JP3729288B2 - Electrostatic actuator - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to an electrostatic actuator using a thin film.
[0002]
[Prior art]
Conventionally, as the prior art in such a field, for example, there are the following.
[0003]
As shown in FIG. 17, the electrostatic actuator is composed of films 202 and 302 of insulating members in which parallel strip-like electrodes 203 and 303 of three phases, which are called first members 201 and second members 301, are embedded, It is configured by superimposing them so that the respective strip electrodes 203 and 303 are parallel to each other.
[0004]
As one simple driving method, the inventors of the present application, as illustrated in FIG. A method of applying a three-phase alternating current 401 so as to be in the reverse order to each other has been proposed (see, for example, Japanese Patent Laid-Open No. 6-78566 (US Pat. No. 5,448,124)).
[0005]
Thereby, with the change of the three-phase alternating current, the potential distribution changes in each of the three-phase electrodes, and the movable element is driven by the electrostatic force. Here, the mover / stator is equivalent, but for the sake of convenience, the fixed side is called the stator and the driven side is called the mover.
[0006]
[Problems to be solved by the invention]
The electrostatic actuator is driven by the voltage application as described above, but the thrust generation is not constant with respect to the change in the phase of the three-phase alternating current, and a large fluctuation occurs. For this reason, driving at a constant speed cannot be obtained with respect to application of a constant frequency, and as shown in FIG. 19, the driving is accompanied by a speed change for each electrode pitch, so that a sufficiently smooth driving cannot be obtained. There was a problem.
[0007]
In addition, this makes it difficult to control the position of the mover. Therefore, the driving method for connecting the three-phase AC in reverse order, which is an easy driving method for the electrostatic actuator, has a problem that the controllability is low.
[0008]
The present invention eliminates the above-described problems and provides a specific inclination (skew) between the mover and the stator constituting the electrostatic actuator, thereby reducing the thrust generated by the positional relationship between the mover and the stator. It is an object of the present invention to provide an electrostatic actuator that can reduce fluctuations and improve controllability.
[0009]
[Means for Solving the Problems]
[1] An electrostatic actuator comprising a flat plate-type first member and a second member, and both the first member and the second member are configured by embedding three-phase electrodes at a predetermined pitch in an insulating member. The electrode of the first member has a linear parallel strip electrode, the electrode of the second member has a W-shaped parallel strip electrode, and the skew value is set to 1.5 .
[0010]
[ 2 ] An electrostatic actuator comprising a first member and a second member, wherein both the first member and the second member are configured by embedding three-phase electrodes at a predetermined pitch in an insulating member. member and second member comprises a disc, one of the electrodes of said member has a radial strip electrode extending from the central portion of the member, the other member electrodes of said members extending from the center of said member It has a straight-line or Ranaru radially parallel strip electrodes which are inclined with respect to the electrode, in which so as to set the skew value to 1.5.
[0011]
[ 3 ] An electrostatic actuator comprising a first member and a second member, wherein both the first member and the second member are formed by embedding three-phase electrodes in a predetermined pitch in an insulating member. The member is a cylindrical body, the second member is a cylindrical body arranged concentrically corresponding to the first member of the cylindrical body, the electrode of the first member has a spiral electrode, The two-member electrode has a spiral electrode inclined with respect to the electrode of the first member, and the skew value is set to 1.5 .
[0012]
[ 4 ] The electrostatic actuator according to any one of [1] to [ 3 ] above, wherein the electrodes are multiphase except for three phases.
[0013]
[5] In the electrostatic actuator described in [1] Symbol mounting, by laminating an electrostatic actuator comprising a pair of flat plates in a plurality of stages, in which to perform the linear drive.
[0014]
[ 6 ] The electrostatic actuator according to [ 2 ] above, wherein the electrostatic actuators made up of a set of discs are stacked in a plurality of stages and are driven to rotate.
[0015]
[ 7 ] In the electrostatic actuator described in [ 3 ], a set of cylindrical electrostatic actuators are stacked in a plurality of stages to perform linear driving.
[0016]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
[0017]
FIG. 1 is a configuration diagram of an electrostatic actuator showing the principle of the present invention, and FIG. 2 is a diagram showing the relationship between the skew value and thrust of the electrostatic actuator.
[0018]
The present invention uses a driving method in which three-phase alternating currents are connected in reverse order, thereby reducing fluctuations in thrust with respect to phase changes of three-phase alternating current, which has been a problem in the past, and improving controllability. Conventionally, the stator electrode and the mover electrode are driven in a parallel state, but in the present invention, they are driven in an inclined state.
[0019]
The inclination is determined by analyzing the thrust and moment in a state over all of the positional relationship of the electrodes and the application state of the three-phase alternating current to each electrode. The way of expressing this inclination is to focus on one electrode of the moving element and use as an index how much the stator electrode can be straddled from one end of the electrode to the other end. Thus, the relative positional relationship can be expressed uniformly regardless of the width and pitch of the electrodes. This value is defined as a skew value.
[0020]
As a result of the analysis, it was found that the variation in thrust decreases when the skew value is 1.5, 4.3, 7.4, 10.4,.
[0021]
In addition, when the skew value is 4.3, 7.4, 10.4, 13.4,... (Hereinafter, approximately every 3.0), the moment works so as to stabilize near the inclination. I know by analysis.
[0022]
Therefore, as shown in FIG. 1, when the stator electrode 1 and the mover electrode 2 are inclined and arranged, the moving direction of the mover is as follows. Direction. The relationship between the skew value and the thrust is shown in FIG.
[0023]
In FIG. 2, the horizontal axis indicates the skew value, the left vertical axis indicates the motor thrust, and the pulling thrust when the electrodes are arranged in parallel is 1.0. The right vertical axis represents the motor thrust ripple rate (%).
[0024]
In FIG. 2, a represents the ripple rate, b represents the maximum value of thrust, and c represents the minimum value of thrust. A place where the ripple rate a is small is a place where the thrust fluctuation is small. The minimum value c of the thrust is larger when the skew value is 1.5 than when parallel. It can be said that the minimum value c of thrust is the minimum force that can always be generated. As the skew value increases, the minimum value of thrust at the stable tilt point decreases. Thereby, by using the state having the skew value of 1.5, the fluctuation of the thrust is small, and the force that can always be obtained can take the maximum value.
[0025]
The use of a skew value of 1.5, which is not a stable tilt point, can be realized by using a V-shaped or U-shaped electrode. At this skew value, a moment acts so that the electrodes are parallel only by the inclined arrangement of the parallel electrodes. By arranging the electrodes symmetrically so as to cancel out this moment, the skew can be stabilized at 1.5.
[0026]
Here, the electrostatic actuator of the present invention can be implemented as a flat plate type linear motor, a disk type rotary motor, a cylindrical type linear motor, or the like.
[0027]
Hereinafter, the motors will be described in detail in order.
[0028]
FIG. 3 is a block diagram of a flat-plate electrostatic linear motor showing a first embodiment of the present invention. FIG. 3 (a) is a plan view of a moving element of the electrostatic linear motor, and FIG. FIG. 3C is an enlarged plan view showing a state in which the stator and the movable element of the electrostatic linear motor are overlapped with each other.
[0029]
As shown in FIG. 3B, the stator 11 formed of a flat plate as the first member is configured by embedding three-phase parallel strip electrodes 13 with an equal pitch in an insulating member 12. Further, as shown in FIG. 3A, the moving element 14 formed of a flat plate as the second member is configured by embedding a three-phase parallel strip electrode 16 having an equal pitch in the insulating member 15.
[0030]
Therefore, as shown in FIG. 3C, when the movable element 14 is overlaid on the stator 11, the three-phase parallel strip electrode 16 is inclined (skewed) with respect to the three-phase parallel strip electrode 13. Become.
[0031]
As a result, as described above, the electrostatic linear motor can achieve smooth linear drive with less thrust fluctuation than when the stator and mover electrodes are arranged in parallel.
[0032]
Further, when the skew value is 1.5, the minimum force that can always be generated is maximized (see FIG. 2).
[0033]
FIG. 4 is a block diagram of a flat-plate electrostatic linear motor showing a second embodiment of the present invention. FIG. 4 (a) is a plan view of a moving element of the electrostatic linear motor, and FIG. FIG. 4C is an enlarged plan view showing a state where the stator and the movable element of the electrostatic linear motor are overlapped with each other.
[0034]
As shown in FIG. 4B, the stator 21 made of a flat plate as the first member is configured by embedding a three-phase parallel strip electrode 23 with an equal pitch in an insulating member 22. Further, as shown in FIG. 4A, the movable element 24 made of a flat plate as the second member embeds a parallel-phase-shaped electrode 26 of a three-phase structure having a square shape or a V-shape and an equal pitch in an insulating member 25. Consists of.
[0035]
Therefore, as shown in FIG. 4C, when the movable element 24 is superimposed on the stator 21, the three-phase parallel strip electrode 26 is inclined (skewed) with respect to the three-phase parallel strip electrode 23. become.
[0036]
FIG. 5 is a configuration diagram of a flat electrostatic linear motor showing a third embodiment of the present invention.
[0037]
In this embodiment, the stator is not shown, but it is the same as FIG. 3 and FIG. 4, and the stator as the first member embeds the three-phase parallel strip electrodes of equal pitch in the insulating member. Composed.
[0038]
That is, as shown in FIG. 5, the movable element 31 formed of a flat plate as the second member is configured by embedding the W-shaped, three-phase parallel strip-shaped electrodes 33 in the insulating member 32 at an equal pitch.
[0039]
Therefore, when the movable element 31 is overlaid on the stator, the three-phase parallel strip electrode 33 is inclined (skewed) with respect to the parallel strip electrode of the stator.
[0040]
FIG. 6 is a block diagram of a flat electrostatic linear motor showing a fourth embodiment of the present invention.
[0041]
Also in this embodiment, the stator is not shown, but it is the same as FIG. 3 and FIG. 4, and the stator as the first member embeds the three-phase parallel strip electrodes of equal pitch in the insulating member. Composed.
[0042]
That is, as shown in FIG. 6, the moving element 34 as the second member forms a straight portion 36 a and mountain-shaped portions 36 b and 36 c formed on both sides of the insulating member 35.
[0043]
Therefore, when the movable element 34 is overlaid on the stator, the three-phase parallel strip electrode 36 is inclined (skewed) with respect to the parallel strip electrode of the stator. That is, the skew portions A and B are formed in the mountain shape portion 36b, and the skew portions C and D are formed in the mountain shape portion 36c.
[0044]
FIG. 7 is a block diagram of a disk-type electrostatic rotary motor showing a fifth embodiment of the present invention. FIG. 7 (a) is a plan view of a slider of the electrostatic rotary motor, and FIG. ) Is a plan view of the stator of the electrostatic rotary motor.
[0045]
As shown in FIG. 7B, a stator 41 made of a disk as a first member is configured by embedding three-phase strip electrodes 43 in a radial and equal pitch in an insulating member. Further, as shown in FIG. 7A, a rotor 44 made of a disk as a second member is configured by embedding a three-phase strip electrode 46 having a substantially radial and equal pitch inclination in an insulating member 45. The
[0046]
Therefore, when the rotor 44 is overlaid on the stator 41, the three-phase strip electrode 46 is inclined (skewed) with respect to the three-phase strip electrode 43.
[0047]
Thereby, as described above, the electrostatic linear motor can obtain a smooth rotational drive with less torque fluctuation than when the stator and rotor electrodes are arranged in parallel.
[0048]
In addition, the minimum torque that can always be generated when the skew value is 1.5 is maximized (see FIG. 2).
[0049]
In the above embodiment, the stator 41 as the first member is shown as a disc, but it goes without saying that the stator 41 is not necessarily a disc but may be a rectangular plate or the like. The same applies to the disk rotary motors of the following embodiments.
[0050]
FIG. 8 is a block diagram of a disk-type electrostatic rotary motor showing a sixth embodiment of the present invention. FIG. 8 (a) is a plan view of the rotor of the electrostatic rotary motor, and FIG. ) Is a plan view of the stator of the electrostatic rotary motor.
[0051]
As shown in FIG. 8B, the stator 51 made of a disk as the first member is configured by embedding three-phase strip electrodes 53 in a radial and equal pitch in an insulating member 52. Further, as shown in FIG. 8A, the rotor 54 formed of a disk as the second member has a hemi-shaped or V-shaped radial and equi-pitch three-phase strip-shaped electrode 56 in an insulating member 55. It is composed by embedding.
[0052]
Therefore, when the rotor 54 is overlaid on the stator 51, the three-phase band electrode 56 is inclined (skewed) with respect to the three-phase band electrode 53.
[0053]
FIG. 9 is a block diagram of a disk-type electrostatic rotary motor showing a seventh embodiment of the present invention. FIG. 9A is a plan view of the rotor of the electrostatic rotary motor, and FIG. ) Is a plan view of the stator of the electrostatic rotary motor.
[0054]
As shown in FIG. 9B, a stator 61 made of a disc as a first member is configured by embedding three-phase strip-like electrodes 63 in a radial and equal pitch in an insulating member 62. Further, as shown in FIG. 9A, a rotor 64 made of a disc as a second member is configured by embedding a W-shaped, three-phase strip-shaped electrode 66 in an insulating member 65 at an equal pitch.
[0055]
Therefore, when the rotor 64 is overlaid on the stator 61, the three-phase strip electrode 66 is inclined (skewed) with respect to the three-phase strip electrode 63.
[0056]
FIG. 10 is a block diagram of a disk-type electrostatic rotary motor showing an eighth embodiment of the present invention. FIG. 10 (a) is a plan view of the rotor of the electrostatic rotary motor, and FIG. ) Is a plan view of the stator of the electrostatic rotary motor.
[0057]
As shown in FIG. 10B, a stator 71 made of a disk as a first member is configured by embedding three-phase strip electrodes 73 in a radial and equal pitch in an insulating member 72. Further, as shown in FIG. 10A, a rotor 74 made of a disc as a second member is configured by embedding a three-phase strip electrode 76 having a waveform in an insulating member 75.
[0058]
Therefore, when the rotor 74 is overlaid on the stator 71, the three-phase strip electrode 76 is inclined (skewed) with respect to the three-phase strip electrode 73.
[0059]
FIG. 11 is a block diagram of a disk-type electrostatic rotary motor showing a ninth embodiment of the present invention. FIG. 11 (a) is a plan view of the rotor of the electrostatic linear motor, and FIG. 11 (b). These are the top views of the stator of the electrostatic linear motor.
[0060]
As shown in FIG. 11B, a stator 81 made of a disk as a first member is configured by embedding a three-phase strip electrode 83 of a radial and equal pitch in an insulating member 82. Further, as shown in FIG. 11A, a rotor 84 made of a disk as a second member is configured by embedding a three-phase strip electrode 86 having a curved shape in an insulating member 85.
[0061]
Therefore, when the rotor 84 is overlaid on the stator 81, the three-phase strip electrode 86 is inclined (skewed) with respect to the three-phase strip electrode 83.
[0062]
As shown in FIG. 6, a disk-shaped rotor electrode is formed, that is, the rotor electrode has a central portion formed of a straight portion, and radial portions formed of mountain-shaped portions on both sides of the straight portion. A belt-like electrode may be provided and rotationally driven.
[0063]
FIG. 12 is a block diagram of a cylindrical electrostatic linear motor showing a tenth embodiment of the present invention. FIG. 12 (a) is a perspective view of the rotor of the electrostatic linear motor, and FIG. It is a perspective view of the stator of an electrostatic linear motor.
[0064]
As shown in FIG. 12B, the stator 91 formed of a cylindrical body as the first member is configured by embedding a three-phase spiral electrode 93 with an equal pitch in an insulating member 92. Further, as shown in FIG. 12A, the moving element 94 as a second member made of a cylindrical body having a diameter slightly larger than the diameter of the stator 91 is inclined with respect to the spiral electrode 93 in the insulating member 95. Embedded in a three-phase spiral electrode 96.
[0065]
Therefore, when the movable element 94 is overlaid on the stator 91, the three-phase spiral electrode 96 is inclined (skewed) with respect to the three-phase spiral electrode 93.
[0066]
FIG. 13 is a block diagram of a cylindrical electrostatic linear motor showing an eleventh embodiment of the present invention. FIG. 13 (a) is a perspective view of the slider of the electrostatic linear motor, and FIG. It is a perspective view of the stator of an electrostatic linear motor.
[0067]
As shown in FIG. 13B, a stator 101 made of a cylindrical body as a first member is configured by embedding a three-phase spiral electrode 103 with an equal pitch in an insulating member 102. Further, as shown in FIG. 13A, a movable member 104 as a second member made of a cylindrical body having a diameter slightly larger than the diameter of the stator 101 has a corrugated three-phase spiral electrode in an insulating member 105. 106 is embedded.
[0068]
Therefore, when the movable element 104 is overlaid on the stator 101, the three-phase spiral electrode 106 is inclined (skewed) with respect to the three-phase spiral electrode 103.
[0069]
FIG. 14 is a configuration diagram of a flat plate type electrostatic linear motor showing a twelfth embodiment of the present invention, and has a structure in which the flat plate type electrostatic actuators described above are stacked.
[0070]
As shown in FIG. 14, at least a part of the movable element 112 is overlaid on the stator 111 of the above-described flat plate type electrostatic actuator, and these sets are laminated in multiple stages.
[0071]
With this configuration, the movable element 112 can output a smooth and high thrust with little thrust fluctuation, and can perform a smooth linear drive with little thrust fluctuation.
[0072]
FIG. 15 is a block diagram of a disk-stacked electrostatic rotary motor showing a thirteenth embodiment of the present invention, and has a structure in which the above-described disk-type electrostatic actuators are stacked.
[0073]
As shown in FIG. 15, at least a part of a rotor 122 is superposed on a stator 121 in the disk-type electrostatic actuator described above, and these sets are laminated in multiple stages.
[0074]
With this configuration, it is possible to output a smooth and high rotational torque with little torque fluctuation.
[0075]
In the thirteenth embodiment, the stator 121 is not a disc but a rectangle, but it may be a circle or other shapes.
[0076]
FIG. 16 is a configuration diagram of a cylindrical laminated electrostatic linear motor showing a fourteenth embodiment of the present invention, and has a structure in which cylindrical electrostatic actuators are laminated.
[0077]
As shown in FIG. 16, at least a part of the movable element 132 is superposed on the stator 131 in the cylindrical electrostatic actuator, and these sets are laminated in multiple stages.
[0078]
By configuring in this way, the movable element 132 can obtain an electrostatic linear motor that can output a smooth and high torque with little thrust fluctuation.
[0079]
In addition, this invention is not limited to the said Example, A various deformation | transformation is possible based on the meaning of this invention, and they are not excluded from the scope of the present invention.
[0080]
【The invention's effect】
As described above in detail, according to the present invention, the following effects can be obtained.
[0081]
(1) According to the invention of claim 1 Symbol placement, by providing made from one W-like shape portion of the moving element and the stator consisting of a flat plate constituting the electrostatic actuator certain tilt (skew), It is possible to reduce fluctuations in thrust in linear drive due to the positional relationship between the mover and the stator, and to improve controllability.
[0082]
(2) According to the invention described in claim 2 , by providing a specific inclination (skew) between the electrodes of the movable element and the stator that are made of a disk constituting the electrostatic actuator, The fluctuation of thrust in the rotational drive due to the positional relationship can be reduced, and controllability can be improved.
[0083]
(3) According to the invention described in claim 3, a spiral electrode that intersects with the other electrode is provided on one of a stator composed of a cylindrical body and a movable body composed of a cylindrical body constituting an electrostatic actuator, and a specific inclination By providing (skew), fluctuations in thrust in linear drive due to the positional relationship between the mover and the stator can be reduced, and controllability can be improved.
[0084]
(4) According to the invention described in claim 4 , the AC fluctuation applied to the electrodes is driven by multiple phases other than the three phases instead of the three phases, thereby reducing fluctuations in thrust and improving controllability. Can do.
[0085]
(5) According to the invention described in claim 5 , there is provided a high output linear drive type electrostatic actuator capable of reducing fluctuations in thrust of the electrostatic actuator composed of a flat plate in each stage and improving controllability. be able to.
[0086]
(6) According to the invention described in claim 6 , there is provided a high output rotationally driven electrostatic actuator capable of reducing fluctuations in torque of the electrostatic actuator composed of a disk at each stage and improving controllability. can do.
[0087]
(7) According to the seventh aspect of the present invention, there is provided a high output linear drive type electrostatic actuator capable of reducing fluctuations in thrust of the cylindrical electrostatic actuator at each stage and improving controllability. Can do.
[0088]
Thus, according to the present invention, it is possible to obtain an electrostatic actuator with less thrust ripple or torque ripple and less thrust ripple or torque ripple. It ’s big.
[Brief description of the drawings]
FIG. 1 is a configuration diagram of an electrostatic actuator showing the principle of the present invention.
FIG. 2 is a diagram illustrating a relationship between a skew value and a thrust of the electrostatic actuator of the present invention.
FIG. 3 is a configuration diagram of a flat electrostatic linear motor illustrating a first embodiment of the present invention.
FIG. 4 is a configuration diagram of a flat electrostatic linear motor showing a second embodiment of the present invention.
FIG. 5 is a configuration diagram of a flat electrostatic linear motor showing a third embodiment of the present invention.
FIG. 6 is a configuration diagram of a flat electrostatic linear motor showing a fourth embodiment of the present invention.
FIG. 7 is a configuration diagram of a disk-type electrostatic rotary motor showing a fifth embodiment of the present invention.
FIG. 8 is a configuration diagram of a disk-type electrostatic rotary motor showing a sixth embodiment of the present invention.
FIG. 9 is a configuration diagram of a disc-type electrostatic rotary motor showing a seventh embodiment of the present invention.
FIG. 10 is a configuration diagram of a disk-type electrostatic rotary motor showing an eighth embodiment of the present invention.
FIG. 11 is a configuration diagram of a disc-type electrostatic rotary motor showing a ninth embodiment of the invention.
FIG. 12 is a configuration diagram of a cylindrical electrostatic linear motor showing a tenth embodiment of the present invention.
FIG. 13 is a configuration diagram of a cylindrical electrostatic linear motor showing an eleventh embodiment of the present invention.
FIG. 14 is a configuration diagram of a flat plate type electrostatic linear motor showing a twelfth embodiment of the present invention.
FIG. 15 is a block diagram of a disk-stacked electrostatic rotary motor showing a thirteenth embodiment of the present invention.
FIG. 16 is a configuration diagram of a cylindrical laminated electrostatic linear motor showing a fourteenth embodiment of the present invention.
FIG. 17 is a configuration diagram of a conventional electrostatic actuator.
FIG. 18 is a perspective view showing electrodes of a conventional electrostatic actuator.
FIG. 19 is a diagram showing a change in the position of a moving element of a conventional electrostatic actuator.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 Stator electrode 2 Mover electrode 3 Stator axis 4 Mover axis 11, 21, 41, 51, 61, 71, 81, 91, 101, 111, 121, 131 Stator 12, 15, 22, 25, 32 , 35, 42, 45, 52, 55, 62, 65, 72, 75, 82, 85, 92, 95, 102, 105 Insulating member 13, 16, 23, 26, 33, 36 Three-phase parallel strip electrode 14 , 24, 31, 34, 94, 104, 112, 132 Mover 44, 54, 64, 74, 84, 122 Rotor 36a Linear portion 36b, 36c Mountain shape portion 43, 46, 53, 56, 63, 66 73, 76, 83, 86 Three-phase strip electrode 93, 96, 103, 106 Three-phase spiral electrode

Claims (7)

In an electrostatic actuator comprising a flat plate-type first member and a second member, both of the first member and the second member being configured by embedding three-phase electrodes at a predetermined pitch in an insulating member,
The electrode of the first member has a linear parallel strip electrode, the electrode of the second member has a W-shaped parallel strip electrode, and the skew value is set to 1.5. . An electrostatic actuator comprising a first member and a second member, wherein both the first member and the second member are configured by embedding three-phase electrodes at a predetermined pitch in an insulating member,
The first member and the second member comprises a disc, one of the electrodes of said member has a radial strip electrodes extending from a central portion of the member, the electrodes of the other member extending from a central portion of the member an electrostatic actuator, characterized in that a straight line or Ranaru radially parallel strip electrodes which are inclined with respect to the electrode of the members, to setting the skew value to 1.5. An electrostatic actuator comprising a first member and a second member, wherein both the first member and the second member are configured by embedding three-phase electrodes at a predetermined pitch in an insulating member,
The first member is a cylindrical body, the second member is a cylindrical body arranged concentrically corresponding to the first member of the cylindrical body, and the electrode of the first member has a spiral electrode The electrode of the second member has a spiral electrode inclined with respect to the electrode of the first member, and the skew value is set to 1.5 . Electrostatic actuators in the electrostatic actuator according to any one of claims 1 to 3, the electrodes, characterized in that the multi-phase but three phases. In the electrostatic actuator according to claim 1 Symbol placement, by laminating an electrostatic actuator comprising a pair of flat plates in a plurality of stages, the electrostatic actuator and performs linear drive. The electrostatic actuator according to claim 2, wherein the electrostatic actuator is formed by laminating a plurality of electrostatic actuators including a set of discs to perform rotation driving. 4. The electrostatic actuator according to claim 3, wherein a set of cylindrical electrostatic actuators are stacked in a plurality of stages to perform linear driving.

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