JP3677525B2 - Electrodeless discharge lamp device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an electrodeless discharge lamp including a straight tube type electrodeless discharge lamp.
[0002]
[Prior art]
FIG. 9 is a partially cutaway front view showing a conventional electrodeless discharge lamp device.
[0003]
In the figure, 101 is an electrodeless discharge lamp, 102 is an induction coil, 103 is a holder, 104 is a spacer, 105 is a first connection plate, and 106 is a second connection plate.
[0004]
The electrodeless discharge lamp 101 has a straight tube shape and a discharge medium made of rare gas and mercury enclosed in an elongated discharge vessel 101a, and support portions 101b are formed at both ends.
[0005]
Six induction coils 102 are arranged around the electrodeless discharge lamp 101 along the longitudinal direction of the electrodeless discharge lamp 101. A pair of lead wires 102a and 102b led out from both ends of the induction coil 102 are bent and parallel to the tube axis of the electrodeless discharge lamp 101, and are sequentially shifted around the tube axis to move the electrodeless discharge lamp 101. Concentrated at one end.
[0006]
The holder 103 is divided into two parts, and is fixed to the support portions 101 b at both ends of the electrodeless discharge lamp 101.
[0007]
The spacer 104 is made of a fluororesin and is fixed to the holder 103. Lead wire insertion holes 104a are formed at equal intervals around the holder 104, and a large-diameter convex portion 104b and a small-diameter convex portion 104c are formed coaxially from the central portion toward the outside of the electrodeless discharge lamp 101. ing.
[0008]
The first connecting plate 105 is attached to the large-diameter convex portion 104 b of the spacer 104. Around the first connecting plate 105, lead wire connecting portions 105a and cutout portions 105b are alternately formed.
[0009]
The second connection plate 106 is attached to the small diameter convex portion 104 c of the spacer 104. A connection portion 106 a that faces the cutout portion 105 b of the first connection plate 105 is formed around the second connection plate 106.
[0010]
Then, one of the pair of lead wires 102 a and 102 b of each induction coil 102 passes through the lead wire insertion hole 104 a of the spacer 104 and is connected to the lead wire connecting portion 105 a of the first connecting plate 105. ing.
[0011]
The other lead wire 102 b passes through the cutout portion 105 b of the first connection plate 105 and is connected to the lead wire connection portion 106 a of the second connection plate 106.
[0012]
When the first and second connection plates 105 and 106 are connected to a high-frequency power source (not shown), the induction coil 102 generates a high-frequency magnetic field, so that the discharge medium in the electrodeless discharge lamp 101 is excited by the high-frequency magnetic field and electrodeless discharge is performed. Thus, the desired radiation is obtained.
[0013]
In order to facilitate the handling of the electrodeless discharge lamp device having the above-described structure, the electrodeless discharge lamp device is housed in an outer tube (not shown) made of quartz glass or the like, and both ends of the outer tube are sealed with a cap body.
[0014]
[Problems to be solved by the invention]
However, in this type of conventional electrodeless discharge lamp device, the lead wires 102a and 102b are concentrated on one end of the electrodeless discharge lamp 101 even though the positions of the induction coils 102 with respect to the electrodeless discharge lamp 101 are different. Therefore, the lengths of the lead wires 102a and 102b are different for each induction coil. For this reason, it is necessary to prepare six types of induction coils 102, and parts management and assembly are extremely troublesome.
[0015]
In addition, the lead wire 102a, 102b of the induction coil 102 is in contact with other lead wires of different potentials in the adjacent induction coil due to poor assembly or expansion of parts due to temperature rise during operation, so that it is easy to short circuit. The assembly workability was very bad, and the reliability of the device was problematic.
[0016]
Furthermore, a portion having a large interval is formed between adjacent induction coils 102 as indicated by a region A, and the luminance of the discharge space in this portion is lowered. For this reason, desired power cannot be input. When a straight tube type electrodeless discharge lamp is used as a radiation source of a photochemical treatment apparatus, it is important to make the luminance of the discharge space uniform and to supply the required power.
[0017]
An object of the present invention is to provide an electrodeless discharge lamp device in which an induction coil is not easily deformed, and in which parts can be easily manufactured and assembled.
[0018]
[Means for achieving the object]
The electrodeless discharge lamp according to the first aspect of the invention extends along the longitudinal direction of the electrodeless discharge lamp in a state of being insulated from each other at a position separated from the electrodeless discharge lamp having a straight tube shape. An induction coil support bar composed of at least a pair of conductive members; wound around an electrodeless discharge lamp, one end connected to one induction coil support bar, and the other end connected to the other induction coil support bar And an induction coil.
[0019]
In the present invention and each of the following inventions, the definitions and technical meanings of terms are as follows unless otherwise specified.
[0020]
2. Electrodeless discharge lamp A straight tubeless electrodeless discharge lamp includes a straight tube discharge vessel and a discharge medium sealed therein. The discharge vessel is formed by exhausting an airtight vessel made of fused silica or the like, and transmits radiation generated by the discharge to the outside. The discharge medium varies depending on the radiation to be obtained, but when ultraviolet rays are generated for use in photochemical processing, for example, rare gases such as mercury and argon can be used.
[0021]
Further, the discharge vessel may have a cylindrical shape with both ends sealed or a structure in which the cross section has a donut shape.
[0022]
Further, the length of the electrodeless discharge lamp in the tube axis direction does not affect the startability in the case of electrodeless discharge, and can be arbitrarily set according to the desired amount of radiation output.
[0023]
Furthermore, in order to maintain the discharge pressure during operation of the electrodeless discharge lamp, for example, the vapor pressure of mercury at a proper value, a thin tube can be formed protruding from one end of the discharge vessel.
[0024]
About the induction coil support bar The induction coil support bar mechanically supports the induction coil and supplies high-frequency power. Moreover, since it extends along the longitudinal direction of the electrodeless discharge lamp, it is required to have sufficient rigidity, and at the same time, it must have a sufficiently low electric resistance.
[0025]
Therefore, a copper square bar or a flat plate may be used as the induction coil support bar. When a flat plate is used, it is desirable that the plane be positioned parallel to the radiation direction so that the plane does not block radiation.
[0026]
In the present invention, any means may be used for extending the induction coil support bar along the longitudinal direction of the electrodeless discharge lamp while being insulated from each other at a position spaced from the electrodeless discharge lamp.
[0027]
However, it is preferable to fix the induction coil support bar directly or indirectly to the electrodeless discharge lamp because the handling as an electrodeless discharge lamp device is facilitated.
[0028]
At least one pair of induction coil support bars is used, but a plurality of pairs may be used as necessary.
[0029]
About the induction coil One or a plurality of induction coils can be used according to the length of the non-discharge discharge lamp.
[0030]
There is no limitation on the means for connecting the induction coil to the induction coil support bar. For example, means such as spot welding and screwing can be used. In the case of screwing, a lead wire insertion hole for inserting the tip of the lead wire is formed in the induction coil support bar, and a push screw is disposed in the middle of the lead wire insertion hole from the side, and inserted into the lead wire insertion hole. The lead wire thus formed can be configured to be fixed with a push screw.
[0031]
Even when a plurality of induction coils are used, the same structure can be used for all induction coils.
[0032]
When the high frequency power supply is connected to one end of the induction coil support bar, the induction coil is energized via the induction coil support bar. When the induction coil is energized, the induction coil generates a high frequency magnetic field. Since this high-frequency magnetic field is distributed in the tube axis direction of the electrodeless discharge lamp, the discharge medium in the electrodeless discharge lamp is exposed to the high-frequency magnetic field. As a result, the discharge medium is excited, and a secondary current flows through the discharge medium in an annular shape, and discharge occurs in a donut shape as seen from the cross section. The discharge produces radiation that depends on the discharge medium, such as ultraviolet or visible light. And radiation can be taken out from between induction coils.
[0033]
In the present invention, since the lead wire of the induction coil can be shortened, the mechanical strength can be increased and the assembly is facilitated.
[0034]
In addition, since a portion having a large interval is not formed between adjacent induction coils, there is no portion with low luminance, that is, luminance is uniform, and accordingly, desired power can be input. This means that the current density of the entire discharge region can be brought close to the theoretical optimum value, so that high luminous efficiency can be realized.
[0035]
By the way, when a plurality of induction coils are used in the present invention, the induction coil disposed at any position of the electrodeless discharge lamp can have the same structure along the longitudinal direction of the electrodeless discharge lamp. This is because the induction coil is connected to the extending induction coil support bar.
[0036]
An electrodeless discharge lamp device according to a second aspect of the present invention is the electrodeless discharge lamp device according to the first aspect, wherein the electrodeless discharge lamp has an annular body integrally formed at both ends and is supported via the annular body. It is characterized by being.
[0037]
In the present invention, the same material as the discharge vessel, for example, fused quartz, can be used as the annular body, and this can be welded to both ends of the discharge vessel.
[0038]
However, it may be made of a material different from the discharge vessel such as ceramics.
[0039]
Then, since the electrodeless discharge lamp is supported via the annular body, the support becomes easy. In the present invention, any support means may be used. For example, a disk-shaped member made of an insulating material can be mounted on the annular members at both ends of the electrodeless discharge lamp and supported via the disk-shaped member.
[0040]
Further, the induction coil support bar can be supported on the disk-shaped member.
[0041]
An electrodeless discharge lamp device according to a third aspect of the present invention is the electrodeless discharge lamp device according to the first or second aspect, wherein the induction coil support bars are arranged in a plurality of pairs distributed around the electrodeless discharge lamp. Yes; there are a plurality of induction coils, which are distributedly connected to a plurality of pairs of induction coil support bars;
[0042]
According to the configuration of the present invention using a plurality of pairs of induction coil support bars, the electrodeless discharge lamp is surrounded by a plurality of pairs of induction coil support bars and a plurality of induction coils. It is easy to improve mechanical strength with a good balance.
[0043]
The induction coil support bars are preferably arranged in a distributed manner around the electrodeless discharge lamp. When two pairs of induction coil support bars are used, mechanical strength is obtained in a balanced manner by connecting the lead wires of the induction coil to different pairs of induction coil support bars alternately. Even when three or more pairs of induction coil support bars are used, the induction coils can be dispersedly connected.
[0044]
An electrodeless discharge lamp according to a fourth aspect of the present invention is the electrodeless discharge lamp device according to any one of the first to third aspects, comprising a pair of insulating members attached to both ends of the electrodeless discharge lamp; The coil support bar is characterized in that both ends thereof are fixed to a pair of insulating members;
[0045]
According to the present invention, the electrodeless discharge lamp and the induction coil can be integrated via the pair of insulating members attached to both ends of the electrodeless discharge lamp, and the electrodeless discharge lamp device can be easily handled. .
[0046]
In addition, the induction coil is prevented from being displaced relative to the electrodeless discharge lamp.
[0047]
An electrodeless discharge lamp device according to a fifth aspect of the present invention is the electrodeless discharge lamp device according to the fourth aspect, wherein the electrodeless discharge lamp, the induction coil support bar, the induction coil, and an insulating member are housed in a radiation transmissive outer tube. And a pair of cap bodies sealed and attached to both ends of the outer tube.
[0048]
The outer tube may be made of any material as long as it transmits radiation from the electrodeless discharge lamp and has an appropriate mechanical strength. However, when the electrodeless discharge lamp emits ultraviolet rays, it is preferable in terms of mechanical strength to use quartz glass that is transmissive to ultraviolet rays.
[0049]
The cap body may be light-shielding, and a metal plate that has been deep drawn from the viewpoint of ease of machining and strength.
[0050]
Sealing between the cap body and the outer tube can be performed using packing.
[0051]
Thus, according to the present invention, the electrodeless discharge lamp, the induction coil, and the induction coil support bar housed inside by the outer tube and the cap body are sealed to the outside. The whole can be used by being immersed in the liquid to be treated.
[0052]
Therefore, the present invention is suitable for photochemical processing.
[0053]
An electrodeless discharge lamp according to a sixth aspect of the present invention is the electrodeless discharge lamp device according to the fifth aspect, wherein the fluid introduction hole is disposed in one cap body; and the fluid outlet hole is disposed in the other cap body. And a fluid can flow through the outer tube.
[0054]
A gas is generally used as the fluid, but it may be a liquid as long as it is insulating.
[0055]
When the electrodeless discharge lamp is configured to emit ultraviolet rays, if oxygen or air is circulated in the outer tube as a fluid, ozone can be generated from the oxygen by the generated ultraviolet rays, and ozone sterilization is added to ultraviolet sterilization. As a result, the bactericidal efficiency can be remarkably improved.
[0056]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
[0057]
FIG. 1 is a longitudinal sectional view showing a first embodiment of an electrodeless discharge lamp apparatus of the present invention.
[0058]
FIG. 2 is a side view of the same.
[0059]
FIG. 3 is a side view of the state where the cap body is also removed.
[0060]
In the figure, 1 is an electrodeless discharge lamp, 2 _A1 , 2 _B1 , 2 _A2 , 2 _B2 are two pairs of induction coil support bars, 3 is an induction coil, 4 is an insulating member, A and B are terminals, and 5 is an outside A pipe 6 is a cap body.
[0061]
The electrodeless discharge lamp 1 includes a discharge vessel 1a, an annular body 1b, and a discharge medium.
[0062]
The discharge vessel 1a is formed by sealing both ends of a cylinder made of fused silica glass, and protrudes a thin tube 1a1 from one end. This thin tube 1a1 acts to form the coldest part during operation of the electrodeless discharge lamp and maintain the mercury vapor pressure at an optimum value.
[0063]
The annular body 1b is obtained by welding a ring made of quartz glass to both ends of the discharge vessel 1a.
[0064]
The discharge medium consists of mercury and argon at an appropriate pressure.
[0065]
Two pairs of induction coil support bar _{2 A1, 2 B1, 2 A2} , 2 B2 is, 2 _A1, 2 _B1 which are opposed to each other across the free electrodeless discharge lamp 1 constitute a first pair, 2 _A2, 2 _B2 constitutes the second pair.
[0066]
The induction coils 3 each having about 4.5 turns are arranged at equal intervals along the longitudinal direction of the six electrodeless discharge lamps 1. Each induction coil 3 is formed in the same structure.
[0067]
FIG. 4 is a schematic diagram for explaining the connection between the induction coil and the induction coil support bar as viewed in the direction of the arrow from the cross section taken along the line IV-IV ′ in FIG.
[0068]
The induction coil 3 is the first from the right in FIG. 1 and is connected to the first pair of induction coil support bars 2 _A1 and 2 _B1 .
[0069]
FIG. 5 is a schematic diagram for explaining the connection between the induction coil and the induction coil support bar as seen in the direction of the arrow from the cross section along the line VV ′ in FIG.
[0070]
The induction coil 3 is the second one from the right in FIG. 1, but is connected to induction coil support bars 2 _A2 and 2 _B2 forming a second pair.
[0071]
The induction coils other than the above are similarly connected alternately to the first pair 2 _A1 , 2 _B1 and the second pair 2 _A2 , 2 _B2 of the induction coil support bar.
[0072]
Since each induction coil is excited with the same polarity, 2 _A1 and 2 _A2 , 2 _B1 and 2 _B2 have the same polarity.
[0073]
The insulating member 4 is made of fluororesin and has a hole 4a for holding the annular body 1b at the center. The insulating member 4 has four notches 4b on the periphery and forms a + shape, and is divided into two horizontally in FIG. In this structure, the ring body 1b is attached by tightening the ring body 1b simultaneously with the screws 4c and 4c. The circumscribed circle of the insulating member 4 is slightly smaller than the inner diameter of the outer tube 5 described later.
[0074]
The terminals A and B are fixed to the outer surface of the insulating member 4. One pole of a high-frequency power source (not shown) is connected to the terminal A, and the other pole is connected to the terminal B. The induction coil support bars 2 _A1 and 2 _A2 are connected to the terminal A, and 2 _B1 and 2 _B2 are connected to the terminal B.
In order to connect the induction coil support bar to the terminal A or B, respectively, the induction coil support bar is bent to the terminal side through the notch 4b formed on the periphery of the insulating member 4.
[0075]
Thus, the electrodeless discharge lamp 1, the induction coil support bars _2A1 , _2B1 , _2A2 , _2B2 and the induction coil 3 are integrated.
[0076]
The outer tube 5 is made of cylindrical quartz glass, and both ends thereof are open, and a protrusion 5a is formed on the outer periphery in the vicinity of both ends.
[0077]
The cap body 6 includes a dish-shaped cap body 6 a and a ring body 6 b, and a pair thereof is attached to both ends of the outer tube 5. The
[0078]
The cap body 6a is made of stainless steel and includes a fluid flow hole 6a1 that can be closed. One of the fluid flow holes 6a1 is a fluid inflow hole, and the other is a fluid outflow hole.
[0079]
One end of the ring body 6b is engaged with the ridge 5a of the outer tube 5, and the other end is fixed to the open end of the cap body 6a by a plurality of bolts 6c. At that time, the packing 7 is inserted between the end face of the outer tube 5 and the cap body, and the inside of the outer tube 5 is sealed to the outside.
[0080]
The integrated electrodeless discharge lamp 1, induction coil support bars 2 _A1 , 2 _B1 , 2 _A2 , 2 _B2 and induction coil 3 are housed in an outer tube 5.
[0081]
In addition, although not shown in figure, the introduction part of the high frequency power supply is formed in the one cap body 6 via the sealing means.
[0082]
Then, the ultraviolet rays radiated from the electrodeless discharge lamp 1 pass through the outer tube 5 from the induction coil 3 and the induction coil support bars 2 _A1 , 2 _B1 , 2 _A2 and 2 _B2 and are led out to the outside. .
[0083]
When oxygen or air is passed through the outer pipe 5 through the fluid flow hole 6a1 provided in the cap body 6, ozone can be generated. The generated ozone can act on sterilization and the like together with ultraviolet rays. Further, ozone may be taken out separately and used for an application different from ultraviolet rays. The electrodeless discharge lamp can be cooled by allowing the fluid to flow through the outer tube 5.
[0084]
FIG. 6 is a partial sectional front view showing a second embodiment of the electrodeless discharge lamp device of the present invention.
[0085]
FIG. 7 is a side view of the same.
[0086]
FIG. 8 is a side view of the state where the cap body is similarly removed.
[0087]
In the figure, the same parts as those in FIGS.
[0088]
This embodiment is different in that a pair of induction coil support bars 2 _A and 2 _B are used.
[0089]
That is, the pair of induction coil support bars 2 _A and 2 _B are disposed relatively close to each other in the lower part of FIG. 6, and all the induction coils 3 are connected to the induction coil support bars 2 _A and 2 _B. ing.
[0090]
The induction coil support bars 2 _A and 2 _B are connected to terminals A and B fixed to one side of the peripheral edge of the insulating member 4 ′. Thereby, the electrodeless discharge lamp 1, the induction coil 3, and the induction coil support bars _2A , _2B are integrated, but the other side of the insulating member 4 'is easy to move. Therefore, the positioning rod 8 is fixed and the cap body 6 is fixed. It is in contact with the inner surface of '.
[0091]
Four openings 6a2 are formed around the cap body 6 ', and these are configured so that they can be closed if necessary. The opening 6a2 can be used for fluid flow and power supply introduction.
[0092]
【The invention's effect】
According to each of the first to sixth aspects of the present invention, the induction coil support bars that make a pair are extended along the longitudinal direction of the straight tube-type electrodeless discharge lamp, and the induction coils are connected to the induction coil support bars. Since the induction coil is not easily deformed, the reliability of the device is improved, and the induction coil can be manufactured and assembled easily. When using a plurality of induction coils, the distance between the induction coils is made as narrow as possible to achieve uniform brightness. It is possible to provide an electrodeless discharge lamp apparatus that obtains the above.
[0093]
According to the invention of claim 2, in addition, the annular body is integrally formed at both ends of the electrodeless discharge lamp, and the electrodeless discharge lamp is supported through the annular body, thereby supporting the electrodeless discharge lamp. An easy electrodeless discharge lamp device can be provided.
[0094]
According to the invention of claim 3, in addition, by using a plurality of pairs of induction coil support bars, an electrodeless discharge in which the electrodeless discharge lamp, the induction coil and the induction coil support bar are mechanically integrated to facilitate handling. A lamp device can be provided.
[0095]
According to the invention of claim 4, in addition, the induction coil support bar can be fixed easily and reliably by fixing the induction coil support bar to the insulating members attached to both ends of the electrodeless discharge lamp. An electrodeless discharge lamp device can be provided.
[0096]
According to the fifth aspect of the invention, in addition, the electrodeless discharge lamp, the induction coil, the induction coil support bar, and the insulating member are housed in the outer tube, so that it can be used by being immersed in the liquid to be treated, for example. An electrodeless discharge lamp device can be provided.
According to the invention of claim 6, an electrodeless discharge lamp device that additionally generates ozone as necessary by disposing a fluid introduction hole and a fluid discharge hole in cap bodies mounted at both ends of the outer tube. Can be provided.
[Brief description of the drawings]
FIG. 1 is a longitudinal sectional view showing a first embodiment of an electrodeless discharge lamp device according to the present invention. FIG. 2 is a side view. FIG. 3 is a side view with a cap body removed. FIG. 5 is a schematic diagram for explaining the connection between the induction coil and the induction coil support bar as viewed in the direction of the arrow from the cross section taken along the line IV-IV ′ in FIG. FIG. 6 is a schematic diagram for explaining the connection between the induction coil and the induction coil support bar. FIG. 6 is a partial cross-sectional front view showing a second embodiment of the electrodeless discharge lamp device of the present invention. FIG. 9 is a side view of the conventional electrodeless discharge lamp device with the cap body removed.
DESCRIPTION OF SYMBOLS 1 ... Electrodeless discharge lamp 1a ... Discharge vessel 1a1 ... Thin tube 1b ... Ring body 2 _A2 ... Induction coil support bar 2 _B2 ... Induction coil support bar 3 ... Induction coil 4 ... Insulating member 4a ... Hole 4b ... Notch 5 ... Outer tube 5a ... ridge 6 ... cap body 6a ... cap body 6a1 ... fluid flow hole 6b ... ring body 6c ... bolt 7 ... packing A ... terminal B ... terminal

Claims (6)

A straight tube type electrodeless discharge lamp;
An induction coil support bar comprising at least a pair of conductive members extending along the longitudinal direction of the electrodeless discharge lamp in a state of being insulated from each other at a position separated from the electrodeless discharge lamp;
An induction coil wound around an electrodeless discharge lamp and having one end connected to one induction coil support bar and the other end connected to the other induction coil support bar;
An electrodeless discharge lamp device comprising: 2. The electrodeless discharge lamp device according to claim 1, wherein an annular body is integrally formed at both ends of the electrodeless discharge lamp and is supported via the annular body. The induction coil support bars are a plurality of pairs distributed around the electrodeless discharge lamp;
There are a plurality of induction coils, which are distributedly connected to a plurality of pairs of induction coil support bars;
The electrodeless discharge lamp apparatus according to claim 1 or 2, A pair of insulating members attached to both ends of the electrodeless discharge lamp;
Both ends of the induction coil support bar are fixed to a pair of insulating members;
The electrodeless discharge lamp device according to any one of claims 1 to 3, wherein A radiation transmissive outer tube containing an electrodeless discharge lamp, an induction coil support bar, an induction coil and an insulating member;
A pair of cap bodies sealed and attached to both ends of the outer tube;
The electrodeless discharge lamp device according to claim 4, comprising: A fluid introduction hole disposed in one cap body;
A fluid outlet hole disposed in the other cap body;
6. An electrodeless discharge lamp device according to claim 5, wherein a fluid can flow through the outer tube.

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