JP3755580B2

JP3755580B2 - Container packing body and container buffer

Info

Publication number: JP3755580B2
Application number: JP2000354804A
Authority: JP
Inventors: 一也岡田
Original assignee: Shin Etsu Polymer Co Ltd
Current assignee: Shin Etsu Polymer Co Ltd
Priority date: 2000-11-21
Filing date: 2000-11-21
Publication date: 2006-03-15
Anticipated expiration: 2020-11-21
Also published as: JP2002160769A

Description

【０００１】
【発明の属する技術分野】
本発明は、薄い精密基板や大口径の精密基板の輸送中に発生する精密基板やその収納容器の損傷を低減することのできる容器の梱包体及び容器の緩衝体に関するものである。
【０００２】
【従来の技術】
従来、精密基板収納容器１０を輸送する場合には、図７に示すように、包装箱１の内部下方に第一の緩衝体２３Ａを敷き、この第一の緩衝体２３Ａの複数の収納凹部３０に精密基板収納容器１０を並べて嵌合収納し、包装箱１の内部上方を第二の緩衝体２４Ａで被覆してその複数の収納凹部３０と精密基板収納容器１０の上部とを嵌合し、その後、包装箱１の開いた複数枚のフラップ２をステープラーや粘着テープ等で封緘して梱包し、精密基板収納容器１０を輸送するようにしている。
【０００３】
精密基板収納容器１０は、図８や図９に示すように、有底筒形の容器本体１１と、この容器本体１１に着脱自在に収納され、複数枚のウェーハからなる精密基板Ｗを断面Ｖ字の支持溝１２を介して所定のピッチで整列状態に収納するカセット１３と、容器本体１１の開口面をエンドレスのパッキン１４を介し開閉する蓋体１５と、この蓋体１５の内面に選択的に装着される精密基板抑え１６とから構成されている。また、第一、第二の緩衝体２３Ａ・２４Ａは、厚い発泡スチロール、発泡ポリプロピレン、ポリプロピレンシート等を用いて形成され、精密基板Ｗや精密基板収納容器１０に加わる衝撃を和らげる。
【０００４】
【発明が解決しようとする課題】
従来における第一、第二の緩衝体２３Ａ・２４Ａは、以上のように発泡スチロール等を用いて形成されるので、衝撃の吸収能力を高めるために肉厚が厚くなり、梱包形態が嵩高くなるという大きな問題がある。また、第一、第二の緩衝体２３Ａ・２４Ａは、材料が脆いので、衝撃で細かく砕けて飛散し易く、精密基板Ｗや精密基板収納容器１０を使用するクリーンルームを汚染したり、環境衛生に悪影響を及ぼすおそれがあり、しかも、リユースして使用することも困難である。このような問題を解消する手段として、ＰＰシートを屈曲して第一、第二の緩衝体２３Ａ・２４Ａを形成する方法が提案されている。しかしながら、精密基板Ｗが大型化して精密基板収納容器１０の重量が増すと、外部から加わる衝撃強度も増す傾向にあるので、ＰＰシート製の第一、第二の緩衝体２３Ａ・２４Ａでは、衝撃が集中する部分で容易に破損し易く、衝撃吸収が困難になるおそれが考えられる。
【０００５】
一方、直径２００ｍｍ以上の大型の精密基板Ｗ、あるいは背面が研磨されて厚さが通常の精密基板Ｗの２０％〜７０％と薄く加工された精密基板Ｗをカセット１３に整列収納して精密基板Ｗが水平状態となるよう横置きする場合には、精密基板Ｗはその自重で中央部が撓んでしまう(この点に関し、図１０参照)。特に、直径３００ｍｍ以上の大型の精密基板Ｗや厚さ４００μｍ以下の精密基板Ｗを収納すると、精密基板Ｗの中央部がさらに撓むこととなる。このため、外部から衝撃が加わると、精密基板Ｗが支持溝１２から外れ易く、精密基板Ｗ同士が接触して破損する可能性が少なくない。
【０００６】
本発明は上記に鑑みなされたもので、肉厚が厚くなったり、梱包形態が嵩高くなるのを抑制し、精密基板収納容器の使用場所を汚染したり、環境に悪影響を及ぼすおそれが少なく、リユースして使用することもでき、しかも、衝撃吸収度の低下を解消することのできる容器の梱包体及び容器の緩衝体を提供することを目的としている。
【０００７】
【課題を解決するための手段】
本発明においては、上記課題を達成するため、精密基板収納用の容器を収納する包装箱と、容器に加わる衝撃を緩和するシートを用いて成形され、容器と包装箱の内部下方との間に介在する第一の緩衝体と、容器に加わる衝撃を緩和するシートを用いて成形され、容器と包装箱の内部上方との間に介在する第二の緩衝体とを含むものであって、
第一、第二の緩衝体を、容器の外側に位置する外周壁と、この外周壁の内側に位置して容器の一端部あるいは他端部と係合する断面略Ｕ字形の内壁と、これら外周壁と内壁の下端部又は上端部同士を略水平に連結する連結壁とから構成し、第一、第二の緩衝体の周囲に凹部と凸部とを交互に形成するとともに、この第一、第二の緩衝体の少なくともいずれか一方の連結壁に、衝撃に伴う歪みを吸収するベローズを容器の周囲を取り囲むよう屈曲形成し、このベローズを凹部と凸部とに沿わせて異なる高さ位置に配置したことを特徴としている。
なお、第一、第二の緩衝体のうち、少なくとも第一の緩衝体における内壁の底板部裏面に、ベローズとは略直角方向に位置するベローズ体を別に設けることができる。
【０００８】
【課題を解決するための手段】
また、本発明においては、上記課題を達成するため、包装箱に精密基板収納用の容器を収納し、これら包装箱と容器との間に、容器に加わる衝撃を緩和する緩衝体を介在し、この緩衝体を容器に加わる衝撃を緩和するシートを用いて成形したものであって、
緩衝体を、包装箱の内部下方と容器との間に介在する第一の緩衝体と、包装箱の内部上方と容器との間に介在する第二の緩衝体とから構成するとともに、これら第一、第二の緩衝体を、容器の外側に位置する外周壁と、この外周壁の内側に位置して容器の一端部あるいは他端部と係合する断面略Ｕ字形の内壁と、これら外周壁と内壁の下端部又は上端部同士を略水平に連結する連結壁とから構成し、第一、第二の緩衝体の周囲に凹部と凸部とを交互に形成し、この第一、第二の緩衝体の少なくともいずれか一方の連結壁には、衝撃に伴う歪みを吸収するベローズを容器の周囲を取り囲むよう屈曲形成し、このベローズを凹部と凸部とに沿わせて異なる高さ位置に配置したことを特徴としている。
なお、第一、第二の緩衝体のうち、少なくとも第一の緩衝体における内壁の底板部裏面に、ベローズとは略直角方向に位置するベローズ体を別に設けることができる。
【０００９】
ここで、特許請求の範囲における容器は単数複数枚の精密基板を収納するが、この精密基板には、半導体ウェーハの他、マスクガラス、液晶セル、記録媒体等が含まれる。この精密基板の材質や口径サイズについては、シリコン、３″、６″、８″、１２″等、必要に応じて適宜変更することができる。係合は、実質的に理解されなければならず、嵌合 ( 嵌め合わせ ) や密嵌等が含まれる。また、ベローズは、第一の緩衝体だけに設けることもできるし、第二の緩衝体だけに設けることもできる。好ましくは、第一、第二の緩衝体の両方にベローズを設けるのが良い。さらに、内壁は、断面Ｕ字やコ字状に形成することもできるし、おおよそ断面Ｕ字やコ字状に形成することも可能である。
【００１０】
【発明の実施の形態】
以下、図面を参照して本発明の好ましい実施形態を説明すると、本実施形態における容器の梱包体及び容器の緩衝体は、図１ないし図３に示すように、梱包箱からなる包装箱１に精密基板収納容器１０を収納し、これら包装箱１と精密基板収納容器１０の間に、精密基板Ｗや精密基板収納容器１０に加わる衝撃を和らげる緩衝体２０を介在し、この緩衝体２０を、包装箱１の内部下方に収納されて精密基板収納容器１０の下部に係合する第一の緩衝体２３と、包装箱１の上部に配置されて精密基板収納容器１０の上部に係合する第二の緩衝体２４とから構成するとともに、これら第一、第二の緩衝体２３・２４に、衝撃に伴う歪みを吸収する可撓性のベローズ３２をそれぞれ設けるようにしている。
【００１１】
包装箱１は、図１に示すように、ダンボール、ポリプロピレン樹脂、発泡原料等を使用して複数個の精密基板収納容器１０を並べて収納可能な大きさに形成され、上部が開口したフラップ２付きの直方体に形成されている。この包装箱１は、クリーンルーム内に搬入した場合に紙粉や塵埃等の発生が少なく、リサイクル可能なポリプロピレン等からなる樹脂ケースが好適に使用される。
【００１２】
緩衝体２０は、図１に示すように、１．０ｍｍ〜１．２ｍｍ程度の肉厚を有する所定のシートを使用して成形され、周囲に凹部２１と凸部２２とが交互に形成されている。所定のシートとしては、公知の真空成形に使用されるポリプロピレン、ポリエチレン、ポリプロピレンとポリエチレンとのコポリマー、ポリスチレン、ポリブタジエン等があげられるが、静電気による埃の付着を防ぐために上記樹脂に帯電防止性を付与したものでも良く、衝撃に対する耐久性と緩衝性に優れ、しかも、成形が容易なポリプロピレンが最適である。
【００１３】
第一、第二の緩衝体２３・２４は、図２や図３に示すように、精密基板収納容器１０を囲む外周壁２５と、この外周壁２５の内側に位置して容器本体１１の下部又は蓋体１５に係合する断面略Ｕ字又はすり鉢形の内壁２７と、これら外周壁２５と内壁２７の下端部又は上端部同士を略水平に連結する連結壁３１とから構成され、この連結壁３１が水平方向に連続して屈曲形成されてベローズ３２を形成する。第一、第二の緩衝体２３・２４は、図３に示すように、不使用時や保管時には上下に重ねて積層されるので、保管スペースが小さくて良く、リユースするにあたって緩衝体単品を運搬したりするときにも小容積とすることができ、リユースのコストダウンに貢献することができる。
【００１４】
外周壁２５は、強度が増すよう傾斜し、下端部又は上端部からフランジ２６が水平外方向に突出しており、このフランジ２６が包装箱１の内周面下部又は内周面上部に当接して収納時の精密基板収納容器１０のずれを有効に防止する。また、内壁２７は、外周壁２５に隙間を介し傾斜状態で対向する内周壁２８と、この内周壁２８の開口下部又は開口上部を閉塞する基本的には平坦な底板部２９とから構成されている。第一、第二の緩衝体２３・２４それぞれに形成される内周壁２８に囲まれる一又は複数箇所は、精密基板収納容器の一端部又は他端部と係合する収納凹部３０とされる。また、底板部２９の中央部には、収納時の空気抵抗を減少させる貫通孔３３が必要に応じて平面円形等に形成される。この底板部２９には、強度確保のため段差が設けられることが好ましい。
【００１５】
ベローズ３２は、３本の連続した三角形状の屈曲片から形成され、各屈曲片の直角を形成する二辺の長さＬが５ｍｍとされている。各屈曲片の角度αは、６０〜１２０°の範囲から選択されるが、衝撃に対する耐久性と緩衝性の観点から９０°が好ましい。ベローズ３２は、あらゆる方向からの衝撃に耐えるため、精密基板収納容器の周囲を取り囲むよう配置されるとともに、緩衝体２０の周囲に設けられた凹部２１と凸部２２に沿って異なる高さ位置に配置されるとなお好ましい。
なお、ベローズ３２の大きさや屈曲片の本数については、なんら本実施形態に限定されるものではなく、包装箱１や精密基板収納容器１０の大きさ、入れ数等を考慮して適宜選択される。その他の部分については、従来例と同様であるので説明を省略する。
【００１６】
上記構成において、精密基板収納容器１０を輸送する場合には、包装箱１の内部下方に第一の緩衝体２３を敷き、この第一の緩衝体２３の複数の収納凹部３０に精密基板収納容器１０を間隔を開けて並べて係合させ、包装箱１の内部上方を第二の緩衝体２４で被覆してその複数の収納凹部３０と精密基板収納容器１０の上部とを係合し、その後、包装箱１の開いた複数枚のフラップ２をステープラーや粘着テープ等で封緘して梱包すれば、精密基板収納容器１０を固定状態で輸送することができる。
【００１７】
この輸送の際、精密基板収納容器１０は、第一、第二の緩衝体２３・２４に挟持され、この第一、第二の緩衝体２３・２４の周囲には屈曲して衝撃を緩和するベローズ３２が位置するので、破損が著しく抑制防止される。また、緩衝体２０の周囲に凹部２１と凸部２２とが交互に配設されているので、精密基板収納容器１０の稜方向に対する緩衝能力を大幅に向上させることが可能になる。すなわち、精密基板収納容器１０の側面に対しては緩衝体２０の凸部２２のベローズ３２が位置し、精密基板収納容器１０の稜線部に対しては緩衝体２０の凹部２１のベローズ３２が位置するので、輸送時に精密基板収納容器１０に作用する外力を大幅に緩和することができる。
【００１８】
上記構成によれば、ポリプロピレン等の樹脂シートを用いてベローズ３２付きの第一、第二の緩衝体２３・２４を成形するので、衝撃の吸収能力を高めるために肉厚を厚くする必要性がなく、簡易な構成で梱包形態が嵩高くなるのを有効に抑制防止することができる。また、第一、第二の緩衝体２３・２４の材料が発泡スチロールのように脆くないので、衝撃で細かく砕けて飛散することがない。したがって、精密基板Ｗや精密基板収納容器１０を使用するクリーンルームをパーティクル等で汚染したり、環境衛生に悪影響を及ぼすおそれがなく、しかも、リユースして使用することも可能となる。また、繰り返し落下における復元性の著しい向上も期待できる。
【００１９】
また、精密基板Ｗが大型化して精密基板収納容器１０の重量が増し、外部から加わる衝撃強度が増大しても、第一、第二の緩衝体２３・２４が衝撃が集中する部分で容易に破損することがなく、衝撃を容易に吸収することができる。また、直径２００ｍｍ以上の大型の精密基板Ｗ、あるいは背面が研磨されて厚さが通常の精密基板Ｗの２０％〜７０％と薄く加工された精密基板Ｗをカセット１３に整列収納して横置きする場合、精密基板Ｗの中央部が撓むが、外部から加わる衝撃を大幅に緩和できるので、精密基板Ｗが支持溝１２から簡単に外れることがない。よって、精密基板Ｗ同士が接触して破損するおそれを簡単に排除することが可能となる。
【００２０】
さらに、保管時には同種の第一、第二の緩衝体２３・２４を重ねて積層することができるので、保管に必要な占有スペースの縮小が大いに期待できる。さらにまた、異種の第一、第二の緩衝体２３・２４を過誤により重ねて積層しようとしても、凹部２１と凸部２２の寸法が異なるから、適切に重なることがない。よって、異種の緩衝体２０の混入をきわめて有効に防止することができる。
【００２１】
次に、図４や図５は本発明の第２の実施形態を示すもので、この場合には、第一の緩衝体２３における内壁２７の底板部２９の裏面に、ベローズ３２とは略直角方向に位置する別のベローズ体４０を一体的に装着し、水平方向だけではなく、垂直方向に対する耐久性と緩衝性をも向上させるようにしている。
ベローズ体４０は、底板部２９の裏面に熱溶着、凹凸嵌合等の嵌合、接着等の各種方法で外れないよう取り付けられる枠板４１を供え、この枠板４１の裏面には、伸縮可能なベローズ４２が上下方向に向けて装着されている。このベローズ４２は、真空成形、圧空成形、ブロー成形等で形成することができるが、製造方法については特に限定されるものではない。その他の部分については、上記実施形態と同様であるので説明を省略する。
【００２２】
なお、上記実施形態ではトップオープンボックスタイプの精密基板収納容器１０を示したが、フロントオープンボックスタイプの精密基板収納容器１０でも良い。また、精密基板収納容器１０を第一、第二の緩衝体２３・２４に単に挟持させたが、アルミニウム製のシートで包んだ精密基板収納容器１０を第一、第二の緩衝体２３・２４に挟持させても良い。また、第一の緩衝体２３における内壁２７の底板部２９の裏面にベローズ体４０を一体的に装着したが、第二の緩衝体２４における内壁２７の底板部(平坦部)２９の裏面にベローズ体４０を一体的に装着し、緩衝体の周囲に設けたベローズ体の伸縮方向に対して垂直方向に対する耐久性と緩衝性をさらに向上させることもできる。
【００２３】
【実施例】
以下、図５に基づいて本発明に係る容器の梱包体及び容器の緩衝体の実施例を比較例と共に説明する。
実施例
先ず、包装箱１の内部下方に実施形態の第一の緩衝体２３を敷き、この第一の緩衝体２３の内周壁に囲まれた複数の収納凹部３０に精密基板収納容器１０を間隔を開けて並べて係合させ、包装箱１の内部上方を実施形態の第二の緩衝体２４で被覆してその複数の収納凹部３０に精密基板収納容器１０の上部を係合した後、包装箱１の開いた複数枚のフラップ２を封緘して梱包した。
第一、第二の緩衝体２３・２４はポリプロピレン製とし、精密基板収納容器１０には複数枚の精密基板Ｗを整列収納した。
【００２４】
こうして包装箱１に精密基板収納容器１０を梱包したら、日本工業規格の〔包装貨物及び容器の落下試験方法(ＪＩＳＺ０２０２)〕、〔包装貨物の落下試験(ＪＩＳＺ０２００)〕に従い、図５に示すように、地上高さ８０ｃｍの箇所からコンクリート床に向け８方向に落下させ、精密基板収納容器１０と精密基板Ｗの状態を確認し、表１に結果をまとめた。
【００２５】
比較例
第一、第二の緩衝体２３・２４を従来例２３Ａ・２４Ａとし、実施例同様の試験を実施してその結果を表２にまとめた。
【００２６】
【表１】

○：異常なし
×：カセット１３の支持溝１２から精密基板Ｗが外れた
‐：不実施
【００２７】
【表２】

○：異常なし
×：カセット１３の支持溝１２から精密基板Ｗが外れた
‐：不実施
【００２８】
表１、表２の結果から明らかなように、実施例の容器の緩衝体は、比較例の容器の緩衝体に比べ、優れた耐久性、緩衝性、繰り返し落下の復元性を得ることができた。
【００２９】
【発明の効果】
以上のように本発明によれば、肉厚が厚くなったり、梱包形態が嵩高くなるのを有効に抑制し、飛散して容器の使用場所を汚染したり、環境に悪影響を及ぼすおそれを抑制することができるという効果がある。また、シートを用いてベローズ付きの第一、第二の緩衝体を成形するので、衝撃の吸収能力を高めるために肉厚を厚くする必要性がなく、簡易な構成で梱包形態が嵩高くなるのを有効に抑制防止することができる。
また、第一、第二の緩衝体の周囲に凹部と凸部とを交互に形成し、この第一、第二の緩衝体の少なくともいずれか一方の連結壁には、衝撃に伴う歪みを吸収するベローズを容器の周囲を取り囲むよう屈曲形成し、このベローズを凹部と凸部とに沿わせて異なる高さ位置に配置するので、あらゆる方向からの衝撃に耐えることができる。また、第一、第二の緩衝体の材料が発泡スチロールのように脆くないので、衝撃で細かく砕けて飛散することがない。したがって、精密基板や容器を使用するクリーンルームをパーティクル等で汚染したり、環境衛生に悪影響を及ぼすおそれがなく、リユースして使用することもできる。
また、精密基板が大型化して容器の重量が増し、外部から加わる衝撃強度が増大しても、第一、第二の緩衝体がその衝撃の集中する部分で容易に破損することがなく、衝撃を容易に吸収することが可能になる。さらに、直径２００ｍｍ以上の大型の精密基板、あるいは背面が研磨されて厚さが通常の精密基板の２０％〜７０％と薄く加工された精密基板を収納して横置きする場合、精密基板の中央部が撓むが、外部から加わる衝撃を緩和できるので、精密基板同士が接触して破損するおそれを排除することが可能となる。
【図面の簡単な説明】
【図１】本発明に係る容器の梱包体及び容器の緩衝体の実施形態を示す分解斜視図である。
【図２】図１のＩＩ‐ＩＩ線断面図である。
【図３】本発明に係る容器の梱包体及び容器の緩衝体の実施形態における第一、第二の緩衝体の積層状態を示す断面説明図である。
【図４】本発明に係る容器の梱包体及び容器の緩衝体の第２の実施形態を示す分解斜視図である。
【図５】図４の要部断面図である。
【図６】本発明に係る容器の梱包体及び容器の緩衝体の実施例を示す斜視説明図である。
【図７】従来における容器の梱包体及び容器の緩衝体を示す分解斜視図である。
【図８】精密基板収納容器を示す分解斜視図である。
【図９】精密基板収納容器のカセットと精密基板とを示す斜視説明図である。
【図１０】従来における容器の緩衝体の問題点を示す説明図である。
【符号の説明】
１包装箱
１０精密基板収納容器(容器)
１１容器本体
１２支持溝
１３カセット
１５蓋体
２０緩衝体
２１凹部
２２凸部
２３第一の緩衝体
２３Ａ従来の第一の緩衝体
２４第二の緩衝体
２４Ａ従来の第二の緩衝体
２５外周壁
２７内壁
２８内周壁
２９底板部(平坦部)
３１連結壁
３２ベローズ
４０ベローズ体
４１枠板
４２ベローズ
Ｗ精密基板[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a packaging body for a container and a buffer body for a container that can reduce damage to the precision substrate and its storage container that occur during transportation of a thin precision substrate or a large-diameter precision substrate.
[0002]
[Prior art]
Conventionally, when transporting the precision substrate storage container 10, as shown in FIG. 7, a first buffer 23 </ b> A is laid down inside the packaging box 1, and a plurality of storage recesses 30 of the first buffer 23 </ b> A. The precision substrate storage container 10 is lined up and accommodated, and the upper inside of the packaging box 1 is covered with the second buffer body 24A, and the plurality of storage recesses 30 and the upper part of the precision substrate storage container 10 are engaged. Thereafter, the plurality of flaps 2 with the packaging box 1 opened are sealed and packaged with a stapler, an adhesive tape or the like, and the precision substrate storage container 10 is transported.
[0003]
As shown in FIGS. 8 and 9, the precision substrate storage container 10 includes a bottomed cylindrical container body 11 and a container body 11 that is detachably stored in the container body 11. A cassette 13 that is housed in an aligned state at a predetermined pitch via a character-shaped support groove 12, a lid 15 that opens and closes an opening surface of the container body 11 via an endless packing 14, and an inner surface of the lid 15 is selectively used. And a precision substrate holder 16 to be mounted on. The first and second shock absorbers 23A and 24A are formed using thick foamed polystyrene, foamed polypropylene, polypropylene sheet, or the like, so that the impact applied to the precision substrate W and the precision substrate storage container 10 is reduced.
[0004]
[Problems to be solved by the invention]
Since the first and second shock absorbers 23A and 24A in the prior art are formed using foamed polystyrene or the like as described above, the wall thickness is increased to increase the shock absorption capacity, and the packaging form is increased. There is a big problem. The first and second shock absorbers 23A and 24A are fragile, so they are easily crushed and scattered by impact, contaminating the clean room where the precision substrate W and the precision substrate storage container 10 are used, and environmental hygiene. There is a risk of adverse effects, and it is also difficult to reuse and use. As means for solving such a problem, a method is proposed in which the PP sheet is bent to form the first and

second buffer bodies

23A and 24A. However, when the size of the precision substrate W increases and the weight of the precision substrate storage container 10 increases, the impact strength applied from the outside also tends to increase. Therefore, in the first and second shock absorbers 23A and 24A made of PP sheet, the impact strength is increased. It can be easily damaged at the portion where the water is concentrated, and shock absorption may be difficult.
[0005]
On the other hand, a large precision substrate W having a diameter of 200 mm or more, or a precision substrate W whose back surface is polished and thinned to 20% to 70% of a normal precision substrate W is aligned and stored in the cassette 13 and then precision substrate. In the case where the W is placed horizontally so as to be in a horizontal state, the center portion of the precision substrate W is bent by its own weight (refer to FIG. 10 in this regard). In particular, when a large precision substrate W having a diameter of 300 mm or more or a precision substrate W having a thickness of 400 μm or less is accommodated, the central portion of the precision substrate W is further bent. For this reason, when an impact is applied from the outside, the precision substrate W is easily detached from the support groove 12, and there is a high possibility that the precision substrates W come into contact with each other and are damaged.
[0006]
The present invention has been made in view of the above, suppresses the increase in the thickness or bulkiness of the packing form, contaminates the place where the precision substrate storage container is used, and has less risk of adversely affecting the environment. An object of the present invention is to provide a container packaging body and a container buffer body that can be reused and used, and that can eliminate a decrease in shock absorption.
[0007]
[Means for Solving the Problems]
In the present invention, in order to achieve the above-mentioned problems, a packaging box that accommodates a container for storing precision substrates and a sheet that relieves shock applied to the container are molded between the container and the lower interior of the packaging box. It includes a first buffer body that is interposed and a second buffer body that is molded using a sheet that relieves impact applied to the container, and is interposed between the container and the inside of the packaging box,
First, the second buffer body, and the outer peripheral wall located outside the container, and the inner wall of the substantially U-shaped section which engages with one end or the other end of the container is located inside the outer peripheral wall, these The outer peripheral wall and the connecting wall that connects the lower end or the upper end of the inner wall substantially horizontally, and the first and second shock absorbers are alternately formed with recesses and projections, and the first The bellows that absorbs the distortion caused by the impact are bent on at least one of the connection walls of the second buffer so as to surround the periphery of the container, and the bellows has different heights along the concave portion and the convex portion. It is characterized by being placed in a position .
In addition, the bellows body located in a substantially right angle direction with respect to a bellows can be separately provided in the bottom plate part back surface of the inner wall in at least 1st buffer body among 1st, 2nd buffer bodies.
[0008]
[Means for Solving the Problems]
Further, in the present invention, in order to achieve the above-mentioned problems, a container for storing precision substrates is stored in a packaging box, and a buffer body for relaxing the impact applied to the container is interposed between the packaging box and the container, The shock absorber is molded using a sheet that alleviates the impact applied to the container,
The shock absorber is composed of a first shock absorber interposed between the lower inside of the packaging box and the container, and a second shock absorber interposed between the upper upper portion of the packaging box and the container. The first and second buffer bodies are an outer peripheral wall positioned outside the container, an inner wall having a substantially U-shaped cross section that is positioned inside the outer peripheral wall and engages one end or the other end of the container, and the outer periphery. The wall and the lower end of the inner wall or a connecting wall that connects the upper ends of the inner wall substantially horizontally, and the recesses and protrusions are alternately formed around the first and second shock absorbers. At least one of the connection walls of the second buffer body is formed with a bellows that absorbs distortion caused by impact so as to surround the container, and the bellows are positioned at different heights along the concave and convex portions. It is characterized by having been arranged in .
In addition, the bellows body located in a substantially right angle direction with respect to a bellows can be separately provided in the bottom plate part back surface of the inner wall in at least 1st buffer body among 1st, 2nd buffer bodies.
[0009]
Here, the container in the claims contains a single or a plurality of precision substrates, and this precision substrate includes a mask glass, a liquid crystal cell, a recording medium and the like in addition to a semiconductor wafer. The material and the aperture size of the precision substrate can be appropriately changed as necessary, such as silicon, 3 ″, 6 ″, 8 ″, 12 ″. Engagement must be substantially understood and includes fitting ( fitting ) , close fitting, and the like. Further, the bellows can be provided only in the first buffer, or can be provided only in the second buffer. Preferably, a bellows is provided on both the first and second buffer bodies. Furthermore, the inner wall can be formed in a U-shaped or U-shaped cross section, or can be formed in a substantially U-shaped or U-shaped cross section.
[0010]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, a preferred embodiment of the present invention will be described with reference to the drawings. As shown in FIGS. 1 to 3, the packaging body of the container and the buffer body of the container in the present embodiment are packaged in a packaging box 1 composed of a packaging box. The precision substrate storage container 10 is stored, and between the packaging box 1 and the precision substrate storage container 10, a precision substrate W and a buffer body 20 that softens the impact applied to the precision substrate storage container 10 are interposed. A first buffer 23 that is stored in the lower part of the packaging box 1 and engages with the lower part of the precision substrate storage container 10, and a first buffer 23 that is disposed on the upper part of the packaging box 1 and engages with the upper part of the precision substrate storage container 10. The first and second shock absorbers 23 and 24 are each provided with a flexible bellows 32 that absorbs distortion caused by an impact.
[0011]
As shown in FIG. 1, the packaging box 1 is formed in a size capable of storing a plurality of precision substrate storage containers 10 side by side using cardboard, polypropylene resin, foaming raw material, etc., and has a flap 2 having an open top. It is formed in a rectangular parallelepiped. The packaging box 1 is preferably a resin case made of recyclable polypropylene or the like that generates little paper dust or dust when brought into a clean room.
[0012]
As shown in FIG. 1, the buffer body 20 is formed using a predetermined sheet having a thickness of about 1.0 mm to 1.2 mm, and concave portions 21 and convex portions 22 are alternately formed around the buffer body 20. Yes. Examples of the predetermined sheet include polypropylene, polyethylene, a copolymer of polypropylene and polyethylene, polystyrene, polybutadiene, etc., which are used in known vacuum forming, but in order to prevent dust adhesion due to static electricity, the above resin is given antistatic properties. It is possible to use polypropylene that is excellent in durability against shock and shock-absorbing properties, and that is easy to mold.
[0013]
As shown in FIGS. 2 and 3, the first and

second shock absorbers

23, 24 are arranged on the outer peripheral wall 25 surrounding the precision substrate storage container 10, and on the inner side of the outer peripheral wall 25 and below the container body 11. Or it is comprised from the connection wall 31 which connects the lower end part or upper end part of these outer peripheral walls 25 and the inner walls 27 substantially horizontally, and the inner wall 27 of cross-sectional substantially U shape or mortar shape engaged with the cover body 15. The wall 31 is bent continuously in the horizontal direction to form a bellows 32. As shown in FIG. 3, the first and

second buffer bodies

23 and 24 are stacked one on top of the other when not in use or stored, so the storage space can be small and a single buffer body can be transported for reuse. It is possible to reduce the volume when it is used, which can contribute to cost reduction of reuse.
[0014]
The outer peripheral wall 25 is inclined so as to increase the strength, and a flange 26 protrudes from the lower end portion or the upper end portion in the horizontal outer direction, and the flange 26 is in contact with the lower inner peripheral surface or the upper inner peripheral surface of the packaging box 1. The displacement of the precision substrate storage container 10 during storage is effectively prevented. The inner wall 27 is composed of an inner peripheral wall 28 that faces the outer peripheral wall 25 in an inclined state with a gap, and a basically flat bottom plate portion 29 that closes the lower opening or upper opening of the inner peripheral wall 28. Yes. One or a plurality of locations surrounded by the inner peripheral wall 28 formed in each of the first and

second buffer bodies

23 and 24 is a storage recess 30 that engages with one end or the other end of the precision substrate storage container. Further, a through hole 33 for reducing air resistance during storage is formed in the center of the bottom plate portion 29 in a flat circular shape or the like as necessary. The bottom plate portion 29 is preferably provided with a step to ensure strength.
[0015]
The bellows 32 is formed of three continuous triangular bent pieces, and a length L of two sides forming a right angle of each bent piece is 5 mm. The angle α of each bent piece is selected from the range of 60 to 120 °, and 90 ° is preferable from the viewpoint of durability against shock and buffering properties. The bellows 32 is disposed so as to surround the precision substrate storage container in order to withstand impacts from all directions, and at different height positions along the concave portion 21 and the convex portion 22 provided around the buffer body 20. More preferably, it is arranged.
Note that the size of the bellows 32 and the number of bent pieces are not limited to those of the present embodiment, and are appropriately selected in consideration of the size of the packaging box 1 and the precision substrate storage container 10, the number of containers, and the like. . The other parts are the same as those in the conventional example, and thus the description thereof is omitted.
[0016]
In the above configuration, when the precision substrate storage container 10 is transported, the first buffer body 23 is laid on the lower side of the packaging box 1, and the precision substrate storage container is placed in the plurality of storage recesses 30 of the first buffer body 23. 10 are arranged at intervals with each other, and the upper inside of the packaging box 1 is covered with the second buffer body 24 to engage the plurality of storage recesses 30 and the upper part of the precision substrate storage container 10, If the plurality of flaps 2 with the packaging box 1 opened are sealed with a stapler or an adhesive tape and packed, the precision substrate storage container 10 can be transported in a fixed state.
[0017]
During the transportation, the precision substrate storage container 10 is sandwiched between the first and

second buffer bodies

23 and 24, and is bent around the first and

second buffer bodies

23 and 24 to alleviate the impact. Since the bellows 32 is located, breakage is remarkably suppressed and prevented. Further, since the concave portions 21 and the convex portions 22 are alternately arranged around the buffer body 20, the buffer capacity in the ridge direction of the precision substrate storage container 10 can be greatly improved. That is, the bellows 32 of the convex portion 22 of the buffer body 20 is positioned on the side surface of the precision substrate storage container 10, and the bellows 32 of the concave portion 21 of the buffer body 20 is positioned on the ridge line portion of the precision substrate storage container 10. As a result, the external force acting on the precision substrate storage container 10 during transportation can be greatly reduced.
[0018]
According to the above configuration, since the first and

second buffer bodies

23 and 24 with the bellows 32 are molded using a resin sheet such as polypropylene, it is necessary to increase the wall thickness in order to increase the shock absorption capacity. In addition, it is possible to effectively suppress and prevent the packing form from becoming bulky with a simple configuration. Moreover, since the material of the 1st,

2nd buffer bodies

23 and 24 is not brittle like a polystyrene foam, it is not shattered by an impact and does not fly. Accordingly, there is no possibility that the clean room using the precision substrate W or the precision substrate storage container 10 is contaminated with particles or the like, or has an adverse effect on environmental sanitation, and can be reused. In addition, significant improvement in resilience in repeated drops can be expected.
[0019]
In addition, even if the precision substrate W is enlarged and the weight of the precision substrate storage container 10 is increased and the impact strength applied from the outside is increased, the first and

second shock absorbers

23 and 24 can be easily formed at the portion where the impact is concentrated. The impact can be easily absorbed without being damaged. Further, a large precision substrate W having a diameter of 200 mm or more, or a precision substrate W whose back surface is polished and thinned to 20% to 70% of a normal precision substrate W is aligned and stored in the cassette 13 and placed horizontally. In this case, the center portion of the precision substrate W bends, but the impact applied from the outside can be greatly reduced, so that the precision substrate W is not easily detached from the support groove 12. Therefore, it is possible to easily eliminate the possibility that the precision substrates W come into contact with each other and are damaged.
[0020]
Furthermore, since the first and

second buffer bodies

23 and 24 of the same type can be stacked and stacked at the time of storage, a reduction in occupied space necessary for storage can be greatly expected. Furthermore, even if different types of first and

second buffer bodies

23 and 24 are stacked by mistake, the dimensions of the concave portion 21 and the convex portion 22 are different, so that they do not overlap appropriately. Therefore, mixing of different types of buffer bodies 20 can be extremely effectively prevented.
[0021]
Next, FIG. 4 and FIG. 5 show the second embodiment of the present invention. In this case, the back surface of the bottom plate portion 29 of the inner wall 27 in the first buffer 23 is substantially perpendicular to the bellows 32. Another bellows body 40 positioned in the direction is integrally mounted so as to improve not only the horizontal direction but also the durability and buffering performance in the vertical direction.
The bellows body 40 is provided with a frame plate 41 that is attached to the back surface of the bottom plate portion 29 so as not to be removed by various methods such as thermal welding, fitting and uneven fitting, and bonding, and the like. A bellows 42 is mounted in the vertical direction. The bellows 42 can be formed by vacuum forming, pressure forming, blow molding or the like, but the manufacturing method is not particularly limited. Other parts are the same as those in the above embodiment, and thus the description thereof is omitted.
[0022]
Although the top open box type precision substrate storage container 10 is shown in the above embodiment, a front open box type precision substrate storage container 10 may be used. In addition, the precision substrate storage container 10 is simply sandwiched between the first and

second buffer bodies

23 and 24, but the precision substrate storage container 10 wrapped with an aluminum sheet is first and

second buffer bodies

23 and 24. It may be held between. Further, the bellows body 40 is integrally attached to the back surface of the bottom plate portion 29 of the inner wall 27 in the first buffer body 23, but the bellows is mounted on the back surface of the bottom plate portion (flat portion) 29 of the inner wall 27 in the second buffer body 24. The body 40 can be integrally attached, and the durability and buffering property in the direction perpendicular to the expansion and contraction direction of the bellows body provided around the buffer body can be further improved.
[0023]
【Example】
Hereinafter, based on FIG. 5, the Example of the packaging body of the container which concerns on this invention, and the buffer body of a container is demonstrated with a comparative example.
Example First, the first buffer body 23 of the embodiment is laid below the inside of the packaging box 1, and the precision substrate storage container 10 is spaced between the plurality of storage recesses 30 surrounded by the inner peripheral wall of the first buffer body 23. Are opened and lined up to engage with each other, the inside of the packaging box 1 is covered with the second buffer body 24 of the embodiment, and the upper portion of the precision substrate storage container 10 is engaged with the plurality of storage recesses 30. A plurality of open flaps 2 of 1 were sealed and packed.
The first and

second buffer bodies

23 and 24 are made of polypropylene, and a plurality of precision substrates W are aligned and stored in the precision substrate storage container 10.
[0024]
When the precision substrate storage container 10 is packed in the packaging box 1 in this manner, in accordance with Japanese Industrial Standards [Package cargo and container drop test method (JIS Z 0202)] and [Package cargo drop test (JIS Z 0200)], FIG. As shown in Table 1, the substrate was dropped in eight directions from a location with a height of 80 cm to the concrete floor, the state of the precision substrate storage container 10 and the precision substrate W was confirmed, and the results are summarized in Table 1.
[0025]
Comparative Examples First and

second buffer bodies

23 and 24 were used as conventional examples 23A and 24A, and tests similar to those of the examples were performed. The results are summarized in Table 2.
[0026]
[Table 1]

○: No abnormality ×: The precision substrate W has been removed from the support groove 12 of the cassette 13 −: Not implemented
[Table 2]

○: No abnormality ×: The precision substrate W has been removed from the support groove 12 of the cassette 13 −: Not implemented [0028]
As is clear from the results of Tables 1 and 2, the container buffer of the example can obtain superior durability, buffering property, and reversibility of repeated drops compared to the buffer of the container of the comparative example. It was.
[0029]
【The invention's effect】
As described above, according to the present invention, it is possible to effectively suppress an increase in the thickness or bulkiness of the packing form, and to suppress the risk of scattering and contaminating the place where the container is used, or adversely affecting the environment. There is an effect that can be done. In addition, since the first and second buffer bodies with bellows are formed using a sheet, there is no need to increase the wall thickness in order to increase the shock absorbing capacity, and the packaging form becomes bulky with a simple configuration. Can be effectively suppressed and prevented.
In addition, recesses and projections are alternately formed around the first and second shock absorbers, and at least one of the first and second shock absorbers absorbs distortion caused by impact. Since the bellows to be bent is formed so as to surround the periphery of the container, and the bellows is disposed at different height positions along the concave and convex portions, it is possible to withstand impacts from all directions. Moreover, since the material of the 1st and 2nd buffer is not brittle like a polystyrene foam, it is not shattered by an impact and does not fly. Therefore, there is no possibility that a clean room using a precision substrate or container is contaminated with particles or the like and does not adversely affect environmental hygiene, and can be reused.
In addition, even if the precision substrate is enlarged and the weight of the container is increased and the impact strength applied from the outside is increased, the first and second shock absorbers are not easily damaged at the portion where the impact is concentrated. Can be easily absorbed. In addition, when a large precision substrate with a diameter of 200 mm or more or a precision substrate whose back surface is polished and thinned to 20% to 70% of a normal precision substrate is stored and placed horizontally, the center of the precision substrate is used. Although the portion bends, the impact applied from the outside can be mitigated, so that it is possible to eliminate the possibility that the precision substrates come into contact with each other and are damaged.
[Brief description of the drawings]
FIG. 1 is an exploded perspective view showing an embodiment of a container packing body and a container buffer according to the present invention.
FIG. 2 is a cross-sectional view taken along the line II-II in FIG.
FIG. 3 is an explanatory cross-sectional view showing a stacked state of first and second buffer bodies in an embodiment of a container packaging body and a container buffer body according to the present invention.
FIG. 4 is an exploded perspective view showing a second embodiment of a container packing body and a container buffer according to the present invention.
5 is a cross-sectional view of the main part of FIG. 4;
FIG. 6 is a perspective explanatory view showing an embodiment of a container packing body and a container buffer according to the present invention.
FIG. 7 is an exploded perspective view showing a conventional container packing body and a container buffer.
FIG. 8 is an exploded perspective view showing a precision substrate storage container.
FIG. 9 is a perspective explanatory view showing a cassette and a precision substrate of the precision substrate storage container.
FIG. 10 is an explanatory view showing a problem of a conventional container buffer.
[Explanation of symbols]
1 Packaging box 10 Precision substrate storage container (container)
DESCRIPTION OF SYMBOLS 11 Container main body 12 Support groove | channel 13 Cassette 15 Cover body 20 Buffer body 21 Concave part 22 Convex part 23 First buffer body 23A Conventional first buffer body 24 Second buffer body 24A Conventional second buffer body 25 Outer peripheral wall 27 Inner wall 28 Inner peripheral wall 29 Bottom plate part (flat part)
31 connecting wall 32 bellows 40 bellows body 41 frame plate 42 bellows W precision substrate

Claims

A first shock absorber formed between a packaging box for storing a container for storing a precision substrate and a sheet for reducing impact applied to the container, and interposed between the container and the lower part inside the packaging box, and added to the container A container package including a second shock absorber formed between a container and a packaging box formed using a sheet for reducing impact,
First, the second buffer body, and the outer peripheral wall located outside the container, and the inner wall of the substantially U-shaped section which engages with one end or the other end of the container is located inside the outer peripheral wall, these The outer peripheral wall and the connecting wall that connects the lower end or the upper end of the inner wall substantially horizontally, and the first and second shock absorbers are alternately formed with recesses and projections, and the first The bellows that absorbs the distortion caused by the impact are bent on at least one of the connection walls of the second buffer so as to surround the periphery of the container, and the bellows has different heights along the concave portion and the convex portion. A package of containers characterized by being disposed at a position .

The container packaging body according to claim 1, wherein a bellows body positioned substantially perpendicular to the bellows is separately provided on the back surface of the bottom plate portion of the inner wall of at least the first buffer body among the first and second buffer bodies.

A container for storing precision substrates is stored in the packaging box, and a buffer that cushions the impact applied to the container is interposed between the packaging box and the container, and this cushion is used to reduce the impact applied to the container. A shock absorber for a molded container,
The shock absorber is composed of a first shock absorber interposed between the lower inside of the packaging box and the container, and a second shock absorber interposed between the upper upper portion of the packaging box and the container. The first and second buffer bodies are an outer peripheral wall positioned outside the container, an inner wall having a substantially U-shaped cross section that is positioned inside the outer peripheral wall and engages one end or the other end of the container, and the outer periphery. The wall and the lower end of the inner wall or a connecting wall that connects the upper ends of the inner wall substantially horizontally, and the recesses and protrusions are alternately formed around the first and second shock absorbers. At least one of the connection walls of the second buffer body is formed with a bellows that absorbs distortion caused by impact so as to surround the container, and the bellows are positioned at different heights along the concave and convex portions. A shock absorber for a container, characterized in that it is disposed in a container.

The buffer body of the container according to claim 3, wherein a bellows body positioned substantially perpendicular to the bellows is separately provided on the back surface of the bottom plate portion of the inner wall of the first buffer body among the first and second buffer bodies.