JP3651341B2 - Heating / cooling device and manufacturing method thereof - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention belongs to a heating / cooling apparatus used for heating an object to be heated or cooling an object to be cooled, and a method for manufacturing the same.
[0002]
[Prior art]
A conventional heating / cooling heating plate is composed of a metal plate and a pipe made of a metal material so that the outer peripheral surface is in contact with and fixed to the inner wall surface of a groove formed on one surface of the metal plate so that fluid flows inside. have.
[0003]
A heat plate having a heating element is provided on one surface of the metal plate, and the object to be heated is heated on the face surface opposite to the one surface of the metal plate by heating the metal plate. Furthermore, after heating a to-be-heated material, in order to cool a metal plate and a hot plate, the fluid like cooling water is poured into the pipe and it cools.
[0004]
In the conventional method of manufacturing a heating / cooling hot platen, a groove is formed on one surface of a metal plate, and ridges are formed on both sides of the groove so as to protrude on the one surface along the groove. providing a pipe outer peripheral surface to the inner wall surface of it is made of a metallic material to flow the fluid therein in contact with the groove portion. Then, the pipe, by pressing the ridges and the pipe to one side, to form an exposed portion exposed on one surface of a portion of the axial direction in the outer peripheral surface of the pipe (e.g., JP-A-9-33170 (See Japanese Laid-Open Patent Publication No. 9-260029).
[0005]
[Problems to be solved by the invention]
However, the pipe is pressed to be the same surface as one surface of the metal plate, but because it is a rough work by pressing, the flatness of the exposed surface and one surface of the metal plate is rough, so it is in close contact with the hot plate. It is desired to improve the uniform and fast thermal response and thermal conductivity from the hot plate to the metal plate and the pipe due to insufficient contact and poor contact.
[0006]
Moreover, since the thickness of the pipe is thin, the pressure resistance performance is not sufficient, and it is desired to improve the corrosion resistance.
[0007]
Problems of invention therefore, flat out can be easily, adhesion, durability, and to provide a heating and cooling device and a manufacturing method thereof capable of improving the corrosion resistance.
[0008]
[Means for Solving the Problems]
According to the present invention, in a heating / cooling device including a metal plate and a heat generating plate provided on the metal plate, the outer peripheral surface of the metal plate is abutted against an inner wall surface of a groove formed on one surface of the metal plate. A pipe element that is in contact is fixed, and the pipe element includes an outer pipe (13) having an outer peripheral surface abutting against an inner wall surface of the groove and made of a metal material, and an inner side of the outer pipe. And an inner pipe (14) made of a metal material so that the outer peripheral surface abuts on the outer pipe and allows fluid to flow inside, and the outer pipe has an axial portion of the outer peripheral surface exposed to the one surface. Having an exposed portion (13a),
The wall thickness of the exposed portion is thinner than the wall thickness of the outer pipe excluding the exposed portion, and the exposed surface of the exposed portion is formed on the same surface as the one surface , With the metal plate, a heating / cooling device is obtained in which the heat generating plate is integrated with the metal plate in contact with the one surface .
[0009]
According to the present invention, in the method of manufacturing a heating / cooling device including a metal plate and a heating plate provided on the metal plate, a groove is formed on one surface of the metal plate, and on both sides of the groove. Forming a protrusion projecting on the one surface, and providing a pipe element so that an outer peripheral surface is in contact with an inner wall surface of the groove, the pipe element comprising an outer pipe made of a metal material, An inner pipe made of a metal material so that an outer peripheral surface abuts on the outer pipe and allows fluid to flow inside the outer pipe, and the protruding portion and the pipe element are pressed on the outer pipe. By pressing with a machine, the protruding portion is crushed to form an exposed portion in which a part of the outer peripheral surface of the outer pipe in the axial direction is exposed on the one surface, and the protruding portion is formed when the exposed portion is formed. Part and the exposed part The pipe element is press-fitted into the groove by pressing so that the position is higher than the one surface, and then the entire surface is uniform so that the exposed surface of the exposed portion is the same surface as the one surface. In this case, the exposed portion is made thinner than the outer pipe except for the exposed portion by cutting, and the exposed surface becomes the same surface as the one surface after cutting. A heating / cooling device manufacturing method is obtained, in which the heat generating plate is brought into contact with the one surface of the metal plate after being cut and further integrated .
[0010]
[Action]
In the heating / cooling device of the present invention, the pipe element is a double pipe, the thickness of the exposed portion of the outer pipe is smaller than the thickness of the outer pipe excluding the exposed portion, and the exposed surface of the exposed portion is It is formed on the same surface as one surface.
[0011]
Therefore, one side of the metal plate becomes flat and the exposed portion has a thin wall thickness. Therefore, when one side of the metal plate is used as a joint surface with the heating plate , the adhesion is improved and the thermal conductivity is excellent. It becomes the composition.
[0012]
In addition, since the pipe element is a double pipe, by using the same metal material as that of the metal plate for the outer pipe, the exposed portion can be cut and flattened easily, and durability and corrosivity can be improved.
[0013]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 shows an embodiment of a heating / cooling hot plate used in the heating / cooling apparatus of the present invention.
[0014]
Referring to FIG. 1, a heating / cooling heating plate 10 in this embodiment is configured such that an outer peripheral surface is in contact with a metal plate 11 and an inner wall surface of a groove portion 12 formed on one surface 11 a of the metal plate 11. And a pipe element made of a metallic material so as to allow fluid to flow inside.
[0015]
The pipe element includes an outer pipe 13 made of a metal material whose outer peripheral surface is in contact with and fixed to the inner wall surface of the groove portion 12, and an outer peripheral surface that is in contact with the outer pipe 13 inside the outer pipe 13 to allow fluid to flow inside. And an inner pipe 14 made of a metallic material.
[0016]
The outer pipe 13 has an exposed portion 13a in which a part of the outer peripheral surface in the axial direction is exposed on one surface 11a. The thickness of the exposed portion 13a is thinner than the thickness of the outer pipe 13 excluding the exposed portion 13a. Furthermore, the exposed surface of the exposed portion 13a is formed on the same surface as the one surface 11a.
[0017]
The metal plate 11 and the outer pipe 13 in this embodiment are made of the same type of metal material. Here, an example is given about the combination of the metal materials of the metal plate 11, the outer pipe 13, and the inner pipe 14.
[0018]
When the metal plate 11 is aluminum or an aluminum alloy, the outer pipe 13 is made of aluminum, and the inner pipe 14 is selected from a metal material that avoids corrosion, such as stainless steel, iron, or copper, so as to correspond to the type of fluid. .
[0019]
When the metal plate 11 is stainless steel, the outer pipe 13 is made of stainless steel, and the inner pipe 14 is selected from a metal material such as stainless steel or iron. When the metal plate 11 is copper or a copper alloy, the outer pipe 13 is made of copper, and the inner pipe 14 is selected from a metal material such as stainless steel, iron, or copper.
[0020]
Furthermore, the entire back surface is opposite to the one surface 11a and the entire one surface 11a of the metal plate 11 including the exposed surface of the exposed portion 13a is anodized film 15a, 15b is formed. The alumite coatings 15a and 15b are processed when the metal plate 11 is aluminum and the outer pipe 13 is aluminum.
[0021]
FIG. 2 shows a heating device using a heating / cooling hot platen . Referring to FIG. 2, a heating plate 21 is provided on one surface 11a (including anodized film 15a) of the metal plate 11. A pressing plate 31 is provided on the opposite surface of the heat generating plate 21.
[0022]
The heat generating plate 21 is sandwiched between the metal plate 11 and the presser plate 31 by a plurality of bolts (not shown). Further, the back surface of the metal plate 11 having the alumite coating 15b serves as a face surface for heating and cooling by placing an object to be heated or an object to be cooled.
[0023]
Such a heating apparatus is applied to the baking of a semiconductor and a liquid crystal panel and baking of a wafer and a substrate in a film forming process described in JP-A-9-134777.
[0024]
The heating plate 21 is formed by casting a sheathed heater in a metal plate or by sandwiching a heating wire around a mica substrate between a plurality of mica plates.
[0025]
Next, a method for manufacturing the heating / cooling hot platen 10 will be described with reference to FIGS. As shown in FIG. 3, the groove portion 12 is formed on one surface 11 a of the metal plate 11, and the ridge portion 11 b that protrudes on the one surface 11 a along the groove portion 12 on both sides of the groove portion 12.
[0026]
Furthermore, the inner pipe 14 and outer pipe 13 is made of a metallic material to flow the fluid in the interior contact the outer peripheral surface is brought into the groove 12 the inner wall surface of the provided grooves 12. Then, as shown in FIG. 4, the outer pipe 13 is pressed against the outer pipe 13 by pressing the protrusion 11 b, the inner pipe 14, and the outer pipe 13 with a pressing machine 41 . An exposed portion 13a is formed by exposing a part in the axial direction of the first surface 11a.
[0027]
At this time, the inner pipe 14 and the outer pipe 13 are press-fitted into the groove portion 12 by pressing so that the protruding portion 11b and the exposed portion 13a are positioned slightly above the one surface 11a . Thereafter, the exposed surface of the exposed portion 13a is machined into a homogeneous surface across one surface 11a to the one surface 11a and the same plane. At this time, the cutting is performed until the thickness of the exposed portion 13a is thinner than the thickness of the outer pipe 14 excluding the exposed portion 13a by cutting, and the surface is the same as the one surface 11a after cutting. An exposed surface of the exposed portion 13a is formed on the same surface 11a as the one surface 11a of the metal plate 11, and the metal plate 11 and the heat generating plate 21 shown in FIG. The heating plates 21 are integrated by fixing them together.
[0028]
As shown in FIG. 4, the metal plate 11 is cut from a thickness t ₅ to t ₄ before cutting. At this time, the protruding exposed portion 13a and protruding portion 11b are also cut. Further, the back surface of the metal plate 11 (the face) are also the dimensions of t ₃ is cut.
[0029]
1 is applied to the entire surface 11a and the back surface (face surface) after the cutting shown in FIG. 1, the heating / cooling heating plate 10 shown in FIG. 1 is completed.
[0030]
FIG. 5 shows an application example of the heating / cooling device in the main part. The heating / cooling apparatus shown in FIG. 5 has the same configuration except that the outer pipe 13 and the inner pipe 14 of the heating / cooling heating plate 10 shown in FIG. The same parts are denoted by the same reference numerals and description thereof is omitted.
[0031]
The heating and cooling apparatus, and have a heat generating plate 21 and the metal plate 25. The metal plate 25 of one side heater groove 28 formed in 25a, sheathed heater 51 is press-fitted. The sheathed heater 51 is fixed by caulking protrusions 25b formed on both sides of the heater groove 28. The exposed surface of the exposed portion 13a is integrated with the one surface 11a of the metal plate 11 formed on the same surface as the one surface 11a of the metal plate 11 by bringing the heating plate 21 into contact with each other and fixing them together. .
[0032]
【The invention's effect】
As described above, according to the embodiment, according to the heating / cooling device and the manufacturing method thereof of the present invention, the pipe element is a double pipe, and the thickness dimension of the exposed portion of the outer pipe excludes the exposed portion. Since the exposed surface of the exposed portion is formed on the same surface as the outer surface, the exposed surface of the exposed portion is flat and the exposed portion has a thinner thickness. For this reason, when one surface is used as a bonding surface, the adhesion is improved and the structure is excellent in thermal response and thermal conductivity.
[0033]
Further, since the wall thickness does not change even when the exposed portion is cut off, the inner pipe can provide a heating / cooling device with excellent pressure resistance.
[0034]
Further, by using the same metal material for the metal plate and the outer pipe, flattening can be achieved by cutting, and the adhesiveness is excellent. In particular, when the outer pipe is made of an aluminum material, an alumite coating can be applied, and excellent surface corrosion resistance can be obtained.
[0035]
Moreover, since the metal material matched with the kind of fluid can be used for an inner pipe, it can respond to corrosion resistance.
[0036]
Furthermore, it is possible to easily manufacture a heating / cooling device that can perform heating and cooling with a single metal plate and that can perform uniform heating / cooling with a planar heating element.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view showing a main part of an embodiment of a heating / cooling hot plate in a heating / cooling apparatus of the present invention.
FIG. 2 is a perspective view showing a heating device using the heating / cooling hot platen shown in FIG. 1;
FIG. 3 is a perspective view showing, by a main part, the form of an intermediate step in the manufacturing process of the heating / cooling hot platen of the present invention shown in FIG. 1;
4 is a cross-sectional view showing, by a main part, a form of an intermediate step in a manufacturing process of the heating / cooling hot platen shown in FIG. 3;
FIG. 5 is a cross-sectional view showing a main part of an application example of the heating / cooling device of the present invention.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Heating / cooling heating plate 11, 25 Metal plate 11a, 25a One side 11b, 25b Projection part 12 Groove part 13 Outer pipe 13a Exposed part 14 Inner pipe 15a, 15b Anodized coating 21 Heating plate 28 Heater groove part 31 Holding plate 51 Sheath heater

Claims (4)

In a heating / cooling device including a metal plate and a heating plate provided on the metal plate,
A pipe element whose outer peripheral surface is in contact with the inner wall surface of the groove formed on one surface of the metal plate is fixed to the metal plate,
The pipe element is configured such that the outer peripheral surface is in contact with the inner wall surface of the groove and is made of a metal material, and the outer peripheral surface is in contact with the outer pipe inside the outer pipe so that fluid flows inside. An inner pipe made of metal material,
The outer pipe has an exposed portion in which a part of the outer peripheral surface in the axial direction is exposed on the one surface,
The wall thickness of the exposed portion is smaller than the wall thickness of the outer pipe excluding the exposed portion, and the exposed surface of the exposed portion is formed on the same surface as the one surface ,
The heating / cooling device , wherein the heat generating plate and the metal plate are integrated with the heat generating plate in contact with the one surface of the metal plate . 2. The heating / cooling device according to claim 1, wherein an alumite film is formed on at least the entire surface of the metal plate . In a method for manufacturing a heating / cooling device including a metal plate and a heating plate provided on the metal plate,
Grooves are formed on one surface of the metal plate, ridges projecting on the one surface are formed on both sides of the groove, and pipe elements are provided so that the outer peripheral surface is in contact with the inner wall surface of the groove. ,
The pipe element includes an outer pipe made of a metal material, and an inner pipe made of a metal material so that an outer peripheral surface abuts on the outer pipe inside the outer pipe and allows fluid to flow inside. ,
The outer pipe has an exposed portion in which the protruding portion and the pipe element are pressed by a press to collapse the protruding portion and expose a part of the outer peripheral surface of the outer pipe in the axial direction to the entire surface. Form the
When forming the exposed portion, press the pipe element into the groove portion by pressing so that the protruding portion and the exposed portion are positioned above the one surface,
Thereafter, the entire surface is cut until the exposed surface of the exposed portion is the same surface as the one surface until a uniform surface. At this time, the thickness of the outer pipe excluding the exposed portion is determined by cutting. Also, the exposed portion is cut so that the thickness of the exposed portion is thin and is the same as the one surface after the cutting process, and the heating plate is applied to the one surface of the metal plate after the cutting process. A method of manufacturing a heating / cooling device, wherein the heating / cooling device is in contact with each other . The method of manufacturing a heating and cooling device according to claim 3, the manufacturing method of heating and cooling apparatus characterized by subjecting the anodized aluminum coating on at least the entire said one surface after said being machined.

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