JP3572222B2 - Gate valve - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention provides, for example, a transfer passage for transferring a work such as an integrated circuit (IC) or a part thereof from one vacuum processing chamber to another vacuum processing chamber, or a flow passage or an exhaust passage for a pressure fluid, a gas, or the like. The present invention relates to a gate valve that can be opened and closed.
[0002]
[Prior art]
Conventionally, for example, in a processing apparatus for a semiconductor wafer, a liquid crystal substrate, or the like, it has been performed to put a semiconductor wafer, a liquid crystal substrate, and the like into and out of various processing chambers through passages. A gate valve for opening and closing the passage is provided.
[0003]
As shown in, for example, Japanese Patent No. 2,613,171 (US Pat. No. 5,415,376, US Pat. No. 5,641,149), the gate disc is moved by a linear motion of a valve rod displaced under the operation of a cylinder. After reaching the opposite position, the valve disc is pressed against the valve seat by the tilting movement of the valve rod and is seated, so that the passage formed in the valve box is closed.
[0004]
That is, as shown in FIGS. 13 and 14, the gate valve 1 according to the related art includes a valve box 3 in which a passage 2 for taking in and out a work is formed, and a valve seat 4 formed in the valve box 3. And a valve rod 6 connected to the valve disk 5 so as to be vertically movable and tiltable.
[0005]
A block 7 is connected to the upper part of the valve rod 6, and guide grooves 10 formed on both sides of the cylinder tube 9 of the pair of cylinders 8a and 8b on both sides of the block 7 (see FIG. 15). The block 7 is provided so as to move up and down and tilt under the guide action of the guide groove 10 with which the pivot 11 engages. The cylinder tube 9, the block 7 and the pivot 11 are each formed of a metal material.
[0006]
In other words, the block 7 linearly moves along the up-down direction integrally with the yoke 13 via the tension spring 12 under the guiding action of the guide groove 10 with which the pivot 11 engages, and It is provided so as to tilt in the direction of arrow A about a pivot 11 supported by a curved lower end 10a (see FIG. 15). Accordingly, the valve disk 5 is tilted in the direction of arrow B about the pivot 11 as a fulcrum, and seats on the valve seat 4, whereby the passage 2 is airtightly closed.
[0007]
Reference numeral 14 indicates a plate-like cam having a rhombic cross section. The inclined plate-like cam 14 is displaced substantially horizontally, so that the block 7 moves in the direction of arrow A with the lower end 10a of the guide groove 10 as a fulcrum. It is provided to tilt.
[0008]
[Problems to be solved by the invention]
However, in the above-described gate valve according to the related art, the pivot of the block is provided so as to slide and displace along the guide groove formed on the side surface of the cylinder. There is a defect that the guide function is deteriorated due to deformation.
[0009]
In addition, in the gate valve according to the related art, the number of components is increased by providing the pivots on both sides of the valve block, and a step of notching the guide groove on the side surface of the cylinder is required, thereby increasing the manufacturing cost. .
[0010]
Further, in the gate valve according to the related art, dust and the like are generated by the sliding displacement of the pivot of the block made of the metal material along the guide groove of the cylinder tube made of the metal material. In other words, there is a problem that dust cannot be used in an environment requiring cleanliness such as a clean room because dust is generated due to friction between metal materials.
[0011]
The present invention has been made in consideration of the above-described problems, and reduces the number of parts by eliminating the need for guide means, thereby reducing manufacturing costs. It is an object of the present invention to provide a gate valve that can be suitably used in an environment in which is required.
[0012]
[Means for Solving the Problems]
In order to achieve the above object, the present invention provides a drive source having a plurality of drive mechanisms disposed substantially in parallel,
Each of the plurality of drive mechanisms is connected to a drive shaft, and under the drive action of the plurality of drive mechanisms.Of the drive shaftA yoke displaced along the axial direction;
Integrally with the yokeSaidDisplaces along the axial direction,SaidA displacement block provided at the end of displacement along the axial direction so as to be tiltable with the support member as a fulcrum,
A valve disc that opens and closes a passage through a valve rod connected to the displacement block;
The yoke and the displacement blockThe axisPositioning holding means for integrally holding in a state positioned along the direction,
Equipped,
The positioning and holding means includes a spring member interposed between the yoke and the displacement block, a set of holding blocks fixed to the yoke with the spring member therebetween, and a pair of the holding blocks. A set of holding plates fixed and extending along the side surface of the displacement block, a set of pin members respectively locked to the set of holding plates, and the one set formed on the side surface of the displacement block And a set of engagement grooves with which the respective pin members engage.It is characterized by the following.
[0014]
Further, the plurality of drive mechanisms may be constituted by a first cylinder mechanism and a second cylinder mechanism for displacing the piston and the piston rod along the axial direction under the action of the pressure fluid supplied to the cylinder chamber.
[0015]
Further, the support member includes a pair of support rollers rotatably supported at one end of the displacement block so that the support roller is engaged with a concave portion which is curved at a displacement end position of the displacement block. It is good to provide.
[0016]
Furthermore, a first cushioning member is provided for absorbing a shock when the support roller comes into contact with the recess, and when the piston reaches a bottom dead center, the first cylinder mechanism and the second cylinder mechanism are provided with the piston. A second cushioning member for absorbing the shock given to theBetween the first base plate and the second base plateOuter surface of valve rodSurroundIt is preferable to provide a sealing member.
[0017]
According to the present invention, the yoke and the displacement block are moved through the positioning and holding means under the driving action of the plurality of driving mechanisms.Drive shaft axisIn a state where they are positioned along the directionSaidDisplaces along the axial direction.SaidAfter reaching the displacement end position along the axial direction,SaidBy further displacing along the axial direction, the displacement block tilts by a predetermined angle with the support member as a fulcrum. As a result, the valve rod connected to the displacement block tilts, and the passage is closed by the valve disk.
[0018]
In the present invention,A spring member interposed between the yoke and the displacement block, a set of holding blocks fixed to the yoke with the spring member interposed therebetween, and a side surface of the displacement block fixed to the set of holding blocks, respectively. A pair of holding plates extending along the pair, a pair of pin members respectively locked to the pair of holding plates, and the pair of pin members formed on side surfaces of the displacement block are respectively engaged. A set of engagement grooves toYoke and displacement blockThe axisThe provision of the positioning and holding means for integrally holding the components positioned along the direction eliminates the need for the guide means, thereby reducing the number of components.
[0019]
BEST MODE FOR CARRYING OUT THE INVENTION
Preferred embodiments of the gate valve according to the present invention will be described below in detail with reference to the accompanying drawings.
[0020]
In FIG. 1, reference numeral 20 indicates a gate valve according to an embodiment of the present invention.
[0021]
The gate valve 20 includes a driving unit (driving source) 22, a valve rod 24 that is displaced in the vertical direction under the driving action of the driving unit 22 and tilts in a direction substantially perpendicular to the vertical direction. A substantially rectangular valve disc 26 connected to one end of the valve rod 24; An annular step portion 27 whose diameter gradually increases downward is formed on the outer peripheral surface at a substantially central portion of the valve rod 24 (see FIG. 3).
[0022]
A valve box 30 having a passage 28 for taking in and out a work (not shown) is provided on the upper side of the drive unit 22 (see FIGS. 6 and 7). When the valve disc 26 is seated on the valve seat 32 thus set, the passage 28 is airtightly closed. A seal member 34 is mounted on the valve disk 26 along the annular groove, and the seal member 34 maintains airtightness when the valve disk 26 is seated on the valve seat 32.
[0023]
The drive unit 22 includes a first base plate 36 and a second base plate 38 fixed to a bottom surface of the valve box 30 via a screw member (not shown), a bottomed cylindrical casing 40 mounted on the second base plate 38, and , A first cylinder mechanism 42a and a second cylinder mechanism 42b (drive mechanisms) which are disposed substantially in parallel in the casing 40 and are composed of the same components.
[0024]
As shown in FIG. 2, through holes 44 a and 44 b having a substantially circular cross section through which the valve rod 24 is inserted are formed substantially in the center of the first base plate 36 and the second base plate 38, respectively. On the lower surface of the second base plate 38, a pair of protrusions 49a and 49b having a concave portion 48 having a semicircular cross section for supporting a support roller (support member) 46 to be described later are separated by a predetermined distance. It is provided. The diameter of the through holes 44a and 44b is formed larger than the diameter of the valve rod 24, and a ring body 52 that holds one end of a bellows 50 that covers a predetermined portion of the valve rod 24 is formed in the through hole 44b. Mated.
[0025]
As shown in FIG. 8, a packing (seal member) 51 surrounding the outer peripheral surface of the valve rod 24 is sandwiched between the first base plate 36 and the second base plate 38. When the pistons 60a and 60b rise, they contact the annular step 27 of the valve rod 24 to perform a sealing function. Since the packing 51 is provided so as not to contact the outer peripheral surface of the valve rod 24 other than the annular step 27, generation of dust due to friction is prevented.
[0026]
As shown in FIGS. 2 and 3, a first buffer member 53 made of a resin material such as a urethane resin or a polyurethane resin is mounted in the second base plate 38 in the hole. The first buffer member 53 is sandwiched between the first base plate 36 and the second base plate 38. The first buffer member 53 has a function of absorbing the impact of the support roller 46 by contacting the support roller 46 when the support roller 46 is engaged with the concave portion 48.
[0027]
Since the first cylinder mechanism 42a and the second cylinder mechanism 42b are each composed of the same components, the first cylinder mechanism 42a will be described in detail, and the second cylinder mechanism 42b will be denoted by the same reference numeral b. And a detailed description thereof will be omitted.
[0028]
As shown in FIG. 3, the first cylinder mechanism 42a is displaceable along a cylinder tube 56a fixed to the second base plate 38 via fixing means (not shown) and a cylinder chamber 58 in the cylinder tube 56a. It has a piston 60a housed therein, a piston rod 64a having one end connected to the piston 60a, and a seal member 66a held by the cylinder tube 56a and surrounding the outer peripheral surface of the piston rod 64a.
[0029]
A piston packing 70a for airtightly holding an upper cylinder chamber 58a and a lower cylinder chamber 58b divided into two parts by the piston 60a is mounted on the outer peripheral surface of the piston 60a. In addition, a second buffer member (not shown) may be provided on the bottom surface of the piston 60a to absorb an impact when the piston 60a reaches the bottom dead center. The second buffer member is preferably formed of a resin material such as a urethane resin or a polyurethane resin.
[0030]
In this case, a pressure fluid (for example, compressed air) is supplied to the upper cylinder chamber 58a and the lower cylinder chamber 58b through a tube (not shown) connected to a pressure fluid supply source (not shown). The pressure fluid is supplied to one of the upper cylinder chamber 58a and the lower cylinder chamber 58b under the switching action of the switching valve not to operate.
[0031]
Further, as shown in FIGS. 2 and 3, the drive unit 22 is fixed to the other end of each of the pair of piston rods 64 a and 64 b via a lock nut 74, and is formed in a long plate shape. It has a yoke 78 and a displacement block 80 which is displaced integrally with the yoke 78 and has a substantially H-shaped longitudinal section.
[0032]
As shown in FIGS. 2 and 3, a substantially circular concave portion 86 to which one end of a spring member 84 described later is engaged is formed at a substantially central portion of the yoke 78. Further, a pair of holding blocks 90a, 90b having elongated holes 88a, 88b cut out in a substantially elliptical shape are fixed to the yoke 78 at predetermined intervals, and are fixed to the elongated holes 88a, 88b. The roller 92 is provided so as to engage with the displacement block 80 via a pin member 91. The roller 92 is rotatably supported about a pin member 91.
[0033]
Further, a holding plate 93 is fixed to the upper portions of the pair of holding blocks 90a and 90b via screw members. A pair of pin members 94 are fitted to the holding plate 93 via holes, and one end of the pin members 94 is engaged with engagement grooves 96 formed on both side surfaces of the displacement block 80. It is provided in.
[0034]
As shown in FIGS. 2 and 3, a hole 100 having a substantially circular cross section into which the other end of the valve rod 24 is inserted is formed substantially in the center of the displacement block 80. The valve rod 24 is fixed to the displacement block 80 via a lock nut 102 fastened to the portion. A valve rod 24 and a spring member 84 are interposed between the displacement block 80 and the yoke 78. One end of the spring member 84 is engaged with the lock nut 102, and the other end of the spring member 84 The part is engaged with the recess 86 of the yoke 78.
[0035]
A bellows 50 is provided on the other end of the valve rod 24 to cover the outer peripheral surface thereof. One end of the bellows 50 is fixed to a ring body 52 held on the second base plate 38, The part is fixed to a ring body 104 externally fitted to the valve rod 24.
[0036]
Engaging grooves 96 are formed on both side surfaces of the displacement block 80 so that one end of the pin member 94 engaged with the yoke 78 via the holding blocks 90a and 90b and the holding plate 93 is engaged. . The pin member 94 is engaged with the lower end portion 96a of the engagement groove 96, thereby preventing the yoke 78 and the displacement block 80 from being displaced in the up-down direction and the front-rear direction (in FIG. 3, a direction substantially orthogonal to the paper). It is positioned in a state of being separated by a predetermined distance along the vertical direction, and moves up and down integrally in such a state of being positioned. When the pin member 94 is disengaged from the lower end 96a of the engaging groove 96 and rises along the engaging groove 96, the valve disk 26 can be tilted.
[0037]
Further, a pair of support rollers 46 is rotatably supported on an upper part of the bifurcated displacement block 80, and the support rollers 46 are provided on the protrusions of the second base plate 38 at the displacement end positions of the displacement block 80. The valve disc 26, the valve rod 24, and the displacement block 80 are tilted by a predetermined angle θ with the support roller 46 inserted into the curved concave portion 48 formed in the 49a, 49b and engaged with the concave portion 48 as a fulcrum.
[0038]
The gate valve 20 according to the embodiment of the present invention is basically configured as described above. Next, the operation and effect of the gate valve 20 will be described. In the following description, a pair of pistons 60a and 60b are respectively located at the lowermost end of the cylinder chamber 58, and the opened state in which the passage 28 formed in the valve box 30 is not closed by the valve disk 26 will be described as an initial position. I do.
[0039]
In this case, since the yoke 78 is pressed downward by the elastic force of the spring member 84 at the initial position, the pin locked to the yoke 78 via the holding blocks 90a and 90b and the holding plate 93 is used. The member 94 is held in the lower end 96a of the engagement groove 96 of the displacement block 80. In the initial position, the rollers 92 are engaged with upper portions of the long holes 88a and 88b formed in the holding blocks 90a and 90b.
[0040]
At the initial position, a pressure fluid is supplied from a pressure fluid supply source (not shown) to the lower cylinder chamber 58b of the first cylinder mechanism 42a and the second cylinder mechanism 42b via a tube (not shown). Under the action of the pressure fluid supplied to the lower cylinder chamber 58b, a set of pistons 60a, 60b rises, respectively, and a pair of piston rods 64a, 64b connected to the pistons 60a, 60b also rise. In this case, it is assumed that the upper cylinder chamber 58a is open to the atmosphere under the action of a switching valve (not shown).
[0041]
The yoke 78, the displacement block 80, the valve rod 24, and the valve disk 26 are integrally raised together with the piston rods 64a, 64b by raising the pair of piston rods 64a, 64b substantially in parallel. In this case, the yoke 78 is in a state of being pressed downward by the elastic force of the spring member 84, and a pair of pin members 94 locked to the yoke 78 via the holding blocks 90a, 90b and the holding plate 93. Is held at the lower end 96a of the engagement groove 96 of the displacement block 80, so that the yoke 78 and the displacement block 80 are positioned in the up-down direction and the front-back direction (in FIG. 3, a direction substantially orthogonal to the plane of the paper). It is in a state where it is positioned and held at a predetermined position where displacement is prevented. Therefore, the yoke 78 and the displacement block 80 are integrally moved up while being positioned and held at the predetermined position.
[0042]
When the piston rods 64a and 64b rise almost at the same time and one end of the displacement block 80 comes into contact with the second base plate 38, the displacement block 80 reaches the displacement end position, and the valve disc 26 is moved to the opening of the passage 28. It is in a state of facing (see FIG. 6). At this time, a pair of support rollers 46 provided on the upper part of the displacement block 80 are engaged with the curved concave portions 48 formed on the protrusions 49a and 49b of the second base plate 38, respectively, and the first buffer member 53 The shock is absorbed by abutting against the contact.
[0043]
After the displacement block 80 reaches the displacement end position, the pair of piston rods 64a and 64b further moves up, respectively, so that the displacement block 80 is under the action of the roller 92 engaging with the long holes 88a and 88b of the yoke 78. Then, the valve 28 is tilted by a predetermined angle θ with the support roller 46 engaged with the concave portion 48 as a fulcrum, and the valve disk 26 is seated on the valve seat 32 to close the passage 28 (see FIG. 7).
[0044]
That is, after the displacement block 80 reaches the displacement end position, the pair of piston rods 64a and 64b is further raised almost simultaneously against the elastic force of the spring member 84, so that only the yoke 78 is raised. The displacement block 80 tilts by a predetermined angle θ with the support roller 46 as a fulcrum under the action of the roller 92 engaging with the elongated holes 88a and 88b formed on both side surfaces of the yoke 78 (see FIG. 7). When the displacement block 80 tilts by a predetermined angle with the support roller 46 as a fulcrum, the pin member 94 locked on the yoke 78 is disengaged from the lower end 96a of the engagement groove 96 of the displacement block 80, and the engagement groove 96 Rise along.
[0045]
Accordingly, the valve disk 26 fixed to the displacement block 80 via the valve rod 24 is moved from the state in which the displacement block 80 is tilted by the predetermined angle θ to the passage 28 side from a state in which the displacement block 80 is separated from the passage 28 by a predetermined distance. It is displaced almost horizontally toward. As a result, the seal member 34 provided on the valve disk 26 is seated on the valve seat 32, and the passage 28 is airtightly closed.
[0046]
Next, when the passage 28 is opened by separating the valve disk 26 from the valve seat 32, the upper cylinder chamber 58a of the first cylinder mechanism 42a and the second cylinder mechanism 42b is moved under the switching action of a switching valve (not shown). By supplying the pressurized fluid, respectively, the pair of pistons 60a, 60b descends substantially simultaneously, and the piston rods 64a, 64b, the yoke 78 and the displacement block 80 come down together to return to the initial position. In this case, the lower cylinder chamber 58b is open to the atmosphere under the action of a switching valve (not shown).
[0047]
That is, after the displacement block 80 is tilted by the predetermined angle θ in the opposite direction under the action of the roller 92 engaging with the elongated holes 88a and 88b, the valve disc 26 is securely separated from the valve seat 32, The yoke 78 and the displacement block 80 are lowered integrally with the pair of piston rods 64a and 64b under the engagement of the pin member 94 with the joint groove 96, thereby returning to the initial position. At this time, a shock when the pistons 60a and 60b reach the bottom dead center may be absorbed by a second buffer member (not shown) provided on the bottom surfaces of the pistons 60a and 60b.
[0048]
In the present embodiment, the pin member 94 locked on the yoke 78 via the holding blocks 90a and 90b and the holding plate 93 is engaged with the engaging groove 96 of the displacement block 80, so that the yoke 78 and the displacement The block 80 is held so as to be positioned at a predetermined position along the up-down direction, and both are provided so as to integrally move up and down. Therefore, in the present embodiment, it is not necessary to provide a guide means for guiding the yoke 78 and the displacement block 80 when the yoke 78 and the displacement block 80 are moved up and down. Thus, the manufacturing cost can be reduced.
[0049]
Further, in the present embodiment, the step of notching the guide groove 10 (see FIG. 14) on the side surface of the cylinder tube 9 as in the related art is omitted, thereby simplifying the manufacturing process and reducing the manufacturing cost. it can.
[0050]
Further, in the present embodiment, since the guide means for generating dust and the like when slidingly displaced along the guide groove 10 is not provided unlike the related art, by suppressing the generation of dust and the like, for example, It can be suitably used in an environment requiring cleanliness such as a clean room.
[0051]
Next, a gate valve 110 according to another embodiment of the present invention is shown in FIGS. The same components as those of the gate valve 20 according to the embodiment shown in FIG. 1 are denoted by the same reference numerals, and detailed description thereof will be omitted.
[0052]
In the gate valve 110 according to the other embodiment, the pin member 94 locked to the yoke 78 and the engagement groove 96 formed on both side surfaces of the displacement block 80 constituting the gate valve 20 according to the above embodiment. And a pair of connecting pins 112a and 112b that integrally hold the yoke 78 and the displacement block 80 in a state where the yoke 78 and the displacement block 80 are positioned at predetermined positions where there is no positional deviation in the vertical direction and the front and rear direction, respectively. There is a feature in the point.
[0053]
One end of each of the pair of connection pins 112a and 112b is fixed to the bottom surface of the displacement block 80 by screwing, and the other end is loosely fitted into the elongated hole 114 of the yoke 78 via a clearance. I have. Therefore, the other ends of the connection pins 112a and 112b are provided to be displaceable along the elongated holes 114. The heads of the connecting pins 112 a and 112 b formed in a tapered cross section are provided so as to be locked by a tapered portion 116 formed in the elongated hole 114.
[0054]
In this case, the yoke 78 is pressed downward by the resilient force of the spring member 84, and the head of the pair of connecting pins 112 a and 112 b fixed to the bottom surface of the yoke 78 is the length of the displacement block 80. The yoke 78 and the displacement block 80 are held in a state where they are both positioned at predetermined positions along a vertical direction or the like separated by a predetermined distance by being locked by the tapered portion 116 of the hole 114. Therefore, the yoke 78 and the displacement block 80 move up and down integrally with the positioning and holding.
[0055]
After the displacement block 80 reaches the displacement end position, the yoke 78 further rises against the elastic force of the spring member 84, and at this time, the heads of the connecting pins 112a and 112b As a result, the displacement block 80 tilts by a predetermined angle θ about the support roller 46 as a fulcrum (see FIG. 12).
[0056]
In another embodiment, the yoke 78 and the displacement block 80 can be held at a predetermined position in the vertical direction by a simple structure of a pair of connecting pins 112a and 112b, thereby further reducing the manufacturing cost. Can be reduced.
[0057]
The other configuration and operation and effect are the same as those of the above-described embodiment, and therefore, detailed description thereof will be omitted.
[0058]
In the embodiment of the present invention, a first cylinder mechanism 42a and a second cylinder mechanism 42b that integrally displace the pistons 60a, 60b and the piston rods 64a, 64b under the action of the pressure fluid are used as the plurality of drive mechanisms. However, the present invention is not limited to this, and it goes without saying that, for example, a linear actuator (not shown), a rotary drive source, an electric actuator, or the like may be used as the plurality of drive mechanisms.
[0059]
【The invention's effect】
According to the present invention, the following effects can be obtained.
[0060]
That is, by providing the positioning and holding means for integrally holding the yoke and the displacement block in a positioned state, the guide means is not required, so that the number of parts can be reduced and the manufacturing cost can be reduced.
[0061]
In addition, since the step of notching the guide groove can be omitted, the manufacturing process is simplified, and the manufacturing cost can be further reduced.
[0062]
Further, by suppressing the generation of dust, it can be suitably used in an environment requiring cleanliness such as a clean room.
[Brief description of the drawings]
FIG. 1 is a schematic perspective view of a gate valve according to an embodiment of the present invention.
FIG. 2 is an exploded perspective view of the gate valve shown in FIG.
FIG. 3 is a longitudinal sectional view taken along an axial direction of the gate valve.
FIG. 4 is a transverse sectional view taken along the line IV-IV of FIG. 3;
FIG. 5 is a transverse sectional view taken along the line VV of FIG. 3;
FIG. 6 is a longitudinal sectional view taken along the line VI-VI in FIG. 3;
7 is a longitudinal sectional view showing a state in which the valve rod is tilted by an angle θ from the state shown in FIG. 6 and the valve disc is seated on the valve seat.
FIG. 8 is a partially enlarged longitudinal sectional view showing a packing for sealing a valve rod.
FIG. 9 is a longitudinal sectional view along an axial direction of a gate valve according to another embodiment of the present invention.
FIG. 10 is a transverse sectional view taken along line XX of FIG. 9;
11 is a longitudinal sectional view taken along the line XI-XI in FIG.
12 is a longitudinal sectional view showing a state in which the valve rod is tilted by the angle θ from the state shown in FIG. 11 and the valve disc is seated on the valve seat.
FIG. 13 is a longitudinal sectional view along the axial direction of a gate valve according to the related art.
14 is a longitudinal sectional view of the gate valve shown in FIG. 13 along the axial direction.
FIG. 15 is a perspective view of a cylinder tube constituting the gate valve shown in FIG.
[Explanation of symbols]
20, 110: gate valve 22: drive unit
24: Valve rod 26: Valve disc
28 ... passage 30 ... valve box
32: Valve seat 36, 38: Base plate
40: Casing 42a, 42b: Cylinder mechanism
44a, 44b: through hole 46: support roller
48, 86: recess 50: bellows
51: packing 53: cushioning member
56a, 56b: Cylinder tube 58, 58a, 58b: Cylinder chamber
60a, 60b ... piston 64a, 64b ... piston rod
70a, 70b: piston packing 78: yoke
80: Displacement block 84: Spring member
88a, 88b, 114 ... long hole 90a, 90b ... holding block
91, 94: Pin member 92: Roller
93: holding plate 96: engaging groove
112a, 112b ... connecting pins

Claims (7)

A drive source having a plurality of drive mechanisms arranged substantially in parallel,
A yoke that is connected to the drive shafts of the plurality of drive mechanisms, respectively, and that is displaced along the axial direction of the drive shaft under the drive action of the plurality of drive mechanisms;
With displaced along said yoke integrally with the axial direction, a displacement block provided tiltably as a fulcrum support member in a displacement terminal end along the axial direction,
A valve disc that opens and closes a passage through a valve rod connected to the displacement block;
Positioning and holding means for integrally holding the yoke and the displacement block in a state of being positioned along the axial direction,
Equipped with a,
The positioning and holding means includes a spring member interposed between the yoke and the displacement block, a set of holding blocks fixed to the yoke with the spring member interposed therebetween, and a pair of the holding blocks. A set of holding plates fixed and extending along the side surface of the displacement block, a set of pin members respectively locked to the set of holding plates, and the one set formed on the side surface of the displacement block A pair of engagement grooves with which the respective pin members engage. The gate valve according to claim 1,
Said positioning and holding means includes a gate valve, characterized in that one end portion is loosely fitted into the long hole of the yoke, includes a connecting pin the other end is fixed to the displacement block. The gate valve according to claim 1 or 2 ,
Wherein the plurality of drive mechanisms, gate valve, characterized by comprising a piston and piston rod under the action of the pressure fluid supplied to the cylinder chamber from the first cylinder mechanism and the second cylinder mechanism is displaced along the axial direction . The gate valve according to claim 1,
The support member includes a pair of support rollers rotatably supported at one end of the displacement block, and the support roller is provided so as to engage with a curved concave portion at a displacement end position of the displacement block. A gate valve. The gate valve according to claim 4 ,
The gate valve according to claim 1, wherein the concave portion is provided with a first buffer member that absorbs an impact when the support roller comes into contact. The gate valve according to claim 3 ,
A gate valve, wherein each of the first cylinder mechanism and the second cylinder mechanism is provided with a second buffer member that absorbs an impact given to the piston when the piston reaches a bottom dead center. The gate valve according to claim 3 ,
The first cylinder mechanism and the second cylinder mechanism are connected to each other, and have a first base plate and a second base plate that are integrally formed by being stacked, and the first base plate and the second base plate are provided between A gate valve provided with a seal member surrounding an outer peripheral surface of a valve rod .

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