JP3605441B2 - Edge emitting organic thin film EL device - Google Patents
Edge emitting organic thin film EL device Download PDFInfo
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Description
【0001】
【産業上の利用分野】
本発明は、端面発光有機薄膜EL素子に関するものである。
【0002】
【従来の技術】
1966年Helfrich等は、蛍光を発する有機半導体に電子的キャリヤーを注入し、その中で電子と正孔の再結合が起これば発光が得られると考え、アントラセンの単結晶にキャリヤーを注入することに成功し、蛍光スペクトルに一致したEL発光を観測した。
その後、1986年九州大と米国ベル研究所の共同研究チームにより、ペリレン蒸着膜が発光層に使われ、昼間でも肉眼で認められるELが観測された。
【0003】
1987年イーストマンコダック社のTang等により、ペリレン蒸着膜より、電子輸送能に優れているAl q3蒸着膜を用い、トリフェニルアジシミン誘導体との界面にp−n接合が良好に形成され、更に陰極材料に電子を放出しやすいMg/In合金を使った高輝度EL(dc l0V l000cd/m2)が発表された。この発表を機会に、有機薄膜EL素子に関する研究は急速に進み、応用物理学会、日本化学会、高分子学会等の研究発表件数が増加してきた。
【0004】
以上の有機薄膜EL素子の発光原理は、強い蛍光を持つ有機色素の薄膜の両端に電極を取り付け、直流電圧を印加することにより、仕事関数が小さい材料を用いた陰極から電子を、仕事関数が大きい材料を用いた陽極から正孔が注入され、注入された電子と正孔は薄膜中を移動し、発光再結合する事によって光を発するものである。
このときの発光再結合する過程は、
1) 注入された電子は価電子バンドの正孔と直接再結合をし発光する、
2) 一度発光中心に捕獲された後に正孔と発光再結合する、
3) 非発光中心を介して正孔と再結合し熱を放出して熱平衡状態にはいる、
これらのどれかの過程、または複数の過程を通って基底状態に戻る。
発光再結合の非発光再結合に対する割合が大きいほど発光の内部量子効率が高く、その結果、輝度が高くなる。
そして、この発光が薄膜有機薄膜EL素子の端面または透明電極を通して面発光として現れる。
【0005】
【発明が解決しようとする課題】
一方、大きな輝度を有するEL素子でのマルチカラー化、フルカラー化は達成されていなかった。
特に、有彩色の複数色を発光せしめる高信頼性を有する素子の構造については未だ検討が不十分であった。
【0006】
一方、一般的な技術課題、例えば、発光輝度、駆動電圧等の種々の問題は改善されつつあるが、残された最大の課題は素子の長期寿命特性の向上である。このためには、生産技術的に、素子の封止技術の確立が最大の課題である。
更に、外部発光効率の一層の向上を図りつつ、凝集構造の経時劣化や化学劣化を起こしにくい構造、そして、これらに適した薄膜材料の探索が望まれている。
上記の素子の劣化の原因は酸素の吸着による表面の電子状態の変化、及び水分の吸着による有機薄膜層の凝集による化学劣化を起こすものと考えられている。これを防止するためには、一定の無機酸化膜により素子外周に防湿層を形成することが効果的である。
しかし、その材料と組成の面で不明確な点が多かった。
【0007】
【課題を解決するための手段】
l)外部発光効率の向上
本発明に係る単色の端面発光有機薄膜EL素子の構造の一例を図1に示し、三層構成の端面発光有機薄膜EL素子にかかる一例を図2に示す。
これらの構造は、端面発光せしめる部位を除き、全て、反射金属層に覆う構造になっている。このような構造を形成することにより、発光によって生じた光をマイクロキャビティーとして閉じこめることができ、一方から強い光を取り出し得ることを見出したものである。
【0008】
マイクロキャビティは、発光の光の干渉効果により生じ、この干渉効果による輝度の増加は、有機層の厚さに強く依存する。具体的には、0.04〜0.08μmで輝度の極大が認められた。
【0009】
次に反射電極(1)は仕事関数の大きい材料からなり、具体的にはAu、Au:Ag、SnO2、ITO、Pt、Se、Te等が該当する。反射電極(2)は仕事関数の小さい材料からなり、具体的にはNa、Na:K、Li、Mg、Mg:Ag、Ca、等が該当する。
【0010】
このような結果を基に図1の端面発光有機薄膜EL素子を作成し、この素子の「輝度−電流特性」を測定し、結果を図3に示す。同一発光層で形成したEL素子を面方向から測定した結果は単位面積あたり10mAの電流密度で赤色と緑色が800cd/m2、青色は200cd/m2であった。
【0011】
発光層を構成する材料としては、Alq3(Alq3:tris(8−hydroxyquinoline)aluminium)、シンカシャレッドB、DCM(DCM:ジシアノメチレンピラン誘導体)やDPVBi (DPVBi:4,4’−bis‐diphenylvinylbiphenyl)が例示できる。これらは、単体又は複数の発光材料を組み合わせて、発光層を構成することができた。
また、単色または複数の素子をいかなる順序で積層せしめても上記効果は変化無いことを確認した。
【0012】
一方、発光層と組み合わせて用いる正孔層を構成する正孔輸送材料の要件は非晶性の材料であって、同時に、大面積薄膜形成能が高いこと、薄膜中のキャリヤ移動度が高いことが求められる。この材料として電子写真感光体材料、例えばTPD(m) (TPD(m):N,N’−diphenyl−N,N’−bis(3‐methyl−phenyl)−1,1−diphenyl−4,4’−diamine)が使用できる。
不純物を含むとキャリヤ再結合によって生じた励起子のエネルギーを奪い、いわゆるクエンチャーとして作用するため、この正孔輸送材料は、再結晶法や昇華法により充分な精製が必要である。
【0013】
2)封止技術の改良
上述のように素子の劣化の原因は酸素の吸着による発光体表面の電子状態の変化、水分の吸着による有機薄膜層に凝集による化学劣化を起こすといる原因に着目して材料選定を行った。この結果、酸素の進入の防止にはSiO2が効果的であり、水分の進入の防止にはAl2O3が効果的であることが判った。
【0014】
この結果を背景として、これらを混合せしめて、封止層として最適な混合比を調べた。この結果を図4に示す。なお、図4にかかる試験内容は、混合モル比と輝度半減期の関係を求めたものである。試験条件は、60℃90%の恒温恒湿下にて、連続的にDC10mA/cm2を通電したものである。
【0015】
SiO2とAl2O3の混合モル比が2乃至4対8乃至6において特に封止層としての特性が優れ、望ましくは3対7になったとき特に優れていることが判った。
【0016】
また、2つの材料の層構成は、積層構造・混合層構造ともに同様な効果を奏することも判明した。
【0017】
【実施例】
更に本発明の内容を明確にすべく実施例を挙げて説明する。
【0018】
実施例1
図5は本発明に係る端面発光有機薄膜EL素子の組立のフローを示すものである。
厚さ1.1mmのガラス基板を超音波洗浄により充分洗浄後、ITOを0.2μmの膜厚にてスパッタ成膜した。このITOの電極を形成すべくエッチングによりパターニングを行った。
次いで、この上に反射電極として、Au:Ag(10:1)を0.1μmの膜厚にて、スパッタ成膜した。
【0019】
次いで、正孔輸送層及び発光層を形成した。
具体的には、高真空下で窒素ガスの予熱を十分に行った昇華精製装置で精製したTPD(m)をタングステンボードに装荷して、抵抗加熱法で0.05μmの膜厚で成膜した。
そして、この上に昇華精製されたAlq3に対しDCMを1.0wt%添加した蛍光色素を石英ボードに装荷して、抵抗加熱法で0.04μmの膜厚で成膜した。
尚、正孔輸送層及び発光層を所定形状に成膜するために、ステンレス等薄板によりマスキングを行う。
【0020】
更に、反射電極を形成する。
具体的には、仕事関数の小さい材料であるMg:Ag(10:1)を直流スパッタ装置を使用して0.1μmの膜厚で成膜した。MgにAgを添加するのは、反射効率の向上と電極劣化を防止する効果があるためである。
【0021】
反射電極まで形成した積層体全体に耐久性を向上させる目的でAl2O3:SiO2(7mol:3mol)を高周波スパッタリング法で0.2μmの膜厚にて成膜した。
【0022】
最後に、光の導出口以外を0.2μmの膜厚になるように金属クロムからなる薄膜で覆った。
【0023】
この様にして得られた端面発光有機薄膜EL素子の透明電極と背面電極に電圧を印加し駆動させたところ、赤色(x=0.67、y=0.33)で輝度が従来の面発光装置の約100倍の発光が達成された。
【0024】
実施例2
図6は本発明に係るRGB三原色の三層構成の端面発光有機薄膜EL素子の組立のフローを示すものである。
【0025】
厚さ1.1mmのガラス基板を超音波洗浄により充分洗浄後、ITOを0.2μmの膜厚にてスパッタ成膜した。このITOの電極を形成すべくエッチングによりパターニングを行った。
次いで、この上に反射電極として、Au:Ag(10:1)を0.1μmの膜厚にて、スパッタ成膜した。
更に実施例1と同様に正孔輸送層と赤色発光層を形成し、その上に反射電極を形成した。
この上に絶縁層としてSiO2を0.2μmの膜厚で成膜し、赤色のEL素子を形成した。
【0026】
上記の操作を繰り返し、緑色のEL素子、青色のEL素子を順次積層した。
【0027】
最後に、上記の3原色のEL素子全体にAl2O3:SiO2(7mol:3mol)を高周波スパッタリング法で0.2μmの膜厚にて成膜し、光の導出口以外を0.2μm の膜厚になるように金属クロムからなる薄膜で覆った。
【0028】
この様にして得られた端面発光有機薄膜EL素子の透明電極と背面電極に電圧を印加し駆動させたところ、図7のような色度座標を有するフルカラーEL素子が得られ、同時に全体のホワイトバランスも(x=0.36、y=0.38)となった。そして、輝度の面でも単光色での輝度同様、従来の面発光装置の約100倍の発光が達成された(図8)。
【0029】
【発明の作用並びに効果】
本発明に依れば、耐久性の優れ、同時に従来の面発光に対し、100倍もの高輝度のEL素子を得ることができる。
また、単色のみならず、複数色の発光もその性能を低下させることなく駆動可能なため、フルカラー表示をも得ることができるという効果を奏するものである。
【0030】
【図面の簡単な説明】
【図1】本発明に係る1層構成(単色)の端面発光有機薄膜EL素子の断面構造を示す。
【図2】本発明に係る3層構成(三原色)の端面発光有機薄膜EL素子の断面構造を示す。
【図3】本発明に係る一層構成の端面発光有機薄膜EL素子の「輝度−電流密度特性」を示す図である。
【図4】防湿層に使用される「輝度半減期−SiO2とAl2O3の混合モル比」の関係を示す図である。
【図5】本発明に係る一層構成の端面発光有機薄膜EL素子の組立のフローを示す図である。
【図6】本発明に係る三層構成の端面発光有機薄膜EL素子の組立のフローを示す図である。
【図7】本発明に係る三層構成の端面発光有機薄膜EL素子の各層の色度を示す図である。
【図8】本発明に係る三層構成の端面発光有機薄膜EL素子の三色を併せた「輝度−電流密度特性」を示す図である。
【符号の説明】
11 ガラス基板
12 透明導電膜
13 反射電極(1)
14 正孔輸送層
15 発光層
16 反射電極(2)
17 防湿層
18 反射金属
21 ガラス基板
22 透明導電膜
23 反射電極(1)
24 正孔輸送層
25 R発光層
26 反射電極(2)
27 絶縁膜
28 G発光層
29 B発光層
210 防湿層
211 反射金属[0001]
[Industrial applications]
The present invention relates to an edge emitting organic thin film EL device.
[0002]
[Prior art]
In 1966, Helfrich et al. Injected electronic carriers into a fluorescent organic semiconductor and thought that light would be obtained if the recombination of electrons and holes occurred, and injected carriers into anthracene single crystals. And EL emission corresponding to the fluorescence spectrum was observed.
Later, in 1986, a collaborative research team between Kyushu University and Bell Laboratories in the United States used a perylene vapor-deposited film for the light-emitting layer, and observed EL that was visible to the naked eye even in the daytime.
[0003]
In 1987, according to Tang of Eastman Kodak Company, a pn junction was favorably formed at the interface with the triphenylazisimine derivative by using an Alq3 vapor-deposited film having better electron transportability than a perylene vapor-deposited film. A high-brightness EL (dc 10 V 1000 cd / m 2) using a Mg / In alloy that easily emits electrons as a cathode material has been announced. With this presentation as an opportunity, research on organic thin-film EL devices has progressed rapidly, and the number of research presentations by the Japan Society of Applied Physics, The Chemical Society of Japan, the Society of Polymer Science, etc. has increased.
[0004]
The light emission principle of the organic thin film EL element described above is that electrodes are attached to both ends of an organic dye thin film having strong fluorescence, and by applying a DC voltage, electrons are emitted from a cathode using a material having a small work function, and the work function is reduced. Holes are injected from an anode using a large material, and the injected electrons and holes move in the thin film and emit light by radiative recombination.
The process of radiative recombination at this time is
1) The injected electrons directly recombine with holes in the valence band to emit light,
2) once captured by the emission center, recombine with holes
3) recombine with holes through the non-luminescent center to release heat and enter thermal equilibrium;
It returns to the ground state through one or more of these steps.
The larger the ratio of radiative recombination to non-radiative recombination, the higher the internal quantum efficiency of light emission, and as a result, the higher the luminance.
Then, this light emission appears as surface light emission through the end face of the thin film organic thin film EL element or the transparent electrode.
[0005]
[Problems to be solved by the invention]
On the other hand, multi-color and full-color EL devices having high luminance have not been achieved.
In particular, the structure of a highly reliable element that emits a plurality of chromatic colors has not been sufficiently studied.
[0006]
On the other hand, general technical problems, such as various problems such as light emission luminance and drive voltage, are being improved, but the biggest problem remaining is improvement of long-term life characteristics of the device. To this end, establishment of element sealing technology is the biggest issue in terms of production technology.
Further, it is desired to search for a structure in which the agglomerated structure is hardly deteriorated with time or chemical deterioration while further improving the external light emission efficiency, and a thin film material suitable for these structures.
It is considered that the cause of the deterioration of the device is a change in the electronic state of the surface due to the adsorption of oxygen and a chemical deterioration due to aggregation of the organic thin film layer due to the adsorption of moisture. In order to prevent this, it is effective to form a moisture-proof layer around the element with a certain inorganic oxide film.
However, there were many unclear points in the material and composition.
[0007]
[Means for Solving the Problems]
l) Improvement of external luminous efficiency FIG. 1 shows an example of the structure of a monochromatic edge emitting organic thin film EL device according to the present invention, and FIG. 2 shows an example of a three-layer edge emitting organic thin film EL device.
These structures are all covered with a reflective metal layer, except for the part that emits light at the edge. By forming such a structure, it has been found that light generated by light emission can be confined as a microcavity, and strong light can be extracted from one side.
[0008]
Microcavities are created by the interference effect of the emitted light, and the increase in brightness due to this interference effect is strongly dependent on the thickness of the organic layer. Specifically, the maximum of the luminance was observed at 0.04 to 0.08 μm.
[0009]
Next, the reflective electrode (1) is made of a material having a large work function, and specifically includes Au, Au: Ag, SnO2, ITO, Pt, Se, Te, and the like. The reflective electrode (2) is made of a material having a small work function, and specifically includes Na, Na: K, Li, Mg, Mg: Ag, Ca, and the like.
[0010]
Based on the results, an edge emitting organic thin film EL device shown in FIG. 1 was prepared, and "luminance-current characteristics" of the device were measured. The results are shown in FIG. As a result of measuring the EL element formed of the same light emitting layer from the surface direction, red and green were 800 cd / m2 and blue were 200 cd / m2 at a current density of 10 mA per unit area.
[0011]
Examples of the material constituting the light emitting layer include Alq3 (Alq3: tris (8-hydroxyquinoline) aluminium), Shinkasha Red B, DCM (DCM: dicyanomethylenepyran derivative), and DPVBi (DPVBi: 4,4′-bis-diphenylvinylphenyl). Can be exemplified. These were able to form a light emitting layer by combining a single or a plurality of light emitting materials.
In addition, it was confirmed that the above-described effect was not changed even if a single color or a plurality of elements were laminated in any order.
[0012]
On the other hand, the hole transport material that constitutes the hole layer used in combination with the light emitting layer is an amorphous material, and at the same time, has a high ability to form a large-area thin film and high carrier mobility in the thin film. Is required. As this material, an electrophotographic photoreceptor material, for example, TPD (m) (TPD (m): N, N'-diphenyl-N, N'-bis (3-methyl-phenyl) -1,1-diphenyl-4,4) '-Diamine) can be used.
If an impurity is contained, it deprives the energy of excitons generated by carrier recombination and acts as a so-called quencher. Therefore, this hole transport material needs to be sufficiently purified by a recrystallization method or a sublimation method.
[0013]
2) Improvement of sealing technology As described above, the cause of device degradation is to focus on the cause of the change in the electronic state of the luminous body surface due to the adsorption of oxygen, and the chemical deterioration due to aggregation in the organic thin film layer due to the adsorption of moisture. Material selection. As a result, it was found that SiO2 was effective in preventing oxygen from entering, and Al2O3 was effective in preventing moisture from entering.
[0014]
With these results as background, these were mixed and the optimum mixing ratio as a sealing layer was examined. The result is shown in FIG. The test contents shown in FIG. 4 are obtained by determining the relationship between the molar mixture ratio and the luminance half-life. The test conditions were such that
[0015]
It was found that when the mixing molar ratio of SiO2 and Al2O3 was 2 to 4 to 8 to 6, the characteristics as the sealing layer were particularly excellent, and when it was 3 to 7, it was particularly excellent.
[0016]
It has also been found that the layer structure of the two materials has the same effect in both the laminated structure and the mixed layer structure.
[0017]
【Example】
Further, the present invention will be described with reference to examples in order to clarify the contents of the present invention.
[0018]
Example 1
FIG. 5 shows a flow of assembling the edge emitting organic thin film EL device according to the present invention.
After a glass substrate having a thickness of 1.1 mm was sufficiently cleaned by ultrasonic cleaning, ITO was formed into a film having a thickness of 0.2 μm by sputtering. Patterning was performed by etching to form the ITO electrode.
Next, Au: Ag (10: 1) was formed thereon as a reflective electrode by sputtering to a thickness of 0.1 μm.
[0019]
Next, a hole transport layer and a light emitting layer were formed.
Specifically, TPD (m) purified by a sublimation purification apparatus sufficiently preheated with nitrogen gas under a high vacuum was loaded on a tungsten board and formed into a film having a thickness of 0.05 μm by a resistance heating method. .
Then, a fluorescent dye obtained by adding 1.0 wt% of DCM to Alq3 purified by sublimation was loaded on the quartz board, and a film was formed to a thickness of 0.04 μm by a resistance heating method.
In order to form the hole transport layer and the light emitting layer into a predetermined shape, masking is performed with a thin plate such as stainless steel.
[0020]
Further, a reflective electrode is formed.
Specifically, Mg: Ag (10: 1), which is a material having a small work function, was formed to a thickness of 0.1 μm using a DC sputtering apparatus. The reason why Ag is added to Mg is that there is an effect of improving reflection efficiency and preventing electrode deterioration.
[0021]
Al2O3: SiO2 (7 mol: 3 mol) was formed into a film having a thickness of 0.2 [mu] m by high frequency sputtering for the purpose of improving durability over the entire laminate including the reflection electrode.
[0022]
Finally, the portion other than the light outlet was covered with a thin film made of metallic chromium so as to have a thickness of 0.2 μm.
[0023]
When a voltage was applied to the transparent electrode and the back electrode of the edge emitting organic thin-film EL device thus obtained and driven, a red (x = 0.67, y = 0.33) luminance and a conventional surface emission were obtained. About 100 times the emission of the device was achieved.
[0024]
Example 2
FIG. 6 shows a flow of assembling the edge emitting organic thin-film EL device having a three-layer structure of RGB primary colors according to the present invention.
[0025]
After a glass substrate having a thickness of 1.1 mm was sufficiently cleaned by ultrasonic cleaning, ITO was formed into a film having a thickness of 0.2 μm by sputtering. Patterning was performed by etching to form the ITO electrode.
Next, Au: Ag (10: 1) was formed thereon as a reflective electrode by sputtering to a thickness of 0.1 μm.
Further, a hole transport layer and a red light emitting layer were formed in the same manner as in Example 1, and a reflective electrode was formed thereon.
On this, SiO2 was formed as an insulating layer to a thickness of 0.2 μm to form a red EL element.
[0026]
The above operation was repeated, and a green EL element and a blue EL element were sequentially stacked.
[0027]
Finally, a film of Al2O3: SiO2 (7 mol: 3 mol) is formed to a thickness of 0.2 μm on the entire EL device of the three primary colors by a high frequency sputtering method, and a film thickness of 0.2 μm is formed except for the light outlet. Covered with a thin film of metallic chromium.
[0028]
When a voltage was applied to the transparent electrode and the back electrode of the edge emitting organic thin film EL device thus obtained and driven, a full-color EL device having chromaticity coordinates as shown in FIG. 7 was obtained. The balance was also (x = 0.36, y = 0.38). Also, in the aspect of luminance, as in the case of the luminance of the single light color, light emission about 100 times that of the conventional surface light emitting device was achieved (FIG. 8).
[0029]
Function and effect of the present invention
According to the present invention, it is possible to obtain an EL device having excellent durability and at the same time having a
In addition, since light emission of not only a single color but also a plurality of colors can be driven without deteriorating the performance, a full-color display can be obtained.
[0030]
[Brief description of the drawings]
FIG. 1 shows a cross-sectional structure of an edge emitting organic thin-film EL element having a one-layer structure (single color) according to the present invention.
FIG. 2 shows a cross-sectional structure of an edge emitting organic thin-film EL element having a three-layer structure (three primary colors) according to the present invention.
FIG. 3 is a diagram showing “brightness-current density characteristics” of the edge emitting organic thin film EL element having a single layer structure according to the present invention.
FIG. 4 is a diagram showing a relationship of “luminance half-life—mixing molar ratio of
FIG. 5 is a view showing a flow of assembling an edge emitting organic thin film EL element having a single layer structure according to the present invention.
FIG. 6 is a diagram showing a flow of assembling a three-layer edge emitting organic thin film EL device according to the present invention.
FIG. 7 is a diagram showing the chromaticity of each layer of the three-layer edge emitting organic thin film EL device according to the present invention.
FIG. 8 is a view showing “brightness-current density characteristics” of three colors of the edge emitting organic thin film EL element having a three-layer structure according to the present invention.
[Explanation of symbols]
11
14
17 Moisture-
24 hole transport layer 25 R
27 Insulating film 28 G light emitting layer 29 B
Claims (3)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17277595A JP3605441B2 (en) | 1995-06-15 | 1995-06-15 | Edge emitting organic thin film EL device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17277595A JP3605441B2 (en) | 1995-06-15 | 1995-06-15 | Edge emitting organic thin film EL device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH097762A JPH097762A (en) | 1997-01-10 |
| JP3605441B2 true JP3605441B2 (en) | 2004-12-22 |
Family
ID=15948120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17277595A Expired - Lifetime JP3605441B2 (en) | 1995-06-15 | 1995-06-15 | Edge emitting organic thin film EL device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3605441B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000353590A (en) * | 1999-06-11 | 2000-12-19 | Futaba Corp | Organic el light-emitting device |
| JP4748835B2 (en) * | 2000-07-31 | 2011-08-17 | 株式会社半導体エネルギー研究所 | lighting equipment |
| JP4549505B2 (en) * | 2000-09-05 | 2010-09-22 | 株式会社半導体エネルギー研究所 | Light emitting device |
| JP2006278494A (en) * | 2005-03-28 | 2006-10-12 | Fuji Photo Film Co Ltd | Apparatus and method of optical emitting |
-
1995
- 1995-06-15 JP JP17277595A patent/JP3605441B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH097762A (en) | 1997-01-10 |
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