JP3701434B2 - Multi-axis sample table - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a multi-axis sample stage in which an X-ray diffractometer can mount a sample in a planar shape and arbitrarily rotate or move the sample with respect to X-rays.
[0002]
[Prior art]
The X-ray diffractometer irradiates a sample with X-rays emitted from an X-ray source, and detects the diffracted X-rays reflected or transmitted from the sample with a detector, whereby the incident angle θ and the diffraction angle with respect to the sample are detected. This is a physicochemical apparatus that can measure the relationship with 2θ and analyze the crystal structure and the like of a sample based on the measurement result.
As a sample analysis using this X-ray diffractometer, there is a method of analyzing the orientation and the like of a sample with a positive point diagram. The positive dot diagram shows the relationship between the orientation of the sample with respect to the incident X-ray and the intensity distribution of the diffracted X-ray in a stereo projection called a polar net.
[0003]
In the measurement of this positive dot diagram, the sample mounted on the sample stage of the X-ray diffractometer is rotated by an arbitrary angle α about an arbitrary axis center substantially parallel to the sample surface, and the sample is rotated in-plane by an angle β. Then, the integrated intensity of the diffracted X-rays at the angles α and β is measured with an X-ray detector. Then, the integrated intensity of this diffracted X-ray is displayed on a polar net to create a positive dot diagram. The polar net has a memory with an angle α in the radial direction, the center is defined as α = 90 °, and the outer periphery is defined as α = 0 °. In addition, a memory having an angle β is engraved in the circumferential direction of the polar net.
[0004]
[Problems to be solved by the invention]
For the measurement of the positive dot diagram using the X-ray diffractometer, as described above, the α rotating means for rotating the sample by an arbitrary α angle about an arbitrary axis center substantially parallel to the sample surface, and the β sample by the β angle A β rotation means for in-plane rotation is required at a minimum.
Therefore, conventionally, an X-ray diffractometer used for positive pole figure measurement has been equipped with a multi-axis sample stage including these α rotation means and β rotation means.
[0005]
On the other hand, for X-ray diffraction measurement on a thin film sample having a small thickness, z movement is performed to move back and forth in the z-axis direction perpendicular to the sample surface in order to accurately determine the origin position of the sample surface with respect to the X-ray source. The sample stage needs to be equipped with means.
As described above, since the rotation or movement direction of the sample differs depending on the application of the X-ray diffraction measurement, a sample table is conventionally prepared for each purpose, and a sample table suitable for the measurement application is selected from these. It was supposed to be used.
[0006]
However, some users who have X-ray diffractometers have positive pole figure measurements, thin film sample measurements, and various other uses of X-ray diffraction measurements, or in the future. There are not a few users. From these users, it is uneconomical in terms of cost to prepare the sample stage for each purpose, and it takes time and effort to install and adjust the sample stage to the X-ray diffractometer, which is not efficient.
[0007]
The present invention has been made in view of such circumstances, so that it is possible to cope with various measurement applications using an X-ray diffractometer with a single sample stage, thereby reducing equipment costs and improving work efficiency. The purpose is to do.
[0008]
[Means for Solving the Problems]
In order to achieve the above object, the multi-axis sample stage of the present invention includes a sample mounting portion on which a sample can be mounted in a planar shape, and an α rotating means for rotating the sample mounting portion about an arbitrary axis substantially parallel to the sample surface. Β rotation means for rotating the sample mounting portion in-plane and z moving means for moving the sample mounting portion in a direction substantially perpendicular to the sample surface.
By providing the α rotating means, the β rotating means, and the z moving means in this way, for example, the measurement of the positive dot diagram and the measurement of the thin film sample described above can be performed on this single multi-axis sample stand. Can do.
[0009]
Furthermore, the multi-axis sample stage of the present invention includes a parallel moving means for moving the sample mounting portion in a direction substantially parallel to the sample surface in consideration of the partial non-uniformity of the surface state of the sample. Also good.
By providing such a parallel movement means, the sample can be appropriately moved in parallel with the sample surface to change the X-ray irradiation site, and the measurement data can be made uniform.
[0010]
Further, according to the present invention, the above-mentioned α rotation means includes an arc-shaped α rotation guide portion formed on the sample table main body, a movable frame movable along the α rotation guide portion, and an α drive for driving the movable frame. And a ball circulating means for moving and circulating a large number of metal spheres between the α rotation guide portion and the moving gantry along with the movement of the moving gantry.
With such a configuration, even if each means such as the sample mounting portion, β rotation means, z movement means, and parallel movement means is mounted on the moving gantry, the α rotation guiding portion and the moving gantry are moved by the ball circulation means. Since a large number of metal spheres are interposed therebetween, the movable frame can be moved smoothly.
[0011]
In the present invention, the β rotation means is driven by a driven gear that rotates integrally with the sample mounting portion, a drive gear that meshes with the driven gear, a β drive motor, and a drive force from the β drive motor is transmitted to the drive gear. The driving force transmission means can be configured.
In this case, the driving force transmitting means includes a support arm having a base end attached to the drive shaft of the β drive motor via a bearing and a tip attached to the rotary shaft of the drive gear via the bearing; An endless power transmission body such as a belt or a chain wound between the drive shaft of the motor and the rotation shaft of the drive gear, and an urging means for urging the support arm and constantly contacting the drive gear with the driven gear It is preferable to make it the structure containing these.
[0012]
With such a configuration, even if the sample mounting portion is moved in a direction substantially parallel to the sample surface by the parallel moving means, the support arm follows this movement, so that the meshing state between the driving gear and the driven gear is achieved. And the rotation of the driven gear (that is, the sample mounting portion) can be continued.
[0013]
On the other hand, the β rotation means transmits a worm wheel that rotates integrally with the sample mounting portion, a worm that meshes with the worm wheel, a β drive motor, and a rotational drive force from the β drive motor to the worm to transmit the worm. It is good also as a structure provided with the rotational drive shaft rotated.
In this case, the rotation driving shaft has a configuration in which the central axis extends in the moving direction of the sample mounting portion by the parallel moving means and is slidable in the axial direction with respect to the worm, so that the sample mounting by the parallel moving means is performed. Even if the part moves, the rotational driving force can be continuously transmitted to the worm.
[0014]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
1 is a right side view of a multi-axis sample stage according to an embodiment of the present invention, FIG. 2 is a left side view of the same, FIG. 3 is a cross-sectional view taken along line AA in FIG. 1, and FIG. It is a B diagram.
A multi-axis sample stage according to an embodiment of the present invention includes a sample stage body 1 fixed to a goniometer of an X-ray diffractometer, a sample mounting member 2 for holding a measurement sample in a flat shape, and rotating or moving the sample mounting member 2. The driving means is provided.
[0015]
Among these, the driving means is mounted on the sample mounting member 2 and α rotation means for rotating the sample mounted on the sample mounting member 2 around an arbitrary axis O in the sample surface (hereinafter also referred to as α rotation). A β rotation means for rotating the sample in-plane (hereinafter also referred to as β rotation) and a direction in which the sample mounted on the sample mounting member 2 is substantially parallel to the sample surface (hereinafter also referred to as γ direction in this embodiment). And z moving means for moving the sample mounted on the sample mounting portion in a direction substantially perpendicular to the sample surface (hereinafter also referred to as z-axis direction).
[0016]
FIG. 5 is a sectional view showing a driving force transmission mechanism in the α rotating means, and FIG. 6 is a sectional view showing a movement guide mechanism in the means.
Referring to these figures as well, the α rotation means will be described first. The α rotation means includes an α rotation guide portion 10, a movable base 11, and an α drive motor (α drive means) 12 formed on the sample base body 1. The movable gantry 11 is configured to move along the α rotation guide portion 10 with the driving force from the α drive motor 12.
[0017]
The α rotation guide unit 10 is formed in an arc shape centered on the coaxial O on a virtual plane orthogonal to the arbitrary axis O in the sample surface. A cutout 10a for transmitting X-rays is formed at an arbitrary length at a portion of the α rotation guide 10 that is located in front of the sample stage main body 1. Further, guide grooves 10b having a V-shaped cross section are formed on the left and right side surfaces of the α rotation guide portion 10 along an arcuate guide track. Further, a central groove 10c for inserting a worm wheel piece 17 of the movable gantry 11, which will be described later, is formed along the arc-shaped guide track at the front center portion of the α rotation guide portion 10 (FIGS. 3 and 3). 5).
[0018]
On the other hand, a mounting groove portion 11a that can be loosely fitted to the α rotation guide portion 10 is formed on the back surface portion of the movable gantry 11, and both side surfaces in the mounting groove portion 11a have a V-shaped cross section. A ball circulation groove 11b is formed. Here, the guide groove 10b formed in the α rotation guide portion 10 and the ball circulation groove 11b formed in the moving gantry 11 face each other in a state where the mounting groove portion 11a of the moving gantry 11 is fitted to the α rotation guide portion 10. Positioned to do so.
[0019]
Further, as shown in FIG. 6, ball circulation holes 11c are formed on the left and right side walls of the mounting groove portion 11a, and this ball circulation hole 11c communicates with the above-described ball circulation groove 11b to form a ball circulation path. are doing. A large number of metal spheres 13 are movably loaded in the ball circulation path, and the large number of metal spheres 13 are moved to the ball circulation path along with the movement of the movable frame 11 along the α rotation guide portion 10. It forms a mechanism for moving inside.
[0020]
The metal sphere 13 positioned in the ball circulation groove 11 b of the movable frame 11 is interposed between the guide groove 10 b of the α rotation guide portion 10 and the ball circulation groove 11 b of the movable frame 11. Here, each metal sphere 13 has a diameter slightly larger than the width of the internal space formed by the guide groove 10b and the ball circulation groove 11b. Thereby, the inner surface of the guide groove 10b formed in the α rotation guide portion 10 and the inner surface of the ball circulation groove 11b formed in the movable frame 11 are in contact with the metal sphere 13 respectively, and the contact state is point contact. Yes.
[0021]
Therefore, the contact resistance generated on the inner surface of the guide groove 10b formed on the α rotation guide portion 10 and the inner surface of the ball circulation groove 11b formed on the movable frame 11 is small, and even if a heavy object is mounted on the movable frame 11, it moves smoothly. can do.
[0022]
A ball return piece 14 having a curved surface protrudes toward the guide groove 10b and is attached to both ends of the ball circulation groove 11b formed in the movable frame 11, and the ball return piece 14 smoothly attaches the metal sphere 13 to the ball return groove 11b. In addition to guiding to the ball circulation hole 11c, the metal sphere 13 in the ball circulation hole 11c is smoothly guided to the ball circulation groove 11b.
[0023]
The α drive motor 12 is installed at the upper end of the back surface of the sample stage main body 1. The drive shaft 15 of the motor 12 passes through the vicinity of the center position of the back surface of the α rotation guide portion 10 and extends to the lower end of the back surface portion of the sample table main body 1 and intersects with the α rotation guide portion 10. A worm 16 is mounted in the vicinity.
[0024]
On the other hand, a mounting groove portion 11a that engages with the α rotation guide portion 10 is formed on the back surface portion of the movable gantry 11, and a worm wheel piece 17 is formed at the center of the inner bottom surface of the mounting groove portion 11a. (See FIGS. 3 and 5). The worm wheel piece 17 forms a tooth shape along a pitch circle corresponding to the arc shape of the α rotation guide portion 10, and meshes with the worm 16 when mounted on the α rotation guide portion 10. Therefore, the movable gantry 11 receives the driving force from the α driving motor 12 via the worm 16 and the worm wheel piece 17 and moves along the α rotation guide portion 10.
[0025]
The moving range (that is, the α rotation angle) of the moving gantry 11 is determined by the length of the worm wheel piece 17. Therefore, it is preferable that the length of the worm wheel piece 17 is an arc length that can cover an α rotation angle required in positive pole figure measurement using, for example, an X-ray diffractometer.
[0026]
Next, the z moving means will be described with reference to FIGS.
The z moving means includes a z drive motor 20 fixed to the moving gantry 11 and a front / rear moving member 21 mounted on the moving gantry 11. Guide rails 22 extend in the z-axis direction on the left and right outer surfaces of the movable gantry 11, while the side plates of the longitudinally moving member 21 have guide grooves slidably engaged with the guide rails 22. 23 is formed. By the engagement between the guide rails 22 and the guide grooves 23, the front / rear moving member 21 is movable in the z-axis direction on the movable frame 11.
[0027]
A male screw is formed on the drive shaft 20 a of the z drive motor 20. On the other hand, a nut member 24 is fitted into a portion of the front / rear moving member 21 that faces the drive shaft 20a of the z drive motor 20, and a drive shaft (male screw) of the z drive motor is inserted into the female thread portion of the nut member 24. 20a is screwed. Therefore, when the z drive motor 20 is operated, the front-rear moving member 21 is moved in the z-axis direction by the screw mechanism constituted by the drive shaft (male screw) 20a and the female screw portion of the nut member 24.
[0028]
Next, the parallel moving means will be described with reference to FIGS. 2 to 4 and FIG.
FIG. 7 is a front view showing the parallel moving means.
This parallel moving means includes a parallel drive motor 30 fixed to the front and rear moving member 21, a sliding plate 31 mounted on the front surface of the front and rear moving member 21, and a cam mechanism that transmits the driving force of the parallel driving motor 30 to the sliding plate 31. Including.
[0029]
A guide rail 32 extends in the γ direction on the front surface of the front / rear moving member 21, while a guide groove 33 slidably engaged with the guide rail 32 is provided on the back surface of the sliding plate 31. It is formed. By the engagement between the guide rail 32 and the guide groove 33, the front / rear moving member 21 is movable in the γ direction on the movable frame 11.
[0030]
A cam 34 is attached to the drive shaft of the parallel drive motor 30, while a driven roller 35 that engages with the cam 34 is attached to the end of the sliding plate 31. The cam 34 and the driven roller 35 form a cam mechanism. The cam 34 has an arbitrary shape that gives a reciprocating linear motion to the driven roller 35. In this embodiment, a heart-shaped cam is used as the cam 34. The sliding plate 31 is biased by a biasing member such as a coil spring 36, and the cam 34 and the driven roller 35 are always in contact with each other by this biasing force.
When the parallel drive motor 30 is operated, the cam 34 rotates to reciprocate the sliding plate 31 together with the driven roller 35 in the γ direction.
[0031]
Next, the β rotation means will be described with reference to FIGS. 1 to 4 and FIG.
FIG. 8 is a left side view showing the driving force transmission mechanism in the β rotating means with a part thereof cut.
The β rotation means includes a β drive motor 40 fixed to the longitudinally moving member 21, a rotary plate 42 mounted on the front surface of the sliding plate 31 via a rotary bearing 41, and a driven gear provided on the periphery of the rotary plate 42. 43 and a driving force transmission mechanism that transmits the driving force of the β driving motor 40 to the driven gear 43. The sample mounting member 2 is mounted on a rotating plate 42 so as to rotate β together with the driven gear 43.
[0032]
As shown in FIG. 8, the drive force transmission mechanism transmits the rotation of the β drive motor 40 to the drive gear 47 via the pulleys 44 and 45 and the power transmission belt 46, and rotates the driven gear 43 that meshes with the drive gear 47. It has a configuration.
[0033]
A rotation shaft 47a of the drive gear 47 is rotatably mounted on the tip end portions of the pair of support arms 48 via a bearing 48a. The base end portion of the support arm 48 is rotatably mounted on the drive shaft 40a of the β drive motor 40 via a bearing 48b. The support arm 48 can swing around the drive shaft 40a. Yes. Further, the support arm 48 is urged by a spring member 49 as urging means, and the driving gear 47 and the driven gear 43 attached to the tip of the support arm 48 are kept in mesh with this urging force. .
[0034]
Incidentally, the β drive motor 40 is fixed to the longitudinal movement member 21. On the other hand, the driven gear 43 is integrated with the sliding plate 31 and moves in the γ direction, and therefore, between the β drive motor 40 and the driven gear 43. The relative movement occurs in accordance with the operation of the parallel moving means. Even if there is such relative movement, the drive gear 47 swings together with the support arm 48, so that the meshed state with the driven gear 43 can be maintained.
[0035]
The multi-axis sample stage having the above-described configuration can appropriately give α rotation, β rotation, and reciprocation in the z-axis direction to the sample mounted on the sample mounting member 2 as a single unit. Therefore, it is possible to cope with various measurement applications that can be performed by the X-ray diffraction apparatus.
For example, in the positive electrode point measurement, α rotation and β rotation are required, and α rotation requires a wide range of rotation angles of ± 45 ° (in some cases ± 90 °). All the operations can be satisfied. In addition, since the z-axis reciprocating movement is provided, the sample can be reliably and easily positioned in the thickness direction.
[0036]
Further, in the thin film measurement, α rotation, β rotation, and reciprocation in the z-axis direction are necessary. However, according to this multi-axis sample stage, it is possible to satisfy all the operations. Furthermore, strain measurement (residual stress measurement) of a sample that requires α rotation and reciprocation in the z-axis direction can also be performed with this multi-axis sample stage.
[0037]
Furthermore, since the multi-axis sample stage described above can reciprocate the sample mounted on the sample mounting member 2 in a direction parallel to the sample surface (for example, movement in the γ direction) By appropriately changing the measurement data, the measurement data can be made uniform.
[0038]
In addition, the sample mounting member 2, the rotating plate 42, the sliding plate 31, the front and rear moving member 21, and the moving mount 11 have through holes 2h, 42h, 31h, 21h, and 11h (notches) for transmitting X-rays, respectively. Etc.) (see, for example, FIG. 4), and can be adapted for transmission X-ray diffraction measurement.
[0039]
In addition, since the α rotation guide 10 formed on the sample stage main body 1 is formed with a notch 10a for transmitting X-rays to an arbitrary length, X-rays incident from the front side of the sample stage main body 1 There is no possibility that the α rotation guide portion 10 shields the diffracted X-rays emitted to the front side. Therefore, X-ray diffraction measurement can be performed in a wide scanning range.
[0040]
9 and 10 are diagrams showing modifications of the β rotation means.
The β rotation means shown in this modification includes a β drive motor 40 fixed to the front and rear moving member 21, a rotary plate 42 rotatably mounted on the front surface of the sliding plate 31 via a rotary bearing (not shown), A worm wheel 60 provided on the peripheral edge of the rotating plate 42 and a driving force transmission mechanism for transmitting the driving force of the β driving motor 40 to the worm wheel 60 are included. The sample mounting member 2 is mounted on a rotating plate 42 so as to rotate β together with the worm wheel 60.
[0041]
The drive force transmission mechanism is configured to transmit the rotation of the β drive motor 40 to the worm wheel 60 via the bevel gears 61 and 62, the rotation drive shaft 63, and the worm 64 to rotate the wheel 60. Here, the worm 64 is rotatably supported by bearings 65 and 66 provided on the sliding plate 31 and meshes with the worm wheel 60. The rotation drive shaft 63 is supported by a bearing 67 provided on the sliding plate 31 so as to be rotatable and movable in the axial direction, and a bevel gear 62 is mounted on the proximal end. The bevel gear 62 meshes with the bevel gear 61 mounted on the rotation shaft of the β drive motor 40.
[0042]
The central shaft portion of the worm 64 is a hollow portion 64a, and a key groove 64b is formed in the axial direction on the inner peripheral surface thereof. On the other hand, an axial key 63a having an arbitrary length is provided at the tip of the rotary drive shaft 63. The distal end portion of the rotation drive shaft 63 is fitted into the hollow portion 64a of the worm 64 so that the key 63a is engaged with the key groove 64b. Thereby, the rotation drive shaft 63 is slidable in the axial direction with respect to the worm 64, but the rotation drive force can be transmitted to the worm 64 via the key 63a.
[0043]
The rotation drive shaft 63 extends along the moving direction of the sliding plate 31, that is, the moving direction (γ direction) of the sample mounting member 2 by the parallel moving means, and with respect to the worm as the sliding plate 31 moves. Relative movement in the same direction. Therefore, even if the sliding plate 31 moves, the rotational driving force can be continuously transmitted to the worm 64.
[0044]
11 to 13 are diagrams showing another embodiment of the present invention.
In this embodiment, an xy 51,52 moving plate is provided on the front surface of the rotating plate 42, and the sample mounting member 2 is mounted on the front surface of the xy moving plate 51,52. The rotating plate 42 is rotated β by receiving the driving force of the β driving motor 40 via the driving force transmitting mechanism having the configuration shown in FIG. Further, although not shown in the drawing, the rotating plate 42 is rotatably mounted on the front / rear moving member 21 via a rotating bearing. The front-rear moving member 21 is moved in the z direction by the z moving means described in the previous embodiment, and is rotated α together with the moving gantry 11.
[0045]
The xy moving plates 51 and 52 move the sample mounted on the sample mounting unit in the x direction and the y direction substantially parallel to the sample surface. The xy moving plates 51 and 52 can align the sample in the sample plane.
In this embodiment, the parallel moving means described above is not provided, but a parallel moving means may be provided as necessary.
Further, in this embodiment, the xy moving plates 51 and 52 are configured to be manually operated, but may be configured to be driven using a drive motor.
[0046]
【The invention's effect】
As described above, according to the multi-axis sample stage of the present invention, it is possible to cope with various measuring applications using the X-ray diffraction apparatus, and it is possible to realize a reduction in equipment cost and an improvement in work efficiency.
[Brief description of the drawings]
FIG. 1 is a right side view of a multi-axis sample stage according to an embodiment of the present invention.
FIG. 2 is a left side view of the same.
FIG. 3 is a cross-sectional view taken along line AA in FIG.
4 is a view taken along the line BB in FIG. 1. FIG.
FIG. 5 is a cross-sectional view showing a driving force transmission mechanism in the α rotation means of the multi-axis sample stage.
FIG. 6 is a sectional view showing a movement guide mechanism in the α rotation means of the multi-axis sample stage.
FIG. 7 is a front view showing parallel moving means of the multi-axis sample stage.
FIG. 8 is a left side view of the driving force transmission mechanism in the β rotation means of the multi-axis sample stage with a part cut away.
FIG. 9 is a front view showing a modification of the β rotation means.
10 is a side cross-sectional view showing a driving force transmission mechanism of the β rotation means shown in FIG. 9. FIG.
FIG. 11 is a front view showing another embodiment of the present invention.
FIG. 12 is a plan view of the same.
FIG. 13 is a right side view of the same.
[Explanation of symbols]
1: Sample base body 2: Sample mounting member 10: α rotation guide portion 10a: Notch 10b: Guide groove 10c: Central groove 11: Moving frame 11a: Mounting groove portion 11b: Ball circulation groove 11c: Ball circulation hole 12: α drive Motor 13: Metal sphere 14: Ball return piece 15: Drive shaft 16: Worm 17: Worm wheel piece 20: z drive motor 21: Front and rear moving member 22: Guide rail 23: Guide groove 24: Nut member 30: Parallel drive motor 31 : Sliding plate 32: guide rail 33: guide groove 34: cam 35: driven roller 36: coil spring 40: β drive motor 41: rotating bearing 42: rotating plate 43: driven gears 44, 45: pulley 46: power transmission belt 47: Drive gear 47a: Rotating shaft 48: Support arms 48a, 48b: Bearings 49: Spring members 2h, 42h, 31h, 21h, 11h: Through holes 51, 52: xy moving plate 60: worm wheel 61, 62: bevel gear 63: rotational drive shaft 63a: key 64: worm 64b: key groove

Claims (4)

A multi-axis sample stage used for X-ray diffraction measurement,
A sample mounting portion capable of mounting the sample in a planar shape, an α rotating means for rotating the sample mounting portion around an arbitrary axis parallel to the sample surface , a β rotating means for rotating the sample mounting portion in the plane, includes a sample mounting portion and z moving means for moving in a direction perpendicular against the sample surface, a translation means for moving the specimen mounting portion in a direction parallel to the sample surface, and
The parallel moving means is configured to reciprocate the sliding plate by rotating a cam in accordance with an operation of a parallel drive motor, and the sample mounting portion is provided on the sliding plate. Sample stage. The multi-axis sample stage according to claim 1, comprising a sample stage body.
The α rotation means includes an arc-shaped α rotation guide portion formed on the sample table main body, a movable gantry movable along the α rotation guide portion, an α drive means for driving the movable gantry, and the movement A ball circulation means for moving and circulating a large number of metal spheres between the α rotation guide part and the movement frame along with the movement of the frame;
A multi-axis sample stage, wherein the sample mounting portion, β rotation means, parallel movement means, and z movement means are mounted on the movable frame. In the multi-axis sample stand according to claim 1 or 2 ,
The β rotation means includes a driven gear that rotates integrally with the sample mounting portion, a drive gear that meshes with the driven gear, a β drive motor, and a drive force that transmits the drive force from the β drive motor to the drive gear. A transmission means,
The drive force transmitting means includes a support arm having a base end attached to the drive shaft of the β drive motor via a bearing and a tip attached to the rotary shaft of the drive gear via a bearing; An endless power transmission member wound between the drive shaft of the drive motor and the rotation shaft of the drive gear, and an urging means for urging the support arm to always contact the drive gear with the driven gear; A multi-axis sample stage. In the multi-axis sample stand according to claim 1 or 2 ,
The β rotation means transmits a worm wheel that rotates integrally with the sample mounting portion, a worm that meshes with the worm wheel, a β drive motor, and a rotational drive force from the β drive motor to the worm. And a rotation drive shaft that extends in the moving direction of the sample mounting portion by the parallel moving means and is slidable in the axial direction with respect to the worm. Multi-axis sample stage.

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