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JP3608089B2 - Automatic cutting machine for ceramic composite substrates - Google Patents
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JP3608089B2 - Automatic cutting machine for ceramic composite substrates - Google Patents

Automatic cutting machine for ceramic composite substrates Download PDF

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Publication number
JP3608089B2
JP3608089B2 JP11666795A JP11666795A JP3608089B2 JP 3608089 B2 JP3608089 B2 JP 3608089B2 JP 11666795 A JP11666795 A JP 11666795A JP 11666795 A JP11666795 A JP 11666795A JP 3608089 B2 JP3608089 B2 JP 3608089B2
Authority
JP
Japan
Prior art keywords
substrate
ceramic composite
ceramic
cutting machine
automatic cutting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP11666795A
Other languages
Japanese (ja)
Other versions
JPH08281638A (en
Inventor
謙二 竹田
義孝 工藤
俊征 町田
茂 佐々木
暁山 寧
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dowa Holdings Co Ltd
Original Assignee
Dowa Holdings Co Ltd
Dowa Mining Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dowa Holdings Co Ltd, Dowa Mining Co Ltd filed Critical Dowa Holdings Co Ltd
Priority to JP11666795A priority Critical patent/JP3608089B2/en
Publication of JPH08281638A publication Critical patent/JPH08281638A/en
Application granted granted Critical
Publication of JP3608089B2 publication Critical patent/JP3608089B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Ceramic Products (AREA)

Description

【0001】
【産業上の利用分野】
本発明は、セラミックス基板面上にアルミニウム等の金属を接合した複合基板を所定の大きさに切断する自動切断機に関するものである。
【0002】
【従来の技術】
従来、パワーモジュールのような大電力電子部品の実装に使用する基板として、セラミックス基板の表面に銅板を接合して作製された銅張りセラミックス複合基板が使用されている。この複合基板は更に、使用するセラミックス基板の種類やその製造法によって、銅/アルミナ直接接合基板、銅/窒化アルミニウム直接接合基板、銅/アルミナろう接基板及び銅/窒化アルミニウムろう接基板に分けられている。
【0003】
近年、電気自動車用パワーモジュールの開発により、耐ヒートサイクル特性の優れた複合基板への要望が特に高まっており、例えば電気自動車のように温度変化が激しく、振動が大きい使用条件の場合、複合基板の耐ヒートサイクル特性は3000回以上必要であると言われているが、現在使用されている銅/セラミックス複合基板では、このような要望に対応できなかった。
【0004】
本出願人は、上記銅/セラミックス複合基板に代わって、銅と同じような優れた導電性と熱伝導性を有するアルミニウムを用いた直接接合法による金属/セラミックス複合基板を開発した(特願平4−355211号、特願平6−96941号)。
【0005】
更に、本出願人は、これらの金属/セラミックス複合基板を連続的に接合する装置を同様に開発したが(特願平7−26068号)、これによって上記複合基板の量産化が可能となった。
【0006】
【発明が解決しようとする課題】
上述のように上記製造装置によって量産化されるようになったが、接合工程において特定サイズのセラミックス基板を順次送り、その基板両面に接合した金属板を所定のところで切断する必要があり、従来は手作業により上記セラミックス基板のサイズに応じて切断していた。
【0007】
【課題を解決するための手段】
本発明者等は係る課題を解決するため鋭意研究したところ、上記接合工程において得られたセラミックス複合基板の位置決めを行ないながら、セラミックス基板の特定個所を検知することによって自動的に一個毎のセラミックス複合基板として切断する機械を開発することができた。
【0008】
即ち、本発明において、第1の発明は、金属板によって2以上のセラミックス基板が一体に接合されているセラミックス複合基板の側面位置決め部と、上記基板の上記接合部に形成された切欠き部を検出するセンサーと、該基板の切欠き部で上記金属板を切断するカッター部とより成ることを特徴とするセラミックス複合基板の自動切断機であり、第2の発明は上記側面位置決め部が、ガイド付き平面板と、該平面板上を幅方向に移動可能な側面位置決め具とから構成されている。
【0009】
【実施例】
以下図面を参照して本発明のセラミックス複合基板の自動切断機を詳細に説明する。
【0010】
図1及び図2に示す自動切断機に接合工程で得たセラミックス複合基板1を、順次同レベルで搬送する。セラミックス複合基板1は、ガイド3が設けられた平面板2のガイド3の側面に沿って進むと同時に、上記平面板2上で幅方向に移動可能な側面位置決め具4を該複合基板1の左側側面に押し当てる。尚、この場合、基板1は固定されることなく、ほぼ直線的に進行方向に進む。
【0011】
次いで、上側及び下側カッター6,7の手前に設けられた光ファイバーによるセンサー5によって基板1に予め付けてある切欠き部8の位置を検出し、連動してその切欠き部8を含むセラミックス複合基板の先端部分に対して上側カッター6が5mm降下して基板面上に接合した金属板1´を切断する。
【0012】
この場合、下側カッター7は固定された状態にあり、一方、上側カッター6は油圧式プレス切断部の刃物台9に接続し、切断荷重として430〜3000kgの間に調整された状態で油圧プレスの作動とともに降下する。上側カッター6の降下にともない上側カッター6と下側カッター7のそれぞれの刃面が、セラミックスの両表面に接合している金属に接触する。更に、上側カッター6が降下すると、上,下の刃先が金属に食い込み、刃先部分のテーパーの作用で、金属が左右両側に押し開かれる。この時、金属によって連続して接触しているセラミックス基板の先後端面部に隙間が生じる。更に、上側カッター6が降下すると、上,下の刃先がセラミックス基板の先後端面部の隙間に入り、刃先が接する直前で切断し、個別の金属セラミックス複合基板を得た。切断時やセラミックス基板の先後端面部に生じる隙間は、刃先とセラミックスが直接接触するのを防ぎ、セラミックス基板と刃先が破損しないという製品と装置の品質上極めて大きな効果がある。この隙間は、金属がアルミニウムの場合で、0.2〜0.3mmあることが確認できた。なお、10は刃物台9を支持するメカストッパー、11は油圧シリンダー、12は架台である。
【0013】
また、上記カッター6,7としては市販のカッターを用いた。この他シャーリングやダイヤモンドソーを用いてもよいがコスト的には高くなる。
【0014】
【発明の効果】
上述のように本発明による自動切断機は、セラミックス基板上に接合した金属を基板先後端面部に沿って自動的に切断することができ、後工程のエッチング処理が簡易にできるという効果を有するものである。
【図面の簡単な説明】
【図1】本発明の自動切断機の全体を示す斜視図である。
【図2】本発明の主要部を示す部分平面図である。
【図3】本発明の切断部を示す部分断面図である。
【図4】本発明の接合工程で得られた複合基板の部分平面図である。
【符号の説明】
1 金属−セラミックス複合基板
1´ 金属板
2 ガイド付平面板
3 ガイド
4 側面位置決め具
5 センサー
6 上側カッター
7 下側カッター
8 切欠き部
9 刃物台
10 メカストッパー
11 油圧シリンダー
12 架台
[0001]
[Industrial application fields]
The present invention relates to an automatic cutting machine that cuts a composite substrate in which a metal such as aluminum is bonded onto a ceramic substrate surface into a predetermined size.
[0002]
[Prior art]
Conventionally, a copper-clad ceramic composite substrate produced by bonding a copper plate to the surface of a ceramic substrate has been used as a substrate used for mounting a high-power electronic component such as a power module. This composite substrate is further divided into a copper / alumina direct bonding substrate, a copper / aluminum nitride direct bonding substrate, a copper / alumina brazing substrate, and a copper / aluminum nitride brazing substrate, depending on the type of ceramic substrate used and its manufacturing method. ing.
[0003]
In recent years, with the development of power modules for electric vehicles, there has been a particularly increasing demand for composite substrates with excellent heat cycle resistance. However, the copper / ceramic composite substrate currently used cannot meet such a demand.
[0004]
The present applicant has developed a metal / ceramic composite substrate by a direct bonding method using aluminum having excellent conductivity and thermal conductivity similar to copper instead of the copper / ceramic composite substrate (Japanese Patent Application No. Hei. No. 4-355111, Japanese Patent Application No. 6-96941).
[0005]
Furthermore, the present applicant has similarly developed an apparatus for continuously joining these metal / ceramic composite substrates (Japanese Patent Application No. 7-26068), which has enabled mass production of the composite substrates. .
[0006]
[Problems to be solved by the invention]
As described above, it has been mass-produced by the above-described manufacturing apparatus, but it is necessary to sequentially feed ceramic substrates of a specific size in the joining process, and to cut the metal plates joined to both sides of the substrate at a predetermined place. It was cut manually according to the size of the ceramic substrate.
[0007]
[Means for Solving the Problems]
The inventors of the present invention have intensively studied to solve such problems. As a result, the ceramic composite substrate obtained in the joining process is automatically positioned by detecting a specific portion of the ceramic substrate while positioning the ceramic composite substrate. We were able to develop a machine for cutting as a substrate.
[0008]
That is, in the present invention, the first invention, the side surface positioning portions of the ceramic composite substrate in which two or more of the ceramic substrate by a metal plate is bonded together, a notch formed in said junction of said substrate A ceramic composite substrate automatic cutting machine comprising: a sensor for detection; and a cutter portion for cutting the metal plate at a notch portion of the substrate. The second invention is characterized in that the side surface positioning portion is a guide. It is comprised from an attached flat plate and the side surface positioning tool which can move on this flat plate in the width direction.
[0009]
【Example】
The ceramic composite substrate automatic cutting machine of the present invention will be described in detail below with reference to the drawings.
[0010]
The ceramic composite substrate 1 obtained in the joining process is sequentially conveyed to the automatic cutting machine shown in FIGS. 1 and 2 at the same level. The ceramic composite substrate 1 advances along the side surface of the guide 3 of the flat plate 2 on which the guide 3 is provided, and at the same time, the side surface positioning tool 4 movable in the width direction on the flat plate 2 is placed on the left side of the composite substrate 1. Press against the side. In this case, the substrate 1 is not fixed and proceeds substantially linearly in the traveling direction.
[0011]
Next, the position of the notch 8 provided in advance on the substrate 1 is detected by the optical fiber sensor 5 provided in front of the upper and lower cutters 6 and 7, and the ceramic composite including the notch 8 is interlocked. The upper cutter 6 is lowered by 5 mm with respect to the tip portion of the substrate and cuts the metal plate 1 ′ bonded on the substrate surface.
[0012]
In this case, the lower cutter 7 is in a fixed state, while the upper cutter 6 is connected to the tool post 9 of the hydraulic press cutting part and adjusted to a cutting load between 430 and 3000 kg. It descends with the operation of. As the upper cutter 6 descends, the respective blade surfaces of the upper cutter 6 and the lower cutter 7 come into contact with the metal bonded to both surfaces of the ceramic. Further, when the upper cutter 6 is lowered, the upper and lower cutting edges bite into the metal, and the metal is pushed open to the left and right by the action of the taper of the cutting edge portion. At this time, a gap is generated in the front and rear end surfaces of the ceramic substrate that are continuously in contact with the metal. Further, when the upper cutter 6 was lowered, the upper and lower cutting edges entered the gap between the front and rear end face portions of the ceramic substrate, and were cut immediately before the cutting edges contacted to obtain individual metal ceramic composite substrates. The gap generated at the front and rear end surfaces of the ceramic substrate at the time of cutting has an extremely great effect on the quality of the product and the apparatus in which the cutting edge and the ceramic are prevented from coming into direct contact and the ceramic substrate and the cutting edge are not damaged. This gap was confirmed to be 0.2 to 0.3 mm when the metal was aluminum. In addition, 10 is a mechanical stopper that supports the tool post 9, 11 is a hydraulic cylinder, and 12 is a gantry.
[0013]
Moreover, as the cutters 6 and 7, commercially available cutters were used. In addition, shearing or a diamond saw may be used, but the cost increases.
[0014]
【The invention's effect】
As described above, the automatic cutting machine according to the present invention can automatically cut the metal bonded on the ceramic substrate along the front and rear end surfaces of the substrate, and has an effect of simplifying the etching process in the subsequent process. It is.
[Brief description of the drawings]
FIG. 1 is a perspective view showing an entire automatic cutting machine according to the present invention.
FIG. 2 is a partial plan view showing a main part of the present invention.
FIG. 3 is a partial cross-sectional view showing a cutting portion of the present invention.
FIG. 4 is a partial plan view of a composite substrate obtained in the bonding process of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Metal-ceramics composite substrate 1 'Metal plate 2 Guided flat plate 3 Guide 4 Side positioning tool 5 Sensor 6 Upper cutter 7 Lower cutter 8 Notch 9 Tool post 10 Mechanical stopper 11 Hydraulic cylinder 12 Mounting base

Claims (2)

金属板によって2以上のセラミックス基板が一体に接合されているセラミックス複合基板の側面位置決め部と、上記基板の上記接合部に形成された切欠き部を検出するセンサーと、該基板の切欠き部で上記金属板を切断するカッター部とより成ることを特徴とするセラミックス複合基板の自動切断機。A sensor for detecting a side positioning portions of the ceramic composite substrate by the metal plate 2 or more ceramic substrates are bonded together, the cutout portion formed in the joint portion of the substrate, with notch of the substrate An automatic cutting machine for a ceramic composite substrate comprising a cutter unit for cutting the metal plate . 上記側面位置決め部は、ガイド付き平面板と、該平面板上を幅方向に移動可能な側面位置決め具とから構成されてなることを特徴とする請求項1記載のセラミックス複合基板の自動切断機。2. The automatic cutting machine for a ceramic composite substrate according to claim 1, wherein the side surface positioning portion is composed of a planar plate with a guide and a side surface positioning tool capable of moving in the width direction on the flat plate.
JP11666795A 1995-04-19 1995-04-19 Automatic cutting machine for ceramic composite substrates Expired - Fee Related JP3608089B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11666795A JP3608089B2 (en) 1995-04-19 1995-04-19 Automatic cutting machine for ceramic composite substrates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11666795A JP3608089B2 (en) 1995-04-19 1995-04-19 Automatic cutting machine for ceramic composite substrates

Publications (2)

Publication Number Publication Date
JPH08281638A JPH08281638A (en) 1996-10-29
JP3608089B2 true JP3608089B2 (en) 2005-01-05

Family

ID=14692916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11666795A Expired - Fee Related JP3608089B2 (en) 1995-04-19 1995-04-19 Automatic cutting machine for ceramic composite substrates

Country Status (1)

Country Link
JP (1) JP3608089B2 (en)

Also Published As

Publication number Publication date
JPH08281638A (en) 1996-10-29

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