JP3673327B2 - Dust intrusion prevention device for automatic guided vehicles - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention provides a fan with a filter at almost the same height as the cassette stored in the upper hermetic chamber used as the positive pressure of the automated guided vehicle traveling in the clean room, and keeps the cleanness below the set value for all stored products. The present invention relates to a dust intrusion prevention device for an automatic guided vehicle.
[0002]
[Prior art]
2. Description of the Related Art Conventionally, automatic guided vehicles traveling in a clean room generate dust from the floor surface due to the contact between the wheel and the floor surface when the traveling wheel rolls and travels in contact with the floor surface. In order to prevent the transported goods and other clean rooms from being contaminated by this dust, clean air is jetted from the ceiling in the clean room toward the floor and exhausted from the exhaust port provided on the floor, especially the road surface of the road. A flow is formed. However, since it is difficult to maintain high cleanliness only with this downflow, the downflow and the transported material storage chamber of the automatic guided vehicle are separated from the transport vehicle lower chamber B provided with traveling wheels and the like. A measure is taken to prevent dust from entering the transported article storage chamber by making the transported article storage chamber an airtight chamber and increasing the internal pressure of the upper airtight chamber A to a positive pressure.
[0003]
[Problems to be solved by the invention]
In the conventional dust intrusion prevention method in the conventional automatic guided vehicle, the filter-equipped fan 4 is attached to the upper part of the vehicle body in order to keep the upper airtight chamber A at a positive pressure, and therefore the clean air sent into the upper airtight chamber is shown in FIG. As shown, the blowing direction from the fan with filter 4 flows from the upper 5 to the lower. Accordingly, the inflow direction of clean air to the articles in the cassette stored in the upper airtight chamber is hindered by the uppermost article placed in a horizontal plane, for example, a liquid crystal glass substrate, and the lower article direction, in particular, the gap. There is a problem that the flow of clean air between the articles stacked with a gap between them is hindered, and the effect of maintaining the cleanness is reduced.
The present invention solves the problems of the conventional dust intrusion prevention device of the automatic guided vehicle, and provides an exhaust fan at the lower part of the vehicle body of the automatic guided vehicle and a fan with a filter provided in the upper airtight chamber substantially the same height as the stored item. It is an object of the present invention to provide a dust intrusion prevention device in an automatic guided vehicle that can maintain cleanliness by distributing clean air to all items stored in an upper airtight chamber.
[0004]
[Means for Solving the Problems]
In order to achieve the above object, the dust intrusion prevention device in the automatic guided vehicle according to the present invention divides the automatic guided vehicle into an upper airtight chamber and a lower airtight chamber which are positive and lower pressures. In the dust intrusion prevention device in the automatic guided vehicle provided with the exhaust fan and the fan with the filter in the upper airtight chamber, the fan with the filter provided in the upper airtight chamber is almost the same height as the cassette stored in the upper airtight chamber. It is characterized by.
[0005]
In the dust intrusion prevention device in the automatic guided vehicle of the present invention having the above-mentioned configuration, the dust is generated because the lower airtight chamber is provided with a drive control device and wheels that easily generate dust in the lower airtight chamber. In addition, since it is sucked to the negative pressure side in the lower airtight chamber, it does not reach the upper airtight chamber and does not enter the upper airtight chamber, so that the cleanliness of the conveyed product is maintained.
[0006]
In the upper hermetic chamber, the fan with a filter provided in the upper hermetic chamber is almost the same height as the cassette stored in the upper hermetic chamber, so that the upper hermetic chamber is always open regardless of the opening / closing of the door for storing the conveyed items. Since the positive pressure is maintained, the generated dust does not enter the upper hermetic chamber and the cleanliness of the conveyed product is maintained.
[0007]
DETAILED DESCRIPTION OF THE INVENTION
DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments of a dust intrusion prevention device in an automatic guided vehicle according to the present invention will be described with reference to the drawings.
[0008]
FIG. 1 is a plan view showing an automatic guided vehicle during transfer of a conveyed product in the present invention, and FIG. 2 is a front view thereof. In the figure, reference numeral 1 denotes a main body of the automatic guided vehicle. The main body 1 of the automatic guided vehicle is divided into an upper airtight chamber A and a lower airtight chamber B. The upper airtight chamber A becomes a conveyed product storage chamber, has a predetermined volume, stores the cassette 2 therein, and is provided with a fan 4 with a filter on the side wall. As a result, clean air from a position where dust generated from the floor does not rise by driving the fan 4 with filter is supplied into the upper hermetic chamber to keep the inside at a positive pressure.
[0009]
The fan 4 with the filter is attached to the side wall of the upper hermetic chamber. This mounting position is between the cassette 2 housed in the upper airtight chamber and the clean air sucked by the fan with the filter from the side between all the articles housed in the cassette. The position is such that it circulates, that is, approximately the same height as the cassette. As a result, clean air circulates within the space between the stored items, for example, the liquid crystal glass substrate 6, which are stacked with a predetermined gap in the cassette, thereby maintaining the cleanliness of all articles.
[0010]
Further, in the lower airtight chamber B of the automatic guided vehicle 1, a traveling control unit such as a traveling wheel W, a driving device, and a control device that easily generate dust is housed, and this outer peripheral portion is surrounded by a cover so as to keep airtightness. In addition, an inlet 3 for sucking air from the upper hermetic chamber A is opened at the upper part of the lower hermetic chamber, an exhaust port is formed on the floor of the lower hermetic chamber, and an exhaust fan 7 is provided inside. . The exhaust fan 7 exhausts air toward a downflow exhaust port formed in the vicinity of the traveling path of the floor surface 8. As a result, the lower airtight chamber in the lower part of the vehicle body has a negative pressure, so that it is possible to prevent dust from entering the upper airtight chamber.
[0011]
Therefore, in the dust intrusion prevention apparatus in the automatic guided vehicle configured as described above, when the cassette 2 is housed in the upper airtight chamber of the automatic guided vehicle and the filter-equipped fan is driven, clean air is sucked by this fan and is put into the upper airtight chamber. And blown out. The clean air blown into the upper airtight chamber circulates horizontally in parallel with the stored items from the side, and passes through the gap between the front and back surfaces of each article stacked with a gap between them. In addition to maintaining the cleanliness of the product at the set value, the air that has circulated between the stored items flows downward on the inner surface of the fan side with the anti-filter, flows out from the inlet 3 into the lower airtight chamber B, and passes through the exhaust fan to the lower part. It is discharged out of the hermetic chamber, and thus the upper hermetic chamber can maintain a positive pressure and also maintain a clean level.
[0012]
【The invention's effect】
According to the dust intrusion prevention device for the automatic guided vehicle of the present invention, the clean air is circulated from the fan with the filter in the horizontal direction in the upper hermetic chamber of the automatic guided vehicle, so that the upper hermetic chamber maintains a positive pressure. In addition, the cleanliness of the entire indoor storage can be maintained.
In addition, since the suction is performed from the side of the upper airtight chamber, the set cleanness can be maintained in the clean room.
[Brief description of the drawings]
FIG. 1 is a front view showing an embodiment of a dust intrusion prevention device in an automatic guided vehicle according to the present invention.
FIG. 2 is a plan view of the same.
FIG. 3 is a plan view showing an embodiment of a dust intrusion prevention device in a conventional automatic guided vehicle.
FIG. 4 is a front view of the same.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Automatic guided vehicle 2 Cassette 3 Inlet 4 Fan with filter 5 Clean air 6 Storage 7 Exhaust fan 8 Running floor A Upper airtight room B Lower airtight room

Claims (1)

The automatic guided vehicle, is divided into upper and lower lower airtight chamber to the upper airtight chamber and negative pressure to positive pressure, provided with an exhaust fan in the lower airtight chamber, in the automatic guided vehicle provided with the fan filter with the upper airtight chamber In the dust intrusion prevention device, the dust intrusion prevention device in the automatic guided vehicle is characterized in that the fan with a filter provided in the upper airtight chamber has substantially the same height as the cassette stored in the upper airtight chamber .

Images