JP3605463B2 - Plate thickness measuring device - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a plate thickness measuring device, in particular, by sandwiching a plate with a pair of linear detector probes, and setting the detected value difference between the detectors to the plate thickness, thereby achieving high precision regardless of plate runout and the like. It relates to a new improvement for measuring thickness.
[0002]
[Prior art]
Conventionally, a plate thickness measuring device of this type is generally used. A plate is placed on a reference surface, a probe of a linear detector is lowered from above, and is brought into contact with the surface of the plate. The difference between the measured value and the value up to the reference plane was measured as the plate thickness.
[0003]
[Problems to be solved by the invention]
Since the conventional plate thickness measuring device was configured as described above, the following problems existed.
That is, when vibrations are applied to the measuring device during measurement or when the plate vibrates due to the vibration of the reference plane, the probe comes and goes, and as a result, the thickness measurement results vary.
[0004]
The present invention has been made in order to solve the above-described problems, and in particular, a plate is sandwiched between a pair of linear detector probes, and a detection value difference between the detectors is set as a plate thickness, thereby making the plate thicker. It is an object of the present invention to provide a thickness measuring device capable of measuring a thickness of a sheet with high accuracy irrespective of fluctuation of the sheet thickness.
[0005]
[Means for Solving the Problems]
The thickness measuring apparatus according to the present invention includes a first and a second support provided at an interval from each other, a first linear detector having a movable first probe provided on the first support, A second linear detector having a movable second probe provided on a second support, wherein a plate is sandwiched between the probes, and a plate thickness of the plate is determined by using a difference between detection values of the detectors. In a plate thickness measuring device adapted to measure, first and second bellows portions which are closely connected between each cylinder of each detector and each probe, and are provided at intermediate positions in the axial direction of each probe. A fixed seat, a step-shaped locking portion provided on the inner surface of each of the cylindrical bodies, and first and second provided at an outer peripheral position of each probe and between the locking body and the step-shaped locking portion. A spring, and first and second air suction ports provided at a rear end of each of the cylinders for applying a negative pressure to each of the cylinders. And a section, wherein the tip portion of the probe is projected out of said respective bellows portion through each bellows portion, each probe is always urged protruding direction by the respective springs, each Each of the probes is drawn into each of the cylinders against the spring force of each of the springs by applying a negative pressure to the cylinder.
[0006]
More specifically, the respective supports and plates are arranged in a horizontal direction, and the respective detectors are arranged in a vertical direction.
[0007]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, a preferred embodiment of a thickness measuring apparatus according to the present invention will be described in detail with reference to the drawings.
In FIG. 1, a reference numeral 1 denotes a first support fixed horizontally to a base 2, and below the first support 1, an L-shape fixed to the base 2 is provided. In addition, a second support 3 provided at a distance from the first support 1 (the second support 3 is not L-shaped, but is a straight plate-like base 2 as shown in FIG. Which can be provided hanging down) is provided in parallel with the first support 1.
[0008]
At an end position of the first support 1, a first probe including a well-known linear differential transformer (LVDT) or a linear encoder in a vertical direction orthogonal to the horizontal direction of the first support 1. A first straight line detector 5 having a second support 4 is provided at an end position of the second support 3 in a vertical direction perpendicular to the horizontal direction of the second support 3 in the same manner as the above-described known first. A second linear detector 7 having two probes 6 is provided.
[0009]
A compression-type first spring 9 is provided at the tip of a first cylindrical body 8 having a well-known differential voltage detection coil (not shown) of the first straight line detector 5 and a first bellows 10 is provided with a honey. The first bellows 10 and the first probe 4 are closely connected to each other, and the first spring 9 is provided with a step-shaped locking portion 31 provided on the inner surface of the first cylindrical body 8 and the first probe. Since the first probe 4 is provided at the outer peripheral position of the first probe 4 between the first probe 4 and the fixed seat 30, the first probe 4 is constantly urged in the protruding direction by the action. A first air suction part 11 connected to a compressor (not shown) for making the inside of the first cylinder 8 a negative pressure is connected to a rear end of the first cylinder 8.
[0010]
A compression-type second spring 13 is provided at the tip of a second cylindrical body 12 having a well-known differential voltage detection coil (not shown) of the second linear detector 7, similar to the first spring 9 described above. The second bellows 14 is closely connected to the second bellows 14 in the same manner as the first bellows 10, and the second bellows 14 and the second probe 6 are closely connected to each other. The second probe 6 is always urged in the protruding direction by the same operation as described above. A second air suction part 15 connected to a compressor (not shown) for making the inside of the second cylinder 12 a negative pressure is connected to the rear end of the second cylinder 12. The fixed seat 30 is provided at an intermediate position in the axial direction of each of the probes 4 and 6, and the tip of each of the probes 4 and 6 penetrates through each of the bellows 10 and 14 and each of the bellows 10 and 14. It protrudes out of.
[0011]
A plate 21 made of a liquid crystal panel or a semiconductor substrate or the like is held in a horizontal direction on a mounting body 20 connected to the base 2, and the plate 21 is located between the probes 4 and 6.
[0012]
Next, the operation will be described. First, when the valves (not shown) of the air suction portions 11 and 15 are opened to make the inside of each of the cylinders 8 and 12 into a negative pressure state by the operation of a compressor (not shown), the force of each of the springs 9 and 13 is resisted. The bellows 10, 14 are compressed and the probes 4, 6 are retracted into the cylinders 8, 12, respectively, and the master gauge (having a predetermined thickness with the distance between the probes 4, 6 widened) (Not shown) is set on the mounting body 20. Thereafter, when the valves of the air suction portions 11 and 15 are closed, the bellows 10 and 14 are extended by the action of the springs 9 and 13 and the probes 4 and 6 abut on both surfaces of the master gauge. In this contact state, the detection values output from the detectors 5 and 7 are used as a reference value, and the thickness of the master gauge is measured at this reference value, and this reference value is taken into an arithmetic unit (not shown). Remember. Note that this preparation operation is performed before the measurement operation.
[0013]
Next, the master gauge is removed from the mounting body 20, and the plate 21 which is the object to be measured is mounted on the mounting body 20 according to the above-described procedure, and the probes 4 and 6 are brought into contact with both surfaces of the plate 21. When the respective detection values from the detectors 5 and 7 are the same as the reference values at the time of measuring the master gauge and the difference is zero, it is determined that the thickness of the plate 21 is the same as the master gauge. You.
Further, when this difference appears, the difference is added to the reference value at the time of measuring the master gauge, and the thickness is converted into the thickness, thereby measuring the thickness added to the thickness of the master gauge. Can be. In this case, even if the plate 21 vibrates at the time of measurement, the probes 4 and 6 move relatively, so that only the position of the plate 21 relatively changes and does not affect the thickness detection. In addition, based on the detection value of each of the detectors 5 and 7 in the measurement state where the master gauge is provided, the measurement is performed under the thickness of the master gauge, for example, the state where each probe 4 and 6 directly abuts without the master gauge. It is impossible, and it is possible to measure a thickness greater than the thickness of the master gauge.
Although the supports 1 and 3 are arranged in the horizontal direction and the detectors 5 and 7 are arranged in the vertical direction in FIG. 1, they may be arranged in the vertical and horizontal directions, respectively.
[0014]
【The invention's effect】
Since the plate thickness measuring apparatus according to the present invention is configured as described above, the following effects can be obtained. That is, since the measurement is performed by bringing the probe of the linear detector into contact with both sides of the plate, even if the plate oscillates, the difference from the reference value at the time of the master gauge measurement does not change, and the plate thickness is measured with high accuracy. be able to.
[Brief description of the drawings]
FIG. 1 is a configuration diagram showing a thickness measuring apparatus according to the present invention.
FIG. 2 is an enlarged sectional view showing a main part of FIG.
[Explanation of symbols]
1,3 Support 4,6 Probe 5,7 Linear detector 8,12 Cylindrical body
10, 14 bellows
9,13 Spring
30 fixed seat

Claims (2)

A first linear detector (1) having first and second supports (1, 3) provided at an interval from each other and a movable first probe (4) provided on the first support (1); 5), and a second linear detector (7) provided on the second support (3) and having a movable second probe (6), and each probe (4, 6) has a plate ( 21), sandwiching the detector (5, 7), in a plate thickness measuring apparatus that measures the plate thickness of the plate (21) using the detected value difference, the detector (5, 7) First and second bellows (10, 14) closely connected between each of the cylindrical bodies (8, 12) and each of the probes (4, 6) , and in the axial direction of each of the probes (4, 6) . A fixed seat (30) provided at an intermediate position , a step-shaped locking portion (3) provided on the inner surface of each of the cylindrical bodies (8, 12), and an outer circumferential position of each of the probes (4, 6). And first and second springs (9, 13) provided between the locking body (30) and the step-shaped locking portion (31), and provided at rear ends of the respective cylinders (8, 12). Previous First for each tubular body (8, 12) in a negative pressure, the second air suction unit and a (11, 15), the tips of the probes (4, 6) are each bellows part ( 10 and 14) , and protrudes out of the bellows (10, 14) , and the probes (4, 6) are constantly biased in the protruding direction by the springs (9, 13). By setting the inside of each of the cylinders (8, 12) to a negative pressure, each of the probes (4, 6) resists the spring force of each of the springs (9, 13). A thickness measuring device characterized in that it is configured to be drawn into the parentheses. 2. The device according to claim 1, wherein the supports (1, 3) and the plate (21) are arranged in a horizontal direction, and the detectors (5, 7) are arranged in a vertical direction. 3. Plate thickness measuring device. A thickness measuring device, characterized in that:

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