JP3627045B2 - Non-lubricated linear pulse motor - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a linear pulse motor that is widely used for conveying various machine elements, XY tables, and the like by converting electromagnetic thrust generated between a shaft on which a magnet is disposed and an exciting coil into straight thrust. In particular, the straight-sliding mechanism members (materials) and structure have been devised, and even with no lubrication, low friction, low wear, and a light and stable linear thrust with small operating energy can be obtained. Further, the present invention relates to a linear pulse motor that is free from deviations in the gap and that can be appropriately selected from those having an optimal sliding structure in accordance with the loaded load and that is economical in use.
[0002]
[Prior art]
Some conventional linear pulse motors have a shaft on which a magnet fixed to a base is disposed as a guide, and a carriage on which a carriage member is placed is slid along the shaft. In addition, the linear sliding is performed by rolling through balls, rollers, or rollers, or friction is made through friction bodies made of various metal alloys such as copper, aluminum, titanium, and magnesium alloys. It was done sliding.
[0003]
However, in such a case, due to the material of the sliding mechanism part, the wear resistance is not excellent, the frictional resistance and its coefficient variation are relatively large, and the function of suppressing frictional vibration accompanying the increase in the straight running speed is also excellent. Therefore, since stable and suitable friction characteristics cannot be obtained, stable operation accuracy cannot be obtained, and a large operating energy is required for operation. In addition, because of the necessity of lubricating oil, it is difficult to use where the function is degraded or damaged, and there are restrictions on the location and conditions of use. Furthermore, due to the structure of the sliding mechanism part, the shaft on which a magnet having mechanically brittle properties is disposed is operated as a guide with a direct load applied thereto. It becomes difficult to maintain a constant gap in the gap between them, and as a result, variations in the linear thrust force occur, causing abnormal wear, vibration, and noise in the sliding mechanism and shaft, resulting in stability. The accuracy of operation cannot be obtained. Furthermore, since the device has not been devised to rationalize the structure of the sliding mechanism according to the weight of the load to be loaded, it cannot be used selectively according to the load and is not economical to use. Had difficulties.
[0004]
[Problems to be solved by the invention]
This invention makes it a subject to eliminate the various difficulty accompanying the raw material and structure of the sliding mechanism part which the said prior art has. That is, stable friction characteristics with low wear and low friction can be obtained even without lubrication, and there is no deviation in the gap between the shaft on which the magnet is disposed due to aging and the exciting coil, and stable linear thrust and operation accuracy are always obtained. A non-lubricated linear pulse that does not require large operating energy for operation, and that can be selected and used with a sliding mechanism with an optimal structure according to the weight of the loaded load. An object is to provide a motor.
[0005]
[Means for Solving the Problems]
In order to achieve the above object, in particular, there is no deviation in the gap between the shaft on which the magnet is disposed due to secular change and the exciting coil, and the sliding mechanism portion has an optimum structure according to the weight of the load. In order to satisfy the requirement that it can be selectively used, the configuration described in the claims is adopted.
[0006]
First of all, a shaft on which a magnet can be arranged via a support frame along the longitudinal direction at the center of the upper surface of the base installed on the floor surface in order to cope with a heavy load mounted on the mover. The coil bobbin with the exciting coil wound around the outer surface of the cylinder is loosely fitted to the outer surface of the shaft, and a pair of the shaft bobbin is symmetrically positioned on the upper surface of the base along the longitudinal direction on both sides of the shaft. A pair of guide rails are arranged so that the coil bobbin slides along a pair of guide rails as a guide corresponding to the case where the load weight of the conveying member such as a machine element to be mounted is heavy. A V-shaped notch sliding groove is formed along the longitudinal direction on the inner surface of the coil bobbin, and a mover for mounting a conveying member such as a machine element is fixedly disposed on the upper surface of both ends of the coil bobbin. Both A sliding member having an end face triangle shape is attached to the outer side surface, and the movable body on the upper side of the coil bobbin and the upper surfaces of the pair of guide rails are fixedly disposed on the lower left and right sides of the movable body. While slidingly engaging via the upper friction body, the triangular sliding members on the outer surfaces on both sides of the coil bobbin and the V-shaped notch sliding grooves on the inner side surfaces of the pair of guide rails are connected to the triangular sliding member. It is characterized in that it is slidably engaged via a side friction body made of wood ceramics fixedly disposed on two inclined surfaces.
[0007]
Secondly, a magnet can be arranged along the longitudinal direction through the support frame at the center of the upper surface of the base installed on the floor so that the load loaded on the mover can be heavy or medium. A shaft is fixed at an appropriate height, and a coil bobbin in which an exciting coil is wound around the outer surface of the cylinder is loosely fitted on the outer surface of the shaft, and symmetrical positions of the upper surface of the base along the longitudinal direction on both sides of the shaft. A pair of guide rails are arranged opposite to each other, and the coil bobbin is slid along the pair of guide rails using the pair of guide rails as a guide corresponding to the case where the loading weight of the conveying member such as a machine element to be loaded is heavy or medium load. A pair of guide rails are formed with saddle-shaped notch sliding grooves along the longitudinal direction on the inner side surface, and a mover for mounting a conveying member such as a machine element is fixedly disposed on the upper surface of both end flanges of the coil bobbin. A wood-based porous carbon material in which rectangular sliding members are attached to both outer surfaces of both end flanges of the coil, and a movable element on the upper surface of the coil bobbin and a pair of guide rail upper surfaces are fixedly disposed on the lower surfaces on both left and right sides of the movable element The upper and lower friction bodies made of wood ceramic are slidably engaged, while the rectangular sliding members on both outer surfaces of the coil bobbin and the rectangular notched sliding grooves on the inner side surfaces of the pair of guide rails are square. The sliding member is slidably engaged via a side friction body made of the same wood ceramics fixedly disposed on the upper surface and side surface of the sliding member.
[0008]
Thirdly, in order to cope with the case where the load to be mounted on the mover is a medium load, a shaft on which a magnet can be arranged through a support frame along the longitudinal direction in the middle of the upper surface of the base installed on the floor is appropriately used. A coil bobbin having an exciting coil wound around the outer surface of the cylinder is loosely fitted on the outer surface of the shaft, and a pair of symmetrical shafts on the upper surface of the base along the longitudinal direction on both sides of the shaft. The guide rails are arranged opposite to each other, and the coil bobbins are slid along the pair of guide rails using the pair of guide rails as a guide corresponding to the case where the loading weight of the conveying member such as a machine element to be loaded is medium. A V-shaped notch sliding groove is formed along the longitudinal direction on the inner surface side, and a mover carrying a conveying member such as a machine element is fixedly disposed on the upper surface of both ends of the coil bobbin. Outside An upper part made of a wood-based porous carbon material made of wood-based porous carbon, in which a sliding member having an end face triangular shape is attached to the surface, and the mover on the upper surface of the coil bobbin and the upper surfaces of the pair of guide rails are fixedly disposed on the lower surfaces on both left and right sides of the mover While the sliding body is slidably engaged through the friction body, the triangular sliding member on the outer surface on both sides of the coil bobbin and the V-shaped notch sliding groove on the inner side surface of the pair of guide rails are inclined to the triangular sliding member. It is characterized in that it is slidably engaged through a side frictional body made of the same wood ceramics fixedly disposed on the inclined surfaces of the two inner upper surfaces.
[0009]
Fourth, in order to cope with the case where the load to be mounted on the mover is light, a shaft on which a magnet can be arranged via a support frame along the longitudinal direction at the center of the upper surface of the base installed on the floor is appropriately used. A coil bobbin having an exciting coil wound around the outer surface of the cylinder is loosely fitted on the outer surface of the shaft, and a pair of symmetrical shafts on the upper surface of the base along the longitudinal direction on both sides of the shaft. The guide rails are arranged opposite to each other, and the coil bobbins are slid along the pair of guide rails using the pair of guide rails as a guide corresponding to the case where the load weight of the conveying member such as a machine element to be mounted is light. A V-shaped notch sliding groove is formed along the longitudinal direction on the inner surface side, and a mover carrying a conveying member such as a machine element is fixedly disposed on the upper surface of both ends of the coil bobbin. Outside A triangular end face sliding member is attached to the surface, and the triangular end face sliding member on both outer surfaces of the coil bobbin and the V-shaped notch sliding groove on the inner side face of the pair of guide rails It is characterized by being slidably engaged via a side friction body made of wood ceramics of a wood-based porous carbon material fixedly disposed on the surface.
That is, in this case, unlike the heavy load or medium load described above, it is not necessary to provide friction bodies on the lower surfaces of the left and right sides of the mover and the width of the mover is made as short as possible. Accordingly, the structure of the sliding mechanism can be simplified and the number of members can be saved.
[0010]
Fifth, the upper frictional body and the side friction that are slidably engaged along the upper surface of the guide rail and the notch sliding groove on the inner surface side or along the notch sliding groove on the inner surface side of the guide rail. The body is characterized by using other plant ceramics obtained by the same production method as wood ceramics of wood based porous carbon materials, using carbon materials of plants other than wood based materials as raw materials.
[0011]
DETAILED DESCRIPTION OF THE INVENTION
An example of an embodiment of the present invention will be described with reference to the attached drawings (FIGS. 1 to 13).
[0012]
1, 2, and 3 are a front view, a plan view, and a vertical side view showing an example of an embodiment of a non-lubricated linear pulse motor according to the present invention, which is mainly used when the load is heavy. It is. Reference numeral 1 denotes a base installed on the floor surface. A shaft 2 on which a magnet is disposed along the longitudinal direction is fixed at an appropriate height by screwing through bearing support frames 3 and 3 at the center of the upper surface. It is installed. A pair of guide rails 6 and 6 having V-shaped notch sliding grooves 5 formed on the upper surface on the horizontal sliding surface 4 and the side surface on the opposite side of the shaft 1 on both sides of the shaft 2 are V-shaped notched slides. The grooves (notch recesses) 5 are arranged on the inside so as to face each other at appropriate heights by screws. The shape of the shaft 2 may be either cylindrical or rectangular. The material of the guide rails 6 and 6 is preferably a non-magnetic steel material, and a SUS304 steel material is suitable.
[0013]
On the outer surface of the shaft 2, a coil bobbin 8 in which an excitation coil 7 is wound along the longitudinal direction on the outer surface of the long cylinder is loosely fitted. At both ends of the cylindrical body of the long cylinder, rectangular attachment hooks having insertion holes for the shaft 2 are formed at the center. On the upper surfaces of both ends of the coil bobbin 8, a conveying member such as a machine element is screwed. A rectangular plate-like movable element 9 to be fixed and mounted is fixed with screws. The material of the mover 9 is used by processing an extruded product of aluminum or its alloy. As the material of the coil bobbin 8, a synthetic resin molded product which is electrically insulating is used. However, when the exciting coil 7 is completely insulated, a light alloy may be used.
[0014]
Upper friction bodies 10 and 10 are embedded and fixed on the lower surfaces of the left and right sides of the mover 9 so that the front ends protrude outward. The outer side surfaces of both end flanges of the coil bobbin 8 are in a state in which the side friction bodies 11 and 11 protrude outwardly on two V-shaped inclined surfaces (upper and lower oblique sides) of a triangular end face (triangular prism convex part). The sliding members 12 and 12 embedded and fixed by are fixed with screws. The mover 9 is slidably engaged with the upper horizontal surfaces 4 and 4 of the pair of guide rails 6 and 6 via upper friction bodies 10 and 10 fixedly disposed on the lower surfaces of the left and right sides. The coil bobbin 8 has a pair of guide rails via side friction bodies 11 and 11 fixedly disposed on two surfaces of the V-shaped convex portions of the sliding members 12 and 12 attached to the left and right sides. 6 and 6 V-shaped notch sliding grooves 5 and 5 are slidably engaged with the V-shaped recessed upper and lower two inclined surfaces along the grooves.
The upper friction body 10 and the side friction body 11 are made of wood ceramics made of a wood-based porous carbon material having a self-lubricating action. This wood ceramic has excellent friction characteristics such as excellent wear resistance, vibration suppressing function and durability, light weight, toughness, and extremely low frictional resistance. Actually, in particular, hard glassy carbon impregnated with phenolic resin is contained in woody porous carbon material such as wood at about 30%, and this is fired in a vacuum furnace at a temperature of about 800 ° C. or more. Use what you did.
[0015]
Accordingly, as shown in FIG. 10, the mover 9 having the upper friction body 10 and the side friction body 11 mounted thereon as shown in FIG. 10 and the coil bobbin 8 fixed to the lower surface thereof are provided. As shown in FIG. A pair of guide rails 6, 6 with respect to the horizontal sliding surfaces 4, 4 and the side notch sliding grooves 5, 5 via the upper frictional body 10 and the side frictional body 11 in a state of loosely fitting to the outer surface of When assembled and slidably engaged, the gap between the outer peripheral surface of the shaft 2 and the inner peripheral surface of the exciting coil 7 is set to a predetermined set value α.
[0016]
The electromagnetic thrust generated between the shaft 2 and the excitation coil 7 is converted into a linear thrust, and the coil 9 and the coil bobbin 8 equipped with the excitation coil 7 move straight along the longitudinal direction of the shaft 2. The loaded load applied to the upper and lower sliding surfaces 4 and 4 of the pair of guide rails 6 and 6 is received by the upper friction bodies 10 and 10 and may be generated on the coil bobbin 8 and the movable element 9. The vertical and lateral eccentricity and rotation of the sliding members 12 and 12 have side frictional bodies 11 and 11 and guide rails 6 disposed on the triangular (V-shaped) convex two vertical sides of the sliding members 12 and 12. The V-shaped notch sliding grooves 5 and 5 in FIG.
Therefore, the load applied to the mover 9 and the eccentric load during the operation are not applied to the shaft 2 on which the magnet is disposed, and the upper frictional body 10 and the side frictional body 11 have low wear, low friction and toughness. Since wood ceramics having an excellent vibration suppression function is used, the gap between the shaft 2 and the exciting coil 7 is always kept constant at the predetermined set value α without any risk of deviation due to secular change, and the load is heavy. Even if it is a load, the straight movement is always stable.
[0017]
When the loaded load is about a medium load, as shown in FIG. 4, the side frictional member is not disposed on the lower inclined surface of the triangular convex portion of the sliding members 12 and 12, but is disposed on the upper inclined surface. The vertical and horizontal eccentricity with respect to the movable element 9 and the coil bobbin 8 can be sufficiently achieved by sliding engagement between the friction bodies 11 and 11 and the upper inclined surfaces of the V-shaped notch sliding grooves 5 and 5 of the guide reels 6 and 6. The action and rotation action are restricted, and a stable straight movement can be obtained. The load applied to the mover 9 is received by the sliding engagement between the upper friction bodies 10 and 10 and the horizontal sliding surfaces 4 and 4 on the upper surfaces of the guide rails 6 and 6 in the same manner as described above.
[0018]
FIG. 5 shows still another embodiment corresponding to the case where the loaded load is a heavy load or a medium load. In this case, the slide in which the notch slide groove and the side frictional body of the guide rail are arranged is provided. Make the shape of the members different. That is, in this case, saddle-shaped notched sliding grooves 13 and 13 are formed on the inner side surfaces of the guide rails 6 and 6, while rectangular sliding members 14 and 14 are formed on both outer surfaces of the coil bobbin 8. The side friction bodies 11 and 11 are fixedly arranged on the upper surface and the outside of the side surface, and the side friction bodies 11 and 11 are slidably engaged with the bowl-shaped notch sliding grooves 13 and 13. The up-down and left-right eccentric operations and the rotation operations of the mover 9 and the coil bobbin 8 are restricted. The load applied to the movable element 9 is received by sliding engagement between the upper friction bodies 10 and 10 and the horizontal sliding surfaces 4 and 4 on the upper surfaces of the guide rails 6 and 6 in the same manner as described above.
[0019]
6 and 7 correspond to the case where the loaded load is light. That is, in this case, as shown in the drawing, the upper and lower inclined two surfaces in the V-shaped notch sliding grooves 5 and 5 of the guide rails 6 and 6 can be obtained without arranging the upper friction body on the lower surface of the mover 15. Due to the sliding engagement with the side friction bodies 11, 11 disposed on the two upper and lower inclined surfaces of the triangular convex portions of the sliding members 12, 12, a sufficient load is received and the upper and lower sides with respect to the mover 15 and the coil bobbin 8, It is possible to regulate the eccentric action and the rotational action in the left-right direction. Therefore, the width of the movable element 15 is made as short as possible, and the apparatus can be miniaturized.
[0020]
When the non-lubricated linear pulse motor according to the above embodiment was subjected to an operation test in comparison with the conventional apparatus, a remarkable difference between the two and a stable friction characteristic in the apparatus of the present invention were seen as shown in FIGS. It was.
As can be seen from the figure, the conventional apparatus using lubricating oil has a relatively high coefficient of friction (more than 0.2) during start-up and operation, and has a large amplitude and small friction fluctuations, which lack stability. On the other hand, the device of the present invention that does not use lubricating oil (non-lubricated) has low friction (about 0.1 to 0.15 or less) and is stable without friction fluctuation. This is because the friction body used in the apparatus of the present invention is wood ceramics, and has a friction characteristic that itself has a self-lubricating action and has a very small friction coefficient. As is apparent from FIG. 13, the device according to the present invention has a characteristic that the coefficient of friction increases slightly as the friction speed (sliding speed) increases. It also has an excellent ability to suppress vibration. Furthermore, it is excellent in wear resistance and durability on the material of wood ceramics.
[0021]
In addition, as a friction body that is disposed on the mover and the sliding member and that is slidably engaged with the notch sliding groove of the guide rail, a porous carbon of a plant other than the wood type is used instead of the above-described wood ceramics. Other plant ceramics formed by carbonizing and firing in the same manner as wood ceramics using materials such as bamboo, rice husk, rice bran, etc. may be used.
【The invention's effect】
Since the present invention has the above-mentioned configuration, it solves the various problems caused by the material and structure of the above-described sliding mechanism portion of the prior art and exhibits the following specific effects.
[0023]
In the invention according to claim 1, unlike the conventional device, the shaft on which the magnet is disposed is not used as a guide, and external forces such as a load load, an eccentric load, and a rotating action are low wear and low friction disposed on the mover and the coil bobbin. Since the upper and side friction bodies made of wood ceramics having stable friction characteristics are received and regulated (relaxation absorption) by sliding engagement with the upper and side surfaces of the guide rail, the load is applied to the shaft. The sliding mechanism and shaft are not adversely affected by abnormal wear, vibration, noise, etc., and the gap between the shaft and the exciting coil is always set without any deviation due to aging. The value can be kept constant, the electromagnetic thrust generated in the exciting coil can be converted into a stable straight thrust, and the repeated operation accuracy is good. The shaft on which this magnet is installed is not used as a sliding guide for the coil bobbin equipped with the excitation coil, but the guide rail is used as the sliding guide, so that no load is applied to the shaft and the sliding mechanism and shaft are abnormal. There is no adverse effect due to wear, vibration, noise, etc., and the gap between the shaft and the excitation coil does not cause a lag due to aging, and the gap can always be kept constant at the set value. The same can be said for the inventions according to claims 2 to 5 in that the electromagnetic thrust generated in the above can be converted into a stable straight thrust and the repeated operation accuracy is good.
In the invention according to claim 1, the V-shaped notch sliding groove of the side friction body and the guide rail provided on the inclined two surfaces of the upper friction body and the triangular end face sliding member provided on the mover. Is used to receive and restrict external forces such as loading load, eccentric load, and rotational action, so that more stable linear thrust can be obtained and repeated operation accuracy is good. This structure is suitable for use mainly when the loaded load is heavy due to the structure of the sliding mechanism.
In addition, in the inventions according to claims 1 to 4, the friction body made of wood ceramics has a property that the coefficient of friction slightly increases as the friction speed (sliding speed) increases in addition to the low wear and low friction. As a result, it is possible to reliably suppress the frictional vibration that occurs as the linear sliding speed increases. It can be maintained over time, and is suitable for durability and use. Furthermore, due to the characteristics of the material of the friction body, there is little risk of noise and rattling, there is no problem in terms of mechanical rigidity, there is no self-lubricating action, and no lubricating oil is required. Without the above constraints, it is possible to save the labor and cost of refueling equipment and its maintenance and management, and to achieve economical use and widespread use.
[0024]
In the invention according to claim 2, sliding between the upper frictional body disposed on the movable element and the side frictional body disposed on the upper and side surfaces of the rectangular sliding member and the saddle-shaped notch sliding groove of the guide rail. Since the engagement is intended to receive and restrict external forces such as a load load, an eccentric load, and a rotating action, a stable linear thrust can be obtained as in the first aspect of the invention, and repeated operation accuracy is good. Due to the structure of the sliding mechanism, this is mainly suitable for use when the load is heavy or medium.
[0025]
According to the third aspect of the present invention, the upper frictional body disposed on the movable element and the side frictional body disposed on the inclined surface of the inner upper surface of the two inclined surfaces of the triangular end face sliding member and the guide rail V The sliding engagement with the notch sliding groove accepts and regulates external forces such as loading load, eccentric load, and rotational action, so stable linear thrust can be obtained in the same way, and repeated operation accuracy is good. is there. Due to the structure of the sliding mechanism, this is mainly suitable for use when the loaded load is a medium load.
[0026]
In the invention according to claim 4, the load load is obtained by sliding engagement between the V-shaped notch sliding groove of the guide rail and the side frictional body disposed on the two inclined surfaces of the sliding member having a triangular end face. Since the external force such as eccentric load and rotational action is received and regulated, the width of the mover can be reduced as much as possible, the device can be reduced in size, and the components can be saved. Suitable for use.
[0027]
In the invention according to claim 5, other plants made of a porous carbon material of a non-woody plant having a friction characteristic similar to that of the wood ceramic as a friction body disposed on the mover or the sliding member. Since the ceramics are used, the same effects as those of the inventions according to claims 1 to 4 can be obtained.
[0028]
Furthermore, as described above, the present invention rationally selects the sliding engagement structure (sliding mechanism) by the guide rail and the friction body according to the weight of the loaded load, and is therefore optimal for it depending on the loaded load. Can be used properly, and it is economical because it eliminates waste in manufacturing and use.
[Brief description of the drawings]
FIG. 1 is a front view of an unlubricated linear pulse motor (for heavy loads) according to an embodiment of the present invention.
FIG. 2 is a plan view of the same.
FIG. 3 is a longitudinal side view of the same.
FIG. 4 is a front view of the linear pulse motor (for medium load) according to another embodiment.
FIG. 5 is a front view of the linear pulse motor (for heavy load or medium load) according to still another embodiment.
FIG. 6 is a plan view of the linear pulse motor (for light load) according to still another embodiment.
FIG. 7 is a front view of the same.
FIG. 8 is a plan view of a coil bobbin in which an exciting coil is wound around a cylindrical body.
FIG. 9 is a longitudinal side view of the same.
FIG. 10 is a front view of a mover and a coil bobbin provided with an upper friction body and a side friction body.
FIG. 11 is a front view of an assembly set with respect to a shaft on which a mover provided with a friction body, a guide rail of a coil bobbin, and a magnet are provided.
FIG. 12 is an explanatory diagram of a friction characteristic comparison experiment showing a change in a friction coefficient with respect to a friction distance of a sliding mechanism portion between the device of the present invention (non-lubricated linear pulse motor) and a conventional device.
FIG. 13 is an explanatory diagram of a friction characteristic comparison experiment showing a change in a friction coefficient with respect to the same friction speed (sliding speed).
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Base 2 Shaft 3 which magnet is arrange | positioned Support frame 4 Horizontal sliding surface 5 V-shaped notch sliding groove 6 Guide rail 7 Excitation coil 8 Coil bobbin 9 Mover 10 Upper friction body 11 Side friction body 12 Triangular sliding Member 13 Scissor-shaped notch sliding groove 14 Square sliding member 15 Movable element α Space setting value between the shaft 2 on which the magnet is disposed and the exciting coil 7

Claims (5)

A shaft on which magnets can be placed along the longitudinal direction is fixed at an appropriate height in the center of the upper surface of the base installed on the floor, and an excitation coil is wound around the outer surface of the cylinder. The mounted coil bobbin is loosely fitted, and a pair of guide rails are arranged opposite to each other on the opposite sides of the shaft along the longitudinal direction on both sides of the shaft. In order to allow the coil bobbin to slide along a pair of guide rails as a guide corresponding to the load, a V-shaped notch sliding groove is formed along the longitudinal direction on the inner side surface of the pair of guide rails. A mover for mounting a conveying member such as a machine element is fixedly disposed on the upper surface of both end flanges, and a triangular end face sliding member is attached to both outer surfaces of both end flanges of the coil bobbin. The upper surface of the movable element and the pair of guide rail upper surfaces are slidably engaged via an upper friction body made of a wood-based porous carbon material made of wood, which is fixedly disposed on the lower surfaces of the left and right sides of the movable element. Side portions made of the same wood ceramics in which the triangular sliding members on the outer surfaces on both sides of the coil bobbin and the V-shaped notch sliding grooves on the inner side surfaces of the pair of guide rails are fixedly disposed on two inclined surfaces of the triangular sliding member. An unlubricated linear pulse motor characterized by being slidably engaged via a friction body. A shaft on which magnets can be placed along the longitudinal direction is fixed at an appropriate height in the center of the upper surface of the base installed on the floor, and an excitation coil is wound around the outer surface of the cylinder. The mounted coil bobbin is loosely fitted, and a pair of guide rails are arranged opposite to each other on the opposite sides of the shaft along the longitudinal direction on both sides of the shaft. In order to allow the coil bobbin to slide along a pair of guide rails as a guide corresponding to a load or medium load, a saddle-shaped notch slide groove is formed along the longitudinal direction on the inner side of the pair of guide rails. , A mover for mounting a conveying member such as a machine element is fixedly disposed on the upper surface of both end flanges of the coil bobbin, rectangular sliding members are attached to both outer surfaces of both end flanges of the coil bobbin, and the coil While the mover on the upper surface of the bobbin and the upper surfaces of the pair of guide rails are slidably engaged via the upper friction body made of wood ceramics made of a wood-based porous carbon material fixedly disposed on the lower surfaces on both left and right sides of the mover, Side portions made of the same wood ceramics, in which the rectangular sliding members on both outer surfaces of the coil bobbin and the saddle-shaped notch sliding grooves on the inner side surfaces of the pair of guide rails are fixedly disposed on the upper surface and side surfaces of the rectangular sliding members. An unlubricated linear pulse motor characterized by being slidably engaged via a friction body. A shaft on which magnets can be placed along the longitudinal direction is fixed at an appropriate height in the center of the upper surface of the base installed on the floor, and an excitation coil is wound around the outer surface of the cylinder. The mounted coil bobbin is loosely fitted, and a pair of guide rails are arranged opposite to each other on the opposite sides of the shaft along the longitudinal direction on both sides of the shaft. In order to allow the coil bobbin to slide along a pair of guide rails as a guide corresponding to the load, a V-shaped notch sliding groove is formed along the longitudinal direction on the inner side surface of the pair of guide rails. A mover for mounting a conveying member such as a machine element is fixedly disposed on the upper surface of both end flanges, and a triangular end face sliding member is attached to both outer surfaces of both end flanges of the coil bobbin. The upper surface of the movable element and the pair of guide rail upper surfaces are slidably engaged via an upper friction body made of a wood-based porous carbon material made of wood, which is fixedly disposed on the lower surfaces of the left and right sides of the movable element. Similarly, triangular sliding members on both outer surfaces of the coil bobbin and V-shaped notch sliding grooves on the inner side of the pair of guide rails are fixedly disposed on the inclined surfaces of the inner upper surfaces of the two inclined surfaces of the triangular sliding member. A non-lubricated linear pulse motor characterized by being slidably engaged through a side friction body made of wood ceramics. A shaft on which a magnet can be placed along the longitudinal direction is fixed at an appropriate height in the center of the upper surface of the base installed on the floor, and an excitation coil is wound around the outer surface of the cylinder. The mounted coil bobbin is loosely fitted, and a pair of guide rails are arranged opposite to each other on the opposite sides of the shaft along the longitudinal direction on both sides of the shaft, so that the loading weight of transporting members such as machine elements to be mounted is light. In order to allow the coil bobbin to slide along a pair of guide rails as a guide corresponding to the load, a V-shaped notch sliding groove is formed along the longitudinal direction on the inner side surface of the pair of guide rails. A mover for mounting a conveying member such as a machine element is fixedly disposed on the upper surface of both end flanges, and end face triangular sliding members are attached to both outer surfaces of both end flanges of the coil bobbin. Wood-based porous carbon material wood in which the triangular sliding member on the outer surface of both sides and the V-shaped notch sliding groove on the inner side surface of the pair of guide rails are fixedly disposed on two inclined surfaces of the triangular sliding member An unlubricated linear pulse motor characterized by being slidably engaged through a side friction body made of ceramics. Wood as an upper frictional body and a side frictional body that are slidably engaged along the upper surface of the guide rail and the notch sliding groove on the inner surface side or along the notch sliding groove on the inner surface side of the guide rail. A plant carbon material other than that of a plant is used as a raw material, and other plant ceramics obtained by a production method similar to a wood ceramic of a wood-based porous carbon material is used. Non-lubricated linear pulse motor as described.

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