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JP3755341B2 - Substrate crimping apparatus, crimping control method, and liquid crystal device manufacturing method - Google Patents
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JP3755341B2 - Substrate crimping apparatus, crimping control method, and liquid crystal device manufacturing method - Google Patents

Substrate crimping apparatus, crimping control method, and liquid crystal device manufacturing method Download PDF

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JP3755341B2
JP3755341B2 JP16130499A JP16130499A JP3755341B2 JP 3755341 B2 JP3755341 B2 JP 3755341B2 JP 16130499 A JP16130499 A JP 16130499A JP 16130499 A JP16130499 A JP 16130499A JP 3755341 B2 JP3755341 B2 JP 3755341B2
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pressure
substrate
substrates
pair
liquid crystal
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JP2000347198A (en
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賢一 本田
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Seiko Epson Corp
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Seiko Epson Corp
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Description

【0001】
【発明の属する技術分野】
本発明は、基板圧着装置、圧着制御方法及び液晶装置の製造方法に関する。
【0002】
【従来の技術】
液晶装置の製造工程における基板どうしの貼り合わせ技術では、液晶層の厚みであるセルギャップを面内で均一にすることが重要な課題である。このセルギャップは、液晶装置の基本的な光学上の数値であるリタデーションΔn・dを決定する重要なファクターであり、光透過率、コントラスト比、応答速度などの表示特性に影響を与える。
【0003】
セルギャップを面内で均一にするには、表面の平坦なガラス基本的を用いることが前提であるが、セルギャップ自体が数μmという薄さであるため、スペーサを基板間に分散して配置するという方法がとられている。すなわち、2枚の基板をシール材を用いて貼り合わせる際に、基板圧着装置による加熱加圧によってスペーサの高さや直径寸法にセルギャップを規定するようにしている。
【0004】
従来の基板圧着装置としては、図6に示すようなものがある。同図に示すように、この基板圧着装置1を用いることにより、一対の基板2、3をシール材5で貼り合わせることができる。なお、両基板2、3間には、多数のスペーサ4が分散され、両基板の対向する面の周縁部どうしの間にシール材5が介在されている。この基板圧着装置1は、これら基板2、3を重ねて載置する基台11と、重ねた基板2、3を全面で押圧する加圧板12を備えた加圧手段13と、を備えている。
【0005】
【発明が解決しようとする課題】
しかしながら、上記したような基板圧着装置1では、基板の貼り合わせ及び加圧の際に、基台11と加圧板12とがわずかに角度をなしていたり、基板2、3の貼り合わせ状態により、加圧むらが発生し易い。基板圧着装置1において加圧むらが発生すると、この加圧むらが液晶パネル側に転写されて、セルギャップがパネル面内で不均一になり、液晶装置の表示品位を低下させるという問題が発生する。
【0006】
また、基板が可撓性を有するプラスチックフィルムでなる場合には、加圧むらが発生し易くなるため、精度の高い基板圧着装置の実現が望まれている。
【0007】
そこで、本発明は、基板面内における加圧むらが生じるのを抑制でき基板圧着装置及び圧着制御方法を得ることを目的としている。また、本発明は、面内で均一なセルギャップを有する、光学特性の良好な液晶装置を製造することを他の目的としている。
【0008】
【課題を解決するための手段】
本発明は、シール材を介して相対向するように重ねられた、対をなす基板を両面側から挟んで該基板どうしを圧着させる基板圧着装置であって、対をなす基板を所定の圧力で押圧して粗加圧する第1加圧手段と、前記第1加圧手段が前記対をなす基板を押圧する領域内で部分毎に異なる圧力で押圧が可能な第2加圧手段と、前記第1加圧手段で押圧された前記対をなす基板の面内圧力分布を検出する検出手段と、前記検出手段での検出情報に基づいて前記第2加圧手段における、前記第1加圧手段が押圧した前記領域内の各部分に対応する駆動部分へ圧力補正制御信号を出力して前記対をなす基板を精密加圧させる圧力制御手段と、を備えることを特徴とする。
【0009】
本発明のこのような構成によれば、第1加圧手段で所定の圧力で押圧して粗加圧された対をなす基板どうしは、シール材により貼り合わされる。そして、検出手段で基板面の面内圧力分布が検出され、この検出情報に基づいて圧力制御手段は前記第1加圧手段が押圧した前記領域内の、第2加圧手段の基板を押圧する複数の部分での圧力調整を行なうように圧力補正制御信号を出力して精密加圧させる。このため、第1加圧手段で圧着された基板面内の圧力分布を均一にすることが可能となる。この基板圧着装置を用いて液晶表示パネルの貼り合わせ工程を行なえば、基板面内のセルギャップが均一で、光学特性の良好な液晶装置を製造することが可能となる。
【0010】
また、本発明は、検出手段が、圧力/電圧変換素子を面内領域に複数備える圧力分布検出シートであることが好ましい。
【0011】
このような構成の本発明によれば、基板面内の圧力分布を複数の圧力/電圧変換素子での電圧データから得ることが可能となる。なお、圧力/電圧変換素子としては、例えばピエゾ素子などを用いることができる。
【0012】
さらに、本発明は、基板が、複数対が重ねられた状態で配置されることが好ましい。
【0013】
このような構成の本発明によれば、一度の加圧工程で複数対の基板の貼り合わせを行なうことができ、基板圧着の効率化を図ることができる。
【0014】
また、本発明は、圧力制御手段が、前記検出手段での検出情報に基づいて前記第2加圧手段における、前記領域内の各部分に対応する駆動部分へ圧力補正制御信号を出力することが好ましい。
【0015】
このような構成の本発明によれば、第2加圧手段が圧力制御手段からの圧力補正制御信号に基づいて複数部分で任意の圧力で基板押圧を行なうことで、第1加圧手段と第2加圧手段とで基板面へ与える圧力の均一化を図ることができる。
【0016】
さらに、本発明は、対をなす基板が、前記第1加圧手段の押圧面と前記第2加圧手段の押圧面とで挟まれることが好ましい。
【0017】
このような構成の本発明によれば、対をなす基板の一方の側面側が第1加圧手段の押圧面で所定の圧力で押圧される状態を保持しつつ、対をなす基板の他方の側面側が第2加圧手段の押圧面で微調整を加えることができる。このように、第1の押圧と第2の押圧とが行なわれる面を別にしたことにより、第1加圧手段と第2加圧手段の構成を簡単にすることができる。
【0018】
また、本発明は、第2加圧手段の前記押圧面に、圧力に応じて伸縮する、複数のバルーンが配置されていることが好ましい。このような構成の本発明によれば、第2加圧手段の押圧面に配置された複数のバルーンがそれぞれ任意の圧力に応じて伸縮することにより、このバルーンが当接する基板面部分の圧力を微調整することが可能となり、基板面内での圧力分布の均一化を図ることができる。
【0019】
本発明は、圧力制御方法であって、シール材を介して相対向するように重ねられた、対をなす基板を所定の圧力で押圧して粗加圧した状態で、前記対をなす基板の面内圧力分布を検出して前記面内圧力分布を均一化するように前記対をなす基板面の、前記粗加圧された領域内に対して、圧力補正制御信号に基づき複数部分で独立の押圧を行ない精密加圧させることを特徴とする。
【0020】
本発明のこのような構成によれば、所定の圧力で押圧して粗加圧された対をなす基板どうしは、シール材により貼り合わされる。そして、この状態で基板面の面内圧力分布が検出され、この検出結果に基づいて、対をなす基板の、前記粗加圧された領域内に対して複数の部分での独立の精密加圧を行なって圧力調整を行なうことができる。このため、所定の圧力で押圧された基板面内の圧力分布を是正して均一にすることが可能となる。この圧着制御方法を用いて液晶表示パネルの貼り合わせ工程を行なえば、基板面内のセルギャップが均一で、光学特性の良好な液晶装置を製造することが可能となる。
【0021】
本発明は、液晶装置の製造方法であって、対向予定面にそれぞれ表示用電極が形成された基板どうをシール材を介して相対向するように重ねて、両側から基板面を所定の圧力で押圧して粗加圧すると共に、前記粗加圧している状態で前記基板面の面内圧力分布を検出して検出情報に基づく圧力補正制御信号により前記基板面を、前記粗加圧された領域内で部分毎に精密加圧して、前記対をなす基板どうしを貼り合わせ、その後、対をなす前記基板と前記シール材とで形成される間隙に液晶を封止することを特徴とする。
【0022】
本発明のこのような構成によれば、所定の圧力での粗加圧が行なわれることにより、対をなす基板どうしは、シール材により貼り合わされる。そして、この状態で基板面の面内圧力分布が検出され、この検出情報に基づく圧力補正制御信号により、対をなす基板を前記粗加圧された領域内の複数の部分での独立の加圧を行なう精密加圧を行なうことで圧力調整を行なうことができる。このため、精密加圧を行なうことで、粗加圧にて押圧された基板面内の圧力分布を是正して均一にすることが可能となる。この液晶装置の製造方法を用いて液晶表示パネルの貼り合わせ工程を行なえば、基板面内のセルギャップが均一で、光学特性の良好な液晶装置を製造することが可能となる。
【0023】
また、本発明は、粗加圧は第1加圧手段で行ない、前記精密加圧は別途設けられた第2加圧手段で行なうことが好ましい。
【0024】
このような構成の本発明によれば、粗加圧と精密加圧とがことなる加圧手段で行なわれるため、圧力を調整するための機能を第2加圧手段のみに備えるようにすることで、加圧手段の構成を簡単にすることができる。
【0025】
さらに、第2加圧手段が、前記基板面に対して複数箇所で任意の圧力で押圧を行なうことが好ましい。このような構成とすることにより、基板面の複数部分での任意の圧力調整が可能となる。
【0026】
また、本発明は、対をなす基板どうしの間に、スペーサが散布されて分散配置されていることが好ましい。
【0027】
このような構成の本発明によれば、基板どうしの間に分散配置されたスペーサが基板押圧に伴い基板どうしが近接し過ぎるのを防止でき、セルギャップが基板面内で均一な液晶装置を実現することができる。このため、液晶装置の光学特性を良好にする効果がある。
【0028】
【発明の実施の形態】
以下、本発明に係る基板圧着装置、圧着制御方法及び液晶装置の製造方法の詳細を図面に示す実施形態に基づいて説明する。
【0029】
まず、基板圧着装置の構成を説明する。図1は、本実施形態の基板圧着装置の側面説明図である。本実施形態の基板圧着装置10は、基台11と、基台11の上方に所定間隔を介して平行をなすように、支持部材12を介して基台11側に固定された対向板13と、を備えている。これら基台11と対向板13との間に、シール材21を介して相対向するように重ねられた、対をなすガラス基板22、23を配置するようになっている。なお、これらのガラス基板22、23は、対向予定面にそれぞれ所定パターンの表示用電極が形成され、表示領域全体に渡って配向膜が形成されている。また、一方のガラス基板22には、表示領域(シール材で囲まれた領域に略相当する)内にスペーサ24が散布により配置されている。
【0030】
対向板13の下面には、配置するガラス基板の面積よりも大きい当接面積をもつ平坦な当接面を下部に有する、第1加圧手段としての第1バルーン14が設けられている。この第1バルーン14は、図示しないエアーポンプ並びに圧力調整弁で所定の内圧になるように設定されており、エアーポンプを駆動することにより、下方に向けて膨出するようになっている。
【0031】
また、基板11の上面には、圧力微調整用の微細な第2バルーン15が多数、均等に配設された、第2加圧手段としての精密加圧部16が設けられている。この精密加圧部16は、ステージ面17に図3に示すような配列で、図2に示すような凹部17Aが形成されている。この凹部17Aには、第2バルーン15が収納されている。また、凹部17Aの底部には、開口17Bが開設され、この開口17Bに、第2バルーン15に連通するパイプ15Aが挿通されている。なお、このパイプ15Aは、図示しない圧力微調整装置に接続されている。
【0032】
また、本実施形態の基板圧着装置10は、圧力検出手段としての圧力分布検出シート17と、この圧力分布検出シート17で得られた検出データが入力される圧力制御部18と、を備えている。圧力分布検出シート17は、具体的には樹脂でなるシート本体に所定の配列で多数のピエゾ素子が内蔵され、各ピエゾ素子が配置された位置の圧力を電圧に変化して、圧力制御部18へ出力されるようになっている。圧力制御部18は、演算処理装置を備えてなり、図4のブロック図に示すように、圧力分布検出シート17から入力された電圧データD1に基づいて圧力分布検出シート17の各ピエゾ素子が配置された位置での圧力分布に対応する電圧分布から圧力補正データを算出して精密加圧部16へ補正制御データD2を出力したり、上記した第1バルーン14へ圧力調整データD3を出力ようになっている。なお、補正制御データD2は、精密加圧部16のどの位置の第2バルーン15の圧力をどの程度に設定するかの情報を含んでいる。これに伴って、上記した図示しない圧力微調整装置が適宜駆動されるようになっている。
【0033】
次に、本実施形態の基板圧着装置10を用いて、ガラス基板22、23の貼り合わせる方法を図5に示すフローチャートに基づいて説明する。
【0034】
まず、ガラス基板22、23をシール材21を介して重ねた状態で精密加圧部16の上に載置する。次いで、ガラス基板23の上に全面に亙って圧力分布検出シート17を載置する。この状態で、図示しないスイッチをオンにすることにより、圧力制御部18から圧力調整データD3が第1バルーン14へ出力されて、第1バルーン14が加圧されて所定の圧力になるまで膨らむ(第1バルーン加圧ステップS1)。この第1バルーン14の容積の増大に伴いガラス基板22、23が所定の圧力で圧迫される。
【0035】
次に、圧力分布検出シート17によりガラス基板23の基板面での圧力分布を検出を開始する(ステップS2)。この圧力分布検出シート17からの圧力分布に対応する電圧データD1に基づいて圧力制御部18で補正制御データD2を作成して精密加圧部16へ供給して補正制御を行なう(ステップS3)。
【0036】
その後、精密加圧部16では、補正制御データD2に基づいて所定のアドレスに位置する第2バルーン15の圧力調整を図示しない圧力微調整装置で行ない精密加圧を行なう(ステップS4)。
【0037】
そして、圧力分布が均一になったか否かを圧力制御部18で判定する(ステップS5)。その結果、圧力分布が均一と判定された場合はシール材21が硬化する時間が経過した後、圧着工程を終了する。また、圧力分布が不均一と判定された場合は、再度、補正制御のステップS3に戻る。
【0038】
このようにして圧着されたガラス基板22、23は、セルギャップも均一に貼り合わされた状態となる。その後、液晶封止工程を行なうことにより、液晶装置を製造することができる。このようにして製造された液晶装置は、基板どうしを押圧する圧力が均一であるため、セルギャップが均一となる。このため、本実施形態で製造された液晶装置は、光学特性が良好となる。
【0039】
以上、本実施形態を説明したが、本発明はこれに限定されるものではなく、構成の要旨に付随する各種の変更が可能である。例えば上記した実施形態では、ガラス基板を用いたが、樹脂フィルムでなる可撓性を有する基板を用いて良好な貼り合わせを行なうことができる。また、本実施形態では、第1加圧手段として第1バルーン14を用いたが、ピストンシリンダ駆動による加圧手段を用いてもよい。同様に、第2加圧手段として第2バルーン15を用いたが、微細な押圧面を有するピストンシリンダ駆動手段を用いても勿論よい。さらに、本実施形態では、圧力検出手段として、ピエゾ素子を備えた圧力分布検出シート17を用いたが、各種の圧力検出手段を適用することができる。また、本実施形態では、対をなすガラス基板22、23を一対だけ加圧するようにしたが、複数対の基板を重ねて加圧処理することも可能であり、このようにすることで効率的な加圧処理を行なうことができる。この場合、複数対の中間に圧力分布検出シート17を配置することが好ましい。
【図面の簡単な説明】
【図1】本発明に係る基板圧着装置の実施形態を示す側面説明図である。
【図2】本実施形態の精密加圧部を示す要部断面図である。
【図3】本実施形態の精密加圧部の平面図である。
【図4】本実施形態の基板圧着装置を示すブロック図である。
【図5】本発明に係る圧着制御方法の実施形態を示すフローチャートである。
【図6】従来の基板圧着装置を示す側面説明図である。
【符号の説明】
10 基板圧着装置
11 基台
13 対向板
14 第1バルーン
15 第2バルーン
16 精密加圧部
17 圧力分布検出シート
18 圧力制御部
21 シ−ル材
22、23 ガラス基板
24 スペーサ
[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a substrate pressure bonding apparatus, a pressure bonding control method, and a liquid crystal device manufacturing method.
[0002]
[Prior art]
In the bonding technique between substrates in the manufacturing process of the liquid crystal device, it is an important issue to make the cell gap, which is the thickness of the liquid crystal layer, in-plane uniform. This cell gap is an important factor that determines retardation Δn · d, which is a basic optical value of the liquid crystal device, and affects display characteristics such as light transmittance, contrast ratio, and response speed.
[0003]
In order to make the cell gap uniform in the plane, it is premised that glass with a flat surface is used, but since the cell gap itself is as thin as several μm, spacers are distributed between the substrates. The method of doing is taken. That is, when two substrates are bonded together using a sealing material, the cell gap is defined in the height and diameter dimension of the spacer by heating and pressing with a substrate crimping apparatus.
[0004]
A conventional substrate crimping apparatus is as shown in FIG. As shown in the figure, by using this substrate crimping apparatus 1, a pair of substrates 2 and 3 can be bonded together with a sealing material 5. A large number of spacers 4 are dispersed between the substrates 2 and 3, and a sealing material 5 is interposed between the peripheral portions of the opposing surfaces of the substrates. The substrate crimping apparatus 1 includes a base 11 on which the substrates 2 and 3 are stacked and a pressing unit 13 including a pressing plate 12 that presses the stacked substrates 2 and 3 over the entire surface. .
[0005]
[Problems to be solved by the invention]
However, in the substrate crimping apparatus 1 as described above, when the substrates are bonded and pressed, the base 11 and the pressure plate 12 are slightly inclined, or depending on the bonded state of the substrates 2 and 3, Pressure unevenness is likely to occur. If uneven pressure is generated in the substrate crimping apparatus 1, the uneven pressure is transferred to the liquid crystal panel side, and the cell gap becomes non-uniform in the panel surface, which causes a problem of reducing the display quality of the liquid crystal device. .
[0006]
Further, when the substrate is made of a flexible plastic film, it is easy for pressure unevenness to occur. Therefore, it is desired to realize a highly accurate substrate crimping apparatus.
[0007]
Accordingly, an object of the present invention is to obtain a substrate pressure bonding apparatus and a pressure bonding control method that can suppress the occurrence of pressure unevenness in the substrate surface. Another object of the present invention is to produce a liquid crystal device having a uniform cell gap in the plane and having good optical characteristics.
[0008]
[Means for Solving the Problems]
The present invention relates to a substrate crimping apparatus that presses a pair of substrates that are stacked to face each other via a sealing material and sandwiches the pair of substrates from both sides. A first pressurizing unit that presses and roughly pressurizes; a second pressurizing unit capable of pressing with a different pressure for each part within a region where the first pressurizing unit presses the pair of substrates; Detecting means for detecting an in-plane pressure distribution of the pair of substrates pressed by one pressurizing means; and the first pressurizing means in the second pressurizing means based on detection information from the detecting means ; Pressure control means for outputting a pressure correction control signal to a driving part corresponding to each part in the pressed area to precisely pressurize the paired substrates .
[0009]
According to such a configuration of the present invention, the pair of substrates that are pressed roughly at a predetermined pressure by the first pressurizing means are bonded to each other by the sealing material. Then, the in-plane pressure distribution on the substrate surface is detected by the detecting means, and the pressure control means presses the substrate of the second pressurizing means in the region pressed by the first pressurizing means based on this detection information. A pressure correction control signal is output so as to perform pressure adjustment at a plurality of portions, and precise pressurization is performed . For this reason, it becomes possible to make uniform the pressure distribution in the board | substrate surface crimped | bonded by the 1st pressurization means. If the bonding process of the liquid crystal display panel is performed using this substrate pressure bonding device, a liquid crystal device having a uniform cell gap in the substrate surface and good optical characteristics can be manufactured.
[0010]
In the present invention, it is preferable that the detection means is a pressure distribution detection sheet including a plurality of pressure / voltage conversion elements in an in-plane region.
[0011]
According to the present invention having such a configuration, the pressure distribution in the substrate surface can be obtained from voltage data obtained by a plurality of pressure / voltage conversion elements. In addition, as a pressure / voltage conversion element, a piezoelectric element etc. can be used, for example.
[0012]
Furthermore, in the present invention, it is preferable that the substrates are arranged in a state where a plurality of pairs are stacked.
[0013]
According to the present invention having such a configuration, it is possible to bond a plurality of pairs of substrates in a single pressurizing step, and to increase the efficiency of substrate crimping.
[0014]
Further, according to the present invention, the pressure control means may output a pressure correction control signal to a driving part corresponding to each part in the region in the second pressurizing means based on detection information in the detecting means. preferable.
[0015]
According to the present invention having such a configuration, the second pressurizing unit presses the substrate with an arbitrary pressure at a plurality of portions based on the pressure correction control signal from the pressure control unit, so that the first pressurizing unit and the first pressurizing unit The pressure applied to the substrate surface by the two pressurizing means can be made uniform.
[0016]
Further, in the present invention, it is preferable that the paired substrates are sandwiched between the pressing surface of the first pressing unit and the pressing surface of the second pressing unit.
[0017]
According to the present invention having such a configuration, the other side surface of the pair of substrates is maintained while maintaining the state in which one side surface of the pair of substrates is pressed with a predetermined pressure by the pressing surface of the first pressurizing means. Fine adjustment can be made on the side of the pressing surface of the second pressurizing means. Thus, by separately providing the surfaces on which the first pressing and the second pressing are performed, the configuration of the first pressurizing unit and the second pressurizing unit can be simplified.
[0018]
In the present invention, it is preferable that a plurality of balloons that expand and contract according to pressure are arranged on the pressing surface of the second pressurizing unit. According to the present invention having such a configuration, the plurality of balloons arranged on the pressing surface of the second pressurizing means expand and contract in accordance with an arbitrary pressure, respectively, thereby reducing the pressure of the substrate surface portion with which the balloon abuts. Fine adjustment is possible, and the pressure distribution in the substrate surface can be made uniform.
[0019]
The present invention is a pressure control method, wherein a pair of substrates stacked so as to face each other through a sealing material is pressed with a predetermined pressure and roughly pressed , and the pair of substrates is formed. Independently in a plurality of portions based on the pressure correction control signal , within the roughly pressurized region of the pair of substrate surfaces that form a pair so as to detect the in-plane pressure distribution and make the in-plane pressure distribution uniform. and characterized in that pressing a row gastric pressure precision pressure.
[0020]
According to such a configuration of the present invention, the substrate to each other to form a pressed crude pressure applied to the pair at a predetermined pressure, they are bonded by a sealing material. In this state, the in-plane pressure distribution of the substrate surface is detected, and based on the detection result, independent precision pressurization at a plurality of portions with respect to the roughly pressurized region of the paired substrates. To adjust the pressure. For this reason, it becomes possible to correct and make uniform the pressure distribution in the substrate surface pressed with a predetermined pressure. If the bonding process of the liquid crystal display panel is performed using this pressure bonding control method, a liquid crystal device having a uniform cell gap in the substrate surface and good optical characteristics can be manufactured.
[0021]
The present invention relates to a method of manufacturing a liquid crystal device, wherein substrates each having a display electrode formed on a surface to be opposed are overlapped so as to face each other with a sealant, and the substrate surface is applied from both sides at a predetermined pressure. the pressing and applying crude wise, the said substrate surface by based rather pressure correction control signal to detect and detection information plane pressure distribution of the substrate surface in a state in which the pressure crude pressurized and pressurized the rough pressurized In the region, each part is precisely pressurized, the paired substrates are bonded together, and then the liquid crystal is sealed in a gap formed by the paired substrate and the sealing material.
[0022]
According to such a configuration of the present invention, the pair of substrates are bonded together by the sealing material by performing the rough pressurization with a predetermined pressure. In this state, the in-plane pressure distribution of the substrate surface is detected, and the pressure correction control signal based on the detected information is used to independently press the paired substrates at a plurality of portions in the roughly pressurized region. The pressure can be adjusted by performing precision pressurization. For this reason, by performing the precision pressurization, it becomes possible to correct the pressure distribution in the substrate surface pressed by the coarse pressurization and make it uniform. If the liquid crystal display panel is bonded using this method for manufacturing a liquid crystal device, a liquid crystal device having a uniform cell gap in the substrate surface and good optical characteristics can be manufactured.
[0023]
In the present invention, it is preferable that the rough pressurization is performed by the first pressurizing unit, and the precise pressurization is performed by the second pressurizing unit provided separately.
[0024]
According to the present invention having such a configuration, since the coarse pressurization and the precise pressurization are performed by different pressurizing means, only the second pressurizing means has a function for adjusting the pressure. Thus, the configuration of the pressurizing means can be simplified.
[0025]
Furthermore, it is preferable that the second pressurizing unit presses the substrate surface at an arbitrary pressure at a plurality of locations. By adopting such a configuration, it is possible to adjust an arbitrary pressure in a plurality of portions of the substrate surface.
[0026]
In the present invention, it is preferable that spacers are dispersed and arranged between the pair of substrates.
[0027]
According to the present invention having such a configuration, the spacers distributed between the substrates can prevent the substrates from being too close to each other when the substrates are pressed, and a liquid crystal device with a uniform cell gap in the substrate surface can be realized. can do. This has the effect of improving the optical characteristics of the liquid crystal device.
[0028]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, details of a substrate pressure bonding apparatus, a pressure bonding control method, and a liquid crystal device manufacturing method according to the present invention will be described based on embodiments shown in the drawings.
[0029]
First, the configuration of the substrate crimping apparatus will be described. FIG. 1 is an explanatory side view of the substrate crimping apparatus according to the present embodiment. The substrate crimping apparatus 10 of the present embodiment includes a base 11 and a counter plate 13 fixed to the base 11 side via a support member 12 so as to be parallel to the base 11 above the base 11 with a predetermined interval. It is equipped with. Between the base 11 and the counter plate 13, a pair of glass substrates 22 and 23 are arranged so as to be opposed to each other with a sealing material 21 therebetween. Each of these glass substrates 22 and 23 has a predetermined pattern of display electrodes formed on the opposite surfaces, and an alignment film is formed over the entire display region. On one glass substrate 22, spacers 24 are arranged in a display area (substantially corresponding to an area surrounded by a sealing material) by spraying.
[0030]
On the lower surface of the counter plate 13, a first balloon 14 is provided as a first pressurizing means having a flat contact surface having a contact area larger than the area of the glass substrate to be disposed at the lower part. The first balloon 14 is set to have a predetermined internal pressure by an air pump and a pressure adjusting valve (not shown), and is bulged downward by driving the air pump.
[0031]
Further, on the upper surface of the substrate 11, a precision pressurizing unit 16 as a second pressurizing unit is provided, in which a large number of fine second balloons 15 for fine pressure adjustment are arranged uniformly. The precision pressurizing unit 16 has an arrangement as shown in FIG. 3 on the stage surface 17 and a recess 17A as shown in FIG. The second balloon 15 is accommodated in the recess 17A. An opening 17B is opened at the bottom of the recess 17A, and a pipe 15A communicating with the second balloon 15 is inserted into the opening 17B. The pipe 15A is connected to a pressure fine adjustment device (not shown).
[0032]
Moreover, the board | substrate crimping | compression-bonding apparatus 10 of this embodiment is provided with the pressure distribution detection sheet 17 as a pressure detection means, and the pressure control part 18 into which the detection data obtained by this pressure distribution detection sheet 17 are input. . Specifically, the pressure distribution detection sheet 17 includes a large number of piezo elements in a predetermined arrangement in a resin sheet body, and changes the pressure at the position where each piezo element is disposed to a voltage, thereby controlling the pressure control unit 18. To be output. The pressure control unit 18 includes an arithmetic processing unit, and each piezoelectric element of the pressure distribution detection sheet 17 is arranged based on the voltage data D1 input from the pressure distribution detection sheet 17 as shown in the block diagram of FIG. The pressure correction data is calculated from the voltage distribution corresponding to the pressure distribution at the position, and the correction control data D2 is output to the precision pressurizing unit 16, or the pressure adjustment data D3 is output to the first balloon 14. It has become. The correction control data D2 includes information on how much the pressure of the second balloon 15 at which position of the precision pressurizing unit 16 is set. Along with this, the above-described pressure fine adjustment device (not shown) is appropriately driven.
[0033]
Next, a method for bonding the glass substrates 22 and 23 using the substrate crimping apparatus 10 of the present embodiment will be described based on the flowchart shown in FIG.
[0034]
First, the glass substrates 22 and 23 are placed on the precision pressurizing unit 16 in a state where the glass substrates 22 and 23 are overlapped via the sealing material 21. Next, the pressure distribution detection sheet 17 is placed on the entire surface of the glass substrate 23. In this state, when a switch (not shown) is turned on, pressure adjustment data D3 is output from the pressure control unit 18 to the first balloon 14, and the first balloon 14 is pressurized and inflated until a predetermined pressure is reached ( First balloon pressurization step S1). As the volume of the first balloon 14 increases, the glass substrates 22 and 23 are pressed with a predetermined pressure.
[0035]
Next, detection of the pressure distribution on the substrate surface of the glass substrate 23 is started by the pressure distribution detection sheet 17 (step S2). Based on the voltage data D1 corresponding to the pressure distribution from the pressure distribution detection sheet 17, the pressure control unit 18 creates correction control data D2 and supplies it to the precision pressurizing unit 16 to perform correction control (step S3).
[0036]
Thereafter, the precision pressurizing unit 16 performs precision pressurization by adjusting the pressure of the second balloon 15 located at a predetermined address based on the correction control data D2 with a pressure fine adjustment device (not shown) (step S4).
[0037]
Then, the pressure control unit 18 determines whether or not the pressure distribution is uniform (step S5). As a result, when it is determined that the pressure distribution is uniform, after the time for the sealing material 21 to cure has elapsed, the crimping process is terminated. When it is determined that the pressure distribution is not uniform, the process returns to step S3 of the correction control again.
[0038]
The glass substrates 22 and 23 thus pressure-bonded are in a state where the cell gap is also uniformly bonded. Then, a liquid crystal device can be manufactured by performing a liquid crystal sealing process. The liquid crystal device manufactured in this way has a uniform cell gap because the pressure for pressing the substrates is uniform. For this reason, the liquid crystal device manufactured in the present embodiment has good optical characteristics.
[0039]
Although the present embodiment has been described above, the present invention is not limited to this, and various modifications accompanying the gist of the configuration are possible. For example, in the above-described embodiment, a glass substrate is used, but good bonding can be performed using a flexible substrate made of a resin film. In the present embodiment, the first balloon 14 is used as the first pressurizing unit, but a pressurizing unit driven by a piston cylinder may be used. Similarly, although the second balloon 15 is used as the second pressurizing means, it is of course possible to use a piston cylinder driving means having a fine pressing surface. Furthermore, in this embodiment, the pressure distribution detection sheet 17 provided with a piezo element is used as the pressure detection means, but various pressure detection means can be applied. Further, in the present embodiment, only a pair of glass substrates 22 and 23 forming a pair is pressurized, but it is possible to perform a pressure treatment by stacking a plurality of pairs of substrates, and this is efficient. Pressure treatment can be performed. In this case, it is preferable to arrange the pressure distribution detection sheets 17 in the middle of a plurality of pairs.
[Brief description of the drawings]
FIG. 1 is an explanatory side view showing an embodiment of a substrate crimping apparatus according to the present invention.
FIG. 2 is a cross-sectional view of a main part showing a precision pressurizing part of the present embodiment.
FIG. 3 is a plan view of a precision pressurizing unit of the present embodiment.
FIG. 4 is a block diagram illustrating a substrate crimping apparatus according to the present embodiment.
FIG. 5 is a flowchart showing an embodiment of a crimping control method according to the present invention.
FIG. 6 is an explanatory side view showing a conventional substrate crimping apparatus.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 10 Board | substrate crimping | compression-bonding apparatus 11 Base 13 Opposite board 14 1st balloon 15 2nd balloon 16 Precision pressurization part 17 Pressure distribution detection sheet 18 Pressure control part 21 Seal material 22, 23 Glass substrate 24 Spacer

Claims (10)

シール材を介して相対向するように重ねられた、対をなす基板を両面側から挟んで該基板どうしを圧着させる基板圧着装置であって、
前記対をなす基板を所定の圧力で押圧して粗加圧する第1加圧手段と、
前記第1加圧手段が前記対をなす基板を押圧する領域内で部分毎に任意の圧力で押圧が可能な第2加圧手段と、
前記第1加圧手段で押圧された前記対をなす基板の面内圧力分布を検出する圧力検出手段と、
前記圧力検出手段での検出情報に基づいて前記第2加圧手段における、前記第1加圧手段が押圧した前記領域内の各部分に対応する駆動部分へ圧力補正制御信号を出力して前記対をなす基板を精密加圧させる圧力制御手段と、
を備えることを特徴とする基板圧着装置。
A substrate crimping device for crimping the substrates by sandwiching a pair of substrates stacked on both sides from each other through a sealing material,
First pressurizing means for pressing the paired substrates with a predetermined pressure to roughly pressurize ;
A second pressurizing unit capable of pressing at an arbitrary pressure for each part within a region where the first pressurizing unit presses the pair of substrates;
Pressure detecting means for detecting an in-plane pressure distribution of the pair of substrates pressed by the first pressurizing means;
Based on the detection information from the pressure detection means, a pressure correction control signal is output to the driving part corresponding to each part in the region pressed by the first pressure means in the second pressure means . Pressure control means for precisely pressurizing the substrate forming
A substrate crimping apparatus comprising:
前記圧力検出手段は、圧力/電圧変換素子を面内領域に複数備える圧力分布検出シートであることを特徴とする請求項1記載の基板圧着装置。 The substrate pressure bonding apparatus according to claim 1, wherein the pressure detection means is a pressure distribution detection sheet including a plurality of pressure / voltage conversion elements in an in-plane region. 前記基板は、複数対が重ねられた状態で配置されることを特徴とする請求項1又は請求項2に記載の基板圧着装置。 The board | substrate crimping | compression-bonding apparatus of Claim 1 or Claim 2 with which the said board | substrate is arrange | positioned in the state in which multiple pairs were piled up. 前記対をなす基板は、前記第1加圧手段の押圧面と前記第2加圧手段の押圧面とで挟まれることを特徴とする請求項1ないし請求項のいずれかに記載の基板圧着装置。The board | substrate crimping | compression-bonding in any one of Claim 1 thru | or 3 with which the board | substrate which makes the said pair is pinched | interposed by the press surface of the said 1st pressurization means, and the press surface of the said 2nd pressurization means. apparatus. 前記第2加圧手段の前記押圧面には、圧力に応じて伸縮する、複数のバルーンが配置されていることを特徴とする請求項記載の基板圧着装置。The board | substrate crimping | compression-bonding apparatus of Claim 4 by which the several balloon which expands-contracts according to a pressure is arrange | positioned at the said press surface of a said 2nd pressurization means. シール材を介して相対向するように重ねられた、対をなす基板を所定の圧力で押圧して粗加圧した状態で、前記対をなす基板の面内圧力分布を検出して前記面内圧力分布を均一化するように前記対をなす基板面の、前記粗加圧された領域内に対して、圧力補正制御信号に基づき複数部分で独立の押圧を行ない精密加圧させることを特徴とする圧着制御方法。The in-plane pressure distribution of the paired substrates is detected in a state where the paired substrates that are stacked so as to face each other through a sealing material are pressed with a predetermined pressure and are roughly pressed. of the substrate surface forming the pair so as to equalize the pressure distribution, the relative roughness pressurized region, that to pressure lines as have precise pressure independent of the pressure at a plurality of portions based on the pressure correction control signal A characteristic crimping control method. 対向予定面にそれぞれ表示用電極が形成された基板どうをシール材を介して相対向するように重ねて、両側から基板面を所定の圧力で押圧して粗加圧すると共に、前記粗加圧している状態で前記基板面の面内圧力分布を検出して検出情報に基づく圧力補正制御信号により前記基板面を、前記粗加圧された領域内で部分毎に精密加圧して、前記対をなす基板どうしを貼り合わせ、その後、対をなす前記基板と前記シール材とで形成される間隙に液晶を封止することを特徴とする液晶装置の製造方法。The substrates with the display electrodes formed on the surfaces to be opposed are stacked so as to face each other through a sealant, and the substrate surface is pressed from both sides with a predetermined pressure to be coarsely pressed. the substrate surface by based rather pressure correction control signal to detect and detection information plane pressure distribution of the substrate surface in a state where there, said pressure precision pressure for each part crude pressurized region, said pair A method for manufacturing a liquid crystal device, comprising: bonding substrates to each other, and then sealing liquid crystal in a gap formed by the pair of substrates and the sealing material. 前記粗加圧は第1加圧手段で行ない、前記精密加圧は第2加圧手段で行なうことを特徴とする請求項記載の液晶装置の製造方法。8. The method of manufacturing a liquid crystal device according to claim 7, wherein the rough pressurization is performed by a first pressurizing unit, and the precise pressurization is performed by a second pressurizing unit. 前記第2加圧手段は、前記基板面に対して複数箇所で任意の圧力で押圧を行なうことを特徴とする請求項記載の液晶装置の製造方法。The method of manufacturing a liquid crystal device according to claim 8, wherein the second pressurizing unit presses the substrate surface at a plurality of locations with arbitrary pressure. 前記対をなす基板どうしの間には、スペーサが散布されて分散配置されることを特徴とする請求項ないし請求項のいずれかに記載の液晶装置の製造方法。Between the substrate to each other forming the pair, the method of manufacturing the liquid crystal device according to any one of claims 7 to 9, characterized in that the spacers are distributed is sprayed.
JP16130499A 1999-06-08 1999-06-08 Substrate crimping apparatus, crimping control method, and liquid crystal device manufacturing method Expired - Fee Related JP3755341B2 (en)

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