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JP3733966B2 - Emission spectroscopic method - Google Patents
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JP3733966B2 - Emission spectroscopic method - Google Patents

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JP3733966B2
JP3733966B2 JP2004002870A JP2004002870A JP3733966B2 JP 3733966 B2 JP3733966 B2 JP 3733966B2 JP 2004002870 A JP2004002870 A JP 2004002870A JP 2004002870 A JP2004002870 A JP 2004002870A JP 3733966 B2 JP3733966 B2 JP 3733966B2
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孝志 杉原
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JFE Steel Corp
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本発明は、金属試料に含まれる元素の分析方法に関し、特に、金属中の元素を発光分光分析法で定量する際の分析精度向上方法に関する。   The present invention relates to a method for analyzing an element contained in a metal sample, and more particularly to a method for improving analysis accuracy when an element in a metal is quantified by an emission spectroscopic analysis method.

スパーク放電を用いる発光分光分析方法は、まず、試料と対電極の間でスパーク放電を行い、金属試料中に含まれる各元素を、その放電エネルギーにより蒸発・気化して各元素の濃度に応じた強度の固有スペクトル線を発生させる。その際、発生源にあるスペクトル線は、各元素の固有スペクトル線や散乱光が混在し、所謂連続スペクトル線の状態となっているが、この連続スペクトル線を分光器に導き、内部に設置された回析格子により分光し、測定対象元素の固有スペクトル線が選択的に検出される。そして、検出された複数の固有スペクトル線の強度をフォトマルチプライア(検出器)で測光して数値化し、予め作成してあった各元素毎の検量線に対照し、それぞれの含有量に換算することで定量が行われる。この各元素毎の検量線は、それぞれ含有量既知の複数個(20〜40個)の試料で発光スペクトル線強度を求め、回帰計算を行って得た回帰式(1次式、2次式あるいは3次式)である。   In the emission spectroscopic analysis method using spark discharge, first, spark discharge is performed between the sample and the counter electrode, and each element contained in the metal sample is evaporated and vaporized by the discharge energy according to the concentration of each element. Intense characteristic spectral lines are generated. At that time, the spectral lines at the source are mixed with the intrinsic spectral lines and scattered light of each element and are in a so-called continuous spectral line state. These continuous spectral lines are guided to the spectrometer and installed inside. Spectroscopic analysis is performed using a diffraction grating, and the characteristic spectral lines of the element to be measured are selectively detected. Then, the intensity of a plurality of detected intrinsic spectral lines is photometrically measured with a photomultiplier (detector), converted into a numerical value, and converted into each content in comparison with a calibration curve prepared for each element. Quantification is performed. The calibration curve for each element is a regression formula (primary formula, quadratic formula or quadratic formula obtained by calculating the emission spectral line intensity with a plurality (20 to 40) of samples each having a known content and performing regression calculation. (Tertiary expression).

しかしながら、分析試料は、検量線作成用のものも含めて、
(a)同一の成分組成の試料が得られない、
(b)同一の金属組織の試料が得られない、
(c)試料中に含まれる非金属介在物の濃度、分布が試料により異なる
等の理由により試料毎にその物理的、化学的性質が異なるので、スパーク放電に際しては、放電形態(放電エネルギー)が試料毎に異なり、各元素のスペクトル線強度が一定にならず、分析精度低下の主要因となっていた。
However, the analytical samples, including those for creating a calibration curve,
(A) A sample having the same component composition cannot be obtained.
(B) A sample of the same metal structure cannot be obtained.
(C) Since the physical and chemical properties of each sample are different for each sample because the concentration and distribution of the nonmetallic inclusions contained in the sample differ depending on the sample, the discharge mode (discharge energy) is different during spark discharge. Different from sample to sample, the spectral line intensity of each element was not constant, which was the main cause of a decrease in analysis accuracy.

そこで、現在の発光分光分析方法は、以下のような処置を施して分析精度の向上を図っている。
(1)放電回数を多く、つまり試料採取量を多くし、統計的に誤差を少なくする。
(2)分析試料の主成分(鉄鋼であれば鉄、Al合金であればアルミニウム等)のスペクトル線強度を内標準として測定し、例えば、(目的元素スペクトル線強度/主成分スペクトル線強度)を補正スペクトル線値として演算、補正する(非特許文献1参照)。
(3)試料中に介在物の多い場合は、主成分元素のスペクトル線強度の変動が大きく、上記(2)の方法を用いると、目的元素のスペクトル線強度は正常でも分母である主成分が変動するため、分析精度低下させることがある(非特許文献2参照)。そのため、1試料当たり1000〜2000回の放電を行い、そのうち主成分元素の固有スペクトル線強度が異常に低い場合(あるいは異常に高い場合)には、目的元素の固有スペクトル線強度を求めない測光方式(所謂Feトリガ方式)で各元素の含有量を算出する(非特許文献3参照)。つまり、異常データをカットして、試料の真値よりもむしろ代表値を求める分析方法である。
金属の発光分光分析法(昭和42年9月20日)共立出版(株)発行、212〜214頁 鉄と鋼1982、vol68、No.3,p523〜528 最新の鉄鋼状態分析(1979年8月10日)(株)アグネ発行、107〜115頁
Therefore, the current emission spectroscopic analysis method is intended to improve the analysis accuracy by taking the following measures.
(1) Increase the number of discharges, that is, increase the amount of sample collection, and statistically reduce the error.
(2) Measure the spectral line intensity of the main component of analysis sample (iron for steel, aluminum for Al alloy, etc.) as an internal standard, for example, (target element spectral line intensity / principal component spectral line intensity) Calculation and correction are performed as corrected spectral line values (see Non-Patent Document 1).
(3) When there are many inclusions in the sample, the fluctuation of the spectral line intensity of the main component element is large, and when the method of (2) is used, the main component which is the denominator is normal even if the spectral line intensity of the target element is normal. Since it fluctuates, the analysis accuracy may be reduced (see Non-Patent Document 2). Therefore, a photometric method in which 1000 to 2000 discharges per sample are performed, and when the intrinsic spectral line intensity of the main component element is abnormally low (or abnormally high), the intrinsic spectral line intensity of the target element is not obtained. The content of each element is calculated by a so-called Fe trigger method (see Non-Patent Document 3). In other words, this is an analysis method in which abnormal data is cut to obtain a representative value rather than a true value of the sample.
Metal emission spectrometry (September 20, 1967), published by Kyoritsu Shuppan Co., Ltd., pages 212-214 Iron and Steel 1982, vol 68, No. 3, p523-528 Latest steel state analysis (August 10, 1979) Agne, Inc., pages 107-115

しかしながら、本発明者の研究によれば、上記3つの処置を施しても以下に述べるような問題の存在が明らかになった。
(1)の方法では、母集団を多くしても、その標準偏差の減少への寄与は少なく、しかも放電回数を多くすることは放電を長く続けることであり、そのため、試料が高温となり、電気伝導性、熱伝導性が変化し放電の形態が変わり、かえって測定対象元素の発光スペクトル線強度にばらつきを生じさせる。
However, according to the research of the present inventor, the following problems have been clarified even when the above three treatments are performed.
In the method (1), even if the population is increased, the contribution to the reduction of the standard deviation is small, and increasing the number of discharges means that the discharge is continued for a long time. The conductivity and thermal conductivity change, and the form of discharge changes, which in turn causes variations in the emission spectral line intensity of the element to be measured.

(2)の方法では、測定対象元素の固有スペクトル線の変動と、主成分元素の変動が同期あるいは追従しない場合、かえって大きな誤差を生じる。すなわち、主成分元素はその含有量が当然多く、発光分光分析では検出感度を鈍くしなければ検出できず、そのため、小さい量の変化を完全に検出できない(補正の効果が少ない)。   In the method (2), if the variation of the characteristic spectrum line of the element to be measured and the variation of the main component do not synchronize or follow, a large error occurs. That is, the content of the main component element is naturally large, and it cannot be detected unless the detection sensitivity is lowered in the emission spectroscopic analysis. Therefore, a small amount of change cannot be completely detected (the effect of correction is small).

(3)の方法では、主成分の固有スペクトル線強度が異常な場合、目的元素の固有スペクトル線強度が正常でデータとして採用されないという問題がある。つまり、主成分スペクトル線強度に予めデータとして採用するかどうかを判断する幅(分析分野ではウインド幅という)を設定するため、試料によって主成分の含有量が異なった場合、主成分スペクトル線強度は増加あるいは減少し、適切なウインド幅でなくなり、誤差を生じる試料がある。そのため、主成分の含有量が類似した試料で検量線を作成し、分析しなければならず、作業が煩雑になるとともに、作業ミスの原因ともなる。   In the method (3), there is a problem that when the intrinsic spectral line intensity of the main component is abnormal, the intrinsic spectral line intensity of the target element is normal and cannot be adopted as data. That is, in order to set the width (called the window width in the analysis field) for determining whether to adopt the principal component spectral line intensity as data in advance, if the content of the principal component differs depending on the sample, the principal component spectral line intensity is There are samples that increase or decrease and lose the proper window width and cause errors. Therefore, it is necessary to create and analyze a calibration curve with samples having similar content of the main component, which complicates work and causes work errors.

以上述べたように、現在の技術レベルでは、今以上の分析精度の向上は期待できないし、また鉄鋼材料の高清浄度化の推進による、鋼中の炭素、硫黄、窒素、隣等の定量下限拡大へのニーズに対応できない。そこで、本発明は、かかる事情を鑑み、簡易で、且つ分析精度が高く、分析元素の定量下限の拡大が可能な発光分光分析方法を提供することを目的としている。   As described above, at the current technical level, no further improvement in analytical accuracy can be expected, and the lower limit of quantification of carbon, sulfur, nitrogen, neighbors, etc. in steel by promoting higher cleanliness of steel materials. Cannot meet the needs of expansion. In view of such circumstances, an object of the present invention is to provide an emission spectroscopic analysis method that is simple, has high analysis accuracy, and can expand the lower limit of quantification of analytical elements.

発明者は、上記目的を達成するため、従来の発光分光分析方法を鋭意見直し、以下の知見を得た。   In order to achieve the above object, the inventor diligently reviewed the conventional emission spectroscopic analysis method and obtained the following knowledge.

スパーク放電装置は、電圧を一定とした(通常200V〜400V程度)コンデンサ(キャパシタンス)、コイル(インダクタンス)及び抵抗で構成された電気回路からなり、イグナイタ回路より高電圧(1KV〜2KV)のトリガを出力し、それに同期して放電用電極から試料に放電するようになっている。その際、所謂放電ギャップ(対電極と試料との間隔:通常3mm〜5mm)に流れる電流は、試料である金属電気伝導度と熱伝導度によって支配され、試料が均質で常に同一温度であれば、これら伝導性は変化せず一定で、分析初期と分析終了付近で放電の電流値に差はない。つまり、試料中の各元素を励起するエネルギーは一定であり、得られる各元素のスペクトル線強度も変動しない。しかしながら、試料は、そのなかに含まれる不純物成分の濃度、あるいはサンプリング方法によって凝固過程が異なり、炭素、マンガン等の含有量によってもその結晶形態が異なる。また、試料の中には、例えばMgO、SiO2、Al23、TiN、MnS等のような酸化物、窒化物、硫化物等の介在物も存在し、放電形態は、前記したように、試料の形態により必然的に異なり、放電電流の大きさも異なってくる。さらに、試料の励起エネルギーは放電電流iの時間積(∫idt)であるので、電流値により発光スペクトル線の強度も変化する。 The spark discharge device is composed of an electric circuit composed of a capacitor (capacitance), a coil (inductance), and a resistor with a constant voltage (usually about 200 V to 400 V), and triggers a higher voltage (1 KV to 2 KV) than the igniter circuit. Output is performed and the sample is discharged from the discharge electrode to the sample in synchronism with the output. At that time, the current flowing in the so-called discharge gap (distance between the counter electrode and the sample: usually 3 mm to 5 mm) is governed by the metal electrical conductivity and the thermal conductivity of the sample, so long as the sample is homogeneous and always at the same temperature. The conductivity does not change and is constant, and there is no difference in the current value of the discharge between the initial analysis and the end of the analysis. That is, the energy for exciting each element in the sample is constant, and the spectral line intensity of each element obtained does not change. However, the solidification process of the sample varies depending on the concentration of the impurity component contained therein or the sampling method, and the crystal form varies depending on the content of carbon, manganese, and the like. Further, in the sample, for example MgO, SiO 2, Al 2 O 3, TiN, oxides such as MnS, nitrides also present inclusions such as sulfides, discharge form, as described above Depending on the form of the sample, the size of the discharge current is inevitably different. Furthermore, since the excitation energy of the sample is the time product (∫idt) of the discharge current i, the intensity of the emission spectral line also changes depending on the current value.

そこで、発明者は、この知見に着眼し、放電毎の変化した電流の大きさを計測し、その電流値が予め設定された電流値の幅(ウィンド幅)に入った時にのみ、測光した各元素の固有スペクトル線強度値をデータとして採用する分析方法を創案したのである。   Therefore, the inventor pays attention to this knowledge, measures the magnitude of the changed current for each discharge, and measures each photometric value only when the current value falls within a preset current value width (window width). He created an analysis method that uses the intrinsic spectral line intensity values of the elements as data.

すなわち、本発明は、不活性ガス雰囲気中で、金属試料と対電極との間で多数回のスパーク放電をさせ、その放電毎に励起した該金属試料からの発光を分光し、得られた各元素の固有スペクトル線の強度を測光して数値化し、該数値を計算機で累積、演算処理して各元素の含有量を求める発光分光分析方法において、異常な結晶組織や非金属介在物の少ない金属試料でスパーク発光分光を行うと共に、上記放電毎の放電電流値を測定し、その電流値をすべて出現度数と放電電流値との度数分布にデータ処理して、その上、下を切り捨てた領域を定め、該上下領域内の電流値と対応する上記各元素の固有スペクトル線の数値化した強度値を上記計算機で累積、演算することを特徴とする発光分光分析方法である。   That is, in the present invention, in an inert gas atmosphere, spark discharge is performed a number of times between a metal sample and a counter electrode, and light emission from the metal sample excited for each discharge is spectroscopically analyzed. In an emission spectroscopic analysis method in which the intensity of the intrinsic spectral line of an element is measured and digitized, and the numerical value is accumulated and processed by a computer to obtain the content of each element, a metal with an abnormal crystal structure and non-metallic inclusions The spark emission spectroscopy was performed on the sample, the discharge current value for each discharge was measured, the current values were all processed into a frequency distribution of the frequency of occurrence and the discharge current value, and the area where the bottom was truncated The emission spectroscopic analysis method is characterized in that the current value in the upper and lower regions and the intensity value obtained by quantifying the intrinsic spectral line of each element corresponding to the current value are accumulated and calculated by the computer.

本発明により、発光分光分析方法の分析精度を容易にしかも低コストで向上させることができる。その結果、各元素の分析可能範囲の拡大、つまり定量下限の拡大と共に、高純度鋼の開発、精錬工程での歩留り向上及び製造コストの低減、また、操業時間の短縮、分析コストの低減等の副次効果も期待できる。   According to the present invention, the analysis accuracy of the emission spectroscopic analysis method can be improved easily and at low cost. As a result, the analysis range of each element has been expanded, that is, the lower limit of quantification, development of high purity steel, improvement of yield in refining process and reduction of manufacturing cost, shortening of operation time, reduction of analysis cost, etc. A secondary effect can also be expected.

以下、図面を参照して本発明の実施の形態を説明する。   Embodiments of the present invention will be described below with reference to the drawings.

本発明では、不活性ガス雰囲気中で、金属試料と対電極との間で多数回のスパーク放電をさせ、その放電毎に励起した該金属試料からの発光を分光し、得られた各元素の固有スペクトル線の強度を測光して数値化し、該数値を計算機で累積、演算処理して各元素の含有量を求める発光分光分析方法において、異常な結晶組織や非金属介在物の少ない金属試料でスパーク発光分光を行うと共に、上記放電毎の放電電流値を測定し、その電流値をすべて出現度数と放電電流値との度数分布にデータ処理して、その上、下を切り捨てた領域を定め、該上下領域内の電流値と対応する上記各元素の固有スペクトル線の数値化した強度値を上記計算機で累積、演算するようにしたので、各元素の固有スペクトル線強度をほとんど同程度の放電電流値(励起エネルギー)下で評価できるようになる。その結果、試料の異常部からの情報は除外され、正しい代表値が得られるようになる。また、従来の発光分光分析装置を何ら改造せず若干のソフトの追加で、低コストとで容易に分析精度がよくなり、各元素の定量下限の拡大が達成できる。以下、実施例にてさらに詳細に、本願発明を説明する。   In the present invention, in an inert gas atmosphere, a spark discharge is performed a number of times between a metal sample and a counter electrode, and light emission from the metal sample excited for each discharge is spectroscopically analyzed. In the emission spectroscopic analysis method, in which the intensity of the intrinsic spectral line is measured and digitized, and the numerical value is accumulated and calculated by a computer to obtain the content of each element, a metal sample with few abnormal crystal structures and non-metallic inclusions is used. While performing the spark emission spectroscopy, measure the discharge current value for each discharge, data processing the current value to the frequency distribution of the appearance frequency and the discharge current value, and further, to determine the region that has been rounded down, Since the numerical values of the specific spectral lines of the respective elements corresponding to the current values in the upper and lower regions are accumulated and calculated by the above-mentioned calculator, the discharge current having almost the same specific spectral line intensity of each element. Value (encouragement Energy) will be able to evaluate under. As a result, information from the abnormal portion of the sample is excluded, and a correct representative value can be obtained. In addition, by adding a little software without modifying the conventional emission spectroscopic analyzer, the analysis accuracy can be easily improved at low cost, and the lower limit of quantification of each element can be achieved. Hereinafter, the present invention will be described in more detail with reference to examples.

図1は、本発明に係るスパーク放電発光分光分析方法を実施した装置の一例を模式的に示したものであり、放電装置1、分析試料(電極でもある)2及び対電極3とからなる発光部と、回折格子7、スリット8、検出器(フォトマルチプライア)6等からなる分光器と、スペクトル線のアナログ量をディジタル変換してデータ処理を行う測光装置4やスペクトル線強度を元素の含有量に変換する含有量計算機5から構成されている。   FIG. 1 schematically shows an example of an apparatus that implements the spark discharge emission spectroscopic analysis method according to the present invention. The light emission comprises a discharge apparatus 1, an analysis sample (also an electrode) 2, and a counter electrode 3. A spectroscope composed of a diffraction grating 7, a slit 8, a detector (photomultiplier) 6 and the like, a photometric device 4 for digitally converting an analog quantity of spectral lines and processing the data, and spectral line intensities containing elements It is comprised from the content calculator 5 converted into quantity.

図2は、上記放電装置1に組み込まれた放電回路の一部と、検出器よりスペクトル線強度を測光する測光装置の一部の一例であり、直流電源9からの電力供給を、インダクタンス、キャパシタンス及び抵抗で制御し、放電ギャップ13でスパーク放電させる。その際、放電トリガとして、高圧部20で10000V以上に昇圧した電流をイグナイタ11で絶縁を破り、コンデンサ24にホールドした電気を流すことになる。そして、本発明の実施のため、上記装置に放電回路に電流計10(図2参照)を、図1の測光装置に度数分布処理及び記憶回路19を、そして中央演算回路17に各元素の固有スペクトル線強度データを選択するための演算手段を新たに組み込んである。   FIG. 2 shows an example of a part of a discharge circuit incorporated in the discharge device 1 and a part of a photometric device that measures spectral line intensity from a detector. Then, the discharge is controlled by the resistance and spark discharge is caused by the discharge gap 13. At that time, as a discharge trigger, the current boosted to 10000 V or higher by the high voltage unit 20 breaks the insulation by the igniter 11 and the electricity held in the capacitor 24 flows. In order to implement the present invention, the above device has an ammeter 10 (see FIG. 2) in the discharge circuit, a frequency distribution processing and storage circuit 19 in the photometric device in FIG. A calculation means for selecting spectral line intensity data is newly incorporated.

以下に、本発明に係る発光分光分析方法の実施内容を説明する。まず、図1の試料保持部に、異常な結晶組織や非金属介在物の少ない比較的均一な金属試料、ここでは炭素鋼をセットし、通常慣用する方法で放電を行い、各放電毎(例えば200〜400回/秒)の放電電流値を電流計で計測し、前記した放電電流の一定範囲領域を定める。ここで、パルス変換器15は電流計10によって測定された電流値をアナログ/ディジタル変換された後、ホールドする回路である。また、パルス変換器15は電流計10によって計測された電流を、積分してホールドする積分回路であってもよい。このホールド回路あるいは積分回路は、一回の放電毎に次の放電が行われる前にクリアされるが、電流値は中央演算処理装置17に送られる。そして、その放電電流値は、図3のように出現回数との度数分布に整理された。本発明では、この度数分布の横軸(電流値)の両端をそれぞれa%,b%だけ異常な値として削除し、a%−b%間の値を正常な放電電流の領域(ウインド幅)とし、記憶回路19に格納する。勿論、このa,bの値は、分析対象の金属試料の種類によって異なるが、普通鋼の場合、aは0〜20%,bは0〜10%の範囲であり、好ましくはaが10%、bが5%である。   Below, the implementation content of the emission-spectral-analysis method based on this invention is demonstrated. First, a relatively uniform metal sample with few abnormal crystal structures and non-metallic inclusions, here carbon steel, is set in the sample holder of FIG. A discharge current value of 200 to 400 times / second) is measured with an ammeter, and a certain range region of the discharge current is determined. Here, the pulse converter 15 is a circuit that holds the current value measured by the ammeter 10 after analog / digital conversion. The pulse converter 15 may be an integrating circuit that integrates and holds the current measured by the ammeter 10. The hold circuit or the integration circuit is cleared before the next discharge is performed for each discharge, but the current value is sent to the central processing unit 17. The discharge current values were arranged in a frequency distribution with the number of appearances as shown in FIG. In the present invention, both ends of the horizontal axis (current value) of the frequency distribution are deleted as abnormal values by a% and b%, respectively, and a value between a% and b% is a normal discharge current region (window width). And stored in the storage circuit 19. Of course, the values of a and b vary depending on the type of metal sample to be analyzed, but in the case of ordinary steel, a is in the range of 0 to 20%, b is in the range of 0 to 10%, and preferably a is 10%. , B is 5%.

次に、実際の発光分光分析手順であるが、分析対象金属試料を上記同様に試料保持部にセットし、放電を行いその電流値を電流計で測定する。また、同一放電で発生した各元素のスペクトル線は図1の分光器(図2の12)に入り、回折、分光され、各元素の固有スペクトル線波長位置に複数配置された検出器6(図2の21)に入る。検出器からのスペクトル線強度の出力は、一放電毎に得られ、パルス変換器によりパルスに呈し、マルチプレクサを介し中央演算処理装置17に送られ、予め定められ記憶回路19に格納されている上記放電電流値のウインド幅(電流値の上限値、下限値:図3に内容を示した)を基に、正常放電のスペクトル線と判断されたものだけが選別され、スペクトル線強度の記憶回路18に一放電毎に記憶されていく。その選別の様子を図4に示すが、図4の上の図において、放電電流値が上限値と下限値の間に入った場合に対応するスペクトル線強度が、下の図でデータとして記憶回路18に記憶されることが示されている。   Next, as an actual emission spectroscopic analysis procedure, the metal sample to be analyzed is set in the sample holder in the same manner as described above, discharged, and the current value is measured with an ammeter. Further, the spectral lines of each element generated by the same discharge enter the spectroscope of FIG. 1 (12 of FIG. 2), are diffracted and spectrally separated, and a plurality of detectors 6 (FIG. 6) are arranged at the wavelength positions of the specific spectral lines of each element. 2) 21). The output of the spectral line intensity from the detector is obtained for each discharge, presented as a pulse by the pulse converter, sent to the central processing unit 17 through the multiplexer, and stored in the storage circuit 19 in advance. Based on the window width of the discharge current value (upper limit value and lower limit value of the current value: the contents are shown in FIG. 3), only those determined to be normal discharge spectrum lines are selected, and the spectrum line intensity storage circuit 18 is selected. Is stored for each discharge. FIG. 4 shows the state of the selection. In the upper diagram of FIG. 4, the spectral line intensity corresponding to the case where the discharge current value is between the upper limit value and the lower limit value is stored as data in the lower diagram. 18 is stored.

最後に、指定した放電回数(通常1000回〜2000回程度)をすべて放電した後、放電を終了し、記憶回路18にある各元素のスペクトル線強度を、例えば全積分する、あるいは度数分布に変換した後、その中央値として求め、その値を求めて、予め作成しておいた検量線により含有量を算出する。実際に炭素鋼中のAlを分析した結果の一例を表1に示す。本試料の場合、Alの分析精度(繰り返し精度:σ)は、従来法の0.0038%に対して、0.0011%と3倍以上も向上した。なお、ここでの従来法とは、[背景技術]の項で最後に述べた所謂『Feトリガ方式』である。   Finally, after discharging the specified number of discharges (usually about 1000 to 2000 times), the discharge is terminated, and the spectral line intensity of each element in the memory circuit 18 is fully integrated, for example, or converted into a frequency distribution. After that, the median value is obtained, the value is obtained, and the content is calculated using a calibration curve prepared in advance. Table 1 shows an example of the results of actual analysis of Al in carbon steel. In the case of this sample, the Al analysis accuracy (repetition accuracy: σ) improved by 0.0011% to 3 times or more compared to 0.0038% of the conventional method. The conventional method here is the so-called “Fe trigger method” described last in the section “Background Art”.

Figure 0003733966
Figure 0003733966

発光分光分析装置の全体構成を示す模式図である。It is a schematic diagram which shows the whole structure of an emission-spectral-analysis apparatus. 電流計を含むスパーク放電の回路図と、測光装置の概略構成を示した図である。It is the figure which showed the schematic diagram of the circuit diagram of a spark discharge containing an ammeter, and a photometry apparatus. 正常な放電電流値の一定領域を設定する方法の説明図である。It is explanatory drawing of the method of setting the fixed area | region of a normal discharge current value. 図3の放電電流値の一定領域に対応する各元素のスペクトル線の選択状況を説明する図である。It is a figure explaining the selection condition of the spectral line of each element corresponding to the fixed area | region of the discharge current value of FIG.

符号の説明Explanation of symbols

1 放電(発光)装置
2 分析試料
3 対電極
4 測光装置
5 データ処理装置
6 検出器(フォトマルチプライア)
7 回折格子
8 スリット
9 電源部
10 電流計
11 イグナイタ放電部
12 分光器
13 スパーク放電部
14 A/D変換器
15 パルス変換器
16 マルチプレクサ
17 中央演算処理装置
18 スペクトル線強度記憶回路
19 度数分布処理及び記憶回路
20 高電圧部
21 検出器(フォトマルチプライア)
22 A/D変換器
23 パルス変換器
24 放電用コンデンサ
25 端末機
DESCRIPTION OF SYMBOLS 1 Discharge (light emission) apparatus 2 Analytical sample 3 Counter electrode 4 Photometry apparatus 5 Data processing apparatus 6 Detector (photomultiplier)
7 Grating 8 Slit 9 Power supply unit 10 Ammeter 11 Igniter discharge unit 12 Spectrometer 13 Spark discharge unit 14 A / D converter 15 Pulse converter 16 Multiplexer 17 Central processing unit 18 Spectral line intensity storage circuit 19 Frequency distribution processing and Memory circuit 20 High voltage section 21 Detector (Photomultiplier)
22 A / D converter 23 Pulse converter 24 Discharge capacitor 25 Terminal

Claims (1)

不活性ガス雰囲気中で、金属試料と対電極との間で多数回のスパーク放電をさせ、その放電毎に励起した該金属試料からの発光を分光し、得られた各元素の固有スペクトル線の強度を測光して数値化し、該数値を計算機で累積、演算処理して各元素の含有量を求める発光分光分析方法において、
異常な結晶組織や非金属介在物の少ない金属試料でスパーク発光分光を行うと共に、上記放電毎の放電電流値を測定し、その電流値をすべて出現度数と放電電流値との度数分布にデータ処理して、その上、下を切り捨てた領域を定め、該上下領域内の電流値と対応する上記各元素の固有スペクトル線の数値化した強度値を上記計算機で累積、演算することを特徴とする発光分光分析方法。
In an inert gas atmosphere, a spark discharge was performed many times between the metal sample and the counter electrode, and the emission from the metal sample excited for each discharge was dispersed, and the characteristic spectral lines of each element obtained were In an emission spectroscopic analysis method for calculating the intensity of light by measuring the intensity, accumulating the numerical value with a computer, and calculating the content of each element by calculation processing,
Spark emission spectroscopy is performed on a metal sample with an abnormal crystal structure and few non-metallic inclusions, and the discharge current value for each discharge is measured, and all the current values are processed into a frequency distribution of appearance frequency and discharge current value. In addition, a region in which the lower part is cut off is defined, and the current values in the upper and lower regions and the corresponding intensity values of the characteristic spectrum lines of the respective elements are accumulated and calculated by the computer. Emission spectroscopic analysis method.
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