JP3735503B2 - Pulse power supply - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
  The present invention relates to a pulse power supply device for a device using short pulse discharge, such as a pulse laser device or a gas decomposition device using plasma discharge.
[0002]
[Prior art]
  FIG. 8 shows a conventional pulse power supply disclosed in, for example, Japanese Patent Laid-Open No. 4-367291. In the figure, 1 is an AC power supply, 2 is a DC voltage source that receives the AC power supply 1 and generates a DC voltage, and 3 is a DC power supply. A first capacitor for storing a high voltage of the voltage source 2, 4 is a switch for discharging the voltage stored in the first capacitor 3 (powering the load), and 5 is provided in a discharge path between the first capacitor 3 and the switch 4. The reactor 6 is a capacitor provided in the discharge path of the first capacitor 3 ahead of the reactor 6. 7 is a saturable reactor provided in the discharge path of the capacitor 6, and 8 is a peaking capacitor provided in front of the saturable reactor 6 in the discharge path of the capacitor 6. Reference numeral 9 denotes a discharge tube connected in parallel to the peaking capacitor 8.
[0003]
  11 is a diode connected to one end of the second capacitor 6, 10 is a transformer having a primary coil connected in series with the diode 11, 12 is a regenerative capacitor connected in parallel to the secondary coil output side of the transformer 10, An inverter 13 converts the voltage of the regenerative capacitor 12 into alternating current and regenerates it to the input of the direct current power source 2. The operation of the pulse power supply of FIG. 8 will be described with reference to the waveform chart FIG.
[0004]
  First, the first capacitor 3 is charged to a high voltage by the DC power supply 2 from time t0 in FIG. Subsequently, when the switch 3 is turned on at time t1, the electric charge rapidly moves from the first capacitor 3 to the second capacitor 6, and the second capacitor 6 is charged. In this charging process, the peaking capacitor 8 is prevented from being charged by the saturable reactor 7, but when the saturable reactor 7 is saturated at time t2 and the inductance is drastically reduced, the peaking capacitor 8 is changed from the second capacitor 6 to the peaking capacitor 8. Charging is started. When the voltage of the peaking capacitor 8 reaches a predetermined value, discharge of the discharge tube 9 is started, the discharge tube 9 becomes low resistance, and the peaking capacitor 8 is rapidly discharged. Therefore, electric power is supplied to the discharge tube 9.
[0005]
  In the above operation, the current of the series circuit of the reactor 5 and the second capacitor 6 and the current of the series circuit of the saturable reactor 7 and the peaking capacitor 8 become a current due to the series resonance phenomenon due to the capacitor and the inductance, and the resonance frequency is the first. The capacitor 3, the second capacitor 6, and the peaking capacitor 8 are configured so as to gradually increase, and finally the current to the discharge tube 6 is configured to be steep.
[0006]
  Since the series resonance phenomenon is used in this way, after the second capacitor 6 and the peaking capacitor 8 are discharged, electric charges are accumulated in these capacitors with the opposite polarity to those when they are charged. Will occur. The voltage generated with the reverse polarity is applied between the input terminals of the transformer 10 when the diode 11 is turned on. Therefore, a current flows from the second capacitor 6 and the peaking capacitor 8 via the diode 11 and the transformer 10, and the regenerative capacitor 12 connected to the output side of the transformer 10 is charged. Thus, the energy generated in the reverse polarity in the second capacitor 6 and the peaking capacitor 8 is stored as electrostatic energy in the regenerative capacitor 12 without being completely lost by the resistance in the circuit during the resonance phenomenon. The energy stored in the regenerative capacitor 12 is converted into an AC voltage by the inverter 13 and used as an input of the DC power source 2.
[0007]
  In the above description, it is assumed that the load is a discharge tube, and the discharge impedance is assumed to be a constant value. However, in a general discharge load, the discharge impedance changes rapidly with the discharge operation. In a pulse power supply device used in a gas decomposition apparatus in which the discharge load 9 discharges into the gas for the purpose of decomposing the gas, the gas concentration unevenness, impurity contamination, gas flow rate, The discharge impedance is likely to change due to various factors such as changes with time and deposits.
[0008]
  When the impedance is reduced, the R component is lowered as described above, so that energy that is not consumed by the discharge load increases and the discharge state becomes non-uniform or arc-like discharge easily occurs. It also has an adverse effect on device life, such as deterioration.
[0009]
  When the impedance becomes high, the R component becomes large and sufficient current does not flow through the load, so that energy is not consumed by the discharge load during the operation cycle of the switch, and the discharge state becomes uneven as efficiency decreases. Adverse effects. That is, as shown in FIG. 10, the efficiency decreases even when the impedance is increased or decreased with respect to the optimum impedance determined from the operation period of the switch and the charging voltage to the capacitor.
[0010]
[Problems to be solved by the invention]
  Since the conventional pulse power supply is configured as described above, in order to regenerate surplus power that was not consumed by the discharge load, equipment such as a transformer and an inverter is required, and the apparatus becomes large and heavy, and the cost is high. there were. Further, since regeneration is performed through many devices such as a DC power supply, a transformer, and an inverter, power loss generated in the circuit is large, and efficient operation is difficult.
[0011]
  In addition, it is important to reduce the amount of surplus power generated before the regeneration of surplus power, but this surplus power amount is used when the impedance change of the discharge load is large or the load type is changed variously. There are no means for minimizing surplus power in response to fluctuations in these loads.
[0012]
  The present invention has been made to solve the above-described problems. The amount of surplus power generated is adjusted to the minimum according to the magnitude of the discharge load, and an inverter or transformer is not used. An object of the present invention is to provide a pulse power supply device that can regenerate surplus power.
[0013]
[Means for Solving the Problems]
  The pulse power supply device according to the present invention comprises:DC power supply,
A first reactor connected in series to one end of the output of the DC power supply;
A first diode connected in series to the first reactor;
A capacitor connected in series to the first diode and charged with a predetermined polarity from the DC power supply;
A switch connected between a connection point of the first diode and the capacitor and the other end of the output of the DC power supply and supplying a voltage of the capacitor charged to a predetermined polarity to a load;
A second diode that limits the direction of current between the capacitor and the load to one direction;
A comparator that outputs a signal when a voltage generated in the capacitor has a polarity different from the predetermined polarity and exceeds a predetermined value;
A one-shot multi that outputs a signal for opening the switch for a predetermined time by the signal output from the comparatorIt is equipped with.
[0014]
Also,DC variable voltage power supply,
A first reactor connected in series to one end of the output of the DC variable voltage power supply;
A first diode connected in series to the first reactor;
A capacitor connected in series to the first diode and charged with a predetermined polarity from the DC variable voltage power source;
A switch connected between the connection point of the first diode and the capacitor and the other end of the output of the DC variable voltage power supply to supply the voltage of the capacitor charged to a predetermined polarity to a load; ,
A second diode that limits the direction of current between the capacitor and the load to one direction;
When the voltage generated in the capacitor has a polarity different from the predetermined polarity, an average value processor that outputs a signal obtained by averaging the voltage;
Based on the signal output from the average value processor, the output voltage of the DC variable voltage power supply is adjusted.A voltage adjusting means is provided.
[0015]
Also,DC power supply,
A first reactor connected in series to one end of the output of the DC power supply;
A first diode connected in series to the first reactor;
A capacitor connected in series to the first diode and charged with a predetermined polarity from the DC power supply;
A switch connected between a connection point of the first diode and the capacitor and the other end of the output of the DC power supply and supplying a voltage of the capacitor charged to a predetermined polarity to a load;
A second diode that limits the direction of current between the capacitor and the load to one direction;
When the voltage generated in the capacitor has a polarity different from the predetermined polarity, an average value processor that outputs a signal obtained by averaging the voltage;
Based on the signal output from the average value processor, the voltage of the capacitor is minimized so that the voltage of the switch is minimized.A cycle adjusting means for adjusting the operation cycle is provided.
[0016]
Also,A comparator that outputs a signal when the voltage generated in the capacitor is different from a predetermined polarity and exceeds a predetermined value;
One-shot multi that outputs a signal for opening the switch for a predetermined time by the signal output from the comparator,
When the voltage generated in the capacitor has a polarity different from the predetermined polarity, an average value processor that outputs a signal obtained by averaging the voltage;
Voltage adjusting means for adjusting the output voltage of the DC variable voltage power supply based on the signal output from the average value processor.It is provided.
[0017]
Also,A comparator that outputs a signal when the voltage generated in the capacitor is different from a predetermined polarity and exceeds a predetermined value;
One-shot multi that outputs a signal for opening the switch for a predetermined time by the signal output from the comparator,
When the voltage generated in the capacitor has a polarity different from the predetermined polarity, an average value processor that outputs a signal obtained by averaging the voltage;
Period adjustment means for adjusting the operation period of the switch in a direction in which the voltage generated in the capacitor is minimized based on the signal output from the average value processor.WithThe
[0018]
The capacitor voltage isCapacitorA time average value of a voltage having a polarity different from the polarity of the charged voltage is used.
[0019]
DETAILED DESCRIPTION OF THE INVENTION
Embodiment 1 FIG.
  A pulse power supply device according to Embodiment 1 of the present invention will be described below with reference to the circuit diagram of FIG. 1 and the waveform chart of FIG. In the following drawings, the same or corresponding parts as those in the prior art are denoted by the same reference numerals, and detailed description thereof is omitted.
[0020]
  In FIG. 1, 2 is a DC power source, and 9 is a discharge tube as a load. Although not shown, the DC power supply 2 may be supplied from an AC power supply as in the conventional case. 22 is a first reactor connected in series to one end of the output of the DC power supply 2, 23 is a first diode connected in series to the first reactor 22, 24 is a capacitor connected in series to the first diode 23, 4 Is a switch connected between the connection point of the first diode 23 and the capacitor 24 and the other end of the DC power supply, and 26 is a third reactor connected in parallel to the discharge tube 9.
[0021]
  28 is a resistor connected to the side of the capacitor 24 where the switch 4 is not connected, 29 is a second diode connected in parallel with the resistor 28, and 30 is a second reactor inserted between the resistor 28 and the discharge tube 9. is there. Reference numerals 31 and 32 form resistors for detecting the voltage of the capacitor 24 by resistors. Reference numeral 33 denotes a pulse generator that operates at a predetermined repetition frequency. Reference numeral 34 denotes a comparator that compares the reference voltage source 37 that can be adjusted to an arbitrary predetermined value (Vmin) with the detected voltage of the capacitor 4. Reference numeral 35 denotes a comparator 34. This is a one-shot multi that generates a pulse for a predetermined period Toff with respect to the output change. Although not shown, an isolator is inserted in a connection line between the resistors 31 and 32 of the voltage divider and the comparator 34, and the DC level of the common line need not be considered.
[0022]
  An AND gate 36 inputs the pulse generator 33 and the one-shot multi 35 and gives an on / off pattern of the switch 4.
[0023]
  FIG. 2 shows from the top the current waveform of the discharge tube 9, the voltage waveform of the capacitor 24, the output waveform of the one-shot multi 35, and the output waveform of the pulse generator 33.
[0024]
  Next, the operation will be described with reference to FIGS.
[0025]
  In FIG. 1, the output of the comparator 34 is first turned on, and the output pulse of the pulse generator 33 is periodically output as it is from the AND gate 36. The description starts from the point where the switch 4 is turned on. When the switch 4 is on, a current flows from the DC power source 2 through the first reactor 22, the first diode 23, and the switch 4. Next, when the switch 4 is turned off, a surge voltage is generated at both ends of the first reactor 22 due to a rapid change in current. This voltage is added to the voltage of the DC power supply 2. Since the switch 4 is off, a current flows from the DC power source 2 through a path passing through the first reactor 22, the first diode 23, the capacitor 24, the resistor 28, the second reactor 30, and the third reactor 26. Charging is performed to a voltage exceeding the voltage of the power supply. If the circuit loss is ignored, the capacitor 24 is charged to nearly 2E with the output voltage of the DC power supply 2 as E. As a result, the first diode 23 is reverse biased and turned off. Since there is no other discharge path for the capacitor 24, the charging voltage is maintained.
[0026]
  FIG. 2 shows an operation chart in the case where the reverse voltage of the capacitor 24 is increased during the repetitive operation and only one operation is paused.
[0027]
  Next, when the switch 4 is turned on in accordance with the output signal A of the pulse generator 33 in the above state, the capacitor 24, the switch4Since the path of the discharge tube 9, the second reactor 30, and the second diode 29 is closed and the second diode 29 is forward biased, most of the voltage charged in the capacitor 24 is applied to the discharge tube 9. . Since the inductance of the third reactor 26 is extremely larger than the impedance during discharge of the discharge tube 9, the current flowing through the third reactor 26 can be ignored.
[0028]
  The impedance of the discharge tube 9 rapidly decreases with voltage application, and a discharge current flows through the path. The circuit operation at this time is an LCR series resonance circuit. In FIG. 1, L is the inductance value of the second reactor 30, C is the capacitance value of the capacitor 24, and R is the resistance value of the discharge tube 9. As is well known, in the LCR series resonance circuit, the value of R is 2 · (L / C).^1/2If larger, the voltage of the capacitor 24 is such that the discharge current in one direction gradually approaches zero, and all electrostatic energy is consumed in the discharge tube 9.
[0029]
  The value of R is 2 · (L / C)^1/2 When the voltage is smaller, the voltage of the capacitor 24 remains as a voltage having a reverse polarity in the capacitor 24 after the discharge by the discharge current in one direction, and the energy not consumed in the discharge tube 9 remains. This reverse polarity voltage causes a reverse current to flow, but the second diode 29 blocks a reverse discharge current that continuously flows, and the reverse polarity voltage of the capacitor 24 is maintained. This reverse polarity voltage is slowly discharged through the path of the capacitor 24, the resistor 28, the second reactor 30, the third reactor 26, and the switch 4, and returns to zero. Thereafter, the switch 4 is turned off and the next charging operation is started. Such an operation is repeated.
[0030]
  In the above operation, the voltage of the capacitor 24 is detected by being divided by the resistors 31 and 32 and is input to the comparator 34. The comparator 34 compares the negative level reference value Vmin with the detected voltage value of the capacitor 24. When the capacitor voltage falls below the reference value, the comparator 34 outputs an "L" level as shown in FIG. In response to the fall, the one-shot multi 35 outputs an “L” level pulse for a predetermined (Toff) period. As a result, the ON signal C to the switch 4 is interrupted for a period of Toff according to the logic of the AND gate 36. As a result, when the impedance of the discharge tube 9 is lowered too much and the reverse polarity voltage of the capacitor 24 becomes too large, the recovery period of the discharge impedance can be provided for the necessary minimum value without stopping the operation.
[0031]
  The higher the repetitive operating frequency or the higher the operating voltage, the lower the impedance during discharge of the discharge tube 9 and the longer it takes to recover. Further, in the gas decomposition apparatus described above, the impedance of the load is unstable, and it is difficult to detect the presence or absence of surplus power with high voltage and high frequency, but according to the pulse power supply device of the present invention, The impedance state can be known from the terminal voltage of the capacitor 24 and can be corrected to a stable operating state without completely stopping the apparatus. In order to clarify the gist of the circuit of FIG. 1 and to help understanding thereof, FIG. 3 shows a block diagram of FIG. In FIG. 3, reference numeral 71 denotes a charging means, which includes a DC power source 2, a first reactor 22, and a first diode 23. Reference numeral 72 denotes a diode that limits the current direction between the capacitor 24 and the load 9 to one direction, and reference numeral 73 denotes voltage detection means, which includes the resistors 31 and 32 shown in FIG. 74 is a switch means, which is driven by means 75 for periodically opening and closing. A switch opening means 76 prevents the switch 74 from being closed for a predetermined time by an external signal. Reference numeral 77 denotes charging current bypass means, which corresponds to the resistor 28, the third reactor 26, etc. in FIG. First reactor 22, first diode 23, and switch74Constitutes a series connection of a first reactor, a first diode, and a switch having means for periodically opening and closing. The capacitor 24 and the charging current bypass means 77 constitute a series connection body of a capacitor connected in parallel to the switch 4 and a charging current bypass circuit. The second diode 29 and the diode 72 that limits the direction of current are the same. The 2nd diode 29, the 2nd reactor 30, and the discharge load 9 comprise the serial connection body.
[0032]
  Furthermore, in order to assist the understanding of the present invention, FIG. 4 shows how the efficiency of the pulse power supply device of the present invention changes as the impedance of the discharge load changes. In the figure, 90 indicates the case where the conventional characteristics are fixed, and 91 indicates the apparent characteristics according to the present invention. As described above, the pulse power supply device according to the first embodiment can apparently improve the decrease in efficiency according to the magnitude of the load impedance.
[0033]
Embodiment 2. FIG.
  FIG. 5 shows a circuit of the pulse power supply device according to the second embodiment of the present invention. In FIG. 5, the same reference numerals as those in FIG. 1 denote the same parts. 59 is a discharge tube, but the discharge load whose impedance is unstable will be described. 22 is a first reactor connected in series to one end of the output of the DC power supply 2, 23 is a first diode connected in series to the first reactor 22, 24 is a capacitor connected in series to the first diode 23, 4 Is a switch connected between the connection point of the first diode 23 and the capacitor 24 and the other end of the DC power supply, and 26 is a third reactor connected in parallel to the discharge load 59. 28 is a resistor connected to the side of the capacitor 24 where the switch 4 is not connected, 29 is a second diode connected in parallel with the resistor 28, and 30 is a second reactor inserted between the resistor 28 and the discharge load 59. is there. Reference numerals 31 and 32 form resistors for detecting the voltage of the capacitor 24 by resistors. A pulse generator 33 operates at a predetermined repetition rate.
[0034]
  Reference numeral 42 denotes a DC variable voltage power source, which can output an arbitrary voltage in response to a voltage command from the outside. 47 is a diode connected in parallel to the resistor 32, and 48 is a capacitor.24An average value processor (low-pass filter) that averages the voltage detection signals of 49, 49 is a limiter that limits the output value of the average value processor 48, and 51 is a voltage command circuit that commands the reference value of the output voltage of the DC variable voltage power supply. , 50 are adders that receive the output of the limiter 49 and the command value of the voltage command circuit 51 as inputs, and the output is given as the voltage command value to the DC variable voltage power source 42.
[0035]
  Next, the operation will be described. In the circuit of FIG. 5, the detected voltage of the capacitor 24 is detected only by the diode 47 by the diode 47 and is averaged by the average value processor 48 after being detected by the average value processor 48. The voltage command value of the DC variable voltage power source 42 is corrected. That is, when the state in which the reverse polarity voltage of the capacitor 24 continues to increase, a negative component is added to the output voltage command value of the DC variable voltage power source 42 within the range limited by the limiter 49, so that the voltage command value Decreases in accordance with the magnitude of the reverse polarity voltage of the capacitor 24, and the charging voltage to the capacitor 24 also decreases. Therefore, the voltage applied to the discharge load 59 is also reduced, so that the reduction in discharge impedance is suppressed and the generation of surplus power is suppressed. Although not shown, an isolator is inserted in the connection line between the resistors 31 and 32 of the voltage divider and the average value processor 48 so that it is not necessary to consider the DC level of the common line.
[0036]
  In addition, when the discharge impedance of the load is high and a steep discharge cannot be obtained, the state in which the reverse polarity of the capacitor 24 is reduced continues, and the voltage command of the DC variable voltage power source 42 is within the range limited by the limiter 49. Since the negative component addition to the value decreases, the voltage command value increases. Therefore, the voltage applied to the discharge load 59 is increased, and the action of promoting the reduction of the discharge impedance is performed. By these actions, the applied voltage is automatically adjusted according to the change in the discharge impedance of the discharge load 59, and the stable and optimal operating state is corrected. The averaging circuit 48, the limiter 49, the voltage command circuit 51, and the adder 50 are voltage control circuits (voltage adjusting means).
[0037]
Embodiment 3 FIG.
  FIG. 6 shows a circuit of a pulse power supply device according to Embodiment 3 of the present invention. 6 is obtained by applying the invention of the second embodiment to the circuit of FIG. 1 of the first embodiment. In FIG. 6, the same reference numerals as those in FIG. 59 is a discharge tube, but the discharge load whose impedance is unstable will be described. 22 is a first reactor connected in series to one end of the output of the DC power supply 2, 23 is a first diode connected in series to the first reactor 22, 24 is a capacitor connected in series to the first diode 23, 4 Is a switch connected between the connection point of the first diode 23 and the capacitor 24 and the other end of the DC power supply, and 26 is a third reactor connected in parallel to the discharge load 59.
[0038]
  28 is a resistor connected to the side of the capacitor 24 where the switch 4 is not connected, 29 is a second diode connected in parallel with the resistor 28, and 30 is a second reactor inserted between the resistor 28 and the discharge load 59. is there. Reference numerals 31 and 32 form resistors for detecting the voltage of the capacitor 24 by resistors. Reference numeral 33 denotes a pulse generator that operates at a predetermined repetition frequency. Reference numeral 34 denotes a comparator that compares the reference voltage source 37 that can be adjusted to an arbitrary predetermined value (Vmin) with the detected voltage of the capacitor 4. Reference numeral 35 denotes a comparator 34. This is a one-shot multi that generates a pulse for a predetermined period (Toff) with respect to the output change.
[0039]
  Although not shown, an isolator is inserted in the connection between the resistors 31 and 32 of the voltage divider and the comparator 34, and there is no need to consider the DC level of the common line. An AND gate 36 receives the pulse generator 33 and the one-shot multi 35 as inputs and controls the on / off of the switch 4. Reference numeral 42 denotes a DC variable voltage power source, which can output an arbitrary voltage in response to a voltage command from the outside. 47 is a diode connected in parallel with the resistor 32, 48 is an average value processor (low-pass filter) that averages the voltage detection signal of the capacitor 4, 49 is a limiter that limits the output value of the average value processor 48, and 51 is DC variable. A voltage command circuit for commanding a reference value of the output voltage of the voltage power source, 50 is an adder, which receives the output of the limiter 49 and the command value of the voltage command circuit 51 as input, and the output is a voltage command to the DC variable voltage power source 42 Is given as a value.
[0040]
  Next, the operation will be described. In the circuit of FIG. 6, the detected voltage of the capacitor 24 is detected only by the diode 47 by the diode 47 and is averaged by the average value processor 48 after being detected by the average value processor 48. The voltage command value of the DC variable voltage power source 42 is corrected. That is, when the state in which the reverse polarity voltage of the capacitor 24 continues to increase, a negative component is added to the output voltage command value of the DC variable voltage power source 42 within the range limited by the limiter 49, so that the voltage command value Decreases in accordance with the magnitude of the reverse polarity voltage of the capacitor 24, and the charging voltage to the capacitor 24 also decreases. Therefore, the voltage applied to the discharge load 59 is also reduced, so that the reduction in discharge impedance is suppressed and the generation of surplus power is suppressed. Although not shown, an isolator is inserted in the connection line between the resistors 31 and 32 of the voltage divider and the average value processor 48 so that it is not necessary to consider the DC level of the common line.
[0041]
  In addition, when the discharge impedance of the load is high and a steep discharge cannot be obtained, the state in which the reverse polarity of the capacitor 24 is reduced continues, and the voltage command of the DC variable voltage power source 42 is within the range limited by the limiter 49. Since the negative component addition to the value decreases, the voltage command value increases. Therefore, the voltage applied to the discharge load 59 is increased, and the action of promoting the reduction of the discharge impedance is performed. By these actions, the applied voltage is automatically adjusted according to the change in the discharge impedance of the discharge load 59, and the stable and optimal operating state is corrected.
[0042]
Embodiment 4 FIG.
  FIG. 7 shows a circuit of a pulse power supply according to the third embodiment of the present invention. In the figure, 61 is a frequency command circuit for instructing the base value of the frequency of the pulse generated by the pulse generator 33, and 62 is a V / F conversion circuit for converting the output voltage of the adder 50 into a frequency. Other parts are the same as those in FIG. 5 of the third embodiment.
[0043]
  The operation of the control circuit in FIG. 7 will be described. One of the inputs of the adder 50 is obtained by taking out only the reverse polarity component of the detection voltage of the capacitor 24 and averaging the same as in the second embodiment, and the other is the command value of the frequency command circuit 61. The output pulse frequency of the pulse generator 33 is obtained from the addition result. When the discharge impedance of the load 9 decreases, the amount of reverse polarity correction increases, the amount added to the frequency command value decreases, and the operating frequency is lowered. This prolongs the discharge impedance recovery period and increases the discharge impedance. On the other hand, when the discharge impedance is too high, the amount of correction of the reverse polarity is reduced, the amount added to the frequency command value increases, acts in the direction of increasing the operating frequency, and lowers the discharge impedance.
[0044]
  The averaging circuit 48, the frequency command circuit 61, the adder 50, and the V / F conversion circuit 62 are period control circuits (period adjustment means). In this embodiment, the same effect as in the second and third embodiments is obtained by correcting the repetitive operating frequency (cycle) in a direction to cancel the change in the reverse polarity voltage of the capacitor 24. Although the description of this embodiment has been made using an example applied to the circuit of FIG. 1 of the first embodiment, a circuit for adjusting the period using the voltage of the capacitor as in the second embodiment is singly used. Even if it uses, an effect is acquired.
[0045]
【The invention's effect】
  As described above, the pulse power supply device according to the present invention detects a voltage having a polarity different from the predetermined polarity generated in the capacitor, and when this voltage exceeds a predetermined value, the switch means is set for a predetermined time. Since the switch opening means is provided so as not to be closed during the period, when the impedance of the discharge load is lowered, the impedance can be increased by temporarily stopping the discharge, and the stable discharge can be maintained.
[0046]
  In addition, it has voltage adjusting means that detects the voltage of the opposite polarity to the predetermined polarity generated in the capacitor and adjusts the charging voltage of the charging means in the direction that minimizes this voltage, so the impedance of the load changes. Even when the discharge state changes, it can continue to operate stably without completely stopping the device, and it minimizes the energy that is not consumed by the load, resulting in high energy-saving energy performance. .
[0047]
  In addition, it has period adjustment means that detects the voltage of the polarity opposite to the predetermined polarity generated in the capacitor and adjusts the operation interval of the switch means in the direction that minimizes this voltage. Even when the state changes, the system can continue to operate stably without completely stopping the equipment, and the energy that is not consumed by the load must be minimized to achieve high energy-saving energy. Can do.
[0048]
  Further, a series connection body of a first reactor connected between output terminals of the DC power supply device, a first diode, and a switch having intermittent drive means, a capacitor connected in parallel to the switch, and a charging current bypass circuit A pulse power supply device having a series connection body, a second diode connected in parallel to a charging current bypass circuit, a second reactor, and a discharge load, wherein the voltage of the capacitor is charged by the DC power supply apparatus Since the switch is provided with a switch opening means for preventing the switch from closing for a predetermined time when the predetermined voltage is different from the polarity of the voltage and exceeds a predetermined value, the load impedance is Even if the discharge state changes due to a change, it is possible to continue the stable operation continuously without stopping the device completely. The not spent energy minimized, it is possible to have high energy efficiency.
[0049]
  Also,DCThe power supply device is a DC variable voltage power supply device that can control the magnitude of the output voltage by an external signal, and the voltage of the capacitor is different from the polarity of the voltage charged by the DC variable voltage power supply device, and is determined in advance. Since it has a voltage control circuit that controls the output voltage of the DC variable voltage power supply device according to the magnitude when it exceeds a predetermined magnitude, even when the load impedance changes and the discharge state changes, Continuously stable operation can be continued without completely stopping the apparatus, energy not consumed by the load can be minimized, and energy saving energy can be improved.
[0050]
  Further, the intermittent drive means can control the cycle of intermittently switching the switch by an external signal, and the voltage of the capacitor is different from the polarity of the voltage charged by the DC power supply device and has a predetermined predetermined magnitude. Since the cycle control circuit that controls the cycle of the intermittent drive means according to the size of the device is provided, the device can be completely stopped even when the impedance of the load changes and the discharge state changes. Therefore, it is possible to continue the stable operation continuously, and to minimize energy that is not consumed by the load and to achieve high energy saving energy performance.
[0051]
  Also, the capacitorVoltage is chargingSince the time average value of the voltage having a polarity different from the polarity of the generated voltage is used, the energy that is not consumed by the load can be minimized and the energy saving energy can be improved.
[Brief description of the drawings]
FIG. 1 is a diagram showing a configuration of a pulse power supply device according to an embodiment of the present invention.
FIG. 2 is an operation timing chart of the circuit of FIG.
FIG. 3 is a block diagram of the circuit of FIG.
FIG. 4 is a characteristic diagram of the circuit of FIG.
FIG. 5 is a diagram showing a configuration of a pulse power supply device according to a second embodiment of the present invention.
FIG. 6 is a diagram showing a configuration of a pulse power supply device according to a third embodiment of the present invention.
FIG. 7 is a diagram showing a configuration of a pulse power supply device according to a fourth embodiment of the present invention.
FIG. 8 is a block diagram showing a conventional pulse power supply.
9 is a time chart for explaining the operation of the pulse power supply of FIG. 7;
10 is a characteristic diagram for explaining the operation efficiency of the pulse power supply of FIG.
[Explanation of symbols]
2 DC power supply device, 3 capacitor, 4 switch, 7 saturable reactor, 8 peaking capacitor, 9 discharge tube (discharge load), 22 first reactor, 23 first diode, 24 capacitor, 26 third reactor, 28 Resistor 29 Second diode 30 Second reactor 31, 32 Voltage detection resistor 33 Pulse generator 34 Comparator 35 One shot multi 36 And gate 37 Reference power source 42 DC variable voltage power source 61 Frequency command circuit, 62 V / F conversion circuit, 71 charging means, 72 diode for limiting current direction, 74 switching means, 75 means for periodically opening and closing, 76 switch opening means, 77 charging current bypass means.

Claims (5)

DC power supply,
A first reactor connected in series to one end of the output of the DC power supply;
A first diode connected in series to the first reactor;
A capacitor connected in series to the first diode and charged with a predetermined polarity from the DC power supply;
A connection point between the capacitor and the first diode, said connected between the other end of the output of the DC power source, a switch for supplying power to the load voltage of the capacitor charged to a predetermined polarity,
A second diode that limits the direction of current between the capacitor and the load to one direction;
A comparator that outputs a signal when a voltage generated in the capacitor has a polarity different from the predetermined polarity and exceeds a predetermined value ;
A pulse power supply device comprising: a one-shot multi that outputs a signal for opening the switch for a predetermined time according to the signal output from the comparator . DC variable voltage power supply,
A first reactor connected in series to one end of the output of the DC variable voltage power supply;
A first diode connected in series to the first reactor;
A capacitor connected in series to the first diode and charged with a predetermined polarity from the DC variable voltage power source;
A switch connected between the connection point of the first diode and the capacitor and the other end of the output of the DC variable voltage power supply to supply the voltage of the capacitor charged to a predetermined polarity to a load; ,
A second diode that limits the direction of current between the capacitor and the load to one direction;
When the voltage generated in the capacitor has a polarity different from the predetermined polarity, an average value processor that outputs a signal obtained by averaging the voltage;
A pulse power supply apparatus comprising voltage adjusting means for adjusting an output voltage of the DC variable voltage power supply based on the signal output from the average value processor . DC power supply,
A first reactor connected in series to one end of the output of the DC power supply;
A first diode connected in series to the first reactor;
A capacitor connected in series to the first diode and charged with a predetermined polarity from the DC power supply;
A connection point between the capacitor and the first diode, said connected between the other end of the output of the DC power source, a switch for supplying power to the load voltage of the capacitor charged to a predetermined polarity,
A second diode that limits the direction of current between the capacitor and the load to one direction;
When the voltage generated in the capacitor has a polarity different from the predetermined polarity, an average value processor that outputs a signal obtained by averaging the voltage;
A pulse power supply device comprising period adjusting means for adjusting an operation period of the switch in a direction in which a voltage generated in the capacitor is minimized based on the signal output from the average value processor . A comparator that outputs a signal when a voltage generated in the capacitor is different from a predetermined polarity and exceeds a predetermined value;
  The one-shot multi that outputs a signal that opens the switch for a predetermined time by the signal output from the comparator is provided. The pulse power supply device described. Voltage of the capacitor, the pulse power supply device according to any of the preceding claims 2, characterized in that a time average value of the polarity different from the polarity of the voltage of the voltage charged in the capacitor.

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