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JP3574576B2 - Degassing device - Google Patents
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JP3574576B2 - Degassing device - Google Patents

Degassing device Download PDF

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Publication number
JP3574576B2
JP3574576B2 JP33208198A JP33208198A JP3574576B2 JP 3574576 B2 JP3574576 B2 JP 3574576B2 JP 33208198 A JP33208198 A JP 33208198A JP 33208198 A JP33208198 A JP 33208198A JP 3574576 B2 JP3574576 B2 JP 3574576B2
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Prior art keywords
liquid
chamber
tube
gas
gas permeable
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JP33208198A
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Japanese (ja)
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JP2000140506A (en
Inventor
弘行 西井
肇 大谷
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Nitto Denko Corp
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Nitto Denko Corp
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Description

【0001】
【発明の属する技術分野】
本発明は液体の脱気装置に関するものである。
【0002】
【従来の技術】
液体中の溶存ガスは、管の腐食進行、気泡の発生、熱交換率の低下等を生じるので、液体の使用目的の如何によっては脱気が必要であり、その脱気装置の一つとして、図5に示すように、被脱気液体流入口111’と流出口112’を有する減圧チャンバ−1’内に気体透過性チュ−ブ2’を収容し、該チュ−ブ2’の両端を前記流入口111’と流出口112’に連結し、チャンバ−1’内をチャンバ−上部の真空引き口32’から真空ポンプで減圧しつつ溶存ガス含有液体を気体透過性チュ−ブ2’に流通させていく方式が公知である。
【0003】
【発明が解決しようとする課題】
上記脱気装置のチャンバ−内に液漏れが生じると、やがては漏れ液が真空引きポンプに吸い込まれるので、この吸い込み液を検知して脱気装置の運転を停止している。
しかしながら、通常、液漏れ流量が微量であり漏れ速度が遅いので、チャンバ−内の漏れ液の液面が真空引きポンプで吸い込まれ得るレベルに達するまでにある程度の時間(T)が経過し、その間、図5のL’で示すように気体透過性チュ−ブ2’が漏れ液に浸漬された状態とされる。図5において、L’は真空引きポンプによる漏れ液の吸い込みが可能となる液面を仮想的に示している。
而して、図5の液面L’で示すように気体透過性チュ−ブ2’の大部分が漏れ液に浸漬された状態では、気体透過性チュ−ブの有効面積が減少するので、脱気流量被脱ガス液がそれだけ低減され、上記脱気装置停止までの時間Tの間の脱気が脱気不良となり、脱気による所定の低溶存ガス量を保証し難い。
【0004】
また、被脱ガス液の主成分が溶剤で溶質として固形分を含んでいる場合、例えば被脱ガス液がインク液の場合、従来の脱気装置では、吸引口が一個であり、この吸引口が減圧下での溶剤の迅速な気化のために乾燥固化された固形分で閉塞され易く、チャンバ−内漏れ液の真空引きポンプへの移行が生じ難くなり、液漏れ検知を的確に行え得ずに脱気装置の運転停止を適時に行い得ないことがある。
【0005】
本発明の目的は、気体透過性チュ−ブを用いて脱気処理を行う場合、微量の液漏れが生じても脱気効率をよく維持して確実な液漏れ検知により運転を的確に停止できる脱気装置を提供することにある。
【0006】
【課題を解決するための手段】
請求項1に係る脱気装置は減圧チャンバーに気体透過性チューブを収容し、該気体透過性チューブへの被脱ガス液の入口と出口を前記チャンバーに設け、先端部に複数の吸引孔を有する真空引き用管を前記チャンバーに取付けたことを特徴とする。
請求項2に係る脱気装置は、減圧チャンバーに気体透過性チューブを収容し、該気体透過性チューブへの被脱ガス液の入口と出口を前記チャンバーに設け、先端部を多岐管形にすると共に複数個の吸引孔を有する真空引き用管を、その先端部がチャンバー内底面に近接するように前記チャンバーに取付けたことを特徴とする。
【0007】
【発明の実施の形態】
以下、図面を参照しつつ本発明の実施の形態について説明する。
図1は本発明に係る脱気装置の一例を示している。
図1において、1は真空チャンバ−であり、被脱気液体流入口111と流出口112を備えている。2は気体透過性チュ−ブであり、チャンバ−1内に多回ル−プ状に納め、両端を被脱気液体流入口111と流出口112に連結してある。3は先端部に複数箇の吸引孔31,…(先端開口も吸引孔に属する)を設けた真空引き用管であり、チャンバ−上側壁よりチャンバ−1内に導入して先端30をチャンバ−内底部12に位置させてある。
【0008】
本発明に係る脱気装置を使用して液体を脱気するには、真空引き用管3の出口32に真空引きポンプを連結し、チャンバ−1内を所定の減圧度に保持しつつ気体透過性チュ−ブ2に液体を流通させていく。
【0009】
この脱気処理中に、チャンバ−1内に液漏れが生じ、真空引き用管3の先端30が漏れ液面で閉ざされた状態になれば、真空引き用管3内がチャンバ−内から遮断されて真空引き用管3内の減圧度が急激に増して漏れ液の真空引きポンプへの吸い込みが行われる。従って、気体透過性チュ−ブ3の先端部(吸引孔を設けた部分)を多回ル−プ状気体透過性チュ−ブ2の最下面20よりも下方の位置に配しておけば、漏れ液面の気体透過性チュ−ブ2への接触まえに漏れ液を真空引きポンプへ吸い込ませ得て気体透過性チュ−ブ2が漏れ液に浸漬されるのを防止できる。また、上記漏れ液の真空引きポンプへの吸い込みが瞬時に行なわれるから、実質上チャンバ−1内が上記所定の減圧度を保持される。従って、液漏れにもかかわらず、充分な脱気効率での脱ガスを保証できる。
【0010】
上記漏れ液の真空引きポンプへの吸い込み量がある程度の量となって液漏れが検知されれば、脱気運転を停止するが、この停止までの間、充分な脱気効率での脱ガスが保証されるから、運転停止に多少の時間遅れがあっても、さしたる支障は来さない。
【0011】
上記において、被脱ガス液がインク液のように溶剤を主成分とする液体の場合、特に溶剤がエタノ−ルのような低分子有機溶剤の場合、漏れ液中の溶剤の減圧下での急速な気化により吸引孔が乾燥固形分で閉塞され易いが、本発明に係る脱気装置では、真空引き用管の吸引孔を複数箇としているから、一箇の場合に較べ全部の吸引孔の閉塞を充分に抑えてチャンバ−内液漏れを真空引きポンプによく導き得、液漏れ検知による脱気装置の停止を的確に行うことができる。
【0012】
上記において、真空引き用管3には図2に示すように先端部が多岐管状であり、各分岐管部の先端開口31を吸引口とするものを使用することもできる。
【0013】
上記において、真空引き用管の複数箇の吸引孔または吸引口は、通常、多回ル−プ状気体透過性チュ−ブの下端とチャンバ−内底面との間に位置される。
【0014】
上記気体透過性チュ−ブの下端とチャンバ−内底面との間隔を小さくして脱気装置の小型化を図る場合は、図3に示すように、真空引き用管3の多孔先端部をL字上に曲げて気体透過性チュ−ブの下端20とチャンバ−内底面12との間に位置させることができる。
【0015】
上記において、チャンバ−の漏れ液の液面が気体透過性チュ−ブの膜面積の10%程度を浸漬する高さ(h)であれば、気体透過性チュ−ブの膜面積の90%を使用して充分な脱気効率て脱ガスできるから、真空引き用管の複数箇の吸引孔または吸引口を上記の高さhとル−プ状気体透過性チュ−ブ下面との間に位置させてもよい。
【0016】
上記気体透過性チュ−ブ2には、例えばポリテトラフルオロエチレンチュ−ブ、テトラフルオロエチレン−パ−フルオロアルキルビニルエ−テル共重合体チュ−ブ、エチレン−テトラフルオロエチレン共重合体チュ−ブ、ポリクロロトリフルオロエチレンチュ−ブ等のフッ素樹脂チュ−ブ、ポリエチレンチュ−ブ、ポリプロピレンチュ−ブを使用でき、また単位容積当たりの膜面積を広くするために多数本の中空糸体を集束して用いることが好ましく、中空糸体の径は内径数100μm〜数mm、集束本数は数10〜数100本とすることができる。
【0017】
上記減圧チャンバ−1には、例えば、金属(特に、ステンレス)、ガラス、プラスチック等を使用でき、プラスチックとしてはポリテトラフルオロエチレンやテトラフルオロエチレン−パ−フルオロアルキルビニルエ−テル共重合体等のフッ素樹脂、ポリプロピレン、ポリエチレン等を例示できる。
【0018】
上記減圧チャンバ−の液体入口(及び出口)と気体透過性チュ−ブとの接続には、例えば、図4に示すように、チュ−ブ2の端部に入口金具111(出口金具112)を楔113と袋ナット114を用いて接続し、その金具を減圧チャンバ−上壁にパッキンク115とナット116とにより結着する方式を使用できる。尤も、この構成は一例にすぎず、減圧チャンバ−上部に並列気体透過性チュ−ブに対する被脱気液入口と出口を設けることができれば適宜の構成にできる。
【0019】
上記真空引き用管3には、漏れ液に対し耐食性を有するものであれば適宜のものを使用でき、例えば、例えばポリテトラフルオロエチレン管、テトラフルオロエチレン−パ−フルオロアルキルビニルエ−テル共重合体管、エチレン−テトラフルオロエチレン共重合体管、ポリクロロトリフルオロエチレン管、ポリプロピレン管、ポリエチレン管等を使用できる。
【0020】
【実施例】
〔比較例〕
内径1.0mm、厚さ0.13mm、長さ3.5mのポリテトラフルオロエチレンチュ−ブ130本を集束し多回ル−プ状に形成した気体透過性チュ−ブを、上部に吸引口を設けた減圧チャンバ−内に収容した。
微量液漏れ箇所を作り、チャンバ−内減圧度を−720mmHgとするように真空ポンプを駆動し、溶存酸素量約8ppmの被脱ガス液を100mリットル/minで流通させて脱気を試みたところ、短時間で脱気不能となった。
【0021】
〔実施例〕
先端部に直径3mmの吸引孔を6箇穿孔し先端を45°にカットした直径10mmのステンレス管を真空引き用管3として用い、先端をチャンバ−内の底面に当接し、全ての吸引孔をル−プ状気体透過性チュ−ブの最下面より下方に配置した以外、比較例に同じとした。
比較例と同様に微量液漏れ箇所を作り、チャンバ−内減圧度を−720mmHgとするように真空ポンプを駆動し、溶存酸素量約8ppmの被脱ガス液を100mリットル/minで流通させて脱気を試みたところ、脱気不能になるまでには比較例に較べ相当に長い時間が経過し、駆動後数分間での液出口で液の溶存酸素量は約3.2ppmの低溶存ガス量にできた。
【0022】
【発明の効果】
本発明に係る脱気装置においては、チャンバ−内に液漏れが発生しその漏れ液の真空引きポンプへの引き込みにより漏れを検知して脱気運転を停止するまでの間においても充分に高い脱気効率での脱ガスを保証できるから、その運転停止に多少の時間遅れがあっても許容でき、操作が容易であり、また、真空引き用管をチャンバ−内底面に達するまで引き込むだけでよく、液漏れセンサ−の取付け等が不要であり、保守が簡易でかつコスト的にも有利である。
【0023】
また、真空引き用管の吸引孔を複数箇としているから、被脱ガス液が溶剤を主成分とする溶液であって漏れ液が減圧のために固化するような場合でも、真空引き用管の通気性をよく保持でき上記の利点を達成できる。
【図面の簡単な説明】
【図1】本発明に係る脱気装置の一例を示す図面である。
【図2】本発明に係る脱気装置において使用する真空引き用管の先端部の別例を示す図面である。
【図3】本発明に係る脱気装置の別例の要部を示す図面である。
【図4】本発明に係る脱気装置における気体透過性チュ−ブと入口または出口との接続構造の一例を示す図面である。
【図5】従来の脱気装置を示す図面である。
【符号の説明】
1 減圧チャンバ−
111 入口
112 出口
2 気体透過性チュ−ブ
3 真空引き用管
31 吸引孔または吸引口
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a liquid deaerator.
[0002]
[Prior art]
Dissolved gas in the liquid causes corrosion progress of the tube, generation of bubbles, reduction of heat exchange rate, etc., so it is necessary to degas depending on the purpose of use of the liquid, and as one of the degassing devices, As shown in FIG. 5, a gas permeable tube 2 'is accommodated in a decompression chamber-1' having a degassed liquid inlet 111 'and an outlet 112', and both ends of the tube 2 'are closed. The liquid containing the dissolved gas is connected to the gas-permeable tube 2 'while the pressure in the chamber-1' is reduced by the vacuum pump from the vacuum port 32 'in the upper part of the chamber. A method of distributing is known.
[0003]
[Problems to be solved by the invention]
When a liquid leaks in the chamber of the deaerator, the leaked liquid is eventually sucked into the evacuation pump. The operation of the deaerator is stopped by detecting the sucked liquid.
However, since the amount of leaked liquid is usually very small and the leak rate is low, a certain time (T) elapses until the level of the leaked liquid in the chamber reaches a level that can be sucked by the vacuum pump. The gas permeable tube 2 'is immersed in the leaking liquid as shown by L' in FIG. In FIG. 5, L 0 ′ virtually indicates a liquid level at which the leaking liquid can be sucked by the vacuum pump.
As shown by the liquid level L 'in FIG. 5, when most of the gas permeable tube 2' is immersed in the leaking liquid, the effective area of the gas permeable tube is reduced. The degassing flow amount of the degassed liquid is reduced accordingly, and degassing during the time T until the degassing device is stopped causes poor degassing, and it is difficult to guarantee a predetermined low dissolved gas amount due to degassing.
[0004]
Further, when the main component of the liquid to be degassed is a solvent and contains a solid as a solute, for example, when the liquid to be degassed is an ink liquid, the conventional deaerator has one suction port, and this suction port Is liable to be clogged with solids dried and solidified due to rapid evaporation of the solvent under reduced pressure, making it difficult for liquid leaking from the chamber to be transferred to the vacuum pump, making it impossible to accurately detect liquid leakage. In some cases, the operation of the deaerator cannot be stopped in a timely manner.
[0005]
An object of the present invention is to perform a degassing process using a gas permeable tube, and even if a small amount of liquid leaks, the degassing efficiency can be maintained well and the operation can be accurately stopped by reliable liquid leak detection. An object of the present invention is to provide a deaerator.
[0006]
[Means for Solving the Problems]
The degassing apparatus according to claim 1 accommodates a gas permeable tube in a decompression chamber, provides an inlet and an outlet for the liquid to be degassed into the gas permeable tube in the chamber, and has a plurality of suction holes at the tip. characterized in that attaching the evacuation pipe before Symbol chamber.
The degassing device according to claim 2, wherein a gas permeable tube is housed in a decompression chamber, and an inlet and an outlet for the liquid to be degassed to the gas permeable tube are provided in the chamber, and the tip portion is formed into a manifold. A vacuum evacuation tube having a plurality of suction holes is attached to the chamber such that a tip portion thereof is close to a bottom surface in the chamber.
[0007]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 shows an example of the deaerator according to the present invention.
In FIG. 1, reference numeral 1 denotes a vacuum chamber having an inlet 111 and an outlet 112 for a liquid to be degassed. Numeral 2 denotes a gas-permeable tube, which is housed in a loop in the chamber-1 multiple times and has both ends connected to an inlet 111 and an outlet 112 of the liquid to be degassed. Numeral 3 is a vacuum evacuation tube provided with a plurality of suction holes 31,... (The opening of the tip also belongs to the suction hole) at the tip, and is introduced into the chamber-1 from the upper side wall of the chamber to bring the tip 30 into the chamber. It is located on the inner bottom 12.
[0008]
In order to deaerate the liquid using the deaerator according to the present invention, a vacuum pump is connected to the outlet 32 of the vacuum tube 3 and gas permeation is performed while maintaining the inside of the chamber 1 at a predetermined reduced pressure. The liquid is passed through the sex tube 2.
[0009]
During this deaeration process, if a liquid leaks into the chamber 1 and the tip 30 of the vacuum tube 3 is closed by the leaked liquid level, the inside of the vacuum tube 3 is shut off from the inside of the chamber. As a result, the degree of pressure reduction in the evacuation tube 3 rapidly increases, and the leaked liquid is sucked into the evacuation pump. Therefore, if the tip of gas-permeable tube 3 (the portion provided with the suction hole) is disposed below the lowermost surface 20 of gas-permeable tube 2 with multiple loops, Before the surface of the leaked liquid comes into contact with the gas permeable tube 2, the leaked liquid can be sucked into the vacuum pump, thereby preventing the gas permeable tube 2 from being immersed in the leaked liquid. Further, since the leaked liquid is sucked into the vacuum pump instantaneously, the inside of the chamber 1 is substantially maintained at the predetermined degree of reduced pressure. Therefore, degassing with sufficient degassing efficiency can be guaranteed despite liquid leakage.
[0010]
If the amount of the leaked liquid sucked into the evacuation pump becomes a certain amount and a liquid leak is detected, the deaeration operation is stopped, but until this stop, degassing with sufficient deaeration efficiency is performed. Because it is guaranteed, even if there is a slight delay in operation stoppage, there will be no problem.
[0011]
In the above description, when the liquid to be degassed is a liquid containing a solvent as a main component such as an ink liquid, particularly when the solvent is a low molecular organic solvent such as ethanol, the solvent in the leaked liquid is rapidly reduced under reduced pressure. Although the suction holes are liable to be clogged with dry solids due to undesired vaporization, the deaerator according to the present invention has a plurality of suction holes in the evacuation tube, so that all the suction holes are blocked compared to a single case. , The liquid leakage in the chamber can be guided to the evacuation pump well, and the deaerator can be stopped accurately by detecting the liquid leakage.
[0012]
In the above description, as shown in FIG. 2, the evacuation tube 3 may be a manifold having a distal end in a manifold shape, and the end opening 31 of each branch tube may be used as a suction port.
[0013]
In the above, the plurality of suction holes or suction ports of the evacuation tube are usually located between the lower end of the multi-loop gas permeable tube and the inner bottom surface of the chamber.
[0014]
To reduce the size of the deaerator by reducing the distance between the lower end of the gas permeable tube and the inner bottom surface of the chamber, as shown in FIG. It can be bent over and positioned between the lower end 20 of the gas permeable tube and the inner bottom surface 12 of the chamber.
[0015]
In the above, if the level of the leaking liquid in the chamber is a height (h) at which about 10% of the membrane area of the gas-permeable tube is immersed, 90% of the membrane area of the gas-permeable tube is reduced. Since the gas can be degassed with sufficient degassing efficiency, a plurality of suction holes or suction holes of the vacuum evacuation tube are positioned between the height h and the lower surface of the loop-shaped gas-permeable tube. You may let it.
[0016]
Examples of the gas permeable tube 2 include a polytetrafluoroethylene tube, a tetrafluoroethylene-perfluoroalkylvinylether copolymer tube, and an ethylene-tetrafluoroethylene copolymer tube. , A fluororesin tube such as polychlorotrifluoroethylene tube, a polyethylene tube, or a polypropylene tube can be used, and a large number of hollow fiber bodies are bundled in order to increase the membrane area per unit volume. Preferably, the diameter of the hollow fiber body is several hundred μm to several mm in inner diameter, and the number of bundles is several tens to several hundreds.
[0017]
For example, metal (particularly, stainless steel), glass, plastic, or the like can be used for the decompression chamber-1. Examples of the plastic include polytetrafluoroethylene and tetrafluoroethylene-perfluoroalkylvinyl ether copolymer. Examples thereof include a fluororesin, polypropylene, and polyethylene.
[0018]
To connect the liquid inlet (and outlet) of the decompression chamber to the gas-permeable tube, for example, as shown in FIG. 4, an inlet fitting 111 (outlet fitting 112) is provided at the end of the tube 2. A method can be used in which the wedge 113 and the cap nut 114 are used for connection, and the metal fitting is connected to the upper wall of the decompression chamber with the packing 115 and the nut 116. However, this configuration is merely an example, and an appropriate configuration can be adopted as long as the degassed liquid inlet and outlet for the parallel gas permeable tube can be provided at the upper part of the decompression chamber.
[0019]
As the evacuation tube 3, any material having corrosion resistance to the leaking liquid can be used. For example, a polytetrafluoroethylene tube or a tetrafluoroethylene-perfluoroalkylvinyl ether copolymer may be used. A coalesced tube, an ethylene-tetrafluoroethylene copolymer tube, a polychlorotrifluoroethylene tube, a polypropylene tube, a polyethylene tube and the like can be used.
[0020]
【Example】
(Comparative example)
A gas permeable tube formed by bundling 130 polytetrafluoroethylene tubes having an inner diameter of 1.0 mm, a thickness of 0.13 mm, and a length of 3.5 m and formed into a loop multiple times is provided with a suction port at the top. Was housed in a decompression chamber.
When a small amount of liquid leakage was created, the vacuum pump was driven so that the pressure in the chamber was reduced to -720 mmHg, and degassing was attempted by flowing a gas to be degassed with a dissolved oxygen amount of about 8 ppm at 100 ml / min. It became impossible to degas in a short time.
[0021]
〔Example〕
A stainless steel tube with a diameter of 10 mm, which is formed by drilling six suction holes with a diameter of 3 mm at the end and cutting the end at 45 °, is used as a vacuum evacuation tube 3, and the end is brought into contact with the bottom surface in the chamber, and all the suction holes are removed. It was the same as the comparative example except that it was arranged below the lowermost surface of the loop-shaped gas-permeable tube.
In the same manner as in the comparative example, a minute liquid leakage point was created, and the vacuum pump was driven so that the pressure inside the chamber was reduced to -720 mmHg, and the gas to be degassed having a dissolved oxygen amount of about 8 ppm was flowed at 100 ml / min. When the gas was tried, a considerably longer time elapsed than in the comparative example until the gas could not be degassed, and the dissolved oxygen amount of the liquid at the liquid outlet was about 3.2 ppm at the liquid outlet several minutes after driving. I was able to.
[0022]
【The invention's effect】
In the degassing apparatus according to the present invention, a sufficiently high degassing is performed even when a leak occurs in the chamber and the leak is detected by drawing the leaked liquid into a vacuum pump and the deaeration operation is stopped. Since degassing with gas efficiency can be guaranteed, even if there is a slight time delay in stopping the operation, operation is easy, and it is only necessary to pull in the evacuation tube until it reaches the inner bottom of the chamber. In addition, there is no need to mount a liquid leak sensor, and maintenance is simple and cost-effective.
[0023]
In addition, since the vacuum tube has a plurality of suction holes, even if the liquid to be degassed is a solution containing a solvent as a main component and the leaked liquid is solidified due to reduced pressure, the vacuum tube is not used. Good ventilation can be maintained, and the above advantages can be achieved.
[Brief description of the drawings]
FIG. 1 is a drawing showing an example of a deaerator according to the present invention.
FIG. 2 is a drawing showing another example of the distal end of the evacuation tube used in the deaerator according to the present invention.
FIG. 3 is a drawing showing a main part of another example of the deaerator according to the present invention.
FIG. 4 is a view showing an example of a connection structure between a gas permeable tube and an inlet or an outlet in a deaerator according to the present invention.
FIG. 5 is a view showing a conventional deaerator.
[Explanation of symbols]
1 Decompression chamber
111 Inlet 112 Outlet 2 Gas permeable tube 3 Vacuum tube 31 Suction hole or suction port

Claims (2)

減圧チャンバーに気体透過性チューブを収容し、該気体透過性チューブへの被脱ガス液の入口と出口を前記チャンバーに設け、先端部に複数の吸引孔を有する真空引き用管を前記チャンバーに取付けたことを特徴とする脱気装置。Accommodating the gas permeable tubes in the vacuum chamber, provided with inlet and outlet of the degassing liquid to the gas permeable tubes to the chamber, the evacuation pipe having a plurality of suction holes at the tip before Symbol chamber A degassing device characterized by being attached. 減圧チャンバーに気体透過性チューブを収容し、該気体透過性チューブへの被脱ガス液の入口と出口を前記チャンバーに設け、先端部を多岐管形にすると共に複数個の吸引孔を有する真空引き用管を、その先端部がチャンバー内底面に近接するように前記チャンバーに取付けたことを特徴とする脱気装置。Accommodating the gas permeable tubes in the vacuum chamber, provided with inlet and outlet of the degassing liquid to the gas permeable tubes in the chamber, evacuated with both a plurality of suction holes when the distal end to the manifold shapes A deaerator wherein a pipe is attached to the chamber such that a tip end thereof is close to a bottom surface in the chamber.
JP33208198A 1998-11-05 1998-11-05 Degassing device Expired - Fee Related JP3574576B2 (en)

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JP3574576B2 true JP3574576B2 (en) 2004-10-06

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