JP3714730B2 - Coating device - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a coating apparatus that forms a thin film by discharging a highly viscous coating solution.
[0002]
[Prior art]
When the semiconductor element is attached to the cooling structure of the heat radiating member, the semiconductor element is attached by applying a heat conductive material to the surface of the cooling structure in order to reduce the contact thermal resistance between the semiconductor element and the cooling structure. In the conventional application of the heat conductive material to the cooling structure, a heat conductive material coating liquid is sealed in a tube 20 as shown in FIG. 6, and the coating liquid is extruded from the tube 20 to form a rod shape on the cooling structure. It was applied.
[0003]
[Problems to be solved by the invention]
However, since the thermal conductive material is applied in a rod shape to the cooling structure, when the semiconductor element is screwed and fixed to the cooling structure, the thick coating becomes a fulcrum, and the semiconductor element warps and the insulating layer in the semiconductor element is destroyed. There was a problem to do.
Then, an object of this invention is to provide the coating device and coating nozzle which can apply | coat uniformly with a uniform film thickness.
[0004]
[Means for Solving the Problems]
In order to solve the above-described problems, the present invention provides a nozzle body configured in a rectangular parallelepiped, an injection port provided on a side surface of the nozzle body, and disposed at a right angle to the injection port and provided in the longitudinal direction of the nozzle body. A cylindrical isobaric chamber, a discharge port that communicates with the constant pressure chamber and opens along the longitudinal direction of the nozzle body, and a tip of the discharge port of the nozzle body that is at least opposite to the traveling direction of the material to be coated A coating nozzle having a conditioned surface with a flat part and disposed with the discharge port facing upward, and disposed on the side of the coating nozzle and provided on the machine frame, and applies a material to be coated. A mounting surface that is placed from the top with the surface down, a guide rail that is arranged at right angles to the discharge port on both sides of the coating nozzle and attached to the machine frame, and a material to be coated placed on the guide rail A drive unit that moves along the guide rail; A coating apparatus provided in a recording frame and provided with a detection sensor for detecting the material to be coated and starting the driving device, and a detection sensor for detecting a coating surface of the material to be coated and discharging a coating liquid from a coating nozzle. It is configured.
[0005]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described based on embodiments shown in the drawings.
1 is a sectional view of a coating nozzle showing an embodiment of the present invention, FIG. 2 is a side sectional view of the coating nozzle showing an embodiment of the present invention, and FIG. 3 is a coating nozzle showing an embodiment of the present invention. FIG. 4 and FIG. 5 are operation explanatory views of the coating apparatus showing an embodiment of the present invention.
In the figure, reference numeral 1 denotes a rectangular parallelepiped nozzle body, which has an injection port 2 on one side surface and a discharge port 3 that opens along the longitudinal direction of the cuboid on the other side surface. Reference numeral 4 denotes an isobaric chamber, which is formed in a cylindrical shape between the inlet 2 and the outlet 3 along the longitudinal direction of the rectangular parallelepiped. 5 is a conditioned surface formed flat on both sides of the discharge port 3. Reference numeral 6 denotes a coating device, and guide rails 9 arranged at right angles to the discharge port 3 of the nozzle body are attached to the machine frame 7 on both sides of the nozzle body 1. The nozzle body 1 is attached to the machine frame 7 with the discharge port 3 facing upward, and the injection port 2 of the nozzle body 1 is connected to a paint reservoir tank (not shown). Reference numeral 13 denotes a mounting surface of the material to be coated 8 provided on the machine casing 7, and a guide rail 9 is continuously provided on the mounting surface 13. Reference numeral 10 denotes an electric cylinder, which is provided with an operating body 10a having one end fixed to the machine casing 7 and the other end protruding from the mounting surface 13. Reference numeral 11 denotes a detection sensor attached to the machine casing 7 so as to detect the material 8 to be coated on the mounting surface 13 and start the electric cylinder 10. A detection sensor 12 provided on the mounting surface 13 detects the application surface of the material 8 to be applied, opens a paint reservoir valve (not shown), and discharges the application liquid from the discharge port 3 of the nozzle body 1. is there.
Now, when the material to be coated 8 is placed on the placement surface 13 of the machine casing 7 of the coating device 6, the detection sensor 11 detects the material to be coated 8 as shown in FIG. The electric cylinder 10 is started by the detection of the detection sensor 11. When the electric cylinder 10 is started, the operating body 10a protruding on the placement surface 13 moves while sliding the material 8 to be coated on the placement surface. When the material to be coated 8 moves on the mounting surface and the coating surface of the material to be coated reaches the detection sensor 12, the detection sensor 12 detects the coating surface of the material to be coated. When the detection sensor 12 detects the coating surface of the material to be coated, the coating liquid storage tank is opened and the coating liquid is delivered to the nozzle body 1. The coating liquid sent to the nozzle body 1 is relaxed in the isobaric chamber 4, discharges a uniform amount of coating liquid from the entire discharge port to the material to be coated 8, and is flattened on the conditioned surface 5 of the nozzle body 1. Accustomed to. In this way, the coating material 8 moves on the guide rail 9 as shown in FIG. When the application of the material to be coated 8 is completed, the operating body 10a returns to the original position as shown in FIG. 5 and waits for the next material to be coated 8 to be coated.
In this embodiment, the conditioned surface is provided on both sides of the discharge port of the coating nozzle. However, the conditioned surface may be provided on the surface on one side of the discharge port of the coating nozzle opposite to the traveling direction of the coated material. Is moved on the guide rail by an electric cylinder, but a drive device using air pressure may be used.
[0006]
【The invention's effect】
As described above, according to the present invention, an equal pressure chamber is provided in the nozzle body, a uniform amount of coating liquid is discharged from the entire discharge port to the material to be coated, and the material to be coated is automatically moved. There is an effect that a flat coating film having a uniform thickness can be easily formed on the material to be coated.
[Brief description of the drawings]
FIG. 1 is a cross-sectional view of a coating nozzle showing an embodiment of the present invention.
FIG. 2 is a side sectional view of a coating nozzle showing an embodiment of the present invention.
FIG. 3 is a perspective view of a coating apparatus equipped with a coating nozzle according to an embodiment of the present invention.
FIG. 4 is an operation explanatory view of a coating apparatus showing an embodiment of the present invention.
FIG. 5 is an operation explanatory view of a coating apparatus showing an embodiment of the present invention.
FIG. 6 is a perspective view of a tube showing a conventional example.
[Explanation of symbols]
1 nozzle body, 2 inlet, 3 outlet, 4 isobaric chamber,
5 conditioned surface, 6 coating device, 7 machine frame, 8 material to be coated,
9 Guide rail, 10 Electric cylinder, 10a Actuator 11 Detection sensor, 12 Detection sensor, 13 Mounting surface

Claims (1)

  Nozzle body configured in a rectangular parallelepiped, an inlet provided on a side surface of the nozzle body, a cylindrical isobaric chamber disposed at right angles to the inlet and provided in the longitudinal direction of the nozzle body, and the isobaric chamber A discharge port that opens along the longitudinal direction of the nozzle body, and a conditioning surface that flatly configures the tip of the discharge port of the nozzle body on the opposite side to the traveling direction of the material to be coated, A coating nozzle that is disposed with the discharge port facing upward, and a mounting surface that is disposed beside the coating nozzle and that is provided on the machine frame and mounts the material to be coated from above with the coating surface facing down. A guide rail disposed on both sides of the coating nozzle at right angles to the discharge port and attached to the machine frame, a drive device for moving the material to be coated placed on the guide rail along the guide rail, and the machine Detecting the coated material provided on a frame and A detection sensor for starting the movement device, the coating device, characterized in that a detection sensor for discharging a coating liquid from the coating nozzle to detect the coating surface of the coating material.

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