JP3645697B2 - Inkjet recording head - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an inkjet recording head that performs printing by discharging ink in an ink chamber and a method for manufacturing the same.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, recording apparatuses having functions such as printers, copiers, and facsimiles have been provided with a recording head for recording image information on recording paper. In recent years, ink jet recording heads have been used as the recording head. Yes.
[0003]
For example, the ink jet recording head 31 shown in FIG. 3 includes a plurality of partition walls 34 forming an ink chamber 35 between a first flat plate 33 and a second flat plate 32 facing each other. 34 is integrally formed of piezoelectric ceramics, and there are some provided with drive electrodes 36 on both side surfaces of the partition wall 34. Then, the drive electrode 36 is energized to displace the partition 34 made of piezoelectric ceramics, thereby increasing the pressure in the ink chamber 35 and discharging the ink from the nozzle 38 communicating with the ink chamber 35. (Refer to Unexamined-Japanese-Patent No. 9-1794).
[0004]
In addition, in the case where the partition wall 34 is formed of piezoelectric ceramics, the polarity gradually deteriorates and the ink ejection characteristics are lowered. Therefore, in some cases, a polarization electrode is provided to suppress the deterioration of the polarity. In the ink jet recording head 31 shown in FIG. 3, the second flat plate 32 is formed of a metal plate, and the metal plate is joined to the lower surface of the first flat plate 33 so as to function as electrodes 37 and 37 ′ for polarization. It was like that.
[0005]
[Problems to be solved by the invention]
Incidentally, the ink jet recording head is required to have a smaller product, higher density and higher accuracy. For example, the width of the partition wall 34 of the recording head 31 is required to be manufactured on the order of several tens of μm.
[0006]
However, in the manufacturing process of the ink jet recording head 31 shown in FIG. 3, when the partition wall 34 is formed on the first flat plate 33, the ink chamber 35 is formed by punching out the ceramic green sheet with a mold. It was extremely difficult to form the partition walls 34 at 33 with high density and high accuracy. That is, the partition wall 34 is manufactured with high density and high accuracy because of sheet cutting when the ceramic green sheet is punched with a mold or misalignment when the second flat plate 32 is laminated. I could not.
[0007]
In addition, it is difficult to produce such a small mold for punching at a high density, and it is also necessary to perform regular mold maintenance, which causes a cost increase.
[0008]
Even if the sheets can be stacked without causing sheet breakage, there is a problem in that the holes of the stacked sheets are displaced and the flow of ink flowing therethrough is obstructed. Yield was poor when punched with a mold.
[0009]
Furthermore, since the piezoelectric ceramics are liable to be chipped or cracked, there is a risk of damage if the first flat plate 33 of the recording head 31 is hit during handling.
[0010]
Therefore, it is conceivable to form the first flat plate 33 of the recording head 31 from an insulating ceramic such as alumina. In this case, the partition wall 34 and the first flat plate 33 are manufactured separately, and both side surfaces of the partition wall 34 are formed. The drive electrode 36 and the polarization electrode 37 formed on the lower surface are bonded to the first flat plate 33 at a predetermined interval by bonding or the like.
[0011]
However, with such adhesion, the partition walls 34 could not be formed with high density and accuracy on the small first flat plate 33. In addition, there is a risk that ink leakage may occur if it is not completely bonded without a gap.
[0012]
In addition, as in the ink jet recording head 31 shown in FIG. 3, it is difficult to manufacture the drive electrodes 36 on both side surfaces of the partition wall 34 formed integrally with the first flat plate 33. Since it is connected to a driving circuit provided outside the ink chamber 35, it is very difficult to draw the ink chamber 35 out of the ink chamber 35.
[0013]
[Means for Solving the Problems]
Therefore, in view of the above problems, the present invention arranges a plurality of partition walls made of piezoelectric ceramics constituting an ink chamber between a first flat plate and a second flat plate facing each other, and drive electrodes on both side surfaces of the partition walls. An ink jet recording head configured to pressurize the ink chamber by energizing the drive electrode to displace the partition wall and discharge ink from a nozzle communicating with the ink chamber; Made of ceramics, the surface is applied with polarization voltage to the partition Bulkhead One electrode for polarization Between the partition and the first plate Buried And extend outside the bulkhead In this state, the partition wall is sintered and integrated, A lead-out electrode is provided at the bottom of the ink chamber formed between the partition walls and is connected to the drive electrode and led out from the ink chamber to the outside of the ink chamber. The second flat plate itself Bulkhead Use the other electrode for polarization or on the upper surface of the partition wall Bulkhead The other electrode for polarization is provided.
[0014]
The present invention also includes a first step of filling a slurry made of a piezoelectric ceramic powder, a solvent, and an organic additive into a molding die formed with a plurality of recesses for partition walls,
A ceramic first flat plate provided with a band-shaped electrode in advance is prepared separately, and the slurry is cured after the first flat plate is pressed against the forming die in the first step, and then integrally fired. A second step of fabricating a first flat plate having a fine groove in which the strip-shaped electrode is embedded between the barrier rib and the first flat plate by sintering and integrating the first flat plate having the barrier rib;
After forming drive electrodes on at least both side surfaces of the partition wall, a conductive second plate is joined to the first plate so as to close the fine groove, or drive electrodes are respectively formed on at least both side surfaces of the partition wall. The inkjet recording head is manufactured from the third step of forming the electrode on the upper surface of the partition wall and then joining the second flat plate so as to close the fine groove.
[0015]
Further, according to the present invention, a plurality of partition walls made of piezoelectric ceramics constituting an ink chamber are arranged between a first flat plate and a second flat plate facing each other, and drive electrodes are formed on both side surfaces of these partition walls. In the ink jet recording head in which an ink chamber is pressurized by energizing the drive electrode to displace the partition, and ink is ejected from a nozzle communicating with the ink chamber, the partition is formed on the surface of the first flat plate. Are connected and integrated at substantially equal intervals, and a lead-out electrode is provided at the bottom of the ink chamber formed between the partition walls so as to conduct to the drive electrode and lead out from the ink chamber to the outside of the ink chamber.
[0016]
In the present invention, piezoelectric zirconate titanate, lead magnesium niobate, lead nickel niobate, lead manganate niobate, lead titanate, lead antimony stannate, lead zinc niobate are used as piezoelectric ceramics forming the partition walls. Among them, ceramics mainly composed of one or more of them can be used, and as the first flat plate or the second flat plate integrated with the partition wall by sintering or bonding, alumina, zirconia, magnesia, silicon nitride, nitride Ceramics based on either aluminum or silicon carbide, or lead zirconate titanate, lead magnesium niobate, lead nickel niobate, lead manganese niobate, lead titanate, lead antimony stannate, lead zinc niobate Among them, ceramics mainly composed of one or more types can be used.
[0017]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1A is an exploded perspective view showing an embodiment of the ink jet recording head of the present invention, and FIG. 1B is a sectional view taken along line XX of FIG.
The ink jet recording head 1 includes a plurality of partition walls 4 constituting an ink chamber 5 arranged between a first flat plate 3 and a second flat plate 2 facing each other, and the partition walls 4 are piezoelectrically polarized in the vertical direction. The first flat plate 3 is formed of insulating ceramics or piezoelectric ceramics. The second flat plate 2 is made of a conductive material such as metal or conductive ceramic, and has a function as a polarization electrode 7 ′ for applying a polarization voltage to the piezoelectric ceramic forming the partition 4.
[0018]
The first flat plate 3 is provided with the other polarizing electrode 7 paired with the polarizing electrode 7 ′ at equal intervals along the longitudinal direction of the first flat plate 3. The partition wall 4 is sintered and integrated with the first flat plate 3 so as to cover 7, and the electrode 7 is embedded between the partition wall 4 and the first flat plate 3. The polarization electrode 7 extends outside the partition wall 4 and is connected to a polarization circuit 12 disposed at the rear of the first flat plate 3.
[0019]
Further, a lead-out electrode 8 extending from the inside of the ink chamber 5 to the outside of the ink chamber 5 is laid between the partition walls 4 of the first flat plate 3, and the first electrode 3 extends from the side surface of the partition wall 4 constituting the inner wall surface of the ink chamber 5. The surface of one flat plate 3 is coated with a conductive film 18 so as to cover the lead-out electrode 8, and the conductive film 18 coated on both sides of the partition wall 4 is used as the drive electrode 6. The lead-out electrode 8 extending outside the ink chamber 5 is connected to a drive circuit 11 disposed at the rear portion of the lower flat plate 3.
[0020]
In order to drive the ink jet recording head 1, when the drive electrodes 6 formed on both side surfaces of the partition wall 4 are energized, the polarization direction of the piezoelectric ceramic forming the partition wall 4 and the direction of the applied electric field are orthogonal to each other. Therefore, the partition wall 4 can be displaced left and right without causing a dimensional change in the height direction. As a result, the pressure in the ink chamber 5 can be increased, and ink can be ejected from the nozzles 9 communicating with the ink chamber 5.
[0021]
In addition, even if the polarization polarity of the piezoelectric ceramic forming the partition wall 4 is deteriorated and the ink ejection characteristics are lowered, the polarization polarity is deteriorated by applying a constant voltage between the polarization electrodes 7 and 7 '. Since the ink can be recovered, stable ink ejection characteristics can be obtained even when driven for a long time.
[0022]
Further, according to the present invention, the conductive film 18 coated on the inner wall surface of the ink chamber 5 is used as the drive electrode 6, and the drive electrode 6 is energized via the lead-out electrode 8, and the lead-out electrode 8 and the polarization are supplied. Since the first electrode 7 is formed on the same plane of the first flat plate 3, it can be easily taken out of the ink chamber 5 and can be easily conducted to the drive circuit 11 and the polarization circuit 12. Therefore, the structure of the recording head 1 can be simplified and further miniaturized.
[0023]
Further, since the partition wall 4 and the first flat plate 3 are integrated with each other by sintering, there is no fear of ink leakage, and the recording head 1 having sufficient bonding strength can be manufactured. In particular, when the first flat plate 3 is formed of an insulating ceramic, the recording head 1 is less likely to be broken and hardly broken even if it is bumped during handling.
[0024]
As a method for manufacturing such an ink jet recording head 1, first, as shown in FIG. 2A, a forming die 15 having a plurality of partition wall recesses 15 a that match the shape of the partition wall 4 is prepared. As a material for forming the partition walls 4 in the partition recesses 15a, a slurry 16 of a piezoelectric ceramic powder, a solvent, and an organic additive is filled.
[0025]
On the other hand, a first flat plate 3 made of insulating ceramics or piezoelectric ceramics is separately prepared, and an electrode 7 for polarization and a lead electrode 8 for energizing the drive electrode 6 are provided on the first flat plate 3 by screen printing. Each is laid at a predetermined position. Then, the molded body 17 of the slurry 16 is joined to the first flat plate 3 on which the electrode 7 (including the lead-out electrode 8) is previously formed, and then fired, whereby the partition wall 4 and the first flat plate 3 are sintered integrally. A first flat plate having a fine groove formed is manufactured.
[0026]
Specifically, as shown in FIG. 2B, the molding is performed in a state in which the positions of the partition wall recesses 15 a of the molding die 15 and the polarization electrodes 7 formed in advance on the first flat plate 3 are aligned. The first flat plate 3 is pressed against the surface of the slurry 16 filled in the mold 15 and pressure-bonded, and the slurry 16 is reaction-cured or dried and solidified. Thereafter, as shown in FIG. 2C, the mold 15 is released, so that each electrode 7 on the first flat plate 3 is covered with the molded body 17 of the slurry 16 that forms the partition wall 4, and the molded body 17. Is formed on the first flat plate 3, and then the binder is subjected to a binder removal treatment and then baked, so that the partition 4 and the first plate are formed as shown in FIG. The first flat plate 3 having a fine groove in which the flat plate 3 is sintered and integrated, and the polarization electrode 7 is embedded between the partition wall 4 and the first flat plate 3 can be obtained.
[0027]
As another method for manufacturing the first flat plate 3 having the fine grooves, the molding die 15 is formed of an organic material or a resin such as silicon rubber, and the molding die 15 is not released in the manufacturing method. You may bake with the said conjugate | zygote. In this case, the shape of the molded body 17 made of the slurry 16 can be baked while being held by the mold 15 and the mold 15 is burned off during firing, so that the partition 4 with higher accuracy is manufactured. be able to.
[0028]
According to these methods, since the partition 4 can be formed easily, the manufacturing process can be greatly simplified. Further, since the shape of the partition wall recess 15a of the mold 15 is transferred as it is in the fine groove formed between the partition wall 4 and the partition wall 4, the shape and pitch width of the partition wall recess 15a are precisely processed to a predetermined accuracy. Thus, the high-precision partition walls 4 can be integrally formed on the first flat plate 3 with high density. In addition, since the first flat plate 3 is made of pre-sintered ceramics, the pre-formed electrode 7 is not deformed during firing.
[0029]
Furthermore, since the electrode 7 for polarization and the lead-out electrode 8 for energizing the drive electrode 6 can be formed on the same plane of the first flat plate 3, respectively, it is easy to take out from the ink chamber 5. Yes, conduction to the driving circuit 11 and the polarization circuit 12 can be easily performed.
[0030]
Next, of the first flat plate 3 having fine grooves as shown in FIG. 2E, the conductive film 19 is formed only on the upper surface of the partition wall 4 by a film forming means such as a vapor deposition method, a sputtering method, an ion plating method, or a plating method. After applying a voltage between the conductor film 19 and the polarization electrode 7 formed in advance on the first flat plate 3 to subject the piezoelectric ceramic forming the partition 4 to polarization, the conductive film 19 is applied. Then, as shown in FIG. 2 (f), the conductive film 18 is formed on the side surface except the upper surface of the partition wall 4 and the surface of the first flat plate 3 by a film forming means such as a vapor deposition method, a sputtering method, an ion plating method, or a plating method. The conductive film 18 is used as the drive electrode 6.
[0031]
According to this method, the drive electrodes 6 can be easily formed on both side surfaces of the plurality of partition walls 4, and the lead-out electrodes 8 previously formed on the first flat plate 3 are covered with the conductor film 18 as described above. Therefore, the drive electrode 6 can be easily energized.
[0032]
Then, the second flat plate 2 made of metal or conductive ceramic is joined to the first flat plate 3 having the fine grooves shown in FIG. 2F so as to close the fine grooves, whereby the ink jet recording head 1 shown in FIG. Can be produced.
[0033]
In the ink jet recording head 1 shown in FIG. 1, the second flat plate 2 is formed of metal or conductive ceramics, and has an example of a function as an electrode 7 ′ for polarizing the piezoelectric ceramics forming the partition walls 4. Although shown, the second flat plate 2 may be formed of insulating ceramics or glass, and a conductive film may be provided on the ink chamber 5 side, and this conductive film may be used as the electrode 7 for polarization.
[0034]
In the ink jet recording head 1 shown in FIG. 1, an example in which a function as an electrode 7 ′ for applying a polarization voltage to the piezoelectric ceramic forming the partition wall 4 on the second flat plate 2 is shown. In the step of FIG. 2E, the conductive film 19 formed on the upper surface of the partition wall 4 may be left without being removed, and the conductive film 19 may be used as a polarization electrode 7 ′.
[0035]
Furthermore, the inkjet recording head 1 of the present invention is in the form of a recording head, such as a serial type recording head that reciprocates in the main scanning direction, or a line type recording head that covers the entire width or part of the recording paper. Needless to say, it can be applied regardless.
[0036]
By the way, as the piezoelectric ceramic powder constituting the piezoelectric ceramic forming the partition wall 4, lead zirconate titanate (PZT), lead magnesium niobate (PMN), lead nickel niobate (PNN), lead manganese niobate, Lead titanate, lead antimony stannate, lead zinc niobate, or the like can be used.
[0037]
In addition, the particle diameter of these piezoelectric ceramic powders can be suitably used from several tens of microns to sub-microns, specifically in the range of 0.2 to 10 μm, preferably 0.2 to 5 μm. Is good.
[0038]
Furthermore, examples of the organic additive added to the piezoelectric ceramic powder include urea resin, melamine resin, phenol resin, epoxy resin, unsaturated polyester resin, alkyd resin, urethane resin, ebonite, and polysiloxysilicate silicate. . And as means for reaction curing these organic additives, there are heat curing, ultraviolet irradiation curing, X-ray irradiation curing and the like. In terms of work, heat curing is optimal from the viewpoint of the apparatus, and unsaturated polyester resin is particularly preferable from the viewpoint of pot life.
[0039]
In order to maintain the fluidity and formability of the slurry 16 of the piezoelectric ceramic powder and the sintering aid, etc., the content of the organic additive must be such that the viscosity does not increase. It is desirable to have sufficient shape retention during curing. From this point, the content of the organic additive is 0.5 parts by weight or more with respect to 100 parts by weight of the ceramic powder, and 35 parts by weight or less is more preferable in terms of shrinkage of the molded body 17 due to curing. Desirably, 1 to 15 parts by weight is most preferable in consideration of shrinkage during firing.
[0040]
The solvent added to the slurry 16 is not particularly limited as long as it is compatible with the organic additive. For example, an aromatic solvent such as toluene, xylene, benzene, phthalate ester, Higher alcohols such as hexanol, octanol, decanol, and oxyalcohol, or esters such as acetate and glyceride can be used.
[0041]
In particular, the phthalic acid ester, oxyalcohol and the like can be suitably used, and two or more kinds of the solvents can be used in combination in order to volatilize the solvent gently.
[0042]
Further, the content of the solvent is required to be 0.1 parts by weight or more with respect to 100 parts by weight of the piezoelectric ceramic powder in order to maintain the shape retaining property of the molded body 17. 35 parts by weight or less is desirable since it is desirable to reduce the viscosity of the additive 16 of the additive, and most preferably 1 to 15 parts by weight in consideration of shrinkage during drying and firing.
[0043]
The mold 15 in the present invention is not particularly limited as long as it does not interfere with the curing of the organic additive, and the material is not particularly limited. For example, a metal, a resin, rubber, or the like can be used. A method may be used in which a plurality of replica molds are made from silicon rubber or the like and used. If necessary, surface treatment such as surface coating may be performed to improve releasability and prevent wear. Further, when the mold 15 is made of an organic material, it can be fired simultaneously with the slurry 16 without releasing the mold 15.
[0044]
In addition, various coupling agents such as a silane coupling agent, a titanate coupling agent, and an aluminate coupling agent can be used to improve the adhesion when the slurry 16 and the first flat plate 3 are pressure-bonded. Of these, silane coupling agents are preferred because of their high reactivity.
[0045]
Furthermore, it is desirable to use a hydrostatic pressure device for the pressure bonding of the slurry 16 and the first flat plate 3 from the viewpoint of uniformly applying pressure, and the pressurizing condition is a pressure range in which the mold 15 is not deformed, for example, silicon rubber. In the case of using a mold made of metal, it may be performed under a pressure condition of about 100 g / cm @ 2.
[0046]
Further, in the slurry 16, in order to improve the dispersibility of the piezoelectric ceramic powder, for example, a surfactant such as polyethylene glycol ether, argyl sulfonate, polycarboxylate, alkylammonium salt is added. The content is preferably 0.05 to 5 parts by weight with respect to 100 parts by weight of the powder of ceramics, glass, silicon, etc., from the viewpoint of improvement in dispersibility and thermal decomposability.
[0047]
Further, a curing catalyst called a curing reaction accelerator or a polymerization initiator can be added to the binder in the slurry 16. As the curing catalyst, organic peroxides and azo compounds can be used. For example, ketone peroxide, diacyl peroxide, peroxyketal, peroxyester, hydroperoxide, peroxycarbonate, t-butylperoxide. Examples thereof include organic peroxides such as oxy-2-ethylhexanoate, bis (4-tert-butylcyclohexyl) peroxydicarbonate, and dicumyl peroxide, and azo compounds such as azobis and isobutyronitrile.
[0048]
On the other hand, as the ceramic forming the first flat plate 3, sintered insulating ceramics or piezoelectric ceramics can be used.
[0049]
For example, as an insulating ceramic, alumina (Al ₂ O _Three ) And zirconia (ZrO ₂ ) And other oxide-based ceramics and silicon nitride (Si _Three N _Four ), Aluminum nitride (ALN), silicon carbide (SiC) and the like, non-oxide ceramics can be used, and various kinds of sintering aids may be added to these ceramics in desired amounts.
[0050]
As the sintering aid, silica (SiO 2) is used for alumina. ₂ ), Calcia (CaO), Yttria (Y ₂ O _Three ) And magnesia (MgO), etc. for yttria (Y ₂ O _Three ), Oxides of rare earth elements such as cerium (Ce), dysprosium (Dy), ytterbium (Yb), and yttria (Y ₂ O _Three ) And alumina (Al ₂ O _Three Etc.) for aluminum nitride, oxides (RE) of element 3a of the periodic table ₂ O _Three ), Etc., boron (B) and carbon (C) can be used for silicon carbide.
[0051]
Piezoelectric ceramics include lead zirconate titanate (PZT), lead magnesium niobate (PMN), lead nickel niobate (PNN), lead manganese niobate, lead titanate, lead antimony stannate, zinc niobate Ceramics mainly composed of lead or the like can be used.
[0052]
Further, the material constituting the drive electrode 6, the polarization electrodes 7, 7 ', and the lead-out electrode 8 is not particularly limited as long as it is a conductor that can withstand the firing temperature. For example, metal, alloy, ceramics, glass, or the like. And a composite made of the above metal or alloy. In particular, it is preferable to use at least one of platinum, palladium, rhodium, silver-palladium, silver-platinum, platinum-palladium, gold, silver, tungsten, molybdenum, and the like.
[0053]
(Example)
A specific example of the ink jet recording head 1 shown in FIG. 1 will be described below.
[0054]
First, as a material for forming the partition wall 4, lead zirconate titanate (PZT) powder having an average particle diameter of 1 μm, 30 parts by weight of α-terpineol, 15 parts by weight of methylcellulose, and 2 parts by weight of a dispersant In addition, slurry-like slurry 16 was prepared by mixing with a stirring mixer, and this slurry 16 was filled in a recess 15a for partition walls of a mold 15 made of silicon rubber as shown in FIG.
[0055]
On the other hand, a zirconia substrate is separately prepared as the first flat plate 3, and a paste mainly composed of platinum powder is laid on the first flat plate 3 at a predetermined position by a screen printer, and the electrode 7 for polarization and the lead-out electrode are used. A wiring pattern forming the electrode 8 was formed. Then, as shown in FIG. 2B, the molding die 15 is filled in a state where the recesses 15a for the partition walls of the molding die 15 and the positions of the wiring patterns for the electrodes 7 formed on the first flat plate 3 are aligned. The first flat plate 3 was pressed against the surface of the slurry 16 and then degassed by vacuum, and further kept at a temperature of 100 ° C. for 45 minutes to be cured by heating. Then, the mold 15 is released, and the first flat plate 3 to which the molded body 17 made of the slurry 16 is joined as shown in FIG. 2C is fired at a temperature of 1000 to 1300 ° C. The 1st flat plate 3 which has the fine groove | channel shown to) was obtained.
[0056]
Next, as shown in FIG. 2 (e), in the first flat plate 3 having the fine groove, only the upper surface of the partition wall 4 is coated with a conductor film 19 made of platinum by sputtering, and titanate forming the partition wall 4. After applying the polarization treatment to the piezoelectric ceramic mainly composed of lead zirconate, the conductor film 19 is removed, and then the side surface except the upper surface of the partition wall 4 and the first flat plate 3 as shown in FIG. Is coated with a conductor film 18 made of platinum by sputtering, and the conductor film 18 is used as the drive electrode 6, and then stainless steel having a function as an electrode 7 ′ for polarization on the first flat plate 3 having the fine groove. The inkjet recording head 1 shown in FIG. 1 was manufactured by bonding the second flat plate 2 made of the metal.
[0057]
When an ink ejection test was performed using the inkjet recording head 1, the ink ejection characteristics were good. Further, in the case where the ink ejection characteristics are reduced due to the deterioration of the polarization polarity of the piezoelectric ceramic forming the partition wall 4, the ink ejection characteristics are applied by applying a constant voltage between the electrodes 7 and 7 'for polarization. Was able to recover.
[0058]
【The invention's effect】
As described above, according to the present invention, a plurality of partition walls made of piezoelectric ceramics constituting an ink chamber are arranged between the first flat plate and the second flat plate facing each other, and drive electrodes are provided on both side surfaces of these partition walls. In the ink jet recording head, the ink plate is pressurized by energizing the drive electrode and displacing the partition wall, and the ink is ejected from a nozzle communicating with the ink chamber. Is made of ceramics, and a polarization voltage is applied to the partition wall on the surface Bulkhead One electrode for polarization Between the partition and the first plate Buried And extend outside the bulkhead In this state, the partition wall is sintered and integrated, A lead-out electrode is provided at the bottom of the ink chamber formed between the partition walls and is connected to the drive electrode and led out from the ink chamber to the outside of the ink chamber. The second flat plate itself Bulkhead Use the other electrode for polarization or on the upper surface of the partition wall Bulkhead By providing the other electrode for polarization, the drive electrode and the one electrode for polarization can be easily taken out of the ink chamber, so that conduction to the drive circuit and the polarization circuit can be easily performed, and recording is performed. The head can be further reduced in size.
[0059]
Further, since the partition wall and the first flat plate are integrated with each other by sintering, there is no fear of ink leakage, and a recording head having sufficient bonding strength can be manufactured. In particular, when the first flat plate is formed of an insulating ceramic, even if the first flat plate is bumped at the time of handling, the recording head is less likely to be broken or cracked and is difficult to break.
[0060]
In addition, according to the present invention, a first step of filling a molding die formed with a plurality of recesses for partition walls with a slurry made of piezoelectric ceramic powder, a solvent and an organic additive, and a strip-shaped electrode in advance. A ceramic first flat plate provided with a first plate is separately prepared, and the slurry is hardened in a state where the first flat plate is pressed against the mold, and then integrally fired, A second step of fabricating a first flat plate having a fine groove in which the strip-shaped electrode is embedded between the barrier rib and the first flat plate, and driving electrodes on at least both sides of the barrier rib. After the formation, the second flat plate having conductivity is bonded to the first flat plate so as to close the fine groove, or the drive electrodes are formed on at least both side surfaces of the partition wall, and the electrodes are also formed on the upper surface of the partition wall. After forming, the fine groove Since the ink jet recording head is manufactured from the third step of joining the second flat plate to the first flat plate so as to be closed, the shape of the recess for the partition of the molding die is transferred as it is onto the first flat plate. If the mold is manufactured with high density and high accuracy, high-precision partition walls can be easily and integrally formed on the first flat plate with high density.
[Brief description of the drawings]
FIG. 1A is an exploded perspective view showing an embodiment of an inkjet recording pad of the present invention, and FIG. 1B is a sectional view taken along line XX of FIG.
FIGS. 2A to 2F are explanatory views respectively showing manufacturing steps of the inkjet recording head of the present invention.
FIG. 3 is an exploded perspective view showing a conventional inkjet recording head.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Inkjet recording head 2 ... 2nd flat plate 3 ... 1st flat plate
4 ... partition wall 5 ... ink chamber 6 ... drive electrode
7, 7 '... Polarizing electrode 8 ... Deriving electrode 9 ... Nozzle
11 ... Drive circuit 12 ... Polarization circuit

Claims (1)

A plurality of partition walls made of piezoelectric ceramics constituting an ink chamber are arranged between the first flat plate and the second flat plate facing each other, and drive electrodes are provided on both side surfaces of the partition walls, and the drive electrodes are energized. In the inkjet recording head in which the ink chamber is pressurized by displacing the partition wall and the ink is ejected from the nozzle communicating with the ink chamber, the first flat plate is made of ceramics, and the partition wall is formed on the surface thereof. a partition wall one electrode of the bulkhead polarization of applying a polarization voltage and said first flat plate and the partition wall in a state of being Nobese' outside the partition wall as well as embedded between the first flat plate with integrated sintering, between the barrier ribs to the bottom of the ink chamber formed conductive with the drive electrode, and provided the derivation electrodes allowed to derive from the ink chamber to the ink outside, another barrier rib polarizing the second flat plate itself Or an electrode, or an ink jet recording head formed by providing the other electrode of the bulkhead polarization on the upper surface of the partition wall.

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