JP3594172B2 - Mounting device and replacement device for crucible assembly or hot zone member, and drive control method for crucible assembly replacement device - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention provides a mounting device for mounting a carbon crucible and a quartz glass crucible on a crucible tray in order, and mounting a crucible assembly filled with polysilicon in a quartz glass crucible, for example, on a silicon ingot pulling device, or pulling up. The present invention relates to a mounting device for mounting a hot zone member used in the device in a chamber of a lifting device, and a device for exchanging a crucible assembly using the mounting device.
[0002]
[Prior art]
Conventionally, in order to transport a crucible assembly of this type to a lifting device, a shaft mounted on the lower bottom of the lifting device is raised, and an operator leans on a chamber of the lifting device to lift the shaft. After placing the crucible pan on the upper end and assembling the carbon crucible and the quartz glass crucible on the crucible pan in this order, the quartz glass crucible is filled with poly (polycrystalline) silicon to form a crucible assembly, and the shaft is lowered. Then, a method of mounting the crucible assembly in the chamber is adopted.
[0003]
As described above, in the conventional method of mounting the crucible assembly on the pulling device, there is a danger that the worker leans on the chamber of the pulling device and works, and the size of the silicon single crystal ingot is large. The crucibles have become larger and heavier with the increase in diameter, and there is a problem that the mounting work becomes heavy labor. In addition, there is a problem that dust or the like adhering to the worker during the mounting operation enters the crucible and adversely affects the yield and quality of the silicon single crystal ingot.
[0004]
Therefore, avoid the work of sequentially assembling the crucible assemblies on the chamber of the lifting device, for example, assemble the crucible assembly on the transport vehicle, and install the lifting device from the transport vehicle using a lifter that can be manually transported. There has been proposed a crucible assembly mounting apparatus in which a crucible assembly is mounted at a place. (For example, JP-A-7-206580)
In this lifter, a stick mounting arm is attached so as to hang down from an elevating arm arranged in a horizontal direction, and a stick is inserted into the stick mounting arm to support a crucible tray from below. Then, with the crucible assembly suspended, move the lifter to the place where the lifting device is installed, lower the lifting arm with the lifter positioned, and pull out the stick inserted in the stick mounting arm. And the crucible assembly can be installed at the place where the lifting device is installed.
[0005]
[Problems to be solved by the invention]
By the way, according to the above-described crucible assembly mounting device, that is, the lifter structure, it is necessary to manually move the lifter while the crucible assembly is suspended, and there is a slight step on the floor surface when the lifter is moved. However, since the total weight of the lifter and the crucible assembly is increased, transport is not easy, and there is a danger, and strict conditions are imposed on the flatness of the floor at the work site. Further, recently, the diameter of the crucible has been increased, and the filling amount of polysilicon has been increased. As a result, the total weight of the crucible has further increased, and the above-mentioned problem has been increasingly caused.
[0006]
Further, in the lifter described above, by inserting the stick into the stick mounting arm, the crucible tray is supported from the bottom surface thereof, and the stick is placed in a state where the crucible assembly is located at the installation location of the lifting device. An artificial operation of pulling out from the stick mounting arm toward the outer periphery of the crucible is inevitable. However, since the diameter and height of the chamber of the lifting device differ depending on the model of the lifting device, there are cases where it is difficult to pull out the stick, and improvements in the structure of the lifter are also required.
Also, in consideration of the yield and quality of the silicon single crystal ingot, it is preferable to reduce as much human work as possible when mounting the crucible assembly on the lifting device or removing the crucible assembly from the lifting device. The above considerations are also important to avoid man-made operations in extremely hot environments.
[0007]
The present invention has been made based on the technical problem as described above, and is a mounting device capable of freely mounting a hot zone member mounted on a crucible assembly or a chamber of a lifting device to a lifting device. The purpose is to provide.
It is another object of the present invention to provide a replacement device that can replace a crucible assembly or a hot zone member while using or reducing the need for manual work using the mounting device.
It is still another object of the present invention to provide a method for controlling a crucible assembly exchanging apparatus for automatically controlling the transfer or removal of a crucible assembly with respect to a lifting apparatus by using the exchanging apparatus.
[0008]
[Means for Solving the Problems]
A crucible assembly mounting apparatus according to the present invention, which has been made to achieve the above-described object, includes a vertical moving mechanism that drives a base member to move up and down by the power of an actuator, and a horizontal movement mechanism that moves the base member through an articulated arm. A holder member movably attached in the direction, and each of the holder members are vertically suspended with respect to the holder member, are disposed so as to surround the crucible assembly from above, and have a lower end portion below the crucible pan. A plurality of vertical arms provided with a block member supporting the bottom, and each block member provided at the lower end of each of the vertical arms is rotated in the direction of the central axis of the crucible assembly or in the tangential direction of the outer periphery of the crucible assembly. And a block member rotating mechanism to be driven.
[0009]
In this case, the articulated arm preferably has a horizontal rotation arm attached to the base member so as to be rotatable in a horizontal direction by a first support shaft, and the holder is provided at a free end side of the horizontal rotation arm. And a second support shaft to which the member is further rotatably mounted in a horizontal direction.
In addition, the block member rotating mechanism preferably includes a shaft rotatably arranged on each vertical arm, and the block member is attached to a lower end of each shaft, and each shaft operates in conjunction with each other. It is configured to be able to rotate.
[0010]
Further, a first stopper for restricting a rotation angle in one direction of the horizontal rotation arm constituting the articulated arm, and a second stopper for restricting a rotation angle of the holder member with respect to the horizontal rotation arm in one direction. A stopper, a third stopper that regulates a rotation angle of the horizontal pivot arm constituting the articulated arm in another direction, and a third stopper that regulates a pivot angle of the holder member with respect to the horizontal pivot arm in another direction. And a stopper for determining a mounting position of the crucible assembly by the first and second stoppers, and a suspending position of the crucible assembly with respect to the holder member by the third and fourth stoppers. It is desirable to be configured to determine.
[0011]
According to the crucible assembly mounting device configured as described above, the holder member movably attached to the base member via the articulated arm mounts the crucible assembly by the function of the articulated arm. For example, it can move in the horizontal direction between the placed carriage and the lifting device.
On the other hand, the base member is driven up and down by the action of a vertical movement mechanism, and each block member arranged on the holder member acts to support or release the tray of the crucible assembly by its rotation mechanism. By combining the above operations, the crucible assembly can be mounted on the lifting device from the transport trolley, and can be easily removed from the lifting device and transferred to the transport trolley.
[0012]
Further, the mounting device of the hot zone member according to the present invention is mounted so as to be able to move in a horizontal direction via a multi-joint arm with respect to the base member, and a vertical movement mechanism for driving the base member up and down by the power of an actuator. A holder member, a plurality of vertical arms respectively suspended vertically from the holder member, and arranged to surround the crucible assembly from above, and one end attached to each of the vertical arms, And a suspension member for connecting a hot zone member used in the lifting device, wherein the holder member can be positioned directly above the lifting device via an articulated arm.
[0013]
In this case, each of the vertical arms further includes a shaft mounted in a horizontal direction, and a ring member disposed so as to be slidable in the axial direction on the shaft. It is preferable that one end of the suspension member is attached.
[0014]
According to the mounting device of the hot zone member configured as described above, the hot zone member used for the lifting device is connected by a hanging member, for example, a wire cable, and the base member is driven up and down, and the multi-joint arm is used. Since the hot zone member can be moved horizontally, it is easy to mount the hot zone member from the transport vehicle to the lifting device, remove the hot zone member from the lifting device, and transfer the hot zone member to the transport vehicle.
Since the configuration of the hot zone member mounting device can use the main configuration of the crucible assembly mounting device as described above, for example, in a facility in which a dedicated mounting device is arranged for each lifting device. Can be used effectively.
[0015]
Further, the crucible assembly exchanging device according to the present invention can move to a vicinity of a lifting device installed at a predetermined position and mount or remove the crucible assembly with respect to the lifting device. An assembly exchange device, a transport vehicle guided near the lifting device, a vertical movement mechanism disposed on the transport vehicle, and vertically driving a base member by the power of an actuator; and A holder member attached so as to be able to move in the horizontal direction via an articulated arm, and each of the holder members are vertically suspended with respect to the holder member, and are disposed so as to surround the crucible assembly from above, and A plurality of vertical arms provided with a block member at a lower end portion thereof for supporting a lower bottom portion of the crucible pan, and each block member provided at a lower end portion of each of the vertical arms, The central axis direction of the ball assembly or constituted by a blocking member rotating mechanism for rotationally driving the tangential direction of the outer periphery of the crucible assembly.
[0016]
In this case, preferably, an actuator for driving the holder member in the horizontal direction with respect to the base member, and the block member acts on the block member rotating mechanism to move the block member in the central axis direction of the crucible assembly or the crucible assembly. And an actuator that is driven to rotate in the tangential direction of the outer periphery of the actuator.
In addition, a fixed block, which is preferably supported by each block member and is capable of temporarily mounting the crucible assembly on the carrier by the lowering operation of the vertical moving mechanism, is disposed on the carrier.
[0017]
According to the crucible assembly exchanging device configured as described above, the holder member that is arranged on the transport vehicle guided near the lifting device and carries the crucible assembly includes a vertical moving mechanism, an articulated arm, Is configured to be able to move in the vertical and horizontal directions. In addition, by adopting a configuration in which the crucible assembly can be temporarily placed on the transport vehicle, the crucible assembly can be stably transported on the transport vehicle.
According to this configuration, it is possible to reduce artificial work as much as possible, which can contribute to improving the yield and quality of the silicon single crystal ingot. Further, by using the system for guiding a transport vehicle, it is possible to eliminate almost any manual operation at a high-temperature site, and it is also possible to improve the operation rate of transport and removal of the crucible assembly.
[0018]
Further, the drive control method of the crucible assembly exchanging device according to the present invention may further comprise: a mark indicating a stop position of the transport vehicle corresponding to a place where a plurality of pulling devices are installed; A mark indicating the stop position of the carrier corresponding to the crucible assembly storage place stage for supplying the crucible assembly to the device, and the crucible assembly disposed on the crucible assembly removed from each of the lifting devices Sensors for reading marks indicating stop positions of the transport vehicle corresponding to the location stages are arranged, and the guide stop position of the transport vehicle is controlled based on the arrangement positions of the marks.
[0019]
In this case, a sensor that guides the carrier and reads a mark indicating a stop position of the carrier corresponding to at least the installation location of the lifting device is disposed on the carrier that configures the exchange device, and the carrier has a mark of the mark. When stopped at the arrangement position, control is performed so that the relative displacement between the mark and the sensor is absorbed by driving the articulated arm in the horizontal direction.
[0020]
According to the drive control method of the crucible assembly exchanging device controlled as described above, for example, one crucible assembly exchanging device can be guided to the installation location of a plurality of pulling-up devices. The overall cost can be reduced, and the productivity can be improved.
[0021]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, a crucible assembly mounting apparatus according to the present invention will be described with reference to the embodiments shown in FIGS. First, FIG. 1 shows a mounting device of a crucible assembly as viewed from the upper right, and FIG. 2 shows a mounting device holding the crucible assembly as viewed from the upper left.
The crucible assembly 1 is generally assembled by mounting a carbon crucible 3 on a carbon tray 2 and inserting a quartz glass crucible 4 into the carbon crucible 3 as shown in FIG. It is configured by filling silicon 5. As shown in FIGS. 1 and 2, the mounting device for the crucible assembly 1 is provided with a base member 13 which is vertically movable by a vertical moving mechanism 12, and which is attached to a vertically standing pillar 11. A holder member 15 for holding the crucible assembly 1 via an articulated arm 14 is attached.
[0022]
The vertical movement mechanism 12 is configured such that the base member 13 can be moved up and down along the column 11 by two parallel linear guides 16 installed on the column 11 that stands vertically, and serves as an actuator. The rotation power of the motor 17 rotates the ball screw 19 connected to the base member 13 via the coupling 18 to realize a vertical movement operation.
By operating a switch lever 20 attached to a part of the holder member 15, the vertical movement mechanism 12 drives the motor 17 to rotate forward and reverse, and is installed at three positions in the vertical direction of the linear guide 16. The sensor 21 is configured to stop at three fixed positions.
The articulated arm 14 that holds the holder member 15 so as to be movable in the horizontal direction with respect to the base member 13 is attached to the base member 13 by a first support shaft 23 so as to be rotatable in the horizontal direction. It comprises a horizontal rotation arm 24 and a second support shaft 25 to which the holder member 15 is further mounted on the free end side of the horizontal rotation arm 24 so as to be horizontally rotatable. With this configuration, the holder member 15 holding the crucible assembly 1 can be moved in a horizontal plane.
[0023]
FIG. 3 shows a configuration of a holder member 15 for holding the crucible assembly 1 in a simplified state. The holder member 15 is provided with three vertical arms 31 that are suspended from the outer periphery of the crucible assembly 1 so as to surround the crucible assembly 1 uniformly. In each of the vertical arms 31, a shaft 32 rotates. It is arranged as possible. The lower ends of the shafts 32 are exposed, and rectangular column-shaped block members 33 are attached to the lower ends in an inclined state.
That is, as shown in FIG. 2, when the crucible assembly 1 is carried, each block member 33 is attached to each shaft 32 so as to become lower toward the center of the crucible assembly 1.
[0024]
In addition, a square bar 34 made of high-purity SiC is embedded in a contact portion of each block member 33 with the crucible assembly 1 in order to prevent metal contamination of the crucible assembly 1. The preferred material is silicon-impregnated SiC or a surface coated with CVD / SiC.
An operation lever 35 is arranged above the holder member 15. By rotating the operation lever 35 within a range of 90 degrees, three wires are interlocked with each other wires 36 arranged inside the holder member 15. The block member rotating mechanism 37 is configured so that the block member is simultaneously rotated.
That is, by operating the operation lever 35, each block member 33 can be driven to rotate in the direction of the central axis of the crucible assembly 1 or in the tangential direction of the outer periphery of the crucible assembly.
[0025]
4A and 4B show a state in which the present apparatus is installed on the lifting apparatus 41. FIG. 4A is a plan view, and FIG. 4B is a front view.
The present apparatus moves to a position where the center of the crucible assembly 1 held by the holder member 15 can match the center of the shaft 43 arranged on the lifting device 41 on the gantry 42 arranged on the lifting device 41. While being installed, the center of the crucible assembly 1 held by the holder member 15 when the articulated arm 14 is turned is positioned at the center of the shaft 45 disposed on the crucible assembly transport cart 44 positioned outside the lifting device 41. It is installed at a position that matches the center.
The crucible assembly 1 is fitted to the shaft 43 arranged on the pulling-up device 41 and the shaft 45 arranged on the crucible assembly transport cart 44, so that the outer shapes of the shafts almost coincide with each other. A counterbore 1 a is formed in the lower bottom of the crucible assembly 1.
[0026]
When the crucible assembly 1 is mounted on the lifting device 41, the holder member 15 needs to be positioned. For this purpose, as shown in FIG. 2, a first stopper S1 for restricting a rotation angle in one direction of the horizontal rotation arm 24 constituting the articulated arm 14, and a further one of the holder members 15 for the horizontal rotation arm 24. A second stopper S2 that regulates the rotation angle in the direction is disposed.
That is, the crucible assembly 1 carried by the holder member 15 can be positioned directly above the lifting device 41 with the stopper S1 abutting on the horizontal rotation arm 24 and the stopper S2 abutting on the holder member 15. It is configured.
[0027]
Also, when the crucible assembly 1 is moved from the lifting device 41 to the crucible assembly transport cart 44 that has been positioned, it is desirable that the holder member be positioned. For this purpose, as shown in FIG. 1, a third stopper S <b> 3 for restricting the rotation angle of the horizontal rotation arm 24 constituting the articulated arm 14 in another direction, and the holder member 15 for the horizontal rotation arm 24. A fourth stopper S4 that regulates the rotation angle in the direction is disposed.
That is, in a state where the stopper S3 is in contact with the horizontal rotation arm 24 and the stopper S4 is in contact with the holder member 15, the crucible assembly 1 carried by the holder member 15 is moved to the position of the crucible assembly transport carriage 44 positioned. It is configured so that it can be located directly above.
[0028]
Further, as shown in FIG. 4B, the position of each sensor 21 installed at three positions in the vertical direction of the linear guide 16 is the first position where the holder member 15 can move horizontally without interference with other devices. And a second height at which the crucible assembly 1 can be disengaged from the block member 33 by placing the crucible assembly 1 on the shaft 43 of the pulling device 41, and the crucible assembly 1 on the crucible assembly transport carriage 44. The third height is set so that the crucible assembly 1 can be detached from the block member 33 upon being placed.
[0029]
Next, a series of mounting operations of the crucible assembly 1 will be described mainly with reference to FIG. The crucible assembly 1 is assembled on the crucible assembly transport trolley 44 in an environment with very few particles (clean room). The crucible assembly transport trolley 44 loaded with the crucible assembly 1 is moved to a fixed position where the crucible assembly 1 can be transferred by the present apparatus arranged at the place where the lifting device is installed.
Then, the height is set to the first height at which the holder member 15 can be horizontally moved by the vertical movement mechanism 12 without interference with other devices. The height can be set to the height by the function of the sensor 21 which is disposed above the three sensors. Subsequently, the holder member 15 is moved to a position immediately above the crucible assembly 1 loaded on the crucible assembly transport cart 44. This is because the holder member 15 is moved to the point where the holder member 15 can be moved horizontally to the side of the transport trolley 44, and the position of the holder member 15 is placed on the transport trolley 44 by the action of the third stopper S3 and the fourth stopper S4. The crucible assembly 1 is formed so as to substantially coincide directly with the crucible assembly 1.
[0030]
In this state, the lever 35 is operated to set each of the block members 33 so as to face the tangential direction of the outer periphery of the crucible assembly 1, and the holder member 15 is lowered by the vertical movement mechanism 12, and the block member 33 is set to the crucible assembly. The height is set so that the lower part of the solid 1 can be supported. This height can also be set to the height by the function of the sensor arranged at the bottom of the three sensors 21 described above.
Here, the lever 35 is rotated so that the block member 33 faces the center of the crucible assembly 1. By raising the holder member 15 in this state, the crucible assembly 1 can be received by the block member 33 and detached from the crucible assembly transport cart 44.
Subsequently, after raising the holder member 15 to the first height at which the holder member 15 can be moved horizontally without interference with other devices, the holder member 15 is moved horizontally just above the lifting device 41. Also in this case, by moving the holder member 15 to a point at which the holder device 15 can be horizontally moved by the lifting device 41, the position of the holder member 15 is directly above the lifting device 41 by the action of the first stopper S1 and the second stopper S2. They are made to almost match.
[0031]
Subsequently, by lowering the holder member 15, the shaft 43 is fitted into the counterbore hole 1 a provided in the lower portion of the crucible assembly 1, and the shaft 43 is set at the second height at which the crucible assembly 1 is separated from the block member 33. Is done. This can also be set to the height by the function of the sensor arranged in the middle of the three sensors 21 described above.
In this state, the lever 35 is operated again to turn the block member 33 in the tangential direction on the outer periphery of the crucible assembly 1, and at the same time, the holder member 15 is raised and moved to the first height which does not affect the lifting operation. Thus, the mounting work of the crucible assembly 1 is completed.
When the crucible assembly 1 is removed from the lifting device 41, the crucible assembly 1 can be removed by performing a procedure reverse to the above-described mounting operation.
[0032]
In the above, the embodiment in which the mounting device of the crucible assembly is installed with respect to one pulling device and the mounting and removing of the crucible assembly is performed has been described. Not only can it be used for mounting and removing work on the lifting device, but also by using an auxiliary tool together, it can be used as a mounting device or a removing device for a so-called hot zone member such as a heat retaining tube that constitutes the lifting device.
FIG. 5 shows the embodiment, and the same parts as those of the mounting device shown in FIGS. 1 to 4 are denoted by the same reference numerals, and therefore, detailed description thereof will be omitted as appropriate.
[0033]
As shown in FIG. 5, the block holders 33a arranged at the lower ends of the three shafts 32 suspended from the holder member 15 are configured so that the shafts 51 are attached in the horizontal direction.
A ring member 52 is disposed on each of the horizontal shafts 51 so as to be slidable in the axial direction. One end of a wire cable 53 as a suspending member is connected to each ring member 52, and a part of a heat retaining cylinder 55 as a hot zone member constituting the lifting device 41 is connected to the other end of each wire cable 53. Is attached.
[0034]
Therefore, as shown in FIG. 5, the hook 54 is engaged with, for example, the bottom peripheral edge of the heat retaining cylinder 55, and the vertical movement mechanism 12 is driven, so that the heat retaining cylinder 55 can be mounted or pulled out into the pulling-up device 41. .
Then, by using the horizontal movement function of the articulated arm 14, the work of mounting the heat retaining cylinder 55 from the transport vehicle to the lifting device 41 and removing the heat retaining tube 55 from the lifting device 41 to the transport vehicle side is performed. can do.
The ring member 52 to which one end of the wire cable 53 as a suspension member is connected slides on the horizontal shaft 51 according to the diameter of the heat retaining cylinder 55 or other hot zone members, and is easily balanced by the holder member 15. It works so that it is hung while maintaining.
[0035]
Next, FIGS. 6 to 12 illustrate a crucible assembly replacement device and a drive control method of the crucible assembly replacement device.
6 and 7 show an embodiment of the crucible assembly exchanging device, and the configuration of the main part is almost the same as the crucible assembly mounting device shown in FIGS. Therefore, portions corresponding to the configuration of the above-described crucible assembly mounting device are denoted by the same reference numerals, and detailed description thereof will be omitted as appropriate.
As shown in FIGS. 6 and 7, the crucible assembly replacement device has the same function as the crucible assembly mounting device shown in FIGS. 1 to 4 mounted on a transport vehicle 61 provided with wheels 62. ing. The transport vehicle 61 is configured to be guided and movable in the vicinity of a lifting device installed at a predetermined position.
[0036]
The base member 13 configured to be able to move up and down along the column 11 by the linear guide 16 is provided with a servomotor 63 as an actuator. Can be rotated in the horizontal direction.
A joint member 64 is disposed on the free end side of the horizontal arm 24, and the holder member 15 is attached to the horizontal arm 24 via the joint member 64. To the joint member 64 is attached a toothed belt 65 which is interlocked so that the rotation angle between the free end side of the horizontal arm 24 and the joint member 64 and between the joint member 64 and the holder member 15 are equal. The angle between the horizontal arm 24 and the holder member 15 can be controlled by the driving force of a servo motor 66 disposed on the joint member 64.
Therefore, by driving the two motors 63 and 66, the holder member 15 is driven in a two-dimensional direction (horizontal direction), and the lifting and lowering operation of the base member 13 is added thereto, so that the holder member 15 can be driven in a three-dimensional direction. Is configured.
[0037]
On the other hand, a motor 67 as an actuator is also arranged on a part of the holder member 15, and the motor 67 is configured to rotationally drive a shaft 32 in a vertical arm 31 integrally attached to the holder member 15. ing.
Each of the shafts 32 housed in each of the three vertical arms 31 constitutes a block member rotating mechanism 37 by wires 36 laid over each other, so that the three block members 33 are synchronized with each other in the crucible. It is configured to be driven to rotate in the direction of the central axis of the assembly or in the tangential direction of the outer periphery of the crucible assembly.
[0038]
A horizontal stage 68 is formed on the transport vehicle 61, and the crucible assembly 1 supported by the holder member 15 is lowered on the horizontal stage 68 to temporarily place the crucible assembly on the transport vehicle. Three fixed blocks 69 that can be placed are radially arranged.
Further, as shown in FIG. 7, a position detection sensor 70 is disposed at the lower bottom of the carrier 61, and the carrier 61 can be guided by the detection sensor 70.
[0039]
8 to 12 illustrate an example of a drive control method using the crucible assembly exchanging device shown in FIGS. 6 and 7. FIG.
FIG. 8 shows an example of a transport layout of the crucible assembly changing apparatus. As shown in FIG. 8, a plurality of (10 in FIG. 8) lifting devices 41 are provided in parallel, and a crucible assembly storage place 71 before use and a crucible assembly disposal place 74 after use are set. ing.
The transport vehicle 61 constituting the crucible assembly exchanging device can travel on a traveling locus 77 according to an instruction from a system control device 83 described later. In this case, for example, a signal line (not shown) is arranged on the inner surface of the floor of the traveling locus 77, and the guided vehicle 61 can be guided along the signal line or guided by other means. I have.
[0040]
Also, a mark 78 indicating a stop position of the transport vehicle 61 corresponding to the installation location of the plurality of lifting devices 41, a stage 72 of a crucible assembly storage place 71 for supplying a crucible assembly to each lifting device. 73 indicating the stop position of the transport vehicle 61 corresponding to the crane and the mark 76 indicating the stop position of the transport vehicle 61 corresponding to the crucible assembly disposal place stage 75 on which the crucible assembly removed from each of the lifting devices is placed. , Respectively, are arranged on the floor.
[0041]
9 shows an example of the crucible assembly storage location stage 72. FIG. 9A shows a state where the crucible assembly 1 is placed on the stage 72, and FIG. Indicates a state where is not placed.
On this stage 72, three fixed blocks 81 on which the crucible assembly 1 can be stably mounted are radially arranged. Although not shown in the figure, a sensor for detecting the presence or absence of the crucible assembly is also provided. Further, a control device 84 for inputting the completion of setting to a system control device 83 to be described later and the input of the transfer destination lifting device 41 is arranged beside the stage 72.
On the other hand, the crucible assembly disposal place stage 75 is configured similarly to the storage place stage 72 shown in FIG. 9, and a control device 85 for notifying a system control device 83 to be described later that the crucible assembly 1 can be received is provided. Are located.
[0042]
FIG. 10 shows a configuration of a control device for performing drive control of the crucible assembly exchanging device according to the present invention.
Each lifting device 41 shown in FIG. 8 has an operation button (not shown) for transmitting a crucible assembly removal request and a mounting request to the system control device 83, and is in a state in which a removal request and a mounting request can be made. The monitoring is configured to be performed by the control device 86 of the lifting device 41.
The system controller 83 is also configured so that communication is performed between the controller 84 disposed on the crucible assembly storage location stage 72 and the controller 85 disposed on the crucible assembly disposal location stage 75. Have been.
Further, the system control device 83 is disposed on the transport vehicle 61, and communicates with a control device 87 that stores the stop position of the articulated arm 14 when the transport vehicle 61 stops in each lifting device as described later. It is configured to be performed.
[0043]
Next, a transfer procedure when the crucible assembly 1 is mounted on the lifting device 41 will be described. In the lifting device 41 shown in FIG. 8, when the crucible assembly 1 is ready to be mounted, when a mounting request button (not shown) is operated, the mechanical mounting state of the lifting device 41 is checked as described above. Checked by sensor.
On the other hand, the crucible assembly 1 to be transported is set on the stage 72 of the storage location 71, and the setting completion and registration of the transport destination lifting device are performed in the system controller 83. When receiving a mounting request from the lifting device 41 and a setting completion signal for the storage location 71, the system control device 83 sends the requested lifting device and the transfer destination of the crucible assembly 1 set on the storage location stage 72. When the pulling devices match, a transfer instruction is issued to the transfer vehicle 61. Thus, the transport vehicle 61 receives the crucible assembly 1 from the storage location stage 72, transports it to the lifting device, and mounts it.
[0044]
The procedure for removing the crucible assembly 1 from the lifting device 41 and transporting the same is as follows. When the crucible assembly 1 is ready to be taken out by the lifting device 41, when the take-out request button (not shown) is operated, the take-out request is notified to the system control device 83. When the take-out request button is operated, confirmation of the mechanical take-out state of the pulling-up device 41 is checked by the sensor.
On the other hand, at the stage 75 of the disposal place 74 that receives the crucible assembly 1, the system controller 83 is notified that the crucible assembly 1 can be received. The system controller 83 instructs the transport vehicle 61 to transport when there is a removal request from the lifting device 41 and a signal indicating that the disposal location 74 can be received. Thereby, the transport vehicle 61 takes out the crucible assembly 1 from the lifting device 41 and transports it to the disposal place stage 75.
[0045]
The operation of the transport vehicle 61 in the above-described series of transport operations is performed as follows. The operation when the transport vehicle 61 takes out the crucible assembly 1 from the stage 72 of the storage location 71 and the operation when the crucible assembly 1 is removed from each lifting device 41 are almost the same.
Further, the operation when the transport vehicle 61 mounts the crucible assembly 1 on each lifting device 41 and the operation when the crucible assembly 1 is mounted on the stage 75 of the disposal place 74 are almost the same. is there.
Therefore, the operation when the crucible assembly 1 is attached to the lifting device 41 and the operation when the crucible assembly 1 is removed from the lifting device 41 will be described below.
[0046]
First, when the crucible assembly 1 is mounted on the lifting device 41, the transport vehicle 61 travels along the traveling locus 77. In this case, the transport vehicle 61 moves while being placed on the fixed block 69 disposed on the transport vehicle 61 so that the crucible assembly 1 does not drop during transport.
Then, the position detection sensor 70 mounted on the carrier 61 detects the mark 78 arranged on the lifting device 41 and stops. Then, at the stop position, the shift amount from the reference stop position is detected based on the mark 78. This displacement is used to correct the stop position of the articulated arm 14 when the crucible assembly 1 is mounted on the lifting device 41.
The control device 87 mounted on the carrier 61 calculates the amount of deviation from the reference stop position when the carrier 61 actually stops, and corrects the stop position of the articulated arm 14. Thus, the crucible assembly 1 can be mounted on the lifting device 41 with high accuracy.
[0047]
FIG. 11 shows a state where the crucible assembly 1 is mounted on the lifting device 41 by the carrier 61. When the carrier 61 is stopped in front of the lifting device 41, the crucible assembly 1 is mounted on a fixed block 69 of the carrier 61. At this time, the articulated arm 14 is stopped with the position where the three crucible assembly holding books 33 contact the crucible assembly 1 as the origin position.
Hereinafter, the mounting operation of the crucible assembly 1 to the lifting device 41 is performed in the following order.
[0048]
(1) The sensor 70 detects the mark 78 on the floor, and measures the shift amount of the stop position of the carrier 61. The stop position of the articulated arm 14 is calculated based on the position where the crucible assembly 1 is to be mounted and the amount of displacement stored in advance.
(2) The multi-joint arm 14 is raised while holding the crucible assembly 1.
(3) By driving the motors 63 and 66, the articulated arm 14 including the horizontal arm 24 and the holder member 15 is turned to move the crucible assembly 1 to a stop position according to the calculation result. (State shown in FIG. 11)
(4) The multi-joint arm 14 is lowered, and the crucible assembly 1 is mounted on the lifting device 41. (That is, the crucible assembly 1 is separated from the block member 33.)
(5) The motor 67 is driven to rotate the block member 33 in the tangential direction of the crucible assembly 1.
(6) The articulated arm 14 moves up, and the arm 14 is returned to the home position.
[0049]
Next, the operation for removing the pot assembly 1 from the lifting device 41 is performed as follows.
That is, when the transport vehicle 61 stops in front of the lifting device 41, the pot assembly 1 has already been removed from the fixed block 69 on the transport vehicle 61, and as shown in FIG. 14 is stopped at the origin position.
Then, the removal of the crucible assembly 1 from the lifting device 41 is executed in the following order.
[0050]
{Circle around (1)} The sensor 70 detects the mark 78 on the floor and measures the shift amount of the stop position of the transport vehicle 61. The stored position and the shift amount of the crucible assembly 1 are stored in advance. Then, the stop position of the articulated arm 14 is calculated.
(2) Raise the articulated arm 14.
(3) By driving the motors 63 and 66, the articulated arm 14 including the horizontal arm 24 and the holder member 15 is turned, and the articulated arm 14 is moved to the stop position based on the calculation result.
(4) The motor 67 is driven to rotate each block member 33 in the tangential direction of the crucible assembly 1.
(5) The multi-joint arm 14 is lowered and moved slightly lower than the height at which the crucible assembly 1 is held.
(6) The motor 67 is driven to rotate the block member 33 toward the center of the crucible assembly 1.
{Circle around (7)} The articulated arm 14 is raised, and the crucible assembly 1 is supported by the block member 33 from the middle thereof, and the crucible assembly 1 is suspended by the holder member 15 as it is.
{Circle around (8)} The articulated arm 14 is moved to the origin position, and the crucible assembly 1 is set on the fixed block 33 arranged on the carrier 61.
[0051]
After the crucible assembly 1 is mounted on the transport vehicle 61 as described above, the transport vehicle 61 travels on the traveling locus 77 and transports the crucible assembly 1 to the assembly disposal location 74. Then, the crucible assembly 1 is transferred to the disposal place stage 75. The operation in this case is the same as the case where the crucible assembly is mounted on the lifting device.
[0052]
【The invention's effect】
As is clear from the above description, according to the crucible assembly mounting apparatus according to the present invention, the holder member is attached to the base member which is moved up and down by the vertical movement mechanism so as to be able to move in the horizontal direction via the multi-joint arm, A block member that supports the lower bottom portion of the crucible pan is mounted on the holder member so as to be rotatable by a rotation mechanism, so that the holder member can move in three-dimensional directions and is mounted on the holder member. The blocking member acts to carry or release the pan of the crucible assembly by a pivoting mechanism.
Therefore, for example, the crucible assembly can be easily and smoothly transferred to and from the transporting vehicle by removing the crucible assembly from the transporting vehicle to the lifting device.
[0053]
Further, according to the hot zone member mounting apparatus of the present invention, it is possible to easily and smoothly perform, for example, the mounting or removing operation of the heat retaining cylinder, which constitutes the lifting apparatus, by directly using the function of the crucible assembly mounting apparatus. .
Further, according to the crucible assembly exchanging device according to the present invention, the function of the above-described crucible assembly mounting device is mounted on the carrier, and preferably, a fixed block capable of temporarily mounting the crucible assembly is arranged. Therefore, the crucible assembly can be stably transported, and the mounting and dismounting of the crucible assembly with respect to the lifting device can be automatically performed.
[0054]
Still further, according to the drive control method for the crucible assembly exchanging device according to the present invention, the crucible assembly exchanging device is used to guide the vehicle to a place where a plurality of lifting devices are installed. By using the crucible assembly exchanging device, the mounting and dismounting of the crucible assembly with respect to each lifting device can be alternately performed.
Therefore, it is possible to reduce artificial work, improve the yield and quality of the silicon single crystal ingot, and also improve the productivity.
[Brief description of the drawings]
FIG. 1 is a perspective view showing a state in which a crucible assembly mounting device according to the present invention is viewed from the upper right side.
FIG. 2 is a perspective view showing a state in which the mounting device holding the crucible assembly is viewed from the upper left side.
FIG. 3 is a perspective view showing a configuration of a holder member for holding a crucible assembly in which an internal state is simplified.
FIG. 4 is a diagram showing a state where the crucible assembly mounting device is installed on a lifting device.
FIG. 5 is a perspective view showing a hot zone member mounting device according to the present invention.
FIG. 6 is a perspective view showing the crucible assembly exchanging device according to the present invention with the crucible assembly mounted.
FIG. 7 is a perspective view showing the crucible assembly exchanging device in a state where the crucible assembly is not mounted.
FIG. 8 is a plan view showing an example of a transport layout of the crucible assembly exchanging device for describing a drive control method of the crucible assembly exchanging device according to the present invention.
FIG. 9 is a perspective view showing an example of a crucible assembly storage location stage.
FIG. 10 is a block diagram showing an example of a control device for performing drive control of the crucible assembly exchanging device according to the present invention.
FIG. 11 is a perspective view showing a state where the crucible assembly is mounted on the lifting device by the carrier.
[Explanation of symbols]
1 Crucible assembly
11 Pillar
12 Vertical movement mechanism
13 Base member
14 Articulated arm
15 Holder member
17 Motor (actuator)
19 Ball screw
21 sensors
23 1st support shaft
24 Horizontal rotating arm
25 Second support shaft
31 vertical arm
33 Block member
37 Block member rotation mechanism
41 Lifting device
44 Crucible assembly transport trolley
51 horizontal shaft
52 Ring member
53 wire cable (hanging member)
55 Insulation tube (hot zone member)
61 Carrier (exchange device)
62 wheels
63 Servo motor
66 Servo motor
67 Servo motor
68 horizontal stage
69 fixed block
70 Detection sensor
72 Crucible Assembly Storage Location Stage
73 mark
75 Crucible assembly disposal place stage
76 mark
77 trajectory
78 mark
81 fixed block
83 System control unit
84 Storage stage control device
85 Disposal stage control device
86 Lifting device controller
87 carrier control device

Claims (11)

A vertical movement mechanism that drives the base member up and down by the power of the actuator,
A holder member attached to the base member so as to be movable in a horizontal direction via an articulated arm,
A plurality of vertical arms each vertically suspended from the holder member and arranged so as to surround the crucible assembly from above, and provided at each lower end with a block member supporting a lower bottom portion of the crucible tray; When,
A block member rotating mechanism for rotating each block member provided at a lower end portion of each of the vertical arms in a central axis direction of the crucible assembly or in a tangential direction of an outer periphery of the crucible assembly. A mounting device for a crucible assembly. The articulated arm includes a horizontal rotation arm attached to the base member so as to be rotatable in a horizontal direction by a first support shaft, and the holder member is further horizontally mounted on a free end side of the horizontal rotation arm. 2. A crucible assembly mounting apparatus according to claim 1, further comprising a second support shaft rotatably mounted on said crucible assembly. The block member rotation mechanism includes a shaft rotatably arranged on each vertical arm, and the block member is attached to a lower end of each shaft so that each shaft can rotate in conjunction therewith. 2. The crucible assembly mounting apparatus according to claim 1, wherein A first stopper that regulates a rotation angle in one direction of the horizontal rotation arm that constitutes the articulated arm; and a second stopper that regulates a rotation angle of the holder member with respect to the horizontal rotation arm in one direction. A third stopper for restricting a rotation angle of the horizontal pivot arm constituting the articulated arm in another direction, and a fourth stopper for regulating a pivot angle of the holder member with respect to the horizontal pivot arm in another direction. The first and second stoppers determine the mounting position of the crucible assembly, and the third and fourth stoppers determine the hanging position of the crucible assembly with respect to the holder member. 3. The mounting device for a crucible assembly according to claim 2, wherein the device is configured as described above. A vertical movement mechanism that drives the base member up and down by the power of the actuator,
A holder member attached to the base member so as to be movable in a horizontal direction via an articulated arm,
A plurality of vertical arms each vertically suspended with respect to the holder member and arranged to surround the crucible assembly from above,
One end is attached to each of the vertical arms, and the other end is provided with a hanging member that couples a hot zone member used in the lifting device, and the holder member is located directly above the lifting device via a multi-joint arm. A mounting device for a hot zone member, wherein the mounting device is configured to be capable of being mounted. Each of the vertical arms further includes a shaft mounted in a horizontal direction, and a ring member arranged to be slidable in the axial direction on the shaft. 6. The hot zone member mounting device according to claim 5, wherein one end of the member is mounted. A crucible assembly exchanging device capable of moving to a vicinity of a lifting device installed at a predetermined position and mounting or removing a crucible assembly with respect to the lifting device,
A transport vehicle guided near the lifting device,
An up-down moving mechanism that is arranged on the carrier and vertically drives a base member by the power of an actuator;
A holder member attached to the base member so as to be movable in a horizontal direction via an articulated arm,
A plurality of vertical arms each vertically suspended from the holder member and arranged so as to surround the crucible assembly from above, and provided at each lower end with a block member supporting a lower bottom portion of the crucible tray; When,
A block member rotating mechanism for rotating each block member provided at a lower end portion of each of the vertical arms in a central axis direction of the crucible assembly or in a tangential direction of an outer periphery of the crucible assembly. Crucible assembly exchange device. An actuator for driving a holder member in a horizontal direction with respect to the base member, and a block member acting on the block member rotating mechanism to move the block member in a central axis direction of the crucible assembly or a tangential direction of an outer periphery of the crucible assembly. 8. The crucible assembly exchanging device according to claim 7, further comprising an actuator that is driven to rotate. 8. A fixed block supported by each block member and capable of temporarily mounting a crucible assembly on the transport vehicle by a lowering operation of a vertical movement mechanism, is arranged on the transport vehicle. The crucible assembly exchanging device according to claim 8. A mark indicating a stop position of the carrier corresponding to a place where a plurality of pulling devices are installed, a crucible assembly for supplying a crucible assembly to each of the pulling devices; A mark indicating the stop position of the transport vehicle corresponding to the storage location stage, and a mark indicating the stop position of the transport vehicle corresponding to the crucible assembly disposal place stage on which the crucible assembly removed from each of the lifting devices is placed, respectively A sensor to read is arranged,
10. The drive control method for a crucible assembly exchanging apparatus according to claim 7, wherein the guide stop position of the carrier is controlled with reference to the arrangement position of each of the marks. A sensor that reads a mark indicating a stop position of the transport vehicle corresponding to an installation location of the at least lift device is provided on the transport vehicle that forms the exchange device,
8. The apparatus according to claim 7, wherein the control unit controls the relative displacement between the mark and the sensor to be absorbed by driving the articulated arm in a horizontal direction when the carrier stops at the position where the mark is disposed. Item 10. A drive control method for a crucible assembly exchanging device according to any one of Items 9.

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