JP3553209B2 - Micro rod bar wire winding device for hard substrate coating - Google Patents

Description

[0001]
[Industrial applications]
The present invention relates to a wire winding device for a micro rod bar used in a hard substrate coating device for thinly and uniformly coating a coating liquid such as a photoresist on a hard substrate.
[0002]
[Prior art]
In a manufacturing process of a color filter used for a liquid crystal plate, there is a step of applying a coating liquid such as a photoresist to a thin and uniform thickness on a hard substrate such as a glass substrate. For example, after uniformly applying a black coating solution having a photoresist function to a glass substrate on which a transparent electrode has been formed in advance, exposing it to cure a mosaic or striped pattern corresponding to black, and removing excess photoresist. Is removed to form a black color mosaic (or stripe). The same processing is repeated for colors such as red, green, and blue.
[0003]
When a coating liquid to be a photoresist is applied as described above, it is necessary to strictly control this liquid to a uniform thickness (for example, about 2 μm ± 5%) and to apply the thin liquid. This is because if the thickness of the coating is non-uniform, the light transmittance becomes uneven and the quality is reduced.
[0004]
Conventionally, a spin coater has been used for this coating. In this spin coater, a coating liquid is dropped near the center of rotation of a hard substrate that has been rotated, and the liquid is applied by scattering using a centrifugal force. However, in the method using the spin coater, not only the labor efficiency for replacing the hard substrate is deteriorated, but also the amount of the liquid scattered and discarded increases.
[0005]
For this reason, there was a problem that the cost was increased. Further, in order to prevent contamination (dirt), it is necessary to frequently wash the scattered liquid adhering to the surroundings using a solvent. For this reason, there is a problem that not only the work is troublesome, but also the operation rate of the apparatus decreases.
[0005]
Therefore, it has been considered to apply a hard substrate between a pair of upper and lower rollers disposed horizontally. In this apparatus, the lower part of the micro rod bar serving as the lower roller is immersed in the coating liquid, and the hard substrate is sandwiched between the micro rod bar and the nip roller positioned above the micro rod bar and sent. It is applied to the lower surface.
[0006]
The micro rod bar used here is a metal rod such as stainless steel which can be soldered, and a thin metal wire such as stainless steel is densely wound thereon, and its outer diameter (diameter) is 2.0 to 20.0 mm. In particular, those having a diameter of about 12 mm are often used.
[0007]
[Problems of the prior art]
This wire needs to be tightly wound in close contact, but it is extremely thin (50-500 mm in diameter, especially about 100 μm in many cases) compared to a metal rod. Therefore, it was very difficult to wind in such an ideal state.
[0008]
That is, while rotating the metal rod at a constant speed by a motor, the wire is wound while pressing the wire manually. However, in this case, the tension of the wire is unstable, and it is difficult to tightly wind the wire with a uniform tension. For this reason, in the coating apparatus using the micro rod bar manufactured as described above, there is a problem that the coating surface is likely to be uneven and the product yield is reduced.
[0009]
[Object of the invention]
The present invention has been made in view of such circumstances, and it is possible to efficiently wind a wire with uniform tension while closely adhering a wire to a metal rod in an axial direction. An object of the present invention is to provide a wire wrapping device for a micro rod bar for hard substrate application, which does not cause application unevenness when applied by using it and can increase the product yield.
[0010]
Configuration of the Invention
According to the present invention, an object of the present invention is to provide a wire winding device for a micro rod bar for hard substrate coating, in which a wire is wound in close contact with an application range of a metal rod in an axial direction thereof, wherein the metal rod is disposed outside the coating range. A support arm for holding horizontally and rotatably, a movable table movable in the longitudinal direction of the metal rod, and a resin block fixed to the movable table and having at least one end face penetrating the metal rod substantially vertically Wire guide means for guiding a wire from a wire supply reel mounted on the movable base to the outer peripheral surface of the metal rod; a tension motor for applying a constant tension to the wire guided to the outer peripheral surface of the metal rod; A motor that rotates the rod at a constant speed in a direction in which the wire is wound, and a resin block on the movable base that is urged with a constant force toward the winding start side of the wire And a wire winding device for a micro rod bar for coating a hard substrate, wherein the wire is wound while moving the block and the movable table by winding the wire by rotating the metal rod. .
[0011]
It is desirable that the wire be guided to the end face of the block and guided to the outer peripheral surface of the metal rod. Further, it is desirable to provide a washing tank for the wire on the movable table, and to handle the wire (ladder) here to wind the washed wire around the metal rod while removing the bent wire.
[0012]
【Example】
FIG. 1 is an overall layout view of a hard substrate coating apparatus, which applies a photoresist in a color filter manufacturing process. 2 is a plan view of the coating apparatus, FIG. 3 is a front sectional view thereof, FIG. 4 is a sectional view taken along line IV-IV in FIG. 3, FIG. 5 is a perspective view of a wire winding apparatus according to an embodiment of the present invention, 6 is a cross-sectional front view of the vicinity of the block during wire winding, FIG. 7 is a plan view of the same, FIG. 8 is a cross-sectional view showing a terminal structure of the micro rod bar, and FIG. 9 is a right side view thereof.
[0013]
In FIG. 1, reference numeral 10 denotes a rectangular (rectangular) glass substrate, and 12 denotes a roller conveyor. The glass substrate 10 is sent from left to right in the figure with the left and right edges of its lower surface placed on the rollers of the conveyor 12. . In the middle of the conveyor 12, there is provided a small-diameter micro-rod bar 16 having a circular cross section, a large-diameter nip roller 18 opposing above, and a coating solution tank 20 into which almost the entire part except the upper part of the micro-rod bar 16 enters. Have been.
[0014]
Here, the micro rod bar 16 is formed by winding a thin metal wire having a diameter of about 100 μm in close contact with a surface of a metal rod having a circular cross section having a diameter of about 12 mm, and utilizing a capillary phenomenon caused by a groove between the metal wires. To apply a coating liquid, that is, a photoresist. The width 10 of the glass substrate applied here is about 100 to 1000 mm, especially about 400 mm. A device for winding this wire will be described later.
[0015]
As shown in FIGS. 2, 3 and 4, the coating liquid tank 20 has a liquid reservoir 22 which is long and shallow in a direction perpendicular to the horizontal direction of the substrate 10 in the horizontal direction. A new liquid is supplied to the liquid reservoir 22 from a liquid supply pipe (not shown), and a coating liquid is discharged from a liquid discharge port 26. The liquid supply pipe faces near the bottom surface near one end of the liquid reservoir 22, and the drain port 26 opens at the bottom near the other end. Therefore, the coating liquid is suitable for flowing in the liquid reservoir 22 in the longitudinal direction thereof to homogenize the liquid. The depth of the coating liquid is monitored by a liquid level sensor (not shown), and is constantly maintained.
[0016]
The micro rod bar 16 is held horizontally so that its upper part is exposed from the liquid. That is, bearing portions 30 and 32 having concave portions opened in a semi-circular shape are provided at both ends of the liquid reservoir portion 22, and between the bearing portions 30 and 32 and the caps 34 and 36 covered from above. The micro rod bar 16 is rotatably held. An intermediate portion of the micro rod bar 16 is supported by a backup member 38 from below.
[0017]
The backup member 38 is made of a hard synthetic resin having excellent slidability. A semicircular groove formed on the upper surface of the backup member 38 along the longitudinal direction comes into contact with the micro rod bar 16 from below, and the micro rod bar 16 This is to prevent deflection. The height of the backup member 38 can be finely adjusted from the lower surface of the coating solution tank 20 by a number of adjusting screws 40 arranged below the backup member 38.
[0018]
One end of the micro rod bar 16 (the end on the far side in FIG. 1) protrudes rearward from the coating liquid tank 20, and this protruding end is connected to an electric motor 44 by a detachable joint 42. The rotation of the electric motor 44 is controlled so that the feed speed of the glass substrate 10 is equal to that of the conveyor 12. The surface of the nip roller 18 is made of conductive rubber, and is held so as to apply a predetermined clamping force to the glass substrate 10 with the glass substrate 10 sandwiched between the nip roller 18 and the micro rod bar 16.
[0019]
This coating device operates as follows. The glass substrate 10 is placed on the roller conveyor 12 with the surface of the pattern 46 facing down, and is sent from left to right in FIG. Then, the glass substrate 10 enters between the micro rod bar 16 and the nip roller 18. Since the application liquid in the liquid reservoir 22 adheres to the surface of the micro rod bar 16 due to its rotation, the application liquid is applied to the lower surface of the glass substrate 10 with the rotation of the micro rod bar 16.
[0020]
Next, a method for manufacturing the micro rod bar 16 will be described. The micro rod bar 16 is formed as shown in FIGS. That is, the metal rod 50 and the wire 52 densely wound around the application range L (about 100 to 1000 mm, usually about 400 mm) of the metal rod 50 are provided. The end surfaces 54 of the metal rod 50 are formed with notches 56 opening at both ends of the application range L and the end surfaces 54, 54.
[0021]
The metal rod 50 is mounted on support arms 110 and 114 of a wire winding device to be described later, and the end of the wire 52 is fixed to one end, that is, the wire winding start side (the right side in FIG. 5) of the application range L. The wire ends are fixed by engaging the ends with the notches 56 and temporarily fixing the ends with an adhesive tape. At the end of the winding of the wire, the end of the winding is similarly temporarily fixed with an adhesive tape, and then the solder 58 is firmly fixed by embedding solder 58 on both ends.
[0022]
In the vicinity of both ends of the application range L of the metal rod 50, grooves 60, 60 for guiding the wire 52 to these notches 56, 56 are formed. For this reason, since the wire 52 is wound to a position sufficiently close to the end face 54, it is sufficient that the solder 58 is provided in a short range N from the end face 54.
[0023]
Since the wire 52 is actually much thinner (about 100 μm in diameter) than the metal rod 50 (about 12 mm in diameter), the groove 60 for guiding the wire 52 to the notch 56 should be provided in a length to be wound several times to several tens times. However, it is preferable to make the groove 60 as short as possible, since the range N in which the solder 58 is provided can be made sufficiently short. In particular, it is more preferable that the wire 52 be sufficiently soldered in the notch 56 and the area of the solder appearing on the surface of the application range L be sufficiently small.
[0024]
Next, a wire winding device will be described with reference to FIGS. In FIG. 5, reference numeral 100 denotes a horizontally long fixed base, and 102 and 102 denote a pair of parallel guide rails fixed to the base 100 in a horizontal direction. A support arm base 104 and a movable base 106 are attached to these guide rails 102, 102 so as to be slidable in the left-right direction.
[0025]
A support arm 110 having a bearing 108 is erected on the support arm 104. One end of the metal rod 50 is rotatably supported by the bearing 108. The support arm 104 can be fixed at an arbitrary position by a clamp screw 112.
[0026]
Reference numeral 114 denotes a support arm fixed to the base 100, and supports the metal rod 50 horizontally and rotatably in pairs with the support arm 110. The fixing position of the support arm 104 can be changed by loosening the clamp screw 112 in accordance with the length of the metal rod 50. The right end of the metal rod 50 projects through a bearing (not shown) of the support arm 114. This protruding end is connected to a motor 118 via a joint 116. The motor 118 is integrated with the speed reducer 120 and is fixed to the base 100.
[0027]
The movable base 106 is located below the micro rod bar 16 and is slidable between the support arms 110 and 114. A resin block 122 is fixed to the upper surface of the movable base 106. The block 122 is made of a resin having high mechanical strength, low frictional resistance, and excellent wear resistance. For example, an acetal resin (homopolymer, trade name “Delrin”) is suitable. The block 122 is a rectangular parallelepiped, and has a through-hole 124 through which the metal rod 50 passes and which is almost in close contact with the outer peripheral surface of the metal rod 50.
[0028]
The pair of end faces 122a and 122b of the block 122 in which the through hole 124 opens are perpendicular to the through hole 124. The block 122 is fixed to the upper surface of a pedestal 126 fixed to the movable base 106 with bolts by long bolts 128, 128.
[0029]
Reference numeral 130 denotes a wire supply reel, which is held on a reel support 132 standing on the upper surface on the back side of the movable base 106. A tension motor (torque motor) 134 is attached to one surface of the reel support 132, and a shaft of the motor 134 passes through the reel support 132 and holds the reel 130. The tension motor 134 outputs a constant torque to an output shaft.
[0030]
Reference numerals 136 and 138 denote roller support plates erected on the movable base 106. The roller support plate 136 is located on the near side of the block 122, and the roller support plate 138 is located on the back side of the block 122.
[0031]
A number of rollers 140 and 142 serving as guide means for the wire 52 are attached to these roller support plates 136 and 138. That is, the wire 52 supplied from the reel 130 is guided to a pair of upper and lower rollers 142 provided on the roller support plate 138 via four rollers 140 provided on the roller support plate 136. Note that a long and long cleaning tank 144 is attached to the roller support plate 136. The cleaning tank 144 is filled with a cleaning liquid such as acetone, and the wire 52 is cleaned and handled (ladder) here.
[0032]
In this purification tank 144, two rollers 140a and 140b constituting a part of the wire guiding means are disposed separately in front and rear. Four vertical handling rods 146 and four horizontal handling rods 148 are mounted between the rollers 140a and 140b so as to be immersed in the cleaning liquid. The wire 52 is guided into the cleaning liquid from the roller 140a, and the left and right surfaces and the upper and lower surfaces are handled and cleaned by the handling rods 146 and 148.
[0033]
The handling rods 146 and 148 handle the wire 52 while bending the wire 52 left and right and up and down in a zigzag manner. For this reason, the habit of the wire 52 wound around the reel 130 and bent can be removed.
[0034]
The wire 52 is guided to the outer peripheral surface of the metal rod 50 by the roller 142 of the roller support plate 138 along the right end surface 122 a of the block 122. Therefore, after the tip of the wire 52 is fixed to the right end of the application range L of the metal rod 50 as described above, the metal rod 50 is rotated in the direction indicated by the arrow in the figure (counterclockwise as viewed from the motor 118 side). , The wire 52 is wound around the metal rod 50.
[0035]
Reference numeral 150 denotes a tension motor (torque motor) fixed to the base 100, and a tension wire 154 is wound around a reel 152 attached to a shaft of the motor 150. The tip of the tension wire 154 is fixed to the movable base 106. Therefore, the movable base 106 is always urged to the right with a constant force at any position in the sliding direction. That is, the movable base 106 is pulled with a constant force toward the wire winding start side of the metal rod 50.
[0036]
Next, the operation of the wire winding device will be described. First, with the motors 118, 134, 150 disabled, the metal rod 50 is passed through the block 122, supported on the support arms 110, 114, and connected to the joint 116. Then, the wire 52 is pulled out from the reel 130 and is manually wound around the right end of the metal rod 50 via the rollers 140 and 142 and the handling rods 146 and 148, and is fixed by winding an adhesive tape or the like. At this time, the tip of the wire 52 is inserted into the notch 56 of the metal rod 50.
[0037]
After temporarily fixing the tip of the wire 52 to the metal rod 50 in this way, the power of the tension motors 134 and 150 is turned on. Then, while the wire 52 is pulled by the reel 130 with a constant tension, the movable table 106 and the block 122 are pushed with a constant force toward the winding start side of the wire 52.
[0038]
In this state, when the motor 118 is started and the metal rod 50 is rotated at a constant speed in the direction of the arrow in the figure, the wire 52 enters between the wire 52a wound immediately before and the end face 122a of the block 122 as shown in FIG. The block 122 is wound while being pushed and moved to the left. As a result, the wire 52 is uniformly wound at a constant tension and a constant speed.
[0039]
The termination of the wire 52 is performed in the same manner as the processing of the start end. That is, the motors 118, 134, and 150 are stopped, the wire 52 is manually engaged with the notch 56, and is temporarily fixed with an adhesive tape. Then, solder 58 may be provided near the winding start and end of the wire, and the wire 52 may be fixed.
[0040]
After this process, the wire 52 is cut off from the metal rod 50, and the solder 58 provided near the starting point and the ending point of the winding of the wire 52 is cut. 58A in FIG. 8 shows a state after the cutting. Of course, the cutting of the solder 58 is made to have the same diameter as the closely wound portion of the wire 52.
[0041]
At both edges of the application range L of the micro rod bar 16, as shown in FIGS. 8 and 9, since the soldering range N of the solder 58 is sufficiently short, there is little change in the outer diameter and there is little “drip” on the outer peripheral surface. For this reason, when this micro rod bar 16 is used, application unevenness on the application surface (lower surface) of the glass substrate 10 is reduced.
[0042]
On the other hand, since the microrod bar 16 uses a remarkably small amount of solder, the area of the solder that appears on the application surface is also extremely small. Contamination and quality deterioration can be prevented.
[0043]
In the above embodiment, the solder 58 is provided on the surface of the application range L. However, it is preferable that the amount of the solder 58 appearing in the application range L is as small as possible and the solder 58 is firmly fixed in the notch 56 as much as possible. For fixing the terminal of the wire 52, an adhesive or the like may be used instead of the solder 58. In particular, when the terminal is fixed in the notch 106 or on the terminal side from the notch, spot welding or the like can be used.
[0044]
In the above-described embodiment, the end face 122a of the block 122 is a plane perpendicular to the metal rod 50. However, the end face 122a may be provided with a wire guiding groove to facilitate guiding the wire 52. For example, a groove 122c indicated by a virtual line in FIG. 7 can be provided. In this case, the wire 52 may be inclined so as to be in close contact with the groove 122c, and may be supplied from the direction indicated by 52b in FIG.
[0045]
【The invention's effect】
As described above, according to the first aspect of the present invention, the metal rod is passed through a resin block slidable in parallel with the metal rod, and the wire is guided to the outer peripheral surface of the metal rod from the end surface on the winding start side of the block. Is rotated at a constant speed, the wire is wound while applying a constant tension to the wire and applying a constant force to the block toward the wire winding start side.
[0046]
Therefore, the wire can be wound densely and uniformly at a constant tension and a constant speed with high efficiency. Therefore, when the coating is performed using this micro rod bar, the coating unevenness does not occur, and the product yield is increased. Here, if the wire is guided on the outer peripheral surface of the metal rod while being guided by the end face of the block, meandering of the wire is regulated by the end face of the block, and more stable winding becomes possible (claim 2).
[0047]
If a washing tank for the wire is provided and a handling rod is provided to remove the habit of the wire, that is, the bending habit attached to the reel for a long time, the winding of the wire can be further uniformized. Preferred (claim 3).
[Brief description of the drawings]
1 is an overall layout view of a hard substrate coating apparatus. FIG. 2 is a cross-sectional view of the coating apparatus. FIG. 3 is a front cross-sectional view of the coating apparatus. FIG. 4 is a cross-sectional view taken along line IV-IV in FIG. FIG. 6 is a perspective view of a wire winding device according to an embodiment of the invention. FIG. 6 is a cross-sectional front view of the vicinity of a block during wire winding. FIG. 7 is a plan view of the same. FIG. FIG. 9 is a right side view showing a part of the cross section.
DESCRIPTION OF SYMBOLS 10 Glass substrate as a hard substrate 12 Roller conveyor 14 Gieser 16 Micro rod bar 18 Nip roller 22 Coating liquid layer 50 Metal rod 52 Metal wire 58 Solder 100 Base 102 Guide rail 106 Movable table 110, 114 Support arm 118 Motor 122 Resin block 122a End face 124 Through hole 130 Wire supply reel 134 Tension motor 140, 142 Roller 144 as wire guide means Cleaning tank 146, 148 Handle rod 150 for wire handling Tension motor L Application range N Solder placement range

Claims (3)

In a wire winding device for a micro rod bar for coating a hard substrate, in which a wire is wound in close contact with an application range of a metal rod in an axial direction thereof, a support arm for horizontally and rotatably holding the metal rod outside the application range. A movable platform fixed to the movable platform, a resin block fixed to the movable platform and penetrating at least one end surface of the metal rod substantially vertically, and mounted on the movable platform. Wire guide means for guiding a wire from a wire supply reel to the outer peripheral surface of the metal rod, a tension motor for applying a constant tension to the wire guided to the outer peripheral surface of the metal rod, and a constant in a direction in which the metal rod is wound around the wire. A motor that rotates at high speed, and a tension motor that urges the resin block on the movable base toward the winding start side of the wire with a constant force. Rotation by the wire winding by said block and while the carriage is moved in the hard substrate coated micro rod bar, characterized in that winding wire wire winding apparatus of the metal rod. The wire winding device for a micro rod bar for coating a hard substrate according to claim 1, wherein the wire is guided by an end surface of the block and guided to an outer peripheral surface of a metal rod. 2. The wire winding device for a micro rod bar for coating a hard substrate according to claim 1, wherein the movable table is provided with a cleaning tank that cleans the wire supplied from the supply reel while squeezing the wire.

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