JP3700883B2 - Linear motor stator - Google Patents
Linear motor stator Download PDFInfo
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- JP3700883B2 JP3700883B2 JP29966196A JP29966196A JP3700883B2 JP 3700883 B2 JP3700883 B2 JP 3700883B2 JP 29966196 A JP29966196 A JP 29966196A JP 29966196 A JP29966196 A JP 29966196A JP 3700883 B2 JP3700883 B2 JP 3700883B2
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- Prior art keywords
- permanent magnets
- stator
- linear motor
- rows
- coil
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Description
【0001】
【発明の属する技術分野】
本発明は,電磁作用を利用して電気エネルギーを直線運動エネルギーに変換するリニアモータの固定子に関する。
【0002】
【従来の技術】
電気エネルギーを直線運動のエネルギーに変換する装置としてリニアモータが広く知られており、多くの種類のものが開発されている。リニアモータは直線状の固定子と固定子に沿って移動する可動子からなり、固定子と可動子の間の電磁作用によって推力が直接得られるため、効率がよいほか、バックラッシュがなく精密な位置決めができるなどの特徴を有しており、これらを生かした利用が広まりつつある。このモータの固定子と可動子にはコイルと永久磁石が備えられており、その配置は様々である。そのうち、固定子に永久磁石を配置し可動子にコイルを設けたものは、可動子が軽量であるため負荷重量を大きくすることができたり、加速度を大きくすることができるなどの利点があるためFA分野での採用が増えつつある。
【0003】
その構造を図3を用いて説明する。図3は従来の一般的なリニアモータの移動方向と直角な面の断面図である。図において1は図示しないベースに固定された固定子であり、該固定子1のヨーク2、3には永久磁石4、5が固着されて上に開口するコ字状をしている。永久磁石4、5は平板状をしており、同じ長方形の平板状のものが中心間距離Pで可動子6の移動方向、すなわち紙面に垂直な方向に直線状に並べられている。対向する永久磁石4、5の磁極は異なる極性となるよう着磁されており、同時に移動方向の隣り合う永久磁石の磁極も異なる極性となるよう着磁されている。永久磁石4、5の間にはエアギャップを介して平板状のコイル7があり、上部の平板状のテーブル8に固着されている。テーブル8とコイル7は可動子6の一部をなしており、図示しない支持機構により移動方向に移動可能に支持されている。テーブル8は被搬送物を運んだりするための台となっており必要に応じて搬送のための機構や部品が取り付けられる。コイル7には前記永久磁石の中心間距離Pに対応した所定の距離だけ移動方向に離れて、相数に応じた複数のコイルが巻回されている。この複数のコイルに多相の交流電流を供給して励磁すると、可動子6を移動方向に直線移動させることができる。
また、この構造に少し改良を加えたものとして、両端の永久磁石の長さを他の永久磁石の長さの半分にするというものが特開平6−38502号公報に開示されている。
【0004】
【発明が解決しようとする課題】
ところが、前記の一般的な従来技術では、移動方向の両端では永久磁石の磁束が両端の外側に漏れて磁束密度の大きさが他より小さくなると同時に磁束密度のピークの位置が等ピッチの位置より外側にずれて磁束密度の分布に歪みが残るので、両端付近ではなめらかな推力が得られず、スムーズな動きができないという欠点があった。また前記の改善された従来技術においても、両端の永久磁石の磁束密度の大きさが他の永久磁石の磁束密度の大きさに近づくものの、磁束密度のピークが等ピッチの位置より内側にきて磁束密度分布の歪みが改善されることにはならなかった。
【0005】
【課題を解決するための手段】
そこで本発明は、上記問題を解決するため、同じ長方形の平板状の永久磁石を中心間距離Pで2列に並べ、この2列の永久磁石が間をおいて対面するようヨークに固着された固定子と、前記2列の永久磁石の間にエアギャップを介して配置されたコイル及びこのコイルを固着したテーブルからなるとともに前記固定子に沿って移動可能に支持する支持機構を備えた可動子とからなり、対向する前記永久磁石の極性及び隣合う前記永久磁石の極性が異なるよう着磁されたリニアモータにおいて、2列の永久磁石の両端と両端から2番目の永久磁石の中心間距離を(0.85〜0.95)・Pとしたのである。
【0006】
【発明の実施の形態】
これによって、両端の永久磁石の磁束密度のピッチをPにすることができ、同時に、大きさも他の永久磁石の大きさに近づけることができるのである。
以下、本発明の実施の形態を図に基づいて説明する。図1は本発明のリニアモータの固定子の要部平面図であり、1は図示しないベースなどに固定された固定子、2、3はこの固定子のヨークである。このヨーク2、3の内側にはそれぞれ永久磁石41、42、43、47、48、49、51、52、53、57、58、59が固着されており、対面する永久磁石が異極となるよう着磁され、同時に移動方向に隣り合う永久磁石も異極となるよう着磁されている。そして両端の永久磁石41、49、51、59と両端から2番目の永久磁石42、48、52、58との中心間距離はそれぞれa・Pとなるよう配置されている。ここでaの値は0.85〜0.95であり、このうち0.9〜0.92の範囲がさらに望ましい。
以上の構成をした固定子の磁束密度を数値解析して求めたのが図2である。この図からわかるように、本発明によると、両端付近の永久磁石の磁束密度のピッチがPになり、ピークの大きさが正弦波関数のピークに近づいており、可動子が両端付近にきたときの推力リップルが小さくなるのである。
【0007】
以上2列の永久磁石がヨークに固着されて平行に対面したリニアモータの固定子について述べたが、本発明の趣旨によると永久磁石は2列に限るものではなく、1列、又は3列、4列などとしてもよく、また平行に対面するよう配置されたものに限るものでもなく、他の形態の配置としてよいことも明白である。
【0008】
【発明の効果】
以上述べたように、本発明によると、リニアモータの移動方向の両端部の磁束密度分布が、従来に比べて正弦波関数に近づくので、永久磁石が配置された両端付近まで推力リップルを伴うことなく可動子を駆動することができる。従って、精密な位置決めをすることができると同時に位置決めの整定時間を短くすることができてリニアモータの性能を向上する効果がある。
【0009】
【図面の簡単な説明】
【図1】本発明のリニアモータの固定子の要部平面図
【図2】磁束密度分布図
【図3】従来のリニアモータの断面図
【符号の説明】
1 固定子
2、3 ヨーク
4、41、42、43、47、48、49 永久磁石
5、51、52、53、57、58、59 永久磁石
6 可動子
7 コイル
8 テーブル[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a stator of a linear motor that converts electric energy into linear kinetic energy using electromagnetic action.
[0002]
[Prior art]
Linear motors are widely known as devices for converting electrical energy into linear motion energy, and many types of devices have been developed. A linear motor consists of a linear stator and a mover that moves along the stator. Thrust is directly obtained by the electromagnetic action between the stator and the mover, which is efficient and precise with no backlash. It has features such as positioning, and the use of these features is spreading. The stator and mover of this motor are provided with coils and permanent magnets, and their arrangements are various. Among them, the permanent magnet arranged on the stator and the coil provided on the mover have advantages such as the weight of the mover can be increased and the load weight can be increased and the acceleration can be increased. The adoption in the FA field is increasing.
[0003]
The structure will be described with reference to FIG. FIG. 3 is a cross-sectional view of a plane perpendicular to the moving direction of a conventional general linear motor. In the figure, reference numeral 1 denotes a stator fixed to a base (not shown). The yokes 2 and 3 of the stator 1 have a U-shape in which permanent magnets 4 and 5 are fixed and open upward. The permanent magnets 4 and 5 have a flat plate shape, and the same rectangular flat plate shape is arranged linearly in the moving direction of the mover 6, that is, in the direction perpendicular to the paper surface, with a center-to-center distance P. The magnetic poles of the opposing permanent magnets 4 and 5 are magnetized to have different polarities, and the magnetic poles of the adjacent permanent magnets in the moving direction are also magnetized to have different polarities. A flat coil 7 is interposed between the permanent magnets 4 and 5 via an air gap, and is fixed to an upper flat table 8. The table 8 and the coil 7 form part of the mover 6 and are supported by a support mechanism (not shown) so as to be movable in the moving direction. The table 8 is a table for carrying an object to be conveyed, and a mechanism and parts for conveyance are attached as necessary. A plurality of coils corresponding to the number of phases are wound around the coil 7 by a predetermined distance corresponding to the distance P between the centers of the permanent magnets in the moving direction. When a multiphase alternating current is supplied to the plurality of coils and excited, the mover 6 can be moved linearly in the movement direction.
Japanese Patent Laid-Open No. 6-38502 discloses a structure in which the structure of the permanent magnets at both ends is made half the length of the other permanent magnets.
[0004]
[Problems to be solved by the invention]
However, in the above-described general prior art, the magnetic flux of the permanent magnet leaks to the outside of both ends in the moving direction and the magnitude of the magnetic flux density becomes smaller than the other, and at the same time the peak position of the magnetic flux density is more than the position of the equal pitch. Since there is a distortion in the distribution of the magnetic flux density by shifting to the outside, there is a drawback in that smooth thrust cannot be obtained near both ends and smooth movement cannot be achieved. Also in the above-described improved prior art, although the magnitude of the magnetic flux density of the permanent magnets at both ends approaches the magnitude of the magnetic flux density of the other permanent magnets, the peak of the magnetic flux density comes inward from the position of the equal pitch. The distortion of the magnetic flux density distribution was not improved.
[0005]
[Means for Solving the Problems]
Therefore, in order to solve the above-mentioned problem, the present invention arranges the same rectangular plate-like permanent magnets in two rows at a center-to-center distance P, and is fixed to the yoke so that the two rows of permanent magnets face each other at a distance. A mover comprising a stator, a coil disposed via an air gap between the two rows of permanent magnets, and a table to which the coil is fixed, and a support mechanism for supporting the coil movably along the stator. In the linear motor magnetized so that the polarity of the opposing permanent magnets and the polarity of the adjacent permanent magnets are different, the distance between the centers of the two permanent magnets in the two rows and the center of the second permanent magnet from both ends (0.85 to 0.95) · P.
[0006]
DETAILED DESCRIPTION OF THE INVENTION
As a result, the pitch of the magnetic flux density of the permanent magnets at both ends can be set to P, and at the same time, the size can be close to the size of other permanent magnets.
Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a plan view of an essential part of a stator of a linear motor according to the present invention. Reference numeral 1 denotes a stator fixed to a base (not shown), and reference numerals 2 and 3 denote yokes of the stator.
FIG. 2 shows the magnetic flux density of the stator configured as described above obtained by numerical analysis. As can be seen from this figure, according to the present invention, when the pitch of the magnetic flux density of the permanent magnets near both ends is P, the peak size approaches the peak of the sine wave function, and the mover comes near both ends. The thrust ripple becomes smaller.
[0007]
The linear motor stator in which two rows of permanent magnets are fixed to the yoke and face each other in parallel has been described above. However, according to the gist of the present invention, the permanent magnets are not limited to two rows, but one row or three rows. It may be four rows or the like, and is not limited to those arranged to face each other in parallel, and it is obvious that other arrangements may be adopted.
[0008]
【The invention's effect】
As described above, according to the present invention, since the magnetic flux density distribution at both ends in the moving direction of the linear motor is closer to a sine wave function than in the conventional case, the thrust ripple is accompanied to the vicinity of both ends where the permanent magnets are arranged. Without moving the mover. Accordingly, it is possible to perform precise positioning, and at the same time, it is possible to shorten the positioning settling time, thereby improving the performance of the linear motor.
[0009]
[Brief description of the drawings]
FIG. 1 is a plan view of a main part of a stator of a linear motor of the present invention. FIG. 2 is a magnetic flux density distribution diagram. FIG. 3 is a sectional view of a conventional linear motor.
1 Stator 2, 3 Yoke 4, 41, 42, 43, 47, 48, 49
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29966196A JP3700883B2 (en) | 1996-10-23 | 1996-10-23 | Linear motor stator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29966196A JP3700883B2 (en) | 1996-10-23 | 1996-10-23 | Linear motor stator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10127038A JPH10127038A (en) | 1998-05-15 |
| JP3700883B2 true JP3700883B2 (en) | 2005-09-28 |
Family
ID=17875450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29966196A Expired - Fee Related JP3700883B2 (en) | 1996-10-23 | 1996-10-23 | Linear motor stator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3700883B2 (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7385679B2 (en) * | 2004-12-29 | 2008-06-10 | Asml Netherlands B.V. | Lithographic apparatus and actuator |
| EP3423130B1 (en) | 2016-03-03 | 2025-05-14 | Bayer Healthcare LLC | System and method for improved fluid delivery in multi-fluid injector systems |
| CA3097557A1 (en) | 2018-04-19 | 2019-10-24 | Bayer Healthcare Llc | System and method for air detection in fluid injector |
| JP2021536278A (en) | 2018-08-28 | 2021-12-27 | バイエル・ヘルスケア・エルエルシーBayer HealthCare LLC | Fluid injector system with improved specific performance |
-
1996
- 1996-10-23 JP JP29966196A patent/JP3700883B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH10127038A (en) | 1998-05-15 |
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