JP3633040B2 - Ink jet apparatus and manufacturing method thereof - Google Patents

Description

[0001]
[Industrial application fields]
The present invention relates to an ink ejecting apparatus and a manufacturing method thereof.
[0002]
[Prior art]
Today, instead of conventional impact printing devices, the non-impact printing devices that are expanding the market greatly have the simplest principle and are easy to achieve multi-gradation and colorization. As an example, an ink jet printing apparatus may be used. Among them, the drop-on-demand type that ejects only ink droplets used for printing is rapidly spreading due to its good ejection efficiency and low running cost.
[0003]
Typical examples of the drop-on-demand type include a Kaiser type disclosed in Japanese Patent Publication No. 53-12138 or a thermal jet type disclosed in Japanese Patent Publication No. 61-59914. Among these, the former is difficult to reduce in size, and the latter requires a heat resistance requirement for applying high heat to the ink, and each has a very difficult problem.
[0004]
As a new method for simultaneously solving the above defects, a shear mode type using a piezoelectric ceramic disclosed in Japanese Patent Application Laid-Open No. 63-247051 is proposed.
[0005]
As shown in FIG. 13, the shear mode type ink ejecting apparatus 600 includes a bottom wall 601, a top wall 602, and a shear mode actuator wall 603 therebetween. The actuator wall 603 is composed of a lower wall 607 bonded to the bottom wall 601 and polarized in the direction of arrow 611 and an upper wall 605 bonded to the top wall 602 and polarized in the direction of arrow 609. A pair of actuator walls 603 form an ink flow path 613 therebetween, and a space 615 narrower than the ink flow path 613 is formed between the next pair of actuator walls 603.
[0006]
A nozzle plate 617 having nozzles 618 is fixed to one end of each ink flow path 613, and electrodes 619 and 621 are provided as metallization layers on both side surfaces of each actuator wall 603. Each electrode 619 and 621 is covered with an insulating layer (not shown) for insulating from ink. The electrode 621 facing the space 615 is connected to the ground 623, and the electrode 619 provided in the ink flow path 613 is connected to a silicon chip 625 that provides an actuator driving circuit.
[0007]
Next, a method for manufacturing the ink ejecting apparatus 600 will be described. First, the piezoelectric ceramic layer polarized by the arrow 611 is bonded to the bottom wall 601, and the piezoelectric ceramic layer polarized by the arrow 609 is bonded to the top wall 602. The thickness of each piezoelectric ceramic layer is equal to the height of the lower wall 607 and the upper wall 605. Next, parallel grooves are formed in the piezoelectric ceramic layer by rotating a diamond cutting disk or the like to form a lower wall 607 and an upper wall 605. Then, an electrode 619 is formed on the side surface of the lower wall 607 by vacuum deposition, and the electrode layer is provided on the electrode 619. Similarly, the electrode 621 and the insulating layer are provided on the side surface of the upper wall 605.
[0008]
The ink flow path 613 and the space 615 are formed by bonding the zenith portion of the upper wall 605 and the zenith portion of the lower wall 607. Next, the nozzle plate 617 in which the nozzles 618 are formed is bonded to one end of the ink flow path 613 and the space 615 so that the nozzle 618 corresponds to the ink flow path 613, and the ink flow path 613 and the space 615 are separated. The other end is connected to silicon chip 625 and ground 623.
[0009]
Then, when the silicon chip 625 applies a voltage to the electrodes 619 and 621 of each ink flow path 613, each actuator wall 603 is deformed by a piezoelectric thickness in the direction in which the volume of the ink flow path 613 is increased, for a predetermined time. The post-voltage application is stopped, the volume of the ink flow path 613 is changed from the increased state to the natural state, pressure is applied to the ink in the ink flow path 613, and ink droplets are ejected from the nozzles 618.
[0010]
[Problems to be solved by the invention]
However, in the ink ejecting apparatus 600 having the above-described configuration, the electrodes 619 and 621 facing the space 615 are connected to the ground 623, and the electrodes 619 and 621 provided in the ink flow path 613 serve as actuator driving circuits. Although it is connected to the silicon chip 625 to be provided, the specific configuration and method of the electrical connection are not disclosed. In addition, ink does not enter the space 615 and ink is selectively filled only in the ink flow path 613, but the specific configuration and method are not disclosed. Therefore, for example, if there are 50 ink flow paths 613, 51 air chambers 615 are required, and there are 101 electrical connections between the electrodes 619 and 621, and the 101 positions are narrow pitches. Separation of connection and inflow of ink is difficult, and it takes time to complete the process, resulting in inferior mass productivity.
[0011]
The present invention has been made to solve the above-described problems, and provides an ink ejecting apparatus that can easily take out an electrode and perform highly reliable electrical connection. It is an object of the present invention to provide a manufacturing method of an ink ejecting apparatus that is excellent in mass productivity.
[0012]
[Means for Solving the Problems]
In order to achieve this object, the ink ejecting apparatus of the present invention is configured by joining a first member and a second member.WasAn actuator element;One surface of the actuator element is formed on the first member, and is formed across a plurality of first grooves sealed at one end by the second member, and the first member and the second member. , The ejection grooves for ejecting ink, which are alternately arranged with the first grooves, andThe plurality of first grooves of the actuator elementAnd the injection grooveFormed on the joint surface between the first member and the second member, one end connected to the electrode on the inner surface of the first groove, and the other end of the other actuator element. Extraction electrode extending to the surfaceAnd a manifold member connected to the injection groove of the second memberAnd have.
[0013]
Preferably,SaidThe first member includesSaid injection grooveA nozzle plate having a nozzle connected to the nozzle plate is provided.
[0014]
In addition, the first grooveBetween the jet grooveAt least a part of the side wall is made of a piezoelectric material, the electrodes are provided on both sides of the piezoelectric material to deform the side wall, and the extraction electrode is connected to an electrode on one side of the piezoelectric material. .
[0015]
In addition,A cover plate that is joined to the one surface of the actuator element and forms the ejection groove as an ink flow path and the first groove as an air chamber.Have
The other end of the extraction electrode is connected to a second electrode formed on the other surface of the actuator element, and the second electrode is connected to an electrode pattern on a substrate connected to the control unit. Is done.
[0016]
The manufacturing method of the ink ejecting apparatus of the present invention includes a plurality of first grooves.And ejection grooves for ejecting inkOn one sideAlternatelyAn actuator element having an electrode formed on the inner surface of the groove;Of the first grooveA first step of preparing a first member and a second member constituting the actuator element in a method of manufacturing an ink ejecting apparatus having an extraction electrode connected to an electrode and extending to the other surface of the actuator element; A second step of forming the first groove in the first member; a third step of forming the extraction electrode on a joint surface between the first member and the second member; and After the third step,One end of the first groove is sealed with the second memberA fourth step of joining the first member and the second member at the joining surface;After the fourth step, a fifth step of forming the injection groove across the first member and the second member between the plurality of first grooves;An electrode connected to the extraction electrode on the inner surface of the first grooveAnd an electrode on the inner surface of the injection grooveEach forming a second6And the processA seventh step of providing a manifold member connected to the injection groove of the second member;Consists of.
[0017]
Preferably,further,In the first member,The spray groove andProviding a nozzle for connection.
[0018]
Also, the aboveA cover plate that forms the ejection groove as an ink flow path and the first groove as an air chamber on the one surface of the actuator element.Join.
Furthermore, the method further includes a step of forming a second electrode connected to the extraction electrode on a surface opposite to the surface having the first groove of the actuator element.
[0019]
[Action]
In the ink ejecting apparatus according to claim 1 of the present invention having the above-described configuration, the actuator element is configured by joining the first member and the second member,A plurality of first grooves are formed in the first member, and injection grooves alternately arranged with the first grooves are formed over the first member and the second member, respectively.The electrode of the first groove is drawn out to the other surface of the actuator element via the drawing electrode formed on the joint surface between the first member and the second member, and is electrically connected to the control unit. .A manifold member is connected to the ejection groove of the second member.
[0020]
Preferably, the first memberA nozzle,Ink is supplied to the ejection groove from the common ink chamber of the manifold member.AndDepending on the voltage applied to the electrode from the extraction electrodeRiiIs injected.
[0021]
Also preferably,At least a part of the side wall between the first groove and the injection groove is made of a piezoelectric material,The side wall made of piezoelectric material is deformedInk jettedIt is.
[0022]
More preferably,A cover plate is joined to the one surface of the actuator element;Spray grooveInk flow path, first grooveThe air chamber andYouThe
Preferably, the other end of the extraction electrode is connected to a second electrode formed on the other surface of the actuator element, and a voltage is applied to the second electrode from the control unit via an electrode pattern on the substrate. Applied.
[0023]
In the method of manufacturing the ink ejecting apparatus according to claim 6, the actuator element is configured.A first groove is formed in the first member, and an injection groove disposed between the first groove is formed across the first member and the second member, and a manifold member is connected to the injection groove of the second member To do.An extraction electrode is formed on the joint surface between the first member and the second member, and the electrode is formed on the inner surface of the first groove, thereby connecting the electrode and the extraction electrode. Therefore, it is possible to easily take out the electrode and to make a reliable electrical connection with the control unit.
[0024]
Preferably,, LeeThe nozzle for injecting the ink is the first memberInProvide.
[0025]
Also,A cover plate is joined to one surface of the actuator element, and the ejection groove is formed as an ink flow path and the first groove is formed as an air chamber.To do.
[0026]
Furthermore, a second electrode connected to the extraction electrode is formed on the surface opposite to the surface having the first groove of the actuator element, and the second electrodeThrough the electrodeAllow voltage to be applied.
[0027]
[0028]
【Example】
Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
[0029]
As shown in FIG. 1, the actuator plate 101 polarized in the direction of the arrow 105 is made of a lead zirconate titanate (PZT) piezoelectric ceramic material having a thickness of 1 mm.
[0030]
A lift-off film resist film 127 having a thickness of about 30 μm is formed over the entire upper surface 103 of the actuator plate 101, and the upper surface 103 is cut by a diamond blade or the like to have a depth of 300 μm and a width of 200 μm. A plurality of grooves 108 are formed. Moreover, the partition 109 separating the grooves 108 is, for example, 200 μm wide. The groove 108 will later constitute an ink chamber in which ink is not ejected.
[0031]
On the other hand, the sealing member 102 is made of 1 mm aluminum oxide material having the same thickness as the actuator plate 101.
[0032]
An electrode having a predetermined pattern is formed on the sealing member 102, and as shown in FIG. 1, the side surface 110 has a width of 80 μm and the side surface 110 and the bottom surface from the first ridge line 113 related to the top surface 111 and the side surface 110. A first electrode 115 extending to the second ridge line 114 according to 112 and a resist layer having a width of 120 μm and extending from the first ridge line 113 to the second ridge line by a length of 150 μm, and a metal film of the same size coated thereon; 1 composite layers 116 are alternately formed. In addition, the top surface 111 of the sealing member 102 has a width that spans all the extraction electrodes 115 and the first composite layer 116, and a third ridge line from the first ridge line to the top surface 111 and the back surface. A second composite layer 117 covered with a metal film of the same size is formed on a resist layer extending to the ridge line with a length of 100 μm. Furthermore, full-surface electrodes are formed on the lower surface 112 and the rear surface.
[0033]
Here, a method for producing an electrode pattern formed on the sealing member 102 will be described with reference to FIGS.
[0034]
First, a photoresist film is formed on the side surface 110 and the upper surface 111 of the sealing member 102 made of an aluminum oxide material. For example, a resist for lift-off (AZ5214E) manufactured by Hoechst is used to uniformly form a resist film 118 having a thickness of about 2.0 μm by a spray method, and baking is performed at 90 ° C. for 30 minutes in a clean oven. Next, as shown in FIG. 2A, an exposure 119 of about 15 mJ in accumulated illuminance is applied to the side surface 110 through a glass mask 120 in which shielding portions 122 having a width of 80 μm and transmission portions 121 having a width of 120 μm are alternately arranged. To do. In practice, the mask and the substrate are brought into close contact during exposure, but they are shown separated from each other for easy understanding. Further, the entire upper surface 111 is exposed without using a mask.
[0035]
After exposure, baking is performed at 115 ° C. for 30 minutes in the same clean oven. Thereafter, when development is performed with a dedicated developer, the transmissive portion 121 of the mask, that is, the portion irradiated with light on the resist becomes insoluble in the developer and remains on the substrate to become the remaining portion 124, and the other portions Is dissolved and removed in the developing solution to form a removal portion 123. Through this series of steps, an overhang-shaped photoresist pattern effective for lift-off as shown in FIGS. 2B and 3A can be produced.
[0036]
The upper surface 111, the side surface 110, the lower surface 112, and the back surface of the sealing member 102 with the photoresist pattern are each deposited in an order of chromium (Cr), nickel (Ni), and gold (Au) by vapor deposition. The metal film 125 is formed to have a thickness of 05 μm, 0.5 μm, and 0.2 μm. Thereafter, the sealing member 102 is immersed in an organic solvent or the like to remove the remaining portion 124 of the resist. However, before removal, as shown in FIGS. 2C and 3C, a part of the upper surface 111 (100 μm from the first ridge line 113 to the third ridge line) and a part of the side surface 110 (the first ridge line). A low adhesive tape 126 is applied so as to cover 150 μm from the ridge line 113 to the second ridge line. Then, the remaining portion 124 of the photoresist other than the portion covered with the low adhesive tape 126 is removed together with the metal film 125 formed on the upper layer.
[0037]
Finally, when the low-adhesive tape 126 is peeled off, the extraction electrode 115 and the first composite layer 116 are alternately formed on the side surface 110 as shown in FIGS. 2 (d) and 3 (d). The sealing member 102 having the second composite layer 117 formed on the upper surface 111 is completed.
[0038]
Note that the photoresist used may be the one on the film in addition to the liquid listed in the above example, and the material of the sealing member 102 is low in raw material cost in the above example. Although certain aluminum oxide is used, other ceramic materials, glass, silicon, etc., including PZT, which is the same material as the actuator plate 101, may be used.
[0039]
Subsequently, as shown in FIG. 4, the sealing member 102 and the actuator plate 101 are configured such that the top surface 111 of the sealing member 102 and the top surface 106 of the actuator plate 101 are in the same plane, and the side surface of the sealing member 102. The side surface 110 of the sealing member 102 and the one end surface 106 of the actuator plate 102 are epoxy-based so that the first composite layer 116 formed on the 110 corresponds to the groove 108 formed on the actuator plate 101 on a one-to-one basis. It joins via an adhesive agent (not shown).
[0040]
Thereafter, a plurality of injection grooves 128 having a depth of 300 μm and a width of 80 μm, for example, are formed at the center position of the partition wall 109 separating the adjacent grooves 108 by cutting with a diamond blade or the like. The ejection groove 128 extends from one end of the actuator plate 101 to the end of the sealing member 102. As described above, the actuator element 100 including the ejection grooves 128 serving as the ink flow paths for ejecting ink droplets and the grooves 108 serving as the air chambers are alternately arranged, and includes the side wall 129 made of PZT polarized in the thickness direction. Is formed.
[0041]
Subsequently, a metal conductive film 130 as shown in FIG. 5 is formed on the surface of the actuator element 100 by a technique such as vapor deposition. At this time, as shown in FIG. 7, the deposition direction has a predetermined angle with the arrangement direction of the grooves 108 and 128 so that the deposition metal 131 is not deposited on the shadowed portion of the side wall 129. To. Thereby, partial vapor deposition can be performed on the side wall 129 without performing masking. By utilizing this, the metal conductive film 130 is formed only on the upper half of the side wall 129 constituting the injection groove 128. By performing this in two steps, left and right in the figure, the metal conductive film 130 is formed on all the side walls 129, the upper surface 103 and the side surfaces of the actuator element 100.
[0042]
Further, by this vapor deposition, the metal conductive film 130 formed on the side wall 129 constituting the groove portion 108 and the extraction electrode 115 formed on the side surface 106 of the sealing member 102 are electrically connected. Similarly, the metal conductive layer 107 is formed on the entire lower surface 104 of the actuator element 100 by a technique such as vapor deposition.
[0043]
In the vapor deposition step, if the groove 108 is set wider than the injection groove 128, the metal conductive film 130 is formed over the entire inner surface of the groove 108 on the side wall 129, but the width of the groove 108 is reduced to the injection groove 128. If the width is set to be less than four times the width of the groove 108, a portion not formed on the bottom 140 of the groove 108 remains, and the two metal conductive films 130 formed on the pair of side walls 129 constituting the groove 108 do not conduct. .
[0044]
Subsequently, the actuator element 100 is immersed in an organic solvent or the like, and the film resist film 127 formed on the upper surface 103 of the actuator plate 101 and the second surface formed on a part of the upper surface 111 of the sealing member 102. The composite layer 117 and the first composite layer 116 formed on the side surface 110 of the sealing member 102 are removed together with the metal conductive film 130 formed on each upper surface.
[0045]
As a result, the metal conductive film 130 is divided into a ground electrode 131 formed in the ejection groove 128 and a drive electrode 132 formed in the groove 108 as shown in FIG. The ground electrode 131 is electrically connected to the metal conductive layer 107 formed on the lower surface 104 of the actuator element 100 via an electrode formed on the upper surface 111 of the sealing member 102 and an electrode formed on the rear surface. The drive electrode 132 is also electrically connected to the metal conductive layer 107 via the extraction electrode 115 formed on the sealing member 102. That is, at this stage, the ground electrode 131 and the drive electrode 132 are electrically connected in the metal conductive layer 107.
[0046]
Subsequently, as shown in FIG. 8, a plurality of first electrode separation grooves 138 having a depth of 30 μm and a width of 100 μm are formed on the lower surface 104 of the actuator element 100 at positions corresponding to the grooves 108 formed on the upper surface 103. A second electrode separation groove 139 having a depth of 30 μm and a width of 100 μm is formed on the lower surface 112 of the sealing member 102 so as to straddle all the first electrode separation grooves 138 on the lower surface 112 of the sealing member 102. These are formed by cutting with a diamond blade. Accordingly, the metal conductive layer 107 formed on the lower surface 104 of the actuator element 100 is electrically connected to the driving electrode 135 electrically connected to the extraction electrode 115 and the ground electrode 131, and It is divided into a ground electrode 136 that is not electrically connected to the drive electrode 135.
[0047]
Next, as shown in FIG. 9, the cover plate 144 is bonded to the upper surface of the actuator element 100 via an adhesive layer (not shown). As a result, the ejection groove 128 becomes the ink flow path 149, and the groove 108 becomes the air chamber 148. Subsequently, the substrate 141 on which the drive electrode pattern 142 and the ground electrode pattern 143 are formed and the lower surface 104 of the actuator element 100 are bonded. At this time, the drive electrode pattern 142 and the drive electrode 135 are joined together electrically and mechanically by a method such as soldering, and the ground electrode pattern 143 and the ground electrode 136 are joined together. Further, the manifold member 145 is bonded to the end face of the sealing member 102 constituting the actuator element 100 through an adhesive layer (not shown).
[0048]
In the actuator element 100, a nozzle plate 146 provided with a nozzle 147 at a position corresponding to the position of each injection groove 128 is disposed on an end surface on the opposite side to the surface where the manifold member 145 is joined via an adhesive layer (not shown). Glued together. The nozzle plate is made of a plastic such as polyalkylene (for example, ethylene) terephthalate, polyimide, polyetherimide, polyetherketone, polyethersulfone, polycarbonate, or cellulose acetate.
[0049]
Through the above steps, the actuator element 100 becomes the ink ejecting apparatus 200 including a plurality of ink flow paths 149, side walls 129 having electrodes and at least a portion made of piezoelectric ceramics, and air chambers 148. Here, since the air chamber 148 is surrounded by the sealing member 102, the nozzle plate 146, and the cover plate 144, ink easily enters only into the manifold member 145 and the ink flow path 149, and enters the air chamber 148. There is no ink.
[0050]
Next, the configuration of the control unit of this embodiment will be described with reference to FIG. 10 showing a block diagram of the control unit. As shown in the figure, the drive electrode patterns 142 on the substrate 141 are individually connected to the LSI chip 51, and the clock line 52, the data line 53, the voltage line 54 and the ground line 55 are also connected to the LSI chip 51. ing. The ground electrode 112 that is electrically connected to all the ground electrodes 131 in the ink flow path 149 is connected to the earth line 55. The LSI chip 51 determines which nozzle 147 should eject ink droplets from the data appearing on the data line 53 based on the continuous clock pulses supplied from the clock line 52. Then, the LSI chip 51 applies the voltage V of the voltage line 54 to the drive electrode pattern 142 that is electrically connected to the drive electrode 132 corresponding to the ink flow path 149 to be driven, and the ink flow path 149 other than the ink flow path 149 is applied. The earth line 55 is connected to the drive electrode pattern 142 that is electrically connected to the corresponding drive electrode 132 and grounded.
[0051]
Next, the operation of the ink ejecting apparatus 200 according to the manufacturing method of this embodiment will be described with reference to FIGS. In order to eject ink droplets from the ink flow path 149b shown in FIG. 11, a voltage pulse is applied to the corresponding drive electrodes 132d and 132e. This means applying a voltage to the electrode 132 and grounding the drive electrode 132 not designated). Then, as shown in FIG. 12, an electric field in the direction of arrow 202 is generated on the side wall 129c, an electric field in the direction of arrow 201 is generated on the side wall 129d, and the side walls 129c and 129d are separated from each other by the piezoelectric thickness slip effect. It moves to. Then, the volume of the ink flow path 149b increases, and the pressure in the ink flow path 149b including the vicinity of the nozzle 147b decreases. As a result, ink is supplied to the ink flow path 149b from the ink supply source (not shown) into the ink flow path 149b via the manifold 145.
[0052]
Next, the application of the drive voltage is stopped to reduce the volume of the ink flow path 149b from the increased state to the natural state, and the ink in the ink flow path 149b becomes an ink droplet and is ejected from the nozzle 47b.
[0053]
In the above embodiment, first, a drive voltage is applied in the direction in which the volume of the ink flow path 149b increases to supply ink to the ink flow path 149b, and then the application of the drive voltage is stopped to stop the ink flow path 149b. The ink volume was reduced to a natural state and ink droplets were ejected. First, a drive voltage was applied so that the volume of the ink channel 149b was decreased, and the ink in the ink channel 149b was ejected as ink droplets. Then, the application of the drive voltage may be stopped, the volume of the ink flow path 149b may be increased from the reduced state to the natural state, and ink may be supplied to the ink flow path 149b.
[0054]
As described above, according to the manufacturing method of the present embodiment, the ink ejecting apparatus 200 forms the film resist film 127 and then cuts the grooves 108 to form the partition plate 109 on the actuator plate 101 by the photoresist method. After the sealing member 102 made of an aluminum oxide material on which the extraction electrode 115 is formed is joined and the injection groove 128 is formed in the partition wall 109 by cutting, the driving electrode is respectively formed on the inner surface of the groove 108 and the inner surface of the injection groove 128. 132, a metal layer is formed on the ground electrode 131 by vapor deposition or the like, and the driving electrode 135 and the ground electrode 136 that are electrically connected to the electrodes 132 and 131 are joined to the substrate 141 electrically and mechanically through solder. It is produced by doing. Thus, since it is manufactured only by performing cutting, photoresist processing, and metal film formation, it is excellent in mass productivity.
[0055]
Further, the sealing member 102 of the ink ejecting apparatus 200 of this embodiment also has a function of preventing ink from entering the air chamber 148. Furthermore, the drive electrodes 135 that are electrically connected to the drive electrodes 132 can be formed with a wider pitch than in the prior art. Therefore, electrical connection with the electrode pattern 142 formed on the substrate 141 is easy, and reliability is improved.
[0056]
Further, in the ink ejecting apparatus 200 of the present embodiment, since there is one bonding portion of the side wall 129, the energy loss of the bonding portion is small. Further, since the air chamber 148 is filled with air, the side wall 129 can be easily deformed, and the voltage can be low.
[0057]
In addition, this invention is not limited to the said Example, A various change is possible in the range which does not deviate from the meaning. Of course, the same applies to the dimensions of the respective parts given in the above embodiments.
[0058]
For example, in the manufacturing process of the ink ejecting apparatus of the above embodiment, the metal conductive layer 107 is formed by performing vapor deposition on the lower surface 104 of the actuator element 100, but the lower surface 112 of the sealing member 102 is in contact with the substrate 141. The metal conductive layer 107 is not necessarily required as long as the connection is wide enough to cause no problem.
[0059]
【The invention's effect】
As described above, in the ink ejecting apparatus of the present invention, the actuator element is configured by joining the first member and the second member,A plurality of first grooves are formed in the first member, and injection grooves arranged alternately with the first grooves are formed over the first member and the second member, respectively, and a manifold is formed in the injection groove of the second member. The members are connected. AlsoSince the electrode of the first groove is drawn to the other surface of the actuator element through the lead electrode formed on the joint surface between the first member and the second member, the electrical connection between the electrode and the control unit Connection becomes easy.
[0060]
In the manufacturing method, an actuator element is configured.A first groove is formed in the first member, and an injection groove disposed between the first groove is formed across the first member and the second member, and a manifold member is connected to the injection groove of the second member To do.Since the extraction electrode is formed on the joint surface between the first member and the second member, and the electrode is formed on the inner surface of the first groove, the electrode and the extraction electrode are connected. Can be easily taken out, and a reliable electrical connection with the control unit becomes possible.
[Brief description of the drawings]
FIG. 1 is a perspective view illustrating a manufacturing process of an ink ejecting apparatus according to an embodiment of the invention.
FIG. 2 is an explanatory diagram illustrating an electrode pattern forming process according to the ink ejecting apparatus.
FIG. 3 is a perspective view illustrating an electrode pattern forming process according to the ink ejecting apparatus.
FIG. 4 is a perspective view illustrating a manufacturing process of the ink ejecting apparatus.
FIG. 5 is a perspective view illustrating a manufacturing process of the ink ejecting apparatus.
FIG. 6 is a perspective view illustrating a manufacturing process of the ink ejecting apparatus.
FIG. 7 is a cross-sectional view illustrating a manufacturing process of the ink ejecting apparatus.
FIG. 8 is a perspective view illustrating a manufacturing process of the ink ejecting apparatus.
FIG. 9 is an explanatory diagram illustrating a configuration of the ink ejecting apparatus.
FIG. 10 is a block diagram illustrating a control unit of the ink ejecting apparatus.
FIG. 11 is an explanatory diagram showing an operation of the ink ejecting apparatus.
FIG. 12 is an explanatory diagram showing an operation of the ink ejecting apparatus.
FIG. 13 is a diagram illustrating a conventional ink ejecting apparatus.
[Explanation of symbols]
100 Actuator element
101 Actuator plate
102 Sealing member
105 Polarization direction
115 Extraction electrode
129 side wall
131 Ground electrode
132 Drive electrode
135 Driving electrode
136 Grounding electrode
144 Cover plate
145 Manifold member
148 Air chamber
149 ink flow path
200 Ink ejection device

Claims (9)

An actuator element formed by joining a first member and a second member;
A plurality of first grooves formed in the first member on one surface of the actuator element and sealed at one end by the second member;
An ejection groove for ejecting ink, which is formed across the first member and the second member, and is arranged alternately with the first groove;
Said plurality of first grooves and formed in said inner surface of the injection groove electrode of the actuator element,
An extraction electrode formed on a joint surface between the first member and the second member, one end connected to an electrode on the inner surface of the first groove, and the other end extending to the other surface of the actuator element; ,
An ink ejecting apparatus comprising: a manifold member connected to the ejection groove of the second member . The ink ejecting apparatus according to claim 1, wherein the first member is provided with a nozzle plate having a nozzle connected to the ejection groove . At least a part of a side wall between the first groove and the injection groove is made of a piezoelectric material, and the electrodes are provided on both sides of the piezoelectric material to deform the side wall;
The extraction electrode, the ink jet apparatus according to claim 1 or 2, characterized in that it is connected to one side electrode of the piezoelectric material. Is joined to the one surface of the actuator element, said ejection groove ink flow path, said first groove to any one of claims 1, characterized by further comprising a cover plate formed as an air chamber 3 of The ink ejecting apparatus according to the description. The other end of the extraction electrode is connected to a second electrode formed on the other surface of the actuator element, and the second electrode is connected to an electrode pattern on a substrate connected to the control unit. The ink ejecting apparatus according to claim 1. Actuator elements having a plurality of first grooves and ejection grooves for ejecting ink alternately on one surface, electrodes formed on the inner surfaces of the grooves, and the actuator elements connected to the electrodes of the first grooves In the manufacturing method of an ink ejecting apparatus having an extraction electrode extending to the other surface of
A first step of preparing a first member and a second member constituting the actuator element;
A second step of forming the first groove in the first member;
A third step of forming the extraction electrode on the joint surface between the first member and the second member;
After the third step, a fourth step of joining the first member and the second member at the joining surface so as to seal one end of the first groove with the second member;
After the fourth step, a fifth step of forming the injection groove across the first member and the second member between the plurality of first grooves;
A sixth step of forming, on the inner surface of the first groove, an electrode connected to the extraction electrode , and an electrode on the inner surface of the ejection groove ;
And a seventh step of providing a manifold member connected to the ejection groove of the second member . The method for manufacturing an ink ejecting apparatus according to claim 6 , further comprising a step of providing a nozzle connected to the ejection groove in the first member. 8. The ink ejecting apparatus according to claim 6 , wherein a cover plate that forms the ejection groove as an ink flow path and the first groove as an air chamber is joined to the one surface of the actuator element. 9. Manufacturing method. 9. The method according to claim 6 , further comprising forming a second electrode connected to the extraction electrode on a surface opposite to the surface having the first groove of the actuator element. method of manufacturing an ink jet apparatus according to any.

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