JP3622932B2 - Article support interval adjusting device for heat treatment apparatus - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a heat treatment apparatus provided in a heat treatment chamber so as to be able to move up and down a stacking portion having a support shaft that supports a plurality of support members arranged to face each other so as to support a flat article. The present invention also relates to an article support interval adjusting device for a heat treatment apparatus that can adjust an article support interval from the outside of a heat treatment chamber.
[0002]
[Prior art]
For example, a gondola-type heat treatment apparatus is known as a heat treatment apparatus of a type that lifts and lowers a stacking unit having a large number of substrate holders arranged to face each other so as to support a flat article such as a glass substrate. (See JP-A-6-66715). In this heat treatment apparatus, an entrance / exit of articles is provided at one central location in the height direction of the heat treatment chamber, and a gondola that can load and elevate articles in multiple stages is stopped at the entrance / exit position for each stage. Then, remove the article from the heat treatment chamber and put the untreated article with a robot etc., repeat this operation, raise the gondola to the uppermost position, lower it to the initial position, repeat the series of operations again, and continue the article Heat treatment can be performed for the necessary time. And in this apparatus, the article support ring which is a substrate holder is fitted to the opposite shafts, and this shaft is supported eccentrically by the eccentric block, and the eccentric support block is rotated to change the position. It is possible to process articles having different widths by changing the interval of the.
[0003]
However, in order to change the support interval with this apparatus, the heat treatment chamber must be once returned to room temperature, and it is necessary to make a setup change to adjust the eccentric block. This reduces the processing efficiency of the heat treatment apparatus. It was a result. Also, the support interval could not be changed automatically. On the other hand, a method has been conventionally used in which the article support member is formed in, for example, a three-step shape so that the support interval varies depending on each step. However, even with this method, the number of article sizes that can be heat-treated is limited to several types, and the article adaptability of the heat treatment apparatus is insufficient.
[0004]
[Problems to be solved by the invention]
This invention solves the said problem in a prior art, and makes it a subject to provide the articles | goods support space | interval adjustment apparatus of the heat processing apparatus which can process the articles | goods from which a magnitude | size differs without stopping an operation | movement.
[0005]
[Means for Solving the Problems]
In order to solve the above problems, the present invention provides an article support interval adjustment device for a heat treatment apparatus, which includes a rotation drive unit, a rotation shaft, an external rotation transmission mechanism, an internal rotation transmission mechanism, and an outer cylinder.
The rotational drive unit includes an output end disposed outside the heat treatment chamber of the heat treatment apparatus and generating a rotational force,
The rotating shaft extends from the outside of the heat treatment chamber to the inside of the heat treatment chamber, and is a loading portion provided in the heat treatment chamber so as to be able to move up and down so as to support a flat article. A rotational force input portion and a rotational force output portion on the inner side, and a rotational force output portion on the inner side, which are rotatably supported by a loading portion having a support shaft that supports a plurality of disposed support members;
The external rotation transmission mechanism is interposed between the output end and the input unit to transmit the rotational force of the rotation driving unit to the rotation shaft,
The internal rotational force transmission mechanism is interposed between the output unit and the support shaft, and transmits the rotational force transmitted from the output unit to the support shaft.
The outer cylinder is attached to the stacking portion so as to surround the rotating shaft, and is extended so that one end side protrudes to the outside when the stacking portion is at the most elevated position in the heat treatment chamber.
It is characterized by that.
[0006]
DETAILED DESCRIPTION OF THE INVENTION
1 and 2 show an example of the overall structure of a heat treatment apparatus to which the article support interval adjusting apparatus of the heat treatment apparatus of the present invention can be applied. First, the overall structure of the heat treatment apparatus will be described with reference to these drawings.
The oven which is a heat treatment apparatus includes a heat insulating wall 1, a door 2, a heat treatment chamber 3 surrounded by these, a lower structure 4 provided with a part of an article support interval adjusting apparatus to which the present invention is applied, and a plate-like article such as a glass substrate. A gondola 5 for loading W, an air conditioner 6 for circulating hot air in which a blower, a heater, and the like are arranged are provided.
[0007]
The heat insulating walls 1 on both sides in the X direction are partially opened, and article inlets 14 and 15 and article outlets 16 and 17 are provided on each side. These doorways are provided with a width that allows the article of the maximum width to be processed to pass in the Y direction, which is the depth direction of the heat treatment apparatus. In the above, for convenience of explanation, the mouths 14 and 15 are used as article inlets and the outlets 16 and 17 are used as article outlets. However, depending on the arrangement when the apparatus is used, the mouths 14 and 15 are used as article outlets and the articles 16 and 17 are used as article inlets. Needless to say. Further, FIG. 1 shows an example in which the article inlet and the outlet are provided separately. However, for example, only the left ports 14 and 15 are provided in FIG. 1, and these are used both as the inlet and the outlet. The present invention can be applied to such an apparatus.
[0008]
The lower structure 4 is formed by a lower structure 41 formed of a member such as an L shape, a groove shape, or a box shape that supports the upper structure or a plate material, a support structure 42 that supports the lifting device, and the like. This part is provided with an elevating device for the gondola 5, a device support interval adjusting device for the gondola, a control panel, electrical equipment, other equipment, etc., which are the lower structure 4 or an appropriate support base or support plate fixed to this. Supported by.
[0009]
3, 4, and 9 show a structural example of the gondola 5.
The gondola 5 includes two upper and lower top and bottom plates 51, a support frame 51 a that integrally couples the gondola 5, and two swivel shafts that are opposed to each other in the Y direction that is the width direction of the article entrances 14 to 17. 52, an intermediate member 53 fixed to these upper and lower ends, a swing arm 54 fitted and supported by them, a support shaft 55 supported on the free end side of the upper and lower opposing swing arms 54, and an intermediate connecting member 56 (see FIG. 9), and spaced apart from the support shaft 55 via the spacer 57, in this example, from the first stage 58-1 to the final stage 58-40 at a constant pitch of 40 stages in the vertical Z direction. The substrate receiver 58 is supported. The article W is placed on the flat article placing portion 58 a of the substrate receiver 58. FIG. 4B shows a state where the distance between the opposing substrate receivers 58 is B, which is the maximum. The turning shaft 52 is rotatably supported by bearings 59a and 59b attached to the top plate and the bottom plate 51, respectively. Of the above members, the pivot shaft 52, the intermediate member 53, and the pivot arm 54 are examples of components of the internal rotation transmission mechanism of the article support interval adjusting device of the present invention.
[0010]
The article inlets 14 and 15 and the article outlets 16 and 17 shown in FIG. 1 correspond to the positions of the final stage substrate receivers 58-40 when the gondola 5 is at the lowermost stage on one side as shown in FIG. The distance from the first stage substrate receiver 58-1 to the last stage substrate receiver 58-40 shown in FIG. ₁ , L ₂ Are provided at two positions corresponding to the positions of the substrate receivers 58-20. In this example, the position H of the inlets and outlets 14, 16 ₁ Is at the 20th stage, position H at the entrance and exit 15 and 17 ₂ Is in the 40th stage, L ₁ And L ₂ The former is shorter than the latter by one pitch of the substrate receiver.
[0011]
The heat treatment chamber 3 has a Z direction opposite to the first stage from the last stage, that is, Z ₁ A length L that is at least one interval in the direction ₁ It is an area with a space of ₁ In addition, the size of the upper and lower plates of the gondola 5 and the support frame, and a space having a length L3, which is a dimension that allows further margin, are provided.
[0012]
Although FIG. 1A shows an example where there are two entrances and exits, the number of entrances and exits is three or more as shown in FIG. It is also possible. In the example of three entrances / exits, as shown in FIG. ₁ , L ₂ (L ₁ +1 pitch), L ₂ In the upper part of the heat treatment chamber, L ₁ A space height of + α (margin) is provided.
[0013]
5, 6, and 7 show a configuration of a gondola lifting device, and are a front view, a plan view, and a side sectional view similar to FIG. 1, respectively. Since the article support interval adjusting device of the present invention is related to a part of the lifting device, the lifting device will be described first in order to make the configuration of the adjusting device easier to understand.
The lifting device is attached to the bottom plate 51 of the gondola 5 as a loading portion and is provided outside the heat treatment chamber 3 as an outer tube 61 as a tubular member extending through the heat treatment chamber 3 in the Z direction that is the lifting direction. An elevating mechanism 70 for elevating and lowering the outer tube 61, a guide mechanism 80 for guiding elevating and lowering, and the like are provided.
[0014]
An inner tube 62 is inserted inside the outer tube 61, the inner and outer tubes are integrally coupled by upper and lower lids 63, and a heat insulating material 64 is filled between the inner and outer tubes, and in this example, these are united. A lifting shaft 60 is formed. The upper part of the lid 63 is attached to the bottom plate 51 of the gondola with bolts or the like. The lower external space and the test chamber 3 are partitioned by the heat insulating wall 1 as shown in FIG. 1, and a seal structure 65 that makes the gasket 66 come into contact with the outer tube 61 between them. It is partitioned and leakage of high temperature air in the heat treatment chamber 3 to the outside is prevented. The elevating shaft 60 is coupled to a position almost directly below the center of gravity of the gondola 5.
[0015]
The elevating mechanism 70 includes a servo motor 71, a toothed driving pulley 72 attached to the output shaft thereof, a toothed driven pulley 73, a toothed belt 74 wound between them, and one end coupled to the toothed driven pulley 73. A ball screw shaft 75, upper and lower bearings 76 that rotatably support the ball screw shaft 75, a nut 77 that is screwed to the ball screw shaft 75, a nut 77, a thrust transmission member 78 that is fixed to the elevating shaft 60 and is coupled with a bolt. Yes. The upper and lower bearings 76 are attached to support plates 42 a and 42 b fixed to the support structure 42. The thrust transmission member 78 is firmly fixed at two positions on the lifting shaft 60. The servo motor 71 is installed so that the belt tension can be adjusted.
[0016]
The guide mechanisms 80 are symmetrically disposed on both sides of the lifting shaft 60, and each includes a connecting member 81 fixed to the lifting shaft, a linear guide moving body 82 attached thereto, and a linear guide for guiding the movement thereof. It is constituted by a shaft 83 or the like. The linear guide shaft 83 is fixed to a support plate portion 42 c that extends in the vertical direction of the support structure 42.
[0017]
A part of FIGS. 7 to 9 and FIGS. 3 and 4 show a configuration example of an article support interval adjusting apparatus to which the present invention is applied.
This apparatus includes a servo motor 90 as a rotation drive unit, a rotation shaft 100, an external rotation transmission mechanism 110, an internal rotation transmission mechanism 120, an inner tube 62 of a lifting shaft that is an outer cylinder, and the like. The servo motor 90 is disposed outside the heat treatment chamber 3 and is installed on a support base 92 fixed to the base plate 41a of the lower structure 41 so that the position of the servo motor 90 can be adjusted, and an output shaft as an output end that generates a rotational force. 91 is provided.
[0018]
The rotating shaft 100 includes a lower shaft 101, a coupling 102, an upper shaft 103, and the like. The rotating shaft 100 extends from the outside to the inside of the heat treatment chamber 3, and is rotatable on the bottom plate 51 of the gondola 5 via the bearing structure portion 104. The lower shaft 101 serving as a rotational force input portion is provided on the outer side, and the shaft end portion 103a of the upper shaft 103 serving as a rotational force output portion is provided on the inner side.
[0019]
The external rotation transmission mechanism 110 is arranged between the output shaft 91 and the lower shaft 101 so as to transmit the rotational force of the servo motor 90 to the lower shaft 101, and is a drive attached to the output shaft 91. A gear 111, a driven gear 112 meshing with the gear 111, a rotation transmission pipe 113 fixed to the gear 111, a ball spline housing 114 fitted to the shaft end, and the like are provided. A spline groove 101a is cut in the lower shaft 101. The driven gear 112 is rotatably supported by a bearing structure 115 fixed to the base plate 41a.
[0020]
In this example, the outer tube 62 is also used as the inner tube 62 of the lifting shaft 60 of the lifting device. The inner pipe 62 is attached to the bottom plate 51 of the gondola 5 so as to surround the rotating shaft 100, and when the gondola 5 is at the most elevated position in the heat treatment chamber 3, the lower end side of the lifting shaft 60, which is one end side, is It is extended so that it may protrude outside (refer FIG. 5).
[0021]
The internal rotation transmission mechanism 120 is configured to transmit the rotational force transmitted from the upper shaft 103 to the support shaft 55 such that the opposing distance B (FIG. 4B) of the substrate receiver 58 changes. The intermediate ring 121 fitted to the shaft end 103a of the upper shaft, the swinging beam 122 fitted to this and extending to both sides in the Y direction, the connecting rod 123, the swinging arm 124, and the automatic attached to both ends of the connecting rod Aligning type bearings 125 and 126, gear 127 to which swing arm 124 is fixed, swivel shaft 52 (refer to the description of FIG. 3 and FIG. 4 hereinafter) fitted to this boss portion, intermediate member 53, swivel arm 54, etc. It is configured. Reference numerals 59a and 59b are bearings that rotatably support the turning shaft 52. The gear 127 is meshed with another gear 127 (127 ′) on the same side, which is the same gear as this, and the other swivel arm 54 ( 54 ′) is rotated in synchronization with the swivel arm 54. Although FIG. 8 shows the right internal transmission mechanism 120, a similar mechanism is provided on the left side.
[0022]
FIG. 10 shows another example of the substrate receiver.
The substrate receiver 58 'is supported by the support shaft 55 with the same structure as the substrate receiver 58 shown in FIG. 9, but the outline of the article mounting surface 58'a and most of the article position regulating surface 58'b are involute. It is a curve. As a result, the article W having the maximum width B can be supported at the initial position of the support shaft 55 as shown in the figure, and the article W ′ having the minimum width B ′ can be supported by rotating the support shaft 55 by 90 °, for example. An article having an arbitrary width can be supported at an arbitrary rotation angle.
[0023]
In this case, since the contour of the article placement surface 58′a and the article position regulating surface 58′b are involute curves, the relational expression between the rotation angle of the support shaft 55 and the article support interval is linear, and FIG. Numerical calculation for controlling the servo motor 90 shown is simplified. Involute curves are often used in machine tools and the like, and it is possible to use numerical control software for these.
[0024]
In the article support interval adjusting device of FIGS. 8 and 9, the support interval can be changed by making the substrate receiver 58 circular and supporting the center by the support shaft 55 and turning the position of the support shaft 55 by the turning arm 54. Therefore, another pivot 52 is required. When the substrate holder shown in FIG. 10 is used, the article support interval can be adjusted by directly turning the support shaft 55 by omitting the turning shaft 52 and the turning arm 54 of the external rotation transmission mechanism 120 of the adjusting device. The structure of the external rotation transmission mechanism 120 of the interval adjusting device can be simplified. In this case, although the numerical calculation is complicated, a stepped eccentric disk or the like may be used as the substrate holder.
[0025]
The heat treatment apparatus as described above is used as follows. However, when the heat treatment apparatus continuously processes the same article, the article support interval adjusting apparatus is not used. This will be described later.
Although not shown on both sides of the opening of the heat treatment apparatus, for example, a conveyor line for conveying an article such as a glass substrate is installed, and a robot or the like for transferring the article between the conveyor line and the heat treatment apparatus is provided. Arranged. In the heat treatment chamber 3, the gondola 5 is at the lowest position, and a blower, a heater, or the like in the air conditioning unit 6 is operated, and hot air heated to, for example, about 300 ° C. is between the heat treatment chamber 3 and the air conditioning unit 6. It is circulating in. In this state, although not shown, the entrances 14 to 17 are closed by a shutter, and the shutter is opened only when an article is carried in.
[0026]
First, the robot puts the article W transported by the hand from the entrance 14 and places it on the 20th stage substrate receiver 58-20, and then puts another article W from the entrance 15 to the 40th stage substrate. Place on receptacle 58-40. When the operation of the robot is finished, the servo motor 71 rotates by a certain angle, and this rotation is transmitted to the ball screw shaft 75 via the toothed pulley and the belts 72 to 74, and this rotates by a certain angle.
[0027]
As a result of this rotation, the nut 77 that is constrained to rotate integrally with the thrust transmission member 78 fixed to the lift shaft 60 is guided by the screw groove of the screw shaft 75 and has a height corresponding to one step of the substrate holder. The pitch is raised by one pitch, and the integrated lifting shaft 60 is raised by the same height. At this time, the linear guide moving body 82 fixed to the elevating shaft 60 via the linear guide connecting member 81 is guided along the linear guide shaft 83 and ascends along the linear guide shaft 83, so that the elevating shaft 60 is accurately moved in the elevating direction. Guide in the Z direction. In this way, the gondola 5 is raised by one pitch. As the gondola rises, the rotating shaft 100 of the article support interval adjusting device also rises. However, since the ball spline is used for torque transmission between the lower rotating shaft 101 and the rotation transmitting tube 113, the rotation of the ball causes Both move smoothly in the up-and-down direction.
[0028]
Next, by the same operation as described above, the robot places the article W on the substrate receivers 58-19 and 58-39 that have moved up by one pitch and reached the inlets 14 and 15. Thereafter, the raising of the gondola 5 and the loading of the articles are repeated, and when the articles are loaded on the last substrate receivers 58-1 and 58-21, the gondola 5 is lowered to the initial position. The lowering of the gondola 5 is the same as that when the gondola 5 is lifted, just by rotating the servo motor 71 in the opposite direction. The operation as described above is usually performed fully automatically by providing the control device and necessary sensors in each unit. The time for raising the gondola 5 by one pitch, that is, one tact time, is determined by the type of article, the number of article loading stages, etc. In this example, the heat treatment of the article W is completed while the gondola 5 moves 20 stages. It takes about 1 minute.
[0029]
When the gondola 5 loads the articles W on all the stages of the substrate receiver 58 and descends to the initial position, the robot on the outlet side first operates, and the article W20 of the substrate receiver 58-20 at the position of the outlet 16 is operated. Is taken out and placed on the conveyor line. When the article is taken out from the substrate receiver 58-20, the robot on the entrance side subsequently operates to place the unprocessed article W on the same substrate receiver 58-20. At this time, the robot on the outlet side is also operating, and the article W40 of the substrate receiver 58-40 at the position of the upper outlet 17 is taken out and placed on the conveyor line. When the article is taken out from the substrate receiver 58-40, the robot on the entrance side subsequently operates to place the unprocessed article W on the same substrate receiver 58-40. When the loading and unloading of the two-stage articles corresponding to the entrance / exit is completed in this way, the gondola 5 is raised by one pitch by the same operation as that for the first loading only. Then, by repeating this operation, the gondola rises to the uppermost position, and once the loading and unloading of all the articles is completed, the gondola descends again to the initial position. Done.
[0030]
In the above description, the case where the robots are respectively provided on the entrance side and the exit side has been described. However, a system in which one robot is provided for one oven, and an article is carried in and out by the one robot. May be adopted. In the above description, the operation method for loading articles while the gondola 5 ascends from the position where the gondola 5 is most lowered has been described. However, it is possible to adopt an operation method in which articles are loaded.
[0031]
The article support interval adjusting apparatus to which the present invention is applied is used when an article to be heat-treated is changed. In this case, the adjustment device is operated by detecting the size of the article automatically or by a human operation to change the support interval of the substrate holder. In this change, the servo motor 90 is rotated by an angle corresponding to the article size, and the rotational torque from the output shaft 91 sequentially, the drive gear 111, the driven gear 112, the rotation transmission tube 113, the ball spline housing 114, and a ball (not shown) And the spline groove 101a are transmitted to the oscillating beam 122 via the lower shaft 101, the coupling 102, the upper shaft 103, and the intermediate ring 121, and are oscillated by a predetermined angle, and this oscillation is sequentially connected. The gear 127 and the gear 127 (127 ′) linked to the gear 127 and the gear 127 are transmitted to the rod 123, the swing arm 124, and the gear 127, and the rotation is transmitted to the turning shaft 52. As a result, the swing arm 54 is swung, so that the interval B between the support shaft 55 and the substrate receiver 58 supported by the support shaft 55 is changed. It is carried out by. In FIG. 4A, the state in which the revolving arm 54 revolves is indicated by a two-dot chain line, and thus, a state in which articles having a minimum width up to B ′ can be loaded is illustrated.
[0032]
The heat treatment apparatus as described above has the following features.
Assuming that the height of the heat treatment chamber is H, in the heat treatment apparatus shown in FIG. 1 (a), the height of the gondola 5 is approximately 2H / 3, so that the number of articles loaded is large. On the other hand, in the conventional heat treatment apparatus, if it is arranged in the heat treatment chamber having the same height H, the height of the gondola becomes approximately H / 2. Therefore, in the heat treatment apparatus of this example, the integration rate is increased by about 4/3 times that of the conventional apparatus. Further, in the heat treatment apparatus of this example, the gondola ascending / descending stroke is almost H / 3. Therefore, when the gondola is lifted / lowered from below the heat treatment chamber, the height corresponding to H / 3, that is, H / 3 + h ( h is the required height of the up-and-down moving part etc.). On the other hand, in the conventional heat treatment apparatus, in addition to the decrease in the integration rate, this height needs to be 1 / 2H + h, and the height of the entire apparatus is further increased.
[0033]
On the other hand, when compared with an apparatus having the same number of articles loaded, in the conventional apparatus, the height of the heat treatment chamber is approximately 4H / 3, and if the gondola is moved up and down from the lower part, the lower part height needs to be 2H / 3 + h. In total, the height becomes 2H + h. This height is 2H / 3 higher than 4H / 3 + h in this example. As a result, when trying to obtain the same integration rate with a conventional heat treatment apparatus, the height limit of a normal factory is exceeded, and therefore it is often impossible to raise and lower the gondola. In this case, various advantages associated with raising and lowering the lower part cannot be obtained. Further, even when the lower part can be lifted from the height limit, the gondola becomes taller and the lifting shaft becomes longer, so that the stability is deteriorated, and there is a disadvantage that the lifting shaft must be made thicker.
[0034]
Since the elevating device raises and lowers the gondola 5 from below by the elevating shaft 60, the space occupied by the heat treatment apparatus is reduced as compared with the conventional case in which the gondola is supported from the side and the elevating device is provided at another adjacent location. can do. Then, as shown in this example, if the ball nut that transmits thrust is moved up and down in parallel with the lifting shaft 60, the distance between them is very small, so the lifting and lowering is performed at two places on the surface including the center line of the lifting shaft 60. The guide mechanism 80 that guides the motor does not take a large moment, and the structure of the lifting device is simplified and the overall rigidity is low as compared with the conventional horizontal holding type, and the weight is also large. To be reduced. In addition, the resistance of the lifting guide is reduced. In this example, the elevating shaft 60 is formed of a double pipe, but the elevating axis may be a single pipe or an appropriately reinforced one if necessary.
[0035]
Further, since the lifting shaft 60 is used for raising and lowering the gondola, the area penetrating the heat treatment chamber is extremely small as compared with the conventional one, and a contact sliding type seal can be adopted, so the sealing performance is greatly improved. To improve. In particular, in this example, since the elevating shaft 60 is a round shaft, the seal surface pressure on the entire circumference is made uniform, and the sealing performance is particularly improved. However, axes having other cross-sectional shapes such as a square shape can also be used. Also in this case, the sealing performance is significantly better than the conventional one. It should be noted that such a good seal is advantageous for heat treatment using nitrogen gas.
[0036]
Furthermore, in the present invention, since a pipe is used instead of the solid rod that is usually used for thrust transmission such as raising and lowering, the amount of heat transferred is small. Moreover, it becomes easy to put a heat insulating material in the pipe. As a result, adverse effects due to heat on the non-heat-resistant devices and sensors disposed outside the heat treatment chamber are eliminated, and the temperature distribution in the heat treatment chamber is also improved. Further, since the tube is thin, distortion due to thermal stress does not occur, and deformation of the lifting shaft and its surrounding members is prevented. In addition, since there is a space inside the double pipe or inside a single pipe with a heat insulating material attached, this space can be used as a conduction space for various mechanisms between the inside and outside of the heat treatment chamber as in this device. become.
[0037]
By adopting the gondola lowering system, all the surroundings of the gondola are free space in the heat treatment chamber, so two sides of the opposite sides are used as hot air passages and the other two sides facing each other. It is possible to form a hot air circulation system in which the side is a hot air return duct. As a result, a parallel laminar flow of hot air passes between the stacked plate-like articles, and the heat treatment performance is greatly improved as compared with the conventional gondola horizontal holding type.
[0038]
The article support interval adjusting device includes a servo motor 90 as a drive source, transmits the rotational force to the substrate support shaft 55, and drives the servo motor 90 to change the interval between the opposing substrate receivers 58. In the case of heat-treating different articles, it is only necessary to drive the motor 90, and it is possible to eliminate any setup change work. Therefore, unlike the conventional apparatus, it is not necessary to return the heat treatment chamber to room temperature when changing the size of the treated article, and the operating rate of the heat treatment apparatus is improved.
[0039]
In addition, a protective tube 62 is led from the gondola 5 that moves up and down to the outside of the heat treatment chamber, and the rotary shaft 100 is disposed therein, and a link mechanism and the like are provided in the heat treatment chamber. It can be placed in a room temperature environment outside the heat treatment chamber to avoid adverse effects due to heat. On the other hand, since the power transmission is performed by the ball spline of the shaft portion, the power transmission mechanism can follow the up-and-down movement of the gondola. However, other torque transmission means such as an involute spline or a torque transmission pin can be used. Furthermore, in this example, since the protective tube of the rotating shaft 100 is also used as the inner tube 62 of the drive shaft 60 of the lifting device, these devices are functionally configured as a whole.
[0040]
【The invention's effect】
According to the present invention, the rotation drive unit is provided, and the rotational force is transmitted to the support shaft via the external rotation transmission mechanism, the rotation shaft, and the internal rotation transmission mechanism. Therefore, by driving the rotation drive unit, The position or angle can be changed to change the spacing between the opposed article support members. Since the rotation drive unit is constituted by, for example, a servo motor or the like, it can be operated from outside the heat treatment chamber. As a result, it is possible to make the setup change work unnecessary when changing the article support interval. And unlike the conventional apparatus, it is not necessary to return the heat treatment chamber to room temperature when changing the size of the treated article, and the operating rate of the heat treatment apparatus can be improved. Furthermore, the article size can be detected and the article support interval can be automatically changed.
[0041]
Also, an outer cylinder that protrudes out of the heat treatment chamber from the lifting and lowering portion is provided, and a rotation shaft is disposed therein, and only an internal rotation mechanism including a link mechanism is provided in the heat treatment chamber. The drive unit and the external rotation transmission mechanism that are included can be arranged in a room temperature environment outside the heat treatment chamber, and adverse effects due to heat on these can be avoided. In addition, since the loading unit moves up and down, the rotating shaft also moves up and down, and torque transmission between the relative moving bodies is required between the external rotation transmission mechanism and the rotating shaft. The sliding resistance during movement can be reduced. If the elevating device is provided in the lower part of the heat treatment chamber and the elevating shaft is a tube, this can be used as an outer cylinder, and the number of parts can be reduced and the configuration of the entire apparatus can be simplified.
[Brief description of the drawings]
FIG. 1A is a front sectional view showing an example of a heat treatment apparatus to which an article support interval adjusting device of a heat treatment apparatus of the present invention is applied, and FIG. 1B is an explanatory view of another example of a heat treatment chamber.
FIG. 2 is a central sectional view in the depth direction of the heat treatment apparatus.
FIG. 3 is a front view of a gondola of the heat treatment apparatus.
4A is a plan view of the gondola, and FIG. 4B is a side view thereof.
FIG. 5 is a front view showing a lifting device portion of the heat treatment apparatus.
FIG. 6 is a plan view of the lifting device portion.
FIG. 7 is a cross-sectional view showing a configuration example of an article support interval adjusting apparatus to which the present invention is applied in the heat treatment apparatus.
8A and 8B show an internal rotation transmission mechanism portion of the adjusting device, wherein FIG. 8A is a plan view and FIG. 8B is a partial cross-sectional view.
FIG. 9 is a front sectional view of the internal rotation transmission mechanism.
FIG. 10 is a plan view showing another example of the substrate receiver.
[Explanation of symbols]
3 Heat treatment room
5 Gondola (loading section)
55 Support shaft
58 Substrate support (support member)
62 Inner pipe (outer cylinder)
90 Servo motor (rotary drive)
91 Output shaft (output end)
100 axis of rotation
101 Lower shaft (input unit)
103a Shaft end (output part)
110 External rotation transmission mechanism
120 Internal rotation transmission mechanism
W goods

Claims (1)

A rotation drive unit, a rotation shaft, an external rotation transmission mechanism, an internal rotation transmission mechanism, and an outer cylinder;
The rotational drive unit includes an output end disposed outside the heat treatment chamber of the heat treatment apparatus and generating a rotational force,
The rotating shaft extends from the outside of the heat treatment chamber to the inside of the heat treatment chamber, and is a loading portion provided in the heat treatment chamber so as to be able to move up and down so as to support a flat article. A rotational force input portion and a rotational force output portion on the inner side, and a rotational force output portion on the inner side, which are rotatably supported by a loading portion having a support shaft that supports a plurality of disposed support members;
The external rotation transmission mechanism is interposed between the output end and the input unit to transmit the rotational force of the rotation driving unit to the rotation shaft,
The internal rotational force transmission mechanism is interposed between the output unit and the support shaft, and transmits the rotational force transmitted from the output unit to the support shaft.
The outer cylinder is attached to the stacking portion so as to surround the rotating shaft, and is extended so that one end side protrudes to the outside when the stacking portion is at the most elevated position in the heat treatment chamber.
An apparatus for adjusting an article support interval of a heat treatment apparatus.

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