では、ま
ず、第１の計測工程（ステップＳ１）において、回転手
段２２及び直線移動手段２１を用いて外径計測手段２３
及び被測定部材１０の所望の位置関係における３次元形
状を測定し、データ取り込み制御手段２５を介して記憶
手段２７に保存（ステップＳ２：第１の記憶工程）す
る。Referring to FIG. 3, in the present measuring method, first, in the first measuring step (step S1), the outer diameter measuring means 23 using the rotating means 22 and the linear moving means 21 is used.
Also, the three-dimensional shape of the measured member 10 in a desired positional relationship is measured and stored in the storage means 27 via the data acquisition control means 25 (step S2: first storage step).
【００２１】被測定部材１０の３次元形状のみであるな
らば、この状態で測定を中止して、３次元情報処理工程
（ステップＳ６）に進み、位置情報と外径情報を３次元
情報として表示モニタ２５Ａ（後述、図４参照）に出力
表示して解析できる。If the measured member 10 has only the three-dimensional shape, the measurement is stopped in this state, and the process proceeds to the three-dimensional information processing step (step S6) to display the position information and the outer diameter information as the three-dimensional information. It can be output and displayed on the monitor 25A (described later, see FIG. 4) for analysis.
【００２２】被測定部材１０の変形情報を解析したい場
合には、変形処理後に外径計測手段２３との位置関係が
第１の計測工程（ステップＳ１）と同一になるように固
定治具に固定して、回転手段２２及び直線移動手段２１
を用いて外径計測手段２３及び被測定部材１０の所望の
位置関係における３次元形状を測定（ステップＳ３：第
２の計測工程）して、データ取り込み制御手段２５を介
して記憶手段２７に保存（ステップＳ４：第２の記憶工
程）する。When it is desired to analyze the deformation information of the member 10 to be measured, it is fixed to the fixing jig so that the positional relationship with the outer diameter measuring means 23 after the deformation process becomes the same as in the first measuring step (step S1). Then, the rotating means 22 and the linear moving means 21
Is used to measure the three-dimensional shape of the outer diameter measuring means 23 and the measured member 10 in a desired positional relationship (step S3: second measuring step), and is stored in the storage means 27 via the data acquisition control means 25. (Step S4: second storage step).
【００２３】次に、変形算出工程（ステップＳ５）を実
行し、測定された所定の部位における変形を解析処理手
段２８によって算出して、被測定部材１０の各位置と変
形量を記憶する。Next, the deformation calculation step (step S5) is executed, the deformation in the measured predetermined portion is calculated by the analysis processing means 28, and each position and the deformation amount of the measured member 10 are stored.
【００２４】その後、被測定部材１０の位置と変形量
を、イメージ出力手段２９に３次元情報として表示する
（ステップＳ６：３次元情報処理工程）。After that, the position and the amount of deformation of the member to be measured 10 are displayed on the image output means 29 as three-dimensional information (step S6: three-dimensional information processing step).
【００２５】次に、本発明の実施の形態を、さらに具体
的な装置を示して説明する。図４は、主に円柱状の物体
の３次元形状及び変形量を測定する３次元形状測定装置
２０の装置概略図である。Next, an embodiment of the present invention will be described by showing a more specific device. FIG. 4 is a schematic view of a three-dimensional shape measuring apparatus 20 that mainly measures the three-dimensional shape and deformation amount of a cylindrical object.
【００２６】図４を参照すると、実施の形態のドラム解
析装置（３次元形状測定装置２０）は、レーザ光を用い
て非接触状態で円柱体（被測定部材１０）の外径を測定
する外径計測手段２３と、円柱体（被測定部材１０）を
円柱の中心軸で回転させる回転機構（回転手段２２）
と、外径計測手段２３を所定の軸上を直線移動させる直
線移動機構（直線移動手段２１）と、外径計測手段２３
からの信号を取り込み測定条件を制御するデータ取り込
み制御手段２５と、回転機構（回転手段２２）と直線移
動機構（直線移動手段２１）を制御するための位置制御
手段２６と、データ取り込み制御手段２５に取り込まれ
たデータを記憶手段２７に保存して所望の関数によって
データの解析を行い（解析処理手段２８）、当該解析さ
れた結果を画像イメージとして表示モニタ２５Ａ等に出
力するイメージ出力手段２９（ＣＰＵ３０内に存在）を
中心にして構成されている。Referring to FIG. 4, the drum analyzing apparatus (three-dimensional shape measuring apparatus 20) according to the embodiment measures the outer diameter of a cylindrical body (measured member 10) in a non-contact state using a laser beam. A diameter measuring means 23 and a rotation mechanism (rotating means 22) for rotating the cylindrical body (measured member 10) around the central axis of the cylinder.
And a linear movement mechanism (linear movement means 21) for linearly moving the outer diameter measuring means 23 on a predetermined axis, and the outer diameter measuring means 23.
A data fetching control means 25 for fetching a signal from the control means for controlling measurement conditions, a position control means 26 for controlling the rotating mechanism (rotating means 22) and a linear moving mechanism (linear moving means 21), and a data fetching controlling means 25. The image output means 29 (which stores the data captured in the storage means 27 in the storage means 27, analyzes the data by a desired function (analysis processing means 28), and outputs the analyzed result as an image image to the display monitor 25A or the like ( It exists mainly in the CPU 30).
【００２７】回転機構（回転手段２２）は、支持台座２
４上に構成され、円柱体（被測定部材１０）の中心軸を
中心に回転する駆動部側回転固定治具２２Ｂと自由回転
固定治具２２Ｃによって円柱体（被測定部材１０）を固
定して、回転モータ２２Ａによって円柱体（被測定部材
１０）を回転させる機構となっている。The rotating mechanism (rotating means 22) is composed of the support base 2
4, the columnar body (measured member 10) is fixed by a drive unit side rotation fixing jig 22B and a free rotation fixing jig 22C which rotate around the central axis of the cylinder body (measured member 10). The rotation motor 22A serves as a mechanism for rotating the columnar body (measured member 10).
【００２８】また、直線移動機構（直線移動手段２１）
は、外径計測手段２３の固設された直線移動ステージ２
１Ｃが、位置制御信号ケーブル２６Ａを介して位置制御
手段２６によって移動制御可能な直線移動用駆動モータ
２１Ａによって円柱体（被測定部材１０）の中心軸に対
して垂直状態が保たれたまま、直線移動ガイドレール２
１Ｂ上を移動する機構となっている。Further, the linear moving mechanism (the linear moving means 21)
Is the linear movement stage 2 to which the outer diameter measuring means 23 is fixed.
1C is a straight line while the vertical state is maintained with respect to the central axis of the cylindrical body (measured member 10) by the linear movement drive motor 21A which can be moved by the position control means 26 via the position control signal cable 26A. Moving guide rail 2
It is a mechanism to move above 1B.
【００２９】回転機構（回転手段２２）及び直線移動機
構（直線移動手段２１）は、位置コントローラ（位置制
御手段２６）に接続されて、さらに続くＣＰＵ３０によ
って円柱体（被測定部材１０）及び外径計測手段２３と
の位置関係を制御する。The rotating mechanism (rotating means 22) and the linear moving mechanism (linear moving means 21) are connected to a position controller (position controlling means 26), and the CPU 30 further continues to provide a cylindrical body (member to be measured 10) and an outer diameter. The positional relationship with the measuring means 23 is controlled.
【００３０】本実施の形態では、両駆動機構（回転機構
（回転手段２２）及び直線移動機構（直線移動手段２
１））は、第１の計測工程（ステップＳ１）と第２の計
測工程（ステップＳ３）の間に被測定部材１０の取り外
しが行われた際に、両計測工程（第１の計測工程（ステ
ップＳ１）及び第２の計測工程（ステップＳ３））間で
位置ずれを起こさないように、あらかじめ被測定部材１
０上に付けられた基準点を基に原点検出を行ってから、
各測定部位に移動させている。記憶手段２７（ＣＰＵ３
０内に存在）に保存される位置データはすべてこの基準
点が基になっている。In this embodiment, both drive mechanisms (rotation mechanism (rotation means 22) and linear movement mechanism (linear movement means 2) are used.
1)), when the member to be measured 10 is removed between the first measurement step (step S1) and the second measurement step (step S3), both measurement steps (first measurement step ( The member to be measured 1 is previously measured so as not to be displaced between step S1) and the second measurement step (step S3)).
After performing the origin detection based on the reference point attached to 0,
It is moved to each measurement site. Storage means 27 (CPU3
All position data stored in (existing within 0) are based on this reference point.
【００３１】外径計測手段２３は、図２に示すように投
光部２３Ａからレーザ光の照射面２３Ｃを帯状に放射し
て、受光部２３Ｂで受け、円柱体（被測定部材１０）に
遮られた範囲、すなわち外径を被接触で測定することが
できる。As shown in FIG. 2, the outer diameter measuring means 23 radiates a laser beam irradiation surface 23C from the light projecting section 23A in a band shape, receives it by the light receiving section 23B, and intercepts it on the columnar body (member to be measured 10). A given range, that is, the outer diameter can be measured by contact.
【００３２】第１の計測工程（ステップＳ１）及び第１
の記憶工程（ステップＳ２）は、表示していない入力手
段を用いてＣＰＵ３０に入力命令することによって行わ
れる。第１の計測工程（ステップＳ１）は、測定条件の
入力、原点検出、外径計測、データ保存の順で行われ
る。さらに、外径計測は、測定位置移動、安定化待機、
外径計測の順で測定範囲終了まで繰り返し行われる。First measurement step (step S1) and first
The storage step (step S2) is performed by inputting an instruction to the CPU 30 using the input means not displayed. The first measurement step (step S1) is performed in the order of inputting measurement conditions, origin detection, outer diameter measurement, and data storage. In addition, the outer diameter is measured by moving the measurement position, waiting for stabilization,
The measurement is repeated in the order of outer diameter until the end of the measurement range.
【００３３】次に実際に円柱体（被測定部材１０）を測
定した例を基に説明する。図５は、第１の実施の形態の
３次元形状測定装置２０によって得られた円柱体（被測
定部材１０）の３次元情報の出力例（円柱体（被測定部
材１０）の３次元合成イメージ出力例）である。図中点
線枠は、図上にある切断表示面（図６、図７参照）の位
置を示している。この切断面は、ＣＰＵ３０に切断面表
示を入力することによって変更可能である。また、図５
は［０１１］視点方向からの３次元図となっているが、
視点位置は変更でき、円柱体以外の部材を用いるときに
有効である。また、部分的な拡大もでき、被測定部材１
０の傷や変形を観察できる。Next, an explanation will be given on the basis of an example in which the cylindrical body (member to be measured 10) is actually measured. FIG. 5 is an output example of three-dimensional information of a cylindrical body (measured member 10) obtained by the three-dimensional shape measuring apparatus 20 according to the first embodiment (three-dimensional composite image of the cylindrical body (measured member 10)). Output example). The dotted frame in the drawing indicates the position of the cut display surface (see FIGS. 6 and 7) on the drawing. This cut surface can be changed by inputting a cut surface display to the CPU 30. Also, FIG.
Is a three-dimensional view from the [011] viewpoint,
The viewpoint position can be changed, which is effective when a member other than a cylindrical body is used. Further, it is possible to partially enlarge the member to be measured 1
You can observe 0 scratches and deformations.
【００３４】図６は、図５の円柱体（被測定部材１０）
をＹＺ平面（Ｘ軸に垂直な面）で切断した場合の２次元
イメージ出力例であって、視点方向が［１００］に相当
する図５中の点線枠における切断面となっている。Ｚ軸
方向のスケールは任意に設定可能であり、図６では、２
０．０ｍｍ（ミリメートル）から２０．５ｍｍを拡大し
て表示している例である。また、図５に示したＸ軸まわ
りに回転するカーソル（矢印）によって、測定された外
径を表示可能である。FIG. 6 shows the columnar body (member to be measured 10) of FIG.
2 is an example of a two-dimensional image output when the image is cut on the YZ plane (a surface perpendicular to the X axis), and is a cut surface in a dotted frame in FIG. 5 in which the viewpoint direction corresponds to [100]. The scale in the Z-axis direction can be set arbitrarily, and in FIG.
In this example, 0.0 mm (millimeter) to 20.5 mm are enlarged and displayed. Further, the measured outer diameter can be displayed by the cursor (arrow) rotating around the X axis shown in FIG.
【００３５】これにより、各部位での円柱の変形を明確
に示すことができ、また真円度を算出して歪み値などを
計算できる。さらに、第１の計測工程（ステップＳ１）
で円筒管の変形前を計測して、第２の計測工程（ステッ
プＳ３）において、例えば、圧力を加えた後の円筒管を
計測することによって、圧力変形度、耐圧力性、他の位
置への影響などを位置分割して計測して変形量を算出解
析することができる。As a result, the deformation of the cylinder at each part can be clearly shown, and the roundness can be calculated to calculate the strain value and the like. Furthermore, the first measurement step (step S1)
In the second measuring step (step S3), for example, by measuring the cylindrical pipe after applying pressure, the degree of pressure deformation, pressure resistance, and other positions are measured. It is possible to calculate and analyze the amount of deformation by measuring the influence of the above by position division.
【００３６】図７は、図５の円柱体（被測定部材１０）
をＸＺ平面（Ｙ軸に垂直な面）で切断した場合の２次元
イメージ出力例である。本実施の形態では、Ｚ軸方向の
スケールは任意に設定可能であり、図７では、２０．０
ｍｍから２０．５ｍｍを拡大して表示している例であ
る。また、図５に示したＸ軸に沿って移動するカーソル
（矢印）によって、測定された外径を表示可能である。
これにより、各部位での円柱の変形を明確に示すことが
でき、また外径変化の計算を算出して歪み値などを計算
できる。FIG. 7 shows the cylindrical body of FIG. 5 (member to be measured 10).
2 is an example of a two-dimensional image output when is cut on the XZ plane (a plane perpendicular to the Y axis). In the present embodiment, the scale in the Z-axis direction can be set arbitrarily, and in FIG.
It is an example in which 20.5 mm is enlarged and displayed from mm. Further, the measured outer diameter can be displayed by the cursor (arrow) that moves along the X axis shown in FIG.
Thereby, the deformation of the cylinder at each part can be clearly shown, and the calculation of the outer diameter change can be calculated to calculate the strain value and the like.
【００３７】次に、本発明の３次元形状測定装置２０を
用いて円柱体（被測定部材１０）上に作製した透明薄膜
の膜厚の測定結果を示す。Next, the measurement results of the film thickness of the transparent thin film formed on the cylindrical body (member to be measured 10) using the three-dimensional shape measuring apparatus 20 of the present invention will be shown.
【００３８】図８は、第１の実施の形態の３次元形状測
定装置２０によって得られた円柱体（被測定部材１０）
の３次元情報の出力例（膜厚測定結果例）のグラフであ
る。図８では、薄膜の歪みを見やすくするために、薄膜
部の厚みを拡大して示している。上記第１の実施の形態
を用いることによって、０．０２５μｍ（ミクロン）程
度の精度で透明薄膜の膜厚を測定でき、さらには円柱上
に作製した薄膜の３次元形状を計測評価可能である。FIG. 8 is a columnar body (member to be measured 10) obtained by the three-dimensional shape measuring apparatus 20 of the first embodiment.
3 is a graph of an output example (thickness measurement result example) of the three-dimensional information of FIG. In FIG. 8, the thickness of the thin film portion is shown enlarged in order to make it easier to see the distortion of the thin film. By using the first embodiment, the film thickness of the transparent thin film can be measured with an accuracy of about 0.025 μm (micron), and the three-dimensional shape of the thin film formed on the cylinder can be measured and evaluated.
【００３９】次に、実際に円柱体（被測定部材１０）上
に作製した透明樹脂薄膜の摩耗試験を行った際の外径変
化を、上記第１の実施の形態を用いて測定評価した例を
図９を参照して説明する。図９は、第１の実施の形態の
３次元形状測定装置２０によって得られた円柱体（被測
定部材１０）の摩耗測定結果例であって、同図（ａ）は
傷深さと変化及び位置の関係を示すグラフ、同図（ｂ）
は膜強度評価結果（摩耗回数による平滑性変化との関
係）を示すテーブルである。Next, an example in which the change in outer diameter when the abrasion test of the transparent resin thin film actually formed on the cylindrical body (member to be measured 10) was carried out was measured and evaluated using the above-mentioned first embodiment. Will be described with reference to FIG. FIG. 9 is an example of wear measurement results of a cylindrical body (measured member 10) obtained by the three-dimensional shape measuring apparatus 20 of the first embodiment, and FIG. 9A shows the scratch depth, change and position. A graph showing the relationship between FIG.
Is a table showing the film strength evaluation result (relationship with smoothness change due to wear frequency).
【００４０】摩耗試験は市販の摩耗輪の摩耗面を円柱体
（被測定部材１０）上に作製した透明樹脂薄膜の樹脂面
に荷重をかけ、摩耗輪が回転可能な状態で押し当てた状
態で、円筒管を回転させて樹脂膜を微小に摩耗させた。
その結果、図９（ａ）に示すように、サブミクロン範囲
における面内の膜厚減衰が測定できた。このように、高
精度で膜厚の変化や形状変化が測定でき、その結果、図
９（ｂ）のテーブルに示すような平滑性の数値化が可能
となる。ここでは、表面の平滑性を、所定の範囲におけ
る膜厚の標準偏差を用いて求め評価した。さらに、その
結果、サンプル１及びサンプル２と標準サンプルとの比
較によって膜の耐久性能を数値化することが可能とな
る。In the abrasion test, the abrasion surface of the commercially available abrasion wheel is applied to the resin surface of the transparent resin thin film produced on the cylindrical body (member 10 to be measured), and the abrasion wheel is pressed in a rotatable state. The cylindrical film was rotated to slightly wear the resin film.
As a result, as shown in FIG. 9A, in-plane film thickness attenuation in the submicron range could be measured. In this way, the change in film thickness and the change in shape can be measured with high accuracy, and as a result, it becomes possible to quantify the smoothness as shown in the table of FIG. 9B. Here, the smoothness of the surface was obtained and evaluated using the standard deviation of the film thickness within a predetermined range. Further, as a result, it becomes possible to quantify the durability performance of the film by comparing Sample 1 and Sample 2 with the standard sample.
【００４１】以上説明したように本実施の形態によれ
ば、非接触で被測定部材１０を傷つけたりすることな
く、３次元形状を容易に計測して、簡単な３次元形状デ
ータとして記憶手段２７に保存することができる。さら
に加えて、３次元データとして保存しているので、解析
処理手段２８によって処理することによって、様々な２
次元画像情報、３次元画像情報として計算解析処理が可
能であり、応用範囲も広いといった効果を奏する（第１
の効果）。As described above, according to this embodiment, the three-dimensional shape can be easily measured without damaging the measured member 10 in a non-contact manner, and the storage means 27 can be used as simple three-dimensional shape data. Can be stored in. In addition, since it is stored as three-dimensional data, various data can be obtained by processing with the analysis processing means 28.
It is possible to perform calculation analysis processing as three-dimensional image information and three-dimensional image information, and has an effect that the range of application is wide (first
Effect).
【００４２】また、本実施の形態では３次元の形状を所
定の軸を基準として外径計測手段２３と被測定部材１０
との位置関係を変更し、その基準軸から距離データとし
て蓄積保存して、３次元の形状データを簡潔化してい
る。これにより、解析計算、３次元情報の画像化を容易
とし、解析処理を高速化及び簡素化でき、さらに、一般
の表計算ソフトウェア（プログラム）でも解析すること
ができ、新たに複雑なソフトウェア（プログラム）を開
発することなく低価格で３次元計測が実現できるといっ
た効果を奏する（第２の効果）。Further, in the present embodiment, the outer diameter measuring means 23 and the member to be measured 10 have a three-dimensional shape with a predetermined axis as a reference.
The positional relationship between and is changed, and the three-dimensional shape data is simplified by accumulating and storing distance data from the reference axis. As a result, analysis calculation, three-dimensional information can be easily visualized, analysis processing can be speeded up and simplified, and general spreadsheet software (program) can also be analyzed. (3) The effect that 3D measurement can be realized at low cost without developing (2nd effect).
【００４３】また、本実施の形態は、レーザ光を所定の
角度範囲で測定部材に入射させている。屈折率の異なる
界面（空気と透明体との界面）に低角でレーザを進入さ
せることによってレーザを反射させ、遮光された影とし
て外径計測することで、円柱上の透明体の計測を可能と
している。その結果、円柱上の形成された液体または固
体の透明膜の膜厚を高精度かつ高速に測定することがで
き、さらには３次元形状を測定できるといった効果を奏
する（第３の効果）。Further, in this embodiment, the laser light is made incident on the measuring member within a predetermined angle range. It is possible to measure a transparent body on a cylinder by allowing the laser to enter the interface with a different refractive index (interface between air and transparent body) at a low angle to reflect the laser and measure the outer diameter as a shaded shadow. I am trying. As a result, the film thickness of the liquid or solid transparent film formed on the cylinder can be measured with high accuracy and high speed, and further, the three-dimensional shape can be measured (third effect).
【００４４】（第２の実施の形態）図１０は、本発明の
第２の実施の形態に係る３次元形状測定装置２０を説明
するための機能ブロック図である。なお、上記第１の実
施の形態において既に記述したものと同一の部分につい
ては、同一符号を付し、重複した説明は省略する。(Second Embodiment) FIG. 10 is a functional block diagram for explaining a three-dimensional shape measuring apparatus 20 according to a second embodiment of the present invention. The same parts as those already described in the first embodiment are designated by the same reference numerals, and the duplicated description will be omitted.
【００４５】図１０を参照すると、第２の実施の形態で
は、外径計測手段２３を固定して、被測定部材１０を回
転および直線移動させている点に特徴を有している。そ
の結果、上記第１の実施の形態で示した効果に加えて、
位置移動の固定が困難である被測定部材１０の外形形状
を簡単に測定できるといった効果を奏する。Referring to FIG. 10, the second embodiment is characterized in that the outer diameter measuring means 23 is fixed and the member 10 to be measured is rotated and linearly moved. As a result, in addition to the effects shown in the first embodiment,
It is possible to easily measure the outer shape of the measured member 10 whose position movement is difficult to fix.
【００４６】（第３の実施の形態）図１１は、本発明の
第３の実施の形態に係る３次元形状測定装置２０を説明
するための機能ブロック図である。なお、上記第１の実
施の形態において既に記述したものと同一の部分につい
ては、同一符号を付し、重複した説明は省略する。(Third Embodiment) FIG. 11 is a functional block diagram for explaining a three-dimensional shape measuring apparatus 20 according to a third embodiment of the present invention. The same parts as those already described in the first embodiment are designated by the same reference numerals, and the duplicated description will be omitted.
【００４７】図１１を参照すると、第３の実施の形態で
は、第１の回転手段２２２によって被測定部材１０を回
転可能とし、さらに外径計測手段２３を第１の回転手段
２２２と回転軸の異なる第２の回転手段２２４によって
回転可能および直線移動を可能とする構成とした点に特
徴を有している。Referring to FIG. 11, in the third embodiment, the member to be measured 10 is made rotatable by the first rotating means 222, and the outer diameter measuring means 23 is connected to the first rotating means 222 and the rotating shaft. It is characterized in that it is configured to be rotatable and linearly movable by different second rotating means 224.
【００４８】これにより、上記第１の実施の形態で示し
た効果に加えて、より複雑な物体の外形を詳細に解析で
きるといった効果を奏する。As a result, in addition to the effect shown in the first embodiment, there is an effect that the outer shape of a more complicated object can be analyzed in detail.
【００４９】（第４の実施の形態）図１２は、本発明の
第４の実施の形態に係る３次元形状測定装置２０を説明
するための機能ブロック図である。なお、上記第１の実
施の形態において既に記述したものと同一の部分につい
ては、同一符号を付し、重複した説明は省略する。(Fourth Embodiment) FIG. 12 is a functional block diagram for explaining a three-dimensional shape measuring apparatus 20 according to a fourth embodiment of the present invention. The same parts as those already described in the first embodiment are designated by the same reference numerals, and the duplicated description will be omitted.
【００５０】図１２を参照すると、第４の実施の形態で
は、上記第１の実施の形態に外的因子測定手段５０を付
加するとともに、被測定部材１０が外的因子測定手段５
０とともに環境制御手段４０及び解析制御手段３１によ
って制御される構成としている点に特徴を有している。Referring to FIG. 12, in the fourth embodiment, the external factor measuring means 50 is added to the first embodiment, and the member 10 to be measured has the external factor measuring means 5 added thereto.
It is characterized in that it is controlled by the environment control means 40 and the analysis control means 31 together with 0.
【００５１】これにより、上記第１の実施の形態で示し
た効果に加えて、形状測定における外的因子を明確にで
きるようになる。さらに加えて、外径測定データをその
外的因子と関連づけて記憶手段２７に保存することによ
って、より高精度の測定を実現できるといった効果を奏
する。This makes it possible to clarify the external factor in the shape measurement, in addition to the effect shown in the first embodiment. In addition, by storing the outer diameter measurement data in association with the external factor in the storage means 27, it is possible to achieve more accurate measurement.
【００５２】また、データとして取り込まれたデータか
ら外的因子の影響を削除補正できる。その結果、温度、
湿度、圧力などの外的因子の影響を削除して高精度の３
次元形状の測定を可能とし、被測定部材１０に発生した
微細な変化を計測できるようになるといった効果を奏す
る。Furthermore, the influence of external factors can be deleted and corrected from the data taken in as data. As a result, the temperature,
High accuracy 3 by removing the influence of external factors such as humidity and pressure
It is possible to measure the dimensional shape, and it is possible to measure a minute change generated in the measured member 10.
【００５３】なお、本発明が上記各実施の形態に限定さ
れず、本発明の技術思想の範囲内において、上記各実施
の形態は適宜変更され得ることは明らかである。また上
記構成部材の数、位置、形状等は上記各実施の形態に限
定されず、本発明を実施する上で好適な数、位置、形状
等にすることができる。また、各図において、同一構成
要素には同一符号を付している。It should be noted that the present invention is not limited to the above-mentioned embodiments, and it is apparent that the above-mentioned embodiments can be modified appropriately within the scope of the technical idea of the present invention. Further, the number, position, shape, etc. of the above-mentioned constituent members are not limited to those in each of the above-mentioned embodiments, and the number, position, shape, etc. suitable for carrying out the present invention can be adopted. Moreover, in each figure, the same components are denoted by the same reference numerals.
【００５４】[0054]
【発明の効果】以上説明したように本発明によれば、非
接触で被測定部材を傷つけたりすることなく、３次元形
状を容易に計測して、簡単な３次元形状データとして記
憶手段に保存することができる。さらに加えて、３次元
データとして保存しているので、解析処理手段によって
処理することによって、様々な２次元画像情報、３次元
画像情報として計算解析処理が可能であり、応用範囲も
広いといった効果を奏する（第１の効果）。As described above, according to the present invention, a three-dimensional shape can be easily measured without damaging a member to be measured in a non-contact manner and stored in the storage means as simple three-dimensional shape data. can do. In addition, since it is stored as three-dimensional data, it is possible to perform calculation analysis processing as various two-dimensional image information and three-dimensional image information by processing with the analysis processing means, and it is possible to obtain a wide range of applications. Play (first effect).
【００５５】また、本発明では３次元の形状を所定の軸
を基準として外径計測手段と被測定部材との位置関係を
変更し、その基準軸から距離データとして蓄積保存し
て、３次元の形状データを簡潔化している。これによ
り、解析計算、３次元情報の画像化を容易とし、解析処
理を高速化及び簡素化でき、さらに、一般の表計算ソフ
トウェア（プログラム）でも解析することができ、新た
に複雑なソフトウェア（プログラム）を開発することな
く低価格で３次元計測が実現できるといった効果を奏す
る（第２の効果）。Further, according to the present invention, the positional relationship between the outer diameter measuring means and the member to be measured is changed with respect to a three-dimensional shape with a predetermined axis as a reference, and the three-dimensional shape is accumulated and saved as distance data from the reference axis. Shape data is simplified. As a result, analysis calculation, three-dimensional information can be easily visualized, analysis processing can be speeded up and simplified, and general spreadsheet software (program) can also be analyzed. (3) The effect that 3D measurement can be realized at low cost without developing (2nd effect).
【００５６】また、本発明は、レーザ光を所定の角度範
囲で測定部材に入射させている。屈折率の異なる界面
（空気と透明体との界面）に低角でレーザを進入させる
ことによってレーザを反射させ、遮光された影として外
径計測することで、円柱上の透明体の計測を可能として
いる。その結果、円柱上の形成された液体または固体の
透明膜の膜厚を高精度かつ高速に測定することができ、
さらには３次元形状を測定できるといった効果を奏する
（第３の効果）。Further, according to the present invention, the laser light is made incident on the measuring member within a predetermined angle range. It is possible to measure a transparent body on a cylinder by allowing the laser to enter the interface with a different refractive index (interface between air and transparent body) at a low angle to reflect the laser and measure the outer diameter as a shaded shadow. I am trying. As a result, the thickness of the liquid or solid transparent film formed on the cylinder can be measured with high accuracy and high speed,
Further, it has an effect that a three-dimensional shape can be measured (third effect).
【００５７】また、本発明の３次元形状測定装置は、外
的因子測定手段と環境制御手段を有している。これによ
り、データとして取り込まれたデータから外的因子の影
響を削除補正できる。その結果、温度、湿度、圧力など
の外的因子の影響を削除して高精度の３次元形状の測定
を可能とし、被測定部材に発生した微細な変化を計測で
きるようになるといった効果を奏する（第４の効果）。Further, the three-dimensional shape measuring apparatus of the present invention has an external factor measuring means and an environment control means. As a result, the influence of external factors can be deleted and corrected from the data captured as data. As a result, the effect of external factors such as temperature, humidity, and pressure can be eliminated to enable highly accurate measurement of a three-dimensional shape, and it is possible to measure minute changes occurring in the member to be measured. (Fourth effect).
【図１】本発明の第１の実施の形態に係る３次元形状測
定装置を説明するための機能ブロック図である。FIG. 1 is a functional block diagram for explaining a three-dimensional shape measuring apparatus according to a first embodiment of the present invention.
【図２】第１の実施の外径計測手段における投光部と受
光部、及び被測定部材の位置関係を説明するための配置
図である。FIG. 2 is an arrangement diagram for explaining a positional relationship between a light projecting unit, a light receiving unit, and a member to be measured in the outer diameter measuring unit according to the first embodiment.
【図３】第１の実施形態を用いて３次元形状を計測する
３次元情報計測方法を説明するためのフローチャートで
ある。FIG. 3 is a flow chart for explaining a three-dimensional information measuring method for measuring a three-dimensional shape using the first embodiment.
【図４】主に円柱状の物体の３次元形状及び変形量を測
定する３次元形状測定装置の装置概略図である。FIG. 4 is a schematic view of a three-dimensional shape measuring apparatus that mainly measures the three-dimensional shape and deformation amount of a cylindrical object.
【図５】第１の実施の形態の３次元形状測定装置によっ
て得られた円柱体の３次元情報の出力例（円柱体の３次
元合成イメージ出力例）である。FIG. 5 is an output example of three-dimensional information of a cylindrical body obtained by the three-dimensional shape measuring apparatus according to the first embodiment (an example of outputting a three-dimensional composite image of a cylindrical body).
【図６】図５の円柱体をＹＺ平面で切断した場合の２次
元イメージ出力例である。6 is an example of a two-dimensional image output when the columnar body of FIG. 5 is cut in the YZ plane.
【図７】図５の円柱体をＸＺ平面で切断した場合の２次
元イメージ出力例である。7 is an example of a two-dimensional image output when the columnar body of FIG. 5 is cut in the XZ plane.
【図８】第１の実施の形態の３次元形状測定装置によっ
て得られた円柱体の３次元情報の出力例のグラフであ
る。FIG. 8 is a graph of an output example of three-dimensional information of a cylindrical body obtained by the three-dimensional shape measuring apparatus according to the first embodiment.
【図９】第１の実施の形態の３次元形状測定装置によっ
て得られた円柱体の摩耗測定結果例である。FIG. 9 is an example of wear measurement results of a cylindrical body obtained by the three-dimensional shape measuring apparatus according to the first embodiment.
【図１０】本発明の第２の実施の形態に係る３次元形状
測定装置を説明するための機能ブロック図である。FIG. 10 is a functional block diagram for explaining a three-dimensional shape measuring apparatus according to a second embodiment of the present invention.
【図１１】本発明の第３の実施の形態に係る３次元形状
測定装置を説明するための機能ブロック図である。FIG. 11 is a functional block diagram for explaining a three-dimensional shape measuring apparatus according to a third embodiment of the present invention.
【図１２】本発明の第４の実施の形態に係る３次元形状
測定装置を説明するための機能ブロック図である。FIG. 12 is a functional block diagram for explaining a three-dimensional shape measuring apparatus according to a fourth embodiment of the present invention.
１０…被測定部材 ２０…３次元形状測定装置 ２１…直線移動手段 ２１Ａ…直線移動用駆動モータ ２１Ｂ…直線移動ガイドレール ２１Ｃ…直線移動ステージ ２２…回転手段 ２２２…第１の回転手段 ２２４…第２の回転手段 ２２Ａ…回転モータ ２２Ｂ…駆動部側回転固定治具 ２２Ｃ…自由回転固定治具 ２３…外径計測手段 ２３Ａ…投光部 ２３Ｂ…受光部 ２３Ｃ…レーザ光の照射面 ２４…支持台座 ２５…データ取り込み制御手段 ２５Ａ…表示モニタ ２６…位置制御手段 ２６Ａ…位置制御信号ケーブル ２７…記憶手段 ２８…解析処理手段 ２９…イメージ出力手段 ３０…ＣＰＵ ３１…解析制御手段 ４０…環境制御手段 ５０…外的因子測定手段 10 ... Member to be measured 20 ... Three-dimensional shape measuring device 21 ... Linear moving means 21A ... Drive motor for linear movement 21B ... Linear movement guide rail 21C ... Linear movement stage 22 ... Rotating means 222 ... First rotating means 224 ... Second rotating means 22A ... Rotary motor 22B ... Rotating fixing jig on drive side 22C ... Free rotation fixing jig 23 ... Outer diameter measuring means 23A ... Projector 23B ... Light receiving part 23C ... Laser light irradiation surface 24 ... Support base 25 ... Data acquisition control means 25A ... Display monitor 26. Position control means 26A ... Position control signal cable 27 ... Storage means 28 ... Analysis processing means 29 ... Image output means 30 ... CPU 31 ... Analysis control means 40 ... Environmental control means 50 ... Means for measuring external factors
───────────────────────────────────────────────────── フロントページの続き (58)調査した分野(Int.Cl.7，ＤＢ名) G01B 11/00 - 11/30 ─────────────────────────────────────────────────── ─── Continuation of the front page (58) Fields surveyed (Int.Cl. 7 , DB name) G01B 11/00-11/30
Claims (6)
定装置であって、 一対の投光部と受光部とから構成されてレーザ光を帯状
に所定の範囲に放射して被測定部材に遮光される範囲を
測定することによって非接触状態で当該被測定部材の外
径を測定する外径計測手段と、 前記被測定部材または前記外径計測手段を所定の回転軸
で回転させる回転手段と、 前記被測定部材または前記外径計測手段を所定の軸上で
直線移動させる直線移動手段と、 前記外径計測手段からの信号を取り込んで測定条件を制
御するデータ取り込み制御手段と、 前記回転手段と前記直線移動手段を制御するための位置
制御手段と、 前記データ取り込み制御手段に取り込まれたデータを保
存するための記憶手段と、 前記記憶手段のデータを基に所望の関数によってデータ
処理を行う解析処理手段とを有する３次元形状測定装置
において、 前記データ取り込み制御手段は、 前記被測定部材の変形前の３次元形状を前記外径計測手
段によって計測した測定データを変形前測定データとし
て取り込むと共に、 前記被測定部材と前記外径計測手段の位置関係とを前記
変形前測定データの取り込み時と同一位置関係におい
て、前記被測定部材の変形後の３次元形状を前記外径計
測手段によって計測した測定データを変形後測定データ
として取り込み、 前記記憶手段は、 前記外径計測手段と前記被測定部材の位置関係と前記変
形前測定データとを関連付けて被測定部材の変形前の３
次元形状データとして記憶すると共に、 前記外径計測手段と前記被測定部材の位置関係と前記変
形後測定データとを関連付けて被測定部材の変形後の３
次元形状データとして記憶し、 前記解析処理手段は、前記記憶手段に記憶された前記被
測定部材の変形前と変形後の３次元形状データを基に３
次元形状の変形量を算出し、 前記解析処理手段の解析結果を受けて画像イメージとし
て出力するイメージ出力手段を備えた ことを特徴とする
３次元形状測定装置。1. A three-dimensional shape measuring apparatus for measuring a three-dimensional shape of an object, comprising a pair of a light projecting section and a light receiving section, and radiating a laser beam in a band in a predetermined range. An outer diameter measuring means for measuring the outer diameter of the member to be measured in a non-contact state by measuring a range shielded from light, and a rotating means for rotating the member to be measured or the outer diameter measuring means on a predetermined rotating shaft. A linear moving means for linearly moving the member to be measured or the outer diameter measuring means on a predetermined axis; a data fetching control means for fetching a signal from the outer diameter measuring means to control measurement conditions; Position control means for controlling the means and the linear movement means, a storage means for storing the data captured by the data capture control means, and a data storage device for storing a data stored in the data capture control means by a desired function. Three-dimensional shape measuring device having analysis processing means for performing data processing
In the data acquisition control means, the three-dimensional shape of the member to be measured before deformation is measured by the outer diameter measuring hand.
The measurement data measured by the step is used as the measurement data before deformation.
And the positional relationship between the member to be measured and the outer diameter measuring means is described above.
The same positional relationship as when the measurement data before deformation was taken
The deformed three-dimensional shape of the member to be measured with the outer diameter meter.
Measured data measured by measuring means is transformed after being transformed
The storage means stores the positional relationship between the outer diameter measuring means and the member to be measured and the change.
3 before the deformation of the measured member by associating with the pre-measurement data
The data is stored as three-dimensional shape data, and the positional relationship between the outer diameter measuring means and the measured member and the change
Correlation with post-form measurement data
The data is stored as three-dimensional shape data, and the analysis processing means stores the object stored in the storage means.
3 based on the 3D shape data of the measuring member before and after deformation
The deformation amount of the three-dimensional shape is calculated, and the result of analysis by the analysis processing means is received to form an image.
A three-dimensional shape measuring device characterized in that it is provided with an image output means for outputting .
であって、外的影響因子を測定するための外的因子測定
手段と、前記データ取り込み制御手段に取り込まれたデ
ータを基に前記外的因子測定手段によって測定された前
記外的影響因子を削除補正するための環境制御手段とを
有することを特徴とする請求項１に記載の３次元形状測
定装置。2. A three-dimensional shape measuring apparatus for measuring a three-dimensional shape, the external factor measuring means for measuring an external influence factor, and the data fetched by the data fetching control means. Before measured by external factor measurement means
3-dimensional shape measuring apparatus according to claim 1, characterized in that it comprises a climate control means for deleting correct serial external influencing factors.
に入射させ、屈折率の異なる界面に低角で前記レーザ光
を進入させることによって前記レーザ光を反射させ、遮
光された影として外径計測することで、円柱上の透明体
を測定する手段を有することを特徴とする請求項１また
は２に記載の３次元形状測定装置。3. The laser light is made incident on a measurement substrate in a predetermined angle range, and the laser light is made to enter an interface having a different refractive index at a low angle.
The laser light is reflected by
The three-dimensional shape measuring apparatus according to claim 1 or 2, further comprising a unit that measures a transparent body on a cylinder by measuring an outer diameter as a shadow that is illuminated .
測方法であって、被測定部材と計測装置の位置関係を変
更しながら複数の所定の位置の外径を測定する第１の計
測工程と、前記被測定部材の３次元形状データを前記計
測装置と前記被測定部材との位置関係と測定データとを
関連づけて記憶する第１の記憶工程と、前記第１の計測
工程における前記被測定部材と前記計測装置の位置関係
と同一位置関係において複数の所定の位置の外径を測定
する第２の計測工程と、前記第２の計測工程で計測され
た前記被測定部材の３次元形状データを前記計測装置と
前記被測定部材との位置関係と測定データとを関連づけ
て記憶する第２の記憶工程と、前記第１の記憶工程で記
憶された前記被測定部材の３次元形状と前記第２の記憶
工程で記憶された前記被測定部材の３次元形状の外径の
差を基に３次元状態の変化を算出する変形算出工程と、
前記変形算出工程で得られた計算値と測定位置を基に３
次元的な情報を生成してイメージとして出力する３次元
情報処理工程とを含むことを特徴とする３次元情報計測
方法。4. A three-dimensional information measuring method for measuring three-dimensional information of an object, the first measurement measuring outer diameters at a plurality of predetermined positions while changing a positional relationship between a member to be measured and a measuring device. A step, a first storage step of storing three-dimensional shape data of the member to be measured in association with a positional relationship between the measuring device and the member to be measured, and the measurement data; and a step of storing the object in the first measuring step. A second measuring step of measuring outer diameters at a plurality of predetermined positions in the same positional relationship as the positional relationship between the measuring member and the measuring device, and the three-dimensional shape of the measured member measured in the second measuring step. A second storage step of storing data in association with the measurement data and the positional relationship between the measuring device and the member to be measured, and the three-dimensional shape of the member to be measured stored in the first storage step, and Memorized in the second memory step Serial and deformation calculation step of calculating a change in the three-dimensional state on the basis of the difference between the outer diameter of the three-dimensional shape of the object body,
3 based on the calculated values and measurement positions obtained in the deformation calculation step
And a three-dimensional information processing step of generating three-dimensional information and outputting it as an image.
薄膜評価測定方法であって、被測定部材と計測装置の位
置関係を変更しながら複数の所定の位置の外径を測定す
る第１の計測工程と、前記被測定部材の３次元形状デー
タを前記計測装置と前記被測定部材との位置関係と測定
データとを関連づけて記憶する第１の記憶工程と、前記
第１の計測工程における前記被測定部材と前記計測装置
の位置関係と同一位置関係において複数の所定の位置の
外径を測定する第２の計測工程と、前記第２の計測工程
で計測された前記被測定部材の３次元形状データを前記
計測装置と前記被測定部材との位置関係と測定データと
を関連づけて記憶する第２の記憶工程と、前記第１の記
憶工程で記憶された前記被測定部材の３次元形状と前記
第２の記憶工程で記憶された前記被測定部材の３次元形
状の外径の差を基に３次元状態の変化を算出する変形算
出工程と、前記変形算出工程で得られた計算値と測定位
置を基に３次元的な情報を生成してイメージとして出力
する３次元情報処理工程と、測定時に外的影響因子を測
定する第１の外的影響因子計測工程と、前記第１の記憶
工程と前記第２の記憶工程で記憶された測定データに対
して外的影響因子を削除する外的影響因子削除工程とを
含むことを特徴とする薄膜評価測定方法。5. A thin film evaluation measuring method for measuring a thin film formed on a three-dimensional object, which measures outer diameters at a plurality of predetermined positions while changing the positional relationship between a member to be measured and a measuring device. No. 1 measurement step, a first storage step of storing three-dimensional shape data of the measured member in association with the positional relationship between the measuring device and the measured member, and measurement data; and the first measurement step. In the second measurement step of measuring outer diameters at a plurality of predetermined positions in the same positional relationship as the positional relationship between the member to be measured and the measuring device in, and the member to be measured measured in the second measuring step. A second storage step of storing the three-dimensional shape data in association with the measurement data and the positional relationship between the measuring device and the member to be measured, and the three-dimensional shape of the member to be stored stored in the first storage step. In the shape and the second memory step A deformation calculation step of calculating a change in a three-dimensional state based on the stored difference in the outer diameters of the three-dimensional shape of the measured member, and a three-dimensional shape based on the calculated value and the measurement position obtained in the deformation calculation step. Three-dimensional information processing step of generating specific information and outputting it as an image, a first external influence factor measuring step of measuring an external influence factor at the time of measurement, the first storing step and the second storing An external influence factor deleting step of deleting an external influence factor from the measurement data stored in the step, the thin film evaluation measuring method.
薄膜評価測定方法であって、形成前の３次元被測定部材
と計測装置の位置関係を変更しながら、所望の位置の外
径を測定する第１の計測工程と、前記形成前の３次元被
測定部材の形状データを記憶する第１の記憶工程と、薄
膜を形成した後に外径計測を行う第２の計測工程と、形
成後の３次元被測定部材の形状データを記憶手段に記憶
させる第２の記憶工程と、前記形成前の３次元被測定部
材の外径形状と前記形成後の３次元被測定部材の外径形
状の差を基に、作製した薄膜の膜厚を算出する膜厚算出
工程とを含むことを特徴とする薄膜評価測定方法。6. A thin film evaluation measuring method for measuring a thin film formed on a three-dimensional object, wherein the outer diameter of a desired position is changed while changing the positional relationship between a three-dimensional measured member and a measuring device before formation. A first measuring step of measuring the outer diameter, a first storing step of storing the shape data of the three-dimensional member to be measured before formation, a second measuring step of performing outer diameter measurement after forming a thin film, and forming A second storage step of storing the shape data of the subsequent three-dimensional measured member in the storage means, the outer diameter shape of the three-dimensional measured member before formation and the outer diameter shape of the three-dimensional measured member after formation. And a film thickness calculating step of calculating the film thickness of the produced thin film on the basis of the difference.
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| JP2000345436A JP3534065B2 (en) | 2000-11-13 | 2000-11-13 | Three-dimensional shape measuring device, three-dimensional information measuring method and thin film evaluation measuring method |
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| JP2000345436A JP3534065B2 (en) | 2000-11-13 | 2000-11-13 | Three-dimensional shape measuring device, three-dimensional information measuring method and thin film evaluation measuring method |
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| CN105387812A (en) * | 2015-10-26 | 2016-03-09 | 黄石市润士能源科技有限公司 | Measuring gauge electronization method and device of oil well pipe |
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| US7777900B2 (en) * | 2007-10-23 | 2010-08-17 | Gii Acquisition, Llc | Method and system for optically inspecting parts |
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|---|---|---|---|---|
| CN105387812A (en) * | 2015-10-26 | 2016-03-09 | 黄石市润士能源科技有限公司 | Measuring gauge electronization method and device of oil well pipe |
| CN106382893A (en) * | 2016-11-30 | 2017-02-08 | 佛山市海科知识产权交易有限公司 | Round log diameter detection device and method |
| CN109877578A (en) * | 2019-01-10 | 2019-06-14 | 四川绵阳鼎鑫智能装备有限公司 | A kind of production method of tracing to the source of automobile catalytic device |
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