JP3620429B2 - Pyroelectric element manufacturing method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a method for manufacturing a pyroelectric element used as an infrared detection element.
[0002]
[Prior art]
The pyroelectric material generates pyroelectricity with respect to a temperature change and is used as an infrared detection element. In order to obtain pyroelectric characteristics, it is necessary to form a single domain in which the direction of spontaneous polarization is aligned in the material. For example, in the case of LiTaO ₃ or LiNbO ₃ which are single crystals, the state of growth after crystal growth In general, the electrode is formed in the crystal axis direction (in this case, the Z-axis direction), and the polarization treatment is generally performed by slowly cooling under a direct current electric field from a temperature above the Curie point. As the electrode for polarization, an electrode coated with a noble metal conductive paste suitable for high temperature resistance treatment at the Curie point is used.
[0003]
On the other hand, when the pyroelectric material is used as an infrared detection element, it has piezoelectricity as well as pyroelectricity, and therefore noise is generated due to distortion caused by temperature change. Therefore, it is desirable that the parts other than the infrared detection part have no pyroelectricity.
[0004]
Conventionally, as a means for preventing pyroelectricity in parts other than the infrared detector, there is one disclosed in, for example, Japanese Patent Application Laid-Open No. 61-116628. This is because the pyroelectric substrate having pyroelectricity is polarized, and the polarized pyroelectric substrate is annealed with a laser beam in a portion other than the desired polarization region so that the polarization region is formed in a matrix. It is designed to be a non-polarized region.
[0005]
[Problems to be solved by the invention]
In the above conventional example, a non-polarized region is formed by partial annealing. However, even if the thermal treatment is aimed at a partial effect, the thermal effect is exerted on the region other than the desired region due to heat conduction. There is a problem that it is difficult to create a clear boundary between regions.
[0006]
The present invention has been made in view of the description, and can easily form a polarization region and a non-polarization region (which can be expressed as a region where polarization regions are not aligned, a depolarization region, a multi-polarization region, etc.) It is an object to provide a method for manufacturing a pyroelectric element that is effective for use as a detection element.
[0007]
[Means for Solving the Problems]
In order to solve the above-described problem, the pyroelectric element manufacturing method according to claim 1 of the present invention is a pyroelectric substrate polarized in the thickness direction. When an electric field opposite to the direction is applied from the outside, a contact part and a non-contact part are provided by bringing the electrode surface on which the convex part and the concave part are formed into contact with the pyroelectric substrate, By reversing only the polarization direction from the original polarization direction, a portion where the polarization direction is not aligned is formed at a desired position. By doing as described above, it is possible to easily depolarize a desired position by applying an electric field (decrease the intensity of polarization), and easily make a polarized region and a non-polarized region with a clear boundary. Can be formed. Further, by depolarizing and reducing the degree of polarization, the pyroelectricity of the part is reduced, and the generation of noise can be suppressed.
[0008]
The method for manufacturing a pyroelectric element according to claim 2 of the present invention is the method of contacting a pyroelectric substrate of an electrode as a method of making the pyroelectric substrate and electrode contact at a desired position in claim 1. A feature is that a part of the surface has a structure not in contact with the pyroelectric substrate. By doing in this way, the site | part with which the polarization direction was equal, and the site | part which is not uniform can be arbitrarily produced with the external shape of an electrode.
[0009]
According to a third aspect of the present invention, there is provided a method for producing a pyroelectric element according to the first or second aspect, wherein the outer shape of the electrode is formed on the surface of the polarized portion of the pyroelectric substrate after the voltage application process. The electrode wiring pattern adopts a negative-positive relationship, and the electrode is used as a metal mask when forming the wiring pattern. In this way, the electrode can be used also as a metal mask for forming a circuit after polarization treatment.
[0010]
A method for manufacturing a pyroelectric element according to claim 4 of the present invention is the method according to claim 1 or 2, wherein one of the pair of electrodes arranged on both sides of the pyroelectric substrate is made of a pyroelectric substrate. The shape follows the surface shape, and the other electrode has a structure in which the contact portion and the non-contact portion are provided on the pyroelectric substrate. By doing so, it is possible to adjust how the polarizations are aligned on the surface where only one side of the electrode and the pyroelectric substrate contacts .
[0011]
According to a fifth aspect of the present invention, there is provided a pyroelectric element manufacturing method according to the fourth aspect of the invention , wherein a portion where the polarization direction is partially not aligned is formed by scanning the electrode provided with the contact portion and the non-contact portion. It is characterized by. By doing so, it is possible to form a complex-shaped pattern of a multi-domain region using a simple-shaped electrode. For this reason, it is particularly effective when examining a polarization pattern such as a prototype.
[0012]
According to a sixth aspect of the present invention, there is provided a pyroelectric element manufacturing method according to the fourth aspect, wherein an electrode film is formed so as to follow the surface shape of the pyroelectric substrate, and an electrode plate is brought into contact with the electrode film to thereby produce a pyroelectric element. It is characterized in that it is sandwiched together with a conductive substrate. In this way, delicate patterning can be performed. Moreover, electrode contact can be performed reliably.
[0013]
The manufacturing method of a pyroelectric element according to claim 7 of the present invention is the same as that of the pyroelectric substrate according to claim 1, claim 2, or claim 4 between the electrode on one side and the pyroelectric substrate. It is characterized in that an electric field is applied by filling a fine gap between the pyroelectric substrate and the electrode by interposing a fine powder of the material therebetween. If it does in this way, an electrode and a pyroelectric base material will contact uniformly in one electrode, and a homogeneous process can be performed. Further, when the pyroelectric substrate is sandwiched between the electrodes, the sandwiching pressure is dispersed by the fine powder, and it is possible to prevent the sandwiching pressure from being locally applied to a part of the substrate.
[0014]
According to claim 8 of the present invention, in the method for manufacturing a pyroelectric element according to claim 5, in forming a portion where the polarization direction is not partially aligned by scanning the electrode, the small electrode is moved so as to be stamped. It is characterized by processing. In this way, a minute repeating pattern can be easily formed.
[0015]
The manufacturing method of a pyroelectric element of claim 9 of the present invention, in claim 1, characterized in that the contact portion of the electrode and sharp protrusions. In this case, it is possible to reliably apply a voltage to a predetermined location by ensuring that the sharp convex portion is in contact with the pyroelectric substrate.
[0016]
A pyroelectric element manufacturing method according to claim 10 of the present invention is characterized in that, in claim 9 , the positions of the convex portions of the electrodes positioned on both surfaces of the pyroelectric substrate are made to face each other. By doing so, a non-polarized region where polarization is not uniform can be formed reliably.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
First, an example of the embodiment shown in FIGS. 1 and 2 will be described. The pyroelectric substrate 1 is polarized in one direction of the plate thickness as shown in FIG. In the case of this example, the lower surface side of the pyroelectric substrate 1 is − and the upper surface side is +, and the polarization direction is from the bottom to the top as shown by the arrows. Concavities and convexities 3 are provided on the surfaces of the electrodes 2 a and 2 b that sandwich the pyroelectric substrate 1 in contact with the pyroelectric substrate 1, and the concavities and convexities 3 allow the electrodes 2 a and 2 b to be connected to the pyroelectric substrate 1 . A contact part and a non-contact part are provided between them. That is, the convex part 3a of the unevenness | corrugation 3 contacts the pyroelectric base material 1, and the recessed part 3b of the unevenness | corrugation 3 does not contact. When the unevenness 3 is provided on the electrodes 2a and 2b, the surface is formed into an arbitrary uneven shape by processing with abrasive grains (blasting, polishing, etc.). The pyroelectric substrate 1 may be smooth by mirror finishing or may have appropriate irregularities formed thereon.
[0018]
When processing the pyroelectric substrate 1, the electrodes 2a and 2b are arranged above and below the pyroelectric substrate 1 as shown in FIG. 1B and FIG. The base material 1 is sandwiched, and an appropriate pressure is applied and sandwiched. In this state, as shown in FIG. 1C, an electric field is applied from the DC power source 4 in the direction opposite to the original polarization direction of the pyroelectric substrate 1. At this time, the pyroelectric substrate 1 is heated as necessary. When an electric field is applied with the pyroelectric substrate 1 sandwiched between the electrodes 2a and 2b as described above, the projections 3a of the projections and depressions 3a of the electrodes 2a and 2b are in direct contact with the pyroelectric substrate 1 and the electrodes All electric fields applied between 2a and 2b are applied to the pyroelectric substrate 1 and polarized. On the other hand, there is a gap between the recess 3b of the unevenness 3 and the pyroelectric substrate 1, and there is a voltage drop inversely proportional to the dielectric constant of the atmosphere (generally air or vacuum) filled between the gaps. It becomes harder to be polarized than the part 3a. Therefore, when an arbitrary electric field is applied between the electrodes 2a and 2b, the convex portion 3a is inverted in its original polarization direction and the polarization direction is aligned, but the polarization direction is aligned, but the concave portion 3b has the initial original polarization direction, and the random electrode The polarization direction of the pyroelectric substrate 1 can be made random by the shapes of 2a and 2b. That is, the polarization direction of the initial conductive base material 1 is uniform, but the region sandwiched between the electrodes 2a and 2b can be in a multi-domain state (a state where polarization is not uniform). FIG. 2 (b) shows the processed state, where the region indicated by the symbol a is a polarization region that remains in the same state as the original polarization direction, and the region indicated by the symbol b prevents the polarization direction from being aligned by the above processing. This is a non-polarized region that is depolarized (decreases the strength of polarization).
[0019]
By processing the pyroelectric substrate 1 as described above, it is possible to easily depolarize a desired position. Further, by depolarizing and reducing the degree of polarization, the pyroelectricity of the part is reduced, and the generation of noise can be suppressed.
[0020]
Next, an example of the embodiment shown in FIGS. 3 and 4 will be described. This example is basically the same as the above example, and only the differences will be mainly described. The surface of the electrodes 2a, 2b facing the pyroelectric substrate 1 is provided with irregularities 3, but a portion of the electrode 2a, 2b that is not in contact with the pyroelectric substrate 1 at a part of the electrode 2a, 2b. Is formed. That is, the electrodes 5a and 2b are provided with openings 5a or recesses 5b. Therefore, as shown in FIG. 4, the pyroelectric substrate 1 is sandwiched between the electrodes 2a and 2b, and an electric field is applied in the direction opposite to the original polarization direction of the pyroelectric substrate 1, but before the voltage application, 4 (a) is in the polarization state, but after voltage application, the polarization state is in FIG. 4 (b). After voltage application, the portions corresponding to the projections and depressions 3 of the electrodes 2a and 2b become non-polarized regions b where the polarization directions are not aligned, but the portions corresponding to the openings 5a and the recesses 5b of the electrodes 2a and 2b are the original polarization directions. And a polarization region a in which the polarization direction does not change. In this way, a polarization region a having a uniform polarization direction and a non-polarization region b having a non-uniform polarization direction can be arbitrarily created in the outer shape of the electrodes 2a, 2b.
[0021]
Next, an example of the embodiment shown in FIGS. 5 and 6 will be described. This example is basically the same as the above example, and only the differences will be mainly described. The shape of the electrodes 2a and 2b is a mask shape with a gap 6 partially. The shape of the electrodes 2a and 2b has a negative-positive relationship with the circuit pattern 7 as an electrode wiring pattern formed on the surface of the pyroelectric substrate 1.
[0022]
The pyroelectric substrate 1 polarized in a predetermined direction is sandwiched between the electrodes 2a and 2b, and in this state, an electric field is applied between the electrodes 2a and 2b in the direction opposite to the polarization direction, whereby the pyroelectric substrate A non-polarized region b in a multi-domain state in which the polarization directions are not aligned is formed in a portion sandwiched between the electrodes 2a and 2b of the material 1. At this time, when the circuit pattern 7 is formed by the PVD method or the like where the gaps 6 of the electrodes 2a and 2b are present using the electrodes 2a and 2b as a metal mask while the pyroelectric substrate 1 is sandwiched between the electrodes 2a and 2b, the polarization direction It is possible to form an electrode portion for taking out current and a circuit connected to the electrode portion only in the uniform region. If it carries out as mentioned above, electrode 2a, 2b can be combined with the metal mask for the circuit formation after polarization processing.
[0023]
Next, an example of the embodiment shown in FIG. 7 will be described. This example is basically the same as the above example, and only different points will be described. In the case of this example, the lower electrode 2b is shaped to follow the surface of the pyroelectric substrate 1, and the upper electrode 2a is provided with a contact portion and a non-contact portion between the pyroelectric substrate 1 and the upper electrode 2a. It is. Surface in contact with the electrode 2a of the pyroelectric substrate 1 is, the unevenness of the surface of the pyroelectric substrate 1 or the electrode 2a, so that contact contact portion and the non-contact portion is provided. In the case of this example, the upper electrode 2a is provided with irregularities 3 so that a contact portion and a non-contact portion are provided . The lower electrode 2b follows the surface shape of the pyroelectric substrate 1 as follows, for example. The electrode 2b is formed of a conductive and elastic material such as a conductive resin or a conductive rubber so as to follow the surface of the pyroelectric substrate 1. Further, when the surface of the pyroelectric substrate 1 is a mirror surface, the electrode 2b is formed by a metal plate subjected to the same mirror surface processing to be copied. When the process is carried out with the pyroelectric substrate 1 sandwiched between the electrodes 2a and 2b as described above, the polarization is only in the plane of the contact portion and the non-contact portion between the upper electrode 2a and the pyroelectric substrate 1. Distribution can be adjusted (polarization conditions can be easily determined). That is, it is possible to adjust how the polarization directions are aligned on the surface where the upper electrode 2a and the pyroelectric substrate 1 are in contact.
[0024]
Next, an example of the embodiment shown in FIG. 8 will be described. In the case of this example, the upper electrode 2 a has irregularities 3, and the lower electrode 2 b is made to follow the surface of the pyroelectric substrate 1. The upper electrode 2a has a mechanism capable of scanning at an arbitrary position. Then, the electrodes 2a and 2b are scanned with the electrodes 2a in a state where an electric field opposite to the polarization direction of the original pyroelectric substrate 1 is applied. By doing so, the trajectory portion of the scanned electrode 2a is processed as shown in FIG. In the case of this example, it is possible to form a multi-domain pattern having a complicated shape by using the electrode 2a in a simple shape. For this reason, it is particularly effective when examining a polarization pattern such as a prototype.
[0025]
Next, an example of the embodiment shown in FIGS. 9 and 10 will be described. In this example, a patterned electrode film 8 is formed on the lower surface of the pyroelectric substrate 1 as the lower electrode 2b. As a means for forming the electrode film 8, there is a PVD method such as application and printing of conductive paste, plating, vapor deposition and sputtering. An electrode 2a having irregularities 3 is arranged on the pyroelectric substrate 1, an sandwiching electrode plate 9 is arranged under the electrode film 8 as the electrode 2b of the pyroelectric substrate 1, and an electric field is applied to the electrode 2a, Processing is performed by applying between 2b. In this case, electrode contact on the lower surface side of the pyroelectric substrate 1 can be ensured. In addition, a delicate patterning of the polarization pattern can be performed. In the case of this example, the example in which the electrode film 8 is formed as the electrode 2b on the lower surface of the pyroelectric substrate 1 has been described, but even if the electrode film 8 as the electrode 2a is formed on the upper surface of the pyroelectric substrate 1 Good.
[0026]
Next, an example of the embodiment shown in FIG. 11 will be described. In the case of this example, the upper electrode 2a and the lower electrode 2b have irregularities 3, but a fine powder 10 of the same material as the pyroelectric substrate 1 is placed between the pyroelectric substrate 1 and the electrode 2b. By interposing and sandwiching, a minute gap between the pyroelectric substrate 1 and the electrode 2b is filled, and an electric field is applied. The projections 3a of the projections 3 of the electrodes 2a and 2b are in direct contact with the pyroelectric substrate 1, and all the electric field applied between the electrodes 2a and 2b is applied to the pyroelectric substrate 1, but the recess 3b Since there is a gap between the pyroelectric base material 1 and there is a voltage drop that is inversely proportional to the dielectric constant of the material occupying the gap, it is less likely to be polarized than the convex portion 3a. Therefore, the pyroelectric substrate 1 and the electrode 2b are simulated by filling the fine powder 10 of the same material as the pyroelectric substrate 1 as a material occupying the gap between the electrode 2b and the pyroelectric substrate 1. Can be in close contact with each other. The fine powder 10 preferably has a particle size of 50 μm or less. As a filling method of the fine powder 10, the fine powder 10 is placed on the lower electrode 2 b and sandwiched with the pyroelectric substrate 1 by the upper electrode 2 a. The fine powder 10 may be interposed between the upper electrode 2 a and the pyroelectric substrate 1. In the case of the above example, one of the electrodes 2a and 2b, the electrode and the pyroelectric substrate 1 are in uniform contact with the fine powder 10 and uniform polarization can be performed. When the pyroelectric substrate 1 is sandwiched between the electrodes 2a and 2b, the sandwiching pressure is dispersed by the fine powder, and it is possible to prevent the sandwiching pressure from being locally applied to a part of the pyroelectric substrate 1.
[0027]
Next, an example of the embodiment shown in FIG. 12 will be described. In the case of this example, when scanning the upper electrode 2a, the electrode 2a made of a small electrode is moved and processed so as to be stamped. That is, the pyroelectric substrate 1 is sandwiched between the upper electrode 2a and the lower electrode 2b as shown in FIG. 12A, and voltage application and movement are performed as shown in FIGS. 12B and 12C. By repeating the above, a non-polarized region b having the same shape as that of the electrode 2a and having no uniform polarization direction can be formed at an arbitrary position. In this way, a minute repeating pattern can be easily formed.
[0028]
Next, an example of the embodiment shown in FIG. 13 will be described. In the case of this example, processing is performed by intermittently applying a voltage to be applied while scanning the electrode 2a. That is, as shown in FIG. 13, the upper electrode 2a has a mechanism capable of scanning, and a mechanism capable of controlling the application of voltage is added using a relay or the like. By thus scanning the electrode 2a and controlling the applied voltage to be intermittently applied, a part of the trajectory of the electrode 2a can be set to the non-polarized region b where the polarization direction is not aligned. By doing in this way, the non-polarization area | region b where a polarization direction is not uniform can be formed in island shape.
[0029]
Next, an example of the embodiment shown in FIG. 14 will be described. In the case of this example, the convex part 3a of the unevenness 3 of the electrode 2a has a sharp shape such as a needle shape, a pyramid shape, or a brush. When the sharp convex part 3a is provided as described above, the tip of the convex part 3a reliably contacts the pyroelectric substrate 1, so that a voltage can be reliably applied to a predetermined location. When the convex portion 3a has a brush shape, the pressure applied to the pyroelectric substrate 1 is likely to be dispersed, and therefore the damage to the pyroelectric substrate 1 due to contact is small.
[0030]
Next, an example of the embodiment shown in FIG. 15 will be described. In the case of this example, the convex portions 3a of the concave and convex portions 3 of the upper and lower electrodes 2a and 2b have a sharp shape, and the positions of the convex portions 3a on the front and back sides are opposed to each other. By setting the positions of the convex portions 3a of the upper and lower electrodes 2a and 2b to be regular positions and arranging the positions of the convex portions 3a of the upper and lower electrodes 2a and 2b so as to face each other with the pyroelectric substrate 1 therebetween, A large difference in electric field strength between the portion of the pyroelectric substrate 1 sandwiched between the convex portions 3a and other portions can be taken, and the non-polarized region b in which the polarization directions are not aligned is reliably formed. Can do.
[0031]
Next, an example of the embodiment shown in FIGS. 16 and 17 will be described. The pyroelectric element manufacturing apparatus shown in FIG. 16 includes a pair of electrodes 2a and 2b that sandwich the pyroelectric substrate 1 from both sides, and a DC power source that externally applies an electric field opposite to the original polarization direction in the plate thickness direction. 4, a mechanism for sandwiching the electrodes 2 a and 2 b, and a means for heating the electrodes 2 a and 2 b. A heater and sandwiching jig 11 that sandwiches the electrodes 2a and 2b and heats the electrodes is disposed above and below the electrodes 2a and 2b. The surface of the heater and sandwiching jig 11 is formed of an insulator, and a heater is built therein. Reference numeral 12 denotes a bolt, and reference numeral 13 denotes a spring, with which the upper and lower heater and sandwiching jigs 11 are elastically tightened. Thus, the pyroelectric substrate 1 is sandwiched between the pair of electrodes 2a and 2b, the pair of electrodes 2a and 2b is sandwiched and clamped between the upper and lower heaters and sandwiching jig 11, and a voltage is applied to the pyroelectric substrate 1. In addition, by heating the pyroelectric substrate 1 to an appropriate temperature, a portion in which the original polarization state and the polarization state are reversed can be formed on the pyroelectric substrate 1, and the polarization region a and the polarization direction are aligned. A non-polarized region b can be formed. In addition, conditions necessary for polarization or polarization inversion such as voltage conditions and temperature conditions can be easily set. Even if the pyroelectric substrate 1 is a thin plate, it is not easily damaged because it is held by the electrodes 2a and 2b.
[0032]
【The invention's effect】
According to the first aspect of the present invention, a pyroelectric substrate polarized in the thickness direction is sandwiched between electrodes and an electric field opposite to the original polarization direction is applied from the outside in the thickness direction. At the time, the contact surface and the non-contact portion are provided by bringing the electrode surface on which the convex portion and the concave portion are formed into contact with the pyroelectric substrate, and only the polarization direction of the contact portion is reversed from the original polarization direction . As a result, a region where the polarization direction is not aligned is formed at a desired position, so that it is possible to easily depolarize the desired position (reducing the polarization intensity) by applying an electric field, and to clearly define the boundary. Polarized region and non-polarized region can be easily formed, and by reducing the degree of polarization by depolarizing the region, the pyroelectricity of the region can be reduced, and the generation of noise can be suppressed. Is.
[0033]
The invention of claim 2 of the present invention is the method according to claim 1, wherein a part of the surface of the electrode in contact with the pyroelectric substrate is used as a method for contacting the pyroelectric substrate and the electrode at a desired position. Since the configuration has a structure that does not contact the pyroelectric substrate, a portion where the polarization direction is aligned and a portion where the polarization direction is aligned can be arbitrarily created by the outer shape of the electrode.
[0034]
The invention of claim 3 of the present invention is the electrode wiring pattern formed on the surface of the polarized portion of the pyroelectric substrate after the voltage application treatment as the outer shape of the electrode in claim 1 or claim 2. Since the negative-positive relationship is adopted and the electrode is used as a metal mask when forming a wiring pattern, the electrode can be used also as a metal mask for forming a circuit after polarization treatment.
[0035]
The invention according to claim 4 of the present invention is the shape according to claim 1 or claim 2, wherein one of the pair of electrodes arranged on both sides of the pyroelectric substrate is a shape following the surface shape of the pyroelectric substrate. Since the other electrode has a structure in which the contact part and the non-contact part are provided on the pyroelectric base material, the polarization alignment is adjusted on the surface where only one side of the electrode and the pyroelectric base material contacts. It can be done.
[0036]
Further, the invention according to claim 5 of the present invention is that, in claim 4, since the part where the polarization direction is partially not aligned is formed by scanning the electrode provided with the contact part and the non-contact part , a simple shape is formed. A pattern of a multi-domain region having a complicated shape can be formed using an electrode.
[0037]
Further, the invention of claim 6 of the present invention is that, in claim 4, an electrode film is formed so as to follow the surface shape of the pyroelectric substrate, and an electrode plate is brought into contact with the electrode film together with the pyroelectric substrate. As a result, it is possible to perform delicate patterning and to reliably perform electrode contact.
[0038]
Moreover, the invention of claim 7 of the present invention is the method according to claim 1, claim 2, or claim 4, wherein a fine powder of the same material as the pyroelectric substrate is placed between the electrode on one side and the pyroelectric substrate. By interposing and sandwiching, a small gap between the pyroelectric substrate and the electrode is filled and an electric field is applied, so in one electrode, the electrode and the pyroelectric substrate are uniformly contacted and homogeneous treatment In addition, when the pyroelectric substrate is sandwiched between the electrodes, the sandwiching pressure is dispersed by the fine powder, and it is possible to prevent the sandwiching pressure from being locally applied to a part of the substrate.
[0039]
Further, in the invention of claim 8 of the present invention, in forming the part where the polarization direction is not partially aligned by scanning the electrode in claim 5, the small electrode is moved and processed so as to be stamped. A minute repeating pattern can be easily formed.
[0040]
Moreover , since the contact part of an electrode makes a sharp convex part in Claim 1, invention of Claim 9 of this invention makes a predetermined location by making a sharp convex part contact a pyroelectric base material reliably. A voltage can be reliably applied.
[0041]
The invention of claim 10 of the present invention is that in claim 9 , the positions of the convex portions of the electrodes located on both sides of the pyroelectric substrate are made to face each other, so that a non-polarized region where polarization is not evenly aligned can be formed. It is.
[Brief description of the drawings]
FIGS. 1A, 1B, and 1C are cross-sectional views illustrating steps of an example of an embodiment of the present invention.
FIGS. 2A and 2B are perspective views for explaining the same process as above. FIGS.
FIG. 3 is a perspective view for explaining the shape of another example of the electrode.
4 (a) and 4 (b) are cross-sectional views illustrating the same steps.
FIGS. 5A and 5B are perspective views for explaining another example of the process.
6A and 6B are cross-sectional views illustrating another example of the process.
FIG. 7 is a cross-sectional view of another example of the above.
8A and 8B are cross-sectional views illustrating another example of the same.
FIG. 9 is an exploded perspective view for explaining another example of the above.
FIG. 10 is a cross-sectional view of the above.
FIG. 11 is a cross-sectional view illustrating another example of the above.
12A, 12B, and 12C are cross-sectional views illustrating another example of the above.
FIGS. 13A and 13B are cross-sectional views illustrating another example of the above.
FIG. 14 is a cross-sectional view illustrating another example of the above.
FIG. 15 is a cross-sectional view illustrating another example of the above.
FIG. 16 is a perspective view of an example of the manufacturing apparatus same as above.
FIG. 17 is a perspective view showing the main part of the above.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Pyroelectric base material 2a Electrode 2b Electrode 3 Concavity and convexity 3a Convex part 3b Concave part 4 DC power supply 10 Fine powder

Claims (10)

In a pyroelectric substrate polarized in the plate thickness direction, when both surfaces are sandwiched between electrodes and an electric field opposite to the original polarization direction is applied from the outside in the plate thickness direction, convex portions and concave portions are formed. A contact portion and a non-contact portion are provided by bringing the electrode surface into contact with the pyroelectric substrate, and only the polarization direction of the contact portion is reversed from the original polarization direction. A method of manufacturing a pyroelectric element, characterized by forming a non-uniform portion. As a method for making the pyroelectric substrate and the electrode contact at a desired position, a part of the surface of the electrode that contacts the pyroelectric substrate has a structure that does not contact the pyroelectric substrate. The method of manufacturing a pyroelectric element according to claim 1. As the outer shape of the electrode, the electrode wiring pattern formed on the surface of the polarized portion of the pyroelectric substrate after the voltage application process adopts a negative-positive relationship, and the metal mask at the time of wiring pattern formation using the electrode The method of manufacturing a pyroelectric element according to claim 1 or 2, wherein: Of the pair of electrodes arranged on both sides of the pyroelectric substrate, one electrode has a shape that follows the surface shape of the pyroelectric substrate, and the other electrode is in contact with and non-contacting the pyroelectric substrate. The method for manufacturing a pyroelectric element according to claim 1, wherein the structure is provided with a portion . 5. The method for manufacturing a pyroelectric element according to claim 4, wherein a part where the polarization direction is not partially aligned is formed by scanning the electrode provided with the contact part and the non-contact part . 5. A pyroelectric film according to claim 4, wherein an electrode film is formed so as to follow the surface shape of the pyroelectric substrate, and an electrode plate is brought into contact with the electrode film so as to be sandwiched together with the pyroelectric substrate. A method for manufacturing an electric element. The fine gap between the pyroelectric substrate and the electrode is filled by interposing a fine powder of the same material as the pyroelectric substrate between the electrode on one side and the pyroelectric substrate. An electric field is applied, The manufacturing method of the pyroelectric element of Claim 1 or Claim 2 or Claim 4 characterized by the above-mentioned. 6. The method of manufacturing a pyroelectric element according to claim 5, wherein when forming the portion where the polarization direction is not partially aligned by scanning the electrode, the small electrode is moved so as to be stamped. 2. The method of manufacturing a pyroelectric element according to claim 1, wherein the contact portion of the electrode is a sharp convex portion. The method for producing a pyroelectric element according to claim 9, wherein the positions of the convex portions of the electrodes located on both surfaces of the pyroelectric substrate are opposed to each other.

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