JP3709985B2 - Differential pressure measuring device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an inexpensive differential pressure measuring device having a function of detecting damage of a liquid contact diaphragm or abnormality of a pressure receiving part of hydrogen gas permeation into a pressure receiving chamber.
[0002]
[Prior art]
FIG. 10 is a diagram illustrating the configuration of the main part of a conventional example that is generally used, FIG. 11 is a front view of FIG. 10, and FIG. 12 is a diagram illustrating the configuration of the main part of FIG.
In the figure, a diaphragm seal unit 3 is provided on a differential pressure measuring device main body 1 via a pressure guide tube 2.
[0003]
In this case, a capillary tube is used as the pressure guiding tube 2.
The diaphragm seal unit 3 includes a pressure receiving block 4 and a liquid contact diaphragm 6 provided on one surface of the pressure receiving block 4 and constituting a pressure receiving chamber 5.
[0004]
The pressure receiving chamber 5 communicates with the pressure guiding tube 2 and is filled with the pressure receiving portion sealing liquid 7.
The mounting flange 8 is fixed to the pressure receiving block 4 by a mounting screw 9.
The diaphragm seal unit 3 and the attachment flange 8 are attached to the process tank A, for example.
[0005]
In the above configuration, the pressure received by the wetted diaphragm 6 is transmitted to the differential pressure measuring device main body 1 by the capillary tube 2 filled with the sealing liquid 7.
[0006]
[Problems to be solved by the invention]
However, in such an apparatus, the place where it is used is usually used under severe conditions such as the temperature of the process fluid being high, the process fluid being extremely corrosive, or being in direct contact with the process fluid such as Tank A. Often.
[0007]
In order to use in such a harsh environment, the wetted diaphragm 6 of the diaphragm seal pressure receiving portion frequently undergoes mechanical damage such as corrosion and collision.
In addition, there are many abnormalities in the liquid contact diaphragm 6 such that hydrogen gas permeates through the liquid contact diaphragm 6 and the output becomes abnormal.
[0008]
These breaks are difficult to detect during use, and are often noticed only after the pressure receiving part is removed due to abnormal output or output down.
On the contrary, due to breakage, there is a problem that the sealed liquid 7 is mixed into the process fluid, or the operation is performed without noticing the output abnormality, and the quality of the process fluid is changed.
[0009]
SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems, and to provide an inexpensive differential pressure measuring device having a function of detecting damage of a wetted diaphragm or abnormality of a pressure receiving part of hydrogen gas permeation into a pressure receiving chamber. There is.
[0010]
In short, the object of the present invention is to
(1) To provide a differential pressure measuring device that can be applied to any differential pressure measuring device (differential pressure meter, pressure gauge, with a diaphragm seal, a level meter, etc.) and has an inexpensive damage / abnormality detection function.
[0011]
(2) To provide a differential pressure measuring device that obtains a breakage / abnormal signal while performing steady operation by checking for breakage / abnormality at a certain period or outputting a signal when necessary for confirmation without interfering with steady operation. .
[0012]
(3) An object of the present invention is to provide a differential pressure measuring device capable of confirming not only the corrosion or breakage of a diaphragm, but also the occurrence of a hydrogen permeation phenomenon in which hydrogen gas permeates through the metal diaphragm and accumulates in the sealed liquid to cause abnormal output.
[0013]
[Means for Solving the Problems]
In order to achieve such an object, according to the present invention, in the pressure measuring device according to claim 1,
In the differential pressure measuring apparatus having a sealed liquid, a heating / cooling means provided in the differential pressure measuring apparatus for heating or cooling the sealed liquid using a heat medium having a predetermined temperature to temporarily change the internal pressure of the sealed liquid. Compared with the normal time of the differential pressure measuring device before the operation of the heating and cooling means when the output change that occurs during the operation of the heating and cooling means, if there is no output change, if the normal output change occurs, the device will differ as abnormal And a detecting means for detecting an abnormality of the pressure measuring device.
[0014]
According to claim 2 of the present invention, in the differential pressure measuring device according to claim 1,
A diaphragm seal unit having a pressure receiving block connected to the differential pressure measuring device main body via a pressure guiding tube, a heating / cooling chamber provided in the pressure receiving block, and heat for introducing a heat medium to the heating / cooling chamber provided in the pressure receiving block And a heating / cooling means having a medium introduction pipe.
[0015]
In claim 3 of the present invention, in the differential pressure measuring device according to claim 1,
A diaphragm seal unit connected to the differential pressure measuring device main body via a pressure guiding tube, a mounting flange for mounting the diaphragm seal unit to a measurement object, and a heating / cooling sandwiched between the mounting flange and the diaphragm seal unit And a heating / cooling means having a heating / cooling chamber provided in the heating / cooling block and a heating medium introduction pipe provided in the heating / cooling block for introducing a heating medium into the heating / cooling chamber. To do.
[0016]
According to claim 4 of the present invention, in the differential pressure measuring device according to claim 1,
A diaphragm seal unit connected to the differential pressure measuring device main body via a pressure guiding tube, an adapter block provided in contact with the diaphragm seal unit, and a surface of the adapter block in contact with the diaphragm seal unit. A concave portion, an adapter diaphragm provided on the bottom surface of the concave portion and constituting the adapter block and the adapter chamber, a convex portion provided in the diaphragm seal unit and inserted into the concave portion, and provided on a top surface of the convex portion. A surface of the adapter diaphragm that contacts the diaphragm sealing unit of the adapter block, and a surface of the adapter block that contacts the diaphragm seal unit. The adapter wetted liquid that is provided and constitutes the adapter wetted chamber An diaphragm, an adapter communication hole that is provided in the adapter block and communicates with the adapter chamber and the adapter liquid contact chamber, and an adapter filled liquid that fills the adapter chamber, the adapter liquid contact chamber, and the adapter communication hole. And a heating / cooling means having a heating / cooling chamber provided in the diaphragm seal unit and a heat medium introduction pipe provided in the diaphragm seal unit for introducing a heat medium into the heating / cooling chamber.
[0017]
In claim 5 of the present invention, in the differential pressure measuring device according to claim 1,
One end side covers one body diaphragm of the differential pressure measuring device body, a cover block constituting one body diaphragm and a pressure receiving chamber, a mounting flange provided on the other end side of the cover block, and a mounting flange provided on the mounting flange A liquid contact diaphragm constituting the mounting flange and the liquid contact chamber, a conduction hole provided in the cover block and the mounting flange, which conducts the pressure receiving chamber and the liquid contact chamber, and the conduction hole and the pressure receiving chamber. Heating / cooling having a through hole filling liquid filled in the liquid contact chamber, a heating / cooling chamber provided in the mounting flange, and a heat medium introducing pipe provided in the mounting flange for introducing a heat medium into the heating / cooling chamber. Means.
[0018]
In claim 6 of the present invention, in the differential pressure measuring device according to claim 1,
A heating / cooling means having a heating / cooling chamber provided in the differential pressure measuring device main body and a heat medium introducing pipe provided in the differential pressure measuring device main body for introducing a heat medium into the heating / cooling chamber. To do.
[0019]
In claim 7 of the present invention, in the differential pressure measuring device according to claim 1,
A diaphragm seal unit connected to the differential pressure measuring device main body through a pressure guiding tube, a heating / cooling chamber provided in the differential pressure measuring device main body, and a heating medium provided in the heating / cooling chamber provided in the differential pressure measuring device main body. A heating / cooling means having a heat medium introduction pipe to be introduced is provided.
[0020]
In claim 8 of the present invention, in the differential pressure measuring device according to claim 1,
An electric heater is used as the heat medium.
[0021]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described in detail with reference to the drawings. FIG. 1 is a diagram illustrating the configuration of a main part of one embodiment of the present invention, FIG. 2 is a detailed description of the main part of FIG. 1, and FIG. 3 is a side view of FIG.
In the figure, configurations with the same symbols as in FIG. 10 represent the same functions.
Only the differences from FIG. 10 will be described below.
[0022]
Reference numeral 21 denotes a heating / cooling means provided in the differential pressure measuring device for heating or cooling the sealed liquid 7 to temporarily change the internal pressure of the sealed liquid 7.
In this case, the heating / cooling means 21 includes a heating / cooling chamber 22 provided in the pressure receiving block 4 of the diaphragm seal unit 3 and a heat medium introduction pipe 23 provided in the pressure receiving block 4 for introducing a heat medium into the heating / cooling chamber 22. [0023]
Reference numeral 24 is a detection means for comparing the pattern of the output change that occurs during the operation of the heating / cooling means 21 with that when the differential pressure measuring device is normal, and detecting breakage or abnormality of the wetted diaphragm of the differential pressure measuring device and permeation of hydrogen. .
In this case, it is built in the amplifier section 1a of the differential pressure measuring device main body.
[0024]
The newly provided heat medium introduction pipe 23 is connected to a pipe so that a heat medium such as steam that can heat the pressure receiving block 4 can flow when the temperature of the process is low.
Conversely, pipes are connected so that a low-temperature heat medium such as water can flow in a process as hot as steam.
[0025]
Operation is performed using the differential pressure measuring apparatus configured as described above.
In the case of normal operation, the operation is the same as in the conventional example.
The breakage / abnormality detection operation is performed by simultaneously flowing a heat medium into the heating / cooling chamber 22 of the pressure receiving block 4 on the high / low pressure side.
[0026]
For example, in a process at room temperature, when a heating medium such as steam is simultaneously flowed on the high and low pressure sides, the temperature of the pressure receiving block 4 changes, and this heat is transferred to the sealing liquid 7 so that the sealing liquid 7 expands.
The expansion of the sealing liquid 7 is absorbed by the swelling of the wetted diaphragm 6, but an internal pressure is generated by the spring strength of the wetted diaphragm 6.
[0027]
If the wetted diaphragm 6 is normal, the internal pressure generated on the high and low pressure sides becomes equal and cancelled, and the output of the differential pressure measuring device does not change.
If the liquid contact diaphragm 6 on the high-pressure side is damaged due to corrosion or the like and a hole is opened, the sealed liquid 7 expands due to the temperature of the heat medium that is simultaneously flowed, but the hole on the high-pressure side is open. The internal pressure does not change, only the low pressure side changes the internal pressure, and the output changes greatly to negative.
[0028]
When the liquid contact diaphragm 6 on the low pressure side is damaged, only the internal pressure on the high pressure side rises, so the output changes to positive.
A signal change that occurs only when the heat medium is supplied is obtained as a damage signal. If the heat medium is not damaged, it can be operated normally.
[0029]
If a heat medium having a temperature difference of about 100 ° C. flows between the spring strength of the liquid contact diaphragm 6 used for the flange sizes 50A to 100A and the amount of the sealed liquid 7 heated to the heat medium, Although it differs depending on the spring strength of the diaphragm 6, a damage signal of about ± 10 to 1000 mmH ₂ O can be obtained from steady operation.
[0030]
The approximate structure has a steam trace structure for preventing the hardening of the process. However, in the method of constantly flowing the heat medium, it is impossible to determine whether the signal is a damage signal or an output change due to the process input, and the damage cannot be detected.
[0031]
Even if the spring constants of the liquid contact diaphragm 6 on the high / low pressure side do not match at all, a similar signal can be obtained by recognizing the error value when the heat medium is flowed in the normal state. With a damage detection mechanism that can generate such a signal, it is possible to detect abnormalities continuously during automatic operation if the heat medium for damage detection is automatically flowed at regular intervals depending on the risk of damage occurring due to the process. Become.
[0032]
The same effect can be obtained even if the operation is performed as necessary, instead of automatically flowing the heat medium.
Not only is the liquid diaphragm 6 damaged or the spring constant is changed abnormally, but also in the case of hydrogen gas permeation, the flow of the heat medium causes the internal pressure of the gas accumulated to expand, resulting in a large output. Changes occur and hydrogen gas permeation can be detected.
[0033]
As a result,
(1) The present invention can be applied to differential pressure measuring devices (used for differential pressure gauges, pressure gauges, differential pressure gauges with diaphragm seals, level gauges, etc.), and a difference having an inexpensive damage / abnormality detection function. A pressure measuring device is obtained.
[0034]
(2) It is possible to obtain a differential pressure measuring apparatus capable of obtaining a breakage / abnormality signal while carrying out steady operation when confirmation of breakage / abnormality is necessary or when confirmation is required without disturbing steady operation.
[0035]
(3) A differential pressure measuring device can be obtained in which not only corrosion or breakage of the wetted diaphragm but also hydrogen gas permeates through the metal diaphragm and accumulates in the sealed liquid 7 and the occurrence of hydrogen permeation phenomenon that causes abnormal output can be confirmed. .
[0036]
(4) A differential pressure measuring device suitable for a so-called diaphragm seal type differential pressure measuring device having the diaphragm seal unit 3 can be obtained.
[0037]
FIG. 4 is an explanatory view showing the construction of the main part of another embodiment of the present invention, and FIG. 5 is a side view of FIG.
In this embodiment, 31 is a heating / cooling block sandwiched between the mounting flange 8 and the diaphragm seal unit 3.
[0038]
Reference numeral 32 denotes a heating / cooling means having a heating / cooling chamber 33 provided in the heating / cooling block 31 and a heat medium introduction pipe 34 provided in the heating / cooling block 31 for introducing a heat medium into the heating / cooling chamber 33.
[0039]
As a result, a differential pressure measuring device that can be additionally attached to a differential pressure measuring device that is already operated in a process is obtained.
[0040]
FIG. 6 is an explanatory view showing the configuration of the main part of another embodiment of the present invention.
In this embodiment, 3 is a diaphragm seal unit connected to the differential pressure measuring device main body 1 via the pressure guiding tube 2.
[0041]
Reference numeral 41 denotes an adapter block provided on one surface of the diaphragm seal unit 3.
Reference numeral 42 denotes a recess provided on the surface of the adapter block 41 that contacts the diaphragm seal unit 3.
[0042]
Reference numeral 43 denotes an adapter diaphragm that is provided on the bottom surface of the recess 42 and constitutes the adapter block 41 and the adapter chamber 44.
A convex portion 45 is provided in the diaphragm seal unit 3 and is inserted into the concave portion 42.
[0043]
46 is a liquid contact diaphragm which is provided on the top surface of the convex portion 45 and forms an adapter diaphragm 43 and a plate-like connection sealed liquid chamber 47.
48 is a connection portion sealing liquid filled in the connection sealing liquid chamber 47.
[0044]
Reference numeral 49 denotes an adapter liquid contact diaphragm that is provided on a surface of the adapter block 41 that faces the surface of the adapter seal 41 that contacts the diaphragm seal unit 3.
[0045]
An adapter communication hole 52 is provided in the adapter block 41 and communicates between the adapter chamber 44 and the adapter liquid contact chamber 51.
53 is an adapter sealing liquid filled in the adapter chamber 44, the adapter liquid contact chamber 51, and the adapter communication hole 52.
[0046]
Reference numeral 54 denotes a heating / cooling means having a heating / cooling chamber 55 provided in the diaphragm seal unit 3 and a heat medium introduction pipe 56 provided in the diaphragm seal unit 3 for introducing a heat medium into the heating / cooling chamber 55.
57 is a packing that is provided in a ring shape at the corner of the convex portion 45 and seals the convex portion 45 and the concave portion 52.
[0047]
As a result, it is possible to obtain a differential pressure measuring device that can exchange only the pressure receiving portion in response to the signal of breakage / abnormality.
The heating / cooling block 31 provided with the heating / cooling means 32 is sandwiched between the diaphragm seal unit 3 and the mounting flange 8 without the heating / cooling means 54 provided in the diaphragm seal unit. Of course, it is also good.
[0048]
FIG. 7 is an explanatory view showing the configuration of the main part of another embodiment of the present invention.
In this embodiment, reference numeral 61 denotes a cover block whose one end side covers one main body diaphragm 62 of the differential pressure measuring device main body 1 and constitutes one main body diaphragm 62 and a pressure receiving chamber 63.
[0049]
Reference numeral 64 denotes a mounting flange provided on the other end side of the cover block 61.
A liquid contact diaphragm 65 is provided on the mounting flange 64 and forms a liquid contact chamber 66 with the mounting flange 64.
[0050]
Reference numeral 67 denotes a conduction hole provided in the cover block 61 and the mounting flange 64 to conduct the pressure receiving chamber 63 and the liquid contact chamber 66.
Reference numeral 68 denotes a conduction hole sealing liquid filled in the conduction hole 67, the pressure receiving chamber 63, and the liquid contact chamber 66.
Reference numeral 71 denotes a heating / cooling means having a heating / cooling chamber 72 provided in the mounting flange 64 and a heat medium introduction pipe 73 provided in the mounting flange 64 for introducing a heat medium into the heating / cooling chamber 72.
[0051]
As a result, in the case of the level meter with the wetted diaphragm 65 only on the high-pressure side, the same effect can be obtained even if the heating / cooling chamber 72 is provided in the mounting flange 64 and the heat medium flows.
[0052]
In the case of a level meter, a heat medium is allowed to flow during normal operation, an output change is obtained in advance, and when this is normal operation, when an output of a different pattern appears, it may be determined as abnormal.
[0053]
FIG. 8 is an explanatory view showing the configuration of the main part of another embodiment of the present invention.
In this embodiment, reference numeral 81 denotes a heating / cooling chamber 82 provided in the differential pressure measuring device main body 1 and a heat medium introducing pipe 83 provided in the differential pressure measuring device main body 1 for introducing a heat medium into the heating / cooling chamber 82. It has heating and cooling means.
[0054]
In this case, the heating and cooling means 81 is provided in the main body capsule 84 of the differential pressure measuring device main body 1.
As a result, the heating / cooling means 81 is only required to be provided at one location of the differential pressure measuring device main body 1, so that an inexpensive and simple differential pressure measuring device can be obtained.
[0055]
FIG. 9 is an explanatory view showing the construction of the main part of another embodiment of the present invention.
In this embodiment, 3 is a diaphragm seal unit connected to the differential pressure measuring device main body 1 via the pressure guiding tube 2.
[0056]
91 is a heating / cooling means having a heating / cooling chamber 92 provided in the differential pressure measuring device main body 1 and a heat medium introducing pipe 93 provided in the differential pressure measuring device main body 1 for introducing a heat medium into the heating / cooling chamber 92. It is.
In this case, the heating / cooling means 91 is provided on the main body cover flange 94 of the differential pressure measuring device main body 1.
[0057]
As a result, when the diaphragm seal unit 3 is used, the heating / cooling means must be provided at a location apart from the high and low pressures, and the construction problem and the temperature of the high and low pressure heat medium are difficult to be constant. Such a problem may occur.
In the present embodiment, a differential pressure measuring device having an advantage that it is only necessary to bring the heat medium in one place is obtained.
[0058]
Note that if an electric heater is used as the heat medium, the electric heater can be configured inexpensively and simply, so that a differential pressure measuring device that is inexpensive and simple and can be reduced in size can be obtained.
[0059]
The above description merely shows a specific preferred embodiment for the purpose of explanation and illustration of the present invention. Therefore, the present invention is not limited to the above-described embodiments, and includes many changes and modifications without departing from the essence thereof.
[0060]
【The invention's effect】
As described above, according to the first aspect of the present invention, the following effects can be obtained.
(1) The present invention can be applied to differential pressure measuring devices (used for differential pressure gauges, pressure gauges, differential pressure gauges with diaphragm seals, level gauges, etc.), and a difference having an inexpensive damage / abnormality detection function. A pressure measuring device is obtained.
[0061]
(2) It is possible to obtain a differential pressure measuring apparatus capable of obtaining a breakage / abnormality signal while carrying out steady operation when confirmation of breakage / abnormality is necessary or when confirmation is required without disturbing steady operation.
[0062]
(3) A differential pressure measuring device can be obtained in which not only corrosion or breakage of the liquid contact diaphragm, but also hydrogen gas permeation through the metal diaphragm and the hydrogen permeation phenomenon that is accumulated in the sealed liquid and causes abnormal output can be confirmed.
[0063]
According to claim 2 of the present invention, there are the following effects.
A differential pressure measuring device suitable for a so-called diaphragm seal type differential pressure measuring device having a diaphragm seal unit can be obtained.
[0064]
According to claim 3 of the present invention, there are the following effects.
A heating / cooling block sandwiched between the mounting flange and the diaphragm seal unit, a heating / cooling chamber provided in the heating / cooling block, and a heating medium introduction pipe provided in the heating / cooling block for introducing the heating medium into the heating / cooling chamber. Heating and cooling means.
As a result, a differential pressure measuring device that can be additionally attached to a differential pressure measuring device that is already operated in a process is obtained.
[0065]
According to claim 4 of the present invention, there are the following effects.
A diaphragm seal unit provided in the differential pressure measuring device main body via a pressure guide tube, a pressure receiving block provided in contact with the diaphragm seal unit, and a surface of the pressure receiving block in contact with the diaphragm seal unit. A concave portion, an adapter diaphragm provided on the bottom surface of the concave portion, a convex portion provided in the diaphragm seal unit and inserted into the concave portion, and a connection between the adapter diaphragm and the plate surface provided on the top surface of the convex portion A heating / cooling means having a pressure-receiving diaphragm constituting an enclosed liquid chamber, a heating / cooling chamber provided in the diaphragm seal unit, and a heat medium introduction pipe provided in the diaphragm seal unit for introducing a heat medium into the heating / cooling chamber; Was provided.
[0066]
As a result, it is possible to obtain a differential pressure measuring device that can exchange only the pressure receiving portion in response to the signal of breakage / abnormality.
Of course, the heating / cooling block provided with the heating / cooling means may be sandwiched between the diaphragm seal unit and the mounting flange without providing the heating / cooling means in the diaphragm seal unit. It is.
[0067]
According to claim 5 of the present invention, there are the following effects.
One end side covers one body diaphragm of the differential pressure measuring device body, a cover block constituting one body diaphragm and a pressure receiving chamber, a mounting flange provided on the other end side of the cover block, and a mounting flange provided on the mounting flange A liquid contact diaphragm constituting the mounting flange and the liquid contact chamber, a conduction hole provided in the cover block and the mounting flange for conducting the pressure receiving chamber and the liquid contact chamber, and a heating provided in the mounting flange. Heating / cooling means provided on the cooling chamber and the mounting flange and having a heat medium introducing pipe for introducing the heat medium into the heating / cooling chamber was provided.
[0068]
As a result, in the case of a level meter with a wetted diaphragm only on the high-pressure side, a similar effect can be obtained even if a heating / cooling chamber is provided in the mounting flange and a heat medium is allowed to flow.
In the case of a level meter, a heat medium is allowed to flow during normal operation, an output change is obtained in advance, and when this is normal operation, when an output of a different pattern appears, it may be determined as abnormal.
[0069]
According to claim 6 of the present invention, there are the following effects.
A heating / cooling means having a heating / cooling chamber provided in the differential pressure measuring device main body and a heat medium introducing pipe provided in the differential pressure measuring device main body for introducing a heat medium into the heating / cooling chamber was provided.
[0070]
As a result, the heating / cooling means only needs to be provided at one position of the differential pressure measuring device main body, so that an inexpensive and simple differential pressure measuring device can be obtained.
[0071]
According to claim 7 of the present invention, there are the following effects.
A diaphragm seal unit connected to the differential pressure measuring device main body through a pressure guiding tube, a heating / cooling chamber provided in the differential pressure measuring device main body, and a heating medium provided in the heating / cooling chamber provided in the differential pressure measuring device main body. Heating / cooling means having a heat medium introduction pipe to be introduced was provided.
[0072]
As a result, when a diaphragm seal unit is used, the heating / cooling means must be provided at a location apart from high and low pressures. Although a problem may arise, in the present invention, a differential pressure measuring device having an advantage that it is only necessary to bring a heating medium in one place is obtained.
[0073]
According to claim 8 of the present invention, there are the following effects.
Since an electric heater is used as the heat medium, the electric heater can be configured inexpensively and simply, and thus a differential pressure measuring device that is inexpensive and simple and can be reduced in size can be obtained.
[0074]
Therefore, according to the present invention, it is possible to realize an inexpensive differential pressure measuring device having a function of detecting breakage of the wetted diaphragm or abnormality of the pressure receiving part of hydrogen gas permeation into the pressure receiving chamber.
[Brief description of the drawings]
FIG. 1 is an explanatory diagram of a main part configuration of an embodiment of the present invention.
FIG. 2 is a detailed explanatory diagram of a main part of FIG. 1;
FIG. 3 is a side view of FIG. 2;
FIG. 4 is an explanatory diagram of a main part configuration of another embodiment of the present invention.
FIG. 5 is a side view of FIG. 4;
FIG. 6 is an explanatory diagram of a main configuration of another embodiment of the present invention.
FIG. 7 is an explanatory diagram of a main part configuration of another embodiment of the present invention.
FIG. 8 is an explanatory diagram of a main part configuration of another embodiment of the present invention.
FIG. 9 is an explanatory diagram of a main part configuration of another embodiment of the present invention.
FIG. 10 is an explanatory diagram of a main part configuration of a conventional example generally used conventionally.
FIG. 11 is a front view of FIG. 10;
12 is an explanatory diagram of a main part configuration of FIG. 11. FIG.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Differential pressure measuring device main body 1a Amplifier part 2 Pressure guiding pipe 3 Diaphragm seal unit 4 Pressure receiving block 5 Pressure receiving chamber 6 Liquid contact diaphragm 7 Pressure receiving part sealing liquid 8 Mounting flange 9 Mounting screw 21 Heating cooling means 22 Heating cooling chamber 23 Heating medium introducing pipe 24 Detection means 31 Heating / cooling block 32 Heating / cooling means 33 Heating / cooling chamber 34 Heat medium introduction pipe 41 Adapter block 42 Recess 43 Adapter diaphragm 44 Adapter chamber 45 Convex part 46 Liquid contact diaphragm 47 Connection liquid chamber 48 Connection liquid 49 Adapter Liquid contact diaphragm 51 Adapter liquid contact chamber 52 Adapter communication hole 53 Adapter filled liquid 54 Heating / cooling means 55 Heating / cooling chamber 56 Heat medium introduction pipe 57 Packing 61 Cover block 62 Main body diaphragm 63 Pressure receiving chamber 64 Mounting flange 65 Liquid contact diaphragm 66 Liquid contact Room 6 7 Conducting hole 68 Conducting hole filling liquid 71 Heating / cooling means 72 Heating / cooling chamber 73 Heating medium introducing pipe 81 Heating / cooling means 82 Heating / cooling chamber 83 Heating medium introducing pipe 84 Main body capsule 91 Heating / cooling means 92 Heating / cooling chamber 93 Heating medium introducing pipe 94 Body cover flange A Process tank

Claims (8)

In the differential pressure measuring device having the sealing liquid,
A heating / cooling means provided in the differential pressure measuring device for heating or cooling the sealed liquid using a heat medium of a predetermined temperature to temporarily change the internal pressure of the sealed liquid;
If the output change that occurs during the operation of the heating / cooling means is compared with the normal state of the differential pressure measuring device before the operation of the heating / cooling means, if there is no output change, the apparatus measures the differential pressure as abnormal if the normal output change occurs. A differential pressure measuring device comprising: detecting means for detecting an abnormality of the device. A diaphragm seal unit having a pressure receiving block connected to the differential pressure measuring device main body via a pressure guiding tube;
The heating / cooling means provided with the heating-cooling chamber provided in the said pressure receiving block, and the heat-medium introduction pipe | tube provided in the said pressure-receiving block which introduces a heat medium into this heating-cooling chamber. Differential pressure measuring device. A diaphragm seal unit connected to the differential pressure measuring device main body via a pressure guiding tube;
A mounting flange for mounting the diaphragm seal unit to the measurement object;
A heating and cooling block sandwiched between the mounting flange and the diaphragm seal unit;
A heating / cooling means having a heating / cooling chamber provided in the heating / cooling block and a heating medium introduction pipe provided in the heating / cooling block for introducing a heating medium into the heating / cooling chamber. 1. The differential pressure measuring device according to 1. A diaphragm seal unit connected to the differential pressure measuring device main body via a pressure guiding tube;
An adapter block provided on one surface of the diaphragm seal unit;
A recess provided on the surface of the adapter block that contacts the diaphragm seal unit;
An adapter diaphragm which is provided on the bottom surface of the recess and constitutes the adapter block and the adapter chamber;
A convex portion provided in the diaphragm seal unit and inserted into the concave portion;
A liquid contact diaphragm that is provided on the top surface of the convex portion and forms a plate-like connection sealed liquid chamber; and
A connection portion sealing liquid filled in the connection sealing liquid chamber;
An adapter liquid contact diaphragm that is provided on a surface facing the surface of the adapter block that contacts the diaphragm seal unit, and that forms an adapter liquid contact chamber;
An adapter communication hole provided in the adapter block for communicating the adapter chamber and the adapter liquid contact chamber;
An adapter sealing liquid filled in the adapter chamber, the adapter liquid contact chamber, and the adapter communication hole;
A heating / cooling means having a heating / cooling chamber provided in the diaphragm seal unit and a heat medium introduction pipe provided in the diaphragm seal unit for introducing a heat medium into the heating / cooling chamber. 1. The differential pressure measuring device according to 1. One end side covers one main body diaphragm of the differential pressure measuring device main body, and one main body diaphragm and a cover block constituting a pressure receiving chamber,
A mounting flange provided on the other end of the cover block;
A wetted diaphragm provided on the mounting flange and constituting a wetted chamber with the mounting flange;
A conduction hole provided in the cover block and the mounting flange and conducting the pressure receiving chamber and the liquid contact chamber;
A conduction hole filling liquid filled in the conduction hole, the pressure receiving chamber, and the liquid contact chamber;
The heating / cooling means provided with the heating-cooling chamber provided in the said attachment flange, and the heat-medium introduction pipe | tube provided in this attachment flange and introduce | transducing a heat medium into this heating-cooling chamber were provided. Differential pressure measuring device. A heating / cooling means provided with a heating / cooling chamber provided in the differential pressure measuring device main body and a heat medium introducing pipe provided in the differential pressure measuring device main body for introducing a heat medium into the heating / cooling chamber. The differential pressure measuring device according to claim 1. A diaphragm seal unit connected to the differential pressure measuring device main body via a pressure guiding tube;
A heating / cooling means having a heating / cooling chamber provided in the differential pressure measuring device main body and a heat medium introducing pipe provided in the differential pressure measuring device main body for introducing a heat medium into the heating / cooling chamber. The differential pressure measuring device according to claim 1. The differential pressure measuring device according to any one of claims 1 to 7, wherein an electric heater is used as the heat medium.

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