JP3680227B2 - Hot platen - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention belongs to a hot platen for heating an object to be heated, and particularly to a hot platen used in a heat treatment process for manufacturing a semiconductor or a liquid crystal display.
[0002]
[Prior art]
As a conventional technology of a hot platen, for example, one used in a manufacturing process of a liquid crystal display is known. In recent years, thin, low-power liquid crystal display device: The (LCD Liquid Crystal Display) has become to attract attention, now, the LCD on the market, a simple matrix drive STN (Super Twisted Transistor), TFT There is a MIM (Metal Insulator Metal) method that is an improvement of the above. Among these, the TFT method in which a transistor is embedded in each pixel occupies 60% of the entire liquid crystal panel.
[0003]
This TFT type display is composed of a very thin film except for the glass substrate, spacers, and liquid crystal which are structural materials. In particular, the structure of the TFT portion that serves as a switch for opening and closing the pixel is a combination of metal, silicon, and an insulating film often found in semiconductor integrated circuits. As in the case of semiconductors, these are formed by a manufacturing process by repeated lithography using thin film formation, exposure, and etching. At this time, it is necessary to raise or lower the temperature around 200 ° C., and a heating plate is used for heating and cooling.
[0004]
An example of how the hot platen is used will be described in the pre-bake process shown in FIG.
[0005]
The liquid crystal display manufacturing apparatus has an exterior structure made of a rectangular parallelepiped box 171 having a size of about 5 × 2 × 2 m ³ . A plurality of small chambers 172a, 172b, 172c, and 172d are provided inside the box body 171 by providing a plurality of partition plates. Small room 172a, 172 b, 172c, at the bottom of 172d, the heat plate 173a, 173b, 173 c, 173d are one by one placed.
[0006]
Windows 174 a and 174 b are formed on both side surfaces of the box body 171. In one window 174a, a liquid crystal glass substrate 180 being processed is placed in each of the small rooms 172a, 172b, 172c, and 172d. As an example, the four small chambers 172a, 172b, 172c, and 172d provided with the heating plates 173a, 173b, 173c, and 173d that are adjusted to 110 ° C., 140 ° C., 160 ° C., and 110 ° C. in order are passed through the other. The data is sent to the window 174b. Such a planar in-line heating method is a pre-bake process.
[0007]
In addition, although the plane inline type was described as an example, there are cases where a single-wafer type liquid crystal glass substrate is stacked in a plurality of stages or incorporated together as a coating apparatus. Further, it is also incorporated in semiconductor manufacturing equipment such as film formation, diffusion for heat treatment, CVD equipment, and heat treatment equipment.
[0008]
Such a hot platen for a liquid crystal display manufacturing device or a hot platen for a semiconductor manufacturing device has a liquid crystal display or semiconductor in contact with or close to a surface in contact with the liquid crystal or semiconductor. There is a combination of a flat plate (top plate) on which one surface for drying and heat treatment is flat and impurities are not exposed on one surface, and a heating source for heating the top plate. These hot plates are described in the specification of Japanese Patent Application No. 8-116788 filed earlier by the applicant.
[0009]
The hot platen shown in FIG. 5 shows a conventional technique configured to be used as a hot platen for a liquid crystal display manufacturing device or a hot platen for a semiconductor manufacturing device.
[0010]
This hot platen is formed with a single groove 201 on the back surface of the top plate 200, and is configured to circulate hot water or cooling water through the groove 201 and use it for heating or cooling. A sealing plate 203 is provided on the back surface of the top plate 200 in order to seal the groove 201 in a watertight manner. Further, a packing groove 208 for fitting a sealing packing member (not shown) in the same direction as the groove portion 201 of the top plate 200 is formed on the back surface of the top plate 200. The top plate 200 and the sealing plate 203 are fixed together by screws 204 with a sealing packing member fitted in the packing groove 208. Connected to the sealing plate 203 are an inflow pipe 206 for flowing liquid into the groove 201 and an outflow pipe 207 for flowing out liquid from the groove 201.
[0011]
[Problems to be solved by the invention]
However, the hot platen having the configuration of the prior art shown in FIG. 5 has a problem that the structure for sealing the groove 201 in a watertight manner becomes complicated.
[0012]
In addition, the heating plate having the configuration of the conventional example uses industrial pure water as a cooling water flowing between the groove portion 201 and the sealing plate 203 in order to avoid attacking the metal of dissolved water. Therefore, there is a problem that corrosion occurs due to the attack of the metal material remaining on the inner surface of the groove portion 201 of the top plate 200 and the elution of metal ions from the metal. In particular, when the top plate 200 is made of a soft metal material such as aluminum, corrosion also occurs due to residual metal powder due to the cutting of the groove 201.
[0013]
Furthermore, in place of the groove portion 201 of the top plate 200, when the pipe is fixed to the top plate 200, if the top plate 200 and the pipe 200 are made of an aluminum material, the industrial material for distributing the top plate 200 and the pipe 200 is used. There is a risk of similar corrosion with pure water, and there is a risk of water leakage due to prolonged use.
[0014]
Therefore, the problem of the present invention is that when a pipe is fixed to the top plate, the temperature distribution can be improved over a long period of time by preventing corrosion of the pipe, and a liquid crystal or a semiconductor is placed on the top plate. An object of the present invention is to provide a hot plate in which the temperature distortion of the main surface of the hot plate is improved.
[0015]
[Means for Solving the Invention]
According to the present invention, heat is put an object to be heated, a heating plate having a cooling major surfaces, the heating plate comprising a heat source pipe provided on the hot plate so as to face the main surface, the heat source pipe And a first pipe member and a second pipe member inserted into the first pipe member, in a groove portion provided in advance on one surface of the hot plate opposite to the main surface. A hot platen characterized in that the first and second pipe members and the hot plate are brought into close contact with each other by press-fitting with caulking .
[0016]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment of the hot platen according to the present invention will be described with reference to FIGS. Referring to FIGS. 1 and 2, the hot platen is a hot plate (hereinafter referred to as a face plate) 1 having a main surface 1a for heating the heated object such as a liquid crystal glass substrate. And a heat source pipe 3 provided on the face plate 1 so as to face the main surface 1a.
[0017]
The face plate 1 is formed with a single groove 5 for mounting the heat source pipe 3 on one surface 1b opposite to the main surface 1a. The outer peripheral surface of the heat source pipe 3 is joined to the inner wall of the groove 5. A part of the outer peripheral surface of the heat source pipe 3 is exposed on the opening side of the groove 5. The heat source pipe 3 can be attached to the groove portion 5 by a known means such as press fitting the heat source pipe 3 into the groove portion 5 with a press or the like and caulking the opening edge of the groove portion 5.
[0018]
In the heating plate of this embodiment, the groove portion 5 is provided in a loop shape on one surface 1b of the face plate 1 having a disk shape of about 240 to 340 mm, and the heat source pipe 3 is inserted into the groove portion 5 so that the edge portion of the groove portion 5 is provided. securing the by Me caulking. At this time, both end portions of the heat source pipe 3 are bent on one surface 1b opposite to the main surface 1a and are formed in a substantially upright state, so that one end of the heat source pipe 3 is heated or cooled. The other end is used as a liquid outflow portion.
[0019]
As shown in FIG. 3, the heat source pipe 3 includes a first pipe member 3 a and a second pipe member 3 b provided inside the first pipe member 3 a. The second pipe member 3b is inserted into the inner peripheral surface of the first pipe member 3a without performing close contact processing , and after performing molding processing to match the groove portion 5, the first pipe member 3a is included in the groove portion 5. The second pipe member 3b is press-fitted and the whole is crimped so that the second pipe member 3b is completely brought into close contact, and the outer peripheral surface of the second pipe member 3b is in close contact with the first pipe member 3a. The heat source pipe 3 is flattened together with the first pipe member 3a while leaving the second pipe 3b in a state in which the one surface 1b of the face plate 1 after crimping and press-fitting exposes the first pipe member 3a.
[0020]
The second pipe member 3b has a corrosion resistance to fluid such as pure water for industrial circulating the second pipe member 3b, high hardness of the material than the first pipe member 3a Is made by. The face plate 1 and the first pipe member 3a are made of the same metal material so that the surface treatment of the face plate 1 can be freely set. The second pipe member 3b is made of a metal material different from that of the face plate 1 and the first pipe member 3a.
[0021]
The first pipe member 3a is, for example, an aluminum material, by a second pipe member 3b from the first pipe member 3a as in the second pipe member 3b is stainless steel material is made to a high hardness, face The degree of adhesion between the first and second pipe members 3a and 3b and between the first pipe member 3a and the groove portion 5 provided in the face plate 1 is improved in the press-fitting and fitting process of the plate 1 into the groove portion 5. I am letting. For example, it has corrosion resistance and high hardness against pure water flowing through the second pipe member 3b. Further, the end of the second pipe member 3b protrudes from the end of the first pipe member 3a, and has a high hardness so that sufficient mechanical strength can be obtained when connecting to the introduction pipe or the discharge pipe. Material is used.
[0022]
Further, the end portion 10 of the heat source pipe 3 has a stepped shape by projecting the second pipe member 3b beyond the first pipe member 3a, and the second pipe member is used as the introduction pipe or the outlet pipe. By connecting the end portions of 3b, it is possible to prevent electric corrosion that occurs when fluid permeates into the gap between the first and second pipe members 3a and 3b.
[0023]
When a fluid different from pure water is used as a heat source, the material of the second pipe member 3b is selected according to the type of fluid flowing through the second pipe member 3b, and the first pipe member 3a is selected. And the face plate 1 may be combined. In this case, the first pipe member 3a and the face plate 1 may be made of the same material. Moreover, it is also possible to fill the heating pipe with a heat source such as a sheathed heater through an inorganic electrical insulator in the second pipe member 3b.
[0024]
In addition, the 1st pipe member 3a and the 2nd pipe member 3b can also prevent the deformation | transformation by a bending process by making these plate | board thickness dimensions mutually different board | plate thickness dimensions. The second pipe member 3b may be made of a resin material having excellent corrosion resistance, which is limited to a metal material.
[0025]
【The invention's effect】
As described above, according to the heating plate of the present invention, the double tubular heat source pipe is joined to the hot plate with the first and second pipe materials, and the second pipe material having excellent corrosion resistance is used. Therefore, the corrosion resistance by the fluid is improved, so that not only can it be used for a long time, but also the thermal resistance with the fluid can be reduced.
[0026]
In addition, since the second pipe member has a higher hardness than the first pipe member, the pipes and the heat plate are in close contact with each other, and the thermal resistance is minimized, so that the temperature distortion of the main surface can be improved. The connection between the inlet pipe or the outlet pipe and the second pipe member can be completed with a simple structure.
[0027]
Furthermore, since the second pipe member is in close contact with the inner peripheral surface of the first pipe member and the first pipe member is joined to the groove portion to form one surface, the first surface can be cut even if the one surface is cut. Since the second pipe member is located on the inner peripheral surface of the pipe member, the flatness parallel to one surface can be obtained without exposing the second pipe member by cutting, and both surfaces can be flattened directly. It can be a surface capable of plane machining. That is, if the first pipe member and the hot plate are made of the same material, the optimum processing conditions are the same. If the thickness is within the thickness range of the pipe member, the corrosion resistance and pressure resistance of the pipe member serving as the flow path are impaired. In addition, flat processing of one surface of the hot plate can be facilitated. Accordingly, it is possible to easily perform planar processing of one surface parallel to the main surface to be heated and cooled by placing an object to be heated on the surface opposite to the main surface after the planar processing as a reference surface. .
[Brief description of the drawings]
FIG. 1 is a sectional view showing a first embodiment of a hot platen according to the present invention.
FIG. 2 is a plan view showing a state in which the heating plate shown in FIG. 1 is viewed from the back side.
FIG. 3 is an enlarged cross-sectional view of a part of the hot platen shown in FIG.
FIG. 4 is a schematic diagram for explaining a conventional pre-baking process.
FIG. 5 is a cross-sectional view showing a conventional hot plate in an exploded state.
[Explanation of symbols]
1,200 Heat plate (face plate)
1a Main surface
1b one surface 3 heat source pipe 3a first pipe member 3b second pipe member 5, 201 groove 203 sealing plate 204 screw

Claims (8)

Heating put an object to be heated, a heating plate having a cooling major surfaces, the heating plate comprising a heat source pipe provided on the hot plate so as to face the main surface, wherein the heat source pipe, a first pipe member And a second pipe member inserted into the first pipe member, and by caulking and pressing into a groove portion provided in advance on one surface of the hot plate opposite to the main surface. Each of the first and second pipe members and the hot plate are in close contact with each other and fitted together . 2. The hot platen according to claim 1, wherein the second pipe member is harder than the first pipe member . 2. The hot platen according to claim 1, wherein the second pipe member is made of a material having corrosion resistance against a fluid flowing through the second pipe member . The hot platen according to claim 1, wherein the hot plate and the first pipe member are made of the same material . 2. The hot platen according to claim 1, wherein the hot plate and the first pipe member are made of the same material, and the second pipe member is the hot plate and the first pipe. A hot platen made of a material different from that of the member . 2. The hot platen according to claim 1, wherein the first pipe member is made of an aluminum material, and the second pipe member is made of a stainless material . 2. The hot platen according to claim 1, wherein a tip end portion of the second pipe member protrudes beyond a tip end of the first pipe member . 2. The heat plate according to claim 1, wherein the heat source pipe is a first pipe that leaves the second pipe in a state in which the one surface of the hot plate after caulking and press-fitting exposes the first pipe member. A heating plate that is flattened together with a member.

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