JP3580392B2 - Moving mark type measuring method and apparatus - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a measurement method for measuring a workpiece to be measured by comparing each piece of corresponding data with respect to the workpiece to be measured in comparison with data such as a plurality of measurement points and detection tools stored in advance based on a drawing or a reference workpiece. For example, the present invention relates to a moving mark type dimension measuring method and apparatus for measuring a dimension of a work such as a plastic molded product, a mold, and a lead frame, particularly a minute dimension.
[0002]
[Prior art]
Conventionally, a measuring microscope and a universal tool microscope have been known as this type of dimension measuring device.
[0003]
In a conventional measuring microscope or a universal tool microscope in which a workpiece is moved by manual operation, directions of coordinates to be measured are basically two-dimensional in x and y directions. In some cases, the measurement in the z direction can be simply performed. However, this is a measure of the amount of movement until focus is achieved, and cannot be said to be an accurate measurement in the z direction.
[0004]
Typical examples of the work include a lead frame of an electronic component, a plastic molded product, and a mold for molding these.
[0005]
A conventional manual measuring microscope is composed of a reference work (a reference work having a desired shape and dimensions) and a work to be measured (hereinafter, a work manufactured to have the same dimensions as the reference work based on the reference work). Is referred to as a work to be measured) on a display unit (hereinafter, also referred to as a monitor screen), and the moving distance in the X and Y directions manually performed by rotating a knob is represented by a magnetic scale, an optical scale, or the like. And displays the detected moving distance on a counter. The operator gazes at both the work image on the monitor screen and the numerical value displayed on the counter, and operates the microscope by relying on them.
[0006]
To describe a conventional method of measuring a general work, first, locations where the dimensions of the work need to be strictly controlled are determined in advance, and those locations are set on the drawing as measurement points. Thereafter, reference coordinate data is actually obtained using the reference work. For example, a reference work is set on a stage of a microscope. Then, the coordinates of each measurement point of the reference work are measured. The coordinate data obtained by the measurement is processed by an arithmetic processing unit to obtain the dimensions of the reference work. Such a measuring operation is generally called teaching. After the teaching, the workpiece to be measured to be measured is set on the microscope stage. Then, the coordinates of each measurement point of the work to be measured are measured. The dimensions of the work to be measured are obtained by processing the coordinate data obtained by the measurement by an arithmetic processing unit. At this time, the coordinate data of the reference work (specifically, dimensional data calculated based on the coordinate data obtained for the reference work) is compared and evaluated while measuring the work to be measured.
[0007]
Hereinafter, an example of a measurement procedure in a conventional measurement microscope or a universal tool microscope will be described in more detail.
[0008]
Setting measurement points
A plurality of locations on the workpiece whose dimensions are to be strictly controlled are determined in advance, and those locations are set on the drawing as measurement points.
[0009]
Teaching
With respect to the reference work, the microscope system reads coordinate system data of a plurality of measurement points set in advance on the drawing. The procedure is as follows.
[0010]
・ First, the reference work is placed on the stage.
[0011]
・ Set the origin on the reference work.
[0012]
While moving the stage in the x and y directions, adjust the position on the reference work corresponding to the measurement point set in advance on the drawing with a detection tool (for example, a cross reticle) at the center of the monitor image.
[0013]
If the location is correct, press the switch button to determine that location as the measurement point. By determining the measurement points, the coordinate data is stored in the arithmetic processing unit.
[0014]
Similarly, for other measurement points set in advance, coordinate data is sequentially input for each corresponding measurement point. In the case of a circular shape, the shape and dimensions of the circle are determined by setting three locations as measurement points.
[0015]
・ Teaching ends when the measurement points on the reference work have been input.
[0016]
Work to be measuredMeasurement
-A work (measurement work) manufactured based on the reference work is arranged on the stage, and the origin of the work to be measured is set corresponding to the origin of the reference work.
[0017]
When the measurement of the work to be measured is started, the relative coordinates up to the next measurement point are subtracted and displayed on the counter. (This subtraction display is a rough indication that a point corresponding to the measurement point is displayed on the monitor screen of the monitor device.)
・ Measure coordinate data based on the display content on the monitor screen by matching the location corresponding to the measurement point with the detection tool (cross reticle) at the center of the monitor screen.
[0018]
-When the coordinate data of each measurement point of the work to be measured has been obtained, the measurement of the work to be measured ends.
[0019]
[Problems to be solved by the present invention]
As described above, in the conventional manual measurement microscope, a measurer can measure a work (measurement work) manufactured based on the reference work based on the coordinate value of a measurement point serving as a reference of the reference work. In addition, relying solely on the value displayed on the counter, the position corresponding to the measurement point was adjusted to the detection tool (cross reticle) at the center of the monitor screen. Specifically, the relative coordinates from the previous measurement point in the center of the monitor screen to the next measurement point are subtracted and displayed by the counter, and the value displayed on the counter is guided to be zero.
[0020]
However, when the measurement work is started and the X and Y stages are moved while the measurement point is not displayed on the monitor screen, it is necessary to check whether the measurement point has entered the monitor screen and displayed. Therefore, the operator must always watch both the work image on the monitor screen and the numerical display of the counter, since the operator cannot check the image without looking at the image.
[0021]
In addition, in the subtraction display of numerical values, it is difficult to specifically understand the direction and the amount of movement of the work to be measured. It is not easy to instantaneously determine the moving direction and the moving amount based on the numerical values in the x and y directions displayed on the counter in consideration of the work image on the monitor screen. Therefore, a useless operation was likely to occur. Operation required skill.
[0022]
In the case of an operation while looking at the numerical display of the counter, it is difficult to understand the relationship between the positive / negative / increase / decrease of the displayed numerical value and the moving direction of the monitor image. Since it is necessary to check both the numerical display of the counter and the moving direction of the monitor image, the operation becomes complicated.
[0023]
Furthermore, it is necessary to adjust the measurement point to a predetermined detection position (for example, the center of the monitor screen).
[0024]
On the other hand, when determining a measurement point, conventionally, coordinate data is obtained by aligning the measurement point on the work with the center of a detection tool (cross reticle) displayed at the center of the monitor screen. Therefore, for each measurement point, an operation of matching the detection tool (cross reticle) with the measurement point on the work is required. At that time, a measurement error by the operator was likely to occur.
[0025]
Further, when measuring the work to be measured by the same procedure based on the measurement procedure stored in advance for the reference work, the display value of the current position of the X, Y stage matches the stored target coordinate value. The X and Y stages need to be moved as described above. Conventionally, the operator manually moves the X, Y stage while comparing the display value of the current position of the X, Y stage and the stored coordinate value with the operator, so that the exact position can be determined instantaneously. As a result, as a result, it was not possible to avoid a measurement error due to a wrong position.
[0026]
Further, when measuring the work to be measured in the same procedure based on the measurement procedure stored in advance for the reference work, conventionally, the measurement point of the work to be measured is moved to the center of the monitor screen and adjusted. There are a method of using the position of the X, Y stage as the coordinates of the measurement point, and a method of using the position of the X, Y stage at the moment when the measurement point passes the center of the monitor screen as the coordinates of the measurement point. In this case, it was difficult to specify an accurate measurement position. Furthermore, even if the measurement point is reflected in a part of the monitor screen, the measurement must be performed after the measurement point must be moved to the center of the monitor screen.
[0027]
An object of the present invention is to provide a measurement method and a measurement device that can perform a measurement operation more accurately by adding image processing.
[0028]
Another object of the present invention is to provide a measuring method and a measuring apparatus which can realize improvement of operability.
[0029]
[Means for Solving the Problems]
The gist of the present invention is a measuring method according to any one of claims 1 to 14 described above.
[0030]
Further, the invention of the present application is a gist of the measuring device according to any one of claims 15 to 18 described above.
[0031]
【The invention's effect】
(1) According to the present invention, the direction of the next measurement point or the detection tool therefor (and further away from the current position, that is, how far away from the current position), that is, the moving direction (and the moving distance) is determined by the figure. Since the movement mark is visually displayed, the movement to the next measurement point or a detection tool therefor can be intuitively and easily grasped. Therefore, the learning of the operation which has been required conventionally becomes unnecessary.
(2) When the display content is updated in conjunction with the movement of the stage, the approaching process can be expressed. This allows quick and accurate movement.
(3) When the next measurement point or a detection tool therefor is shown on the monitor screen, if the measurement point and the detection tool are moved together with the movement of the X and Y stages, accurate measurement can be made anywhere on the monitor screen. it can. Accordingly, it is not necessary to move the measurement point to the center of the monitor screen, and the measurement point can be visually confirmed, so that the measurement position is not mistaken.
[0032]
BEST MODE FOR CARRYING OUT THE INVENTION
The present invention can be applied not only to a mode in which the moving unit (stage) is moved manually, but also to a mode in which it is automatically moved by a motor or the like. Is preferred for the present invention, the configuration of the manual mode and the outline of the measurement procedure will be described.
[0033]
measuring device
The measuring apparatus according to the present invention is a measuring apparatus including a driving system, an observation system, and a control system. The driving system includes a moving unit (for example, an X stage moving in the X direction, a Y stage moving in the Y direction), , A handle and / or a motor for moving the Y stage, the control system has an arithmetic processing device, and the arithmetic processing device is provided with a host computer and an image processing device electrically connected to each other. is there.
[0034]
Setting measurement points
A desired number of measurement points for the work are set on the drawing. For example, a plurality of places where dimensions must be strictly controlled are set on the drawing.
[0035]
Teaching
As a first mode of teaching, data of a drawing is directly stored. As a second aspect of teaching, various data of a reference work (a reference work manufactured based on the data in the drawings is referred to as a reference work in this specification) is measured by a measuring device and stored. Hereinafter, an example of the second aspect of the teaching will be described.
[0036]
・ Place the reference work on the stage of the measuring device.
[0037]
・ Set the origin on the reference work. For example, two small holes are made in the reference work for setting the origin, and the work origin is determined by measuring the positions of the two small holes. For setting the origin, another conventional method may be adopted.
[0038]
The stage is moved in the x direction and the y direction, and the position on the reference work corresponding to the position of the detection tool set in advance on the drawing is adjusted on the monitor screen.
[0039]
If the displayed location of the detection tool is correct and the start and end points are appropriate, determine the position of the detection tool. At this time, it is preferable to determine the position of the detection tool by specifying the coordinate value of the start point and the distance in the XY directions from the coordinate value.
[0040]
When the position of the detection tool is determined, the data is stored in the arithmetic processing unit.
[0041]
The position of the detection tool is sequentially input for each measurement point of the actual work reference work corresponding to another measurement point set in advance on the drawing with respect to the reference work.
[0042]
• When all the detection tool positions on the reference work have been input, teaching based on the reference work ends.
[0043]
Measurement of work to be measured
A work (hereinafter referred to as a work to be measured) manufactured based on a drawing or a reference work is arranged on a stage, and an origin is set similarly to the reference work. At this time, even if the position of the workpiece to be measured on the stage is different from the position of the reference workpiece, the positional deviation is automatically corrected by the arithmetic processing. This eliminates the need for manual alignment of the two.
[0044]
The operator manually moves the stage in the x direction and the y direction while looking at the direction and length of the movement mark of a graphic (for example, an arrow) displayed on the monitor screen.
[0045]
When the detection tool and / or the measurement point appears and is displayed on the monitor screen, the moving mark disappears from the monitor image and a part of the detection tool stored in advance based on the drawing or the reference work or Everything is displayed on the monitor screen.
[0046]
-If there is a dimensional deviation between the workpiece to be measured and the reference workpiece in the monitor screen, the position where the contour of the workpiece to be measured crosses the detection tool.
[0047]
At this time, if the deviation is within a range intersecting with the displayed detection tool, the outline of the work to be measured can be detected by the detection tool, and the coordinate data of the measurement point is displayed.
[0048]
By setting this measurement point as “determined”, measurement data is captured.
[0049]
・ If the contour of the work to be measured does not intersect with the contour of the work to be measured due to this deviation, it cannot be detected by the detection tool that displays the contour of the work to be measured, so the coordinate data of the measurement point is not displayed. Will also result in an error.
[0050]
In this case, by setting the detection tool again so that the contour of the tool to be measured intersects, the coordinate data of the measurement point can be displayed.
[0051]
• When the coordinate data of each measurement point has been obtained, the measurement ends.
[0052]
Next, an outline of the configuration will be described.
[0053]
Detection tool
The detection tool used in the present invention is a line tool or an area tool, and is configured in a figure, for example, an arrow shape (line tool) or a rectangle (area tool), and has a start point and an end point. When the detection tool has an arrow shape, the arrowhead is the starting point and indicates the direction in which the contrast is detected. The point where the arrow of the detection tool intersects the boundary near the measurement point of the workpiece is set as the detection point, and that point is estimated as the measurement point.
[0054]
-The main features of the detection tool used in the present invention are as follows.
[0055]
(A) The detection tool moves following the measurement point.
[0056]
(B) When the measurement point or a detection tool therefor enters a predetermined distance from the edge of the monitor screen, the detection tool automatically appears on the monitor image.
[0057]
(C) By performing a plurality of scans near the measurement point, the contour of the workpiece to be measured near the measurement point is recognized, and the detection tool is automatically scanned in a direction perpendicular to or close to the edge direction based on the contour. Set.
[0058]
(D) The detection of the edge by the detection tool is always performed by scanning in the direction from the one with the least brightness unevenness to the most.
[0059]
Move mark
The movement mark is a figure, for example, an arrow, and indicates a moving direction and a moving distance from the current position.
[0060]
Coordinate system
The coordinate system in the measuring device of the present invention does not need to be an absolute coordinate system, and can be configured to depend on the posture with respect to the workpiece to be measured.
[0061]
Setting measurement points
A measurement point set on a work (a reference work and a work to be measured) or a position of a detection tool therefor is usually set to a point that is easy to understand, such as a corner.
[0062]
【Example】
FIG. 1 schematically shows an example of a measuring device according to the present invention.
[0063]
In FIG. 1, the microscope type measuring device mainly includes a driving system, an observation system, and a control system. The drive system includes a moving unit, for example, an X stage 1 that moves in the X direction, a Y stage 2 that moves in the Y direction, an X moving handle 3 that moves the X stage 1 by manual operation of the operator, and a manual operation of the operator. A Y moving handle 4 for moving the Y stage 2 is provided. The XY counter 5 counts the current position of the X coordinate of the X stage 1 and the current position of the Y coordinate of the Y stage 2, respectively. The work 6 to be measured is set at a predetermined position on the upper surface of the X stage 1.
[0064]
The work 6 to be measured is illuminated arbitrarily from an upper surface, a lower surface, or the like by an illumination mechanism (not shown).
[0065]
As an observation system, a microscope main body 7 is disposed above the workpiece 6 to be measured, an objective lens section 8 is provided below the microscope main body 7, and a CCD camera 9 is provided above. .
[0066]
In the control system, an arithmetic processing device 18 is provided, and a host computer 10 and an image processing device 11 electrically connected to each other are provided therein. The XY counter 5 described above is connected to the host computer 10. A foot switch 12 and a mouse 13 are further connected to the host computer 10. The foot switch 12 is used to determine a measurement point, and the mouse 13 is used to select a menu or to specify a detection area. The CCD camera 9 and the monitor device 15 are connected to the image processing device 11.
[0067]
The image processing device 11 normally receives, as a signal, a field-of-view image that has entered the monitor field of view of the CCD camera 9, and displays a part or all of the field-of-view image as a monitor image on a substantially rectangular monitor screen of a CRT. In the illustrated example, the entire visual field image is directly displayed on the monitor screen as a monitor image.
[0068]
An X movement motor and a Y movement motor are provided in place of or in addition to the handles 3 and 4, and the X stage 1 and the Y stage 2 are connected by connecting these motors to the host computer 10. It is also possible to move automatically.
[0069]
The lead frame shown in FIG. 2 is an example of the work 1 to be measured set on the X stage 1. A part A of the work (lead frame) is captured by the CCD camera 9 as a visual field image, and It is displayed on the monitor screen as a monitor image.
[0070]
FIG. 3 shows an example of the monitor image.
[0071]
An outline of a measurement procedure in the above-described microscope type measurement device will be described.
[0072]
First, a desired number of measurement points for the reference work 6 shown in FIG. 2 is set on the drawing. For example, as shown by reference numerals 21 to 32 in FIG. 3, a plurality of locations where dimensions need to be strictly controlled are set. The small black circles indicate points (measurement points) where edge detection is desired, and the lengths of the arrows indicate locations where width measurement is desired.
[0073]
Teaching has various aspects. In the teaching according to the first aspect, data of a paper drawing or a drawing of a computer (such as a CAD) is stored as it is, or processed or corrected and stored in a disk or the like. In the teaching according to the second aspect, data at a predetermined location of the reference work is measured and stored in a disk or the like. For example, the reference work 6 is arranged on the stage 1 (FIG. 1) of the measuring device. After that, the origin is set on the reference work 6. In the example of FIG. 2, the center points O1 and O2 of the two small holes 6a and 6b of the reference work are measured, and the origin of the reference work 6 is set based on them.
[0074]
Subsequently, the stage 1 is manually moved in the x direction and the y direction, and the location on the reference work corresponding to the first measurement point 21 set in advance on the drawing as shown in FIG. Project.
[0075]
As shown in an example in FIG. 4, an arrow-shaped detection tool is displayed on the monitor screen 16 by using the mouse 13 at a position on the reference work corresponding to the first measurement point (for example, 21 shown in FIG. 3). Set. At this time, the coordinate value of the start point of the detection tool is input, and the end point of the detection tool is input not as a coordinate value but as a relative position, that is, a distance in the XY directions. In the same manner, an arrow-shaped detection tool is displayed on the monitor screen 16 using the mouse 13 at a position on the reference work corresponding to the second to twelfth measurement points (for example, 22 to 32 shown in FIG. 3). Set. Thereby, the positions of the detection tools corresponding to all the measurement points 21 to 32 shown in FIG. 3 are specified.
[0076]
FIG. 5 shows a situation in which a detection tool R having an arrow shape (this is called a line tool) and a rectangular detection tool S (this is called an area tool) are displayed on the monitor screen 16. The detection tool R or S can be set at any position on the monitor screen 16. The type (shape and size) of the detection tool R or S can be arbitrarily set. It is preferable to select a type with few measurement errors in consideration of the shape near the measurement point.
[0077]
The monitor screen 16 may show both the rectangular detection tool S and the arrow detection tool R, or only one. Of course, a detection tool of another shape (for example, X mark) may be shown. Alternatively, the data may be detected by the rectangular detection tool S and stored in the form of an arrow detection tool passing through the center of the rectangle.
[0078]
If the location where the detection tools R and S are displayed is correct and the locations of the start point R1 and the end point R2 are appropriate, the positions of the detection tools R and S are determined.
[0079]
When the positions of the first detection tools R and S are determined, the data is stored in the arithmetic processing device 18.
[0080]
The same measurement work is performed for each of the measurement points 22 to 32 of the actual reference work corresponding to the other measurement points, and the positions of the detection tools R and S are sequentially input. In this way, when the input of the data of the positions of the detection tools R and S corresponding to all the measurement points 21 to 32 and others on the reference work is completed, the teaching ends.
[0081]
When teaching of the drawing or the reference work is completed, the work 6 to be measured is arranged on the stage 1 and the origin is set in the same manner as the reference work. At this time, even if the reference work and the work to be measured are arranged at different positions on the stage 1, that is, at positions slightly shifted, the position shift is automatically calculated based on the origin positions of the two. Therefore, the operator can install the work 6 to be measured on the stage 1 without performing the alignment operation and without worrying about the displacement of the installation position.
[0082]
When the measurement point 21 or the detection tools R and S for the measurement point 21 are not displayed on the monitor screen 16, a movement mark T is displayed on the monitor screen 16 as shown in FIGS. 11 (a), 11 (b) and 11 (c). You. In the illustrated example, the movement mark T is an arrow. The operator manually moves the stage 1 in the x and y directions in the order of (a), (b), and (c) while looking at the direction and length of the movement mark T.
[0083]
When the measurement point 21 or the detection tools R and S for the measurement point 21 enter a predetermined distance from the edge of the monitor screen 16, the types of detection tools R and S stored in advance based on the reference work 6 or the drawing are automatically displayed. Is done. At the same time, the movement mark T disappears from the monitor screen 16.
[0084]
At this time, if the deviation is within a range intersecting with the displayed detection tool, the outline of the work to be measured can be detected by the detection tool, and the coordinate data of the measurement point is displayed.
[0085]
By setting this measurement point as “determined”, measurement data is captured.
[0086]
・ If the contour of the work to be measured does not intersect with the contour of the work to be measured due to this deviation, it cannot be detected by the detection tool that displays the contour of the work to be measured, so the coordinate data of the measurement point is not displayed. Will also result in an error.
[0087]
In this case, by setting the detection tool again so that the contour of the tool to be measured intersects, the coordinate data of the measurement point can be displayed.
[0088]
When the measurement data corresponding to each measurement point has been obtained, the measurement operation ends.
[0089]
As shown in FIGS. 5 and 6, the posture of the edge W is recognized, and the detection of the edge W by the detection tool R is performed by scanning in a direction perpendicular to or close to the direction of the edge W. For example, when the edge W extends in an oblique direction, a scanning direction perpendicular to or close to the direction of the edge W is automatically calculated by using a plurality of arrow detection tools R, Ra, and Rb. The detection of the edge W by the detection tool R is performed by scanning in a direction perpendicular to or close to the direction of the edge W. Further, using the rectangular detection tool S, a plurality of detection tools are scanned in the rectangle, and a scanning direction perpendicular to or close to the direction of the edge W is automatically calculated, and the detection tool is detected. The detection of the edge W by R is performed by scanning in a direction perpendicular to or close to the direction of the edge W. In any case, by performing a plurality of scans near the measurement point 21 (for example, in the directions of arrows R, Ra, and Rb), the contour of the work to be measured near the measurement point 21 is recognized. The detection tool Rc is automatically set in a direction perpendicular to or close to.
[0090]
In such a measurement, even if the measurement edge W extends in an oblique direction, the posture of the edge W is recognized, and the scanning direction that is almost perpendicular to the direction of the edge W is calculated. The number of operations required to do so can be reduced. In addition, automatic detection of the edge W of the work to be measured can be performed with high accuracy.
[0091]
In FIG. 7, it is assumed that one of the small rectangles corresponds to one pixel, and when the edge W is oblique at the pixel level, a pixel where light and dark overlap does not exist on the detection tool R. Select the scanning direction. All such processing is performed by arithmetic processing (software).
[0092]
When the detection tool is configured to be automatically set in a direction perpendicular to the edge, unlike a conventional detection tool, scanning is not limited to only the X and Y axis directions, and the contour of the work near the measurement point is not limited. Is oblique to the X- and Y-axis directions, it is possible to prevent a drop (a gradual change) from occurring in one of the contrasts detected when obtaining the edge W. As a result, highly accurate edge detection can be performed.
[0093]
If the change in contrast is detected by scanning in the direction perpendicular to the edge W, the position of change in contrast required for detecting the edge W can be accurately detected. The distance between the position where the change starts and the position where the change ends can be shortened, and the position of the edge W can be accurately detected.
[0094]
A method of detecting the distribution of brightness in the rectangular detection tool S and scanning between dark and bright portions using the edge W as a direction, by scanning from the direction with less unevenness in brightness to the direction with more unevenness. Will be described.
[0095]
It is preferable that the detection of the edge W by the detection tool R is always performed by scanning in the direction from the one with less unevenness of brightness and darkness.
[0096]
In the example of FIG. 7, the edge W is searched by scanning from the dark portion D to the bright portion L.
[0097]
FIG. 8 shows the light and dark levels when scanning is performed from the lower left position to the upper right position in FIG. Thus, the boundary W of the bright portion L is detected as the measurement point 21.
[0098]
FIG. 9 shows the light and dark levels when scanning is performed from the upper right position to the lower left position in FIG. Thus, the boundary W of the dark part D is detected as the measurement point 21.
[0099]
In each of FIGS. 8 and 9, the scanning direction indicated by an arrow scans from the direction with less unevenness of brightness and darkness.
[0100]
Further, a change in contrast can be efficiently detected, and erroneous detection due to dust M or the like can be prevented. In particular, when the detection of the edge W by the detection tool R is always performed in the direction from the direction with the least unevenness of light and dark, the erroneous detection due to the dust M can be prevented.
[0101]
18 to 20 schematically show a method of partially changing the search direction or shifting the measurement point. In the measuring apparatus of FIG. 1, the illumination is performed from below the stage 1 (the present invention includes a mode in which illumination is performed from above the stage 1). . Using the change in contrast between the shadow and the illumination light, the boundary, that is, the edge W is obtained as described above. In the event that dust M is present on the stage 1 and automatic detection by image processing is performed, the detection tool R or S detects the dust M as shown in FIG. May be erroneously detected as the edge W. In this case, erroneous detection due to dust M can be prevented by searching in the opposite direction as shown in FIG. Further, the starting point and the ending point of the detection tool R or S may be slightly shifted to partially change the position of the detection tool Rb or the detection tool Rc so that the edge W can be measured correctly.
[0102]
FIG. 11 shows an example of a movement mark that assists the operator. An arrow T having a direction and a length corresponding to the relative position between the next measurement point 21 and the current position of the stage 1 or the monitor image 16 is displayed as an example of the movement mark. The movement mark can also be defined as an instruction indicating the direction and amount of movement of the display area on the monitor screen. The movement mark is best displayed on the monitor image 16, but can be displayed outside the monitor image 16.
[0103]
FIGS. 11A, 11B, and 11C show a process in which the monitor image 16 moves toward the measurement point 21 or the detection tool T therefor by moving the stage 1. In any of (a), (b), and (c) of FIG. 11, the next measurement point 21 or the detection tool T therefor is not within a predetermined distance from the edge of the monitor screen. When the next measurement point 21 or the detection tool T therefor enters a predetermined distance from the edge of the monitor screen, the movement mark T automatically disappears from the monitor image 16. At the same time, the detection tool R or S is displayed on the monitor image 16.
[0104]
FIGS. 15 to 17 show an example of such a display relationship between the moving mark T and the detection tools R and S in the monitor image 16 (an operation mode when performing a semi-automatic measurement of a taught measurement procedure). In the state of FIG. 15, the next measurement point 21 or the detection tool T therefor is not included in the monitor image 16. An arrow T (moving mark) having a direction and length corresponding to the relative position between the next measurement point 21 or the detection tool T therefor and the current position of the stage 1 or the monitor image 16 is displayed in the monitor image 16. .
[0105]
By moving the stage 1, as shown in FIG. 16, when the next measurement point 21 or the detection tool T therefor enters the monitor image 16, the movement mark T automatically disappears from the monitor image 16, and at the same time, A part of the detection tools R and / or S is displayed on the monitor image 16. In the state of FIG. 16, the next measurement point 21 is not included in the monitor image 16, but a part of the detection tools R and / or S is included in the monitor image 16.
[0106]
When the display of the detection tools R and / or S is further assisted by the operator and the stage 1 is further moved, as shown in FIG. 17, when all of the detection tools R and S are displayed on the monitor image 16, it is determined. It goes into a waiting state. In this state, the next measurement point 21 is automatically detected. No matter where the measurement point is located on the monitor image 16, it is detected. If the operator determines that the detected point is the correct position, the point is determined. However, this confirmation operation may be performed later.
[0107]
When the moving mark T as described above is used, the direction and distance of the next measurement point 21 or the detection tool T therefor from the current position, that is, the moving direction and the moving distance are visually indicated by the moving mark T of the figure. Can be intuitively and easily moved to the next measurement point 21 or the detection tool T therefor. Therefore, the learning of the operation which has been required conventionally becomes unnecessary.
[0108]
When the display content of the movement mark T is updated in conjunction with the movement of the stage 1, the approaching process can be expressed as illustrated in (a), (b), and (c) of FIG. This allows quick and accurate movement.
[0109]
When the next measurement position is reflected on the monitor screen, the detection position of the detection tool can be displayed at the position (measurement point) to be measured in the form of an X mark or another form as shown in FIGS.
[0110]
12 to 14 show a situation in which the detection tools R and S follow the movement of the measurement point 21 (or the work 6 on the stage 1).
[0111]
As shown in FIGS. 12 to 14, when the detection tools R and S and the work 6 (that is, the measurement point 21) on the stage 1 are moved together with the movement of the X and Y stages 1, the monitor screen can be accurately placed anywhere. Easy to measure. This makes it possible to automatically detect when the measurement point enters the monitor screen. Even if the image moves on the monitor screen, the detection position follows, so that the same measurement result is always obtained. Also, if you look at the detection tool, you can see where and how you are measuring. It is not necessary to move the measurement point to the center of the monitor screen, and the operator can visually check the measurement point, so that the measurement position is not mistaken.
[0112]
FIG. 21 shows a flowchart for creating an operation flow for creating a measurement procedure, and FIG. 22 shows a flowchart for measuring based on the measurement procedure created in FIG.
[0113]
With reference to FIGS. 21 to 22, an outline of creation of a measurement procedure in the above-described measurement apparatus and a measurement operation performed based on the measurement procedure will be described.
[0114]
First, in FIG. 21, the operator sets a desired number of measurement points on the drawing, and then starts teaching on the reference work 6 with reference to the drawing. An operator places the reference work 6 on the stage 1 (FIG. 1) of the measuring device. After that, the operator sets the origin on the reference work 6. In the example of FIG. 2, the center points O1 and O2 of the two small holes 6a and 6b of the reference work are measured, and the origin of the reference work 6 is set based on them. Subsequently, the operator manually moves the stage 1 in the x direction and the y direction, and displays the location on the reference work corresponding to the measurement point on the monitor screen 16 in the order set in advance in the drawing.
[0115]
The operator manually moves the stage 1 so that the position of the measurement point moves to the monitor image.
[0116]
Using the mouse 13, the best type of detection tool R, S is set on the monitor screen 16 at a location on the reference work corresponding to the measurement point (for example, 21 shown in FIG. 3). Then, the detection tools R and / or S are displayed on the monitor screen 16 as shown in FIG. At this time, the detection tool can be set at any position on the monitor screen 16. If the location where the detection tool is displayed is correct and the start point R1 and the end point R2 are appropriate, the position of the detection tool is determined. When the position of the detection tool is determined, the data is stored in the arithmetic processing unit 18.
[0117]
At the time of measurement, the mouse 13 is used to perform a plurality of scans near the measurement point 21 (for example, in the directions of arrows R, Ra, and Rb). Recognizing a nearby contour, that is, a posture, calculating a scanning direction near a right angle to the direction of the edge W, and automatically detecting the position of the detection tool Rc in a direction perpendicular to or near the direction of the edge W based on the calculated direction. To memorize.
[0118]
In addition, the detection of the edge W by the detection tool is always performed by scanning in the direction from the one with less unevenness of lightness and darkness.
[0119]
Further, the operator designates a shape (circle, distance, width, etc.) to be measured, and detects (measures) as many as necessary for the shape calculation. Then, the measuring device automatically calculates the center and diameter of the circle using the coordinates of the edge.
[0120]
FIG. 10 shows detection points of such various shapes by X marks. Arrows indicate the scanning direction.
[0121]
Further, the operator specifies a dimensional tolerance as needed.
[0122]
The same measurement work is performed for each measurement point of the actual reference work corresponding to another measurement point set in advance on the drawing with respect to the reference work, and the position of the detection tool is sequentially input.
[0123]
In this way, when the operator finishes inputting the positions of the detection tools corresponding to all the measurement points on the reference work, the operator confirms it and saves the measurement procedure up to that time in a file. Thus, the teaching based on the reference work ends.
[0124]
With reference to FIG. 22, the measuring operation of the work 6 to be measured will be described.
[0125]
First, the operator specifies a measurement procedure file with the measuring device according to the work 6 to be measured. Next, the worker places the workpiece 6 on the stage 1 and sets the origin similarly to the reference workpiece. At this time, even if the reference work and the work to be measured are arranged at different positions on the stage 1, that is, at positions slightly shifted, the position shift based on the origin positions of the two is automatically processed by the measuring device. . Therefore, the operator only has to install the work 6 to be measured on the stage 1 without performing the alignment operation and without worrying about the displacement of the installation position.
[0126]
After completing the setting of the origin of the workpiece 6 to be measured, the operator starts the execution of the measurement procedure file.
[0127]
When a measurement point or a detection tool therefor is not displayed on the monitor screen 16, an arrow movement mark T is displayed on the monitor screen 16 as shown in FIGS. 11 (a), 11 (b) and 11 (c). While watching the direction and length of the movement mark T, the operator manually moves the stage 1 in the x direction and the y direction toward the measurement point in order.
[0128]
When the measurement points 21 or the detection tools R and S for the measurement points 21 enter the monitor screen 16, the detection tools R and S stored in advance based on the data of the reference work 6 or the drawing are automatically displayed on the monitor screen. At the same time, the movement mark T disappears from the monitor screen 16.
[0129]
If the rectangular detection tool S and / or the detection tool R in the shape of an arrow are displayed in the monitor screen 16, the measurement can be appropriately performed regardless of where the detection tool is located on the monitor screen 16. If the locations of the start point R1 and end point R2 of the detection tool are appropriate on the work, the point where the center of the arrow detection tool R or the rectangular detection tool S intersects the work boundary W is determined as the measurement point 21. When the measurement point 21 is determined, the coordinate data of the measurement point 21 is stored in the arithmetic processing device 18.
[0130]
During the measurement, when the operator determines that it is preferable to change the detection condition and the detection position, the detection condition and the detection position are changed. For example, using the mouse 13, the type and position of the detection tool are changed as shown in FIGS.
[0131]
Further, by performing a plurality of scans again near the measurement point 21 (for example, in the directions of arrows R, Ra, and Rb), the measurement device recognizes the contour, that is, the posture of the work to be measured near the measurement point 21 by image processing. Then, a scanning direction close to a right angle to the direction of the edge W is calculated, and the detection tool Rc is automatically set to a direction perpendicular to or close to the direction of the edge W based on the calculation, and measurement is performed.
[0132]
Further, as shown in FIG. 10, the operator specifies a shape to be measured (a circle, a distance, a width, and the like), and performs measurement as many as necessary for the shape calculation. Then, the measuring device automatically calculates the center and diameter of the circle using the coordinates of the edge.
[0133]
The same measurement operation is sequentially performed on the actual positions of the detection tools corresponding to all the measurement points for the workpiece to be measured.
[0134]
In this way, when the operator has measured all the measurement points on the work to be measured, it confirms the measurement points and saves the measurement results up to that point in a file. If necessary, the number of measurement points that have failed in the tolerance judgment is displayed on the monitor screen. Thus, the measurement operation ends.
[0135]
If the coordinates of the measurement point are known, the pre-teaching function is effective. In this case, the teaching function means that a measurement procedure is created and stored, and the operator creates the procedure while searching for the next measurement point position. The pre-teaching function is to support the teaching work. By inputting the coordinate values of a plurality of measurement points or the coordinate values (x, y) of the next measurement point from the keyboard in advance, the pre-teaching function is used. The purpose is to save the trouble of searching for measurement points. For example, when the coordinate values of the next measurement point are a circle (x1, y1), a width (x2, y2), and a corner (x3, y3) from the input of the coordinate value of the measurement point as pre-teaching, the measurement procedure of teaching The procedure is to create a circle measurement procedure, a width measurement procedure, and a corner creation procedure.
[0136]
By inputting the coordinate values (keyboard input values, CAD data, etc.) of the measurement points in this way, the direction and distance (difference in coordinate values) to the measurement points are indicated by numerical values, graphics (arrow marks, etc.), etc. The measurement point can be searched accurately and quickly even at a high magnification (narrow field of view). Further, operability is further improved by inputting a plurality of measurement point coordinates collectively.
[0137]
Also, by inputting the coordinate value of an arbitrary point, this function can be used even if the measurement is not intended.
[0138]
When performing measurement using the same procedure based on a previously stored measurement procedure, if it is clear that detection is difficult with the real-time detection function, etc., the type of detection tool (for circle measurement, width measurement, point measurement, etc.) The measurement operation can be performed smoothly and reliably by making it possible to change the position, the illumination condition, and the detection condition on the spot.
[0139]
The invention is not limited to the embodiments described above. For example, in another embodiment of the present invention, the measurement point 21 or the detection tool R, S therefor is located at a predetermined distance outside the monitor screen 16 (10% to 0% of the size of the monitor screen 16) or a predetermined distance inside the monitor screen 16 (10% to 0%). (50% to 0% of the size of the monitor screen 16), the detection tools R and S stored in advance based on the data of the reference work 6 or the drawing are automatically displayed on the monitor screen, and at the same time, the movement marks are displayed. T disappears from the monitor screen 16. The moving mark can adopt not only an arrow shape but also various other shapes. FIG. 23 shows an example. The moving direction is not limited to the arrow, but may adopt a blinking shape or change the color. The moving distance can be represented not only by the length but also by a thickness or shape, or can be represented by a numerical value.
[Brief description of the drawings]
FIG. 1 schematically shows an example of a measuring device for carrying out the present invention.
FIG. 2 shows a lead frame (an example of a work to be measured) installed on a stage.
FIG. 3 shows an example in which a plurality of locations in an example of a monitor image that require strict management of dimensions are set as measurement points.
FIG. 4 corresponds to the monitor image of FIG. 3 and shows a measurement order at a plurality of locations where dimensions need to be strictly controlled.
FIG. 5 is a diagram showing an outline of the work to be measured in the vicinity of a measurement point by performing a plurality of scans with a detection tool in the shape of an arrow. An example of a situation to be automatically set is shown.
FIG. 6 shows an example of a situation in which a detection tool is set and measured in a direction perpendicular to or close to the direction of the edge of the workpiece to be measured.
FIG. 7 shows an example of a situation in which edge detection by a detection tool is performed by scanning in a direction from dark to bright.
8 shows an example of a light-dark level when scanning is performed from the lower left position to the upper right position in FIG.
9 shows an example of a light-dark level when scanning is performed from the upper right position to the lower left position in FIG. 7;
FIG. 10 shows detection positions of various shapes by X marks.
FIGS. 11A, 11B, and 11C show a process in which a monitor image moves toward a measurement point by moving a stage. In any of (a), (b) and (c), the next measurement point is not within the display range of the monitor screen. When the next measurement point enters a predetermined distance from the edge of the monitor screen, the movement mark automatically disappears from the monitor image. At the same time, the detection tool is displayed on the monitor screen.
FIG. 12 illustrates an example of a relationship between a measurement point of a workpiece to be measured and a detection tool in a monitor image.
FIG. 13 illustrates a situation in which the relative relationship between the measurement point of the workpiece to be measured and the detection tool moves in the monitor image without changing from the relative relationship in FIG. That is, this shows a situation where the detection tool follows the movement of the work on the measurement point and the stage.
FIG. 14 shows a situation in which the relative relationship between the measurement point of the workpiece to be measured and the detection tool does not change from the relative relationship in FIGS. 12 and 13, and further moves within the monitor image.
FIG. 15 illustrates an example of a relationship between a moving mark in a monitor image and a measurement point of a workpiece to be measured outside the monitor image.
FIG. 16 shows a measurement point of a workpiece to be measured outside the monitor image and a detection tool in the monitor image when the monitor image moves toward the measurement point from the state of FIG. 15 by moving the stage. 1 shows an example of the display relationship. The next measurement point is not on the monitor screen but is approaching it.
17 is a diagram showing a measurement point of a workpiece to be measured outside the monitor image and a detection tool in the monitor image when the monitor image moves toward the measurement point from the state of FIG. 16 by further moving the stage. An example of the display relationship with is shown. The next measurement point is on the monitor screen.
FIG. 18 shows another example of a relationship between a measurement point of a workpiece to be measured and a detection tool in a monitor image.
19 shows the relationship between the measurement point of the work to be measured in the monitor image and the detection tool in a state where dust is present near the measurement point of the work to be measured in FIG. 18;
20 is a diagram showing a state in which dust is present near the measurement point of the work to be measured in FIG. 19, in order to change the relationship between the measurement point of the work to be measured and the detection tool in the monitor image; The method of changing the direction or shifting the position of the detection tool is schematically shown.
FIG. 21 is a flowchart for creating an operation flow for creating a measurement procedure.
FIG. 22 is a flowchart for performing measurement based on the measurement procedure created in FIG. 21;
FIG. 23 shows examples of various movement marks.
[Explanation of symbols]
1 X stage
2 Y stage
3 X moving handle
4 Handle for Y movement
5 XY counter
6. Work (reference work, work to be measured)
6a, 6b small hole
7 Microscope body
8 Eyepiece
9 CCD camera
10 Host computer
11 Image processing device
12 Foot switch
13 mouse
15 Monitoring equipment
21-32 measurement points
D Dark part
L Akebe
M trash
R detection tool
S detection tool
T move mark
W edge

Claims (18)

In a measurement method for measuring a work to be measured in accordance with data stored in advance, a moving mark is visually displayed on a monitor image as to the next measurement point of the work to be measured or a direction of a detection tool therefor. A measuring method characterized in that the measurement method is displayed on a display. 2. The method according to claim 1, wherein the moving mark indicates a moving direction by a graphic and the moving distance is indicated by a length of the graphic. The measuring method according to claim 1, wherein the moving mark displays a moving direction as a graphic and a moving distance as a numerical value. The method according to any one of claims 1 to 3, wherein when the work to be measured is moved in a direction away from a next measurement point of the work to be measured or a detection tool therefor, the fact is displayed on a monitor image. The measurement method described. The work to be measured is measured by a predetermined procedure based on the measurement procedure stored in advance based on the drawing or the reference work, and the next measurement point of the work to be measured or a detection tool therefor is not reflected in the monitor image. Sometimes, based on the current position of the stage on which the workpiece is placed, the next measurement point of the workpiece or the position of the detection tool for that is calculated, and both the moving direction and the moving distance from the current position are displayed on the monitor image. The measurement method according to any one of claims 1 to 4, wherein is displayed as a movement mark. The work to be measured is measured in a predetermined procedure based on a measurement procedure stored in advance based on the drawing or the reference work, and the next measurement point of the work to be measured or a detection tool therefor is reflected in the monitor image. 6. The method according to claim 1, wherein a position in a monitor image of a next measurement point of the work to be measured is calculated based on a position of the stage on which the work to be mounted is mounted, and displayed on the monitor image. The measurement method according to any one of the preceding claims. When the next measurement point of the workpiece to be measured or the detection tool therefor is not within a predetermined distance outside or inside the outer edge of the monitor image, a moving mark is displayed on the monitor image, and the next measurement point or the next measurement point is displayed. The measurement tool according to any one of claims 1 to 6, wherein the detection tool is displayed on the monitor image when the detection tool enters a predetermined distance outside or inside the outer edge of the monitor image. Method. When the next measurement point of the workpiece to be measured or the detection tool for it is not included in the monitor image, a movement mark is displayed on the monitor image, and when the next measurement point or the detection tool for that is included in the monitor image. 7. The measuring method according to claim 1, wherein a next measurement point is displayed in the detection tool. 9. The measuring method according to claim 7, wherein when the next measurement point is included in the monitor image, the detection tool and the next measurement point move together in the monitor image. The method according to claim 1, wherein a plurality of measurement points or positions of detection tools therefor are stored in advance based on a drawing or a reference work, and thereafter, these measurement procedures are stored. Measurement method described in 1. In a case where the detection tool erroneously detects during the measurement operation in the measurement procedure stored in advance, the position of the measurement point detected by the detection tool or the type of the detection tool is changed. Item 10. The measurement method according to any one of Items 1 to 10. In a measuring method for measuring a work to be measured by taking each corresponding data for a work to be measured in comparison with data of a plurality of measurement points or detection tools for the measurement points stored in advance based on a drawing or a reference work, When a measuring point or a detection tool therefor enters a predetermined distance from an edge of a screen, a detection tool stored in advance is automatically displayed on a monitor image, and a moving mark disappears from the monitor image. 13. The measuring method according to claim 12, wherein the measuring point is automatically measured when the entire detection tool enters the monitor screen. 14. The method according to claim 12, wherein after the measurement point of the workpiece to be measured enters the monitor screen, the measurement tool moves on the monitor screen without changing the relative relationship between the measurement point of the workpiece to be measured and the detection tool. Measurement method. A measuring device comprising a drive system, an observation system, and a control system, wherein the control system has an arithmetic processing device, and the arithmetic processing device includes a host computer and an image processing device electrically connected to each other. The image processing apparatus displays a moving mark on the monitor image when the next measurement point of the workpiece to be measured or a detection tool therefor is not within a predetermined distance from the edge of the monitor image, and the next measurement point or When the detection tool is within a predetermined distance from the edge of the monitor image, means for causing the moving mark to disappear from the monitor image, and when the next measurement point or the detection tool therefor enters the predetermined distance from the edge of the monitor image, A measuring device comprising means for displaying a measurement point or a detection tool on a monitor image. 16. The measuring apparatus according to claim 15, further comprising means for causing the detection tool to follow the movement of the next measurement point when the next measurement point enters the monitor image. 17. The measuring device according to claim 15, wherein the moving mark is a graphic. 17. The measuring apparatus according to claim 15, wherein the moving mark displays not only the moving direction but also the moving distance according to the length of the figure.

Images