JP3570622B2 - Rotary adsorber rotor - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a rotor for a rotary adsorber of a type in which a partition plate attached to a case defines at least an adsorption zone, a regeneration zone and a cooling zone at an end face of a rotatably held rotor, More specifically, arc-shaped sectors each having a honeycomb-structured gas adsorbing element having a large number of small through holes are arranged in a cylindrical rim partitioned into arcs in cross section by spokes extending radially inside, and each of these sectors is arranged. The present invention relates to a rotary adsorber rotor in which a caulking material is interposed between joint surfaces of a rotor and a spoke and a rim.
[0002]
[Prior art]
Hereinafter, the structure of a conventional rotor for a rotary adsorber will be described with reference to FIGS. FIG. 7 is a perspective view showing a main part of a rotary adsorber holding a rotor rotatably, FIG. 8 is a perspective view of the rotor, and FIG. 9 is a diagram showing a seal between each arc-shaped sector and a spoke. FIG. 10 is a cross-sectional view taken along the line AA of FIG. 8, showing the joining portion. FIG. 10 is a partially exploded perspective view showing the entire structure of the rotor including the outer peripheral rim 107.
[0003]
The rotary adsorber 100, especially for organic solvents, provided with the conventional adsorption element 104 rotates the rotor 101 in the holding case 110 which is divided into the adsorption zone S, the cooling zone T and the regeneration zone U, whereby An adsorption zone and a regeneration zone are temporarily set on one end face of the rotor, and when the rotor surface passes through the adsorption zone S, the organic solvent is adsorbed by the adsorption element 104 in which a gas containing the organic solvent is supported on the rotor 101. And the regeneration air heated to a temperature exceeding 180 ° C. to 200 ° C., which is the boiling point of the organic solvent, in the regeneration zone U passes through the adsorption element 104 from the other end face opposite to the end face described above. This removed the adsorbed organic solvent.
[0004]
Among gases containing an organic solvent, for example, a gas generated in a semiconductor component manufacturing process or the like contains an organic compound such as DMSO (dimethyl sulfoxide), MEA (monoethanolamine), and HMDS (hexamethylene disilazane). . These organic compounds cannot be sufficiently removed at a regeneration temperature of 180 to 200 ° C. For this reason, such organic compounds are only accumulated in the rotor, which causes performance deterioration and burnout of the rotor. In order to remove such organic compounds, high-temperature air heated to 200 to 350 ° C. must be sent to the rotor 101 in the regeneration zone U.
[0005]
The rotor 101 having a honeycomb structure formed by combining a plurality of arc-shaped sectors 102 into a columnar shape has a plurality of shafts 106 extending radially outward from a metal axially extending hub 105 through which a shaft 106 passes. It is reinforced with metal spokes 103. The metal spokes and the respective sectors 102 having a honeycomb structure are joined or bonded using a heat-resistant caulking material 108 such as silicone. In addition, the outer peripheral rim 107 made of metal for protecting the outer periphery of the rotor 101 and the honeycomb structure 104 itself are similarly bonded via a caulking material 108 made of silicone.
[0006]
As described above, the rotor 101 is rotatably attached to the holding case 110, and the partition plate 111 that separates the adsorption zone S, the regeneration zone U, and the cooling zone T has a seal made of a PTFE film adhered to silicon rubber. (Not shown) is slidably pressed on the end face of the rotor 101 to prevent leakage and mixing of each passing gas.
[0007]
[Problems to be solved by the invention]
When the above-mentioned high-temperature air exceeding 200 ° C. is sent to the rotor to regenerate the rotor having such a configuration, the silicone or rubber caulking material cannot withstand such high temperatures. Alternatively, the rubber deteriorates, and as a result, the bonding or adhesion between the spokes and the rotor is reduced, and the arc-shaped sectors constituting the rotor fall off, making the rotor itself unusable.
[0008]
Therefore, the temperature of the air to be passed is limited, and the accumulated high-boiling organic solvent and the polymer cannot be sufficiently removed. As a result, the purification performance is reduced, and the accumulated polymerization inside the rotor is not performed. In the case of a solvent that has a possibility, the polymer cannot be regenerated and the polymer crushes the pores of the adsorption element such as zeolite, thereby lowering the purification performance of the adsorption element.
[0009]
SUMMARY OF THE INVENTION It is an object of the present invention to provide a rotary adsorber rotor provided with a heat shield for protecting a caulking material at a joint portion capable of sufficiently withstanding a high temperature exceeding 200 ° C. is there.
[0010]
[Means for Solving the Problems]
According to the present invention, according to the present invention, a heat-insulating seal, which is a plate made of a noncombustible material, is provided on an end face of the spoke to cover a joint between the end face and the two arc-shaped sectors in contact with both sides of the end face. This is achieved by mounting parallel to the end face. With this configuration, heated high-temperature regeneration air is prevented from being directly blown to the joint between each sector and the spoke, and a rise in temperature applied to the caulking material is also avoided. Power reduction is avoided. At the same time, high-temperature hot air is blown to the adsorbing elements other than the heat-shielding seal portion, and the boiling organic solvent or polymer adhering to the adsorbing elements is desorbed and blown off, and as a result, the adsorbing elements themselves are reused A decrease in the adsorption performance at the time is also avoided.
[0011]
According to one preferred embodiment of the rotor for the rotary adsorber according to the present invention, the heat shield is attached via a mounting plate welded to the end face of the spoke. With such a configuration, a complicated forming process for directly attaching the heat-shielding seal plate to the spokes can be avoided, and replacement thereof is also facilitated.
[0012]
According to another preferred embodiment of the rotor for a rotary adsorber according to the present invention, the heat shield is screwed to the mounting plate. With this configuration, it is extremely easy to replace the heat shield.
[0013]
According to a preferred embodiment of the rotor for a rotary adsorber according to the invention, the heat shield extends from the periphery of the rim onto the end face of the rotor. With this configuration, it is generally avoided that a high-temperature air flow is directly blown onto the caulking material between the metal rim and the outer peripheral surface of the arc-shaped sector, and deterioration of the caulking material is avoided.
[0014]
According to another preferred embodiment of the rotary adsorber rotor according to the present invention, the heat shield is a silicon nitride plate. With this configuration, a good heat shielding effect can be obtained, and at the same time, the durability of the plate of the non-combustible material can be obtained. Can be
[0015]
According to another preferred embodiment of the rotor for a rotary adsorber according to the present invention, the heat shield is a laminate in which a metal plate is stacked on an expanded graphite sheet. With this configuration, the graphite sheet itself has excellent heat resistance, and at the same time, since the metal sheets are stacked, the expanded graphite sheet itself that is susceptible to breakage is protected and has high rigidity and durability. Therefore, an excellent heat shielding effect is maintained for a long period of time.
[0016]
Further, according to another preferred embodiment of the rotor for a rotary adsorber according to the present invention, a heat insulating material is interposed between the mounting plate and the heat shield. With this configuration, the heat transferred to the joint surface through the spokes exposed to the high-temperature hot air is reduced to some extent by providing the heat insulating material, and the caulking material is further protected from high heat.
[0017]
According to still another preferred embodiment of the rotor for the rotary adsorber according to the present invention, the heat insulating material is a calcium silicate plate. This configuration provides better insulation between the heated plate of non-combustible material and the mounting plate attached to the spokes, so that the caulking material is more reliably protected from heat. In the configuration of the rotary adsorber rotor according to the present invention described above, it is preferable to use an adhesive silicone resin or a fluorine-based rubber as the caulking material.
[0018]
Hereinafter, some embodiments of a rotor for a rotary adsorber according to the present invention will be described with reference to the drawings.
[0019]
【Example】
FIG. 1 is a perspective view of a rotor for a rotary adsorber according to the present invention, and FIG. 2 is a partial sectional view taken along line XX in FIG. 1 showing an embodiment of the rotor for a rotary adsorber according to the present invention. FIG. 3 is a view similar to FIG. 2 showing another embodiment of the rotary adsorber rotor according to the present invention, and FIG. 4 is a view of the rotary adsorber rotor according to the present invention. Fig. 5 is a view similar to Fig. 3 showing yet another embodiment, and Fig. 5 is a partial view showing the entire structure of a rotary adsorber rotor according to the present invention including an outer peripheral rim provided with a heat shield. FIG. 6 is an exploded perspective view, and FIG. 6 is a partial sectional view taken along the line Y-Y in FIG. 1 of the rotary adsorber rotor according to the present invention including an outer peripheral rim provided with a heat shield.
[0020]
1 to 6, the heat shields 9 and 11 of the rotor 1 for the rotary adsorber according to the present invention are provided with a number of small rims 7 in a cylindrical rim 7 which is partitioned into arcs by the spokes 3 extending radially inside. Eight arc-shaped sectors 2 each having a gas adsorbing element 4 having a honeycomb structure made of ceramic fiber paper having through holes are arranged. Of these sectors, the contact surfaces between two adjacent sectors 2 and the spokes 3 and the rim 7 are joined together by a preferred caulking material 8 made of silicone. In general, a rotor composed of a honeycomb-adsorbing element 4 having a honeycomb structure has a structure in which a large number of small through-holes penetrate both end surfaces, and is particularly suitable for purifying a volatile organic compound-containing gas generated in a semiconductor manufacturing process. When used, this gas passes through the small through-hole, so that harmful volatile organic compounds contained in the gas are adsorbed on the surface in the small through-hole.
[0021]
The noncombustible material that can be used in the gas adsorption element 4 of the rotor in the present invention needs to have heat resistance, heat insulation, abrasion resistance, and solvent resistance. That is, when the temperature of the rotor becomes high, deformation occurs between the spokes supporting the rotor and the honeycomb structure due to high heat, and a non-combustible material must be used to prevent the deformation. The heat resistance is because the material must withstand the high temperature air of 200 to 350 ° C, and the heat insulation property is that the rotor needs to be protected from the high temperature air of 200 to 350 ° C. Further, abrasion resistance is required because friction occurs with a seal material described later, and solvent resistance is required from the property of the rotor that adsorbs an organic solvent.
[0022]
As the non-combustible material satisfying these properties, those made of inorganic materials such as silicon nitride, graphite, ceramic paper, felt and the like can be used.
[0023]
FIGS. 1 and 5 show heat shields 10 and 11 made of a plate made of a noncombustible material of a rotor 1 for a rotary adsorber according to the present invention. The heat shields are made of a silicon nitride plate as a non-combustible material according to an embodiment of the present invention. In particular, when such a rotary adsorber rotor is used in a semiconductor manufacturing plant, a material having a strong resistance to organic solvents is constantly affected by an organic compound-containing gas generated in the manufacturing process. It is essential to use it, and silicon nitride is a suitable material as a specific material. Hereinafter, the configuration according to the present invention will be easily understood from the description relating to the embodiment shown in FIGS.
[0024]
FIG. 2 shows one embodiment of the rotor 1 for a rotary adsorber according to the present invention, and is a view showing a relationship between spokes 3 of the rotor 1 and a silicon nitride plate 10 as a heat shield. The metal spokes 3 are joined or adhered to two adjacent sectors 2 a and 2 b of the six arc-shaped sectors constituting the rotor 1 by a caulking material 8. A metal mounting plate 9 is welded to the spoke 3 so as to be positioned at a right angle, that is, parallel to the end face of the rotor 1. The silicon nitride plate 10 is fixed on the mounting plate 9 with screws 13. I have.
[0025]
The width of the silicon nitride plate 10 is larger than the width of the mounting plate 9 that appears on the rotor end face, and a rectangular cross-section extending in the axial direction that is formed at the joint between two adjacent sectors 2a and 2b with the spoke 3 interposed therebetween. It has a lateral width that fits in the recess 14. As a result, the heat shield does not protrude from the end face of the rotor, and a favorable effect such that collision with the rotor holding member provided on the partition plate 111 of the holding case 110 can be avoided during use can be obtained.
[0026]
As shown in FIG. 3, instead of the silicon nitride plate, it is proposed to protect the spoke 3 and the deterioration of the caulking material between the adjacent sectors by the expanded graphite sheet 15, but a metal plate is provided on the expanded graphite 15 sheet. 16 may be provided in an overlapping manner. This laminated structure can be applied to the heat shield 11 provided on the radial end face of the rim 7.
[0027]
As shown in FIG. 4, if a heat insulating material 17 such as a calcium silicate plate is arranged between the attachment plate 9 of the spoke 3 and the silicon nitride plate 10, the heat insulating property can be further improved.
[0028]
5 and 6, an end face portion of the rotor is shown in a cross-sectional view, in which a metal outer peripheral rim 7 is an example in which a silicon nitride plate 11 is attached to a peripheral portion appearing on an end face of the arc-shaped sector 2. With such a structure, even if heated air is introduced into the rotor from above the drawing, the caulking material 8 is protected by the silicon nitride plate 11 to protect the joint from heat. In FIG. 6, it is preferable to provide the metal angle member 12 under the silicon nitride plate 11 so as to be embedded in the outer peripheral edge of the sector. However, only the silicon nitride plate 11 may be provided.
[0029]
In actual use, referring to FIG. 7, the rotor 101 is used in a case 110. The case 110 can accommodate the rotor 101 rotatably, and divides the rotor end surface into an adsorption zone S and a regeneration zone U. The adsorption zone S and the regeneration zone U sandwiching the cooling zone T are separated by a partition plate 111 that divides each zone, and a sealing material is attached to the partition plate 111 so as to be able to contact the rotating rotor end face. Gas is prevented from leaking between the respective zones.
[0030]
【The invention's effect】
As described above, the rotor for a rotary adsorber according to the present invention includes a gas adsorbing element having a honeycomb structure having a large number of small through-holes in a cylindrical rim partitioned into arcs in cross section by spokes extending radially inside. Arc-shaped sectors are respectively arranged, a caulking material is interposed between each of the sectors and the spokes and the rim, and the end face of the spoke is joined to the end face and the joining surface of the two arc-shaped sectors in contact with both sides of the end face. A heat-insulating seal, which is a plate made of a noncombustible material, is attached in parallel with the end face, so there is a possibility of high-boiling organic solvents exceeding 200 ° C and polymerization that could not be processed conventionally. Even if the solvent adheres to the adsorption element, high-temperature air of 200 ° C. or more can be continuously and continuously flowed inside the rotor without deteriorating the caulking material such as silicone in the regeneration zone.
[0031]
The rotor for the rotary adsorber according to the present invention is capable of releasing only the organic solvent which has not been able to be cleaned, to the adsorption element only, and the performance of the adsorption element in the rotor and the performance of the rotor itself are eliminated. Enables continuous and repetitive use without reducing mechanical strength, thus enabling a quick and smooth waste gas treatment operation to be continuously performed, preventing a decrease in waste gas treatment efficiency and extending the life of the rotor. The effect that it greatly contributes to is obtained.
[Brief description of the drawings]
FIG. 1 is a perspective view of a rotary adsorber rotor according to the present invention;
FIG. 2 is a partial sectional view taken along the line XX in FIG. 1, showing an embodiment of the rotor for the rotary adsorber according to the present invention;
FIG. 3 is a view similar to FIG. 2, showing another embodiment of the rotor for the rotary adsorber according to the present invention,
FIG. 4 is a view similar to FIG. 3, but showing still another embodiment of the rotary adsorber rotor according to the present invention,
FIG. 5 is a partially exploded perspective view showing the entire structure of a rotor for a rotary adsorber according to the present invention including an outer peripheral rim provided with a heat shield;
FIG. 6 is a partial sectional view taken along the line YY in FIG. 1 of the rotor for the rotary adsorber according to the present invention including an outer peripheral rim provided with a heat shield;
FIG. 7 is a perspective view showing a main part of a rotary adsorber in which a rotor is rotatably held in a conventional technique.
FIG. 8 is a perspective view of a conventional rotor.
FIG. 9 is a sectional view taken along the line AA of FIG. 8, showing a seal / adhesion portion between each arc-shaped sector and a spoke in the prior art;
FIG. 10 is a partially exploded perspective view showing the entire structure of a rotor including an outer peripheral rim according to a conventional technique.
[Explanation of symbols]
1 rotor,
2 arc-shaped sectors,
3 spokes,
4 gas adsorption element,
5 hubs,
6 rotor shaft,
7 Rim,
8 Caulking materials,
9 mounting plate,
10 heat shield seal (silicon nitride plate),
11 heat shield seal (silicon nitride plate),
12 angle members,
13 screws,
14 rectangular section recess,
15 heat shield (graphite sheet),
16 metal plates,
17 Insulation material (calcium silicate plate).

Claims (9)

Arc-shaped sectors each having a honeycomb structure gas adsorbing element having a large number of small through-holes are arranged in a cylindrical rim partitioned into arc-shaped cross sections by spokes extending radially inside, and each of these sectors, the spokes and the rim are arranged. A caulking material is interposed between the joining surfaces of the spokes, and a heat-insulating seal, which is a plate made of a noncombustible material, is provided on the end surface of the spoke to cover the end surface and the joining portion of the two arc-shaped sectors in contact with both sides of the end surface. A rotor for a rotary adsorber, wherein the rotor is attached parallel to the end face. The rotor for a rotary adsorber according to claim 1, wherein the heat shield is attached via a mounting plate welded to an end surface of the spoke. The rotor for a rotary adsorber according to claim 2, wherein the heat shield is screwed to the mounting plate. The rotor for a rotary adsorber according to claim 1, wherein the heat shield extends from a peripheral edge of the rim onto an end surface of the rotor. The rotor for a rotary adsorber according to any one of claims 1 to 4, wherein the heat shield is a silicon nitride plate. The rotor for a rotary adsorber according to any one of claims 1 to 4, wherein the heat shield is an expanded graphite sheet. The rotor for a rotary adsorber according to any one of claims 1 to 4, wherein the heat shield is a laminate in which a metal plate is stacked on an expanded graphite sheet. The rotor for a rotary adsorber according to any one of claims 2 to 7, wherein a heat insulating material is interposed between the mounting plate and the heat shield. 9. The rotary adsorber rotor according to claim 8, wherein the heat insulating material is a calcium silicate plate.

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