JP3604553B2 - Electron microscope observation method using astigmatism adjustment sheet - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to the observation method is used easy astigmatism adjustment sheet for a distortion adjustment of the electron beam (astigmatism correction) when observed with a scanning electron microscope (SEM).
[0002]
[Prior art]
Conventionally, a standard sample for astigmatism adjustment in which zinc oxide (ZnO) particles are adhered to a column-shaped table different from the sample mounting table is used for electron beam distortion adjustment (astigmatism adjustment) of an electron microscope. Thus, the astigmatism adjustment is performed so that the ZnO particle image can be clearly observed. This astigmatism adjustment required frequent electron beam adjustments to obtain the best image, and it was necessary to move the observation point from the observation sample to the astigmatism adjustment standard sample each time the electron beam adjustment was performed. .
[0003]
[Problems to be solved by the invention]
According to the above conventional technique, the observation field of view of the microscope is wide, and the observation field is largely moved between the observation sample mounting table and the standard sample to which zinc oxide (ZnO) particles are adhered to observe and adjust the electron beam. The problem was that it was very time-consuming and inefficient. In addition, since the standard sample is irradiated with the electron beam, oil is burned into the standard particles in the mirror body and hinders the use of the standard sample. There was a problem in handling that it would.
SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems, and aims to improve the efficiency in observation with an electron microscope and improve the handleability of a standard sample for astigmatism adjustment.
[0004]
According to the first aspect of the present invention, an astigmatism adjustment sheet having a pigment layer containing a pigment and a binder on a sheet-like support is attached near a sample on a sample mounting table for scanning electron microscope observation. 3. An electron microscope observation method using an astigmatism adjustment sheet, wherein the observation is performed by adjusting the visual field to the observation sample after adjusting the visual field to the sheet. the pigment layer, an electron microscope observation method using the astigmatism adjustment sheet according to claim 1, characterized in that the coating layer using the ZnO particles as a pigment.
[0005]
[Action]
As a result, the astigmatism adjustment sheet is adhered to the vicinity of the observation sample on the observation sample stage, so that the observation sample and the standard sample for astigmatism adjustment are arranged on the same sample mounting table. The electron beam can be adjusted with only a slight movement, and the movement of the visual field, which had to be largely moved between the observation sample table and the standard sample table as in the related art, can be minimized.
Further, the astigmatism adjustment sheet used in the present invention can be cut into an arbitrary area, and if necessary, by providing an adhesive layer on the back surface of the sheet, this can be cut for observation on a sample mounting table. Since it can be attached to any space other than where the sample is placed, it can be attached to the vicinity of the observation sample, minimizing the movement of the field of view during astigmatism adjustment, and the electron beam Since the adjustment can be made easily, easy and accurate observation is possible.
[0006]
BEST MODE FOR CARRYING OUT THE INVENTION
FIG. 1 is an example showing a structure of a sheet of a standard sample for astigmatism adjustment used in the present invention, and FIG. 2 is a perspective view of a sample mounting table using the same.
In FIG. 1, reference numeral 10 denotes a sheet-like support, which is provided with a pigment layer (a layer capable of adjusting the astigmatism) 11 in which a paint containing a pigment such as ZnO is applied to the surface, and an adhesive layer 12 is provided on the back surface. The adjustment sheet 13 is configured.
FIG. 2 is a perspective view in which the observation sample 2 and the sheet piece 3 of the astigmatism adjustment sheet are provided on the same sample mounting table 1.
[0007]
As the sheet-like support in the present invention, a sheet-like support such as paper, nonwoven fabric, and plastic film can be appropriately used. The thickness of the support is not particularly limited, but is preferably about 50 to 300 μm from the viewpoint of strength as a support, handling properties, and the like.
As the pigment used in the pigment layer, those having a particle diameter of 1 μm or less can be preferably applied, and when the magnification is 10,000 times or more, about 0.05 to 0.7 μm, particularly about 0.1 to 0.5 μm. Are preferred. Specific examples include inorganic pigments such as zinc oxide, titanium oxide, calcium carbonate, and aluminum hydroxide adjusted to 1 μm or less as described above. Further, the shape of these pigments is preferably a polygon having more than a quadrangle or an irregular shape, and a spherical shape is not preferred because it is difficult to adjust the astigmatism. Further, these pigments having conductivity or having undergone a conductive treatment may be used.
[0008]
The resin used together with the pigment in the pigment layer is used as a binder, and various resins having a binding function that is solid at ordinary temperature can be used as appropriate. Specific examples include acrylic resins, polyester resins, vinyl chloride resins, vinyl acetate resins, styrene resins, urethane resins, and the like.
[0009]
The pigment layer is formed by applying a coating liquid containing the above-described pigment and resin as main components on the surface of the sheet-like support and drying it. Here, the mixing ratio of the pigment and the resin is not particularly limited, but about 5 to 20 parts by weight of the resin with respect to 100 parts by weight of the pigment forms a pigment layer with good handleability without the pigment falling off. It is preferable because the astigmatism adjustment is easily performed. The thickness of the pigment layer is not particularly limited, but is preferably 10 μm or less, particularly preferably about 3 to 8 μm.
[0010]
When observing a sample with a scanning electron microscope using such an object, the sample and the astigmatism-adjusted standard sample can be arranged close to each other in the same sample stage, so that the electron beam can be adjusted with a slight visual field movement. This makes it possible to minimize the movement of the visual field.
In addition, the sheet-shaped astigmatism-adjusted standard sample used in the present invention can be cut into an arbitrary size, and further, by providing an adhesive layer on the back surface as necessary, at an arbitrary position on the sample mounting table. Since it can be pasted, it is easy to handle and the astigmatism adjustment can be easily performed.
[0011]
As described above, since the astigmatism adjustment sheet used in the observation method of the present invention is in a sheet shape, it can be easily cut into small pieces of an arbitrary shape, and can be easily attached even at the corner of the sample table. ▼ New zinc oxide particle images can always be observed. {Circle around (2)} Since the sample can be pasted together with the sample, there is an advantage that the field of view does not need to be moved so much that observation is convenient and accurate.
[0012]
【Example】
The formulations and production methods of the examples are as follows.
100 parts by weight of ZnO, 5 to 20 parts by weight of an acrylic resin, and 50 parts by weight of toluene are mixed and stirred with a homogenizer (stirring speed: 10,000 to 15,000 rpm) to obtain a pigment layer paint having a viscosity of 200 to 500 cp. Was.
Next, the above coating material was doctor-coated on the surface of the polyester film to provide a pigment layer having a thickness of 5 μm, thereby obtaining a sheet for adjusting astigmatism used in the present invention. A part of the sheet prepared above was cut out, attached to the vicinity of the sample for observation on the sample mounting table as shown in FIG. 2, and subjected to gold vapor deposition and used for electron microscope observation. Was very efficiently performed.
[0013]
【The invention's effect】
According to the present invention, since a sheet-like astigmatism adjustment sheet is used at the time of astigmatism adjustment in electron microscopic observation, it can be used by cutting it to an arbitrary shape and size at an arbitrary place, and a sample for observing this. Is simply attached to a blank portion adjacent to the sample on the mounting table, and it is possible to observe efficiently with only a slight movement of the field of view without any difficulty.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view showing the structure of an astigmatism adjustment sheet used in the present invention.
FIG. 2 is a perspective view of a sample stage in an embodiment of the present invention.
[Explanation of symbols]
1 Sample mounting table.
2 Observation sample.
3 Sheets for astigmatism adjustment.
10 Sheet support.
11 Pigment layer.
12 Adhesive layer.
13 Astigmatism adjustment sheet.

Claims (2)

A sheet for astigmatism adjustment having a pigment layer containing a pigment and a binder on a sheet-like support is pasted near a sample on a sample mounting table for observation with a scanning electron microscope, and a field of view is formed on the sheet. An electron microscope observation method using an astigmatism adjustment sheet, wherein the observation is performed by adjusting the field of view to the observation sample after the adjustment. The electron microscope observation method using the astigmatism adjustment sheet according to claim 1, wherein the pigment layer is a coating layer using ZnO particles as a pigment.

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