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JP3548799B2 - Method for producing spinel-type germanium nitride powder - Google Patents
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JP3548799B2 - Method for producing spinel-type germanium nitride powder - Google Patents

Method for producing spinel-type germanium nitride powder Download PDF

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JP3548799B2
JP3548799B2 JP2001050675A JP2001050675A JP3548799B2 JP 3548799 B2 JP3548799 B2 JP 3548799B2 JP 2001050675 A JP2001050675 A JP 2001050675A JP 2001050675 A JP2001050675 A JP 2001050675A JP 3548799 B2 JP3548799 B2 JP 3548799B2
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Prior art keywords
powder
germanium nitride
spinel
pressure
pressure phase
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JP2001050675A
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JP2002255516A (en
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利守 関根
紅亮 賀
敬道 小林
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National Institute for Materials Science
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National Institute for Materials Science
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Description

【0001】
【発明の属する技術分野】
本発明は、従来全く知られていなかった高圧相スピネル型窒化ゲルマニウム粉末の多量製造法に関し、詳しくは従来知られている種々の衝撃圧縮法を用いて低圧相窒化ゲルマニウムを立方晶スピネル型窒化ゲルマニウムに変換させる所謂衝撃加圧法によるスピネル型窒化ゲルマニウムの製造法に関する。
【0002】
【従来の技術】
スピネル型窒化ゲルマニウムを製造する方法として、低圧相窒化ゲルマニウムをダイヤモンドアンビルセルやプレスによる固体圧縮法による圧力12GPa以上、温度1000〜1200℃の高温高圧状態で、またはGeと窒素流体を14GPa以上、1700℃以上で反応させる合成法は公知である。
【0003】
【発明が解決しようとする課題】
スピネル型窒化ゲルマニウムの従来の製造法では、実験規模で1回せいぜい100ミリグラム以下の試料量しか製造できなかった。また、微粉末を得るには、粉砕等の工程が必要であった。
【0004】
【課題を解決するための手段】
本発明者は、上記課題を解決すべく鋭意研究を重ねた結果、低圧相窒化ゲルマニウム粉末に適量の金属粉を混合し、適当な密度に加圧成形し、その成形体に適当な圧力、温度の衝撃圧縮をある程度以上の短時間加えるようにすれば、初期窒化ゲルマニウム粉末の組成を変えることなく、高圧相スピネル型窒化ゲルマニウム微粉末に高収率で変換させかつ多量に製造させ得ることを見出した。
【0005】
すなわち、本発明は、衝撃波によって低圧相窒化ゲルマニウム(α−Ge,β−Ge,またはアモルファスGe)を加圧し高圧相のスピネル型窒化ゲルマニウムを合成する方法において、低圧相粉末と金属粉との混合物の加圧成形体を金属容器に入れて圧力20GPa以上、加圧時間5マイクロ秒以下の衝撃波による瞬間的加圧を行うことを特徴とするスピネル型窒化ゲルマニウム粉末の製造法である。
【0006】
また、本発明は、上記記載の低圧相粉末と混合する金属粉末が銅粉末であることを特徴とするスピネル型窒化ゲルマニウム粉末の製造法である。
また、本発明は、上記記載の低圧相粉末と銅粉との混合比として銅が99重量%から50重量%であることを特徴とするスピネル型窒化ゲルマニウム粉末の製造法である。
また、本発明は、上記記載の低圧相粉末と銅粉との混合物の加圧成形体の密度が8.9g/cmから4.5g/cmであることを特徴とするスピネル型窒化ゲルマニウム粉末の製造法である。
【0007】
【発明の実施の形態】
本発明は、瞬間的な衝撃圧縮で発生する高温高圧状態を利用してスピネル型窒化ゲルマニウムの合成を行う際の試料初期状態と衝撃環境の条件を規定するものである。試料初期状態とは出発原料の選択、銅粉などの金属との混合物の有無、加圧成形体の見かけ密度、その加圧成形体中での空隙の分布などが重要である。空隙の量は、加圧成形体の密度により規定されるが、その分布は金属粉の粒径や形状により規定される。
【0008】
出発原料の窒化ゲルマニウム粉末は結晶性の良い微粉末がよく粒径は10ミクロン以下が望ましい。α型とβ型のどちらでも良い。また、少量の未反応Geを含んでいても差し支えない。アモルファス窒化ゲルマニウムの場合は、水素などを含まない粉末が良い。
【0009】
銅粉などの金属との混合は、衝撃条件を均一にするために、また衝撃圧力を高めるために必要である。そのためには、金属粉の粒径は50ミクロン以下が望ましい。この時、金属の種類は、窒化ゲルマニウムと反応しない金属である銅が最適である。銅粉などの粒子形は、加圧成形体の密度が上げられるので、球状のものが好ましい。容器として使用する金属の条件は、十分に衝撃波からの破壊から試料を保護すると同時に、試料と反応しないことが重要であり、銅が使われる。
【0010】
加圧成形体の見かけ密度は、衝撃温度を制御するのに重要であり、十分に反応速度を高め、しかも、窒化ゲルマニウムが分解したり溶融しない温度以下でなければならないので、理論密度の60%から95%程度が適当である。この値は銅粉との混合比にも関係し、銅の量が多い時には低下させてもよく、銅の量が少ない時には大きくする必要が有る。密度としては、8.9g/cmから4.5g/cmである。好ましくは、10から15重量%の窒化ゲルマニウムと90から85重量%の銅粉との混合物で、密度7.5g/cmから6.5g/cmの成形体である。しかも、その圧成形体中での空隙の分布ができるだけ均一であることが望ましい。
【0011】
衝撃環境の条件は、圧力とし20GPa以上が必要である。60GPa以上にあげると、圧力解放時に試料の回収が難しくなる。温度は1000℃以上、2000℃以下が望ましい。このような衝撃条件が実現される限りにおいて、衝撃処理の方法は問わない。すなわち、高速飛翔体の衝突で実現できる衝撃波を利用してもよく、また、市販の爆薬を利用して処理する方法、所謂円筒法などが使用できる。衝撃圧は飛翔体の衝突直前の速度を測定して、インピーダンスマッチ法で計算する。衝撃温度は多量の銅粉の衝撃温度と試料のそれが熱平衡になるとして算出する。
【0012】
図1は、本発明の方法を実施するための衝撃波の発生および衝撃処理試料の関係を例示したものである。具体的には、試料(2)を衝撃波の破壊から保護するための回収容器(3)内に入れ、ネジ蓋(4)で試料背後から押さえた後、大型の円形収納体(1)に埋め込み、ターゲットとする。
一方、衝撃波を高速の飛翔体(8)の衝突で発生させるために、火薬銃で加速する。衝撃圧を高めるために、飛翔体はサーボ(6)の前面に金属製の飛翔板(7)が付いている。
【0013】
【実施例】
実施例1
窒化ゲルマニウムと銅粉の混合物の圧成形体の試料のみかけの密度を成形圧の増減で調節した。10重量%α−窒化ゲルマニウムと90重量%β−窒化ゲルマニウム混合粉末10重量%と銅粉90重量%の混合物でみかけ密度7.56g/cm(空隙率10%)の試料に銅製の試料容器と飛翔板を用い、秒速1.87Km/秒で銅板を衝突させ、約44GPaの衝撃処理を行った。
【0014】
回収試料は試料容器から取り出し、銅粉は酸処理で除去し、得られた窒化ゲルマニウムをX線粉末回折で同定した。その得られた回折図を図2に示す。図2中の1は出発原料の低圧相窒化ゲルマニウム、記号aは原料中のα型Geのピークで、Geは原料中の不純物Geで、無印ピークは全てβ型Geに対応する。2は約36GPaの衝撃処理後の生成物、3は約44GPaの衝撃処理後の生成物、記号cはスピネル型Geのピークで、( )中の数字は回折インデックスを示す。図2中の3で示されるように、ほぼ100%の立方晶のスピネル型窒化ゲルマニウムであることが明らかになった。
【0015】
実施例2
実施例1と同様に、同一の混合粉末を用いたみかけ密度6.03g/cm(空隙率28%)の試料に秒速1.59Km/秒で銅板を衝突させ、約36GPaの衝撃処理を行った。回収試料は試料容器から取り出し、銅粉は酸処理で除去し、得られた窒化ゲルマニウムをX線粉末回折で同定した。その得られた回折図は図2中の2で示されるように、出発原料の低圧相窒化ゲルマニウムと立方晶スピネル型窒化ゲルマニウムの混合生成物であることが明らかになった。
【0016】
【発明の効果】
以上詳しく説明した通り、この発明によって、一回の衝撃処理で低圧相窒化ゲルマニウムから高転換率で高圧相のスピネル型窒化ゲルマニウムを大量に製造することが可能になる。
【図面の簡単な説明】
【図1】この発明のための装置の構成例を示した概略図である。
【図2】衝撃回収試料のX線粉末回折図形である。
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a method for mass-producing high-pressure phase spinel-type germanium nitride powder, which has not been known at all, and more specifically, transforms low-pressure phase germanium nitride into cubic spinel-type germanium nitride using various conventionally known impact compression methods. The present invention relates to a method for producing spinel-type germanium nitride by a so-called impact pressurization method.
[0002]
[Prior art]
As a method for producing spinel-type germanium nitride, low-pressure phase germanium is subjected to a solid pressure method of 12 GPa or more by a diamond anvil cell or a press at a high temperature and high pressure of 1000 to 1200 ° C., or 14 GPa or more of Ge and a nitrogen fluid to 1700. Synthetic methods for reacting at a temperature of at least ℃ are known.
[0003]
[Problems to be solved by the invention]
The conventional method of producing spinel-type germanium nitride can produce at most 100 milligrams of sample at a time on an experimental scale. In addition, a step such as pulverization was required to obtain a fine powder.
[0004]
[Means for Solving the Problems]
The present inventor has conducted intensive studies to solve the above problems, and as a result, mixed an appropriate amount of metal powder with low-pressure phase germanium nitride powder, pressed and molded to an appropriate density, and applied an appropriate pressure and temperature to the molded body. If the impact compression is applied for a short period of time over a certain degree, it can be converted into a high-pressure phase spinel-type germanium nitride fine powder in high yield and produced in large quantities without changing the composition of the initial germanium nitride powder. Was.
[0005]
That is, the present invention provides a method for synthesizing spinel-type germanium nitride in a high-pressure phase by pressurizing low-pressure phase germanium nitride (α-Ge 3 N 4 , β-Ge 3 N 4 , or amorphous Ge 3 N 4 ) by a shock wave. A spinel-type germanium nitride powder characterized in that a pressed compact of a mixture of a low-pressure phase powder and a metal powder is placed in a metal container and subjected to instantaneous pressurization by a shock wave having a pressure of 20 GPa or more and a pressurization time of 5 microseconds or less. It is a manufacturing method.
[0006]
Further, the present invention is a method for producing a spinel-type germanium nitride powder, wherein the metal powder mixed with the low-pressure phase powder described above is a copper powder.
Further, the present invention is a method for producing a spinel-type germanium nitride powder, characterized in that the mixing ratio of the low-pressure phase powder and the copper powder is 99 to 50% by weight of copper.
Further, the present invention provides a spinel-type germanium nitride, wherein the density of the pressed compact of the mixture of the low-pressure phase powder and the copper powder described above is 8.9 g / cm 3 to 4.5 g / cm 3. This is a method for producing powder.
[0007]
BEST MODE FOR CARRYING OUT THE INVENTION
The present invention specifies the initial state of the sample and the conditions of the impact environment when synthesizing the spinel-type germanium nitride using the high-temperature and high-pressure state generated by instantaneous impact compression. In the initial state of the sample, the selection of the starting material, the presence or absence of a mixture with a metal such as copper powder, the apparent density of the compact, the distribution of voids in the compact, and the like are important. The amount of the voids is defined by the density of the pressed compact, and the distribution is defined by the particle size and shape of the metal powder.
[0008]
The starting material germanium nitride powder is preferably a fine powder having good crystallinity, and the particle size is preferably 10 μm or less. Both α-type and β-type may be used. Further, a small amount of unreacted Ge may be contained. In the case of amorphous germanium nitride, a powder containing no hydrogen or the like is preferable.
[0009]
Mixing with a metal such as copper powder is necessary to make the impact conditions uniform and to increase the impact pressure. For that purpose, the particle size of the metal powder is desirably 50 microns or less. At this time, the type of metal is most preferably copper, which is a metal that does not react with germanium nitride. The particle shape of the copper powder or the like is preferably spherical because the density of the press-formed body is increased. It is important that the metal used as the container be sufficiently protected from destruction from a shock wave and not react with the sample, and copper is used.
[0010]
The apparent density of the pressed body is important for controlling the impact temperature, and sufficiently increases the reaction rate. In addition, the apparent density must be lower than the temperature at which germanium nitride does not decompose or melt. To about 95% is appropriate. This value also depends on the mixing ratio with the copper powder, and may be decreased when the amount of copper is large, and must be increased when the amount of copper is small. The density is from 8.9 g / cm 3 to 4.5 g / cm 3 . Preferably, the compact is a mixture of 10 to 15% by weight of germanium nitride and 90 to 85% by weight of copper powder, and has a density of 7.5 g / cm 3 to 6.5 g / cm 3 . Moreover, it is desirable that the distribution of voids in the compact is as uniform as possible.
[0011]
The condition of the impact environment requires a pressure of 20 GPa or more. When the pressure is increased to 60 GPa or more, it becomes difficult to collect the sample when the pressure is released. The temperature is desirably 1000 ° C or more and 2000 ° C or less. As long as such impact conditions are realized, the method of impact treatment is not limited. That is, a shock wave that can be realized by collision of a high-speed flying object may be used, or a method of processing using a commercially available explosive, a so-called cylindrical method, may be used. The impact pressure is calculated by the impedance matching method by measuring the velocity of the flying object immediately before the collision. The impact temperature is calculated assuming that the impact temperature of a large amount of copper powder and that of the sample are in thermal equilibrium.
[0012]
FIG. 1 illustrates the relationship between the generation of a shock wave and a shock-treated sample for carrying out the method of the present invention. Specifically, the sample (2) is placed in a collection container (3) for protecting the sample from shock wave destruction, pressed from behind the sample with a screw lid (4), and then embedded in a large circular container (1). , Target.
On the other hand, in order to generate a shock wave by a collision of a high-speed flying object (8), acceleration is performed by a gunpowder. In order to increase the impact pressure, the flying object has a metal flying plate (7) in front of the servo (6).
[0013]
【Example】
Example 1
The apparent density of a sample of a pressed body of a mixture of germanium nitride and copper powder was adjusted by increasing or decreasing the forming pressure. A sample container made of a mixture of 10% by weight of α-germanium nitride and 90% by weight of β-germanium nitride mixed powder and 90% by weight of copper powder with an apparent density of 7.56 g / cm 3 (porosity of 10%). And a flying plate were used to collide a copper plate at a speed of 1.87 km / sec to perform an impact treatment of about 44 GPa.
[0014]
The recovered sample was taken out of the sample container, the copper powder was removed by acid treatment, and the obtained germanium nitride was identified by X-ray powder diffraction. FIG. 2 shows the obtained diffraction pattern. In FIG. 2, 1 is a low-pressure phase germanium nitride as a starting material, symbol a is a peak of α-type Ge 3 N 4 in the raw material, Ge is impurity Ge in the raw material, and all unmarked peaks are β-type Ge 3 N 4 . Corresponding. 2 is the product after the impact treatment of about 36 GPa, 3 is the product after the impact treatment of about 44 GPa, the symbol c is the peak of spinel type Ge 3 N 4 , and the number in () indicates the diffraction index. As shown by 3 in FIG. 2, it was found that almost 100% of cubic spinel-type germanium nitride was present.
[0015]
Example 2
In the same manner as in Example 1, a copper plate was made to collide with a sample having an apparent density of 6.03 g / cm 3 (porosity 28%) using the same mixed powder at a speed of 1.59 Km / sec and subjected to impact treatment at about 36 GPa. Was. The recovered sample was taken out of the sample container, the copper powder was removed by acid treatment, and the obtained germanium nitride was identified by X-ray powder diffraction. The obtained diffraction pattern, as indicated by 2 in FIG. 2, revealed that the starting material was a mixed product of low-pressure phase germanium nitride and cubic spinel-type germanium nitride.
[0016]
【The invention's effect】
As described above in detail, according to the present invention, it is possible to mass-produce spinel-type germanium nitride having a high conversion rate and a high pressure phase from a low-pressure phase germanium nitride in one impact treatment.
[Brief description of the drawings]
FIG. 1 is a schematic diagram showing a configuration example of an apparatus for the present invention.
FIG. 2 is an X-ray powder diffraction pattern of an impact recovery sample.

Claims (4)

衝撃波によって低圧相窒化ゲルマニウム(α−Ge,β−Ge,またはアモルファスGe)を加圧し高圧相のスピネル型窒化ゲルマニウムを合成する方法において、低圧相粉末と金属粉との混合物の加圧成形体を金属容器に入れて圧力20GPa以上、加圧時間5マイクロ秒以下の衝撃波による瞬間的加圧を行うことを特徴とするスピネル型窒化ゲルマニウム粉末の製造法。In a method of compressing low-pressure phase germanium nitride (α-Ge 3 N 4 , β-Ge 3 N 4 , or amorphous Ge 3 N 4 ) by a shock wave to synthesize spinel-type germanium of a high-pressure phase, a low-pressure phase powder and a metal powder are used. A pressure-molded article of the mixture of the above and a metal container, and instantaneously pressurized by a shock wave having a pressure of 20 GPa or more and a pressurization time of 5 microseconds or less, a method for producing spinel-type germanium nitride powder. 上記記載の低圧相粉末と混合する金属粉末が銅粉末であることを特徴とする請求項1に記載のスピネル型窒化ゲルマニウム粉末の製造法。The method for producing a spinel-type germanium nitride powder according to claim 1, wherein the metal powder mixed with the low-pressure phase powder is copper powder. 上記記載の低圧相粉末と銅粉との混合比として銅が99重量%から50重量%であることを特徴とする請求項2に記載のスピネル型窒化ゲルマニウム粉末の製造法。The method for producing a spinel-type germanium nitride powder according to claim 2, wherein the mixing ratio of the low-pressure phase powder and the copper powder is 99% by weight to 50% by weight of copper. 上記記載の低圧相粉末と銅粉との混合物の加圧成形体の密度が8.9g/cmから4.5g/cmであることを特徴とする請求項2または3に記載のスピネル型窒化ゲルマニウム粉末の製造法。4. The spinel mold according to claim 2, wherein the density of the press-formed body of the mixture of the low-pressure phase powder and the copper powder is 8.9 g / cm 3 to 4.5 g / cm 3. 5. Manufacturing method of germanium nitride powder.
JP2001050675A 2001-02-26 2001-02-26 Method for producing spinel-type germanium nitride powder Expired - Lifetime JP3548799B2 (en)

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