JP3574293B2 - Micromachining method using a small self-propelled precision work robot and a resonant microhopping tool - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
INDUSTRIAL APPLICABILITY The present invention is capable of performing precision processing by applying dents at minute intervals on a processing surface at every moving step, and is particularly applicable to a micro-die production technique for microlenses and microparts. The present invention relates to a small-sized self-propelled precision work robot that can be continuously produced at a low cost and a micromachining method using a resonance type micro-hopping tool.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, a method of mass-producing fine parts in a micromachine or the like is roughly classified into a mechanical processing method and an electronic processing method, and an electronic processing method is used for an integrated part of several microns or less such as an IC. A so-called electronic drawing, a processing method using an electrochemical reaction device or the like is applied. At present, depending on such an IC process, an extremely large capital investment is required.
On the other hand, the creation of microscopic parts with a three-dimensional shape such as lens molds is often performed by ultra-precision mechanical processing. For this reason, it is necessary to respond to the production of microparts by increasing the machine precision of machine tools. However, there is a limit to the positioning accuracy due to the size of the machine tool itself, and it is difficult to improve the accuracy beyond a predetermined level due to cost restrictions.
This is because in precision machining by these machine tools, expansion and contraction of components due to temperature changes, vibrations generated by the operation of the machine itself, and the like become obstacles, and machining accuracy is limited. The limit of the processing accuracy depends on the size of the machine. For example, if the size of the machine is 1, the processing accuracy is about 1 / 10,000 (the processing accuracy is about 10 to 1 μm in a machine of 1 m). It is common. Huge costs are required to further improve the performance of machine tools.
[0003]
For this reason, the present inventors have already proposed that the machine tool itself be a millimeter-size microminiature robot as a method for solving the problem of machining accuracy, and have developed several types of microminiature robots. Made and announced.
Because such a mini mechanism is small, the mechanism itself can be applied without difficulty by applying the conventional machining principle, and high-precision precision machining can be realized at low cost. With the significance of ensuring the continuity of macro-micro processing technology that fills the gap between conventional mechanical processing technology and electronic fine processing technology, it has begun to receive high attention.
[0004]
[Problems to be solved by the invention]
Therefore, the present invention further improves the micromachining method using a micro robot that overcomes the limitations of precision machining by a conventional machine tool, and enables continuous machining at a low cost without being affected by the vibration of the machine tool. It is intended to be performed automatically with accuracy.
[0005]
[Means for Solving the Problems]
For this reason, the technical solution adopted by the present invention is:
To a microminiature self-propelled precision work robot that has a piezoelectric element attached between two frames constituting the robot and an electromagnet attached to the legs of each frame, a piezoelectric element and an upper weight are attached to the tip of the beam. A cantilever type micro-hopping tool equipped with a fine tool is mounted, and a drive frequency signal is applied to the piezoelectric element of the microminiature self-propelled precision work robot and a drive frequency signal is alternately applied to the electromagnet. By moving the ultra-small self-propelled precision work robot to the scale insect state, and synchronizing the drive frequency signal and the drive frequency signal applied to the piezoelectric element of the micro-hopping tool, the ultra-small self-propelled A small self-propelled precision work machine characterized in that dents are made at minute intervals on the processing surface by a micro hopping tool at each movement step of the precision work robot It is a fine processing method by Tsu door and the resonance micro-hopping tool. Further, a micro-hopping tool having a different length of the cantilever, a mass of an upper weight, or a type of a fine tool is selected and mounted on the microminiature self-propelled precision work robot, and a punch given on a processing surface is selected. A micromachining method using a small self-propelled precision work robot and a resonant microhopping tool, characterized in that the interval, size or shape of the marks can be adjusted.
[0006]
Embodiment
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIGS. 1 to 4 are views showing one embodiment of a micromachining method using a microminiature self-propelled precision work robot and a resonance type micro-hopping tool of the present invention, and FIG. 1 is equipped with the micro-hopping tool of the present invention. FIG. 2 (A) is a plan view of FIG. 1 and FIG. 2 (B) is a microminiature self-propelled precision machine with a micro-hopping tool removed. 3A is a front view of the micro-hopping tool, FIG. 3B is a side view thereof, and FIG. 4 shows a fine tool mounted on the micro-hopping tool.
As shown in FIG. 1, a microminiature self-propelled precision work robot 1 used in the micromachining method of the present invention includes a piezoelectric element 5 mounted on predetermined frames 1A and 1B, a horseshoe-shaped leg 6A and a coil 6B. It has a driving device constituted by an electromagnet 6 composed of a micro-hopping tool 2 having a piezoelectric element 9, an upper weight 8, and a fine tool 10 at its distal end, and grips the base end of the cantilever 11.
[0007]
FIG. 2A is a plan view of the microminiature self-propelled precision work robot 1 equipped with the micro-hopping tool 2 configured as described above.
FIG. 2 (B) is a front view of the microminiature self-propelled precision work robot 1 with the micro-hopping tool 2 removed, and a height adjusting micrometer 7 is screwed onto the lower center of the frames 1A and 1B. A grip 13 whose height is adjustable depending on the condition is provided, and the grip 13 holds the base end of the cantilever 11 of the micro-hopping tool 2.
Frames 1A (front) and 1B (rear) of the front and rear of the microminiature self-propelled precision work robot 1 (the front-rear direction in which the horizontal direction of the drawing is the traveling direction of the microminiature self-propelled precision work robot 1 in FIG. 2). At the lower end, a front electromagnet 6F and a rear electromagnet 6R each comprising a leg portion 6A such as a horseshoe-shaped iron core and a coil portion 6B are arranged, and the rear electromagnet is sandwiched between the front and rear frames 1A and 1B. A right piezoelectric element 5R and a left piezoelectric element 5L are provided, and a pressing spring (restoring spring) 14 is provided at a connecting portion 15 of the front and rear frames 1A and 1B.
By applying a signal of a predetermined frequency to the left and right piezoelectric elements 5L and 5R in the connecting portion 15 of the front and rear frames 1A and 1B, the frames 1A and 1B vibrate around the connecting portion 15 and simultaneously apply a signal of a predetermined frequency. The front electromagnet 6F and the rear electromagnet 6R are alternately excited and demagnetized, and the ultra-small self-propelled precision work robot 1 is configured to move on the processing surface 3 (FIG. 1) in the state of a scale insect by the legs 6A, 6A. I have.
[0008]
On the other hand, as shown in FIG. 3, the micro-hopping tool 2 has a piezoelectric element 9 at the tip of a cantilever 11 made of a spring material such as phosphor bronze, an upper weight 8 and a fine tool 10 at a lower part. When a signal having a predetermined frequency is applied to the upper weight 8, the vibration is excited at the natural frequency of a vibration system including the cantilever 11 and the upper weight 8 having a predetermined mass. In the drawing, reference numeral 12 denotes a holding spring (restoring spring).
The fine tool 10 attached to the lower part of the tip of the cantilever 11 has a shape as shown in FIG. 4, and is made of a material of high hardness such as diamond. The tip angle α of the lower end is selected according to the processing angle required on the processing surface, and is set to 90 ° in the illustrated example.
[0009]
A micromachining method using the microminiature self-propelled precision work robot 1 equipped with the micro-hopping tool 2 configured as described above will be described below.
A micro-hopping tool 2 having a predetermined natural frequency and having a piezoelectric element 9 at the tip of a cantilever 11 and an upper weight 8 having a predetermined mass and a fine tool 10 at a lower portion is, as shown in FIG. It is mounted on the self-propelled precision work robot 1 and mounted on the work surface 3 of the work.
Next, as shown in FIG. 5, a signal of a predetermined frequency is transmitted from a function generator or a personal computer DA board in a control device (not shown) to the left and right piezoelectric elements 5L, 5R of the microminiature self-propelled precision work robot 1 and front and rear. It is sent to the electromagnets 6F, 6R and the piezoelectric element 9 of the micro-hopping tool 2.
A signal to the piezoelectric elements 5 and 9 is selected as a sine wave, and a signal to the electromagnet 6 is selected as a rectangular wave. These sine and square waves are synchronized in frequency. The signals applied to the left and right piezoelectric elements 5L and 5R of the microminiature self-propelled precision work robot 1 are shown in FIG. 2B by operating the left and right piezoelectric element drive circuits via the piezoelectric element control circuit. The frame bodies 1A and 1B vibrate (oscillate) around the connecting portion 15. As shown in FIG. 5, in synchronization with the vibrations of the frames 1A and 1B centered on the connecting portion 15, the front electromagnet 6F and the rear electromagnet receive intermittent rectangular waves from the electromagnet drive circuit via the electromagnet control circuit. 6R are alternately excited and demagnetized, and the microminiature self-propelled precision work robot 1 moves forward on the processing surface 3 (FIG. 1) in the state of a scale insect (in FIG. 1, in front of the paper surface, in FIG. 2, rightward in the drawing arrow, and in FIG. 5). (Down arrow in the drawing).
[0010]
On the other hand, the sine wave sent to the piezoelectric element 9 of the micro-hopping tool 2 via the piezoelectric element control circuit activates the piezoelectric element drive circuit to excite the piezoelectric element 9. This means that the piezoelectric element 9 is excited by the natural frequency of the vibration system of the micro-hopping tool 2 including the cantilever 11 and the upper weight 8 having a predetermined mass at the tip of the cantilever 11 and the fine tool 10 at the lower part. This means that a large amplitude is obtained at the resonance point. Experiments have confirmed that even when the amplitude of the input piezoelectric element 9 is several microns, amplification up to about 900 microns is caused by resonance. This demonstrates that the required machining stroke can be obtained with low energy consumption.
Thus, as shown in FIG. 1, a dent 4 is formed on the processing surface 3 by the micro-hopping tool 2. At the time of driving with the micro-hopping tool 2, the leg 6A is firmly attracted to the processing surface by the excitation of the electromagnet 6, and the microminiature self-propelled precision work robot 1 does not float unnecessarily.
As described above, the signals having the same frequency as the signal for causing the processing vibration of resonance by the piezoelectric element 9 of the micro-hopping tool 2 are generated on the left and right piezoelectric elements 5L, 5R and 5R of the microminiature self-propelled precision work robot 1. Since the front and rear electromagnets 6F and 6R are also applied, the forward speed of the microminiature self-propelled precision work robot 1 and the machining of the micro-hopping tool 2 operate in synchronization, and the microminiature self-propelled precision robot The step length in micron units of the work robot 1 and the processing vibration of the micro-hopping tool 2 can be advanced synchronously, and fine processing can be continuously and automatically performed with high precision. In addition, since the vibration for driving the microminiature self-propelled precision work robot 1 and the processing vibration of the micro-hopping tool 2 are synchronized, the influence of the vibration of the microminiature self-propelled precision work robot 1 is affected. Since it is not received, more accurate processing can be realized.
[0011]
FIG. 6 shows an example of processing performed according to the above-described principle. A micro tool 10 is formed by using a conical diamond having a tip diameter of 5 μm and processing at a drive frequency of about 20 Hz. It can be seen that the dents are continuously processed precisely at predetermined intervals.
In addition, if a tip tool having various types is used as the fine tool 10 instead of the conical diamond tool, it is possible to generate various shapes of micro shapes, and a low-cost automatic production system for micro parts can be provided. Basic technology is established.
In addition, by changing the natural frequency of the vibration system by selecting micro-hopping tools with different cantilever lengths or masses of the upper weight, it is also possible to adjust the interval between dents applied on the processing surface by changing the natural frequency of the vibration system It is possible.
[0012]
Although one embodiment of the present invention has been described above, within the scope of the present invention, the form of the microminiature self-propelled precision work robot, the shape of the frame, the form and shape of the piezoelectric element and the electromagnet, and the arrangement form, Form of gripping form of micro-hopping tool, form and shape of micrometer for adjusting height of holding section, form of micro-hopping tool, form and material of cantilever, form and shape and arrangement form of upper weight and piezoelectric element, form of fine tool The shape, type, mounting form, and the like can be appropriately selected.
[0013]
【The invention's effect】
As described above in detail, according to the present invention, by synchronizing the drive frequency of the microminiature self-propelled precision working robot, which is a moving mechanism, with the resonance frequency of the cantilever of the micro-hopping tool, The workpiece is moved while giving a dent on the processing surface, so that fine processing can be continuously and automatically performed with high precision. In addition, since the vibration for driving the microminiature self-propelled precision work robot is synchronized with the machining vibration of the micro-hopping tool, it is affected by the vibration of the microminiature self-propelled precision work robot. Instead, the high precision of the ultra-small self-propelled precision work robot, which minimizes the effects of temperature changes, etc., can be fully utilized to achieve higher precision processing.
In addition, the ultra-small self-propelled precision work robot, which is a moving mechanism, intermittently drives the piezoelectric element and the electromagnet to move on the processing surface in the state of a worm, so that the magnetic material processing surface such as iron is perpendicular to the processing surface. It can travel precisely without guide rails or the like even on a ceiling or ceiling surface.
Further, by exciting the piezoelectric element of the micro-hopping tool having a predetermined mass disposed at the tip of the cantilever at a natural frequency of a predetermined vibration system, a large amplitude can be obtained at a resonance point. As a result, a large amplitude can be obtained as compared with the amplitude of the input piezoelectric element, and a required machining stroke can be obtained with small energy consumption.
As described above, according to the present invention, it is possible to break down the limits of precision machining by conventional machine tools, greatly improve energy efficiency and continuously perform more precise machining automatically and extremely usefully. is there.
[Brief description of the drawings]
FIG. 1 is a side view schematically illustrating a micromachining method using a microminiature self-propelled precision work robot equipped with a micro-hopping tool according to an embodiment of the present invention.
FIG. 2 shows a microminiature self-propelled precision work robot used in the micromachining method of the present invention. FIG. 2 (A) is a plan view of FIG. 1, and FIG. 2 (B) is a micro-hopping tool. It is a front view of the microminiature self-propelled precision work robot removed.
3A and 3B show a micro-hopping tool used in the micromachining method of the present invention. FIG. 3A is a front view, and FIG. 3B is a side view thereof.
FIG. 4 shows a fine tool used in the fine processing method of the present invention.
FIG. 5 is a diagram showing a flow of transmitting a signal of a predetermined frequency from a control device in the micromachining method of the present invention.
FIG. 6 is an enlarged view of a dent of a processed surface showing a processing example processed according to the principle of the fine processing method of the present invention.
[Explanation of symbols]
1 Ultra-small self-propelled precision work robot 1A Frame (front)
1B frame (rear part)
2 Micro-hopping tool 3 Work surface 4 Dust mark 5 Piezoelectric element (for ultra-small self-propelled precision work robot)
5R Right piezoelectric element 5L Left piezoelectric element 6 Electromagnet 6A Leg 6B Coil section 6F Front electromagnet 6R Rear electromagnet 7 Height adjusting micrometer 8 Upper weight 9 Piezoelectric element (for micro hopping tool)
Reference Signs List 10 Micro tool 11 Cantilever 12 Holding spring 13 Holding part 14 Holding spring 15 Connecting part

Claims (2)

To a microminiature self-propelled precision work robot having a piezoelectric element attached between two frames constituting a robot and electromagnets attached to the legs of each frame, a piezoelectric element and an upper weight A cantilever type micro-hopping tool equipped with a micro tool is mounted, and a drive frequency signal is applied to the piezoelectric element of the microminiature self-propelled precision work robot and a drive frequency signal is alternately applied to the electromagnet. By moving the ultra-small self-propelled precision working robot to the scale insect state, and synchronizing the drive frequency signal and the drive frequency signal applied to the piezoelectric element of the micro-hopping tool, A small self-propelled precision work machine characterized in that micro-hopping tools are used to make dents at minute intervals on the processing surface at each step of movement of the precision work robot. Tsu door a fine processing method due to the resonance micro-hopping tool. Select the micro-hopping tool having a different length of the cantilever or the mass of the upper weight or the type of the fine tool, and mount the micro-hopping tool on the microminiature precision work robot. 2. The micromachining method according to claim 1, wherein the spacing, size, or shape can be adjusted.

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