JP3562837B2 - Magnetic sensing element - Google Patents

Description

[0001]
[Industrial applications]
The present invention relates to a magnetic detection element that detects terrestrial magnetism using a magnetoresistive element.
[0002]
[Prior art]
In order to detect a change in terrestrial magnetism using a magnetoresistive element, a method of externally applying a bias magnetic field corresponding to terrestrial magnetism using a coil or the like is employed. Conventionally, as shown in FIG. 3, a magnetic detecting element of this type includes a substrate 22 having a magnetoresistive pattern 21 serving as a magnetoresistive element and a bias magnetic field in which a winding 23b is wound around a bobbin 23a by a copper wire or the like. Is a structure in which coils 23 are combined. The positional relationship between the magnetic resistance pattern 21 and the coil 23 is determined by a magnetic resistance pattern mounting portion (not shown) formed in the bobbin 23a.
[0003]
[Problems to be solved by the invention]
However, the above-described conventional magnetic sensing element has a problem that the size is increased due to the provision of the coil 23 for generating the bias magnetic field by the winding 23b, and further, the positional relationship between the magnetoresistive pattern 21 and the coil 23 is formed. The structure becomes complicated.
[0004]
Therefore, it is an object of the present invention to solve the above-mentioned drawbacks of the conventional magnetic detecting element and to provide a small and inexpensive magnetic detecting element.
[0005]
[Means for Solving the Problems]
The present invention provides a magnetoresistive element having a magnetoresistive pattern formed on one surface of an insulating substrate, forming an insulating layer on at least the magnetoresistive pattern, and forming a conductor on the back and side surfaces of the insulating substrate and on the insulating layer. A coil for generating a bias magnetic field is formed by the pattern, a new insulating layer is formed on the conductor pattern, and the conductor pattern is orthogonal to the coil on the side surface of the insulating substrate and the new insulating layer. The magnetic detection element is characterized in that the coil is formed as follows.
[0006]
[Action]
In the present invention, since the magnetoresistive element and the coil for generating the bias magnetic field can be formed integrally on the substrate of the magnetic detection element, a small and inexpensive magnetic detection element can be realized.
[0007]
【Example】
An embodiment of the present invention will be described below with reference to the drawings.
[0008]
FIG. 1 is a perspective view showing a configuration of a magnetic sensing element according to one embodiment of the present invention.
The internal configuration is shown in a partially broken section so that it can be seen.
[0009]
FIG. 2 is a sectional view showing the configuration of the magnetic sensing element according to one embodiment of the present invention. 2A is a sectional view taken along line AA in FIG. 1, and FIG. 2B is a sectional view taken along line BB in FIG.
[0010]
1 and 2, a magnetoresistive pattern 2 is formed on an upper surface of an insulating substrate 1, and an inorganic insulating layer 3a is formed on an upper surface of the magnetoresistive pattern 2. Further, a conductor pattern 5a is formed on the upper surface of the inorganic insulating layer 3a. In addition, a conductor pattern 5c (which is a lower surface in FIGS. 1 and 2) is formed on the back surface of the insulating substrate 1, and the conductor pattern 5c and the conductor pattern 5a are sequentially connected by the conductor pattern 5b formed on the side surface of the substrate. Then, they are connected so as to form a single conductor pattern as a whole. The coil constituted by the conductor patterns 5a, 5b, 5c is a bias coil for generating a magnetic field in the x-axis direction in FIG.
[0011]
Further, an inorganic insulating layer 3c is formed on the upper surface of the conductor pattern 5a, and a conductor is formed on the upper surface of the inorganic insulating layer 3c so as to be orthogonal to the x-axis bias coil formed by the conductor patterns 5a, 5b, 5c. The pattern 6a is formed. In addition, an inorganic insulating layer 3b is formed on the upper surface of the conductive pattern 5c formed on the back surface side (the lower surface in FIGS. 1 and 2) of the insulating substrate 1, and the conductive pattern is further formed on the upper surface of the inorganic insulating layer 3b. The conductor pattern 6c is formed so as to be orthogonal to the x-axis direction bias coil constituted by 5a, 5b and 5c. The conductor pattern 6a and the conductor pattern 6c are sequentially connected by a conductor pattern 6b formed on the side surface of the substrate, and are connected so as to form one conductor pattern as a whole, and a magnetic field is generated in the y-axis direction in FIG. The bias coil to be used is configured. Here, the conductor patterns 6a and 6c are formed in a direction perpendicular to the conductor patterns 5a and 5c.
[0012]
The conductive patterns 5a, 5b, 5c, 6a, 6b, 6c are formed by printing silver, copper, or an alloy thereof by a printing method or a vapor deposition thin film. Furthermore, the number of turns of the bias coil formed by the conductor pattern is determined by the generated magnetic field, but the larger the number of turns, the smaller the current flowing through the coil.If the number of turns is large, it is necessary to form a precise conductor pattern. Become. Finally, protective layers 4a and 4b for protecting the conductor patterns 6a and 6c are provided on the outer exterior surface.
[0013]
【The invention's effect】
As described above, according to the present invention, since the magnetoresistive element and the coil for generating the bias magnetic field are integrally formed on the substrate of the magnetic sensing element, the number of parts can be reduced, and the coil winding work can be reduced. Is unnecessary, so that a small-sized and inexpensive magnetic sensing element can be provided, and the application surface is expanded.
[Brief description of the drawings]
FIG. 1 is a perspective view showing a configuration of a magnetic sensing element according to one embodiment of the present invention.
FIG. 2 is a sectional view showing a configuration of a magnetic sensing element according to one embodiment of the present invention. FIG. 2A is a sectional view taken along line AA in FIG. FIG. 2B is a cross-sectional view taken along line BB in FIG.
FIG. 3 is a perspective view showing a configuration of a conventional magnetic detection element.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Insulating substrate 2, 21 Magnetic resistance pattern 3a, 3b, 3c Inorganic insulating layer 4a, 4b Protective layer 5a, 5b, 5c Conductive pattern (for x-axis magnetic field generation)
6a, 6b, 6c Conductor pattern (for y-axis magnetic field generation)
22 board 23 coil 23a bobbin 23b winding

Claims (1)

A magnetoresistive element composed of a magnetoresistive pattern is formed on one surface of the insulating substrate, an insulating layer is formed on at least the magnetoresistive pattern, and a bias is applied to the back and side surfaces of the insulating substrate and a conductive pattern on the insulating layer. A coil for generating a magnetic field is formed, a new insulating layer is formed on the conductor pattern, and another coil orthogonal to the coil is formed on the side surface of the insulating substrate and the new insulating layer by the conductor pattern. A magnetic sensing element, comprising:

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