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JP3604472B2 - Multi-point magnetic field measurement device - Google Patents
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JP3604472B2 - Multi-point magnetic field measurement device - Google Patents

Multi-point magnetic field measurement device Download PDF

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JP3604472B2
JP3604472B2 JP25522895A JP25522895A JP3604472B2 JP 3604472 B2 JP3604472 B2 JP 3604472B2 JP 25522895 A JP25522895 A JP 25522895A JP 25522895 A JP25522895 A JP 25522895A JP 3604472 B2 JP3604472 B2 JP 3604472B2
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magnetic field
output
hall
magnetic sensor
input
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JPH09101359A (en
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伊藤  隆
和敏 石橋
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旭化成電子株式会社
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Description

【0001】
【発明の属する技術分野】
本発明は磁気センサICを多数個組合せて多点の磁界測定を行う装置に関するものである。
【0002】
【従来の技術】
磁気センサとICを単一パッケージ化し、またはモジュール化した磁気センサICを多数個組合せて多点の磁界測定を行う装置は、測定対象物の稼動部の磁石と組み合わせることで測定対象物の位置状態を検出する装置となることから、織機等をはじめとする産業機器や自動車、家電製品の各種位置検出、ブラインドシャッター開閉検知等のホームオートメーション、窓割れ検知等のホームセキュリティー等で広く利用されている。従来、磁気センサーICは測定点毎に測定点の数だけ配置されていた。図6に従来の多点磁界測定装置の構成を示す。位置a11〜amnに配置された複数の磁気センサーIC1はそれぞれ入力端子2、出力端子3および接地端子4を有し、a11〜am1、・・・a1n〜amnの磁気センサーICの入力端子2は共通の入力配線5に接続されてデータ処理装置8から入力電圧を印加され、接地端子4も共通の接地配線7に接続されている。しかし、磁気センサーICの出力は各IC毎に出力配線6を引き回して各種演算機能を有するデータ処理装置8に集められて処理されることで、各測定点の磁界測定あるいは位置状態検出が行われている。配線の数はm×n+2となる。しかし、最近ではこれらの磁界測定が必要な装置は省エネルギあるいは最適制御の指向から大型化・複雑化しており、磁界測定が必要な測定点の数も著しく増大してきている。これに伴い、磁気センサーIC毎にデータ処理装置まで引き回される磁気センサーICの出力の配線の数も増大してきており、自動車等で問題となる重量増以外にも、配線の複雑化による装置の信頼性の低下や装置組み立て上のコストの増加等の問題が顕著になってきている。
【0003】
【発明が解決しようとする課題】
本発明は、磁気センサーICを多数個組合せて多点の磁界測定を行う装置において、前述のように測定点の数だけ必要となっていた磁気センサーIC毎にデータ処理装置まで引き回される磁気センサーICの出力の配線数を減らし、それによって、測定点の数の増大に伴って問題となってきていた配線の複雑化による装置の信頼性の低下および装置組立上のコスト高などの問題を解決した簡単な構成の多点磁界測定装置を提供することを目的とする。
【0004】
【課題を解決するための手段】
本発明による多点磁界測定装置は、複数のホールICを組合せて、位置axy(x=1〜m、y=1〜n)の磁束密度を測定する多点磁界測定装置において、m×nに配置された複数のホールICと、前記m×nに配置された位置axyのy毎に共通となるn個の配線に分かれた入力配線に接続されている前記ホールICのそれぞれの入力端子と、前記m×nに配置された位置axyのx毎に共通となるm個の配線に分かれた出力配線に接続されている前記ホールICのそれぞれの出力端子と、記入力配線を介して時間分割により前記入力端子に入力電圧を順次掃引印加し、前記出力配線を介して前記入力電圧の掃引印加と同期して前記出力端子からの出力電圧を得るデータ処理手段とを有することを特徴とする。
【0005】
また、複数のホールICがそれぞれホール素子の出力電圧を設定された閾値に対応したTTLレベルの出力に変換する機能を有するホールICであることを特徴とする
【0006】
【発明の実施の形態】
以下、本発明の多点磁界測定装置について、実施例を示す図1を参照して説明する。
【0007】
測定位置axy(a11〜am1・・・a1n〜amn)に電源入力端子2、出力端子3、接地端子4を有する3端子構成の磁気センサーIC1が配置されている。同じyの値を有する位置axyのx=1〜mの磁気センサーICの入力端子、すなわち、a11〜am1の磁気センサーIC1の入力端子2、a12〜am2の磁気センサーIC1の入力端子2、・・・a1n〜amnの磁気センサーIC1の入力端子2、はそれぞれx=1〜m毎に共通となるn個の配線に分かれた入力配線5に接続され、同様に、同じxの値を有する位置axyのy=1〜nの磁気センサーICの出力端子、すなわち、a11〜a1nの磁気センサーIC1の出力端子3、a21〜a2nの磁気センサーIC1の出力端子3、・・・an1〜amnの磁気センサーIC1の出力端子3、はそれぞれy=1〜n毎に共通となるm個の配線に分かれた出力配線6に接続され、全ての磁気センサーIC1の接地端子4は共通の接地配線7に接続されている。各測定点から引き回される(m+n+1)本の配線は演算機能を有するデータ処理装置8に接続されている。
【0008】
演算機能を有するデータ処理装置8は、図2に示すように位置axyのx=1〜m毎に共通となるn個に分かれた入力配線を通して、時間分割により、y=1の位置のm個の磁気センサーICの入力端子、y=2の位置のm個の磁気センサーICの入力端子、・・・y=nの位置のm個の磁気センサーICの入力端子に入力電圧Vccを順次掃引印加し、一方、図3に示すように、入力電圧の印加と同期して、位置axyのy=1〜n毎に共通となるm個に分かれた出力配線から順次磁気センサーICの出力信号Voutを受け取り、判定する。以上のような構成によって本発明の多点磁界測定装置は測定点axyの全ての磁界の測定を時間分割により行うことができる。入力端子および出力端子の結線を替えて、各入力端子をそれぞれ位置axyのy=1〜n毎に共通となるm個の配線に分かれた入力配線5に接続し、各出力端子をそれぞれ位置axyのx=1〜m毎に共通となるn個の配線に分かれた出力配線6に接続しても同等である。
【0009】
ここで注意すべきことは、位置axyのxおよびyは、単に2次元平面における直交座標上の位置を示すものではないことである。位置axyによって、曲面上の位置でも、あるいは斜交座標上の位置を示すことも可能であるし、一次元座標上の位置を示すことも可能である。xおよびyは磁気センサーICのグループ化のために用いられると考えてもよい。図4に直線上の9箇所の位置x11〜x33に磁気センサーICを配置した場合の構成を示す。位置x11、x21、x31に配置された磁気センサーICの入力端子、位置x12、x22、x32に配置された磁気センサーICの入力端子および位置x13、x23、x33に配置された磁気センサーICの入力端子が、共通の3個の配線に分かれた入力配線のそれぞれに接続されている。一方、位置x11、x12、x13に配置された磁気センサーICの入力端子、位置x21、x22、x23に配置された磁気センサーICの入力端子および位置x31、x32、x33に配置された磁気センサーICの出力端子が、共通の3個の配線に分かれた出力配線のそれぞれに接続されている。
【0010】
図1に示したように、位置axyのx=1〜m毎に共通となるn個の配線に分かれた入力配線を介して時間分割によりy=1の磁気センサーICからy=nの磁気センサーICまで順次掃引して電圧を印加する掃引速度は、多点磁界測定装置に要求される時間分解能で設定されれば良いが、掃引速度は速いほど良いので、磁気センサーICが追従できる限界近くに設定することは可能である。
【0011】
本発明の多点磁界測定装置においては、位置axyのy=1〜n毎に共通となるm個の各出力配線の末端に、n個の磁気センサーICの出力信号を安定的に得ることを目的としたバッファ回路を設けることも好ましく行われる。
【0012】
本発明の多点磁界測定装置に用いられる磁気センサーICは、磁気センサーの出力電圧を設定された閾値に対応したTTLレベルの出力に変換する機能を有するものがよく、そのような磁気センサーICであれば、図1に示したような単一パッケージのものでも、いくつかの部品によって構成されたモジュールのようなものでもよい。特に、簡単な構成の多点磁界測定装置になるという点からは単一パッケージのものが最適である。また、磁気センサーICで用いられる磁気センサーは、磁界の測定ができるものであれば、ホール素子、半導体磁気抵抗素子、強磁性体磁気抵抗素子、コイル等何でも良いが、静磁界の測定が可能という点からはホール素子、半導体磁気抵抗素子、強磁性体磁気抵抗素子がより好ましく、その中でも磁気センサーとして広く用いられているホール素子はコストの点からは最適である。さらに、磁気センサーICとしてホール素子を用いたICを使用する場合には、ホール素子はInSbホール素子、InAsホール素子、GaAsホール素子、Siホール素子のいずれをも用いることができる。特に、高感度の磁界測定が可能という点からはInSbホール素子が最適である。
【0013】
【実施例】
以下に本発明の多点磁界測定装置を実施例を用いて詳細に説明するが、本発明は本実施例のみに限定されるものではない。
【0014】
磁気センサーICとして、高感度のInSbホール素子とICをハイブリッド構造により単一パッケージに組み込んだ3端子構成のホールICを用いて、図1に示すような5×6のホールICアレイを作製した。位置axyのx=1〜5毎に共通となる6個の配線に分かれた入力配線、位置axyのy=1〜6毎に共通となる5個の配線に分かれた出力配線、接地配線をデータ処理装置に接続した。ホールICは図5に示すような片側磁界動作タイプの素子を用い、電源電圧Vccは5Vに設定、出力が約0Vのローレベルになる閾値の磁束密度Bopは20mT、出力が約5Vのハイレベルになる閾値の磁束密度Brpは15mTのものを使用した。5×6のホールICアレイ中の測定点a11の1素子のみに磁石を貼り付けて、出力が約0Vの閾値の磁束密度Bopである20mTより大きい磁界を加えた状態にした。この状態で位置axyのx=1〜5毎に共通となる6個の配線に分かれた入力配線に時間分割により掃引印加される電源電圧Vccの掃引速度を変えて、データ処理により磁界の状態を判定できるかどうかについて確認した。その結果、掃引速度を50kHzまで上げても、電源電圧Vccがax1の入力配線に印加されているときにのみ、a1yの出力配線からの出力がローレベルである約0Vとして判定できることが確認できた。
【0015】
【発明の効果】
以上説明したように、本発明の多点磁界測定装置は、測定点の数だけ必要であるホールICの配線の数を従来例に比べて大幅に減少することができる。具体的には、m×nのホールICアレイに対して、従来は最低でもm×n+2個の配線が必要であった配線数をm+n+1に減らすことができた。この効果は測定点の数が増えるほど顕著になることは言うまでもない。ホールICを多数個組み合わせて多点の磁界測定を行う装置は、被測定対象物稼動部の磁石と組み合わせた位置状態検知装置として広く利用されてきている。最近ではこれらの装置は省エネルギ、最適制御の指向から大型化、複雑化しており、磁界測定が必要な測定点の数も著しく増大する傾向にある。本発明の多点磁界測定装置は、ホールIC毎にデータ処理装置まで引き回されるホールICの出力配線の数を減らし、その結果、配線の複雑化による装置の信頼性の低下や装置組立上のコストの増加などの問題を解決したものであり、革新的に簡単な構成で高い量産性を実現したものである。今後、各種の機器、装置が高機能化かつ複雑化し、そのために磁界測定が必要とされる測定点の数もさらに増えると思われる幅広い用途において利用することができるので、本発明の工業的な利点は大きく、はかりしれない。
【図面の簡単な説明】
【図1】本発明の多点磁界測定装置の一例の構成を示す図である。
【図2】本発明の多点磁界測定装置で用いられる入力電圧の掃引印加を説明する図である。
【図3】本発明の多点磁界測定装置で用いられる磁界の有無の判定法を説明する図である。
【図4】本発明の多点磁界測定装置の他の例の構成を示す図である。
【図5】本発明の多点磁界測定装置の実施例において、磁気センサーICとして使用したホールICの動作を示す図である。
【図6】従来の多点磁界測定装置の構成を示す図である。
【符号の説明】
1 磁気センサーIC
2 磁気センサーICの入力端子
3 磁気センサーICの出力端子
4 磁気センサーICの接地端子
5 入力配線
6 出力配線
7 接地配線
8 データ処理装置
xy 測定点の位置
[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to an apparatus for performing multipoint magnetic field measurement by combining a plurality of magnetic sensor ICs.
[0002]
[Prior art]
The magnetic sensor and IC are packaged in a single package, or a multi-point magnetic sensor IC that combines multiple magnetic sensor ICs is used to measure the magnetic field at multiple points. It is widely used for detecting various positions of industrial equipment such as looms, automobiles, and home appliances, home automation such as opening and closing detection of blind shutters, and home security such as detection of window breakage. Conventionally, magnetic sensor ICs are arranged for each measurement point by the number of measurement points. FIG. 6 shows a configuration of a conventional multipoint magnetic field measuring apparatus. A plurality of magnetic sensor ICs 1 arranged at positions a 11 to a mn respectively have an input terminal 2, an output terminal 3 and a ground terminal 4, and magnetic sensor ICs a 11 to am 1 ,... A 1n to a mn. The input terminal 2 is connected to a common input wiring 5 to receive an input voltage from the data processing device 8, and the ground terminal 4 is also connected to the common ground wiring 7. However, the outputs of the magnetic sensor ICs are routed to the output wiring 6 for each IC and collected and processed by the data processing device 8 having various arithmetic functions, so that the magnetic field measurement or the position state detection at each measurement point is performed. ing. The number of wirings is m × n + 2. However, these devices that require magnetic field measurement have recently become larger and more complex due to energy saving or optimal control, and the number of measurement points that require magnetic field measurement has also increased significantly. As a result, the number of wirings of the output of the magnetic sensor IC that are routed to the data processing device for each magnetic sensor IC has been increasing, and in addition to the increase in weight, which is a problem in automobiles and the like, the wiring is complicated. However, problems such as a decrease in reliability and an increase in costs for assembling the apparatus have become significant.
[0003]
[Problems to be solved by the invention]
The present invention relates to an apparatus for measuring a magnetic field at multiple points by combining a large number of magnetic sensor ICs. The number of output wires of the sensor IC is reduced, thereby reducing the reliability of the device due to the increase in the number of measurement points and the reliability of the device due to the increase in the number of measurement points. It is an object of the present invention to provide a multi-point magnetic field measurement device having a simple configuration that has been solved.
[0004]
[Means for Solving the Problems]
Multipoint magnetic field measuring apparatus according to the present invention, by combining a plurality of holes IC, position a xy (x = 1~m, y = 1~n) in multipoint magnetic field measuring device for measuring the magnetic flux density of, m × n And the input terminals of the Hall ICs connected to the input wirings divided into n wirings common to each of the y positions at the positions a xy arranged in the mxn. through the respective output terminals of the Hall IC, which is connected to the output line which is divided into m pieces of wires is common for each of the m × placement position a xy in n x, the entering-force interconnect the input voltage is sequentially swept applied to the entering force terminals by dividing time Te, the data processing means to obtain an output voltage from Kide output terminal before in synchronization with the sweep application of the input voltage via a pre Kide force lines It is characterized by having.
[0005]
Also features Hall IC der Rukoto having a function in which a plurality of Hall IC converts the output of the TTL level corresponding to the output voltage set threshold of the Hall element, respectively.
[0006]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, a multipoint magnetic field measuring apparatus according to the present invention will be described with reference to FIG.
[0007]
A magnetic sensor IC 1 having a three-terminal configuration having a power input terminal 2, an output terminal 3, and a ground terminal 4 is disposed at a measurement position a xy (a 11 to am 1 ... A 1n to a mn ). Input terminal of the magnetic sensor IC position a xy for x = 1 to m having the same value of y, i.e., the input of the magnetic sensor IC1 input terminal 2, a 12 ~a m2 of the magnetic sensor IC1 of a 11 ~a m1 The input terminals 2 of the magnetic sensor IC 1 of the terminals 2,... A 1n to a mn are respectively connected to the input wiring 5 divided into n wirings common to x = 1 to m, and similarly the same. output terminals of the magnetic sensor IC position a xy of y = 1 to n having a value of x, i.e., the output terminal of the output terminal 3, a 21 ~a 2n magnetic sensor IC1 of the magnetic sensor IC1 of a 11 ~a 1n The output terminals 3 of the magnetic sensor ICs 1 ... An 1 to a mn are connected to output wirings 6 divided into m wirings common to y = 1 to n, respectively. Ground end 4 is connected to a common ground wiring 7. The (m + n + 1) wires routed from each measurement point are connected to a data processing device 8 having an arithmetic function.
[0008]
As shown in FIG. 2, the data processing device 8 having the arithmetic function performs the time division through the n divided input wirings common to each of x = 1 to m at the position a xy and performs time division to set the m at the position of y = 1. The input voltage Vcc is sequentially swept to the input terminals of the magnetic sensor ICs at the position of y = 2, the input terminals of the m magnetic sensor ICs at the position of y = 2,... On the other hand, as shown in FIG. 3, in synchronization with the application of the input voltage, the output signals of the magnetic sensor IC are sequentially output from the m divided output wirings common to the positions a xy at every y = 1 to n. Receive and determine Vout. With the configuration as described above, the multi-point magnetic field measurement apparatus of the present invention can measure all magnetic fields at the measurement points axy by time division. The connection of the input terminal and the output terminal is changed, and each input terminal is connected to the input wiring 5 divided into m wirings common to each of the positions a xy at y = 1 to n, and each output terminal is connected to each position. It is the same even if it is connected to the output wiring 6 divided into n wirings common to each of x = 1 to m of a xy .
[0009]
It should be noted here that x and y of the position a xy do not merely indicate a position on a rectangular coordinate on a two-dimensional plane. The position a xy can indicate a position on a curved surface, a position on oblique coordinates, or a position on one-dimensional coordinates. x and y may be considered to be used for grouping magnetic sensor ICs. FIG. 4 shows a configuration in which the magnetic sensor ICs are arranged at nine positions x 11 to x 33 on a straight line. The input terminals of the magnetic sensor ICs arranged at the positions x 11 , x 21 , x 31 , the input terminals of the magnetic sensor ICs arranged at the positions x 12 , x 22 , x 32 and the positions x 13 , x 23 , x 33 . The input terminals of the arranged magnetic sensor ICs are connected to the respective input wirings divided into three common wirings. On the other hand, the input terminals of the magnetic sensor ICs arranged at the positions x 11 , x 12 , x 13 , the input terminals of the magnetic sensor ICs arranged at the positions x 21 , x 22 , x 23 and the positions x 31 , x 32 , x An output terminal of the magnetic sensor IC arranged at 33 is connected to each of the output wirings divided into three common wirings.
[0010]
As shown in FIG. 1, the magnetic sensor IC of y = 1 is changed from the magnetic sensor IC of y = 1 by time division via input wiring divided into n wirings common to x = 1 to m at the position a xy. The sweep speed at which the voltage is applied by sweeping sequentially to the sensor IC may be set at the time resolution required for the multipoint magnetic field measuring device. However, the faster the sweep speed, the better, so it is close to the limit that the magnetic sensor IC can follow. It is possible to set
[0011]
In the multipoint magnetic field measuring apparatus according to the present invention, the output signals of the n magnetic sensor ICs are stably obtained at the terminals of the m output wirings common to the positions a xy at y = 1 to n. It is also preferable to provide a buffer circuit for the purpose.
[0012]
The magnetic sensor IC used in the multipoint magnetic field measuring apparatus of the present invention preferably has a function of converting the output voltage of the magnetic sensor into an output of a TTL level corresponding to a set threshold value. If so, it may be a single package as shown in FIG. 1 or a module composed of several parts. In particular, a single-package one is most suitable in terms of a simple configuration of a multi-point magnetic field measuring apparatus. The magnetic sensor used in the magnetic sensor IC may be any element such as a Hall element, a semiconductor magnetoresistive element, a ferromagnetic magnetoresistive element, and a coil, as long as it can measure a magnetic field, but can measure a static magnetic field. From the viewpoint, a Hall element, a semiconductor magnetoresistive element, and a ferromagnetic magnetoresistive element are more preferable, and among them, a Hall element widely used as a magnetic sensor is optimal from the viewpoint of cost. Furthermore, when an IC using a Hall element is used as the magnetic sensor IC, any of an InSb Hall element, an InAs Hall element, a GaAs Hall element, and a Si Hall element can be used as the Hall element. In particular, an InSb Hall element is optimal from the viewpoint that highly sensitive magnetic field measurement is possible.
[0013]
【Example】
Hereinafter, the multipoint magnetic field measuring apparatus of the present invention will be described in detail with reference to examples, but the present invention is not limited to the examples.
[0014]
As a magnetic sensor IC, a 5 × 6 Hall IC array as shown in FIG. 1 was manufactured using a Hall IC having a three-terminal configuration in which a high-sensitivity InSb Hall element and an IC were incorporated in a single package by a hybrid structure. Position a xy for x = divided commonly become six wires per 1-5 input lines, common to become five output lines, divided into wired for each position a xy of y = 1 to 6, a ground wire Was connected to a data processor. The Hall IC uses an element of a one-sided magnetic field operation type as shown in FIG. 5, the power supply voltage Vcc is set to 5 V, the threshold magnetic flux density Bop at which the output becomes a low level of about 0 V is 20 mT, and the output is a high level of about 5 V The magnetic flux density Brp having a threshold value of 15 mT was used. 5 1 element of the measuring point a 11 in the Hall IC array × 6 only paste the magnet, and the state where the output is added 20mT larger magnetic field is the magnetic flux density Bop threshold of approximately 0V. In this state, the sweep speed of the power supply voltage Vcc that is sweep-applied by time division to input wires divided into six wires common to x = 1 to 5 at the position a xy is changed, and the state of the magnetic field is determined by data processing. We checked whether we could judge. As a result, even by increasing the sweep speed to 50 kHz, only when the power supply voltage Vcc is applied to the input lines of a x1, confirmed that it is possible to determine as about 0V output from the output line of a 1y is low did it.
[0015]
【The invention's effect】
As described above, the multipoint magnetic field measuring apparatus of the present invention can greatly reduce the number of Hall IC wirings required by the number of measurement points as compared with the conventional example. Specifically, the number of wirings, which conventionally required at least m × n + 2 wirings for an m × n Hall IC array, could be reduced to m + n + 1. Needless to say, this effect becomes more significant as the number of measurement points increases. 2. Description of the Related Art An apparatus for measuring a magnetic field at multiple points by combining a large number of Hall ICs has been widely used as a position state detecting apparatus in combination with a magnet of a moving part of an object to be measured. In recent years, these devices have become larger and more complex from the perspective of energy saving and optimal control, and the number of measurement points requiring magnetic field measurement tends to increase significantly. The multipoint magnetic field measuring apparatus of the present invention reduces the number of output wirings of the Hall IC that are routed to the data processing device for each Hall IC, and as a result, the reliability of the apparatus is reduced due to the complicated wiring and the assembly of the apparatus is difficult. This solves problems such as an increase in the cost of the device, and achieves high mass productivity with an innovative and simple configuration. In the future, various types of equipment and devices will become more sophisticated and complicated, and as a result, the number of measurement points for which magnetic field measurement is required is expected to further increase. The benefits are great and immeasurable.
[Brief description of the drawings]
FIG. 1 is a diagram showing a configuration of an example of a multipoint magnetic field measuring apparatus according to the present invention.
FIG. 2 is a diagram illustrating sweep application of an input voltage used in the multipoint magnetic field measuring apparatus of the present invention.
FIG. 3 is a diagram illustrating a method of determining the presence or absence of a magnetic field used in the multipoint magnetic field measurement device of the present invention.
FIG. 4 is a diagram showing a configuration of another example of the multipoint magnetic field measurement device of the present invention.
FIG. 5 is a diagram showing an operation of a Hall IC used as a magnetic sensor IC in the embodiment of the multipoint magnetic field measuring apparatus of the present invention.
FIG. 6 is a diagram showing a configuration of a conventional multipoint magnetic field measuring apparatus.
[Explanation of symbols]
1 Magnetic sensor IC
2 Input Terminal of Magnetic Sensor IC 3 Output Terminal of Magnetic Sensor IC 4 Ground Terminal of Magnetic Sensor IC 5 Input Wiring 6 Output Wiring 7 Ground Wiring 8 Position of Data Processor axy Measurement Point

Claims (2)

複数のホールICを組合せて、位置axy(x=1〜m、y=1〜n)の磁束密度を測定する多点磁界測定装置において、
m×nに配置された複数のホールICと、
前記m×nに配置された位置axyのy毎に共通となるn個の配線に分かれた入力配線に接続されている前記ホールICのそれぞれの入力端子と、
前記m×nに配置された位置axyのx毎に共通となるm個の配線に分かれた出力配線に接続されている前記ホールICのそれぞれの出力端子と、
記入力配線を介して時間分割により前記入力端子に入力電圧を順次掃引印加し、前記出力配線を介して前記入力電圧の掃引印加と同期して前記出力端子からの出力電圧を得るデータ処理手段と
を有することを特徴とする多点磁界測定装置。
In a multi-point magnetic field measuring apparatus that measures a magnetic flux density at a position a xy (x = 1 to m, y = 1 to n) by combining a plurality of Hall ICs,
a plurality of Hall ICs arranged in mxn,
An input terminal of each of the Hall ICs connected to an input wiring divided into n wirings common to every y at a position a xy arranged in the m × n ;
An output terminal of each of the Hall ICs connected to an output wiring divided into m wirings common to each x of the position a xy arranged in the m × n ,
Sequentially sweeping the input voltage applied to the entering force terminal by time division through the entering-force interconnect, the output voltage from the previous Kide output terminal in synchronization with the sweep application of the input voltage via a pre Kide force lines And a data processing means for obtaining the following.
前記複数のホールICがそれぞれホール素子の出力電圧を設定された閾値に対応したTTLレベルの出力に変換する機能を有するホールICであることを特徴とする請求項1に記載の多点磁界測定装置。Multipoint magnetic field measuring apparatus according to claim 1, wherein said plurality of Hall IC is a Hall IC having a function of converting the output of the TTL level corresponding to the output voltage set threshold of the Hall element, respectively .
JP25522895A 1995-10-02 1995-10-02 Multi-point magnetic field measurement device Expired - Lifetime JP3604472B2 (en)

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