JP3536166B2 - Surface inspection method and surface inspection device - Google Patents

Description

Detailed Description of the Invention

[0001]

The present invention relates are those relating <br/> the surface inspection method and a surface inspection equipment for inspecting the slope of the surface and pores of the test subject.

[0002]

2. Description of the Related Art When a small-sized columnar body or a small-sized body such as a cylindrical body is manufactured, it is inspected whether the inner or outer surface of the small-sized body has a defect such as a flaw, dirt, or color unevenness, and the small-sized body is checked. We are trying to reduce the defect rate. Such inspection of the inner and outer surfaces is carried out by supporting the small parts as the object to be inspected with appropriate means and rotating them around the axis, and visually or taking a picture of the surface of the rotating small parts, or by inspecting the object. The quality of the surface of the small parts is inspected based on the visual observation result or the photographing result such as photographing by rotating the camera without rotating.
On the other hand, an article side surface image pickup device for inspecting the side surface of an article by using a camera is disclosed in Japanese Patent Laid-Open No. 8-29146.

[0003]

By the way, according to the above-mentioned conventional inspection method, the small parts to be inspected or the camera have to be rotated, a mechanism for rotating them is required, and the inspection cost becomes high. In addition, since the inspection time is lengthened because the small component is rotated at least once, slippage in rotation may cause inspection omission.

On the other hand, the article side surface image pickup device disclosed in Japanese Unexamined Patent Publication No. 8-29146 is equipped with a single image pickup means.
Although the side surface of the article can be imaged with the article fixed, there is a problem that, for example, when the article has a hole, the inclination of the hole cannot be accurately inspected. The present invention is the aim of solving the above problems, and an object thereof is to provide a surface and a surface inspection method the slope of the hole can be accurately inspected speed and surface inspection equipment of the device under test.

[0005]

A surface inspection method according to a first aspect of the present invention is a method for optically inspecting a surface of an object to be inspected, wherein a large number of light emitters and light emitted from the light emitters are incident. Of the light beam of the
It consists of a number of formed grooves and a light-shielding material arranged in each of the grooves.
A large number of pipes that are connected to the axis of the cylinder.
A light beam generator configured to be inclined at a predetermined angle, a light beam emitted from the light beam generator to the inspected object, and an annular prism to which the reflected light is incident, And a photographing means which should enter the light emitted from the prism, and the prism is the inside of a cylinder made of a translucent material.
Has a truncated cone-shaped space opened on both axial end faces of the cylinder,
The outer peripheral surface in the inclination direction different from the inclination direction of the inner peripheral surface of the void
A, characterized by inspecting the surface of the object to be inspected by an image which the imaging means has captured.

[0006] surface inspection method according to the second invention is a method for inspecting optically by imaging the surface of the object to be inspected, the light emitting
And body, emits a number of light beams emitted light is incident of the luminous body, and an inner cylinder made of a translucent material, the outer periphery of the inner cylinder
The outer cylinder made of translucent material, which is concentrically arranged on the side
It straddles the inner cylinder and the outer cylinder, and the outer peripheral edge is
It is descending toward the outer cylinder and is separated by a predetermined distance.
It is equipped with a large number of annular light-shielding plates that are stacked in the axial direction.
Formed light beam generator, a light beam emitted from the light beam generator to the object to be inspected, and an annular prism to which the reflected light should enter, and the light emitted from the prism to enter The prism should be transparent.
Inside the cylinder made of light material, opened on both end faces of the cylinder
It has a truncated cone-shaped void and is different from the direction of inclination of the inner peripheral surface of the void.
Has an outer peripheral surface in the inclined direction, and is photographed by the photographing means.
It is characterized in that the surface of the object to be inspected is inspected by an image .

A surface inspection apparatus according to a third aspect of the present invention is a light emitting body.
The light beam that emits a large number of light beams
Beam generator and the light beam emitted from the light beam generator.
A ring to irradiate the object to be inspected and to let the reflected light enter
Of the prism and the image to which the light emitted from the prism should enter
It is equipped with shadowing means, and the surface of the object to be inspected is photographed and optically detected.
In the surface inspection device for inspecting, the light beam generator is
A large number of grooves radially formed in a cylinder made of a light shielding material,
Equipped with a number of pipes made of light-shielding material arranged in each groove
The pipe is inclined at a predetermined angle with respect to the axis of the cylinder.
The prism is a circle made of transparent material.
Inside the pillar, a truncated cone-shaped space with openings on both end faces of the cylinder.
Has an inclination different from that of the inner peripheral surface of the void.
It has an outer peripheral surface in the direction.

The surface inspection apparatus according to the fourth invention is
A light beam that emits a large number of light beams upon receipt of emitted light
The light beam emitted from the generator and the light beam generator
A circular ring that irradiates the object to be inspected and that reflected light should enter.
Shooting with a prism and incident light from the prism
It is equipped with a means for optically inspecting the surface of the object to be inspected.
In the surface inspection device, the light beam generator is transparent.
The same concern about the inner cylinder made of light material and the outer peripheral side of the inner cylinder
The outer cylinder made of translucent material and the inner cylinder
And straddles the outer cylinder, and the outer peripheral edge becomes the outer cylinder.
It is descending toward the front, and it is stacked in the axial direction at a predetermined interval.
It is composed of a number of layered annular light shields.
The prism is a circle made of a light-transmissive material.
It has a frustoconical space that opens on both end faces of the pillar,
The outer peripheral surface in the inclination direction different from the inclination direction of the inner peripheral surface of the void
It is characterized by having.

The surface inspection apparatus according to the fifth invention is a columnar body.
For the device that optically inspects the surface of the inspected object
And the light emitted from the light emitter is incident on the light beam.
And a light beam generator that emits
An annular prism to which the reflected light from the inspection object should enter,
A reflecting mirror to project the light emitted from the prism, and the reflection
And a photographing means for photographing an image projected on a mirror,
The light beam generator and the prism are arranged vertically or horizontally.
It is characterized by being installed in parallel.

In the first invention and the third invention, they are provided radially.
Multiple pipes arranged in each of the plurality of pipe arrangement grooves
When the light emitted from the light emitter enters from one end of the
A large number of light beams with a predetermined inclination angle are emitted from the other end of the.
Many emitted light beams are directed toward the axis of the light beam generator.
The paddle is focused, and the surface of the object to be inspected is irradiated and reflected. Cover
A truncated cone shape where the light reflected by the inspection object is inside the prism
When incident on the inner surface forming the void,
Reflected on the peripheral surface, projected on the inner peripheral surface, and totally reflected on the inner peripheral surface
Then, the light is emitted in an annular state from the axial end surface of the prism. light
The surface of the hole of the DUT irradiated with the beam is parallel to the axis.
The reflected light beam reflected by the inner surface
After entering at one angle and reflecting on the outer peripheral surface of the prism,
It is projected on the peripheral surface and totally reflected. The totally reflected light beam is
Emitting from the end face of the rhythm axis, shooting towards the axis of the prism
It is incident on the shadow means. Of the hole of the DUT irradiated with the light beam
If the face is not parallel to the axis, the reflected light reflected from the face of the hole
Beam is incident on the inner surface of the prism at an angle different from the first angle
However, the light is reflected on the outer peripheral surface of the prism and is projected on the inner peripheral surface,
reflect. The totally reflected light beam is from the axial end face of the prism
Do not enter the shooting means without going to the axis of the prism.
Therefore, the amount of light at the predetermined position of the axis decreases. this
The difference in the incident angle of the light that enters the prism.
It Also, irradiate a large number of light beams on the surface of the hole of the DUT.
Therefore, irregular reflection does not occur at the irradiation position of each light beam. This
As a result, the object to be inspected is based on the amount of light incident on the imaging means.
The inclination of the hole can be inspected instantly with high accuracy.

In the second and fourth inventions, the outer peripheral side is lowered.
A ring-shaped shading plate that is
When the light emitted from the light emitter enters from the outer peripheral side of the light plate, the light shield plate
A large number of light beams are emitted from the inner peripheral side of. Many emitted
The light beam of is focused toward the axis of the light beam generator,
The surface of the inspection object is irradiated and reflected. Reflected by the object
Light creates a frustoconical void inside the prism
When incident on the inner peripheral surface, the light is reflected on the outer peripheral surface.
Then, it is projected on the inner surface and totally reflected on the inner surface, and the prism
The light is emitted in an annular state from the end surface of the shaft. Irradiate a light beam
Reflected on the inner surface if the surface of the hole of the inspected object is parallel to the axis
The reflected light beam is incident on the inner surface of the prism at the first angle
Then, after reflecting on the outer peripheral surface of the prism, it is projected on the inner peripheral surface.
And totally reflected. The totally reflected light beam is at the axial end of the prism
Exits from the surface and enters the shooting means toward the prism axis.
To do. The surface of the hole of the DUT irradiated with the light beam is not aligned with the axis.
When parallel, the reflected light beam reflected by the hole surface
Incident on the inner surface of the prism at an angle different from the first angle,
Is reflected on the outer peripheral surface of the, and projected on the inner peripheral surface to be totally reflected. all
The reflected light beam is emitted from the axial end face of the prism and
Since it does not enter the shooting means without going to the axis of the
The amount of light at the predetermined position of is decreased. This will
You can see the difference in the incident angle of the light that is incident on the prism. Also, many
Since the light beam of (1) is applied to the surface of the hole of the inspection object , irregular reflection does not occur at the irradiation position of each light beam. This allows you to shoot
Based on the amount of light incident on the means, the inclination of the hole of the inspection object can be inspected instantaneously with high precision.

In the fifth invention, the light emitted from the light emitter is a light beam.
A large number of light beams are emitted from the light beam generator when they enter the generator.
Emit. These light beams irradiate the object to be inspected
The reflected light beam is incident on the prism and
After being reflected on the peripheral surface, it is totally reflected on the inner peripheral surface and projected on the reflecting mirror
Then, an image of the surface of the object to be inspected is obtained on the reflecting mirror. Subject
If the surface of the inspection body is flawed or dirty, or if the outer surface is tilted
In some cases, all light incident on the prism is projected on the reflecting mirror
The brightness of the image projected on the reflector is partially reduced.
To do. The image projected on the reflecting mirror is photographed by the photographing means.
It In addition, whether a large number of light beams are applied to the surface of the inspection object
Therefore, irregular reflection does not occur at the irradiation position of each light beam. By this
In addition, the inclination of the surface and side of the cylinder can be inspected instantly with high accuracy.
Wear.

[0013]

[0014]

[0015]

[0016]

[0017]

[0018]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described in detail below with reference to the drawings showing an embodiment of the present invention. FIG. 1 is a schematic configuration diagram showing a surface inspection apparatus according to the present invention together with an object to be inspected. A high-sensitivity CCD (Charge Coupled Device) camera 1 serving as a photographing means is arranged with its light receiving surface (lens side) facing downward. An annular cone prism 2 is arranged below the CCD camera 1. The cone prism 2 has a cone-shaped cavity 2a formed therein with a smaller diameter toward the upper side, and the outer peripheral surface 2b of the cone prism 2 is mirror-finished to reflect light. Bottom 2c of cone prism 2
The outer peripheral surface 2b and the outer peripheral surface 2b have a predetermined angle, and the outer diameter is formed to be larger toward the upper side. Further, the inclination direction of the inner peripheral surface 2d and the inclination direction of the outer peripheral surface 2b are opposite. The object 3 to be inspected is located below the cone prism 2 with the axis of the hole 3a oriented in the same direction as the axis of the cone prism 2. This inspected body 3 shows a transitional state in which it is ejected at high speed in the arrow direction by an air shooter (not shown), for example.

At the lateral position of the object 3 to be inspected, it is detected that the hole 3a of the object 3 to be inspected enters the field of view of the CCD camera 1. For example, the object 3 to be inspected is sandwiched between a light emitting part and a light receiving part. An inspected object detection switch 4 including a photo switch facing each other or a proximity switch for detecting the approach of the inspected object 3 is provided. Below the cone prism 2 and below the pass area of the object 3 to be inspected, an annular light beam generator 5 whose center is located on the axis of the cone prism 2 is arranged. The optical center axis φ of the CCD camera 1 is aligned with the centers of the cone prism 2 and the light beam generator 5. An annular light emitter 6 is arranged on the outer peripheral side of the light beam generator 5. The light emission control circuit 7 outputs a light emission control signal when the inspection object detection switch 4 detects the inspection object 3, that is, when the inspection object detection switch 4 is a photoswitch and the emitted light is blocked. It is supposed to do.

This light emission control signal is given to the light emitter 6.
The light-emitting body 6 emits light instantly when the light-emission control signal is given. Then, the arrangement position of the inspection object detection switch 4 and the control operation of the light emission control circuit 7 are specified so that the timing at which the light emitting body 6 emits light coincides with the inspection object 3 entering the field of view of the CCD camera 1. I am doing it. The image data output by the CCD camera 1 is input to the image processing circuit 8.

The image processing circuit 8 is adapted to store the reference image data, which is pre-photographed by the CCD camera 1, of the non-tilted hole 3a formed in the inspection object 3 in a storage unit (not shown). , Read the reference image data and CCD
The image data input from the camera 1 and the read reference image data are compared. Then, as a result of the comparison, if the difference is large, that is, if it is determined that the inspection object 3 is defective due to the inclination of the hole, the image processing circuit 8 outputs a selection control signal to the selection mechanism 9.
The sorting mechanism 9 sends out the inspected body 3 which has been determined to be defective to a defective product storage unit (not shown). The image signal output from the image processing circuit 8 is input to the monitor television 10 so that the shooting content of the CCD camera 1 can be monitored.

FIG. 2 is a perspective view of the light beam generator 5.
The annular tubular portion 5a is made of a light-shielding metal or synthetic resin. The axial length dimension on the inner peripheral side of the cylindrical body portion 5a is longer than the axial length dimension on the outer peripheral side, and the upper shaft end surface 5b of the cylindrical body portion 5a is inclined at a predetermined angle with respect to the lower shaft end surface 5c. It is an inclined surface that has an angle and descends toward the outer peripheral side.

A large number of pipe arrangement grooves 5d having an appropriate length and width, which are open at the upper side, are spaced apart from each other in the circumferential direction by an appropriate length in the cylindrical portion 5a,
It is formed radially. The bottom surface 5e of the pipe arrangement groove 5d is a high inclined surface toward the inner peripheral side of the cylindrical body portion 5a, and is formed parallel to the upper shaft end surface 5b. Pipe arrangement groove
Each of the 5d is made of light shielding material such as stainless steel,
A large number of pipes P made of copper, resin, or the like having a small diameter and a size of about 2 mm are arranged. One end of each of the pipes P is sized to match the inner peripheral surface of the tubular portion 5a, and the other end is sized to match the outer circumferential surface of the tubular portion 5a. For each pipe P, an appropriate adhesive is used to separate the pipes P from each other and the pipe arrangement groove 5d.
It is stuck inside. The light that has entered each of the pipes P is emitted as a large number of light beams from the pipes P, and each of the emitted light beams is directed toward the axis of the light beam generator 5 and the cylindrical body portion 5a. The light is focused at the upper position.

Next, a method of inspecting the inclination of the hole of the object to be inspected by the surface inspection apparatus having the above-mentioned structure will be described. First, the principle of the invention will be described with reference to FIG. Now, when the light beam BM indicated by the solid line is projected on the surface A parallel to the optical axis φ, the light beam BM reflected by the surface A enters the inner peripheral surface 2d of the cone prism 2 as indicated by the solid line, and the outer peripheral surface 2b is reflected at a point P ₁ and the reflected light is projected to a point P ₁₁ on the inner peripheral surface 2d and totally reflected to be emitted from the upper axial end surface of the cone prism 2 to enter the light receiving portion of the CCD camera 1. The CCD camera 1 receives a large amount of light. On the other hand, when the light beam BM is projected on the surface A ′ that is not parallel to the optical axis φ, the light beam BM reflected by the surface A ′ is incident on the inner peripheral surface 2d of the cone prism 2 as shown by the broken line, and the outer peripheral surface
It is reflected at a point P ₂ lower than the point P ₁ position of 2b, and the reflected light is projected to a point P ₂₁ lower than the point P ₁₁ of the inner peripheral surface 2d and totally reflected, and from the upper axial end surface of the cone prism 2 to the CCD. The light is emitted in a direction that does not enter the camera 1. As a result, the CCD camera 1 cannot receive a large amount of light.

The amount of light received by the CCD camera 1 changes depending on the inclination of the reflecting surface, and the degree of inclination of the reflecting surface can be known from the brightness of the image taken by the CCD camera 1. Now, when inspecting the inclination of the hole of the inspection object 3, CC
D With the camera 1 in the shooting operation state, the light emission control circuit 7
Is ready for operation. Then, the inspected body 3 is made to pop out in the arrow direction by an air shooter (not shown), and is passed under the cone prism 2 at a high speed. When the hole 3a of the inspection object 3 enters the field of view of the CCD camera 1, the inspection object detection switch 4 detects the inspection object 3. That is, the light emitted from the light emitting portion of the inspection object detection switch 4 is blocked and the detection signal is input to the light emission control circuit 7.

Then, the light emission control circuit 7 outputs a light emission control signal and supplies the light emission control signal to the light emitter 6 to cause the light emitter 6 to emit light instantaneously. The emitted light by light emission passes through each pipe P of the light beam generator 5 and is emitted as a large number of light beams. Then, a large number of light beams irradiate the hole 3a of the device under test 3 located at the center of the cone prism 2. The irradiated light beams are reflected at different positions on the surface of the hole 3a of the inspection object 3, the reflected light beam is incident on the cone prism 2, and then is reflected on the inclined outer peripheral surface 2b, and the reflected light is a cone. It is projected on the inclined inner peripheral surface 2d of the prism 2 and totally reflected. When the surface of the hole 3a of the inspection object 3 is parallel to the optical axis φ and has no inclination, the totally reflected light is emitted from the upper axial end surface of the cone prism 2 and is incident on the light receiving portion of the CCD camera 1. To do.

However, when the surface of the hole 3a is not parallel to the optical axis φ and is inclined, the light emitted from the upper axial end surface of the cone prism 2 does not enter the CCD camera 1. Since the surface of the hole 3a of the inspection object 3 is irradiated with a large number of light beams in this way, diffuse reflection does not occur at the irradiation position of each light beam, and the CCD camera 1 takes an image that is not affected by the irregular reflection and inspects it. The accuracy can be increased.

In this way, after the reflected light beam reflected on the surface of the hole 3a of the object 3 to be inspected is reflected on the outer peripheral surface 2d of the cone prism 2 and is projected on the inner peripheral surface 2d to be totally reflected,
As shown in FIG. 4, the peripheral surface of the hole 3a becomes an image developed in an annular shape. When the hole 3a is inclined, the brightness of the position corresponding to that portion is lowered. In FIG. 4, 3U indicates the upper end position of the hole 3a of the device under test 3, and 3D indicates the lower end position. Then, the CCD camera 1 captures an image in which the hole 3a of the inspection object 3 shown in FIG. The image data of the image captured by the CCD camera 1 in this way is input to the image processing circuit 8, and the image processing circuit 8 reads the reference image data stored in advance in a memory (not shown) and inputs it from the CCD camera 1. When it is determined that the inclination of the surface of the hole 3a is equal to or larger than a predetermined value, the image processing circuit 8 outputs a selection drive signal to drive the selection mechanism 9.

Then, the sorting mechanism 9 carries out a sorting operation for sending the inspected body 3 just photographed to the defective product storage section.
On the other hand, when the image processing circuit 8 determines that the hole 3a has no inclination, the sorting mechanism 9 is not driven and the inspected object 3 just photographed is sent to the non-defective product reservoir. In this way, it is possible to determine whether or not the inclination of the hole 3a of the inspection object 3 is a predetermined value or more without rotating the inspection object 3, and it is possible to instantaneously inspect the inclination of the hole of the inspection object 3. You can Further, since a mechanism for positioning and rotating the inspection object 3 is not required, the inclination of the hole can be inspected at low cost, and the inspection efficiency can be significantly improved. Further, since the diffused reflection of the light projected on the inspection object does not occur, the inspection object can be inspected with high accuracy. Furthermore, since the inspection object 3 can be inspected in a non-contact manner, there is no possibility that the inspection object 3 will be flawed by the inspection.

FIG. 5 shows the surface inspection apparatus according to the present invention.
It is a typical block diagram of the surface inspection apparatus which showed the state which inspects the surface of the flat cylindrical test object with the test object.
The inspected body 3 is configured to fall above the cone prism 2 while being guided by a guide cylinder 12 having a longitudinal axis. Below the guide tube 12, a reflecting mirror 13 having a hole 13a through which the device under test 3 can pass is arranged at an inclination angle of about 45 °. A CCD camera 1 for taking an image projected on the reflecting mirror is arranged on the side facing the reflecting mirror 13.

The object 3 to be inspected that has passed through the hole 13a of the reflecting mirror 13 is configured to drop through the center of the cone prism 2 and the light beam generator 5. Below the cone prism 2, an inspection object detection switch 4 for detecting that the inspection object 3 has entered the field of view of the CCD camera 1 is arranged.
The object 3 to be inspected, which has dropped through the light beam generator 5, falls into the sorting device 11. The sorting device 11 is configured to perform a sorting operation according to a sorting control signal output from the image processing circuit 8. The image processing circuit 8 is free from flaws and stains, and the reference image data obtained by photographing the inspected object whose side surface is parallel to the axis with the CCD camera 1 is stored in a memory (not shown). The other configuration is similar to that of the surface inspection apparatus shown in FIG. 1, and the same components are designated by the same reference numerals.

Next, a method for inspecting the outer surface of the object to be inspected by this surface inspection apparatus will be described. When the object 3 to be inspected is supplied to the upper end opening of the guide tube 12, the object 3 to be inspected is guided by the guide tube 12 and drops in the axial direction of the object 3 to be inspected. Then, when the inspection object 3 falls through the center of the reflecting mirror 13 and the cone prism 2 and is positioned above the light beam generator 5, that is, when it enters the photographing field of view of the CCD camera 1, the inspection object detection switch The light emitted from the light emitting section 4a of No. 4 is blocked, and the detection signal of the inspection object detection switch 4 disappears instantaneously. Then, the light emission control circuit 7 outputs a light emission control signal and supplies the light emission control signal to the light emitting body 6 to cause the light emitting body 6 to instantaneously emit light. Light emitted from the light-emitting body 6 due to light emission enters from the outer peripheral side of the light beam generator 5 and emits a large number of light beams from the inner peripheral side. These light beams illuminate the outer surface of the inspection object 3. Then, the reflected light beam enters the inner peripheral surface 2d of the cone prism 2 and is reflected by the outer peripheral surface 2b. The reflected light beam is projected on the inner peripheral surface 2d and totally reflected. Then, the totally reflected light beam is emitted from the upper axial end surface of the cone prism 2 and projected on the reflecting mirror 13.

When the reflected light beam reflected on the surface of the object 3 to be inspected in this way is reflected on the outer peripheral surface 2b of the cone prism 2 and then projected on the inner peripheral surface 2d to be totally reflected, the object 3 to be inspected.
The image shown in FIG. 6 in which the outer peripheral surface of the mirror is expanded into an annular shape
Projected on 13. Then, the CCD camera 1 instantaneously captures the projected annular image. Therefore, the inspection object 3
If there is a flaw or a dirty portion on the side surface of, the amount of reflected light of the light beam projected at that position will decrease. Further, when the side surface is not parallel to the axis and is inclined, the direction of the light beam emitted from the cone prism 2 is changed and the light beam projected at that position is no longer projected on the reflecting mirror 13, as described above. As shown in FIG. 6, the image captured by the CCD camera 1 is in a state where the brightness of the image portion corresponding to the flaw A, the stain B, and the position where the side surface is inclined R is lowered as shown in FIG.

Since a large number of light beams are applied to the surface of the object 3 to be inspected in this way, diffuse reflection does not occur at the irradiation position of each light beam, and the CCD camera 1 captures an image not affected by diffuse reflection. As a result, the inspection accuracy of the inspection object 3 is improved. The image data of the image thus captured by the CCD camera 1 is input to the image processing circuit 8, and the image processing circuit 8 reads the reference image data stored in advance in the memory, and the read reference image data and the CCD camera 1 are read. If the result of comparison is that there is a flaw, stain, or inclination on the side surface, a sorting drive signal is output to the sorting device 11. Then, the sorting device 11 performs a sorting operation so as to discharge the DUT 3 that has fallen into it to the defective product outlet 11b side. In addition, the inspection object 3 has no flaws or stains,
When the side surface is parallel to the axis and is not inclined, there is no difference from the reference image data read from the memory, and the image processing circuit 8 does not output the selection drive signal. Therefore, the sorting device 11 causes the inspection object 3 that has fallen into it to be a non-defective product outlet 11a.
Perform the sorting operation to discharge to the side.

In this way, the outer surface of the inspection object 3 can be inspected without rotating it. Further, a mechanism for positioning and rotating the object 3 to be inspected is not required, the inspection can be performed at low cost, and the use of a large number of light beams makes it possible to improve the inspection accuracy without being affected by irregular reflection. Further, since the inspection object can be inspected in a non-contact manner, there is no possibility that the inspection object will be damaged or soiled.

FIG. 7 is a sectional view showing another embodiment of the light beam generator 5, and FIG. 8 is a perspective view of a light shielding plate. In the light beam generator 5, an inner cylinder 5h made of a transparent plastic material having a light-transmitting property and an outer cylinder 5i are concentrically arranged. The length dimension of the inner cylinder 5h is selected to be longer than the length of the outer cylinder 5i. An annular light-shielding plate 5j made of a metal plate having a light-shielding property is disposed between the inner cylinder 5h and the outer cylinder 5i, and a large number of them are stacked with a proper distance in the axial direction. As shown in FIG. 8, each of the light shielding plates 5j is formed in a disc spring shape having an inclined surface descending in the outer peripheral direction.
The inner peripheral edge of each shading plate 5j is the inner cylinder 5h, and the outer peripheral edge is the outer cylinder.
It is fixed to 5i by an appropriate means such as an adhesive.

Therefore, when light is made to enter from the peripheral surface of the outer cylinder in the direction indicated by the arrow, it is separated by a large number of light shielding plates 5j, and a large number of light beams parallel to the light shielding plate 5j are emitted from the inner cylinder 5h. It And the emitted light beam is an inner cylinder
It can be focused on the axis of 5h. Therefore, even if this light beam generator 5 is used, it is possible to irradiate a large number of light beams onto the surface of the object to be inspected as described above.

FIG. 9 is a schematic view showing another embodiment of the light beam generator 5. It is fixed to an appropriate position on a rotating shaft 20a of a motor 20 that can rotate in the forward and reverse directions, and one end of a screw shaft 22 screwed into a screw cylinder body 21 having a thread groove on its inner peripheral surface is attached. . At the other end of the screw shaft 22, the shaft center X of the screw shaft 22 and
The laser beam emitting direction is set at an appropriate angle, for example, 45 °, and the laser beam emitting side faces upward.
23 is installed. The motor 20 has a guide member on its side surface.
24 is provided, and this guide member 24 is engaged with a guide groove 25 provided in parallel with the screw shaft 22, so that when the motor 20 is driven, the motor 20 moves up and down along the guide groove 25. Is configured.

The light beam generator 5 constructed in this way is
When the semiconductor laser 23 is driven, a laser beam LB is emitted. When the motor 20 is driven, the semiconductor laser 23 rotates via the screw shaft 22, and the laser beam LB is projected radially. Further, the rotation of the screw shaft 22 causes the motor 20 to move upward, which causes the semiconductor laser 23 to move upward, and the projection position of the laser beam LB moves upward. Then, when the semiconductor laser 23 moves upward by a predetermined refusal, when the motor 20 is rotated in the reverse direction, the rotation direction of the screw shaft 22 reverses and the motor 20 moves downward, which causes the semiconductor laser 23 to move downward. As a result, the projection position of the laser beam LB moves downward. Therefore, the laser beam LB can be moved in the axial direction of the screw shaft 22 while obtaining the radially projected state, as shown in FIG.
Similar to the light beam generated by the light beam generator shown in FIG. 7, it is possible to obtain a state in which the laser beam is projected radially upward and downward with a predetermined width.

In the embodiment of the present invention, the case where the object to be inspected has a circular hole or a cylindrical shape has been described. However, this is an example, and it has a polygonal hole or a polygonal prism shape. It may be present, and its shape is not limited at all. However, in that case, it is necessary to make the shape of the cone prism 2 into a polygonal annular shape that matches the polygonal shape of the inspection object. Further, although the light beam generator is arranged below the cone prism in the embodiment, the light beam generator may be located above. Further, although the cone prism and the light beam generator are arranged in the vertical direction, they may be arranged side by side so that the object to be inspected may be dropped while the cone prism and the light beam generator face each other. The inspected object was photographed with a CCD camera, but this is merely an example, and a camera other than the CCD camera may be used. Furthermore, the CCD camera was kept in the operating state, and when the object to be inspected entered the field of view of the CCD camera, the light was emitted to take an image of the object to be inspected. When you enter the field of view of the camera,
The CCD camera may be activated to take an image of the object to be inspected.

[0041]

As described above in detail, the first, second, third,
According to the fourth invention, a light beam generator having a simple structure is used.
The emitted light beam is focused on the axis of the light beam generator.
However, it is possible to irradiate a large number of light beams on the object to be inspected.
It Also, the light reflected by the inspected object enters the prism.
The direction of the emitted light changes depending on the incident angle
You can see the difference in the incident angle of the emitted light. Further, by irradiating a plurality of light beams to the object to be inspected, without rotating the inspection object, Ru can check the inclination of the holes of the device under test precision and high speed. Fifth
According to the invention, the inspection object is irradiated with a large number of light beams,
It is possible to provide a surface inspection device that can inspect the surface of the inspection object for flaws, dirt, etc. with high accuracy and high speed without rotating the inspection object.
It

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram of a surface inspection apparatus according to the present invention.

FIG. 2 is a perspective view of a light beam generator.

FIG. 3 is an explanatory diagram illustrating the principle of the invention.

FIG. 4 is an image diagram showing captured image contents.

FIG. 5 is a schematic configuration diagram showing another embodiment of the surface inspection apparatus.

FIG. 6 is an image diagram showing captured image contents.

FIG. 7 is a sectional view showing another embodiment of the light beam generator.

FIG. 8 is a perspective view of a light shielding plate.

FIG. 9 is a schematic view showing another embodiment of the light beam generator.

[Explanation of symbols]

1 CCD camera 2 cone prism 3 Inspected body 4 Inspection object detection switch 5 Light beam generator 5a Cylindrical part 5d pipe arrangement groove 6 luminous body 13 Reflector P pipe 20 motor 21 screw cylinder 22 screw shaft 23 Semiconductor laser

─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Takayuki Morimoto 4-1796 Tsurumi, Tsurumi-ku, Osaka City, Osaka Prefecture Tsubakimoto Chain Co., Ltd. (56) Reference JP-A-5-87744 (JP, A) Flat 9-196856 (JP, A) JP-A-60-98340 (JP, A) Actually flat 5-71707 (JP, U) Special Table 3-502601 (JP, A) (58) Fields investigated (Int .Cl. ⁷ , DB name) G01N 21/84-21/958

Claims (5)

(57) [Claims] 1. A method for optically inspecting a surface of an object to be inspected, comprising: a light-emitting body; and light emitted from the light-emitting body is incident to emit a large number of light beams ,
A large number of grooves radially formed in a cylinder made of a light shielding material and
Equipped with a large number of pipes made of light-shielding material arranged in each groove,
Inclining the pipe at a predetermined angle with respect to the axis of the cylinder
The configured light beam generator, the annular prism to which the light beam emitted from the light beam generator is applied to the object to be inspected, and the reflected light is incident, and the light emitted from the prism is incident The prism should be placed inside a cylinder made of translucent material.
It has a frustoconical space open on both shaft end faces, and
Has an outer peripheral surface of the inclined direction different from inclination direction of the circumferential surface, a surface inspection method, characterized in that said imaging means to inspect the surface of the inspection object by the image taken. 2. A method for optically inspecting a surface of an object to be inspected , wherein a light emitter and light emitted from the light emitter are incident to emit a large number of light beams.
However, it is composed of an inner cylinder made of a light-transmitting material and a light-transmitting material concentrically arranged on the outer peripheral side of the inner cylinder.
The outer cylinder and the inner cylinder and the outer cylinder.
The outer peripheral edge is descending toward the outer cylinder,
A large number of ring-shaped shields that are stacked in the axial direction at regular intervals.
A light beam generator including a light plate ; an annular prism which irradiates the object to be inspected with a light beam emitted from the light beam generator; use an imaging means to be incident on the light emitted
The prism is a cylinder made of translucent material.
It has a frustoconical space open on both shaft end faces, and
It has an outer peripheral surface in an inclination direction different from the inclination direction of the peripheral surface, and detects the surface of the object to be inspected by the image photographed by the photographing means.
A surface inspection method characterized by inspecting. 3. A large number of optical beams are emitted when the light emitted from the light emitter is incident.
Beam generator for emitting a beam, and whether the light beam generator is
The light beam emitted from the
An annular prism to which incident light should be incident, and the
And an imaging means to be incident emitted light, optically inspected surface inspection instrumentation by photographing a surface of the object to be inspected
In the installation, the light beam generator is radially arranged in a cylinder made of a light shielding material.
It consists of a number of formed grooves and a light-shielding material arranged in each of the grooves.
And a large number of pipes
On the other hand, the prism is configured to be tilted at a predetermined angle, and the prism is provided inside a cylinder made of a light-transmitting material.
It has a frustoconical space that opens on both shaft end faces.
It has an outer peripheral surface with an inclination direction different from the inclination direction of the inner peripheral surface.
Surface inspection device characterized by 4. A large number of optical beams are emitted when the light emitted from the light emitter is incident.
Beam generator for emitting a beam, and whether the light beam generator is
The light beam emitted from the
An annular prism to which incident light should be incident, and the
And an imaging means to be incident emitted light, optically inspected surface inspection instrumentation by photographing a surface of the object to be inspected
The light beam generator includes an inner cylinder made of a translucent material,
Consist of light-transmitting materials that are concentrically arranged on the outer peripheral side of the inner cylinder
Straddling the outer cylinder and the inner cylinder and the outer cylinder
And the outer peripheral edge is descending toward the outer cylinder,
A large number of ring-shaped light shields that are axially stacked at intervals
And a prism , wherein the prism is a cylinder made of a translucent material,
It has a frustoconical space that opens on both shaft end faces.
It has an outer peripheral surface with an inclination direction different from the inclination direction of the inner peripheral surface.
The surface inspection device, characterized in that are. 5. A surface of an object to be inspected, which is a pillar, is photographed and lighted.
In the device to be inspected biologically,
A light beam generator that is irradiated and emits a large number of light beams;
The reflected light from the object to be inspected, which is irradiated with the light beam, is incident.
Projects the light emitted from the prism with a power ring
To capture the reflector that should be and the image projected on the reflector
A light beam generator and the prism;
And are arranged side by side vertically or horizontally.
Surface inspection equipment.