JP3607081B2 - Air trap for liquid circulation circuit - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an air trap for a liquid circulation circuit, and more particularly, to an air trap for a liquid circulation circuit for removing bubbles in the liquid in a liquid circulation circuit that circulates and uses a cleaning liquid to be injected into a cleaning tank. About.
[0002]
[Prior art]
Conventionally, when an electronic component such as a semiconductor wafer or a magnetic disk is cleaned in a cleaning tank, the cleaning liquid injected into the cleaning tank is circulated and used.
[0003]
That is, a cleaning tank is incorporated in a liquid circulation circuit for circulating the cleaning liquid, and the cleaning liquid is recycled and used.
[0004]
By the way, in such a liquid circulation circuit, the presence of bubbles generated along with the circulation of a liquid such as a cleaning liquid (hereinafter simply referred to as “liquid”) is a problem, and the bubbles generated in such a liquid circulation circuit. As such a liquid circulation circuit, for example, a liquid circulation circuit as shown in FIG. 1 has been proposed.
[0005]
FIG. 1 shows a liquid circulation circuit in which bubbles generated in the liquid circulation circuit are removed using an air vent of a filter housing.
[0006]
The liquid circulation circuit includes a pump 10 for circulating the liquid, a filter unit 12 and a cleaning tank 14 in the liquid circulation circuit. The liquid is pumped by the action of the pump 10. 10 → filter unit 12 → washing tank 14 → pump 10...
[0007]
Here, the filter unit 12 includes a filter housing 18 in which a filtration filter 16 is accommodated. A liquid is introduced into the filter housing 18 and the liquid is filtered into the filter housing 18. A liquid inlet 20 for passing through the filter 16, a liquid outlet 22 for discharging the liquid filtered through the filter 16 from the filter housing 18, and bubbles generated in the liquid circulation circuit. An air vent 24 for discharging to the outside is formed.
[0008]
In the above configuration, the liquid introduced into the filter housing 18 from the liquid inlet 20 by the action of the pump 10 passes through the filter 16 and is then discharged from the liquid outlet 22.
[0009]
At this time, the bubbles mixed in the liquid are discharged from the air vent 24 to the outside of the liquid circulation circuit.
[0010]
However, in the liquid circulation circuit shown in FIG. 1, if bubbles mixed in the liquid are taken into the filtration filter 16 before reaching the air vent 24, the bubbles accumulate inside the filtration filter 16. However, there is a problem that the filter 16 is clogged.
[0011]
That is, in the liquid circulation circuit shown in FIG. 1, the bubbles in the liquid circulation circuit are removed at the air vent 24 of the filter housing 18.
[0012]
However, a filter made of fluororesin is generally used as the filter 16 disposed in the filter housing 18, and the filter made of fluororesin is dried when touched with air. Since clogging occurs and liquid cannot pass, clogging gradually progresses if bubbles exist in the liquid circulation circuit, resulting in a problem that the flow rate in the liquid circulation circuit decreases and the life of the filter is shortened. It was.
[0013]
For this reason, it is necessary to remove bubbles before the liquid is introduced into the filtration filter. As a liquid circulation circuit for removing bubbles before the liquid is introduced into the filtration filter, for example, as shown in FIG. A liquid circulation circuit has been proposed.
[0014]
The liquid circulation circuit shown in FIG. 2 is provided with a filter housing for removing bubbles separately from the filter in the liquid circulation circuit.
[0015]
In FIG. 2, the same or corresponding components as those shown in FIG. 1 are denoted by the same reference numerals as those used in FIG. 1, and detailed description thereof is omitted.
[0016]
The liquid circulation circuit shown in FIG. 2 includes a pump 10, a bubble removing filter housing 18 ′, a filter unit 12, and a cleaning tank 14 in the liquid circulation circuit. The pump 10 circulates in the order of the pump 10 → the bubble removing filter housing 18 ′ → the filter unit 12 → the washing tank 14 → the pump 10...
[0017]
Here, the bubble removing filter housing 18 ′ has a liquid inlet 20 ′ for introducing a liquid into the bubble removing filter housing 18 ′, and a bubble removing filter, similar to the filter housing 18 described above. A liquid discharge port 22 ′ for discharging the liquid in the filter housing 18 ′ to the outside from the filter housing 18 ′ for removing bubbles, and an air vent port 24 for discharging the bubbles generated in the liquid circulation circuit to the outside. In the above-described configuration, the liquid circulating in the liquid circulation circuit by the action of the pump 10 enters the bubble removing filter housing 18 ′ before being introduced into the filter unit 12. Air bubbles mixed in the liquid introduced into the bubble removing filter housing 18 ′ from the liquid inlet 20 ′ are introduced into the air vent 24 ′. It is discharged to the outside of the liquid circulation circuit.
[0018]
Therefore, the air bubbles in the liquid circulation circuit are formed before the liquid circulation circuit reaches the filter unit 12 having a filtration filter (not shown in FIG. 2; see FIG. 1 for details). Will be discharged to the outside.
[0019]
Here, the liquid that has entered the bubble removing filter housing 18 ′ from the liquid injection port 20 ′ is discharged from the liquid discharge port 22 ′ located in the vicinity of the liquid injection port 20 ′.
[0020]
However, in the bubble removing filter housing 18 ′, the liquid inlet 20 ′ and the liquid outlet 22 ′ are disposed adjacent to each other, so that the liquid is entrained near the liquid outlet and the bubbles are mixed again. The bubble removal filter housing 18 'has a large size, and thus has a problem that an unnecessary liquid pool is formed.
[0021]
[Problems to be solved by the invention]
The present invention has been made in view of the various problems of the prior art as described above, and the object of the present invention is configured separately from the filtration filter in the liquid circulation circuit, It is an object of the present invention to provide an air trap for a liquid circulation circuit that makes it possible to remove bubbles mixed in a liquid before the liquid is introduced into a filtration filter.
[0022]
Another object of the present invention is to provide an air trap for a liquid circulation circuit that prevents re-mixing of bubbles due to liquid entrainment.
[0023]
Furthermore, an object of the present invention is to provide an air trap for a liquid circulation circuit that does not require an unnecessary liquid pool.
[0024]
[Means for Solving the Problems]
To achieve the above object, the present invention is a liquid circulation circuit air trap for removing bubbles mixed in a liquid in a liquid circulation circuit for circulating the liquid, and is disposed in the liquid circulation circuit. It has a substantially cylindrical inner peripheral surface and is equipped with a liquid inlet for introducing liquid into the top and an air vent for discharging air bubbles mixed in the liquid to the outside, and is introduced into the bottom at the inside. A liquid discharge port for discharging the liquid, the liquid introduced from the liquid injection port, the liquid introduced from the liquid discharge port is discharged, and the liquid introduced into the inside from the air vent port A chamber in which mixed bubbles are discharged to the outside, a liquid injection pipe provided with a discharge port opened in the chamber, and a liquid injection pipe provided in the chamber, in communication with the liquid injection port. Arranged at the bottom The discharge port of the liquid injection tube is disposed along the circumferential direction of the inner peripheral surface of the chamber located in the vicinity of the discharge port. The plate is formed in a substantially flat plate shape having a plurality of through holes, and the liquid in the liquid circulation circuit is introduced into the liquid injection pipe from the liquid injection port, and from the discharge port of the liquid injection pipe to the chamber. It is poured into the chamber along the circumferential direction of the inner circumferential surface to generate a vortex flow in the circumferential direction of the inner circumferential surface of the chamber, and passes through the through-hole formed in the rectifying plate. Then, the liquid is moved to the liquid discharge port of the chamber and the entrainment of the liquid when the liquid is discharged is suppressed.
[0025]
Therefore, according to the present invention, the air trap for the liquid circulation circuit can be configured separately from the filtration filter, and is mixed into the liquid by the air trap for the liquid circulation circuit before the liquid is introduced into the filtration filter. It becomes possible to remove the bubbles. In addition, since the vortex flow of the liquid is generated efficiently and reliably in the chamber, the passage time of the liquid passing through the chamber, that is, the bubbles mixed in the liquid is removed without increasing the size of the chamber. Since the possible time can be extended, it is possible to more reliably remove bubbles mixed in the liquid without providing an unnecessary liquid pool.
[0029]
Further, according to the present invention, the liquid inlet for introducing the liquid into the chamber is formed at the top of the chamber, while the liquid outlet for discharging the liquid in the chamber is formed at the bottom of the chamber, Since the liquid inlet and the liquid outlet are separated, the liquid can be prevented from being caught near the liquid outlet, and air bubbles can be prevented from being mixed again due to the liquid being caught near the liquid outlet. Can do.
[0031]
In addition, according to the present invention, the rectifying plate can more reliably prevent bubbles from being remixed due to the entrainment of liquid near the liquid discharge port.
[0032]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an example of an embodiment of an air trap for a liquid circulation circuit according to the present invention will be described in detail with reference to the drawings.
[0033]
FIG. 3 is a schematic sectional view illustrating an example of an embodiment of an air trap for a liquid circulation circuit according to the present invention. FIG. 4 shows an air trap for the liquid circulation circuit according to the present invention in the liquid circulation circuit. A liquid circulation circuit diagram corresponding to FIGS. 1 and 2 is shown.
[0034]
In FIG. 4, the same or equivalent components as those shown in FIG. 1 or FIG. 2 are denoted by the same reference numerals as those used in FIG. 1 or FIG. Here, the air trap 100 for the liquid circulation circuit according to the present invention shown in FIGS. 3 and 4 is configured separately from the filter unit 12 as is apparent from FIGS. 3 and 4. Therefore, the air trap 100 for the liquid circulation circuit can be disposed at any position in the liquid circulation circuit. Naturally, the position before the liquid is introduced into the filtration filter, that is, the liquid circulation. It can be arranged in front of a filter unit 12 with a filtration filter in the channel.
[0035]
Hereinafter, the liquid circulation circuit air trap 100 according to the present invention will be described in detail with reference to FIGS. 3 and 4. The liquid circulation circuit air trap 100 has a substantially cylindrical shape in which an upper surface 102a and a bottom surface 102b are closed. The main body 102 is also formed in a substantially cylindrical shape, and a small chamber 104 surrounded by the substantially cylindrical inner peripheral surface 102c is formed in the main body 102. Will be.
[0036]
A liquid injection port 106 for introducing a liquid into the chamber 104 is formed on the upper surface 102 a of the main body 102, and a liquid injection tube 108 is attached to the chamber 104 side of the liquid injection port 106. .
[0037]
Therefore, the chamber 104 is communicated with the outside through the liquid injection port 106 and the liquid injection tube 108.
[0038]
Further, an air vent 110 that communicates with the chamber 104 and the outside is also formed on the upper surface 102 a of the main body 102.
[0039]
Further, a liquid discharge port 112 for discharging the liquid from the chamber 104 is formed on the bottom surface 102 b of the main body 102.
[0040]
Furthermore, a substantially flat current plate 114 is formed in a lower part of the chamber 104. A plurality of through holes 114a are formed in the rectifying plate 114 so that liquid can pass through the rectifying plate 112 through the through holes 114a.
[0041]
Here, the liquid injection tube 108 is composed of a first member 108a suspended from the liquid injection port 106 and a second member 108b bent substantially 90 degrees from the first member. The discharge port 108c is directed to the adjacent inner peripheral surface 102c.
[0042]
Therefore, the liquid introduced from the liquid injection port 104 is poured into the chamber 104 along the circumferential direction of the inner peripheral surface 102 c of the main body 102 through the discharge port 108 c of the second member 108 b of the liquid injection tube 108. It will be.
[0043]
In the above configuration, when the air trap 100 for the liquid circulation circuit is incorporated in the liquid circulation circuit as shown in FIG. 4, the liquid circulating in the liquid circulation circuit by the action of the pump 10 Air trap 100 → filter unit 12 → cleaning tank 14 → pump 10... That is, the liquid circulating in the liquid circulation circuit is introduced into the air trap 100 for the liquid circulation circuit before being introduced into the filter unit 12.
[0044]
Here, the liquid reaching the liquid injection port 106 is introduced into the first member 108a of the liquid injection tube 108 from the liquid injection port 106, and further, the inner peripheral surface of the main body 102 through the discharge port 108c of the second member 108b. It will be poured into the chamber 104 along the circumferential direction 102c. For this reason, the liquid poured into the chamber 104 forms a vortex flow in the circumferential direction of the inner peripheral surface 102 c and gradually flows in the direction of gravity, that is, below the chamber 104 without stagnation. At this time, bubbles mixed in the liquid introduced into the chamber 104 are accumulated in the upper portion of the chamber 104 and are discharged from the air vent 110 to the outside of the liquid circulation circuit.
[0045]
As described above, in the air trap 100 for the liquid circulation circuit, the liquid poured into the chamber 104 forms a vortex flow and gradually flows below the chamber 104. Therefore, the chamber 104 is enlarged. It is possible to lengthen the passage time for the liquid to pass through the chamber 104 without removing the bubbles, that is, the time for removing bubbles mixed in the liquid.
[0046]
Therefore, before the liquid is introduced into the filter filter of the filter unit 12, the air bubbles mixed in the liquid can be more reliably removed without forming an unnecessary liquid reservoir. The liquid from which bubbles in the liquid have been removed is introduced into the filter unit 12.
[0047]
Further, when the liquid flows downward of the chamber 104, it passes through the through hole 114a of the rectifying plate 114, but when the liquid passes through the through hole 114a of the rectifying plate 114, in the vicinity of the liquid outlet 112. Entrainment of the liquid is suppressed, and re-mixing of bubbles can be prevented.
[0048]
That is, according to the air trap 100 for the liquid circulation circuit, since the air trap 100 for the liquid circulation circuit is configured separately from the filter, the air trap for the liquid circuit before the liquid is introduced into the filter. 100 can remove bubbles mixed in the liquid, and can prevent the filter filter from being shortened due to the bubbles.
[0049]
Furthermore, the vortex flow of the liquid is generated in the chamber 104, and the passage time of the liquid passing through the chamber 104 without increasing the size of the chamber 104, that is, the bubbles mixed in the liquid is reduced. Since it is possible to lengthen the removable time, it is possible to more reliably remove bubbles mixed in the liquid without the need for providing an unnecessary liquid pool.
[0050]
A liquid inlet 106 for introducing liquid into the chamber 104 is provided on the upper surface 102 a of the main body 102, and a liquid outlet 112 for discharging the liquid in the chamber 104 is provided on the bottom surface 102 b of the main body 102. In addition, since the liquid inlet 106 and the liquid outlet 112 are provided apart from each other, the entrainment of the liquid in the vicinity of the liquid outlet 112 is prevented, and the bubbles are regenerated by the entrainment of the liquid in the vicinity of the liquid outlet 112. Mixing can be prevented.
[0051]
Furthermore, since the flow straightening plate 114 is provided in the chamber 104, the flow straightening plate 114 can more reliably prevent the re-mixing of bubbles due to the entrainment of liquid near the liquid discharge port 112.
[0052]
【The invention's effect】
Since the present invention is configured as described above, it can be configured separately from the filtration filter in the liquid circulation circuit, and bubbles mixed in the liquid before the liquid is introduced into the filtration filter. It has an excellent effect that it becomes possible to remove.
[0053]
In addition, since the present invention is configured as described above, there is an excellent effect that it becomes possible to prevent re-mixing of bubbles due to the entrainment of liquid.
[0054]
Further, since the present invention is configured as described above, there is an excellent effect that it is not necessary to form an unnecessary liquid reservoir.
[Brief description of the drawings]
FIG. 1 is an explanatory diagram of a conceptual configuration showing a method of removing bubbles mixed in a liquid in a conventional liquid circulation circuit.
FIG. 2 is a conceptual configuration explanatory view showing a method for removing bubbles mixed in a liquid in a conventional liquid circulation circuit.
FIG. 3 is a schematic sectional view illustrating an example of an embodiment of an air trap for a liquid circulation circuit according to the present invention.
FIG. 4 is an explanatory diagram of a conceptual configuration of a liquid circulation circuit corresponding to FIGS. 1 and 2 in which an air trap for a liquid circulation circuit according to the present invention is incorporated in the liquid circulation circuit.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Pump 12 Filter unit 14 Cleaning tank 100 Air trap 102 for liquid circulation circuits Main body 102a Upper surface 102b Bottom surface 102c Inner peripheral surface 104 Chamber 106 Liquid inlet 108 Liquid inlet 108a First member 108b Second member 108c Outlet 110 Air vent Port 112 liquid discharge port 114 rectifying plate 114a through hole

Claims (1)

An air trap for a liquid circulation circuit for removing bubbles mixed in the liquid in a liquid circulation circuit for circulating the liquid,
A liquid circulation circuit disposed in the liquid circulation circuit, having a substantially cylindrical inner peripheral surface, a liquid inlet for introducing liquid into the top, and an air vent for discharging bubbles mixed in the liquid to the outside; Provided with a liquid discharge port for discharging the liquid introduced into the bottom at the bottom, the liquid introduced from the liquid injection port and the liquid introduced from the liquid discharge port are discharged, from the air vent A chamber in which bubbles mixed in the liquid introduced inside are discharged to the outside;
A liquid injection pipe disposed in communication with the liquid injection port in the chamber and having a discharge port opened in the chamber;
A rectifying plate disposed at a lower portion in the chamber,
The discharge port of the liquid injection tube is arranged along the circumferential direction of the inner peripheral surface of the chamber located in the vicinity of the discharge port,
The rectifying plate has a substantially flat plate shape having a plurality of through holes,
The liquid in the liquid circulation circuit is introduced into the liquid injection pipe from the liquid injection port, and poured into the chamber along the circumferential direction of the inner peripheral surface of the chamber from the discharge port of the liquid injection pipe. Then, a vortex flow is generated in the circumferential direction of the inner peripheral surface of the chamber, passes through the through-hole formed in the rectifying plate, moves to the liquid discharge port of the chamber, and discharges the liquid. An air trap for a liquid circulation circuit, which suppresses the entrainment of liquid at the time.

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